Manufacturing method and using method of aluminum alloy cavity cover for ALD coating

Abstract

The invention discloses a manufacturing method and a using method of an aluminum alloy cavity cover for ALD coating, and belongs to the technical field of production and manufacturing of aluminum alloy cavity covers for ALD coating. Comprising the following steps that firstly, spare parts are machined; step 2, cleaning and drying; thirdly, friction stir welding is conducted; 4, heat treatment strengthening; step 5, shaping; step 6, machining; step 7, tapping; 8, water pressure detection; according to the method, welding is conducted in a friction stir welding mode, so that the material density at the welding seam is high, the residual stress is small, it is guaranteed that leakage cannot occur in the using process of the aluminum alloy cavity cover for ALD coating, the reliability of normal work of the aluminum alloy cavity cover for ALD coating under the liquid pressure can be improved, the product repair probability can be effectively reduced, and the cost is reduced; and the production efficiency is improved, and the practical value is high.

Description

Technical Field

[0001] The present invention relates to the technical field of production and manufacturing of aluminum alloy cavity covers for ALD coating, and in particular to a method for manufacturing an aluminum alloy cavity cover for ALD coating and a method for using the same. Background Art

[0002] Aluminum alloy has low density, high specific strength, good electrical conductivity, thermal conductivity, corrosion resistance and weldability, good processing performance, long service life, easy recycling, can achieve the purpose of lightweight and weight reduction, reduce costs, and therefore has a wide range of uses. This aluminum alloy cavity cover for ALD coating uses liquid cooling technology to reduce the temperature of the equipment. Compared with traditional air cooling, liquid cooling technology has higher heat dissipation efficiency and lower noise level. The liquid in the flow channel of the aluminum alloy cavity cover for ALD coating transfers heat from the equipment to the liquid, which can quickly take away the heat and keep the operating temperature of the equipment within a low range. The aluminum alloy cavity cover for ALD coating consists of a substrate and a cover. Due to the thin thickness of the cover, the traditional method usually uses fusion welding to fix the substrate and the cover, but the heat input of fusion welding is large, and the metal material of the cover may be burned. At the same time, the deformation and residual internal stress after welding are large, which is not convenient to use. Summary of the invention

[0003] The object of the present invention is to provide a method for manufacturing an aluminum alloy chamber cover for ALD coating to solve the problems raised in the above background technology.

[0004] In view of the above problems, the technical solution proposed by the present invention is: A method for manufacturing an aluminum alloy chamber cover for ALD coating comprises the following steps: Step 1, parts processing: Process the qualified raw materials according to the drawings, and process the aluminum alloy substrate outline, bottom groove, cover groove, water inlet and outlet, and cover plate of the aluminum alloy cavity cover for ALD coating. During processing, the aluminum alloy substrate workpiece and the cover plate workpiece are adapted, and the processing is completed after the adaptation is qualified; Step 2, cleaning and drying: After the processing of the parts is completed, use compressed air to blow away the debris adhering to the surface of the aluminum alloy substrate workpiece and the cover plate workpiece to ensure that there is no excess residue, and put the aluminum alloy substrate workpiece and the cover plate workpiece into an ultrasonic cleaning tank to clean the oil stains. After cleaning, use a high-pressure water gun to blow clean the tank and the surface of the workpiece, and there is no visible stain, and then transfer to the heating furnace for drying; Step 3, friction stir welding: Assemble the cover plate and the aluminum alloy substrate together, and knock the cover plate into the cover groove to ensure that the cover plate and the aluminum alloy substrate are closely matched, simulate the friction stir welding procedure, confirm that the trajectory and welding parameters are correct, and then start the equipment for friction stir welding to weld the cover plate and the aluminum alloy substrate to form an aluminum alloy cavity cover; Step 4, heat treatment strengthening: send the aluminum alloy cavity cover into a heating furnace, heat it to 540 degrees and keep it for one hour, and then perform oil cooling quenching. After quenching, send the aluminum alloy cavity cover into a heating furnace, heat it to 180 degrees and keep it for 4 to 12 hours, then take it out and naturally cool it to room temperature to complete the aging hardening process. After heating the aging hardened cavity cover to 300 degrees and keep it for one hour, cool it to room temperature in the heating furnace to release the internal stress and prevent the generation of new stress. Step 5: Shaping: After removing stress from the aluminum alloy cavity cover for ALD coating, remove the burrs on the surface, and then shape the top surface of the aluminum alloy substrate and cover plate to ensure that the flatness of the two surfaces is within 1mm; Step 6: Machining: The shaped aluminum alloy cavity cover is machined to machine the remaining features and shapes to facilitate the installation of subsequent functional parts and seals; Step 7, tapping: After the processing is completed, place the aluminum alloy cavity cover on a large platform, use the tapping equipment to process the threaded holes according to the drawing, and blow away the remaining aluminum chips; Step 8, water pressure detection: block the water outlet of the aluminum alloy cavity cover, connect the hydraulic pump to input an appropriate amount of clean water into the water inlet, observe whether there is liquid seepage in the weld area, whether the pressure maintenance requirement can be met within a certain period of time, and determine whether there are any defects in the weld.

[0005] As a preferred technical solution of the present invention, the aluminum alloy cavity cover comprises an aluminum alloy substrate and a cover plate 102, and the cover plate is arranged on the top of the aluminum alloy substrate.

[0006] As a preferred technical solution of the present invention, the aluminum alloy substrate comprises a plate body, a bottom groove is formed on the top of the plate body, and the bottom groove is in a circular structure.

[0007] As a preferred technical solution of the present invention, a water inlet and a water outlet are provided on one side of the plate body, and the water inlet and the water outlet are respectively connected to two ends of the bottom trough.

[0008] As a preferred technical solution of the present invention, a cover groove is opened on the outer side of the top of the bottom groove, and the width of the cover groove is greater than the width of the bottom groove.

[0009] As a preferred technical solution of the present invention, the shape of the cover groove is consistent with that of the cover plate, and the cover plate is arranged inside the cover groove.

[0010] As a preferred technical solution of the present invention, the ultrasonic cleaning tank contains a solvent-type degreasing agent for removing oil stains on the surface of the workpiece.

[0011] As a preferred technical solution of the present invention, before the aluminum alloy substrate and the cover plate are assembled, the oxide film and other impurities in the matching area between the cover plate and the aluminum alloy substrate are removed by mechanical removal, the joint area between the cover plate and the aluminum alloy substrate is wiped clean with a dust-free cloth soaked in alcohol, and then the cover plate is assembled to the aluminum alloy substrate, and then stir friction welding is performed.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: the manufacturing method of the aluminum alloy cavity cover for ALD coating is carried out by stir friction welding, so that the material density at the weld is high and the residual stress is small, ensuring that the aluminum alloy cavity cover for ALD coating will not leak during use, which is beneficial to improving the reliability of the normal operation of the aluminum alloy cavity cover for ALD coating under liquid pressure. The invention can effectively reduce the probability of product repair, reduce costs, improve production efficiency, and has high use value. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A flowchart of a method for manufacturing an aluminum alloy chamber cover for ALD coating disclosed in an embodiment of the present invention; Figure 2 A schematic diagram of the three-dimensional structure of an aluminum alloy substrate disclosed in an embodiment of the present invention; Figure 3 An exploded view of an aluminum alloy substrate disclosed in an embodiment of the present invention; Figure 4 It is a cross-sectional view of the bottom groove disclosed in the embodiment of the present invention.

[0014] In the figure: 101, aluminum alloy substrate; 10101, plate body; 10102, bottom groove; 10103, cover groove; 10104, water inlet; 10105, water outlet; 102, cover plate. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0016] See also Figure 1 - Figure 4 The present invention provides a technical solution: a method for manufacturing an aluminum alloy cavity cover for ALD coating, comprising the following steps: Step 1, parts processing: the qualified raw materials are processed according to the drawings, and the aluminum alloy substrate 101 outline, bottom groove 10102, cover groove 10103, water inlet 10104 and water outlet 10105 of the aluminum alloy cavity cover for ALD coating, and the cover plate 102 are processed. During the processing, the aluminum alloy substrate 101 workpiece and the cover plate 102 workpiece are adapted, and the processing is completed after the adaptation is qualified; Step 2, cleaning and drying: After the processing of the parts is completed, use compressed air to blow away the debris adhering to the surface of the aluminum alloy substrate 101 workpiece and the cover plate 102 workpiece to ensure that there is no excess residue, and put the aluminum alloy substrate 101 workpiece and the cover plate 102 workpiece into an ultrasonic cleaning tank to clean the oil stains. After cleaning, use a high-pressure water gun to blow clean the inside of the tank and the surface of the workpiece, and there is no visible stain, and then transfer to a heating furnace for drying; Step 3, friction stir welding: Assemble the cover plate 102 and the aluminum alloy substrate 101 together, and knock the cover plate 102 into the cover groove 10103, ensure that the cover plate 102 and the aluminum alloy substrate 101 are closely matched, simulate the friction stir welding procedure, confirm that the trajectory and welding parameters are correct, and then start the equipment to perform friction stir welding, and weld the cover plate 102 and the aluminum alloy substrate 101 to form an aluminum alloy cavity cover; Step 4, heat treatment strengthening: send the aluminum alloy cavity cover into a heating furnace, heat it to 540 degrees and keep it for one hour, and then perform oil cooling quenching. After quenching, send the aluminum alloy cavity cover into a heating furnace, heat it to 180 degrees and keep it for 4 to 12 hours, then take it out and naturally cool it to room temperature to complete the aging hardening process. After heating the aging hardened cavity cover to 300 degrees and keep it for one hour, cool it to room temperature in the heating furnace to release the internal stress and prevent the generation of new stress. Step 5: shaping: After removing stress from the aluminum alloy cavity cover of the ALD coating, remove the burrs on the surface, and then shape the top surfaces of the aluminum alloy substrate 101 and the cover plate 102 to ensure that the flatness of the two surfaces is within 1 mm; Step 6: Machining: The shaped aluminum alloy cavity cover is machined to machine the remaining features and shapes to facilitate the installation of subsequent functional parts and seals; Step 7, tapping: After the processing is completed, place the aluminum alloy cavity cover on a large platform, use the tapping equipment to process the threaded holes according to the drawing, and blow away the remaining aluminum chips; Step 8, water pressure detection: block the water outlet 10105 of the aluminum alloy cavity cover, connect the hydraulic pump to input an appropriate amount of clean water into the water inlet 10104, observe whether there is liquid seepage in the weld area, whether the pressure maintenance requirement can be met within a certain period of time, and determine whether there are any defects in the weld.

[0017] As an embodiment of the present invention, further, the aluminum alloy cavity cover includes an aluminum alloy substrate 101 and a cover plate 102 , and the cover plate 102 is arranged on the top of the aluminum alloy substrate 101 .

[0018] As an embodiment of the present invention, further, the aluminum alloy substrate 101 includes a plate body 10101, and a bottom groove 10102 is opened on the top of the plate body 10101. The bottom groove 10102 is in a circular ring structure. The bottom groove 10102 is in a circular ring structure, so that the bottom groove 10102 forms a cooling channel of the aluminum alloy cavity cover, which facilitates the flow of cooling water inside the aluminum alloy cavity cover, thereby improving the heat dissipation performance and meeting the requirements of low-noise heat dissipation.

[0019] As an embodiment of the present invention, further, a water inlet 10104 and a water outlet 10105 are opened on one side of the plate body 10101, and the water inlet 10104 and the water outlet 10105 are respectively connected with the two ends of the bottom groove 10102, so as to facilitate the connection between the external water supply pipeline and the aluminum alloy cavity cover, and facilitate the cooling water to be passed into the interior of the aluminum alloy cavity cover for cooling.

[0020] As an embodiment of the present invention, further, a cover groove 10103 is opened on the outer side of the top of the bottom groove 10102, and the width of the cover groove 10103 is greater than the width of the bottom groove 10102. By opening the cover groove 10103 on the outer side of the top of the bottom groove 10102, and the width of the cover groove 10103 is greater than the width of the bottom groove 10102, it is convenient to set the cover plate 102 inside the cover groove 10103, block the top of the bottom groove 10102, and form a cooling water flow channel.

[0021] As an embodiment of the present invention, further, the shape of the cover groove 10103 is consistent with the cover plate 102, and the cover plate 102 is arranged inside the cover groove 10103. By making the shape of the cover groove 10103 consistent with the cover plate 102, and the cover plate 102 being arranged inside the cover groove 10103, it is convenient to use stir friction welding technology to firmly weld and fix the aluminum alloy cover plate 101 and the cover plate 102.

[0022] As an embodiment of the present invention, further, the ultrasonic cleaning tank contains a solvent-type degreasing agent for removing oil stains on the surface of the workpiece. The ultrasonic cleaning tank contains a solvent-type degreasing agent, which facilitates the effective removal of oil stains on the surface of the workpiece and avoids affecting the subsequent stir friction welding.

[0023] As an embodiment of the present invention, further, before the aluminum alloy substrate 101 and the cover plate 102 are assembled, the oxide film and other impurities in the matching area between the cover plate 102 and the aluminum alloy substrate 101 are removed by mechanical removal, and the joint area between the cover plate 102 and the aluminum alloy substrate 101 is wiped clean with a dust-free cloth soaked in alcohol, and then the cover plate 102 is assembled to the aluminum alloy substrate 101, and then stir friction welding is performed. By using the dust-free cloth soaked in alcohol, the cleanliness of the aluminum alloy substrate 101 and the cover plate 102 can be further improved, and the welding effect can be improved.

Claims

1. A method for manufacturing an aluminum alloy chamber cover for ALD coating, characterized in that: The following steps are involved: Step 1, processing of parts: the raw materials that have passed the inspection are processed according to the drawings, and the aluminum alloy substrate (101) of the aluminum alloy cavity cover for ALD coating, the outline, bottom groove (10102), cover groove (10103), water inlet (10104) and water outlet (10105), and cover plate (102) are processed. During the processing, the aluminum alloy substrate (101) workpiece and the cover plate (102) workpiece are matched, and the processing is completed after the matching is qualified; Step 2, cleaning and drying: After the processing of the parts is completed, compressed air is used to blow away the debris adhering to the surface of the aluminum alloy substrate (101) workpiece and the cover plate (102) workpiece to ensure that no excess remains, and the aluminum alloy substrate (101) workpiece and the cover plate (102) workpiece are placed in an ultrasonic cleaning tank to clean the oil stains. After cleaning, a high-pressure water gun is used to blow clean the inside of the tank and the surface of the workpiece until there is no visible stain, and then the workpiece is transferred to a heating furnace for drying; Step 3, friction stir welding: assemble the cover plate (102) and the aluminum alloy substrate (101) together, and knock the cover plate (102) into the cover groove (10103), ensure that the cover plate (102) and the aluminum alloy substrate (101) are tightly matched, simulate the friction stir welding procedure, confirm that the trajectory and welding parameters are correct, and then start the equipment to perform friction stir welding, and weld the cover plate (102) and the aluminum alloy substrate (101) to form an aluminum alloy cavity cover; Step 4, heat treatment strengthening: send the aluminum alloy cavity cover into a heating furnace, heat it to 540 degrees and keep it for one hour, and then perform oil cooling quenching. After quenching, send the aluminum alloy cavity cover into a heating furnace, heat it to 180 degrees and keep it for 4 to 12 hours, then take it out and naturally cool it to room temperature to complete the aging hardening process. After heating the aging hardened cavity cover to 300 degrees and keep it for one hour, cool it to room temperature in the heating furnace to release the internal stress and prevent the generation of new stress. Step 5: shaping: After removing stress from the aluminum alloy cavity cover of the ALD coating, the burrs on the surface are removed, and then the top surfaces of the aluminum alloy substrate (101) and the cover plate (102) are shaped to ensure that the flatness of the two surfaces is within 1 mm; Step 6: Machining: The shaped aluminum alloy cavity cover is machined to machine the remaining features and shapes to facilitate the installation of subsequent functional parts and seals; Step 7, tapping: After the processing is completed, place the aluminum alloy cavity cover on a large platform, use the tapping equipment to process the threaded holes according to the drawing, and blow away the remaining aluminum chips; Step 8, water pressure detection: block the water outlet (10105) of the aluminum alloy cavity cover, connect the hydraulic pump to input an appropriate amount of clean water into the water inlet (10104), observe whether there is liquid seepage in the weld area, whether the pressure maintenance requirement can be met within a certain period of time, and determine whether there are any defects in the weld.

2. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 1, characterized in that: The aluminum alloy cavity cover comprises an aluminum alloy substrate (101) and a cover plate (102), wherein the cover plate (102) is arranged on the top of the aluminum alloy substrate (101).

3. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 1, characterized in that: The aluminum alloy substrate (101) comprises a plate body (10101), a bottom groove (10102) is provided on the top of the plate body (10101), and the bottom groove (10102) is in a circular structure.

4. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 3, characterized in that: A water inlet (10104) and a water outlet (10105) are provided on one side of the plate body (10101), and the water inlet (10104) and the water outlet (10105) are respectively connected to two ends of the bottom trough (10102).

5. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 4, characterized in that: A cover groove (10103) is provided on the outer side of the top of the bottom groove (10102), and the width of the cover groove (10103) is greater than the width of the bottom groove (10102).

6. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 5, characterized in that: The shape of the cover groove (10103) is consistent with that of the cover plate (102), and the cover plate (102) is arranged inside the cover groove (10103).

7. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 1, characterized in that: The ultrasonic cleaning tank contains a solvent-type degreasing agent for removing oil stains on the surface of the workpiece.

8. The method for manufacturing an aluminum alloy chamber cover for ALD coating according to claim 1, characterized in that: Before assembling the aluminum alloy substrate (101) and the cover plate (102), an oxide film and other impurities in the matching area between the cover plate (102) and the aluminum alloy substrate (101) are removed by mechanical removal, and after wiping the joint area between the cover plate (102) and the aluminum alloy substrate (101) with a dust-free cloth soaked in alcohol, the cover plate (102) is assembled onto the aluminum alloy substrate (101), and then friction stir welding is performed.

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