Tail gas treatment equipment for fluorine gas production

Abstract

The invention belongs to the technical field of fluorine gas production, and particularly relates to a tail gas treatment device for fluorine gas production, the tail gas treatment device comprises a base station and a working box installed on the base station, a liquid changing assembly and a moving plate are slidably installed in the working box, and the working box is divided into a liquid changing cavity, a treatment cavity and a liquid discharging cavity by the liquid changing assembly and the moving plate; the working box is connected with the gas collecting pipe and the liquid inlet pipe, and the liquid changing assembly comprises a lifting ring and a rotating ring rotationally installed in the lifting ring. High-concentration alkali liquor is injected into a groove of a lifting ring through a liquid inlet pipe, so that the lifting ring compresses a long spring, a treatment cavity is communicated with a liquid changing cavity, then the lifting ring presses difluoromethane gas in the treatment cavity, and difluoromethane is conveyed to the liquid changing cavity through a gap between an upper top plate and a lower push plate; the difluoro-oxide in the liquid changing cavity reacts with high-concentration calcium hydroxide, so that the difluoro-oxide is treated, and the difluoro-oxide is prevented from leaking when the difluoro-oxide and alkali liquor in the treatment cavity are discharged out of the working box together.

Description

Technical Field

[0001] The invention belongs to the technical field of fluorine gas production, and in particular relates to tail gas treatment equipment for fluorine gas production. Background Art

[0002] The main waste gas produced in the fluorine gas production process is fluorine-containing tail gas, which is toxic, corrosive and difficult to handle. It is extremely harmful to human health and the environment, so effective measures need to be taken to deal with it.

[0003] The fluorine-containing tail gas generated in the fluorine gas production is collected by the air duct and passed into a special alkali liquid tank to remove the fluorine in the tail gas. After the tail gas enters the alkali liquid tank and contacts the alkali liquid, the two react to form calcium fluoride precipitate. The existing tail gas treatment device has the following problems when in use; First, when treating the sediment, it is usually necessary to treat it when the entire equipment is stopped, which causes the entire exhaust gas treatment equipment to be unable to work continuously, thereby reducing work efficiency.

[0004] Second, since the alkali solution used for tail gas treatment is usually calcium hydroxide, the fluorine gas in the calcium hydroxide tail gas reacts to form calcium fluoride precipitation. However, as the amount of waste gas entering the alkali solution tank increases, the concentration of calcium hydroxide in the solution decreases, and the low concentration of calcium hydroxide reacts with fluorine gas to produce difluoride monoxide as a byproduct. Difluoride monoxide is a colorless, almost odorless, highly toxic gas that can react slowly with water. In the process of replacing the alkali solution, difluoride monoxide will be discharged from the alkali solution tank before it reacts with water, which can easily lead to difluoride monoxide leakage. Summary of the invention

[0005] The purpose of the present invention is to provide a tail gas treatment device for fluorine gas production in view of the shortcomings of the prior art, so as to solve the technical problems in the prior art.

[0006] The purpose of the present invention can be achieved by the following technical solutions: A tail gas treatment device for fluorine gas production, comprising a base and a working box installed thereon, wherein a liquid changing assembly and a moving plate are slidably installed inside the working box, the liquid changing assembly and the moving plate separate the working box into a liquid changing chamber, a processing chamber and a liquid draining chamber, the working box is connected to a gas collecting pipe and a liquid inlet pipe, the gas collecting pipe is connected to the processing chamber, the liquid inlet pipe is connected to the liquid changing chamber, a liquid draining pipe is installed at the bottom of the working box, and the liquid draining pipe is connected to a liquid pump; The liquid exchange assembly includes a lifting ring and a rotating ring rotatably installed therein, the rotating ring is driven by a transmission motor, an upper through hole is provided on the rotating ring, and a lower through hole is provided on the lifting ring. When the upper through hole coincides with the lower through hole, the liquid exchange chamber is connected with the processing chamber. A guide rod is fixedly installed on the movable plate, the guide rod passes through the lifting ring and slides with the lifting ring, and a long spring is connected between the movable plate and the lifting ring; A telescopic rod is installed on the top of the working box, an upper top plate and a lower push plate are respectively installed on the telescopic rod, and a lifting ring is located between the upper top plate and the lower push plate.

[0007] As a further optimization or improvement of the present solution, a groove is provided on the lifting ring, the rotating ring is located in the groove and rotates, and the pipe mouth of the liquid inlet pipe faces the groove.

[0008] As a further optimization or improvement of this solution, a screw is fixedly installed at the bottom of the working box, a plug is installed on the screw, the plug blocks the movable plate, a short spring is installed between the movable plate and the bottom of the working box, and the short spring is located in the drainage cavity.

[0009] As a further optimization or improvement of this solution, a support platform is installed at the bottom of the working box, an electromagnetic suction cup is installed on the support platform, the electromagnetic suction cup adsorbs the movable plate, and the support platform is installed in the drainage cavity.

[0010] As a further optimization or improvement of this solution, the fluid exchange assembly also includes a detection groove and a transmission groove installed on the lifting ring, a transmission motor is installed inside the transmission groove, a gear is installed at the output end of the transmission motor, an inner gear ring is installed on the rotating ring, and the gear is meshed with the inner gear ring.

[0011] As a further optimization or improvement of the present solution, a light-sensitive disc is installed inside the movable plate, and an irradiation lamp is installed inside the detection groove.

[0012] As a further optimization or improvement of the present solution, sealing rings are installed at both ends of the lifting ring, and the lifting ring abuts against the upper top plate and the lower push plate respectively through the sealing rings.

[0013] As a further optimization or improvement of the present solution, a guide bar is vertically installed inside the working box, and the lifting ring and the movable plate are slidably matched with the guide bar.

[0014] Beneficial effects of the present invention: (1) When the alkali solution in the treatment chamber needs to be replaced, the high-concentration alkali solution is injected into the groove of the lifting ring through the liquid inlet pipe. As the alkali solution is injected, the weight of the lifting ring gradually increases, and the lifting ring moves downward to separate from the sealed connection with the upper top plate. The lifting ring compresses the long spring. At this time, the treatment chamber is connected to the liquid exchange chamber. As the lifting ring moves downward, the space inside the treatment chamber is reduced. At the same time, the lifting ring presses the difluoride monoxide gas in the treatment chamber and transports the difluoride monoxide to the liquid exchange chamber through the gap between the upper top plate and the lower push plate. The difluoride monoxide transported to the liquid exchange chamber reacts with the high-concentration calcium hydroxide to achieve the treatment of the difluoride monoxide, thereby preventing the difluoride monoxide from leaking out of the working box together with the alkali solution in the treatment chamber.

[0015] (2) When the alkali solution needs to be replaced, the movable plate moves downward and detaches from the plug. At this time, the alkali solution that needs to be replaced in the processing chamber enters the drainage chamber through the screw. The alkali solution entering the drainage chamber is pumped out by the pump to realize the drainage function. At the same time, when the alkali solution passes through the screw, a vortex is formed near the drainage port of the movable plate, stirring the sediment near the drainage port, so that the sediment can be discharged through the screw, thereby avoiding the equipment stopping to process the sediment alone. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0018] Figure 2 Schematic diagram of the internal structure of the base.

[0019] Figure 3 It is a cross-sectional view of the overall structure of the present invention.

[0020] Figure 4 Schematic diagram of the internal structure of the working box.

[0021] Figure 5 for Figure 4 A magnified view of the structure of part A.

[0022] Figure 6 This is an exploded view of the internal structure of the working box.

[0023] Figure 7 Schematic diagram of the fluid replacement component structure.

[0024] Figure 8 It is a schematic diagram of the connection structure between the lifting ring and the rotating ring.

[0025] The following are marked in the figure: 1. base; 2. liquid pump; 3. working box; 4. air collecting pipe; 5. liquid inlet pipe; 6. liquid changing assembly; 601. lifting ring; 602. detection slot; 603. transmission slot; 604. lower through hole; 605. rotating ring; 606. upper through hole; 607. inner gear ring; 608. sealing ring; 609. transmission motor; 610. gear; 7. liquid changing chamber; 8. processing chamber; 9. moving plate; 11. optical disc; 12. irradiation lamp; 13. guide rod; 14. long spring; 15. supporting platform; 16. electromagnetic suction cup; 17. short spring; 18. screw; 19. plug; 20. telescopic rod; 21. upper top plate; 22. lower push plate; 23. guide strip; 24. drainage pipe; 25. drainage chamber. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] See also Figure 1-Figure 8 , a tail gas treatment device for fluorine gas production, comprising a base 1 and a working box 3 mounted thereon, a liquid changing assembly 6 and a moving plate 9 are slidably mounted inside the working box 3, the liquid changing assembly 6 and the moving plate 9 divide the working box 3 into a liquid changing chamber 7, a processing chamber 8 and a liquid draining chamber 25, the working box 3 is connected to a gas collecting pipe 4 and a liquid inlet pipe 5, the gas collecting pipe 4 is connected to the processing chamber 8, the liquid inlet pipe 5 is connected to the liquid changing chamber 7, a liquid draining pipe 24 is installed at the bottom of the working box 3, and the liquid draining pipe 24 is connected to a liquid pump 2; The liquid exchange assembly 6 includes a lifting ring 601 and a rotating ring 605 rotatably installed therein, the rotating ring 605 is driven by a transmission motor 609, an upper through hole 606 is provided on the rotating ring 605, and a lower through hole 604 is provided on the lifting ring 601. When the upper through hole 606 coincides with the lower through hole 604, the liquid exchange chamber 7 is connected with the processing chamber 8. A guide rod 13 is fixedly installed on the movable plate 9, the guide rod 13 passes through the lifting ring 601 and slidably cooperates with the lifting ring 601, and a long spring 14 is connected between the movable plate 9 and the lifting ring 601; A telescopic rod 20 is installed on the top of the working box 3 , an upper top plate 21 and a lower push plate 22 are respectively installed on the telescopic rod 20 , and a lifting ring 601 is located between the upper top plate 21 and the lower push plate 22 .

[0028] Specifically, a groove is provided on the lifting ring 601, the rotating ring 605 is located in the groove and rotates, and the pipe opening of the liquid inlet pipe 5 faces the groove.

[0029] Specifically, the fluid exchange component 6 also includes a detection groove 602 and a transmission groove 603 installed on the lifting ring 601, a transmission motor 609 is installed inside the transmission groove 603, a gear 610 is installed at the output end of the transmission motor 609, an inner gear ring 607 is installed on the rotating ring 605, and the gear 610 is meshed with the inner gear ring 607.

[0030] Specifically, the optical disc 11 is installed inside the movable plate 9 , and the irradiation lamp 12 is installed inside the detection slot 602 .

[0031] It should be noted that the gas collecting pipe 4 is specially used to collect the tail gas in the fluorine gas production process, and then the tail gas inside the gas collecting pipe 4 is passed into the working box 3 to achieve the treatment of the fluorine-containing gas in the tail gas.

[0032] In the initial state, see Figure 4The space inside the working box 3 is divided into a liquid exchange chamber 7, a processing chamber 8 and a liquid discharge chamber 25 by a lifting ring 601 and a movable plate 9. Alkaline solution is introduced into the processing chamber 8 to react with the fluorine-containing waste gas. When in use, the gas collecting pipe 4 passes the tail gas through the processing chamber 8, and the alkaline solution inside the processing chamber 8 reacts with the fluorine-containing waste gas in the tail gas to generate calcium fluoride precipitation. The precipitation sinks and falls on the movable plate 9. During this process, the irradiation lamp 12 irradiates downward. Since the calcium hydroxide solution is a colorless liquid, the light of the irradiation lamp 12 directly irradiates the optical disc 11 inside the movable plate 9. When the precipitation falls on the movable plate 9, the light intensity received by the optical disc 11 decreases, and then the amount of calcium fluoride precipitation generated is judged. When the amount of precipitation generated relative to time decreases, it means that the concentration of calcium hydroxide in the alkaline solution inside the processing chamber 8 decreases. At this time, the low concentration of calcium hydroxide will react with the fluorine-containing tail gas in the exhaust gas to generate toxic difluoride monoxide. Therefore, the present invention needs to treat the difluoride monoxide to avoid leakage of the difluoride monoxide while replacing the alkaline solution inside the processing chamber 8 (the reaction equation of low concentration calcium hydroxide and fluorine gas: 2F2+2Ca(OH)2→2CaF2+2H2O+OF2↑; the reaction equation of high concentration calcium hydroxide and fluorine gas: 2F2+4Ca(OH)2→4CaF2+O2↑+2H2O).

[0033] In the initial state, see Figure 4 The lifting ring 601 is pushed upward by the long spring 14, so that the lifting ring 601 is sealed and connected with the upper top plate 21 by the sealing ring 608, thereby blocking the liquid exchange chamber 7 and the processing chamber 8. Figure 8, at this time, the upper through hole 606 on the rotating ring 605 is separated from the lower through hole 604 on the lifting ring 601. When the alkali solution in the processing chamber 8 needs to be replaced, the high-concentration alkali solution is injected into the groove of the lifting ring 601 through the liquid inlet pipe 5. As the alkali solution is injected, the weight of the lifting ring 601 gradually increases, and the lifting ring 601 moves down to break away from the sealed connection with the upper top plate 21. The lifting ring 601 compresses the long spring 14. At this time, the processing chamber 8 is connected to the liquid exchange chamber 7. As the lifting ring 601 moves down, the space inside the processing chamber 8 is reduced. At the same time, the lifting ring 601 presses the difluoride monoxide gas in the processing chamber 8, and the difluoride monoxide is transported to the liquid exchange chamber 7 through the gap between the upper top plate 21 and the lower push plate 22. The difluoride monoxide transported to the liquid exchange chamber 7 reacts with the high-concentration calcium hydroxide to achieve the treatment of the difluoride monoxide, and prevents the difluoride monoxide from leaking when it is discharged from the working box 3 together with the alkali solution to be replaced. As more and more alkali liquid is in the groove inside the lifting ring 601, the lifting ring 601 presses the push-down plate 22 and is sealed with the push-down plate 22 through the sealing ring 608 on the lifting ring 601, and the liquid exchange chamber 7 is blocked from the processing chamber 8. At this time, the alkali liquid injected into the groove of the lifting ring 601 gradually overflows the groove, so that the lifting ring 601 drives the push-down plate 22 to move downward synchronously and press the alkali liquid to be replaced inside the processing chamber 8. Under the pressure of the lifting ring 601 and the push-down plate 22, the movable plate 9 moves downward, and the short spring 17 is compressed, so that the plug 19 is separated from the blockage of the movable plate 9. Under the pressure of the lifting ring 601 and the push-down plate 22, the alkali liquid to be replaced inside the processing chamber 8 quickly enters the drainage chamber 25 through the screw 18. Then the liquid pump 2 is started to extract the alkali liquid inside the drainage chamber 25. Then the electromagnetic suction cup 16 is started to adsorb the movable plate 9 to fix the position of the movable plate 9. When the alkali solution passes through the screw 18 , a vortex is formed near the discharge port of the movable plate 9 , stirring the sediment near the discharge port so that the sediment can be discharged through the screw 18 .

[0034] When the alkali liquid in the processing chamber 8 is completely drained, the electromagnetic suction cup 16 is closed, the short spring 17 rebounds, and the short spring 17 drives the movable plate 9 to reset, so that the plug 19 re-blocks the movable plate 9, and then the transmission motor 609 is started. The transmission motor 609 drives the rotating ring 605 to rotate through the gear 610, so that the upper through hole 606 on the rotating ring 605 coincides with the lower through hole 604 on the lifting ring 601. At this time, the alkali liquid in the liquid exchange chamber 7 is transported to the processing chamber 8 through the upper through hole 606 and the lower through hole 604. When the alkali liquid in the liquid exchange chamber 7 enters the processing chamber 8, the lifting ring 601 is reset. At this time, the lifting ring 601 is sealed and connected to the upper top plate 21 again, and the transmission motor 609 drives the rotating ring 605 to reset, and the replacement of the alkali liquid is completed.

[0035] It should be noted that the height of the alkali solution inside the processing chamber 8 is flush with the bottom of the push-down plate 22, ensuring that the difluoride monoxide gas inside the processing chamber 8 is completely discharged into the liquid exchange chamber 7 during the downward movement of the lifting ring 601; the amount of alkali solution injected into the liquid exchange chamber 7 by the liquid inlet pipe 5 is the same as the amount of alkali solution to be replaced in the processing chamber 8, ensuring that after the alkali solution inside the processing chamber 8 is discharged, the short spring 17 can drive the movable plate 9 to reset normally. The rotating connection between the rotating ring 605 and the lifting ring 601 and the position that can directly contact the alkali solution are sealed and anti-corrosion treated. The movable plate 9 is a transparent anti-corrosion plastic, so that the light of the irradiation lamp 12 can directly penetrate the movable plate 9 to illuminate the optical disc 11, thereby improving the receiving efficiency of the optical disc 11 and improving the accuracy of the optical disc 11.

[0036] See also Figure 4 and Figure 6 A screw rod 18 is fixedly installed at the bottom of the working box 3 , a plug rod 19 is installed on the screw rod 18 , the plug rod 19 blocks the movable plate 9 , a short spring 17 is installed between the movable plate 9 and the bottom of the working box 3 , and the short spring 17 is located in the drainage cavity 25 .

[0037] It should be noted that, when there is no need to replace the alkali solution, the plug 19 blocks the movable plate 9; when the alkali solution needs to be replaced, the movable plate 9 moves down and disengages from the plug 19. At this time, the alkali solution that needs to be replaced in the processing chamber 8 enters the drainage chamber 25 through the screw 18, and the alkali solution entering the drainage chamber 25 is pumped out by the pump 2 to realize the drainage function. At the same time, when the alkali solution passes through the screw 18, a vortex is formed near the drainage port of the movable plate 9, stirring the sediment near the drainage port, so that the sediment can be discharged through the screw 18, thereby avoiding the equipment stopping to process the sediment alone.

[0038] See also Figure 4 and Figure 6 A support platform 15 is installed at the bottom of the working box 3 , and an electromagnetic suction cup 16 is installed on the support platform 15 . The electromagnetic suction cup 16 adsorbs the movable plate 9 , and the support platform 15 is installed in the drainage cavity 25 .

[0039] It should be noted that the function of the support platform 15 is to limit the movable plate 9 to prevent the movable plate 9 from excessive displacement. During the drainage process of the alkali liquid in the processing chamber 8, the pressure of the short spring 17 gradually decreases. It is very likely that the alkali liquid in the processing chamber 8 is not completely drained and the short spring 17 is reset. Therefore, the electromagnetic suction cup 16 on the support platform 15 adsorbs and fixes the movable plate 9 to avoid the above situation and ensure that the alkali liquid in the processing chamber 8 is completely drained.

[0040] See also Figure 4-Figure 5 Sealing rings 608 are installed at both ends of the lifting ring 601, and the lifting ring 601 abuts against the upper top plate 21 and the lower push plate 22 respectively through the sealing rings 608.

[0041] It should be noted that sealing rings 608 are installed at both upper and lower ends of the lifting ring 601 , and the lifting ring 601 is sealedly connected to the upper top plate 21 and the lower push plate 22 respectively through the sealing rings 608 .

[0042] See also Figure 6 A guide bar 23 is vertically installed inside the working box 3, and the lifting ring 601 and the movable plate 9 are slidably matched with it.

[0043] It should be noted that the moving direction of the liquid replacement component 6 and the movable plate 9 is vertical lifting movement.

[0044] The implementation principle of the present invention is: When in use, the gas collecting pipe 4 passes the tail gas through the processing chamber 8, and the alkaline solution inside the processing chamber 8 reacts with the fluorine-containing exhaust gas in the tail gas to generate calcium fluoride precipitation, which sinks and falls on the movable plate 9. During this process, the irradiation lamp 12 irradiates downward. Since the calcium hydroxide solution is a colorless liquid, the light of the irradiation lamp 12 directly irradiates the optical disc 11 inside the movable plate 9. When the precipitate falls on the movable plate 9, the light intensity received by the optical disc 11 decreases, and then the amount of calcium fluoride precipitation generated is judged. When the amount of precipitation generated relative to time decreases, it means that the concentration of calcium hydroxide in the alkaline solution inside the processing chamber 8 decreases. At this time, the low concentration of calcium hydroxide will generate toxic difluoride monoxide with the fluorine-containing exhaust gas in the exhaust gas. Therefore, the present invention needs to treat difluoride monoxide to avoid difluoride monoxide leakage while replacing the alkaline solution inside the processing chamber 8.

[0045] In the initial state, see Figure 4 The lifting ring 601 is pushed upward by the long spring 14, so that the lifting ring 601 is sealed and connected with the upper top plate 21 by the sealing ring 608, thereby blocking the liquid exchange chamber 7 and the processing chamber 8. Figure 8, at this time, the upper through hole 606 on the rotating ring 605 is separated from the lower through hole 604 on the lifting ring 601. When the alkali solution in the processing chamber 8 needs to be replaced, the high-concentration alkali solution is injected into the groove of the lifting ring 601 through the liquid inlet pipe 5. As the alkali solution is injected, the weight of the lifting ring 601 gradually increases, and the lifting ring 601 moves down to break away from the sealed connection with the upper top plate 21. The lifting ring 601 compresses the long spring 14. At this time, the processing chamber 8 is connected to the liquid exchange chamber 7. As the lifting ring 601 moves down, the space inside the processing chamber 8 is reduced. At the same time, the lifting ring 601 presses the difluoride monoxide gas in the processing chamber 8, and the difluoride monoxide is transported to the liquid exchange chamber 7 through the gap between the upper top plate 21 and the lower push plate 22. The difluoride monoxide transported to the liquid exchange chamber 7 reacts with the high-concentration calcium hydroxide to achieve the treatment of the difluoride monoxide, and prevents the difluoride monoxide from leaking when it is discharged from the working box 3 together with the alkali solution to be replaced. As more and more alkali liquid is in the groove inside the lifting ring 601, the lifting ring 601 presses the push-down plate 22 and is sealed with the push-down plate 22 through the sealing ring 608 on the lifting ring 601, and the liquid exchange chamber 7 is blocked from the processing chamber 8. At this time, the alkali liquid injected into the groove of the lifting ring 601 gradually overflows the groove, so that the lifting ring 601 drives the push-down plate 22 to move downward synchronously and press the alkali liquid to be replaced inside the processing chamber 8. Under the pressure of the lifting ring 601 and the push-down plate 22, the movable plate 9 moves downward, and the short spring 17 is compressed, so that the plug 19 is separated from the blockage of the movable plate 9. Under the pressure of the lifting ring 601 and the push-down plate 22, the alkali liquid to be replaced inside the processing chamber 8 quickly enters the drainage chamber 25 through the screw 18. Then the liquid pump 2 is started to extract the alkali liquid inside the drainage chamber 25. Then the electromagnetic suction cup 16 is started to adsorb the movable plate 9 to fix the position of the movable plate 9. When the alkali solution passes through the screw 18 , a vortex is formed near the discharge port of the movable plate 9 , stirring the sediment near the discharge port so that the sediment can be discharged through the screw 18 .

[0046] When the alkali liquid in the processing chamber 8 is completely drained, the electromagnetic suction cup 16 is closed, the short spring 17 rebounds, and the short spring 17 drives the movable plate 9 to reset, so that the plug 19 re-blocks the movable plate 9, and then the transmission motor 609 is started. The transmission motor 609 drives the rotating ring 605 to rotate through the gear 610, so that the upper through hole 606 on the rotating ring 605 coincides with the lower through hole 604 on the lifting ring 601. At this time, the alkali liquid in the liquid exchange chamber 7 is transported to the processing chamber 8 through the upper through hole 606 and the lower through hole 604. When the alkali liquid in the liquid exchange chamber 7 enters the processing chamber 8, the lifting ring 601 is reset. At this time, the lifting ring 601 is sealed and connected to the upper top plate 21 again, and the transmission motor 609 drives the rotating ring 605 to reset, and the replacement of the alkali liquid is completed.

[0047] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A tail gas treatment device for fluorine gas production, characterized in that: The invention comprises a base (1) and a working box (3) mounted thereon, wherein a liquid exchange component (6) and a movable plate (9) are slidably mounted inside the working box (3), the liquid exchange component (6) and the movable plate (9) divide the working box (3) into a liquid exchange chamber (7), a processing chamber (8) and a liquid discharge chamber (25), the working box (3) is connected to an air collecting pipe (4) and a liquid inlet pipe (5), the air collecting pipe (4) is connected to the processing chamber (8), the liquid inlet pipe (5) is connected to the liquid exchange chamber (7), a liquid discharge pipe (24) is mounted at the bottom of the working box (3), and the liquid discharge pipe (24) is connected to a liquid pump (2); The liquid exchange component (6) comprises a lifting ring (601) and a rotating ring (605) rotatably mounted therein, the rotating ring (605) being driven by a transmission motor (609), an upper through hole (606) being provided on the rotating ring (605), and a lower through hole (604) being provided on the lifting ring (601); when the upper through hole (606) and the lower through hole (604) are overlapped, the liquid exchange chamber (7) and the processing chamber (8) are connected, a guide rod (13) is fixedly mounted on the movable plate (9), the guide rod (13) passes through the lifting ring (601) and is slidably matched with the lifting ring (601), and a long spring (14) is connected between the movable plate (9) and the lifting ring (601); A telescopic rod (20) is installed on the top of the working box (3), an upper top plate (21) and a lower push plate (22) are respectively installed on the telescopic rod (20), and a lifting ring (601) is located between the upper top plate (21) and the lower push plate (22).

2. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: The lifting ring (601) is provided with a groove, and the rotating ring (605) is located in the groove and rotates, and the pipe mouth of the liquid inlet pipe (5) faces the groove.

3. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A screw rod (18) is fixedly mounted on the bottom of the working box (3), a plug rod (19) is mounted on the screw rod (18), the plug rod (19) blocks the movable plate (9), a short spring (17) is mounted between the movable plate (9) and the bottom of the working box (3), and the short spring (17) is located in the drainage cavity (25).

4. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A support platform (15) is installed at the bottom of the working box (3), an electromagnetic suction cup (16) is installed on the support platform (15), the electromagnetic suction cup (16) adsorbs the movable plate (9), and the support platform (15) is installed in the drainage cavity (25).

5. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: The liquid replacement assembly (6) further comprises a detection slot (602) and a transmission slot (603) mounted on the lifting ring (601); a transmission motor (609) is mounted inside the transmission slot (603); a gear (610) is mounted on the output end of the transmission motor (609); an inner gear ring (607) is mounted on the rotating ring (605); and the gear (610) meshes with the inner gear ring (607).

6. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: The movable plate (9) has a light-sensitive optical disc (11) installed inside, and the detection slot (602) has an irradiation lamp (12) installed inside.

7. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: Sealing rings (608) are installed at both ends of the lifting ring (601), and the lifting ring (601) abuts against the upper top plate (21) and the lower push plate (22) respectively through the sealing ring (608).

8. The tail gas treatment equipment for fluorine gas production according to claim 1, characterized in that: A guide bar (23) is vertically installed inside the working box (3), and the lifting ring (601) and the movable plate (9) are both slidably matched with the guide bar.

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