Water-guided laser water-light coaxial coupling device and method

Abstract

The invention provides a water-guided laser water-light coaxial coupling device and method which are applied to the technical field of laser processing, and the method comprises the steps: analyzing and determining the relative position of the center of a focusing light spot and the center of a water jet nozzle based on a first image, collected by a CCD camera, of the focusing light spot generated near the opening of the water jet nozzle, and then automatically determining swing parameters of coaxially aligning the focusing light spot and the water jet nozzle to the X axis and / or the Y axis of the laser light path two-dimensional swing mirror, and controlling the X axis and / or the Y axis of the laser light path two-dimensional swing mirror to swing through a two-dimensional swing mirror control device according to the determined swing parameters. Therefore, the center of the focusing light spot and the center of the water jet nozzle are adjusted to coincide, water-light coaxial automatic adjustment of the water-guided laser is achieved, the adjustment efficiency is improved, and the accuracy is high.

Description

Technical Field

[0001] The present disclosure relates to the field of laser processing technology, and in particular to the field of water-conducting laser processing technology. Background Art

[0002] Water-guided laser processing technology combines laser processing with micro-hole water jet technology. Micro-hole water jet technology forms a micron-level "water beam fiber", and high-energy laser is coupled into the "water beam fiber" to form a columnar light knife for precision processing of materials. The columnar light knife of the water-guided laser allows the processing distance of the workpiece to be adjusted within 25mm to 100mm, which can meet the current requirements for the cutting thickness of large-grain cultured diamonds. It is not restricted by the focus and the processing is stable. At the same time, the water jet of the water-guided laser can cool the workpiece and quickly remove the processing debris and pollutants. The force of the water beam on the workpiece is very small, so that there is almost no slag deposition in the water-guided laser processing, the heat effect and material deformation are small, the cutting efficiency is high, the incision width is narrow, the parallelism is good, the precision is high, the surface profile size error is small, the incision surface quality is high, and the cutting seam generally does not require secondary processing. The application of water-guided laser technology in the efficient and precise processing of superhard materials has a high market application prospect and value.

[0003] Before processing the workpiece, the laser beam must be completely coaxially coupled with the water jet, and it is necessary to ensure that the laser spot is accurately adjusted to the nozzle position. The existing technology is to perform water-light coaxial coupling manually, which has the problems of low efficiency and poor accuracy. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure provide a water-guided laser water-light coaxial coupling device and method, which at least partially solve the problems existing in the prior art.

[0005] In a first aspect, an embodiment of the present disclosure provides a water-guided laser water-light coaxial coupling device, comprising:

[0006] Laser assembly, water-light coupling assembly, CCD camera, control unit;

[0007] The laser assembly includes a laser, a two-dimensional swing mirror in the laser light path, and a focusing mirror in the laser light path; the laser emitted by the laser is transmitted through the two-dimensional swing mirror in the laser light path and is focused by the focusing mirror to generate a focused light spot near the water jet nozzle of the water-light coupling assembly;

[0008] The CCD camera is used to collect a first image of a focused light spot generated near the water jet nozzle;

[0009] The control unit is used to perform water-light coaxial coupling analysis on the first image collected by the CCD camera, and determine the coaxial alignment of the focusing spot with the water jet nozzle and the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the relative positions of the center of the focusing spot and the center of the water jet nozzle determined by the analysis result, and control the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the determined swing parameters through a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the laser light path.

[0010] Optionally, the laser light path focusing lens is a liquid focusing lens;

[0011] The control unit is also used to perform image analysis on the second image of the focused light spot captured by the CCD camera, determine the diameter of the focused light spot, and adjust the voltage at both ends of the laser light path focusing mirror through the liquid lens control system to adjust the size of the focused light spot to the target diameter.

[0012] Optionally, the device further comprises:

[0013] A two-dimensional swing mirror in the camera optical path, the two-dimensional swing mirror in the camera optical path is used to cooperate with the semi-transparent and semi-reflective mirror to adjust the field of view of the CCD camera to collect images near the water jet nozzle;

[0014] The control unit is also used to perform a field of view analysis of the CCD camera according to the second image captured by the CCD camera, and according to the field of view analysis result, adjust the swing of the two-dimensional swing mirror in the camera optical path on the X-axis and / or Y-axis through the two-dimensional swing mirror control device to achieve the field of view of the CCD camera near the water jet nozzle; the two-dimensional swing mirror control device also includes a camera optical path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the two-dimensional swing mirror in the camera optical path on the X-axis and the deflection of the Y-axis.

[0015] Optionally, the device further comprises:

[0016] A camera optical path focusing lens, wherein the camera optical path focusing lens is a liquid focusing lens;

[0017] The control unit is used to perform clarity analysis on the third image captured by the CCD camera, and according to the analysis result, adjust the voltage at both ends of the liquid focusing mirror of the camera optical path through the liquid lens control system to change the focal length of the CCD camera, so as to adjust the clarity of the field of view of the CCD camera.

[0018] Optionally, the device further comprises:

[0019] Temperature compensator;

[0020] The control unit is further used to perform temperature compensation on the laser light path focusing mirror and / or the camera light path focusing mirror by controlling the temperature compensator.

[0021] In a second aspect, a water-guided laser water-light coaxial coupling method is provided, comprising:

[0022] The first image of the focused light spot near the water jet nozzle outlet irradiated by the laser through the focusing mirror is collected by a CCD camera;

[0023] Performing water-light coaxial coupling analysis based on the first image captured by the CCD camera to determine the relative position of the center of the focused light spot and the center of the water jet nozzle;

[0024] Based on the determined relative position between the center of the focused light spot and the center of the water jet nozzle, determining the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path so as to coaxially align the focused light spot with the water jet nozzle;

[0025] According to the determined swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path, the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path is controlled by a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the laser light path.

[0026] Optionally, the method further comprises:

[0027] The laser light path focusing mirror is a liquid focusing mirror; the control unit is also used to perform image analysis on the second image of the focused light spot captured by the CCD camera, determine the diameter of the focused light spot, and adjust the voltage at both ends of the laser light path focusing mirror through a liquid lens control system to adjust the size of the focused light spot to the target diameter size.

[0028] Optionally include:

[0029] Performing a field of view analysis of the CCD camera according to the second image captured by the CCD camera;

[0030] According to the field of view analysis result, the swing of the two-dimensional swing mirror in the camera optical path on the X-axis and / or Y-axis is adjusted by a two-dimensional swing mirror control device to achieve the field of view of the CCD camera near the water jet nozzle; the two-dimensional swing mirror in the camera optical path is used to adjust the field of view of the CCD camera; the two-dimensional swing mirror control device also includes a two-dimensional swing mirror in the camera optical path X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the two-dimensional swing mirror in the camera optical path on the X-axis and the deflection of the Y-axis.

[0031] Optionally, include;

[0032] Performing clarity analysis on the third image captured by the CCD camera;

[0033] According to the analysis results, the voltage at both ends of the liquid focusing mirror of the camera optical path is adjusted through the liquid lens control system to change the focal length of the CCD camera to adjust the clarity of the field of view of the CCD camera; the camera optical path focusing mirror is a liquid focusing mirror.

[0034] Optionally, it also includes:

[0035] The temperature compensator is controlled to perform temperature compensation on the laser optical path focusing mirror and / or the camera optical path focusing mirror.

[0036] The present invention provides a water-guided laser water-light coaxial coupling device, comprising: a laser component, a water-light coupling component, a CCD camera, and a control unit;

[0037] The laser assembly comprises a laser, a two-dimensional swing mirror in a laser optical path, and a focusing mirror in a laser optical path; the laser emitted by the laser is transmitted through the two-dimensional swing mirror in the laser optical path, and is focused by the focusing mirror to generate a focusing spot near the water jet nozzle opening of the water-light coupling assembly; the CCD camera is used to collect a first image of the focusing spot generated near the water jet nozzle opening; the control unit is used to perform water-light coaxial coupling analysis on the first image collected by the CCD camera, and determine the coaxial alignment of the focusing spot with the water jet nozzle, the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser optical path according to the relative positions of the center of the focusing spot and the center of the water jet nozzle determined by the analysis result, and control the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser optical path according to the determined swing parameters through a two-dimensional swing mirror control device; the two-dimensional swing mirror control device comprises an X-axis deflection control mechanism and a Y-axis deflection control mechanism of the two-dimensional swing mirror in the laser optical path, which are used to respectively control the deflection of the X-axis and the deflection of the Y-axis of the two-dimensional swing mirror in the laser optical path. That is to say, based on the first image of the focused light spot generated near the water jet nozzle outlet captured by the CCD camera, the relative position of the center of the focused light spot and the center of the water jet nozzle is analyzed and determined, and then the swing parameters of the focused light spot and the water jet nozzle are automatically determined to coaxially align the focused light spot with the water jet nozzle on the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path, and then the two-dimensional swing mirror control device controls the X-axis and / or Y-axis swing of the two-dimensional swing mirror of the laser light path according to the determined swing parameters, so that the center of the focused light spot and the center of the water jet nozzle are adjusted to coincide, thereby realizing the automatic adjustment of the water-guided laser water light coaxiality, improving the adjustment efficiency, and high accuracy.

[0038] In order to make the above-mentioned objectives, features and advantages of the present disclosure more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the following is a brief introduction to the drawings required for use in the embodiments. The drawings herein are incorporated into the specification and constitute a part of the specification. These drawings illustrate embodiments consistent with the present disclosure and are used together with the specification to illustrate the technical solutions of the present disclosure. It should be understood that the following drawings only illustrate certain embodiments of the present disclosure and should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can also be obtained based on these drawings without creative work.

[0040] Figure 1 It is a schematic diagram of a water-guided laser water-light coaxial coupling device provided in an embodiment of the present disclosure;

[0041] Figure 2 is a schematic diagram of the structure of a two-dimensional oscillating mirror control system provided by an embodiment of the present disclosure;

[0042] Figure 3 is a schematic diagram of the structure of a liquid lens control system provided by an embodiment of the present disclosure;

[0043] Figure 4 is a schematic diagram of the structure of a coupling detection system provided by an embodiment of the present disclosure;

[0044] Figure 5 A schematic diagram of the process flow of the water-guided laser water-light coaxial coupling method provided in an embodiment of the present disclosure;

[0045] Figure 6 Schematic diagram of the coaxial coupling of the focused light spot and the water jet nozzle provided in an embodiment of the present disclosure.

[0046] The description of the figures is as follows:

[0047] 1. Control unit; 2. CCD camera; 3. Liquid lens control system; 31. Liquid focusing mirror for camera optical path; 32. Liquid focusing mirror for laser optical path; 4. Two-dimensional swing mirror control system; 41. Two-dimensional swing mirror for camera optical path; 42. Two-dimensional swing mirror for laser optical path; 43. X-axis deflection control mechanism for camera optical path; 44. Y-axis deflection control mechanism for camera optical path; 45. X-axis deflection control mechanism for laser optical path; 46. Y-axis deflection control mechanism for laser optical path; 5. Laser; 6. Optical fiber; 7. Collimator; 8. Water-guided laser water-light coupling device; 81. Sapphire window; 82. Water jet nozzle; 83. Water inlet; 84. Water beam optical fiber; 9. Workpiece to be processed; 10. Coupling efficiency detection system; 11 Semi-transparent and semi-reflective mirror.

[0048] S31. Voltage controller; S34. Temperature compensator; S41. Motor; S42. Reducer; S43 Encoder; S44. Servo drive; S101. Robotic arm; S102. Power meter. DETAILED DESCRIPTION

[0049] The following describes the implementation methods of the embodiments of the present disclosure through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the embodiments of the present disclosure from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. The embodiments of the present disclosure can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the embodiments of the present disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the embodiments of the present disclosure.

[0050] Water-guided laser processing technology uses the principle of total reflection of light in water and air to integrate the laser beam into the water jet to process the material. The key to water-guided laser processing is how to achieve water-light coaxial coupling, that is, to align the laser focus spot with the water jet nozzle coaxially.

[0051] In the prior art, water-guided laser processing devices usually include a laser component, which is used to generate laser light and control the through-hole optical path. After focusing through a focusing lens, a focused light spot is generated near the water jet nozzle; a visual component, which collects the reflected image of the focused light spot through a configured CCD camera to observe and determine whether the generated focused light spot is coaxially aligned with the water jet nozzle. In the prior art, water-light coaxial coupling is achieved through manual adjustment, resulting in low coupling efficiency and poor accuracy.

[0052] In a first aspect, the present disclosure provides a water-guided laser water-light coaxial coupling device, such as Figure 1 Shown, including:

[0053] Laser assembly, water-light coupling assembly, CCD camera 2, control unit 1;

[0054] The laser assembly includes a laser 5, a two-dimensional oscillating mirror 42 for the laser light path, and a focusing mirror for the laser light path (specifically, a focusing mirror 32 for the focusing light path); the laser emitted by the laser is transmitted through the two-dimensional oscillating mirror 42 for the laser light path, and is focused by the focusing mirror 32 to generate a focused light spot near the water jet nozzle 82 of the water-light coupling assembly;

[0055] The CCD camera is used to collect a first image of the focused light spot generated near the water jet nozzle 82;

[0056] The control unit is used to perform water-light coaxial coupling analysis on the first image collected by the CCD camera, and determine the coaxial alignment of the focusing spot with the water jet nozzle and the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the relative positions of the center of the focusing spot and the center of the water jet nozzle determined by the analysis result, and control the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the determined swing parameters through a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism 45 and a Y-axis deflection control mechanism 46, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the laser light path.

[0057] Specifically, the laser assembly may also include an optical fiber 6, a collimator 7, and a semi-transparent and semi-reflective mirror 11. Specifically, the laser emitted by the laser 5 is transmitted through the optical fiber 6, and then collimated by the collimator 7, and then the optical path is changed by the two-dimensional swing mirror 42 of the laser light path, and then reflected by the semi-transparent and semi-reflective mirror 11, and focused by the laser light path liquid focusing mirror 32, and a corresponding focused light spot is obtained near the water jet nozzle port 82. Then, the first image of the corresponding focused light spot obtained near the water jet nozzle port 82 is collected by the CCD camera, and the first image collected by the CCD camera is analyzed by the control unit 1 for water-light coaxial coupling, and the relative position of the center of the focused light spot and the center of the water jet nozzle determined according to the analysis result is determined to coaxially align the focused light spot with the water jet nozzle, and the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path are determined, and the two-dimensional swing mirror control device controls the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path according to the determined swing parameters, thereby realizing water-light coaxial coupling.

[0058] In the disclosed embodiment, based on a first image of a focused light spot generated near a water jet nozzle outlet captured by a CCD camera, the relative position of the center of the focused light spot and the center of the water jet nozzle is analyzed and determined, and then the swing parameters of coaxially aligning the focused light spot and the water jet nozzle with the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path are automatically determined, and then the X-axis and / or Y-axis swing of the two-dimensional swing mirror of the laser light path is controlled by a two-dimensional swing mirror control device according to the determined swing parameters, thereby achieving adjustment and overlap of the center of the focused light spot with the center of the water jet nozzle, realizing automatic adjustment of the water-guided laser water-light coaxiality, improving the adjustment efficiency, and having high accuracy.

[0059] The disclosed embodiment provides a possible implementation method. Specifically, the laser light path focusing mirror is a liquid focusing mirror. The control unit 1 is also used to perform image analysis on the second image of the focused light spot captured by the CCD camera, determine the diameter of the focused light spot, and adjust the voltage across the laser light path focusing mirror through the liquid lens control system 3 to adjust the size of the focused light spot to the target diameter.

[0060] Specifically, different processing properties of different workpieces 9 may have different requirements, that is, different diameters of focused light spots may be required for laser processing. The embodiment of the present disclosure uses a liquid focusing mirror to achieve fast and accurate adjustment of the focused light spot size.

[0061] Specifically, the device also includes: a camera optical path focusing lens (specifically, it can be a camera optical path liquid focusing lens 31), and the camera optical path focusing lens is a liquid focusing lens; the control unit is used to perform clarity analysis on the third image captured by the CCD camera, and according to the analysis result, adjust the voltage at both ends of the camera optical path liquid focusing lens through the liquid lens control system to change the focal length of the CCD camera, so as to adjust the clarity of the field of view of the CCD camera.

[0062] Among them, traditional optical lenses are made of optical materials. No matter which optical material (optical glass, optical crystal or optical plastic) is used to make the lens, it is solid and cannot change size and curvature. An optical system using this type of lens can only change the focus of the entire optical system by moving a lens back and forth on the optical axis. Different from traditional lenses, liquid lenses (i.e., liquid focusing lenses in the embodiments of the present invention) are optical elements made of one or more liquids without mechanical connections. The optical parameters (focal length, radius of curvature, etc.) of the optical element can be changed by external control, and it has performance that traditional optical lenses cannot match. Simply put, the medium of the lens becomes liquid, or more accurately, it is a new type of optical element that dynamically adjusts the focal length of the lens by changing its surface curvature.

[0063] For example, Figure 3 , Figure 1 As shown, the liquid lens control system 3 may include a voltage controller S31, a camera optical path liquid focusing mirror 31 and a laser optical path liquid focusing mirror 32 control unit 1. The control unit 1 may determine the pressure adjustment parameters of the camera optical path liquid focusing mirror 31 and the laser optical path liquid focusing mirror 32 through a corresponding focusing algorithm according to the difference between the focus spot size determined by image analysis and the target size, and the field of view clarity of the CCD camera, and adjust the voltage of the camera optical path liquid focusing mirror 31 and the laser optical path liquid focusing mirror 32 through the liquid lens control system 3 to achieve focusing, thereby achieving control of the field of view clarity of the CCD camera and control of the focus spot size.

[0064] Specifically, Figure 3As shown, the device may also include: a temperature compensator S34; the control unit is further used to perform temperature compensation on the laser light path focusing mirror and / or the camera light path focusing mirror by controlling the temperature compensator. Due to the effect of the laser, the temperature of the liquid in the camera light path liquid focusing mirror 31 and the laser light path liquid focusing mirror 32 will rise. By adding a temperature compensator, the temperature of the liquid in the camera light path liquid focusing mirror 31 and the laser light path liquid focusing mirror 32 can be calibrated, so as to achieve the accuracy of focusing, that is, to obtain a more precise diameter of the focusing spot and a camera field of view with accurate clarity.

[0065] The disclosed embodiment uses a liquid focusing mirror to achieve precise control of the size of the focused light spot. When focusing spots of different sizes are required for processing, it is only necessary to adjust the pressure of the liquid focusing mirror. Compared with the traditional focusing mirror, there is no need to replace the focusing mirror, thereby avoiding the need to re-adjust the water-light coaxiality and the damage to the water jet nozzle caused by re-adjustment, thereby increasing the service life of the water jet nozzle. In addition, it is also possible to achieve precise control of the clarity of the field of view of the CCD camera.

[0066] The embodiment of the present disclosure provides a possible implementation method, and the device also includes: a two-dimensional swing mirror 41 in the camera optical path, and the two-dimensional swing mirror 41 in the camera optical path is used to cooperate with the semi-transparent and semi-reflective mirror 11 to adjust the field of view of the CCD camera to collect images near the water jet nozzle; the control unit is also used to perform field of view analysis of the CCD camera according to the second image collected by the CCD camera, and according to the field of view analysis result, adjust the swing of the two-dimensional swing mirror in the camera optical path on the X axis and / or Y axis through the two-dimensional swing mirror control device to achieve the field of view of the CCD camera near the water jet nozzle; the two-dimensional swing mirror control device also includes a camera optical path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the camera optical path two-dimensional swing mirror on the X axis and the deflection of the Y axis.

[0067] Among them, the semi-transparent and semi-reflective beam splitter, also known as the neutral density beam splitter, plane beam splitter, feedback mirror, beam splitter, etc., is a common optical filter that can divide the incident light into two parts, one for reflection and the other for transmission. The principle of the semi-transparent and semi-reflective lens is to use the characteristics of refraction and reflection of light between media. When light enters from one side of the beam splitter, it will be reflected and refracted on the surface of each layer of the film. There will be a phase difference between the reflected light and the refracted light, resulting in interference. When the interference is enhancing, a transmission peak will be formed; when the interference is subtractive, a reflection valley will be formed. By adjusting the parameters of the film, the transmission peak or reflection valley can be made to appear at any wavelength, thereby achieving average splitting of any wavelength or wide band.

[0068] Exemplarily, the two-dimensional oscillating mirror control system 4 is specifically as follows: Figure 2 As shown, it includes a motor S41, a reducer S42, an encoder S43, a servo driver S44, a CCD camera 2, and a control unit 1. Dual high-precision servo motors are used, and the servo driver controls the deflection of the swing mirror in the X-axis and Y-axis directions respectively. In order to achieve high-precision and high-efficiency automatic adjustment, image recognition and photoelectric encoders are combined, and the motor is gradually adjusted by feeding back data to the controller in real time to ensure the precise adjustment of the swing mirror angle to achieve the accuracy of angle feedback. In order to improve the adaptability of the system, fuzzy PID control is used to optimize the PID parameters in real time according to the size of the deflection. In order to ensure the adjustment accuracy, the Kalman filter algorithm is integrated in the controller to remove the noise in the encoder feedback data and prevent external interference from affecting the adjustment accuracy.

[0069] The two-dimensional swing mirror control system 4 can be used to swing and adjust the X-axis and Y-axis of the two-dimensional swing mirror 41 in the camera optical path to adjust the camera field of view. In addition, the two-dimensional swing mirror 42 in the laser optical path can also be used to swing and adjust the X-axis and Y-axis to achieve precise coaxiality of the focused light spot and the water beam.

[0070] The present disclosure provides a possible implementation method. The device further includes a coupling detection system 10. Specifically, Figure 4 As shown, it includes: a control unit 1, including a mechanical arm S101, a power meter S102. A coupling detection system 10 is used to detect the power of the coaxial coupling when the water light completes, and confirm whether the power meets the processing requirements. If not, the laser power is adjusted until the processing requirements are met.

[0071] The present disclosure provides a method for water-guided laser water-light coaxial coupling, such as Figure 5 As shown, including:

[0072] Step S501, collecting a first image of a focused light spot near a water jet nozzle irradiated by a laser through a focusing lens through a CCD camera;

[0073] Step S502, performing water-light coaxial coupling analysis based on the first image captured by the CCD camera to determine the relative position of the center of the focused light spot and the center of the water jet nozzle;

[0074] Step S503, based on the determined relative position between the center of the focused light spot and the center of the water jet nozzle, determining the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path to coaxially align the focused light spot with the water jet nozzle;

[0075] Step S504, according to the determined swing parameters of the laser light path two-dimensional swing mirror on the X-axis and / or Y-axis, the swing of the laser light path two-dimensional swing mirror on the X-axis and / or Y-axis is controlled by a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the laser light path two-dimensional swing mirror on the X-axis and the deflection of the Y-axis.

[0076] Specifically, before step S501, the method further includes:

[0077] Step S506 (not shown in the figure), the control unit performs image analysis on the second image of the focused light spot collected by the CCD camera to determine the diameter of the focused light spot, and adjusts the voltage at both ends of the laser light path focusing mirror through the liquid lens control system to adjust the size of the focused light spot to the target diameter size. The laser light path focusing mirror is a liquid focusing mirror.

[0078] Specifically, before step S506 (not shown in the figure), the following steps are also included:

[0079] Step S507 (not shown in the figure), performing a field of view analysis of the CCD camera according to the second image captured by the CCD camera;

[0080] Step S508 (not shown in the figure), according to the field of view analysis result, the two-dimensional swing mirror in the camera optical path is adjusted by the two-dimensional swing mirror control device. The swing of the X-axis and / or Y-axis can realize that the field of view of the CCD camera is near the water jet nozzle; the two-dimensional swing mirror in the camera optical path is used to adjust the field of view of the CCD camera; the two-dimensional swing mirror control device also includes a camera optical path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the camera optical path.

[0081] Specifically, after step S508 (not shown in the figure), the method further includes:

[0082] Step S509 (not shown in the figure), performing clarity analysis on the third image captured by the CCD camera;

[0083] Step S510 (not shown in the figure), according to the analysis result, the voltage at both ends of the liquid focusing mirror of the camera optical path is adjusted by the liquid lens control system to change the focal length of the CCD camera to adjust the clarity of the field of view of the CCD camera; the camera optical path focusing mirror is a liquid focusing mirror.

[0084] Specifically, the method further includes:

[0085] The temperature compensator is controlled to perform temperature compensation on the laser optical path focusing mirror and / or the camera optical path focusing mirror.

[0086] For example, Figure 1-4 As shown, the high-precision water-light coupling adaptive real-time adjustment and detection of water-guided laser can include the following process (the order of the following steps can be adjusted according to specific needs):

[0087] 1. CCD camera field of view adjustment step, the field of view of CCD camera 2 is controlled by adjusting the two-dimensional swing mirror 41 of the camera optical path, and the servo driver S44 controls the swing of the mechanism 43 and 44 respectively on the X-axis and Y-axis through the motor S41 and the connected reducer S42 until the field of view of CCD camera 2 is near the middle range of the water jet nozzle 82. The CCD camera can take a picture of the current field of view of the CCD camera, and then the control unit performs field of view analysis on the taken picture, and according to the field of view analysis result, the two-dimensional swing mirror control device controls the swing of the X-axis and Y-axis of the two-dimensional swing mirror 41 of the camera optical path until the field of view of CCD camera 2 is near the middle range of the water jet nozzle 82.

[0088] 2. Laser generation step and preliminary water-light coupling step: laser 5 emits laser by setting parameters, which is transmitted through optical fiber 6 and collimated by collimator 7. The collimated laser beam passes through laser optical path two-dimensional swing mirror 42 and semi-transparent and semi-reflective mirror 11 as well as liquid lens 32 (liquid focusing lens) and sapphire window 81 to reach the vicinity of water jet nozzle 82. The water-light of water-guided laser is coaxially coupled in water-guided laser water-light coupling device 8. High-pressure water flows into the cavity of device 8 through water inlet 83 and sprays fine water jet from water jet nozzle 82.

[0089] 3. CCD camera field clarity adjustment step: the field clarity of the CCD camera 2 is controlled by the liquid lens control system 3. The control unit 1 processes the spot image of the laser beam collected by the CCD camera and constructs a clarity evaluation index. The control unit 1 further uses a precise focusing algorithm to calculate the voltage value required by the liquid lens 31, and performs voltage fine-tuning, and feeds back to the control unit 1 to ensure the accuracy of the adjustment. In addition, considering the impact of temperature changes on the liquid lens, the liquid lens 31 can be compensated by the temperature compensator S34 to ensure the accuracy of the focusing until the image meets the clarity evaluation index.

[0090] 4. Focusing step, the liquid lens control system 3 starts to focus the laser beam liquid focusing mirror 32, and detects the size of the focused spot in real time through the CCD camera 2. Different spot focusing diameter evaluation indicators are established according to the spot sizes required by different processes. The control unit 1 further uses a precise focusing algorithm to calculate the voltage value required by the liquid lens 32, and fine-tunes the voltage, and feeds back to the control unit to ensure the accuracy of the adjustment. At the same time, considering the impact of temperature changes on the liquid lens, the liquid lens 32 is compensated through the temperature compensator S34 to ensure the accuracy of focusing until the focusing diameter evaluation indicator is met.

[0091] 5. Water-optical coaxial image analysis steps: the focused laser beam first completes visual feedback through CCD camera 2, uses edge detection algorithm to extract edge features in the image, accurately locates the edge of the light spot, uses contour detection to extract the contour of the light spot, calculates its center position, and eliminates small noise points through expansion and corrosion operations to improve the recognition accuracy of the light spot, and accurately identify and locate the light spot and micropores.

[0092] 6. Water-light coaxial adjustment step, based on the recognition result, the optical path is adjusted by the two-dimensional swing mirror 42, and the adjustment of the two-dimensional swing mirror 42 is controlled by the two-dimensional swing mirror control system 4, and then the servo driver S44 controls the X-axis and Y-axis swing of the laser light path X-axis deflection control mechanism 45 and the laser light path Y-axis deflection control mechanism 46 respectively through the motor S41 and the connected reducer S42. The specific motor control parameter adjustment is to detect the relative position of the light spot and the water jet nozzle 82 through the CCD camera, and automatically adjust the PID parameters through fuzzy PID control. At the same time, the adjusted angle is fed back to the photoelectric encoder S43 and the Kalman filter algorithm is used to accurately process the acquired data. By comparing with the target angle, the error is calculated and the motor angle is adjusted until the water-light coaxial coupling is achieved.

[0093] Specifically, Figure 6 As shown, the adjustment control process may include:

[0094] (1) First determine the pixel center coordinates of the focused spot and the nozzle (u l ,v l )、(u n ,v n );

[0095] (2) Using the camera intrinsic parameters and depth information, the pixel coordinates of the nozzle center are mapped to the camera coordinate system to obtain the coordinates of the nozzle center in the camera coordinate system (x c ,n,y c ,n,z c ,n), and map the pixel coordinates of the center of the focused light spot to the camera coordinate system to obtain the position of the center of the focused light spot in the camera coordinate system (x c ,l,yc ,l,z c ,l);

[0096] (3) Using the calibration matrix T mc Map the coordinates of the light spot and nozzle in the camera coordinate system to the device motion axis coordinate system:

[0097]

[0098] (4) Calculate the deviation between the nozzle center and the light spot focus:

[0099] Δx=x m,n -x m,l ,Δy=y m,n -y m,l ,Δz=z m,n -z m,l ;

[0100] (5) Adjust the lateral position of the light spot to compensate for Δx and Δy. Ensure that the center of the light spot coincides with the center of the nozzle until |Δx|,|Δy| converge to the set threshold. Specifically, the light spot is adjusted by motor deflection, and the angle deviation of the motor is calculated:

[0101]

[0102] Use motion control algorithms to drive the motor to complete deflection adjustment. Specifically, a PID controller can be constructed to take the deviation (Δx, Δy, Δz) as input and output the control command of the motor. Dynamic correction of focus and position is achieved.

[0103] (6) In addition, the focus of the liquid lens 32 can be controlled according to Δz so that the focal position of the light spot is located on the target plane below the nozzle opening, thereby making full use of the energy of the laser.

[0104] 7. Water-optical coaxial power detection step. After the water-optical coaxial coupling is completed, the coupling efficiency detection system 10 controls the robot arm S101 through the controller 1 to adjust the position of the power meter S102 to detect whether the coupling power meets the processing requirements. If not, adjust the power of the laser 5 and continue to detect until it meets the requirements, and then start processing the workpiece 9.

[0105] The beneficial effects of the method embodiments of the present disclosure are the same as those of the aforementioned device embodiments and will not be repeated here.

[0106] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the embodiments of the present disclosure. The drawings only show components related to the embodiments of the present disclosure rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0107] The following embodiments of the present disclosure are provided by specific specific examples to illustrate the embodiments of the present disclosure. Those skilled in the art can easily understand other advantages and effects of the present disclosure from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present disclosure.

[0108] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein may be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present disclosure, it should be understood by those skilled in the art that an aspect described herein may be implemented independently of any other aspect, and two or more of these aspects may be combined in various ways. For example, any number of aspects described herein may be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein may be used to implement this device and / or practice this method.

[0109] The embodiments described above are part of the embodiments of the present disclosure, but not all of them. Based on the embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the embodiments of the present disclosure.

[0110] In the description of the embodiments of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present disclosure. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0111] In the description of the embodiments of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0112] The above are only specific implementations of the embodiments of the present disclosure, but the protection scope of the embodiments of the present disclosure is not limited thereto. Any changes or replacements that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the embodiments of the present disclosure should be included in the protection scope of the embodiments of the present disclosure. Therefore, the protection scope of the embodiments of the present disclosure should be based on the protection scope of the claims.

Claims

1. A water-guided laser water-light coaxial coupling device, characterized in that: include: Laser assembly, water-light coupling assembly, CCD camera, control unit; The laser assembly includes a laser, a two-dimensional swing mirror in the laser light path, and a focusing mirror in the laser light path; the laser emitted by the laser is transmitted through the two-dimensional swing mirror in the laser light path and is focused by the focusing mirror to generate a focused light spot near the water jet nozzle of the water-light coupling assembly; The CCD camera is used to collect a first image of a focused light spot generated near the water jet nozzle; The control unit is used to perform water-light coaxial coupling analysis on the first image collected by the CCD camera, and determine the coaxial alignment of the focusing spot with the water jet nozzle and the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the relative positions of the center of the focusing spot and the center of the water jet nozzle determined by the analysis result, and control the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path according to the determined swing parameters through a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the laser light path.

2. The device according to claim 1, characterized in that include: The laser light path focusing lens is a liquid focusing lens; The control unit is also used to perform image analysis on the second image of the focused light spot captured by the CCD camera, determine the diameter of the focused light spot, and adjust the voltage at both ends of the laser light path focusing mirror through the liquid lens control system to adjust the size of the focused light spot to the target diameter.

3. The device according to claim 1, characterized in that The device also includes: A two-dimensional swing mirror in the camera optical path, the two-dimensional swing mirror in the camera optical path is used to cooperate with the semi-transparent and semi-reflective mirror to adjust the field of view of the CCD camera to collect images near the water jet nozzle; The control unit is also used to perform a field of view analysis of the CCD camera according to the second image captured by the CCD camera, and according to the field of view analysis result, adjust the swing of the two-dimensional swing mirror in the camera optical path on the X-axis and / or Y-axis through the two-dimensional swing mirror control device to achieve the field of view of the CCD camera near the water jet nozzle; the two-dimensional swing mirror control device also includes a camera optical path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the two-dimensional swing mirror in the camera optical path on the X-axis and the deflection of the Y-axis.

4. The device according to claim 3, characterized in that The device also includes: A camera optical path focusing lens, wherein the camera optical path focusing lens is a liquid focusing lens; The control unit is used to perform clarity analysis on the third image captured by the CCD camera, and according to the analysis result, adjust the voltage at both ends of the liquid focusing mirror of the camera optical path through the liquid lens control system to change the focal length of the CCD camera, so as to adjust the clarity of the field of view of the CCD camera.

5. The device according to claim 2 or 3, characterized in that: The device also includes: Temperature compensator; The control unit is further used to perform temperature compensation on the laser light path focusing mirror and / or the camera light path focusing mirror by controlling the temperature compensator.

6. A water-guided laser water-light coaxial coupling method, characterized in that: include: The first image of the focused light spot near the water jet nozzle outlet irradiated by the laser through the focusing mirror is collected by a CCD camera; Performing water-light coaxial coupling analysis based on the first image captured by the CCD camera to determine the relative position of the center of the focused light spot and the center of the water jet nozzle; Based on the determined relative position between the center of the focused light spot and the center of the water jet nozzle, determining the swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror of the laser light path so as to coaxially align the focused light spot with the water jet nozzle; According to the determined swing parameters of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path, the swing of the X-axis and / or Y-axis of the two-dimensional swing mirror in the laser light path is controlled by a two-dimensional swing mirror control device; the two-dimensional swing mirror control device includes a laser light path two-dimensional swing mirror X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the X-axis and the Y-axis of the two-dimensional swing mirror in the laser light path.

7. The method according to claim 6, characterized in that The method further includes: The laser light path focusing mirror is a liquid focusing mirror; the control unit is also used to perform image analysis on the second image of the focused light spot captured by the CCD camera, determine the diameter of the focused light spot, and adjust the voltage at both ends of the laser light path focusing mirror through a liquid lens control system to adjust the size of the focused light spot to the target diameter size.

8. The method according to claim 6, characterized in that include: Performing a field of view analysis of the CCD camera according to the second image captured by the CCD camera; According to the field of view analysis result, the swing of the two-dimensional swing mirror in the camera optical path on the X-axis and / or Y-axis is adjusted by a two-dimensional swing mirror control device to achieve the field of view of the CCD camera near the water jet nozzle; the two-dimensional swing mirror in the camera optical path is used to adjust the field of view of the CCD camera; the two-dimensional swing mirror control device also includes a two-dimensional swing mirror in the camera optical path X-axis deflection control mechanism and a Y-axis deflection control mechanism, which are used to respectively control the deflection of the two-dimensional swing mirror in the camera optical path on the X-axis and the deflection of the Y-axis.

9. The method according to claim 8, characterized in that include; Performing clarity analysis on the third image captured by the CCD camera; According to the analysis results, the voltage at both ends of the liquid focusing mirror of the camera optical path is adjusted through the liquid lens control system to change the focal length of the CCD camera to adjust the clarity of the field of view of the CCD camera; the camera optical path focusing mirror is a liquid focusing mirror.

10. The method according to claim 7 or 8, characterized in that: Also includes: The temperature compensator is controlled to perform temperature compensation on the laser optical path focusing mirror and / or the camera optical path focusing mirror.

Images