A rapid evaporation device for preparing compound thin films

Abstract

The present invention belongs to the technical field of solar film preparation, and in particular to a rapid evaporation device for compound film preparation. In view of the problem that the existing rapid evaporation device is not convenient for uniformly distributing vapor during use, which leads to uneven distribution of evaporation material deposition and affects the uniformity of film formation, the following scheme is proposed, which includes a chassis; four support legs, which are fixedly mounted on the bottom of the chassis, a chassis door is hinged on the chassis, and two symmetrical support plates are fixedly mounted on the top of the chassis; a vacuum tank, which is fixedly mounted on the two support plates, a sealing cover is connected to the vacuum tank, and a first empty groove and two symmetrical first sliding grooves are provided on the sealing cover. The present invention can facilitate uniform distribution of vapor during use, thereby avoiding uneven distribution of evaporation material deposition, effectively improving the uniformity of film formation, and has a simple structure and is easy to use.

Description

Technical Field

[0001] The present invention relates to the technical field of solar film preparation, in particular to a rapid evaporation device for preparing compound films. Background Art

[0002] With the continuous innovation and development of science and technology, compound thin film manufacturing technology continues to improve, and the application of compound thin films is becoming increasingly widespread and increasingly important. Currently, the rapid deposition production technology of compound thin films mainly adopts thermal evaporation methods, such as close-space sublimation (CSS) and linear evaporation. It mainly uses dry pot manual filling, which has short filling cycles and short continuous production time.

[0003] Patent document CN118390002A discloses an evaporation source suitable for the preparation of advanced compound thin films. The disclosure includes: a vacuum chamber, four supporting legs disposed at the bottom of the vacuum chamber, a vacuum pump and a vacuum tube disposed at the top of the vacuum chamber, one end of the vacuum tube connected to the vacuum pump, and the other end of the vacuum tube connected to the vacuum chamber. A steam pressure gauge is disposed at the top of the vacuum chamber to ensure that the vacuum chamber is in a vacuum state; a controller is disposed at the front of the vacuum chamber, and feeding mechanisms are disposed on both sides of the vacuum chamber, and both feeding mechanisms are connected by connecting pipes. The present invention facilitates fixation by pushing and pulling a hollow plate, and simultaneously controls the switching of two feeding pumps and the sealing switch, making processing control convenient and efficient.

[0004] However, the above patent document is not convenient for uniformly distributing the vapor during use, which leads to uneven distribution of the evaporated material deposition and affects the uniformity of the film formation. Therefore, we propose a rapid evaporation device for compound thin film preparation to solve the above problem. Summary of the Invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art that rapid evaporation equipment is not easy to evenly distribute the vapor during use, which leads to uneven distribution of the evaporated material deposition and affects the uniformity of film formation. A rapid evaporation equipment for compound thin film preparation is proposed to solve the problem that the rapid evaporation equipment in the prior art is not easy to evenly distribute the vapor during use, which leads to uneven distribution of the evaporated material deposition and affects the uniformity of film formation.

[0006] The present application provides a rapid evaporation device for preparing compound thin films using the following technical solutions:

[0007] A rapid evaporation device for preparing a compound thin film, comprising:

[0008] Chassis;

[0009] There are four supporting legs, all of which are fixedly installed at the bottom of the chassis. A door is hinged on the chassis, and two symmetrical supporting plates are fixedly installed on the top of the chassis.

[0010] The vacuum tank is fixedly mounted on the two support plates. A sealing cover is connected to the vacuum tank. The sealing cover is provided with a first empty slot and two symmetrical first sliding slots. A locking mechanism is provided in the two first sliding slots.

[0011] The support plate is fixedly installed in the vacuum tank, and a third slide groove and two symmetrical second slide grooves are provided on the support plate. A movable plate is slidably installed in the third slide groove, and a heating table is rotatably installed on the top of the movable plate. A second empty slot is provided in the movable plate, and a rotating mechanism is provided in the second empty slot. The rotating mechanism is used to drive the heating table to rotate;

[0012] The evaporation mechanism is arranged in the vacuum tank. The evaporation mechanism includes an external heating tube. Two symmetrical connecting columns are fixedly installed on the top of the external heating tube. The two connecting columns are fixedly installed on the top inner wall of the vacuum tank. The internal heating tube is fixedly installed in the external heating tube. A plurality of air outlet nozzles are provided on the outside of the internal heating tube. An air outlet is provided on the outside of the external heating tube. An insulation layer is connected to the outside of the external heating tube. A guide mechanism is provided in the air outlet. The guide mechanism is used to guide steam. Two second heating electrodes are connected to the external heating tube, and two first heating electrodes are connected to the internal heating tube. Two intercepting nets are fixedly installed in the internal heating tube, and both ends of the internal heating tube are fixedly connected with a feed pipe.

[0013] Furthermore, the locking mechanism includes two sliding rods, which are respectively slidably installed in the two first sliding grooves, and blocks are fixedly installed on the outer sides of the two sliding rods. The inner walls of the two second sliding grooves are provided with slots, and the two blocks are respectively matched with the two slots. The inner walls of both sides of the first empty slot are provided with second through holes, and the two second through holes are respectively communicated with the two first sliding grooves. The same first bidirectional screw rod is rotatably installed in the two second through holes, and the first bidirectional screw rod is threadedly connected to the two sliding rods. The first bidirectional screw rod is fixedly connected to the worm gear. When the worm gear rotates, the worm gear drives the first bidirectional screw rod to rotate, and the first bidirectional screw rod drives the two sliding rods to move horizontally, and the two sliding rods drive the two blocks to move horizontally respectively.

[0014] Furthermore, the rotating mechanism includes a transmission shaft, which is rotatably installed on the top of the movable plate. One end of the transmission shaft is fixedly installed with a second bevel gear and a first bevel gear on the outer side of the first transmission rod, and the second bevel gear is meshed with the first bevel gear. The other end of the transmission shaft is fixedly connected to the bottom of the heating platform. When the first transmission rod rotates, the first transmission rod drives the first bevel gear to rotate, the first bevel gear drives the second bevel gear to rotate, the second bevel gear drives the transmission shaft to rotate, and the transmission shaft drives the heating platform to rotate.

[0015] Furthermore, one side of the sliding rod and the inner wall of one side of the second sliding groove are provided with mounting grooves, and the first conductive column and the second conductive column are slidingly installed in the two mounting grooves respectively, and the outer sides of the first conductive column and the second conductive column are fixedly connected with compression springs, and one end of the two compression springs is fixedly connected to the inner walls of one side of the two mounting grooves respectively. A power supply is installed on the outer side of the vacuum tank, and the first conductive column, the power supply, the forward and reverse motor and the second conductive column are connected in sequence. When the first conductive column contacts the second conductive column, the forward and reverse motor can be automatically turned on.

[0016] Furthermore, the guide mechanism includes two guide plates, and two third transmission rods are rotatably installed in the air outlet. The two third transmission rods are fixedly connected to the two guide plates respectively. A third sprocket and a fourth sprocket are fixedly installed on the outer sides of the two third transmission rods respectively. The third sprocket and the fourth sprocket are engaged with the same second chain. When the third transmission rod rotates, the third sprocket and the fourth sprocket are driven by the second chain.

[0017] Furthermore, a rotating wheel is fixedly installed at one end of the second transmission rod, a rotating shaft is rotatably installed on the rotating wheel, one end of the rotating shaft is fixedly connected to a sliding sleeve, a guide rod is fixedly installed on the outer side of the third transmission rod, and the guide rod is slidably installed in the sliding sleeve. When the second transmission rod rotates, the second transmission rod drives the rotating wheel to rotate, and the rotating wheel drives the rotating shaft and the sliding sleeve to perform circular motion. The sliding sleeve cooperates with the guide rod to drive it to swing back and forth.

[0018] Furthermore, a second transmission rod is rotatably installed on the inner wall of one side of the vacuum tank, and a first sprocket and a second sprocket are fixedly installed on the outer side of the rectangular rod and the outer side of the second transmission rod respectively. The first sprocket and the second sprocket are engaged with the same first chain. When the rectangular rod rotates, the rectangular rod drives the first sprocket to rotate, and the first sprocket drives the second sprocket to rotate through the first chain.

[0019] Furthermore, two symmetrical fourth slide grooves are provided on the top of the heating table, and a splint is slidably installed in the two fourth slide grooves. A fourth through hole is provided on one side of the heating table, and a second bidirectional screw rod is rotatably installed in the fourth through hole. The second bidirectional screw rod is threadedly connected to the two splints, and a hand wheel is fixedly installed on one end of the second bidirectional screw rod. When the hand wheel is rotated, the hand wheel drives the second bidirectional screw rod to rotate, and the second bidirectional screw rod drives the two splints to move horizontally.

[0020] Furthermore, a third through hole is provided on one side of the vacuum tank, and a rectangular rod is rotatably installed in the third through hole. A forward and reverse motor is fixedly installed on one side of the vacuum tank, and the output shaft of the forward and reverse motor is fixedly connected to one end of the rectangular rod. A first transmission rod is rotatably installed on the movable plate, and a rectangular groove is provided on one end of the first transmission rod. The rectangular rod is slidably installed in the rectangular groove. Through the arrangement of the rectangular rod and the rectangular groove, when the forward and reverse motor is turned on, the forward and reverse motor drives the rectangular rod to rotate, and the rectangular rod drives the first transmission rod to rotate.

[0021] Furthermore, the sealing cover is provided with a first through hole, which is communicated with the first empty slot. A worm is rotatably installed in the first through hole, and one end of the worm is fixedly connected to a handle. The sealing cover is provided with an observation hole, and a glass panel is fixedly installed in the observation hole. The worm is engaged with a worm wheel. Two storage tanks are installed in the chassis. The outer sides of the two storage tanks are fixedly connected with a first connecting pipe, one end of the two first connecting pipes is connected to a material pump, and the tops of the two storage tanks are fixedly connected with a second connecting pipe, and the two second connecting pipes are fixedly connected to the two feed pipes respectively. When the handle is turned, the handle drives the worm to rotate, and the worm drives the worm wheel to rotate.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. In this solution, when the handle is turned, the worm drives the worm wheel to rotate, the worm wheel drives the first bidirectional screw to rotate, the first bidirectional screw drives the two slide bars to move closer to each other, the two slide bars respectively drive the two clamping blocks to move closer to each other, and the two clamping blocks respectively cooperate with the two clamping slots, thereby quickly connecting the sealing cover and the vacuum tank;

[0024] 2. In this solution, when the forward and reverse motors are turned on, they drive the rectangular rod to rotate. The rectangular rod cooperates with the rectangular slot to drive the first transmission rod to rotate. The first transmission rod drives the first bevel gear to rotate. The first bevel gear drives the second bevel gear to rotate. The second bevel gear drives the transmission shaft to rotate. The transmission shaft drives the heating table to rotate, thereby allowing the vapor to be evenly deposited on the substrate.

[0025] 3. In this solution, when the rectangular rod rotates, the rectangular rod drives the first sprocket to rotate, the first sprocket drives the second sprocket to rotate through the first chain, the second transmission rod drives the rotating wheel to rotate, the rotating wheel drives the rotating shaft and the sliding sleeve to perform circular motion, the sliding sleeve drives the guide rod to swing back and forth, the guide rod drives the third transmission rod to rotate back and forth, and the two third transmission rods respectively drive the two guide plates to swing back and forth, so that the two guide plates can guide the steam to make it evenly distributed.

[0026] The present invention can facilitate uniform distribution of vapor during use, thereby avoiding uneven distribution of evaporation material deposition, effectively improving the uniformity of film formation, and has a simple structure and is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the main structure of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0028] Figure 2 This is a schematic structural diagram of a cross-section of a chassis of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0029] Figure 3 This is a schematic structural diagram of a vacuum tank of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0030] Figure 4 This is a schematic structural diagram of a front view of a sealing cover of a rapid evaporation device for preparing a compound thin film proposed by the present invention;

[0031] Figure 5 This is a schematic diagram of the rear view of a sealing cover of a rapid evaporation device for preparing a compound thin film proposed by the present invention;

[0032] Figure 6 This is a schematic diagram of the structure inside a vacuum tank of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0033] Figure 7 This is a schematic structural diagram of a rotating mechanism of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0034] Figure 8 This is a schematic structural diagram of an evaporation mechanism of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0035] Figure 9 This is a schematic structural diagram of a rectangular rod of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0036] Figure 10 This is a schematic structural diagram of an internal heating tube of a rapid evaporation device for preparing compound thin films proposed by the present invention;

[0037] Figure 11 The invention proposes a rapid evaporation device for preparing compound thin films. Figure 5 A schematic diagram of the structure of the enlarged part A;

[0038] Figure 12 The invention proposes a rapid evaporation device for preparing compound thin films. Figure 5 A schematic diagram of the structure of the enlarged portion B;

[0039] Figure 13 The invention proposes a rapid evaporation device for preparing compound thin films. Figure 7 The enlarged structural diagram of part C in the middle;

[0040] Figure 14 The invention proposes a rapid evaporation device for preparing compound thin films. Figure 8 The enlarged structural diagram of part D in the middle;

[0041] Figure 15The invention proposes a rapid evaporation device for preparing compound thin films. Figure 9 Schematic diagram of the structure of the enlarged part E in the middle.

[0042] Figure numerals: 1, chassis; 2, cabinet door; 3, support leg; 4, support plate; 5, vacuum tank; 6, sealing cover; 7, observation hole; 8, power supply; 9, glass panel; 10, storage tank; 11, material pump; 12, first connecting pipe; 13, second connecting pipe; 14, material delivery pipe; 15, inner heating pipe; 16, outer heating pipe; 17, first heating electrode; 18, second heating electrode; 19, connecting column; 20, air outlet; 21, air outlet; 22, support plate; 23, third slide; 24, movable plate; 25, heating table; 26, first empty slot; 27, first slide; 28, slide rod; 29, block; 30, handle; 31, worm; 32, first bidirectional screw; 33, worm gear; 34, Mounting slot; 35. Compression spring; 36. First conductive column; 37. Second conductive column; 38. Forward and reverse motor; 39. Rectangular rod; 40. First transmission rod; 41. Second slide groove; 42. Second empty slot; 43. First bevel gear; 44. Second bevel gear; 45. Transmission shaft; 46. Hand wheel; 47. Second bidirectional screw rod; 48. Fourth slide groove; 49. Clamp; 50. First sprocket; 51. First chain; 52. Second sprocket; 53. Second transmission rod; 54. Rotating wheel; 55. Rotating shaft; 56. Sleeve; 57. Guide rod; 58. Third transmission rod; 59. Guide plate; 60. Third sprocket; 61. Second chain; 62. Fourth sprocket; 63. Intercepting net; 64. Insulation layer. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0044] Example 1

[0045] Reference Figures 1-15 , a rapid evaporation device for preparing compound thin films, comprising:

[0046] Chassis 1;

[0047] Support legs 3, four of which are fixedly mounted on the bottom of the chassis 1, a door 2 is hingedly mounted on the chassis 1, and two symmetrical support plates 4 are fixedly mounted on the top of the chassis 1;

[0048] The vacuum tank 5 is fixedly mounted on the two support plates 4. The vacuum tank 5 is connected to a sealing cover 6. The sealing cover 6 is provided with a first empty slot 26 and two symmetrical first sliding slots 27. The two first sliding slots 27 are provided with locking mechanisms.

[0049] The support plate 22 is fixedly installed in the vacuum tank 5. The support plate 22 is provided with a third chute 23 and two symmetrical second chute 41. The movable plate 24 is slidably installed in the third chute 23. The heating table 25 is rotatably installed on the top of the movable plate 24. The movable plate 24 is provided with a second empty slot 42. The second empty slot 42 is provided with a rotating mechanism, which is used to drive the heating table 25 to rotate.

[0050] The evaporation mechanism is arranged in the vacuum tank 5. The evaporation mechanism includes an external heating tube 16. Two symmetrical connecting columns 19 are fixedly installed on the top of the external heating tube 16. The two connecting columns 19 are fixedly installed on the top inner wall of the vacuum tank 5. The internal heating tube 15 is fixedly installed in the external heating tube 16. A plurality of air outlet nozzles 20 are provided on the outside of the internal heating tube 15. An air outlet 21 is provided on the outside of the external heating tube 16. The outside of the external heating tube 16 is connected to an insulation layer 64. A guide mechanism is provided in the air outlet 21. The guide mechanism is used to guide the steam. Two second heating electrodes 18 are connected to the external heating tube 16, and two first heating electrodes 17 are connected to the internal heating tube 15. Two intercepting nets 63 are fixedly installed in the internal heating tube 15. Both ends of the internal heating tube 15 are fixedly connected to the feed pipe 14.

[0051] Reference Figure 2-Figure 6 、 Figure 11 and Figure 12The locking mechanism includes two slide bars 28, which are slidably installed in the two first slide grooves 27 respectively. A clamping block 29 is fixedly installed on the outside of the two slide bars 28. The inner walls of the two second slide grooves 41 are provided with a clamping groove. The two clamping blocks 29 are respectively matched with the two clamping grooves. The inner walls of both sides of the first empty slot 26 are provided with a second through hole. The two second through holes are respectively connected to the two first slide grooves 27. The same first bidirectional screw rod 32 is rotatably installed in the two second through holes. The first bidirectional screw rod 32 is threadedly connected to the two slide bars 28. The first bidirectional screw rod 32 is fixedly connected to the worm gear 33. When the worm gear 33 rotates, the worm gear 33 drives the first bidirectional screw rod 32 to rotate. The first bidirectional screw rod 32 drives the two slide rods 28 to move horizontally. The two slide rods 28 respectively drive the two block 29 to move horizontally. One side of the slide rod 28 and the inner wall of one side of the second slide groove 41 are both provided with a mounting groove 34. The first conductive column 36 and the second conductive column 37 are respectively slidably mounted in the two mounting grooves 34. The outer sides of the first conductive column 36 and the second conductive column 37 are fixedly connected to the compression spring 35. The two conductive columns 36 and 37 are fixedly connected to the outer sides of the first conductive column 36 and the second conductive column 37. One end of each compression spring 35 is fixedly connected to the inner wall of one side of the two mounting grooves 34. A power supply 8 is installed on the outside of the vacuum tank 5. The first conductive column 36, the power supply 8, the forward and reverse motor 38 and the second conductive column 37 are connected in sequence. When the first conductive column 36 contacts the second conductive column 37, the forward and reverse motor 38 can be automatically turned on. A first through hole is provided on the sealing cover 6. The first through hole is connected to the first empty slot 26. A worm 31 is rotatably installed in the first through hole. One end of the worm 31 is fixedly connected to the handle 30. The sealing cover 6 is provided with a There is an observation hole 7, a glass panel 9 is fixedly installed in the observation hole 7, a worm 31 is engaged with a worm gear 33, two storage tanks 10 are installed in the chassis 1, the outer sides of the two storage tanks 10 are fixedly connected with a first connecting pipe 12, one end of the two first connecting pipes 12 are connected to a material pump 11, the tops of the two storage tanks 10 are fixedly connected with a second connecting pipe 13, and the two second connecting pipes 13 are fixedly connected to the two feed pipes 14 respectively. When the handle 30 is turned, the handle 30 drives the worm 31 to rotate, and the worm 31 drives the worm gear 33 to rotate.

[0052] Reference Figure 7-Figure 9 、 Figure 13-15The rotating mechanism includes a transmission shaft 45, which is rotatably mounted on the top of the movable plate 24. One end of the transmission shaft 45 is fixedly mounted with a second bevel gear 44 and a first bevel gear 43 on the outer side of the first transmission rod 40. The second bevel gear 44 is meshed with the first bevel gear 43. The other end of the transmission shaft 45 is fixedly connected to the bottom of the heating platform 25. When the first transmission rod 40 rotates, the first transmission rod 40 drives the first bevel gear 43 to rotate, the first bevel gear 43 drives the second bevel gear 44 to rotate, and the second bevel gear 44 drives the transmission shaft 45 to rotate. The transmission shaft 45 drives the heating platform 25 to rotate. One end of the second transmission rod 53 is fixedly mounted with a rotating wheel 54, and the rotating wheel 54 is rotatably mounted with a rotating shaft 55. One end of the rotating shaft 55 is fixedly connected with a sliding wheel. The guide rod 57 is fixedly installed on the outer side of the third transmission rod 58, and the guide rod 57 is slidably installed in the sliding sleeve 56. When the second transmission rod 53 rotates, the second transmission rod 53 drives the rotating wheel 54 to rotate, and the rotating wheel 54 drives the rotating shaft 55 and the sliding sleeve 56 to do circular motion. The sliding sleeve 56 cooperates with the guide rod 57 to drive it to swing back and forth. The guide mechanism includes two guide plates 59. Two third transmission rods 58 are rotatably installed in the air outlet 21. The two third transmission rods 58 are respectively fixedly connected to the two guide plates 59. The outer sides of the two third transmission rods 58 are respectively fixedly installed with a third sprocket 60 and a fourth sprocket 62. The third sprocket 60 and the fourth sprocket 62 are engaged with the same second chain 61. When the third transmission rod 58 rotates, the third sprocket 60 and The fourth sprocket 62 is driven by the second chain 61. The second transmission rod 53 is rotatably installed on the inner wall of one side of the vacuum tank 5. The first sprocket 50 and the second sprocket 52 are fixedly installed on the outer side of the rectangular rod 39 and the outer side of the second transmission rod 53 respectively. The first sprocket 50 and the second sprocket 52 are meshed with the same first chain 51. When the rectangular rod 39 rotates, the rectangular rod 39 drives the first sprocket 50 to rotate, and the first sprocket 50 drives the second sprocket 52 to rotate through the first chain 51. Two symmetrical fourth slide grooves 48 are provided on the top of the heating table 25. Clamps 49 are slidably installed in the two fourth slide grooves 48. A fourth through hole is provided on one side of the heating table 25. The second bidirectional screw rod 47 is rotatably installed in the fourth through hole. The second bidirectional screw rod 47 and the two clamps 49 is threadedly connected, and a handwheel 46 is fixedly installed on one end of the second bidirectional screw rod 47. When the handwheel 46 is rotated, the handwheel 46 drives the second bidirectional screw rod 47 to rotate, and the second bidirectional screw rod 47 drives the two clamping plates 49 to move horizontally. A third through hole is provided on one side of the vacuum tank 5, and a rectangular rod 39 is rotatably installed in the third through hole. A forward and reverse motor 38 is fixedly installed on one side of the vacuum tank 5, and the output shaft of the forward and reverse motor 38 is fixedly connected to one end of the rectangular rod 39. A first transmission rod 40 is rotatably installed on the movable plate 24, and a rectangular groove is provided on one end of the first transmission rod 40. The rectangular rod 39 is slidably installed in the rectangular groove. Through the arrangement of the rectangular rod 39 and the rectangular groove, when the forward and reverse motor 38 is turned on, the forward and reverse motor 38 drives the rectangular rod 39 to rotate.The rectangular rod 39 drives the first transmission rod 40 to rotate.

[0053] The implementation principle of this embodiment is as follows: when in use, the substrate is placed on the top of the heating table 25, and the hand wheel 46 is turned. The hand wheel 46 drives the second bidirectional screw 47 to rotate, and the second bidirectional screw 47 drives the two clamping plates 49 to move closer to each other. The two clamping plates 49 can clamp the substrate, and then the sealing cover 6 is pushed to move toward the vacuum tank 5. When the sealing cover 6 contacts the vacuum tank 5, the two slide rods 28 are respectively inserted into the two second slide grooves 41, and the handle 30 is turned. The handle 30 drives the worm 31 to rotate, and the worm 31 drives the worm gear 33 to rotate, and the worm gear 33 drives the first bidirectional screw 32 to rotate, and the first bidirectional screw 32 drives the two slide rods 28 to move away from each other, and the two slide rods 28 respectively drive the two blocking blocks 29 The two blocks 29 are respectively mounted on the two card slots, so that the sealing cover 6 can be quickly connected to the vacuum tank 5. Then, the heating table 25 is started to preheat the substrate, and the two material pumps 11 are turned on. The two material pumps 11 respectively transport the carrier gas and powder in the two storage tanks 10 to the inner heating tube 15 through the two second connecting pipes 13 and the two material delivery pipes 14, so that the two first heating electrodes 17 and the two second heating electrodes 18 are energized, and then the two first heating electrodes 17 can heat the carrier gas and powder transported to the inner heating tube 15. The carrier gas and powder are sublimated by heating to form vapor. After uniform gas, they enter the outer heating tube 16 through multiple gas outlet nozzles 20, and the two second heating electrodes 18 are electrically connected to the outside. The heating tube 16 is heated to increase the kinetic energy of molecular thermal motion, and then the vapor is coated on the substrate through the gas outlet 21. At the same time, the sliding rod 28 drives the first conductive column 36 to move horizontally. The first conductive column 36 contacts the second conductive column 37, and then the forward and reverse motor 38 can be automatically turned on. The forward and reverse motor 38 drives the rectangular rod 39 to rotate. The rectangular rod 39 cooperates with the rectangular groove to drive the first transmission rod 40 to rotate. The first transmission rod 40 drives the first bevel gear 43 to rotate. The first bevel gear 43 drives the second bevel gear 44 to rotate. The second bevel gear 44 drives the transmission shaft 45 to rotate. The transmission shaft 45 drives the heating table 25 to rotate, which can make the substrate rotate so that it receives the vapor evenly. At the same time, the rectangular rod 39 drives the first sprocket 50 to rotate, the first sprocket 50 drives the second sprocket 52 to rotate through the first chain 51, the second sprocket 52 drives the second transmission rod 53 to rotate, the second transmission rod 53 drives the rotating wheel 54 to rotate, the rotating wheel 54 drives the rotating shaft 55 and the sliding sleeve 56 to perform circular motion, the sliding sleeve 56 drives the guide rod 57 to swing back and forth, the guide rod 57 drives the third transmission rod 58 to rotate, the third transmission rod 58 drives the third sprocket 60 to rotate, the third sprocket 60 drives the fourth sprocket 62 to rotate through the second chain 61, and then the two third transmission rods 58 respectively drive the two guide plates 59 to swing back and forth, so that the vapor is evenly distributed, thereby avoiding uneven distribution of the evaporation material deposition and effectively improving the uniformity of film formation.

[0054] Example 2

[0055] The difference between this embodiment and the first embodiment is that two symmetrical guide rods are fixedly installed on the inner wall of the third sliding groove 23, and two symmetrical guide grooves are opened on one side of the movable plate 24. The two guide rods are slidably installed in the two guide grooves respectively. When the movable plate 24 moves horizontally, the two guide rods can play a role in stabilizing the horizontal movement of the movable plate 24.

[0056] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A rapid evaporation device for preparing compound thin films, characterized by: include: Chassis (1); Support legs (3), four support legs (3) are provided, and the four support legs (3) are all fixedly mounted on the bottom of the chassis (1); a door (2) is hingedly mounted on the chassis (1); and two symmetrical support plates (4) are fixedly mounted on the top of the chassis (1); A vacuum tank (5), the vacuum tank (5) is fixedly mounted on the two support plates (4), a sealing cover (6) is connected to the vacuum tank (5), a first empty slot (26) and two symmetrical first sliding slots (27) are provided on the sealing cover (6), and a locking mechanism is provided in the two first sliding slots (27); A support plate (22), the support plate (22) is fixedly installed in the vacuum tank (5), a third slide groove (23) and two symmetrical second slide grooves (41) are provided on the support plate (22), a movable plate (24) is slidably installed in the third slide groove (23), a heating table (25) is rotatably installed on the top of the movable plate (24), a second empty groove (42) is provided in the movable plate (24), a rotating mechanism is provided in the second empty groove (42), and the rotating mechanism is used to drive the heating table (25) to rotate; The evaporation mechanism is arranged in the vacuum tank (5), and the evaporation mechanism includes an external heating tube (16). Two symmetrical connecting columns (19) are fixedly installed on the top of the external heating tube (16). The two connecting columns (19) are fixedly installed on the top inner wall of the vacuum tank (5). An internal heating tube (15) is fixedly installed in the external heating tube (16). A plurality of air outlet nozzles (20) are provided on the outside of the internal heating tube (15). An air outlet (21) is provided on the outside of the external heating tube (16). An insulation layer (64) is connected to the outside of the external heating tube (16). A guide mechanism is provided in the air outlet (21). The guide mechanism is used to guide steam. Two second heating electrodes (18) are connected to the external heating tube (16). Two first heating electrodes (17) are connected to the internal heating tube (15). Two interception nets (63) are fixedly installed in the internal heating tube (15). Both ends of the internal heating tube (15) are fixedly connected to the feed pipe (14).

2. The rapid evaporation device for preparing compound thin films according to claim 1, characterized in that: The sealing cover (6) is provided with a first through hole, the first through hole being communicated with the first empty slot (26), a worm (31) being rotatably mounted in the first through hole, one end of the worm (31) being fixedly connected to a handle (30), an observation hole (7) being provided in the sealing cover (6), a glass panel (9) being fixedly mounted in the observation hole (7), a worm gear (33) being meshed with the worm (31), two material storage tanks (10) being mounted in the chassis (1), the outer sides of the two material storage tanks (10) being fixedly connected to a first connecting pipe (12), one end of the two first connecting pipes (12) being connected to a material pump (11), the tops of the two material storage tanks (10) being fixedly connected to a second connecting pipe (13), the two second connecting pipes (13) being fixedly connected to the two material delivery pipes (14) respectively.

3. The rapid evaporation device for preparing compound thin films according to claim 2, characterized in that: The locking mechanism includes two slide bars (28), the two slide bars (28) are respectively slidably mounted in the two first slide grooves (27), the outer sides of the two slide bars (28) are fixedly mounted with a clamping block (29), the inner walls of the two second slide grooves (41) are respectively provided with a clamping groove, the two clamping blocks (29) are respectively matched with the two clamping grooves, the inner walls of both sides of the first empty slot (26) are respectively provided with a second through hole, the two second through holes are respectively communicated with the two first slide grooves (27), the same first bidirectional screw rod (32) is rotatably mounted in the two second through holes, the first bidirectional screw rod (32) is threadedly connected to the two slide bars (28), and the first bidirectional screw rod (32) is fixedly connected to the worm gear (33).

4. The rapid evaporation device for preparing compound thin films according to claim 3, characterized in that: A third through hole is provided on one side of the vacuum tank (5), and a rectangular rod (39) is rotatably mounted in the third through hole. A forward and reverse motor (38) is fixedly mounted on one side of the vacuum tank (5), and an output shaft of the forward and reverse motor (38) is fixedly connected to one end of the rectangular rod (39). A first transmission rod (40) is rotatably mounted on the movable plate (24), and a rectangular groove is provided on one end of the first transmission rod (40), and the rectangular rod (39) is slidably mounted in the rectangular groove.

5. The rapid evaporation device for preparing compound thin films according to claim 4, characterized in that: The rotating mechanism includes a transmission shaft (45), which is rotatably mounted on the top of the movable plate (24), and one end of the transmission shaft (45) is fixedly mounted with a second bevel gear (44) and a first bevel gear (43) on the outer side of the first transmission rod (40), and the second bevel gear (44) and the first bevel gear (43) are meshed with each other. The other end of the transmission shaft (45) is fixedly connected to the bottom of the heating table (25).

6. The rapid evaporation device for preparing compound thin films according to claim 5, characterized in that: Two symmetrical fourth slide grooves (48) are provided on the top of the heating table (25), and a clamping plate (49) is slidably installed in each of the two fourth slide grooves (48). A fourth through hole is provided on one side of the heating table (25), and a second bidirectional screw rod (47) is rotatably installed in the fourth through hole. The second bidirectional screw rod (47) is threadedly connected to the two clamping plates (49), and a hand wheel (46) is fixedly installed at one end of the second bidirectional screw rod (47).

7. The rapid evaporation device for preparing compound thin films according to claim 6, characterized in that: A mounting groove (34) is provided on one side of the slide rod (28) and an inner wall of one side of the second slide groove (41). A first conductive column (36) and a second conductive column (37) are slidably mounted in the two mounting grooves (34), respectively. Compression springs (35) are fixedly connected to the outer sides of the first conductive column (36) and the second conductive column (37). One end of the two compression springs (35) is fixedly connected to the inner wall of one side of the two mounting grooves (34), respectively. A power supply (8) is installed on the outer side of the vacuum tank (5), and the first conductive column (36), the power supply (8), the forward and reverse motor (38) and the second conductive column (37) are connected in sequence.

8. The rapid evaporation device for preparing compound thin films according to claim 7, characterized in that: A second transmission rod (53) is rotatably mounted on an inner wall of one side of the vacuum tank (5); a first sprocket (50) and a second sprocket (52) are fixedly mounted on the outer sides of the rectangular rod (39) and the second transmission rod (53), respectively; and a first chain (51) is meshed with the first sprocket (50) and the second sprocket (52).

9. The rapid evaporation device for preparing compound thin films according to claim 8, characterized in that: The guide mechanism comprises two guide plates (59), two third transmission rods (58) are rotatably mounted in the air outlet (21), the two third transmission rods (58) are respectively fixedly connected to the two guide plates (59), and a third sprocket (60) and a fourth sprocket (62) are respectively fixedly mounted on the outer sides of the two third transmission rods (58), and the third sprocket (60) and the fourth sprocket (62) are meshed with the same second chain (61).

10. The rapid evaporation device for preparing compound thin films according to claim 9, characterized in that: A rotating wheel (54) is fixedly mounted on one end of the second transmission rod (53), a rotating shaft (55) is rotatably mounted on the rotating wheel (54), and a sliding sleeve (56) is fixedly connected to one end of the rotating shaft (55). A guide rod (57) is fixedly mounted on the outer side of the third transmission rod (58), and the guide rod (57) is slidably mounted in the sliding sleeve (56).

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