Cooling mechanism of magnetic suspension turbine vacuum pump

Abstract

The invention discloses a cooling mechanism of a magnetic suspension turbine vacuum pump, relates to the field of cooling of turbine vacuum pumps, and solves the problem that the cooling cost is relatively high due to the fact that an existing cooling mechanism of the magnetic suspension turbine vacuum pump is single in cooling mode and difficult to automatically switch the cooling mode according to the operation intensity of the vacuum pump during use. Comprising a base, a liquid cooling mechanism and a spraying mechanism, a fixed cylinder is fixedly connected to the base, a rotating ring is rotatably connected to the inner wall of the fixed cylinder, the liquid cooling mechanism comprises a driving blade and a water cooling pipe, and the spraying mechanism comprises a spraying head and a control piece. And when the rotating speed of the driving blade is lower than a set value, the spray head is closed, liquid cooling is conducted only through the water cooling pipe, when the rotating speed of the driving blade is larger than the set value, the spray head is gradually controlled through the control piece to start liquid nitrogen spraying, and the cooling efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of turbine vacuum pump cooling, in particular to a cooling mechanism of a magnetically suspended turbine vacuum pump. Background Art

[0002] With the development of technology, magnetic levitation vacuum pumps have gradually entered people's field of vision. With the advantages of low loss and low noise, they are widely used in the fields of medicine, papermaking, food, etc. However, with the increasing requirements for air extraction and vacuum degree, single-stage magnetic levitation vacuum pumps can no longer meet people's needs, and two or more magnetic levitation vacuum pumps need to be used in series. In a multi-stage magnetic levitation turbine vacuum pump system in series, the temperature of the gas discharged from the upper vacuum pump is very high. If the gas is not cooled, the power consumption of the vacuum pump of the next stage will increase, the loss will increase, and the service life of the vacuum pump of the next stage will be reduced.

[0003] Existing cooling mechanisms mostly use coolant pipeline transportation to cool down the temperature. During the transportation process, the temperature is isolated by the pipeline, and the cooling efficiency is relatively weak. The invention patent with publication number CN116123143B discloses a self-cooling mechanism of a magnetic levitation turbine vacuum pump. The mechanism uses liquid nitrogen spraying into the gas in the pump to directly cool down the temperature, which improves the cooling efficiency. However, liquid nitrogen is a consumable and cannot be recycled like coolant after being discharged, which greatly increases the cooling cost. In addition, when the operating power of the vacuum pump is low, the heat level is also relatively low. At this time, directly using high-cost liquid nitrogen for cooling will cause unnecessary waste and increase in usage costs. Summary of the invention

[0004] The object of the present invention is to provide a cooling mechanism for a magnetically levitated turbine vacuum pump that is convenient for automatically switching the cooling mode according to the operating power of the vacuum pump, thereby improving the cooling efficiency and reducing the cooling cost, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a cooling mechanism of a magnetic levitation turbine vacuum pump, comprising a base, a liquid cooling mechanism and a spray mechanism, wherein a fixed cylinder is fixedly connected to the base, and a rotating ring is rotatably connected to the inner wall of the fixed cylinder, and the liquid cooling mechanism comprises a plurality of groups of driving blades fixedly connected to the inner wall of the rotating ring, and a water-cooling pipe is fixedly connected to each of the plurality of driving blades. A connecting shaft is provided in the fixed cylinder and is fixedly connected to one end of each of the plurality of driving blades away from the rotating ring, and is used to drive the driving blades to rotate when the gas in the vacuum pump flows through the fixed cylinder, so that the liquid cooling mechanism draws the coolant into one end of the water-cooling pipe, and then draws the coolant from the water-cooling pipe. The liquid nitrogen is discharged from the other end of the driving blade to achieve the purpose of automatic water-cooling transportation. The spray mechanism includes a plurality of nozzles installed on the driving blade. The driving blade is provided with a control component for controlling the operating state and spraying intensity of the nozzle according to the rotation speed of the driving blade. The control component is used to close the nozzle when the rotation speed of the driving blade is lower than the set value, and only liquid cooling is performed through the water-cooling pipe. When the rotation speed of the driving blade is greater than the set value, the nozzle is gradually controlled by the control component to start spraying liquid nitrogen, and the spraying rate increases with the increase of the rotation speed of the driving blade, thereby improving the cooling efficiency and facilitating the automatic switching of the cooling mode according to the operating power of the vacuum pump, thereby improving the cooling efficiency and reducing the cooling cost.

[0006] Preferably, the spray mechanism also includes a liquid nitrogen tank fixedly installed in the base, a guide groove is opened in the driving blade, an annular tube is fixedly connected in the fixed cylinder, one side opening of the annular tube rotates in engagement with the outer wall of the rotating ring, one end of the guide groove is fixedly connected to a connecting tube connected to the annular tube, and the annular tube is connected to a delivery pipe connected to the output end of the liquid nitrogen tank, so that when the rotation speed of the driving blade is lower than the set value, the nozzle is closed and liquid cooling is performed only through the water cooling pipe. When the rotation speed of the driving blade is greater than the set value, the control component gradually controls the nozzle to start spraying liquid nitrogen, and the spraying rate increases with the increase of the rotation speed of the driving blade, thereby improving the cooling efficiency.

[0007] Preferably, the control member includes a control tube slidably connected to the inner wall of the guide groove, both ends of the control tube are fixedly connected with a first tension spring and a first spring, one end of the first tension spring is fixedly connected to one end of the guide groove, one end of the first spring is fixedly connected to one end of the connecting tube, a plurality of groups of first connecting grooves are evenly arranged on the side of the control tube, and a plurality of groups of second connecting grooves that can be connected with the first connecting groove and the nozzle are evenly arranged in the driving blade, so as to control the operating state and spraying intensity of the nozzle according to the rotation speed of the driving blade.

[0008] Preferably, the liquid cooling mechanism also includes a refrigerator fixedly installed in the base, the input end of the refrigerator is connected to an input pipe, the output end of the refrigerator is connected to an output pipe, the fixed cylinder is fixedly connected with a first annular tube and a second annular tube, the outer wall of the rotating ring is rotatably connected to the inner wall of the first annular tube and the second annular tube, the axis of the inner wall of the rotating ring is different from the axis of the outer wall of the first annular tube and the second annular tube, the rotating ring is provided with a driving member for automatically transporting the cooling liquid in the output pipe to one end of the water-cooling tube during rotation, and transporting the cooling liquid at the other end of the water-cooling tube to the input pipe, so that when the gas in the vacuum pump flows through the fixed cylinder, the driving blade is driven to rotate, so that the liquid cooling mechanism draws the cooling liquid into one end of the water-cooling tube, and then discharges it from the other end of the water-cooling tube, thereby achieving the purpose of automatic water-cooling transportation.

[0009] Preferably, the driving member includes multiple groups of driving plates installed on the rotating ring, the rotating ring is provided with a sliding groove, the driving plate is slidably connected to the inner wall of the sliding groove, one end of the driving plate is fixedly connected to a second spring fixedly connected to the sliding groove, multiple groups of driving plates are respectively slidably fitted with the inner walls of the first annular tube and the second annular tube, the upper inner wall of the first annular tube is fitted with the outer wall of the rotating ring, and the lower inner wall of the second annular tube is fitted with the outer wall of the rotating ring, and a conveying member for connecting and conveying coolant is provided in the fixed cylinder, so as to automatically convey the coolant in the output pipe to one end of the water-cooling pipe during rotation, and convey the coolant at the other end of the water-cooling pipe to the input pipe.

[0010] Preferably, the conveying member includes multiple groups of first pipes connected to one end of the output pipe, and the multiple groups of first pipes are respectively fixedly connected to the outer wall of the first annular tube, and the first pipe is connected to the first annular tube. One end of the water-cooling pipe passes through the rotating ring and is connected to the first annular tube. One end of the input pipe is connected to multiple groups of second pipes, and the multiple groups of second pipes are respectively fixedly connected to the outer wall of the second annular tube. The second pipe is connected to the second annular tube. The other end of the water-cooling pipe passes through the rotating ring and is connected to the second annular tube, so as to facilitate the connection and transportation of the cooling liquid.

[0011] Preferably, one-way valves are fixedly connected to both ends of the water-cooling pipe and in the first pipe and the second pipe, respectively. The one-way valves are used to control the coolant to be input from the first pipe into the first annular pipe in one direction, then from the first annular pipe into the water-cooling pipe, then discharged into the second annular pipe, and finally discharged into the second pipe through the second annular pipe, so as to facilitate the control of the one-way flow of the coolant in the water-cooling pipe.

[0012] Preferably, a fixed ring is fixedly connected to the side of the rotating ring, and the outer wall of the fixed ring is rollingly connected to multiple groups of balls rollingly connected to the inner wall of the fixed cylinder, so as to reduce the friction between the outer wall of the rotating ring and the inner wall of the fixed cylinder.

[0013] Preferably, both ends of the fixed cylinder are respectively fixedly connected with threaded pipes for docking and communicating with the delivery end of the vacuum pump, so as to facilitate docking and delivery with the vacuum pump in series and realize the cooling function of the connection position.

[0014] Preferably, the water cooling pipe is evenly distributed in the driving blade in a twisted shape, so as to improve the cooling efficiency and cool the fluid flowing inside the fixed cylinder through the driving blade as a whole.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention provides a cooling mechanism for a magnetic levitation turbine vacuum pump, which solves the problem that the existing cooling mechanism of the magnetic levitation turbine vacuum pump has a single cooling mode when in use, and it is difficult to automatically switch the cooling mode according to the operating intensity of the vacuum pump, resulting in a relatively high cooling cost. The driving blade is driven to rotate by gas, so that the liquid cooling mechanism draws the coolant into one end of the water cooling pipe and then discharges it from the other end of the water cooling pipe, thereby achieving the purpose of automatic water cooling transportation. When the rotating speed of the driving blade is lower than the set value, the spray head is closed by the spray mechanism, and liquid cooling is performed only through the water cooling pipe. When the rotating speed of the driving blade is greater than the set value, the spray head is gradually controlled by the control component to start spraying liquid nitrogen, and the spraying rate increases with the increasing rotating speed of the driving blade, thereby improving the cooling efficiency. The device has various cooling modes, does not need to be connected to a driving source such as a motor, can automatically sense the operating state of the equipment without a sensor, can automatically switch the cooling mode according to the operating power of the vacuum pump, and reduces the cooling cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 It is a schematic diagram of the local structure of the spray mechanism of the present invention;

[0019] Figure 3 It is a schematic diagram of the local structure of the conveying member of the present invention;

[0020] Figure 4 for Figure 3 A magnified image of area A;

[0021] Figure 5 It is a partial structural cross-sectional view of the spray mechanism of the present invention;

[0022] Figure 6 for Figure 5 Enlarged view of area B;

[0023] Figure 7 for Figure 5 Enlarged view of area C in the middle;

[0024] Figure 8 for Figure 7 Enlarged view of area D in the middle;

[0025] Fig. 9 It is a partial structural cross-sectional view of the liquid cooling mechanism of the present invention;

[0026] Fig.10 for Fig. 9 Enlarged view of area E in the middle;

[0027] Fig.11 for Fig. 9 Enlarged view of area F.

[0028] In the figure: 1, base; 2, fixed cylinder; 3, rotating ring; 4, driving blade; 5, water cooling pipe; 6, connecting shaft; 7, nozzle; 8, control member; 9, liquid nitrogen tank; 10, guide groove; 11, annular pipe; 12, connecting pipe; 13, delivery pipe; 15, control pipe; 16, first tension spring; 17, first spring; 18, first connecting groove; 19, second connecting groove; 20, refrigerator; 21, input pipe; 22, output pipe; 23, first annular pipe; 24, second annular pipe; 25, driving member; 26, driving plate; 27, sliding groove; 28, second spring; 29, delivery member; 30, first pipeline; 31, second pipeline; 32, one-way valve; 33, fixed ring; 34, ball; 35, threaded pipe. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Embodiment 1:

[0031] See also Figure 1-Figure 11, a cooling mechanism of a magnetic levitation turbine vacuum pump shown in the figure includes a base 1, a liquid cooling mechanism and a spray mechanism, a fixed cylinder 2 is fixedly connected to the base 1, a rotating ring 3 is rotatably connected to the inner wall of the fixed cylinder 2, a fixed ring 33 is fixedly connected to the side of the rotating ring 3, a plurality of groups of balls 34 rollingly connected to the inner wall of the fixed cylinder 2 are rollingly connected to the outer wall of the fixed ring 33, both ends of the fixed cylinder 2 are respectively fixedly connected to threaded tubes 35 for docking and communicating with the delivery end of the vacuum pump, the liquid cooling mechanism includes a plurality of groups of driving blades 4 fixedly connected to the inner wall of the rotating ring 3, a plurality of groups of driving blades 4 are respectively fixedly connected to water cooling pipes 5, the water cooling pipes 5 are twisted and uniformly distributed in the driving blades 4, a connecting shaft 6 is provided in the fixed cylinder 2 which is fixedly connected to one end of the plurality of driving blades 4 away from the rotating ring 3, and is used to drive the driving blades 4 to rotate when the gas in the vacuum pump flows through the fixed cylinder 2, so that the liquid cooling mechanism draws the coolant into one end of the water cooling pipe 5, and then discharges it from the other end of the water cooling pipe 5, so as to achieve the purpose of automatic water cooling delivery.

[0032] The spray mechanism includes a plurality of nozzles 7 mounted on the driving blade 4. A control unit 8 is provided inside the driving blade 4 for controlling the operating state and spraying intensity of the nozzle 7 according to the rotational speed of the driving blade 4. The control unit 8 is used to close the nozzle 7 when the rotational speed of the driving blade 4 is lower than a set value, and only liquid cooling is performed through the water cooling pipe 5. When the rotational speed of the driving blade 4 is greater than the set value, the nozzle 7 is gradually controlled by the control unit 8 to start spraying liquid nitrogen, and the spraying rate increases with the increase in the rotational speed of the driving blade 4, thereby improving the cooling efficiency.

[0033] The spray mechanism also includes a liquid nitrogen tank 9 fixedly installed in the base 1, a guide groove 10 is opened in the driving blade 4, an annular tube 11 is fixedly connected in the fixed cylinder 2, one side opening of the annular tube 11 is fitted and rotated with the outer wall of the rotating ring 3, one end of the guide groove 10 is fixedly connected to a connecting pipe 12 connected to the annular tube 11, and the annular tube 11 is connected to a delivery pipe 13 connected to the output end of the liquid nitrogen tank 9.

[0034] The control member 8 includes a control tube 15 slidably connected to the inner wall of the guide groove 10, and both ends of the control tube 15 are fixedly connected with a first tension spring 16 and a first spring 17 respectively. One end of the first tension spring 16 is fixedly connected to one end of the guide groove 10, and one end of the first spring 17 is fixedly connected to one end of the connecting tube 12. A plurality of groups of first connecting grooves 18 are evenly arranged on the side of the control tube 15, and a plurality of groups of second connecting grooves 19 that can be connected to the first connecting grooves 18 and the nozzle 7 are evenly arranged in the driving blade 4.

[0035] In this embodiment, during the process of pressurized transportation of the magnetic levitation turbine vacuum pumps in series, the threaded tubes 35 at both ends of the fixed cylinder 2 are respectively connected to the input end and the output end of the adjacent vacuum pump, so that the gas pressurized and output by the previous group of vacuum pumps can be transported to the next group of vacuum pumps through the fixed cylinder 2 for secondary pressurized transportation. Since the driving blades 4 are arranged in an inclined shape, the driving blades 4 will be driven to rotate during the flow of gas in the fixed cylinder 2. The rotation rate increases with the increase of the flow rate of the gas in the fixed cylinder 2, and the flow rate of the gas in the fixed cylinder 2 increases with the increase of the operating power of the vacuum pump, so as to achieve the purpose of automatically monitoring the operating intensity of the vacuum pump and synchronously adjusting the rotation speed of the driving blades 4.

[0036] When the speed of the driving blade 4 is low, one end of the control tube 15 close to the connecting shaft 6 is pulled by the first tension spring 16, and the other end is pushed by the first spring 17, so that the control tube 15 is located close to one side of the connecting shaft 6. At this time, the first connecting groove 18 and the second connecting groove 19 are far apart and will not be connected. The side wall of the control tube 15 blocks the opening of the second connecting groove 19 to prevent the liquid nitrogen in the guide groove 10 from being transported to the nozzle 7 for spraying. At this time, the coolant is only driven by the liquid cooling mechanism to be transported unidirectionally in the water cooling tube 5 to achieve liquid cooling. The flow rate of the coolant in the water cooling tube 5 is also controlled by the speed of the driving blade 4, so that the coolant flow rate is slower when the speed is lower, and the higher the speed, the faster the coolant delivery speed. The number of driving blades 4 is relatively small, and about three groups can be set to avoid causing a large degree of obstruction to the flow of gas in the fixed cylinder 2.

[0037] As the rotation speed of the driving blade 4 increases, the centrifugal force on the control tube 15 increases, and the control tube 15 gradually slides in the guide groove 10, compressing the first spring 17 while stretching the first tension spring 16, so that the first connecting groove 18 gradually moves to a position connected with the second connecting groove 19. When the rotation speed of the driving blade 4 is greater than the set value, the first connecting groove 18 can be connected with the second connecting groove 19, and the liquid nitrogen in the guide groove 10 passes through the control tube 15, the first connecting groove 18, and the second connecting groove 19, and is sprayed out by the nozzle 7. The faster the rotation speed of the driving blade 4 is, the larger the connection area between the first connecting groove 18 and the second connecting groove 19 is, the faster the flow rate of the liquid nitrogen in the control tube 15 to the nozzle 7 is, and the faster the rate of liquid nitrogen spraying through the nozzle 7 is, thereby greatly increasing the cooling efficiency.

[0038] It is worth noting that: the rotation of the driving blade 4 drives the nozzle 7 and the water-cooling tube 5 to rotate, so that the gas flowing inside the fixed cylinder 2 can fully contact the surface of the driving blade 4. At this time, when water cooling is performed, not only the gas at the side wall position of the fixed cylinder 2 is cooled, but the gas flowing in a large area in the middle area of ​​the fixed cylinder 2 can be cooled, and the effect is more obvious. At the same time, the nozzle 7 also rotates with the driving blade 4 during the process of spraying liquid nitrogen. Compared with the traditional fixed-position nozzle 7, the spraying position of this device is more comprehensive, and the area inside the fixed cylinder 2 can be fully covered during the rotating spraying process, thereby improving the cooling efficiency.

[0039] By replacing the liquid nitrogen tank 9 and connecting and fixing the output end of the liquid nitrogen tank 9 with one end of the delivery pipe 13, the liquid nitrogen in the liquid nitrogen tank 9 can flow into the control pipe 15 in the guide groove 10 through the delivery pipe 13, the annular pipe 11 and the connecting pipe 12. The annular pipe 11 is arranged so that when the rotating ring 3 drives the connecting pipe 12 and the control pipe 15 to rotate, the connecting state of the annular pipe 11 and one end of the connecting pipe 12 can always be guaranteed, so that the stable delivery of liquid nitrogen can be achieved at any time.

[0040] Embodiment 2:

[0041] See also Figure 3-Figure 11 , this embodiment further illustrates the first embodiment, the liquid cooling mechanism shown in the figure also includes a refrigerator 20 fixedly installed in the base 1, the input end of the refrigerator 20 is connected to the input pipe 21, the output end of the refrigerator 20 is connected to the output pipe 22, the fixed cylinder 2 is fixedly connected with the first annular tube 23 and the second annular tube 24, the outer wall of the rotating ring 3 is rotatably connected to the inner wall of the first annular tube 23 and the second annular tube 24, the axis of the inner wall of the rotating ring 3 is different from the axis of the outer wall of the first annular tube 23 and the second annular tube 24, and the rotating ring 3 is provided with a driving member 25 for automatically transporting the coolant in the output pipe 22 to one end of the water-cooling pipe 5 during rotation, and transporting the coolant at the other end of the water-cooling pipe 5 to the input pipe 21.

[0042] The driving member 25 includes multiple groups of driving plates 26 installed on the rotating ring 3. A sliding groove 27 is opened on the rotating ring 3. The driving plate 26 is slidably connected to the inner wall of the sliding groove 27. One end of the driving plate 26 is fixedly connected to a second spring 28 fixedly connected to the sliding groove 27. The multiple groups of driving plates 26 are slidably fitted with the inner walls of the first annular tube 23 and the second annular tube 24 respectively. The upper inner wall of the first annular tube 23 is fitted with the outer wall of the rotating ring 3, and the lower inner wall of the second annular tube 24 is fitted with the outer wall of the rotating ring 3. A conveying member 29 for connecting and conveying the coolant is provided in the fixed cylinder 2.

[0043] The conveying member 29 includes multiple groups of first pipes 30 connected to one end of the output pipe 22, and the multiple groups of first pipes 30 are respectively fixedly connected to the outer wall of the first annular pipe 23, and the first pipe 30 is connected to the first annular pipe 23. One end of the water-cooling pipe 5 passes through the rotating ring 3 and is connected to the first annular pipe 23. One end of the input pipe 21 is connected to multiple groups of second pipes 31, and the multiple groups of second pipes 31 are respectively fixedly connected to the outer wall of the second annular pipe 24. The second pipe 31 is connected to the second annular pipe 24. The other end of the water-cooling pipe 5 passes through the rotating ring 3 and is connected to the second annular pipe 24.

[0044] One-way valves 32 are fixedly connected to both ends of the water-cooling pipe 5 and the first pipe 30 and the second pipe 31, respectively. The one-way valves 32 are used to control the coolant to be unidirectionally input from the first pipe 30 into the first annular pipe 23, then input from the first annular pipe 23 into the water-cooling pipe 5, and then discharged into the second annular pipe 24, and finally discharged into the second pipe 31 through the second annular pipe 24.

[0045] In the present embodiment, when the driving blade 4 drives the rotating ring 3 to rotate, the multiple groups of driving plates 26 on the side will rotate, and the outer walls of the driving plates 26 will slide against the inner walls of the first annular tube 23 and the second annular tube 24 respectively. Since the inner wall areas of the first annular tube 23 and the second annular tube 24 that are in conflict with one end of the driving plate 26 are not coaxial with the outer wall of the rotating ring 3, when the driving plate 26 in the first annular tube 23 rotates downward, the space between adjacent driving plates 26 gradually increases, resulting in a suction effect, and the coolant in the output pipe 22 that has been cooled by the refrigerator 20 is pumped into the first annular tube 23 through the first pipe 30. At this time, when the driving plate 26 in the second annular tube 24 rotates downward, the space between adjacent driving plates 26 gradually decreases, and the coolant in this area is squeezed and transported to the second pipe 31, and then enters the input pipe 21 and is transported to the refrigerator 20 for cooling.

[0046] Similarly, during the process of the driving plate 26 in the first annular tube 23 rotating upward, the space between adjacent driving plates 26 is reduced, generating pressure, and the coolant in the area is transported to one end of the water-cooling tube 5 through the one-way valve 32 for transportation. At this time, the driving plate 26 in the second annular tube 24 moves upward, and the space between adjacent driving plates 26 increases, generating suction, and the coolant in the water-cooling tube 5 is pumped into the second annular tube 24 through the one-way valve 32, thereby realizing the one-way flow transportation function of the coolant in the water-cooling tube 5.

[0047] The driving plates 26 are arranged on both sides of the end positions of the water-cooling tube 5, and can change the size of the space between adjacent driving plates 26 during rotation, thereby realizing the function of controlling the hydraulic pressure at both ends of the water-cooling tube 5. The driving plate 26 is pushed by the second spring 28, and one end of the driving plate 26 always slides in close contact with the inner wall of the first annular tube 23 or the second annular tube 24.

[0048] This structure utilizes the principle of a delivery pump, so that when the driving blade 4 drives the rotating ring 3 to rotate, the cooled coolant is automatically pumped to one end of the water-cooling tube 5, and then the coolant with a relatively high temperature discharged from the other end of the water-cooling tube 5 is delivered to the refrigerator 20 for circulating refrigeration. There is no need to install a pump body delivery structure inside the equipment, which reduces costs and can also monitor the operating power of the vacuum pump in real time. During each rotation of the water-cooling tube 5, one-way delivery of the coolant is achieved, and the rotation speed of the rotating ring 3 can be automatically controlled according to the flow rate of the gas inside the fixed cylinder 2, so that the flow rate of the coolant in the water-cooling tube 5 will also increase with the increase of the power of the vacuum pump, thereby realizing the function of automatically monitoring the cooling, and there is no need to use a drive motor and a sensor for driving and monitoring, so it is more convenient and efficient to carry and use.

[0049] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0050] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling mechanism for a magnetically suspended turbine vacuum pump, characterized in that: include: A base (1), wherein a fixed cylinder (2) is fixedly connected to the base (1), and a rotating ring (3) is rotatably connected to the inner wall of the fixed cylinder (2); A liquid cooling mechanism, the liquid cooling mechanism comprising a plurality of groups of driving blades (4) fixedly connected to the inner wall of the rotating ring (3), each of the plurality of groups of driving blades (4) being fixedly connected to a water cooling tube (5), the fixed cylinder (2) being provided with a connecting shaft (6) fixedly connected to one end of each of the plurality of groups of driving blades (4) away from the rotating ring (3), for driving the driving blades (4) to rotate when the gas in the vacuum pump flows through the fixed cylinder (2), so that the liquid cooling mechanism draws the cooling liquid into one end of the water cooling tube (5) and then discharges it from the other end of the water cooling tube (5), thereby achieving the purpose of automatic water cooling transportation; A spray mechanism, the spray mechanism comprising a plurality of nozzles (7) mounted on the driving blade (4), the driving blade (4) being provided with a control member (8) for controlling the operating state and spraying intensity of the nozzle (7) according to the rotation speed of the driving blade (4), and for closing the nozzle (7) when the rotation speed of the driving blade (4) is lower than a set value, and only performing liquid cooling through the water cooling pipe (5); when the rotation speed of the driving blade (4) is higher than the set value, the control member (8) is used to gradually control the nozzle (7) to start spraying liquid nitrogen, and the spraying rate increases with the increase of the rotation speed of the driving blade (4), thereby improving the cooling efficiency.

2. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 1, characterized in that: The spray mechanism further comprises a liquid nitrogen tank (9) fixedly mounted in the base (1); a guide groove (10) is provided in the driving blade (4); an annular tube (11) is fixedly connected in the fixed cylinder (2); an opening on one side of the annular tube (11) rotates in contact with the outer wall of the rotating ring (3); a connecting tube (12) connected to the annular tube (11) is fixedly connected to one end of the guide groove (10); and a delivery tube (13) connected to an output end of the liquid nitrogen tank (9) is connected to the annular tube (11).

3. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 2, characterized in that: The control member (8) comprises a control tube (15) slidably connected to the inner wall of the guide groove (10), and both ends of the control tube (15) are respectively fixedly connected with a first tension spring (16) and a first spring (17), one end of the first tension spring (16) is fixedly connected to one end of the guide groove (10), and one end of the first spring (17) is fixedly connected to one end of the connecting tube (12), and a plurality of groups of first connecting grooves (18) are evenly arranged on the side surface of the control tube (15), and a plurality of groups of second connecting grooves (19) that can be connected to the first connecting grooves (18) and the nozzle (7) are evenly arranged in the driving blade (4).

4. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 1, characterized in that: The liquid cooling mechanism also includes a refrigerator (20) fixedly installed in the base (1); the input end of the refrigerator (20) is connected to an input pipe (21); the output end of the refrigerator (20) is connected to an output pipe (22); a first annular pipe (23) and a second annular pipe (24) are fixedly connected in the fixed cylinder (2); the outer wall of the rotating ring (3) is rotatably connected to the inner wall of the first annular pipe (23) and the second annular pipe (24); the axis of the inner wall of the rotating ring (3) is different from the axis of the outer wall of the first annular pipe (23) and the second annular pipe (24); the rotating ring (3) is provided with a driving member (25) for automatically conveying the cooling liquid in the output pipe (22) to one end of the water-cooling pipe (5) during rotation, and conveying the cooling liquid at the other end of the water-cooling pipe (5) to the input pipe (21).

5. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 4, characterized in that: The driving member (25) comprises a plurality of driving plates (26) mounted on the rotating ring (3), a sliding groove (27) being provided on the rotating ring (3), the driving plate (26) being slidably connected to the inner wall of the sliding groove (27), one end of the driving plate (26) being fixedly connected to a second spring (28) fixedly connected to the sliding groove (27), the plurality of driving plates (26) being slidably fitted to the inner walls of the first annular tube (23) and the second annular tube (24), respectively, the upper inner wall of the first annular tube (23) being fitted to the outer wall of the rotating ring (3), the lower inner wall of the second annular tube (24) being fitted to the outer wall of the rotating ring (3), and a conveying member (29) for connecting and conveying the cooling liquid is provided in the fixed cylinder (2).

6. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 5, characterized in that: The conveying member (29) comprises a plurality of groups of first pipes (30) connected to one end of the output pipe (22), the plurality of groups of the first pipes (30) are respectively fixedly connected to the outer wall of the first annular pipe (23), the first pipe (30) is connected to the first annular pipe (23), one end of the water cooling pipe (5) passes through the rotating ring (3) and is connected to the first annular pipe (23), one end of the input pipe (21) is connected to a plurality of groups of second pipes (31), the plurality of groups of the second pipes (31) are respectively fixedly connected to the outer wall of the second annular pipe (24), the second pipe (31) is connected to the second annular pipe (24), and the other end of the water cooling pipe (5) passes through the rotating ring (3) and is connected to the second annular pipe (24).

7. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 6, characterized in that: One-way valves (32) are fixedly connected to both ends of the water-cooling pipe (5) and the first pipe (30) and the second pipe (31), respectively. The one-way valves (32) are used to control the cooling liquid to be input from the first pipe (30) into the first annular pipe (23) in one direction, then input from the first annular pipe (23) into the water-cooling pipe (5), then discharged into the second annular pipe (24), and finally discharged into the second pipe (31) through the second annular pipe (24).

8. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 1, characterized in that: A fixed ring (33) is fixedly connected to the side of the rotating ring (3), and the outer wall of the fixed ring (33) is rollingly connected to multiple groups of balls (34) rollingly connected to the inner wall of the fixed cylinder (2).

9. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 1, characterized in that: Both ends of the fixed cylinder (2) are respectively fixedly connected with threaded pipes (35) for docking and communicating with the delivery end of the vacuum pump.

10. The cooling mechanism of a magnetically suspended turbine vacuum pump according to claim 1, characterized in that: The water cooling pipes (5) are evenly distributed in the driving blades (4) in a twisted shape.

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