A test fixture for silicon interposer detection

Abstract

The application relates to the technical field of silicon plate detection, in particular to a test fixture for silicon adapter plate detection, which comprises a base, the upper surface of the base is connected with an operation plate through a rotating mechanism, the upper surface of the operation plate is provided with moving plates at both sides, distance adjusting mechanisms are arranged at the rear ends of the two moving plates, a plurality of grid plates are fixedly connected to one side of the two moving plates which are close to each other, the grid plates on the two sides are staggered, the upper surface of one side of the moving plate is connected with a connecting frame through a horizontal and vertical sliding mechanism, one side surface of the connecting frame is fixedly connected with an upper plate, the lower surface of the upper plate is connected with a lower plate through a lifting mechanism, and the front end of the lower plate is fixedly connected with an indicating frame. The application can stably lift the lower surface of the silicon plate body, effectively prevents the silicon plate body from being broken due to the V-shaped opening on the surface, can effectively record the detection position, and prevents the problem of recording the position of a small plate after stopping at the small plate and recording again from occurring.

Description

Technical Field

[0001] This invention relates to the field of silicon substrate testing technology, and more particularly to a test fixture for testing silicon adapter boards. Background Technology

[0002] A silicon interposer, also known as an intermediate layer or transition board, typically refers to the functional layer for interconnection and pin redistribution between a chip and a packaging substrate. Currently, silicon interposers are primarily made of silicon, using silicon as the interposer and TSVs (Through Silicon Vias) as the interconnection tool, resulting in smaller, more energy-efficient, and higher bandwidth integrated systems. To improve production efficiency, each silicon interposer is ultimately processed into multiple circuit boards. Current technology involves cutting V-grooves into the silicon interposer and then breaking it into smaller boards.

[0003] During the manufacturing process of silicon interposers, issues such as virtual breaks or short circuits in the redistribution layer (RDL) of the substrate or between interlayer vias and the RDL often occur. These types of silicon interposers are difficult to detect during pre-assembly inspection and can easily end up on the module assembly production line, posing a potential threat to the reliability of the module products. Therefore, a continuity test should be added to the silicon interposers before they are used for assembly, and both open-circuit and short-circuit defects should be checked through testing.

[0004] Because silicon substrates with V-grooves are difficult to position during testing, they are prone to breakage and cracking when positioned by the fixture. In addition, due to the thinness of the silicon substrate and the gap between the fixture and the table, the edge of the silicon substrate is prone to getting stuck in the gap during clamping. Furthermore, since there are many small boards to be tested on each silicon substrate, it is easy to forget the position of the small boards that have been tested when recording data midway, which causes inconvenience. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of the prior art by providing a test fixture for testing silicon adapter boards.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a test fixture for testing silicon adapter boards, comprising a base, an operating plate connected to the upper surface of the base via a rotating mechanism, movable plates respectively provided on both sides of the upper surface of the operating plate, an adjusting mechanism provided at the rear ends of the two movable plates, a plurality of grid plates fixedly connected to the side of the two movable plates that are close to each other, the grid plates on both sides being staggered, a connecting frame connected to the upper surface of one movable plate via a horizontal and vertical sliding mechanism, an upper plate fixedly connected to one side surface of the connecting frame, a lower plate connected to the lower surface of the upper plate via a lifting mechanism, and an indicator frame fixedly connected to the front end of the lower plate.

[0007] Preferably, the rotating mechanism includes a raised seat fixedly installed on the upper surface of the base, a servo motor is fixedly embedded on the upper surface of the raised seat, the output shaft of the servo motor is fixedly connected to a spline shaft, and a spline cylinder is fixedly connected to the lower surface of the operating plate, the spline cylinder being slidably sleeved on the outer surface of the spline shaft.

[0008] Preferably, the adjusting mechanism includes a fixed seat fixedly connected to the rear of the operating plate, a lead screw rotatably passing through the inner side of the fixed seat, a polygonal block fixedly connected to one end of the lead screw, an adjusting plate fixedly connected to the rear end of the moving plate, the adjusting plate slidingly sleeved on the rear of the operating plate, and the lead screw threaded through the inner side of the operating plate.

[0009] Preferably, a guide plate is fixedly connected to the front end of the movable plate, and the guide plate is slidably sleeved on the front of the operating plate.

[0010] Preferably, the horizontal and vertical sliding mechanism includes a concave frame fixedly connected to the upper surface of the movable plate, two longitudinal rods fixedly connected to the inner side of the concave frame, a longitudinal slider slidably sleeved on the outer surface of the two longitudinal rods, an L-shaped frame fixedly connected to one side of the longitudinal slider, two transverse rods fixedly connected to the inner side of the L-shaped frame, a transverse slider slidably sleeved on the outer surface of the two transverse rods, and the rear end of the connecting frame fixedly connected to the front surface of the transverse slider.

[0011] Preferably, a reinforcing plate is fixedly connected to the upper surface of the L-shaped frame.

[0012] Preferably, the lifting mechanism includes a guide rod fixedly connected to the front end of the upper surface of the lower plate, the upper end of the guide rod slidingly passing through the inner side of the upper plate, and a threaded rod rotatably connected to the rear end of the upper surface of the lower plate, the upper end of the threaded rod threaded through the inner side of the upper plate, and a rotating head fixedly connected to the upper end of the threaded rod.

[0013] Preferably, a rotating disk is fixedly connected to the lower end of the threaded rod, and a limiting sleeve is fixedly connected to the upper surface of the lower plate. The rotating disk rotates and embeds into the inner side of the limiting sleeve, and the threaded rod rotates and passes through the upper surface of the limiting sleeve.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. In this invention, the silicon plate is placed on the upper surface of the grid plate. Then, by rotating the lead screw, the adjusting plates on both sides move closer to each other until the moving plates on both sides are respectively attached to the two sides of the silicon plate, thereby achieving the function of limiting the silicon plate. Since the grid plates on both sides are staggered, the lower surface of the silicon plate is stably supported, effectively preventing the silicon plate from breaking due to the V-shaped opening on the surface.

[0016] 2. Because the grid plate is connected to the moving plate, the present invention will not cause the problem of the edge of the silicon plate falling into the gap between the moving plate and the operating plate;

[0017] 3. In this invention, the presence of the indicator frame can effectively record the detection position, preventing the problem of incorrect recording of the corresponding small plate position when detecting again after pausing and recording at a certain small plate, thus playing a better indicative role. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a test fixture for testing silicon adapter boards according to the present invention;

[0019] Figure 2 This is a schematic diagram of the operation panel of a test fixture for testing silicon adapter boards according to the present invention, viewed from below.

[0020] Figure 3 This invention relates to a test fixture for testing silicon adapter boards. Figure 2 Enlarged view of point A in the middle;

[0021] Figure 4 This is a schematic diagram of the rotation mechanism of a test fixture for testing silicon adapter boards according to the present invention.

[0022] Figure 5 This is a schematic diagram of the horizontal and vertical sliding mechanism of a test fixture for testing silicon adapter boards according to the present invention.

[0023] Figure 6 This invention relates to a test fixture for testing silicon adapter boards. Figure 5 Enlarged view at point B in the middle;

[0024] Figure 7 This invention relates to a test fixture for testing silicon adapter boards. Figure 5 Enlarged view at point C;

[0025] Figure 8 This is a schematic diagram of the threaded rod of a test fixture for testing silicon adapter boards according to the present invention;

[0026] Figure 9 This is a schematic diagram illustrating the use of a test fixture for testing silicon adapter boards according to the present invention.

[0027] 1. Base; 2. Elevating seat; 3. Servo motor; 4. Spline shaft; 5. Spline cylinder; 6. Operation panel; 7. Moving plate; 8. Grid plate; 9. Guide plate; 10. Adjustable distance plate; 11. Fixed seat; 12. Lead screw; 13. Polygonal block; 14. Concave frame; 15. Longitudinal rod; 16. Longitudinal slider; 17. Transverse rod; 18. Reinforcing plate; 19. L-shaped frame; 20. Transverse slider; 21. Connecting frame; 22. Upper plate; 23. Lower plate; 24. Indicator frame; 25. Guide rod; 26. Threaded rod; 27. Rotating head; 28. Limit sleeve; 29. ​​Rotating disk; 30. Silicon plate body; 31. V-shaped opening. Detailed Implementation

[0028] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0029] like Figures 1-9 The test fixture shown is for testing silicon adapter boards, including a base 1. An operation plate 6 is connected to the upper surface of the base 1 via a rotating mechanism. Movable plates 7 are respectively provided on both sides of the upper surface of the operation plate 6. An adjustment mechanism is provided at the rear end of the two movable plates 7. Several grid plates 8 are fixedly connected to the side of the two movable plates 7 that are close to each other. The grid plates 8 on both sides are staggered. The staggered distribution design allows the silicon board 30 to be supported by the largest possible area when placed. A connecting frame 21 is connected to the upper surface of one movable plate 7 via a horizontal and vertical sliding mechanism. An upper plate 22 is fixedly connected to one side surface of the connecting frame 21. A lower plate 23 is connected to the lower surface of the upper plate 22 via a lifting mechanism. An indicator frame 24 is fixedly connected to the front end of the lower plate 23.

[0030] The rotating mechanism includes a raised seat 2 fixedly mounted on the upper surface of the base 1. A servo motor 3 is fixedly embedded in the upper surface of the raised seat 2. The output shaft of the servo motor 3 is fixedly connected to a splined shaft 4. A splined cylinder 5 is fixedly connected to the lower surface of the operating plate 6, and the splined cylinder 5 is slidably sleeved on the outer surface of the splined shaft 4. This design facilitates the disassembly and maintenance of the operating plate 6. By lifting the operating plate 6, the splined cylinder 5 can be disengaged from the surface of the splined shaft 4, making operation convenient. The servo motor 3 can control the rotation of the operating plate 6, making it convenient to switch edges for continued testing after one side of the silicon substrate 30 has been tested.

[0031] The adjusting mechanism includes a fixed base 11 fixedly connected to the rear of the operating plate 6. A lead screw 12 rotatably passes through the inner side of the fixed base 11. One end of the lead screw 12 is fixedly connected to a polygonal block 13. An adjusting plate 10 is fixedly connected to the rear end of the moving plate 7. The adjusting plate 10 slides around the rear of the operating plate 6. The lead screw 12 is threaded through the inner side of the operating plate 6. The polygonal block 13 facilitates the user to rotate the lead screw 12. The threads on the surface of the lead screw 12 are symmetrical on both sides. When rotated, the two adjusting plates 10 will move closer or further apart.

[0032] A guide plate 9 is fixedly connected to the front end of the movable plate 7, and the guide plate 9 is slidably sleeved on the front of the operating plate 6. The guide plate 9 is used to improve the stability of the movable plate 7 when it moves.

[0033] The horizontal and vertical sliding mechanism includes a concave frame 14 fixedly connected to the upper surface of the movable plate 7. Two longitudinal rods 15 are fixedly connected to the inner side of the concave frame 14. A longitudinal slider 16 is slidably fitted onto the outer surfaces of the two longitudinal rods 15. An L-shaped frame 19 is fixedly connected to one side of the longitudinal slider 16. Two transverse rods 17 are fixedly connected to the inner side of the L-shaped frame 19. A transverse slider 20 is slidably fitted onto the outer surfaces of the two transverse rods 17. The rear end of the connecting frame 21 is fixedly connected to the front surface of the transverse slider 20. When the indicator frame 24 moves back and forth, the longitudinal slider 16 slides back and forth along the surface of the longitudinal rods 15. When the indicator frame 24 moves laterally, the transverse slider 20 moves laterally along the surface of the transverse rods 17.

[0034] A reinforcing plate 18 is fixedly connected to the upper surface of the L-shaped frame 19. The reinforcing plate 18 is used to improve the strength of the L-shaped frame 19 and prevent the L-shaped frame 19 from deforming due to excessive overturning moment.

[0035] The lifting mechanism includes a guide rod 25 fixedly connected to the front end of the upper surface of the lower plate 23. The upper end of the guide rod 25 slides through the inner side of the upper plate 22. A threaded rod 26 is rotatably connected to the rear end of the upper surface of the lower plate 23. The upper end of the threaded rod 26 is threaded through the inner side of the upper plate 22. A rotating head 27 is fixedly connected to the upper end of the threaded rod 26. The rotating head 27 facilitates the user to rotate the threaded rod 26, and the guide rod 25 is used to improve the stability of the lower plate 23 when it moves up and down.

[0036] A rotating disk 29 is fixedly connected to the lower end of the threaded rod 26, and a limiting sleeve 28 is fixedly connected to the upper surface of the lower plate 23. The rotating disk 29 rotates and embeds into the inner side of the limiting sleeve 28, and the threaded rod 26 rotates and passes through the upper surface of the limiting sleeve 28. The limiting sleeve 28 serves to restrict the rotation of the threaded rod 26 relative to the lower plate 23, while the lower end of the threaded rod 26 does not detach from the surface of the lower plate 23.

[0037] In use, the silicon plate 30 is placed on the upper surface of the grid plate 8. Then, by rotating the lead screw 12, the adjusting plates 10 on both sides move closer to each other until the moving plates 7 on both sides are attached to the two sides of the silicon plate 30, thereby achieving the function of limiting the silicon plate 30. Since the grid plates 8 on both sides are staggered, the lower surface of the silicon plate 30 is stably supported, effectively preventing the silicon plate 30 from breaking due to the V-shaped opening 31 on the surface. At the same time, because the grid plate 8 is connected to the moving plate 7, the edge of the silicon plate 30 will not fall into the gap between the moving plate 7 and the operating plate 6.

[0038] During the testing process, since the silicon substrate 30 is composed of several arrayed small boards, each small board needs to be tested step by step. During the testing, the indicator frame 24 is moved to the top of the small board to be tested, and the test connector is passed through the indicator frame 24 to test the circuit of the small board. After the test is completed, it is moved horizontally or backward to test the adjacent small boards one by one. During this process, due to the presence of the indicator frame 24, the test position can be effectively recorded, preventing the problem of incorrect recording of the corresponding small board position when testing again after stopping and recording at a certain small board. It plays a good indicative role.

[0039] By rotating the rotating head 27, the user causes the threaded rod 26 to rotate, thereby moving the lower plate 23 closer to or relative to the upper plate 22. This changes the distance between the indicator frame 24 and the silicon plate 30, allowing the device to get as close as possible to the surface of the silicon plate 30 without scratching it. This makes it easier for the user to pass the test connector through the indicator frame 24 and test the small board, thus facilitating the testing process.

[0040] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.

Claims

1. A test fixture for testing silicon interposers, comprising a base (1), characterized in that: The upper surface of the base (1) is connected to the operating plate (6) via a rotating mechanism. Moving plates (7) are respectively provided on both sides of the upper surface of the operating plate (6). An adjusting mechanism is provided at the rear end of the two moving plates (7). Several grid plates (8) are fixedly connected to the side of the two moving plates (7) that are close to each other. The grid plates (8) on both sides are staggered. The upper surface of one moving plate (7) is connected to the connecting frame (21) via a horizontal and vertical sliding mechanism. An upper plate (22) is fixedly connected to one side of the connecting frame (21). The lower surface of the upper plate (22) is connected to the lower plate (23) via a lifting mechanism. An indicator frame (24) is fixedly connected to the front end of the lower plate (23). The rotating mechanism includes a raised seat (2) fixedly installed on the upper surface of the base (1), a servo motor (3) fixedly embedded on the upper surface of the raised seat (2), a spline shaft (4) fixedly connected to the output shaft of the servo motor (3), a spline cylinder (5) fixedly connected to the lower surface of the operating plate (6), and the spline cylinder (5) slidably sleeved on the outer surface of the spline shaft (4).

2. The test fixture for testing silicon adapter boards according to claim 1, characterized in that: The adjusting mechanism includes a fixed seat (11) fixedly connected to the back of the operating plate (6), a lead screw (12) rotatably passing through the inner side of the fixed seat (11), a polygonal block (13) fixedly connected to one end of the lead screw (12), an adjusting plate (10) fixedly connected to the rear end of the moving plate (7), the adjusting plate (10) slidingly sleeved on the back of the operating plate (6), and the lead screw (12) threaded through the inner side of the operating plate (6).

3. A test fixture for testing silicon adapter boards according to claim 1, characterized in that: The front end of the movable plate (7) is fixedly connected to a guide plate (9), which is slidably sleeved in front of the operating plate (6).

4. A test fixture for testing silicon interposers according to claim 1, characterized in that: The horizontal and vertical sliding mechanism includes a concave frame (14) fixedly connected to the upper surface of the movable plate (7). Two longitudinal rods (15) are fixedly connected to the inner side of the concave frame (14). The outer surfaces of the two longitudinal rods (15) are slidably fitted with a longitudinal slider (16). An L-shaped frame (19) is fixedly connected to one side of the longitudinal slider (16). Two transverse rods (17) are fixedly connected to the inner side of the L-shaped frame (19). The outer surfaces of the two transverse rods (17) are slidably fitted with a transverse slider (20). The rear end of the connecting frame (21) is fixedly connected to the front surface of the transverse slider (20).

5. A test fixture for testing silicon adapter boards according to claim 4, characterized in that: A reinforcing plate (18) is fixedly connected to the upper surface of the L-shaped frame (19).

6. A test fixture for testing silicon interposers according to claim 1, characterized in that: The lifting mechanism includes a guide rod (25) fixedly connected to the front end of the upper surface of the lower plate (23). The upper end of the guide rod (25) slides through the inner side of the upper plate (22). A threaded rod (26) is rotatably connected to the rear end of the upper surface of the lower plate (23). The upper end of the threaded rod (26) is threaded through the inner side of the upper plate (22). A rotating head (27) is fixedly connected to the upper end of the threaded rod (26).

7. A test fixture for testing silicon interposers according to claim 6, characterized in that: The lower end of the threaded rod (26) is fixedly connected to a rotating disk (29), and the upper surface of the lower plate (23) is fixedly connected to a limiting sleeve (28). The rotating disk (29) rotates and embeds into the inner side of the limiting sleeve (28), and the threaded rod (26) rotates and passes through the upper surface of the limiting sleeve (28).

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