Control equipment for HTRB detection

By designing the adjustment components and detection components of the HTRB detection control device, the problem of difficult detection position and angle in the prior art is solved, and high-precision detection of semiconductor devices is achieved, and the requirements of reliability testing are met.

CN119619776APending Publication Date: 2025-03-14ZHONGFU TESTING (ZHOUSHAN) CO LTD
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Patent Information

Application Number
CN202411746958.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-02
Publication Date
2025-03-14

AI Technical Summary

Technical Problem

The existing HTRB detection device is difficult to adjust the detection position and detection angle, which affects the detection accuracy.

Method used

A control device for HTRB detection is designed, including a regulating component and a detection component. The adjustment component drives the rotation of the screw and the circular plate through the first and second motors to adjust the detection position and angle; the detection component adjusts the height of the detector through the cylinder to achieve accurate detection of the semiconductor device.

Benefits of technology

It realizes flexible adjustment of the detection position and angle of HTRB equipment, improves detection accuracy and flexibility, and meets the requirements for semiconductor device reliability testing.

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Abstract

The invention relates to the technical field of detection equipment, and discloses HTRB detection control equipment which comprises a bearing table and an adjusting assembly arranged in the bearing table, the adjusting assembly comprises a first motor fixedly connected to the outer wall of the bearing table, and the output end of the first motor is fixedly connected with a lead screw; the lead screw movably penetrates through the outer wall of the bearing table and extends into the bearing table, the other end of the lead screw is rotationally connected with the inner wall of the bearing table, the outer wall of the lead screw is in threaded connection with a sleeving block, the bottom of the sleeving block is in sliding connection with the bottom of the inner wall of the bearing table, and the side wall of the sleeving block is fixedly connected with a sleeve; the inner wall of the sleeve is fixedly connected with a first spring, the other end of the first spring is fixedly connected with an extrusion rod, the outer wall of the sleeving block is fixedly connected with a first fixing seat, and the detection position of the semiconductor device can be adjusted through rotation of the circular plate by arranging the adjusting assembly.
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Description

Technical Field

[0001] The present invention relates to the technical field of detection equipment, in particular to a control device for HTRB detection. Background Art

[0002] HTRB is the abbreviation of "High Temperature Reverse Bias", which means "high temperature reverse bias test" in Chinese. It is a test method used to evaluate the reliability of semiconductor devices. Specifically, it involves applying a reverse bias voltage to the device under high temperature conditions and monitoring its leakage current to simulate the device's tolerance during long-term operation.

[0003] According to a semiconductor device fault detection device proposed by Chinese patent CN212275880U, the device can well convey semiconductor devices that need to be fault-detected by arranging mutually transmitting rollers. When conveyed to a specified position, the semiconductor device is lifted by a detection plate, and then the electrodes at both ends of the device are driven to contact the pins of the semiconductor device through a bidirectional screw drive. At the same time, in conjunction with an external voltage detection device, the semiconductor device can be quickly detected for faults.

[0004] However, there may be some shortcomings in this patent. The device transfers the semiconductor to the surface of the detection plate and detects the semiconductor device through a voltage detection device. Since the position of the detection plate is fixed, it is difficult to adjust the detection position of the semiconductor device during the detection of the semiconductor device by the voltage detection device. For this reason, we propose a control device for HTRB detection. Summary of the invention

[0005] The object of the present invention is to provide a control device for HTRB detection, which solves the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a control device for HTRB detection, comprising a carrier platform and an adjustment component arranged inside the carrier platform, the adjustment component comprising a first motor fixedly connected to the outer wall of the carrier platform, the output end of the first motor is fixedly connected to a screw rod, the screw rod movably penetrates the outer wall of the carrier platform and extends to the inside of the carrier platform, the other end of the screw rod is rotatably connected to the inner wall of the carrier platform, the outer wall of the screw rod is threadedly connected to a socket block, the bottom of the socket block is slidably connected to the bottom of the inner wall of the carrier platform, the side wall of the socket block is fixedly connected to a sleeve, the inner wall of the sleeve is fixedly connected to a first spring, the other end of the first spring is fixedly connected to an extrusion rod, the outer wall of the sleeve block is fixedly connected to a first fixing seat, the inner wall of the first fixing seat is fixedly connected to a second motor, the output end of the second motor is fixedly connected to an output shaft, the outer wall of the other end of the output shaft is fixedly connected to a first gear, the side wall of the first gear is meshed with a second gear, and the inner wall of the second gear is fixedly connected to a transmission The bottom outer wall of the transmission shaft is rotatably connected to the top of the sleeve block through a bearing, and a circular plate is fixedly connected to the top of the transmission shaft. By setting an adjustment component, when it is necessary to adjust the detection position of the HTRB device, the operator turns on the first motor to cause the screw to rotate. During the rotation of the screw, the sleeve block will move along its outer wall, thereby moving the circular plate on its top to adjust the detection position. When the sleeve block moves to one side of the inside of the bearing platform, one end of the extrusion rod will squeeze the inner wall of the bearing platform, thereby compressing the first spring, thereby achieving a shock-absorbing effect after the sleeve block moves to one side of the inside of the bearing platform. When it is necessary to adjust the detection angle of the top of the circular plate, the operator can turn on the second motor to cause the output shaft to rotate. During the rotation of the output shaft, the first gear will rotate, and the first gear will mesh with the second gear, thereby driving the transmission shaft to rotate. During the rotation of the transmission shaft, the circular plate will rotate, thereby adjusting the detection angle of the top of the circular plate.

[0007] Preferably, the adjusting assembly also includes a vertical plate fixedly connected to the top of the circular plate, the top inner wall of the vertical plate is rotatably connected to a rotating rod through a bearing, the other end of the rotating rod is fixedly connected to a rectangular frame, the other end of the rectangular frame is fixedly connected to one end of another rotating rod, the outer walls of the two rotating rods are rotatably connected to the inner wall of the other vertical plate through a bearing, the outer wall of the other rotating rod is fixedly connected to a circular limiting plate, the inner wall of the circular limiting plate is slidably connected to the limiting rod, the other end of the limiting rod is fixedly connected to a pulling plate, the side wall of the pulling plate is fixedly connected to a second spring, the other end of the second spring is fixedly connected to the side wall of the other vertical plate, the top of the pulling plate is fixedly connected to a connecting block, the outer wall of the rectangular frame is fixedly connected to an L-shaped plate, the top inner wall of the L-shaped plate is threadedly connected to a screw, the top of the screw is fixedly connected to an adjusting block, the bottom of the screw is rotatably connected to a clamping block, the side wall of the clamping block is slidably connected to the inner wall of the L-shaped plate, the bottom of the clamping block is fixedly connected to a rubber block, and the bottom of the rubber block is slidably connected to a semiconductor device, The outer wall of the semiconductor device is slidably connected to the inner wall of the rectangular frame. After the rotation angle of the circular plate is adjusted, the operator can place the semiconductor device to be tested on the top inner wall of the rectangular frame, and then rotate the adjusting block to cause the screw to rotate. During the rotation of the screw, the clamping block will move downward. After the clamping block moves downward, it will move downward with the rubber block and squeeze the semiconductor device, thereby clamping and fixing the semiconductor device, so that the top of the semiconductor device can be tested. When it is necessary to test the bottom of the semiconductor device, the operator can pull the connecting block to cause the pull plate to move, so that the pull plate pulls the limit rod to move, and after the limit rod is separated from the limit of the circular limit plate, the rectangular frame is rotated to make the bottom of the rectangular frame face upward, and the connecting block is released. Under the reaction of the second spring, the pull plate and the limit rod are reset, and the limit rod is inserted into the side inner wall of the circular limit plate, so that the position of the rotated rectangular frame can be fixed, so as to facilitate the detection of the bottom of the semiconductor device inside the rectangular frame.

[0008] Preferably, the top of the support platform is fixedly connected to a top plate, and the top of the inner wall of the top plate is provided with a detection component, and the detection component includes a cylinder fixedly connected to the top of the inner wall of the top plate, and the output end of the cylinder is fixedly connected to a detector body. By setting the detection component, after the semiconductor device is fixed, when the semiconductor device needs to be inspected, the operator can open the cylinder to cause the detector body to move downward, thereby adjusting the detection height of the detector body for the semiconductor device, and then realize the detection of the semiconductor device by opening the detector body.

[0009] Preferably, a closing component is provided on the front of the top plate, and the closing component includes a second fixing seat fixedly connected to the top of the top plate, the inner wall of the second fixing seat is fixedly connected to the third double-headed motor, the output end of the third double-headed motor is fixedly connected to a threaded rod, the outer wall of the threaded rod is threadedly connected to a threaded sleeve, the bottom of the threaded sleeve is fixedly connected to a T-block, the outer wall of the T-block is slidably connected to the first transverse plate, the side wall of the first transverse plate is fixedly connected to the front of the top plate, the bottom of the T-block is fixedly connected to a closing block, the bottom of the closing block is slidably connected to the second transverse plate, the side wall of the second transverse plate is fixedly connected to the front of the top plate, and the inner wall of the closing block is fixedly connected to glass. By setting the closing component, during the process of the detector body detecting the semiconductor device, the operator can start the third double-headed motor to cause the threaded rod to rotate, and during the rotation of the threaded rod, the threaded sleeve will move, thereby causing the T-block to slide inside the first transverse plate, causing the closing block to slide on the top of the second transverse plate. After the two closing blocks are closed, it is convenient for the operator to observe the detection of the semiconductor device inside the top plate through the glass.

[0010] Preferably, the bottom of the supporting platform is fixedly connected with a supporting leg, and there are four supporting legs. The four supporting legs are equal in size and fixedly connected to the four corners of the bottom of the supporting platform at equal distances. By setting four supporting legs, the four supporting legs can provide stable support for the supporting platform.

[0011] Preferably, the inner wall of the socket block is threadedly connected to the outer wall of the screw rod, and the side wall of the socket block is fixedly connected to one end of the sleeve. By arranging the socket block, the screw rod and the sleeve, it is convenient for the screw rod to move with the socket block during rotation, thereby moving with the sleeve.

[0012] Preferably, there are two L-shaped plates, the two L-shaped plates are equal in size, and the two L-shaped plates are symmetrically distributed along the center plane of the rectangular frame. By providing two L-shaped plates, it is convenient to clamp and fix the semiconductor device.

[0013] Preferably, the outer wall of one end of the limiting rod is matched with the inner wall of the side surface of the circular limiting plate, and the inner wall of the circular limiting plate is fixedly connected to the outer wall of the rotating rod.

[0014] Preferably, the detector body is located above the rectangular frame.

[0015] Preferably, there are two closing blocks, the two closing blocks are equal in size, and the two closing blocks are symmetrically distributed along the center plane of the top plate. By setting two closing blocks, the front side of the top plate can be closed, which is convenient for the operator to observe the detection situation inside the top plate through the glass.

[0016] The present invention provides a control device for HTRB detection. The control device for HTRB detection has the following beneficial effects:

[0017] (1) The HTRB detection control device is provided with an adjustment component. When it is necessary to adjust the detection position of the HTRB device, the operator turns on the first motor to cause the screw to rotate. During the rotation of the screw, the sleeve block moves along its outer wall, thereby causing the circular plate on its top to move to adjust the detection position. When the sleeve block moves to one side of the inside of the support platform, one end of the extrusion rod squeezes the inner wall of the support platform, thereby compressing the first spring, thereby achieving a shock-absorbing effect after the sleeve block moves to one side of the inside of the support platform. When it is necessary to adjust the detection angle of the top of the circular plate, the operator turns on the second motor to cause the output shaft to rotate. During the rotation of the output shaft, the first gear rotates. During the rotation of the first gear, it meshes with the second gear, thereby causing the transmission shaft to rotate. During the rotation of the transmission shaft, the circular plate rotates, thereby adjusting the detection angle of the top of the circular plate. After the degree adjustment is completed, the operator can place the semiconductor device to be inspected on the top inner wall of the rectangular frame, and then rotate the adjusting block to cause the screw to rotate. During the rotation of the screw, the clamping block will move downward. After the clamping block moves downward, it will move downward with the rubber block and squeeze the semiconductor device, thereby clamping and fixing the semiconductor device, so that the top of the semiconductor device can be inspected. When it is necessary to inspect the bottom of the semiconductor device, the operator can pull the connecting block to cause the pull plate to move, so that the pull plate pulls the limit rod to move, and after the limit rod is separated from the limit of the circular limit plate, the rectangular frame is rotated to make the bottom of the rectangular frame face upward, and the connecting block is released. Under the reaction of the second spring, the pull plate and the limit rod are reset, and the limit rod is inserted into the side inner wall of the circular limit plate, so that the position of the rotated rectangular frame can be fixed, so as to facilitate the inspection of the bottom of the semiconductor device inside the rectangular frame.

[0018] (2) The HTRB detection control device is provided with a detection component. After the semiconductor device is fixed, when the semiconductor device needs to be detected, the operator can open the cylinder to cause the detection instrument body to move downward, thereby adjusting the detection height of the detection instrument body to the semiconductor device, and then open the detection instrument body to detect the semiconductor device;

[0019] (3) The HTRB detection control device is provided with a closing component. When the detector body is detecting semiconductor devices, the operator can start the third double-headed motor to cause the threaded rod to rotate. During the rotation of the threaded rod, the threaded sleeve will move, thereby causing the T-block to slide inside the first horizontal plate, causing the closing block to slide on the top of the second horizontal plate. After the two closing blocks are closed, the operator can observe the detection status of the semiconductor devices inside the top plate through the glass. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0021] Figure 2 is a cross-sectional view of the present invention;

[0022] Figure 3 It is a structural schematic diagram of the regulating component in the present invention;

[0023] Figure 4 It is a schematic diagram of the local structure of the regulating component in the present invention;

[0024] Figure 5 It is a side view of the local structure of the adjustment component in the present invention;

[0025] Figure 6 It is a schematic diagram of the top structure of the adjustment component in the present invention;

[0026] Figure 7 It is a structural schematic diagram of the detection component in the present invention;

[0027] Figure 8 It is a schematic diagram of the structure of the closing component in the present invention.

[0028] In the figure: 1, bearing platform; 2, supporting leg; 3, top plate; 41, adjustment assembly; 411, first motor; 412, screw rod; 413, sleeve block; 414, sleeve; 415, first spring; 416, extrusion rod; 417, first fixed seat; 418, second motor; 419, output shaft; 4110, first gear; 4111, second gear; 4112, transmission shaft; 4113, round plate; 4114, vertical plate; 4115, rotating rod; 4116, rectangular frame; 4117, round limit plate; 4118, limit rod; 4119 , pull plate; 4120, second spring; 4121, connecting block; 4122, L-shaped plate; 4123, screw; 4124, adjusting block; 4125, clamping block; 4126, rubber block; 4127, semiconductor device; 42, detection component; 421, cylinder; 422, detector body; 43, closing component; 431, second fixed seat; 432, third double-headed motor; 433, threaded rod; 434, threaded sleeve; 435, T-block; 436, first horizontal plate; 437, closing block; 438, second horizontal plate; 439, glass. DETAILED DESCRIPTION

[0029] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, specific embodiments of the present invention are now described with reference to the accompanying drawings.

[0030] A preferred embodiment of a HTRB detection control device provided by the present invention is as follows: Figures 1 to 8As shown: A control device for HTRB detection includes a carrier platform 1 and an adjustment component 41 arranged inside the carrier platform 1. The adjustment component 41 includes a first motor 411 fixedly connected to the outer wall of the carrier platform 1. The output end of the first motor 411 is fixedly connected to a screw rod 412. The screw rod 412 movably penetrates the outer wall of the carrier platform 1 and extends to the inside of the carrier platform 1. The other end of the screw rod 412 is rotatably connected to the inner wall of the carrier platform 1. The outer wall of the screw rod 412 is threadedly connected to a socket block 413. The bottom of the socket block 413 is slidably connected to the bottom of the inner wall of the carrier platform 1. The side wall of the socket block 413 is fixedly connected to a sleeve 41 4, the inner wall of the sleeve 414 is fixedly connected with a first spring 415, the other end of the first spring 415 is fixedly connected with an extrusion rod 416, the outer wall of the sleeve block 413 is fixedly connected with a first fixing seat 417, the inner wall of the first fixing seat 417 is fixedly connected with a second motor 418, the output end of the second motor 418 is fixedly connected with an output shaft 419, the other end outer wall of the output shaft 419 is fixedly connected with a first gear 4110, the side wall of the first gear 4110 is meshed with a second gear 4111, the inner wall of the second gear 4111 is fixedly connected with a transmission shaft 4112, the bottom outer wall of the transmission shaft 4112 is connected with the bearing through The top of the sleeve block 413 is rotatably connected, and the top of the transmission shaft 4112 is fixedly connected with a circular plate 4113. By setting the adjustment component 41, when it is necessary to adjust the detection position of the HTRB device, the operator turns on the first motor 411 to cause the screw rod 412 to rotate. During the rotation of the screw rod 412, the sleeve block 413 is moved along its outer wall, thereby moving the circular plate 4113 on its top to adjust the detection position. When the sleeve block 413 moves to one side of the inside of the support platform 1, one end of the extrusion rod 416 squeezes the inner wall of the support platform 1, thereby compressing the first spring 41 5, so as to achieve the effect of cushioning after the sleeve block 413 moves to one side of the inner part of the carrier 1. When it is necessary to adjust the detection angle of the top of the circular plate 4113, the operator can turn on the second motor 418 to cause the output shaft 419 to rotate. During the rotation of the output shaft 419, the first gear 4110 will be rotated. During the rotation of the first gear 4110, it will mesh with the second gear 4111, thereby rotating the transmission shaft 4112. During the rotation of the transmission shaft 4112, the circular plate 4113 will be rotated, thereby adjusting the detection angle of the top of the circular plate 4113;

[0031] The adjusting assembly 41 also includes a vertical plate 4114 fixedly connected to the top of the circular plate 4113, the top inner wall of the vertical plate 4114 is rotatably connected to a rotating rod 4115 through a bearing, the other end of the rotating rod 4115 is fixedly connected to a rectangular frame 4116, the other end of the rectangular frame 4116 is fixedly connected to one end of another rotating rod 4115, the outer walls of the two rotating rods 4115 are rotatably connected to the inner wall of the other vertical plate 4114 through a bearing, the outer wall of the other rotating rod 4115 is fixedly connected to a circular limiting plate 4117, the inner wall of the circular limiting plate 4117 is slidably connected to a limiting rod 4118, the other end of the limiting rod 4118 is fixedly connected to a pulling plate 4119, and the side wall of the pulling plate 4119 is fixedly connected to a second elastic member. The second spring 4120 is fixedly connected to the side wall of another vertical plate 4114, the top of the pull plate 4119 is fixedly connected to a connecting block 4121, the outer wall of the rectangular frame 4116 is fixedly connected to an L-shaped plate 4122, the top inner wall of the L-shaped plate 4122 is threadedly connected to a screw rod 4123, the top of the screw rod 4123 is fixedly connected to an adjusting block 4124, the bottom of the screw rod 4123 is rotatably connected to a clamping block 4125, the side wall of the clamping block 4125 is slidably connected to the inner wall of the L-shaped plate 4122, the bottom of the clamping block 4125 is fixedly connected to a rubber block 4126, the bottom of the rubber block 4126 is slidably connected to a semiconductor device 4127, the outer surface of the semiconductor device 4127 is fixedly connected to the inner wall of the L-shaped plate 4122, and the outer surface of the semiconductor device 4127 is fixedly connected to the inner wall of the L-shaped plate 4122. The wall is slidably connected to the inner wall of the rectangular frame 4116. After the rotation angle of the circular plate 4113 is adjusted, the operator can place the semiconductor device 4127 that needs to be tested on the top inner wall of the rectangular frame 4116, and then rotate the adjustment block 4124 to cause the screw 4123 to rotate. During the rotation of the screw 4123, the clamping block 4125 will move downward. After the clamping block 4125 moves downward, it will move downward with the rubber block 4126 and squeeze the semiconductor device 4127, so that the semiconductor device 4127 can be clamped and fixed, so that the top of the semiconductor device 4127 can be tested. When the bottom of the semiconductor device 4127 needs to be tested, When the operator pulls the connecting block 4121, the pull plate 4119 is prompted to move, so that the pull plate 4119 pulls the limiting rod 4118 to move, and the limiting rod 4118 is released from the limiting of the circular limiting plate 4117. Then, the operator rotates the rectangular frame 4116 to make the bottom of the rectangular frame 4116 face upward, and releases the connecting block 4121. Under the reaction of the second spring 4120, the pull plate 4119 and the limiting rod 4118 are reset, and the limiting rod 4118 is inserted into the side inner wall of the circular limiting plate 4117, so that the position of the rotated rectangular frame 4116 can be fixed, so as to facilitate the detection of the bottom of the semiconductor device 4127 inside the rectangular frame 4116.

[0032] A preferred embodiment of a HTRB detection control device provided by the present invention is as follows: Figures 1 to 8As shown: the top of the support platform 1 is fixedly connected to the top plate 3, and the top of the inner wall of the top plate 3 is provided with a detection component 42, the detection component 42 includes a cylinder 421 fixedly connected to the top of the inner wall of the top plate 3, and the output end of the cylinder 421 is fixedly connected to the detector body 422. By setting the detection component 42, after the semiconductor device 4127 is fixed, when the semiconductor device 4127 needs to be detected, the operator can open the cylinder 421 to prompt the detector body 422 to move downward, thereby adjusting the detection height of the detector body 422 to the semiconductor device 4127, and then realize the detection of the semiconductor device 4127 by opening the detector body 422.

[0033] A preferred embodiment of a HTRB detection control device provided by the present invention is as follows: Figures 1 to 8 As shown: a closing assembly 43 is provided on the front of the top plate 3, and the closing assembly 43 includes a second fixing seat 431 fixedly connected to the top of the top plate 3, an inner wall of the second fixing seat 431 is fixedly connected to a third double-headed motor 432, an output end of the third double-headed motor 432 is fixedly connected to a threaded rod 433, an outer wall of the threaded rod 433 is threadedly connected to a threaded sleeve 434, a bottom of the threaded sleeve 434 is fixedly connected to a T-block 435, an outer wall of the T-block 435 is slidably connected to a first transverse plate 436, a side wall of the first transverse plate 436 is fixedly connected to the front of the top plate 3, a closing block 437 is fixedly connected to the bottom of the T-block 435, a second transverse plate 438 is slidably connected to the bottom of the closing block 437, and the second transverse plate 43 The side wall of 8 is fixedly connected to the front side of the top plate 3, and the inner wall of the closing block 437 is fixedly connected with the glass 439. By setting the closing component 43, during the process of the detector body 422 detecting the semiconductor device 4127, the operator can turn on the third double-headed motor 432 to cause the threaded rod 433 to rotate. During the rotation of the threaded rod 433, the threaded sleeve 434 will move, thereby causing the T-block 435 to slide inside the first horizontal plate 436, causing the closing block 437 to slide on the top of the second horizontal plate 438. After the two closing blocks 437 are closed, the operator can observe the detection status of the semiconductor device 4127 inside the top plate 3 through the glass 439.

[0034] Furthermore, the bottom of the supporting platform 1 is fixedly connected with a supporting leg 2, and there are four supporting legs 2. The four supporting legs 2 are equal in size and fixedly connected to the four corners of the bottom of the supporting platform 1 at equal distances. By setting four supporting legs 2, the four supporting legs 2 can provide stable support for the supporting platform 1.

[0035] Furthermore, the inner wall of the socket block 413 is threadedly connected to the outer wall of the screw rod 412, and the side wall of the socket block 413 is fixedly connected to one end of the sleeve 414. By setting the socket block 413, the screw rod 412 and the sleeve 414, the socket block 413 can be moved during the rotation of the screw rod 412, thereby moving the sleeve 414.

[0036] Furthermore, there are two L-shaped plates 4122 , which are equal in size and symmetrically distributed along the center plane of the rectangular frame 4116 . By providing two L-shaped plates 4122 , it is convenient to clamp and fix the semiconductor device 4127 .

[0037] Furthermore, the outer wall of one end of the limiting rod 4118 is matched with the inner wall of the side of the circular limiting plate 4117 , and the inner wall of the circular limiting plate 4117 is fixedly connected to the outer wall of the rotating rod 4115 .

[0038] Furthermore, the detector body 422 is located above the rectangular frame 4116 .

[0039] In addition, there are two closing blocks 437, the two closing blocks 437 are equal in size, and the two closing blocks 437 are symmetrically distributed along the center plane of the top plate 3. By setting up two closing blocks 437, the front side of the top plate 3 can be closed, which is convenient for the operator to observe the detection situation inside the top plate 3 through the glass 439.

[0040] Working principle: When the detection position of the HTRB device needs to be adjusted, the operator turns on the first motor 411 to cause the screw rod 412 to rotate. During the rotation of the screw rod 412, the sleeve block 413 is moved along its outer wall, thereby moving the circular plate 4113 on its top to adjust the detection position. When the sleeve block 413 moves to one side of the inside of the support platform 1, one end of the extrusion rod 416 squeezes the inner wall of the support platform 1, thereby compressing the first spring 415, thereby achieving a shock-absorbing effect after the sleeve block 413 moves to one side of the inside of the support platform 1. When the circular plate 4113 needs to be adjusted, the sleeve block 413 is moved to one side of the inside of the support platform 1. 13, the operator can start the second motor 418 to cause the output shaft 419 to rotate. During the rotation of the output shaft 419, the first gear 4110 is rotated, and the first gear 4110 is meshed with the second gear 4111, thereby rotating the transmission shaft 4112. During the rotation of the transmission shaft 4112, the circular plate 4113 is rotated, thereby adjusting the detection angle of the top of the circular plate 4113. After the rotation angle of the circular plate 4113 is adjusted, the operator can place the semiconductor device 4127 to be detected. The top inner wall of the rectangular frame 4116 is then rotated by rotating the adjusting block 4124 to cause the screw 4123 to rotate. During the rotation of the screw 4123, the clamping block 4125 is moved downward. After the clamping block 4125 moves downward, the rubber block 4126 is moved downward and squeezes the semiconductor device 4127, thereby clamping and fixing the semiconductor device 4127, so that the top of the semiconductor device 4127 can be inspected. When it is necessary to inspect the bottom of the semiconductor device 4127, the operator can pull the connecting block 4121 to cause the pull plate 4119 to move. The pull plate 4119 pulls the limiting rod 4118 to move, and the limiting rod 4118 is separated from the limiting position of the circular limiting plate 4117. Then, the rectangular frame 4116 is rotated to make the bottom of the rectangular frame 4116 face upward, and the connecting block 4121 is released. Under the reaction of the second spring 4120, the pull plate 4119 and the limiting rod 4118 are reset, and the limiting rod 4118 is inserted into the side inner wall of the circular limiting plate 4117, so that the position of the rotated rectangular frame 4116 can be fixed, so as to facilitate the detection of the bottom of the semiconductor device 4127 inside the rectangular frame 4116.

[0041] After the semiconductor device 4127 is fixed, when the semiconductor device 4127 needs to be inspected, the operator can open the cylinder 421 to move the detector body 422 downward, thereby adjusting the inspection height of the detector body 422 to the semiconductor device 4127, and then open the detector body 422 to inspect the semiconductor device 4127;

[0042] During the process of the detector body 422 detecting the semiconductor device 4127, the operator can turn on the third double-headed motor 432 to cause the threaded rod 433 to rotate. During the rotation of the threaded rod 433, the threaded sleeve 434 will move, thereby causing the T-block 435 to slide inside the first horizontal plate 436, causing the closing block 437 to slide on the top of the second horizontal plate 438. After the two closing blocks 437 are closed, the operator can observe the detection status of the semiconductor device 4127 inside the top plate 3 through the glass 439.

[0043] The above description is only an illustrative specific implementation mode of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes and modifications made by any technician in the field without departing from the concept and principle of the present invention should fall within the scope of protection of the present invention. It should also be noted that the various components of the present invention are not limited to the above-mentioned overall application. The various technical features described in the specification of the present invention can be selected one by one or multiple ones can be selected and used in combination according to actual needs. Therefore, the present invention should naturally cover other combinations and specific applications related to this case.

Claims

1. A control device for HTRB detection, comprising a carrier platform (1), and an adjustment component (41) arranged inside the carrier platform (1), characterized in that: The adjustment component (41) comprises a first motor (411) fixedly connected to the outer wall of the support platform (1); the output end of the first motor (411) is fixedly connected to a screw rod (412); the screw rod (412) movably penetrates the outer wall of the support platform (1) and extends to the interior of the support platform (1); the other end of the screw rod (412) is rotatably connected to the inner wall of the support platform (1); the outer wall of the screw rod (412) is threadedly connected to a sleeve block (413); the bottom of the sleeve block (413) is slidably connected to the bottom of the inner wall of the support platform (1); the side wall of the sleeve block (413) is fixedly connected to a sleeve (414); the inner wall of the sleeve (414) is fixedly connected to a first spring (415); the other end of the first spring (415) is fixedly connected to The sleeve block (413) is connected to an extrusion rod (416); the outer wall of the sleeve block (413) is fixedly connected to a first fixed seat (417); the inner wall of the first fixed seat (417) is fixedly connected to a second motor (418); the output end of the second motor (418) is fixedly connected to an output shaft (419); the outer wall of the other end of the output shaft (419) is fixedly connected to a first gear (4110); the side wall of the first gear (4110) is meshed with a second gear (4111); the inner wall of the second gear (4111) is fixedly connected to a transmission shaft (4112); the bottom outer wall of the transmission shaft (4112) is rotatably connected to the top of the sleeve block (413) through a bearing; the top of the transmission shaft (4112) is fixedly connected to a circular plate (4113).

2. A HTRB detection control device according to claim 1, characterized in that: The adjustment assembly (41) further comprises a vertical plate (4114) fixedly connected to the top of the circular plate (4113); the top inner wall of the vertical plate (4114) is rotatably connected to a rotating rod (4115) via a bearing; the other end of the rotating rod (4115) is fixedly connected to a rectangular frame (4116); the other end of the rectangular frame (4116) is fixedly connected to one end of another rotating rod (4115); the outer walls of the two rotating rods (4115) are rotatably connected to the inner wall of another vertical plate (4114) via a bearing; the outer wall of another rotating rod (4115) is fixedly connected to a circular limiting plate (4117); the inner wall of the circular limiting plate (4117) is slidably connected to a limiting rod (4118); the other end of the limiting rod (4118) is fixedly connected to a pulling plate (4119); the side wall of the pulling plate (4119) is fixedly connected to a second spring (4120); the second spring The other end of the spring (4120) is fixedly connected to the side wall of another vertical plate (4114), the top of the pull plate (4119) is fixedly connected to a connecting block (4121), the outer wall of the rectangular frame (4116) is fixedly connected to an L-shaped plate (4122), the top inner wall of the L-shaped plate (4122) is threadedly connected to a screw rod (4123), the top of the screw rod (4123) is fixedly connected to an adjusting block (4124), and the screw rod (4123) is fixedly connected to the adjusting block (4124). The bottom of the rod (4123) is rotatably connected to a clamping block (4125), the side wall of the clamping block (4125) is slidably connected to the inner wall of the L-shaped plate (4122), the bottom of the clamping block (4125) is fixedly connected to a rubber block (4126), the bottom of the rubber block (4126) is slidably connected to a semiconductor device (4127), and the outer wall of the semiconductor device (4127) is slidably connected to the inner wall of the rectangular frame (4116).

3. A control device for HTRB detection according to claim 1, characterized in that: The top of the support platform (1) is fixedly connected to a top plate (3), the top of the inner wall of the top plate (3) is provided with a detection component (42), the detection component (42) comprises a cylinder (421) fixedly connected to the top of the inner wall of the top plate (3), and the output end of the cylinder (421) is fixedly connected to a detector body (422).

4. A control device for HTRB detection according to claim 3, characterized in that: A closing assembly (43) is provided on the front side of the top plate (3), and the closing assembly (43) comprises a second fixing seat (431) fixedly connected to the top of the top plate (3), a third double-headed motor (432) is fixedly connected to the inner wall of the second fixing seat (431), a threaded rod (433) is fixedly connected to the output end of the third double-headed motor (432), an outer wall of the threaded rod (433) is threadedly connected to a threaded sleeve (434), and a T-shaped block (434) is fixedly connected to the bottom of the threaded sleeve (434). 435), the outer wall of the T-block (435) is slidably connected to a first transverse plate (436), the side wall of the first transverse plate (436) is fixedly connected to the front of the top plate (3), the bottom of the T-block (435) is fixedly connected to a closing block (437), the bottom of the closing block (437) is slidably connected to a second transverse plate (438), the side wall of the second transverse plate (438) is fixedly connected to the front of the top plate (3), and the inner wall of the closing block (437) is fixedly connected to a glass (439).

5. A control device for HTRB detection according to claim 1, characterized in that: The bottom of the support platform (1) is fixedly connected with a support leg (2), the number of the support legs (2) is four, the four support legs (2) are equal in size, and the four support legs (2) are equidistantly fixedly connected to the four corners of the bottom of the support platform (1).

6. A control device for HTRB detection according to claim 1, characterized in that: The inner wall of the sleeve block (413) is threadedly connected to the outer wall of the screw rod (412), and the side wall of the sleeve block (413) is fixedly connected to one end of the sleeve (414).

7. A control device for HTRB detection according to claim 2, characterized in that: There are two L-shaped plates (4122), the two L-shaped plates (4122) are equal in size, and the two L-shaped plates (4122) are symmetrically distributed along the center plane of the rectangular frame (4116).

8. A control device for HTRB detection according to claim 2, characterized in that: The outer wall of one end of the limiting rod (4118) is matched with the inner wall of the side of the circular limiting plate (4117), and the inner wall of the circular limiting plate (4117) is fixedly connected to the outer wall of the rotating rod (4115).

9. A control device for HTRB detection according to claim 3, characterized in that: The detector body (422) is located above the rectangular frame (4116).

10. A control device for HTRB detection according to claim 4, characterized in that: There are two closing blocks (437), the two closing blocks (437) are equal in size, and the two closing blocks (437) are symmetrically distributed along the central plane of the top plate (3).

Citation Information

Patent Citations

  • Semiconductor device fault detection device

    CN212275880U