High-precision automatic leveling device and method for polyhedral optical element

Abstract

The invention provides a high-precision automatic leveling device and method for a polyhedral optical element. The control mechanism comprises an X-axis moving structure arranged on the supporting assembly in the X-axis direction, a Z-axis moving structure arranged at the output end of the X-axis moving structure and an alpha-axis rotating structure which is arranged at the output end of the Z-axis moving structure and rotates along the axis in the center direction of the end face of the top end of the vacuum adsorption platform. The beta-axis rotating structure is arranged at the output end of the alpha-axis rotating structure and rotates along the axis in the vertical direction, the Y-axis moving assembly is arranged on the Y-axis mounting base and controls the beta-angle initial positioning visual detection system and the distance measuring sensor to move in the Y-axis direction, and the output end of the beta-axis rotating structure is connected with the vacuum adsorption platform. Every two adjacent directions of the X axis, the Y axis and the Z axis are perpendicular to each other; according to the invention, high-precision, rapid, non-contact and stable leveling of each surface of the polyhedral optical element is realized, and the measurement precision of the measurement system on the position of each surface of the polyhedral optical element is improved.

Description

Technical Field

[0001] The invention relates to the field of optical technology, and in particular to a high-precision automatic leveling device and method for a polyhedral optical element. Background Art

[0002] With the continuous development of optical technology, the application scope of polyhedron optical elements is becoming increasingly wide, especially in the field of precision measurement, the position accuracy requirements for each face of polyhedron optical elements are increasing day by day to ensure the reliability of measurement results. The slight tilt of polyhedron optical elements will have a significant impact on the measurement results of each face, so the high-precision automatic leveling technology of polyhedrons has become the key to solving this problem.

[0003] Traditional methods for leveling optical components include manual adjustment, mechanical contact probe detection automatic leveling, and vision-based automatic leveling. However, these methods still have many shortcomings in terms of accuracy, speed, and reliability.

[0004] The manual adjustment method relies on the operator's experience and skills, which is not only inefficient but also difficult to ensure the accuracy of leveling. Although the mechanical contact probe detection automatic leveling system has improved the accuracy and speed of leveling to a certain extent, it is limited by the complexity of the mechanical structure and the damage and contamination to the optical components, and it is difficult to meet the actual production requirements.

[0005] The vision-based automatic leveling method uses image recognition technology to detect the tilt of polyhedral optical components and automatically adjusts them according to the detection results. However, existing visual leveling systems are often limited by factors such as lighting conditions, image noise, and algorithm accuracy, resulting in low leveling accuracy and poor adaptability to optical components with complex shapes and irregular surfaces. Summary of the invention

[0006] In view of the above technical problems, the present invention provides a high-precision automatic leveling device and method for a polyhedral optical element, which realizes high-precision, fast, non-contact and stable leveling of each face of the polyhedral optical element, and improves the measurement accuracy of the measurement system for the position of each face of the polyhedral optical element.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-precision automatic leveling device and method for a polyhedral optical element, comprising a support assembly, a control mechanism arranged on the support assembly, a vacuum adsorption platform arranged on the control mechanism, a β-angle initial positioning visual detection system arranged on the support assembly through a Y-axis mounting seat and located above the vacuum adsorption platform, and a distance measuring sensor arranged on the Y-axis mounting seat for measuring the side distance of the polyhedral optical element, the vacuum adsorption platform is used to adsorb and fix the polyhedral optical element, the control mechanism comprises an X-axis moving structure arranged on the support assembly along the X-axis direction, a Z-axis moving structure arranged on the output end of the X-axis moving structure, an α-axis rotating structure arranged on the output end of the Z-axis moving structure and rotating along an axis in the direction of the center of the top end face of the vacuum adsorption platform, a β-axis rotating structure arranged on the output end of the α-axis rotating structure and rotating along a vertical axis, and a Y-axis moving assembly arranged on the Y-axis mounting seat and controlling the β-angle initial positioning visual detection system and the distance measuring sensor to move in the Y-axis direction respectively, the output end of the β-axis rotating structure is connected to the vacuum adsorption platform, and the directions of the X-axis, Y-axis and Z-axis are perpendicular to each other.

[0008] Preferably, the X-axis moving structure includes an X-axis mounting seat, a first moving screw rod arranged parallel to the top end face of the X-axis mounting seat and arranged along the X-axis direction, and an X-axis moving block sleeved on the rod body of the first moving screw rod through a threaded connection, and the top end face of the X-axis moving block is connected to the Z-axis moving structure.

[0009] Preferably, the Z-axis moving structure includes a Z-axis mounting seat which is arranged parallel to the top end face of the X-axis moving block and whose length direction is arranged along a direction perpendicular to the first moving screw rod, a second moving screw rod which is arranged parallel to the top end face of the Z-axis mounting seat and along a Z-axis direction perpendicular to the X-axis direction, and a Z-axis moving block which is sleeved on the rod body of the second moving screw rod through a threaded connection, and an α-axis rotation structure is arranged on the top end face of the Z-axis moving block.

[0010] Preferably, the α-axis rotation structure includes a first adjustment seat arranged on the Z-axis moving block through an α-axis mounting seat, an adjustment protrusion slidably arranged in an arc-shaped adjustment groove on the top end face of the first adjustment seat, a second adjustment seat fixedly arranged on the top end face of the adjustment protrusion, and a control structure arranged in the arc-shaped adjustment groove and controlling the adjustment protrusion to move in the arc-shaped adjustment groove, the control structure drives the adjustment protrusion to rotate around the axis of the center position of the top end face of the vacuum adsorption platform, and the β-axis rotation structure is arranged on the top end face of the second adjustment seat.

[0011] Preferably, the control structure includes a tooth pattern arranged on the bottom side of the adjustment protrusion and penetrating through the bottom wall of the arc-shaped adjustment groove to open an arc-shaped control groove, and a worm arranged in the first adjustment seat and cooperating with the tooth pattern.

[0012] Preferably, the control structure includes a rack arranged on the bottom side of the adjusting protrusion and penetrating through the arc-shaped control groove formed in the bottom wall of the arc-shaped adjusting groove, and an adjusting gear arranged in the first adjusting seat and meshing with the rack.

[0013] A high-precision automatic leveling method for a polyhedral optical element, characterized in that it comprises the following steps:

[0014] Step 1: placing one end face of the polyhedral optical element on a vacuum adsorption platform, an automatic centering element is provided at the center of the top end face of the vacuum adsorption platform, the polyhedral optical element is placed on the vacuum adsorption platform, and the holes opened in the polyhedral optical element are sleeved on the automatic centering element;

[0015] Step 2: The control mechanism drives the polyhedral optical element to move to the bottom of the β angle initial positioning visual inspection system through the vacuum adsorption platform, and the β angle initial positioning visual inspection system automatically selects any one surface as the first side surface, determines the angle deviation and performs preliminary calibration;

[0016] Step 3: The X and Y theoretical coordinates of the three points are set as A(Xa, Ya), B(Xb, Yb), and C(Xc, Yc). The control mechanism drives the polyhedron optical element to move in the Z-axis direction and combines the theoretical distance set by the ranging sensor. When the three points reach the theoretical distance set by the ranging sensor respectively, the movement of the polyhedron optical element is stopped and the Z-axis coordinates Za, Zb, and Zc of the three points are output. At this time, the coordinates of A(Xa, Ya, Za), B(Xb, Yb, Zb), and C(Xc, Yc, Zc) of A, B, and C are output;

[0017] Step 4: Get the coordinates of points A, B, and C in step 3, calculate the values ​​of angles α and β, and determine whether the values ​​of angles α and β are within the angle deviation range. If they are within the angle deviation range, the side leveling is completed.

[0018] Step 5: If the values ​​of the angles α and β are not within the deviation range, the control mechanism is used to control the polyhedral optical element to rotate and level on the axes α and β according to the values ​​of the angles α and β;

[0019] Step 6: After the side adjustment is completed, repeat steps 3 and 4 to confirm whether the adjusted α and β angle values ​​are within the angle deviation range. If the requirements are met, the automatic leveling is completed and the first side measurement program is entered. If the requirements are not met, repeat steps 3 to 5 until the requirements are met and the first side measurement program is entered.

[0020] Step 7: After the measurement of the first surface is completed, the control mechanism drives the polyhedral optical element to rotate around the β axis and rotate to the second surface, and repeats steps 3 to 6 to complete the automatic leveling of the second surface;

[0021] Step 8: Level the multiple faces of the polyhedral optical element one by one according to steps 3 to 6.

[0022] Preferably, the process of obtaining the three points A, B, and C in step 3 is as follows:

[0023] The control mechanism first drives the polyhedron optical element to move in the X-axis direction, and drives the distance measuring sensor to move in the Y-axis direction to the theoretical value coordinates (Xa, Ya) of point A. Then, the polyhedron optical element is controlled to move in the Z-axis direction to a position 2mm away from the theoretical coordinates, and then moves at a low speed to a distance set by the distance measuring sensor from point A. The Z-axis coordinate Za of point A and the coordinates of point A (Xa, Ya, Za) are output; and the coordinates of point B (Xb, Yb, Zb) and point C (Xc, Yc, Zc) are synchronously determined in the above manner.

[0024] Preferably, the process of calculating the values ​​of angles α and β in step 4 is as follows:

[0025] The process of calculating the values ​​of α and β angles

[0026] Zf=Za,Yf=Yc

[0027] tanα=(Zf-Zc) / (Yf-Ya)

[0028] =(Za-Zc) / (Yc-Ya)

[0029] α=arctan[(Za-Zc) / (Yc-Ya)]

[0030] Xc=Xb,Ze=Za

[0031] tanβ=(Ze-Zb) / (Xe-Xa)

[0032] =(Za-Zb) / (Xb-Xa)

[0033] β=arctan[(Za-Zb) / (Xb-Xa)]

[0034] When the angle is positive, it rotates counterclockwise, and when it is negative, it rotates clockwise.

[0035] Preferably, the control mechanism drives the polyhedron optical element to move in the X-axis and Z-axis directions, and drives the polyhedron optical element to rotate around the central axis of the top end face of the vacuum adsorption platform; the control mechanism drives the β angle initial positioning visual detection system and the ranging sensor to move in the Y-axis direction.

[0036] The beneficial effects of the present invention are as follows: the control mechanism drives the polyhedron optical element to move to the corresponding position below the β angle initial positioning visual detection system in the X-axis, Y-axis and Z-axis directions, and can control the polyhedron optical element to rotate around the two angles α and β, thereby ensuring that the polyhedron optical element accurately positions each face of the polyhedron optical element during the measurement process, achieving high-precision, fast, non-contact and stable leveling of each face of the polyhedron optical element, and improving the measurement accuracy of the measurement system for the position of each face of the polyhedron optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0038] Figure 1 This is a schematic diagram of the front structure of the high-precision automatic leveling device for polyhedron optical elements proposed by the present invention.

[0039] Figure 2 This is a schematic diagram of the side structure of the high-precision automatic leveling device for polyhedral optical elements proposed by the present invention.

[0040] Figure 3 It is a schematic diagram of the structure of the polyhedral optical element of the present invention.

[0041] Figure 4 It is a schematic diagram of the spatial freedom structure of the polyhedron optical element sample of the present invention.

[0042] Figure 5 It is a schematic diagram of the measurement structure of the distance measuring sensor of the present invention.

[0043] Figure 6 It is a schematic diagram of the geometric structure of the β angle deviation in the rotation direction of the polyhedral optical element of the present invention.

[0044] Figure 7 It is a schematic diagram of the geometric structure of the horizontal α angle deviation of the polyhedron optical element of the present invention.

[0045] Figure 8 It is a schematic diagram of the cross-sectional structure of the first α-axis rotation structure of the present invention.

[0046] Fig. 9 It is a schematic diagram of the cross-sectional structure of the second α-axis rotation structure of the present invention.

[0047] Fig.10 This is a schematic structural diagram of the automatic centering element of the present invention being arranged on a vacuum adsorption platform.

[0048] In the figure: 1. Polyhedral optical element; 2. Vacuum adsorption platform; 3. Adsorption platform mounting seat; 4. β-axis rotation structure; 5. β-axis mounting seat; 6. α-axis rotation structure; 7. Z-axis moving structure; 8. α-axis mounting seat; 9. X-axis mounting seat; 10. Distance measuring sensor; 11. Y-axis mounting seat; 12. X-axis moving structure; 13. Surface defect detection module; 14. Surface defect detection module Y-axis; 15. β-angle initial positioning visual inspection system Y-axis; 16. β-angle initial positioning visual inspection system; 17. First adjustment seat; 18. Second adjustment seat; 19. Arc-shaped adjustment groove; 20. Adjustment bump; 21. Arc-shaped control groove; 22. Worm; 23. Adjustment gear; 24. Automatic centering element. DETAILED DESCRIPTION

[0049] In order to make the technical means, creative features, objectives and effects of the present invention easy to understand, the present invention is further described below in conjunction with specific embodiments and drawings, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0050] See also Figure 1-10 A high-precision automatic leveling device and method for a polyhedral optical element, comprising a support assembly, a control mechanism disposed on the support assembly, a vacuum adsorption platform 2 disposed on the control mechanism, a β angle initial positioning visual detection system 16 disposed on the support assembly through a Y-axis mounting seat 11 and located above the vacuum adsorption platform 2, and a distance measuring sensor 10 disposed on the Y-axis mounting seat 11 for measuring the side distance of the polyhedral optical element 1, the vacuum adsorption platform 2 is used to adsorb and fix the polyhedral optical element 1, characterized in that the control mechanism comprises an X-axis moving structure 12 disposed on the support assembly along the X-axis direction, and a X-axis moving structure 12 disposed on the X-axis A Z-axis moving structure 7 is provided on the output end of the moving structure 12, an α-axis rotating structure 6 is arranged on the output end of the Z-axis moving structure 7 and rotates along the axis in the central direction of the top end face of the vacuum adsorption platform 2, a β-axis rotating structure 4 is arranged on the output end of the α-axis rotating structure 6 and rotates along the vertical axis, and a Y-axis moving component is arranged on the Y-axis mounting seat 11 and controls the β angle initial positioning visual detection system 16 and the ranging sensor 10 to move in the Y-axis direction respectively, the output end of the β-axis rotating structure 4 is connected to the vacuum adsorption platform 2, and the directions of the X-axis, Y-axis and Z-axis are perpendicular to each other between adjacent ones.

[0051] An automatic centering element 24 is provided on the vacuum adsorption platform 2 , and the automatic centering element 24 is used to automatically center the polyhedral optical element 1 and adsorb and fix it.

[0052] like Fig.10As shown, an automatic centering element 24 is provided on the top end surface of the vacuum adsorption platform 2, and a hole is opened on the end surface of the polyhedron optical element 1. When the polyhedron optical element 1 is placed on the top end surface of the vacuum adsorption platform 2, the polyhedron optical element 1 is sleeved on the automatic centering element 24 through the hole, and the polyhedron optical element 1 is automatically centered.

[0053] The β-axis rotating structure 4 is mounted on the α-axis rotating structure 6 via the β-axis mounting seat 5 .

[0054] like Figure 1-10 As shown, the vacuum adsorption platform 2 is installed on the β-axis rotation structure 4 through the adsorption platform mounting seat 3. The β-axis rotation structure 4 facilitates the vacuum adsorption platform 2 and the polyhedral optical element 1 adsorbed and fixed on the vacuum adsorption platform 2 to rotate around the vertical axis passing through the center position of the top end face of the vacuum adsorption platform 2. The β-angle initial positioning visual detection system 16 is set on the Y-axis mounting seat 11 through the β-angle initial positioning visual detection system Y-axis 15, and the surface defect detection module 13 is installed on the Y-axis mounting seat 11 through the surface defect detection module Y-axis 14.

[0055] The β angle initial positioning visual detection system 16 includes a camera, an imaging lens, and an illumination light source. The distance sensor precise distance measurement system includes a distance sensor 10 and a Y-axis moving structure, and the distance sensor 10 is fixed on the Y-axis moving structure.

[0056] The high-precision, fast, non-contact and stable leveling of each face of the polyhedral optical element 1 is achieved, and the measurement accuracy of the measurement system for the position of each face of the polyhedral optical element 1 is improved.

[0057] The X-axis moving structure 12 includes an X-axis mounting seat 9, a first moving screw rod parallel to the top end face of the X-axis mounting seat 9 and arranged along the X-axis direction, and an X-axis moving block sleeved on the rod body of the first moving screw rod through a threaded connection, and the top end face of the X-axis moving block is connected to the Z-axis moving structure 7.

[0058] The Z-axis moving structure 7 includes a Z-axis mounting seat which is arranged parallel to the top end face of the X-axis moving block and the length direction is arranged along the direction perpendicular to the first moving screw rod, a second moving screw rod which is arranged parallel to the top end face of the Z-axis mounting seat and along the Z-axis direction perpendicular to the X-axis direction, and a Z-axis moving block which is sleeved on the rod body of the second moving screw rod through a threaded connection, and an α-axis rotation structure is arranged on the top end face of the Z-axis moving block.

[0059] The α-axis rotation structure 6 includes a first adjustment seat 17 set on the Z-axis moving block through the α-axis mounting seat 8, an adjustment protrusion 20 slidably set in an arc-shaped adjustment groove 19 on the top end face of the first adjustment seat 17, a second adjustment seat 18 fixedly set on the top end face of the adjustment protrusion 20, and a control structure set in the arc-shaped adjustment groove 19 and controlling the adjustment protrusion 20 to move in the arc-shaped adjustment groove 19. The control structure drives the adjustment protrusion 20 to rotate around the axis of the center position of the top end face of the vacuum adsorption platform 2, and the β-axis rotation structure 4 is set on the top end face of the second adjustment seat 18.

[0060] like Figure 8 As shown, the control structure includes a tooth pattern arranged on the bottom side of the adjusting protrusion 20 and penetrating through the bottom wall of the arc-shaped adjusting groove 19 to open an arc-shaped control groove 21, and a worm 22 arranged in the first adjusting seat 17 and cooperating with the tooth pattern.

[0061] The worm 22 is driven by a motor. The rotation of the worm 22 facilitates the adjustment protrusion 20 to move in the arc-shaped adjustment groove 19, that is, the polyhedron optical element 1 set on the vacuum adsorption platform 2 is controlled to rotate around the axis direction of the center position of the top end surface of the vacuum adsorption platform 2.

[0062] like Fig. 9 As shown, the control structure includes a rack disposed on the bottom side of the adjusting protrusion 20 and penetrating through an arc-shaped control groove 21 formed in the bottom wall of the arc-shaped adjusting groove 19, and an adjusting gear 23 disposed in the first adjusting seat 17 and meshing with the rack.

[0063] The motor drives the adjusting gear 23 to rotate, so as to drive the adjusting protrusion 20 to move in the arc-shaped adjusting groove 19, that is, to control the polyhedron optical element 1 arranged on the vacuum adsorption platform 2 to rotate around the axis direction of the center position of the top end surface of the vacuum adsorption platform 2.

[0064] A high-precision automatic leveling method for a polyhedral optical element, characterized in that it comprises the following steps:

[0065] Step 1: Place one end face of the polyhedron optical element 1 on the vacuum adsorption platform 2. An automatic centering element 24 is provided at the center of the top end face of the vacuum adsorption platform 2. The polyhedron optical element 1 is placed on the vacuum adsorption platform 2. The holes opened in the polyhedron optical element 1 are sleeved on the automatic centering element 24.

[0066] Step 2: The control mechanism drives the polyhedral optical element 1 to move below the β angle initial positioning visual detection system 16 through the vacuum adsorption platform 2, and the β angle initial positioning visual detection system 16 automatically selects any one surface as the first side surface, determines the angle deviation and performs preliminary calibration;

[0067] Step 3: The X and Y coordinates of the three points are set as A (Xa, Ya), B (Xb, Yb), and C (Xc, Yc). The control mechanism drives the polyhedron optical element 1 to move in the Z-axis direction and combines the theoretical distance measurement distance set by the distance measurement sensor 10. When the three points reach the theoretical distance measurement distance set by the distance measurement sensor 10 respectively, the movement of the polyhedron optical element 1 is stopped and the Z-axis coordinates Za, Zb, and Zc of the three points are output. At this time, the coordinates of A (Xa, Ya, Za), B (Xb, Yb, Zb), and C (Xc, Yc, Zc) of A, B, and C are output;

[0068] Step 4: Get the coordinates of points A, B, and C in step 3, calculate the values ​​of angles α and β, and determine whether the values ​​of angles α and β are within the angle deviation range. If they are within the angle deviation range, the side leveling is completed.

[0069] Step 5: If the values ​​of the angles α and β are not within the deviation range, the control mechanism is used to control the polyhedral optical element 1 to rotate and level on the axes α and β according to the values ​​of the angles α and β;

[0070] Step 6: After the side adjustment is completed, repeat steps 3 and 4 to confirm whether the adjusted α and β angle values ​​are within the angle deviation range. If the requirements are met, the automatic leveling is completed and the first side measurement program is entered. If the requirements are not met, repeat steps 3 to 5 until the requirements are met and the first side measurement program is entered.

[0071] Step 7: After the measurement of the first surface is completed, the control mechanism drives the polyhedral optical element 1 to rotate around the β axis and rotate to the second surface, and repeats steps 3 to 6 to complete automatic leveling of the second surface;

[0072] Step 8: Level the multiple faces of the polyhedral optical element 1 one by one according to steps 3 to 6.

[0073] The process of obtaining points A, B, and C in step 3 is as follows:

[0074] The control mechanism first drives the polyhedron optical element 1 to move in the X-axis direction, and drives the distance measuring sensor 10 to move in the Y-axis direction to the theoretical coordinates Xa and Ya of point A. Then, the polyhedron optical element 1 is controlled to move in the Z-axis direction to a position 2 mm away from the theoretical coordinates, and then moves at a low speed to a distance set by the distance measuring sensor from point A. The Z-axis coordinate Za of point A and the coordinates Xa, Ya and Za of point A are output. The coordinates Xb, Yb and Zb of point B and the coordinates Xc, Yc and Zc of point C are synchronously determined in the above manner.

[0075] The process of calculating the α and β angle values ​​in step 4 is as follows:

[0076] The process of calculating the values ​​of α and β angles

[0077] Zf=Za,Yf=Yc

[0078] tanα=(Zf-Zc) / (Yf-Ya)

[0079] =(Za-Zc) / (Yc-Ya)

[0080] α=arctan[(Za-Zc) / (Yc-Ya)]

[0081] Xc=Xb,Ze=Za

[0082] tanβ=(Ze-Zb) / (Xe-Xa)

[0083] =(Za-Zb) / (Xb-Xa)

[0084] β=arctan[(Za-Zb) / (Xb-Xa)]

[0085] When the angle is positive, it rotates counterclockwise, and when it is negative, it rotates clockwise.

[0086] The control mechanism drives the polyhedron optical element 1 to move in the X-axis and Z-axis directions, and drives the polyhedron optical element 1 to rotate around the central axis of the top end face of the vacuum adsorption platform 2; the control mechanism drives the β angle initial positioning visual detection system 16 and the ranging sensor 10 to move in the Y-axis direction.

[0087] The β-axis rotating structure includes a rotating motor arranged on the top end surface of the second adjusting seat 18 through the β-axis mounting seat 5 , and the axis of the output end of the rotating motor is arranged in the vertical direction and passes through the center of the top end surface of the vacuum adsorption platform 2 .

[0088] When the polyhedron optical element 1 is placed on the top end face of the vacuum adsorption platform 2 for adsorption and fixation, the first movable screw is first driven to rotate by the motor, and the X-axis moving block arranged on the rod body of the first movable screw is driven to move on the rod body of the first movable screw, and the second movable screw is driven to rotate by the motor, and the Z-axis moving block arranged on the rod body of the second movable screw is driven to move, so as to facilitate the vacuum adsorption platform 2 and the polyhedron optical element 1 adsorbed and fixed on the vacuum adsorption platform 2 to move in the plane of the X-axis and the Z-axis, so as to facilitate the control of the polyhedron optical element 1 to move to the position below the β angle initial positioning visual detection system 16, and cooperate with the ranging sensor 10 to measure the side surface of one side of the polyhedron optical element 1, and calculate the values ​​of the α and β angles, and correspondingly control the polyhedron optical element 1 to perform corresponding rotation adjustment, control the side surface leveling, and realize high-precision, fast, non-contact and stable leveling of each surface of the polyhedron optical element, and improve the measurement accuracy of the measurement system for the position of each surface of the polyhedron optical element.

[0089] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A high-precision automatic leveling device for a polyhedral optical element, comprising a support assembly, a control mechanism disposed on the support assembly, a vacuum adsorption platform (2) disposed on the control mechanism, a β angle initial positioning visual detection system (16) disposed on the support assembly through a Y-axis mounting seat (11) and located above the vacuum adsorption platform (2), and a distance measuring sensor (10) disposed on the Y-axis mounting seat (11) for measuring the side distance of the polyhedral optical element (1), wherein the vacuum adsorption platform (2) is used for adsorbing and fixing the polyhedral optical element (1), and is characterized in that: The control mechanism comprises an X-axis moving structure (12) arranged on a support assembly along the X-axis direction, a Z-axis moving structure (7) arranged on an output end of the X-axis moving structure (12), an α-axis rotating structure (6) arranged on an output end of the Z-axis moving structure (7) and rotating along an axis in a central direction passing through an end face of a top end of a vacuum adsorption platform (2), a β-axis rotating structure (4) arranged on an output end of the α-axis rotating structure (6) and rotating along an axis in a vertical direction, and a Y-axis moving assembly arranged on a Y-axis mounting seat (11) and controlling a β-angle initial positioning visual detection system (16) and a distance measuring sensor (10) to move in the Y-axis direction respectively, wherein the output end of the β-axis rotating structure (4) is connected to the vacuum adsorption platform (2), and the directions of the X-axis, Y-axis and Z-axis are mutually perpendicular when two of them are adjacent.

2. The high-precision automatic leveling device for a polyhedral optical element according to claim 1, characterized in that: The X-axis moving structure (12) comprises an X-axis mounting seat (9), a first moving screw rod which is arranged parallel to the top end surface of the X-axis mounting seat (9) and arranged along the X-axis direction, and an X-axis moving block which is sleeved on the rod body of the first moving screw rod through a threaded connection, and the top end surface of the X-axis moving block is connected to the Z-axis moving structure (7).

3. The high-precision automatic leveling device for a polyhedral optical element according to claim 2, characterized in that: The Z-axis moving structure (7) comprises a Z-axis mounting seat which is arranged parallel to the top end surface of the X-axis moving block and the length direction of which is arranged along the direction perpendicular to the first moving screw, a second moving screw which is arranged parallel to the top end surface of the Z-axis mounting seat and along the Z-axis direction perpendicular to the X-axis direction, and a Z-axis moving block which is sleeved on the rod body of the second moving screw through a threaded connection, and an α-axis rotating structure is arranged on the top end surface of the Z-axis moving block.

4. The high-precision automatic leveling device for a polyhedral optical element according to claim 3, characterized in that: The α-axis rotation structure (6) comprises a first adjustment seat (17) arranged on the Z-axis moving block via an α-axis mounting seat (8), an adjustment protrusion (20) slidably arranged in an arc-shaped adjustment groove (19) provided on the top end surface of the first adjustment seat (17), a second adjustment seat (18) fixedly arranged on the top end surface of the adjustment protrusion (20), and a control structure arranged in the arc-shaped adjustment groove (19) and controlling the adjustment protrusion (20) to move in the arc-shaped adjustment groove (19), the control structure driving the adjustment protrusion (20) to rotate around an axis at a central position of the top end surface of the vacuum adsorption platform (2), and a β-axis rotation structure (4) is arranged on the top end surface of the second adjustment seat (18).

5. The high-precision automatic leveling device for a polyhedral optical element according to claim 4, characterized in that: The control structure comprises a tooth pattern arranged on the bottom side of the adjusting protrusion (20) and penetrating through the bottom wall of the arc-shaped adjusting groove (19) to open an arc-shaped control groove (21), and a worm (22) arranged in the first adjusting seat (17) and cooperating with the tooth pattern.

6. The high-precision automatic leveling device for a polyhedral optical element according to claim 4, characterized in that: The control structure comprises a rack arranged on the bottom side of the adjusting protrusion (20) and penetrating through an arc-shaped control groove (21) formed in the bottom wall of the arc-shaped adjusting groove (19), and an adjusting gear (23) arranged in the first adjusting seat (17) and meshing with the rack.

7. A high-precision automatic leveling method for a polyhedral optical element, characterized in that: The following steps are involved: Step 1: placing one end surface of the polyhedral optical element (1) on a vacuum adsorption platform (2), an automatic centering element (24) is provided at the center position of the top end surface of the vacuum adsorption platform (2), the polyhedral optical element (1) is placed on the vacuum adsorption platform (2), and the hole opened in the polyhedral optical element (1) is sleeved on the automatic centering element (24); Step 2: The control mechanism drives the polyhedral optical element (1) to move to the bottom of the β angle initial positioning visual detection system (16) through the vacuum adsorption platform (2), and the β angle initial positioning visual detection system (16) automatically selects any one surface as the first side surface, determines the angle deviation and performs preliminary calibration; Step 3: The X and Y coordinates of the three points are set as A (Xa, Ya), B (Xb, Yb), and C (Xc, Yc), and the control mechanism drives the polyhedron optical element (1) to move in the Z-axis direction and combines the theoretical distance measurement distance set by the distance measurement sensor (10). When the three points reach the theoretical distance measurement distance set by the distance measurement sensor (10) in sequence, the movement of the polyhedron optical element (1) is stopped and the Z-axis coordinates Za, Zb, and Zc of the three points are output. At this time, the coordinates of A (Xa, Ya, Za), B (Xb, Yb, Zb), and C (Xc, Yc, Zc) of A, B, and C are output; Step 4: Get the coordinates of points A, B, and C in step 3, calculate the values ​​of angles α and β, and determine whether the values ​​of angles α and β are within the angle deviation range. If they are within the angle deviation range, the side leveling is completed. Step 5: If the values ​​of the angles α and β are not within the deviation range, the control mechanism is used to control the polyhedral optical element (1) to rotate and level the polyhedron on the axes α and β according to the values ​​of the angles α and β; Step 6: After the side adjustment is completed, repeat steps 3 and 4 to confirm whether the adjusted α and β angle values ​​are within the angle deviation range. If the requirements are met, the automatic leveling is completed and the first side measurement program is entered. If the requirements are not met, repeat steps 3 to 5 until the requirements are met and the first side measurement program is entered. Step 7: After the measurement of the first surface is completed, the control mechanism drives the polyhedral optical element (1) to rotate around the β axis and rotate to the second surface, and repeats steps 3 to 6 to complete automatic leveling of the second surface; Step 8: Level the multiple faces of the polyhedral optical element (1) one by one according to steps 3 to 6.

8. A high-precision automatic leveling method for a polyhedral optical element according to claim 7, characterized in that: The process of obtaining points A, B, and C in step 3 is as follows: The control mechanism first drives the polyhedron optical element (1) to move in the X-axis direction, and drives the distance measuring sensor (10) to move in the Y-axis direction to the theoretical value coordinates (Xa, Ya) of point A. The polyhedron optical element (1) is then controlled to move in the Z-axis direction to a position 2 mm away from the theoretical coordinates, and then moves at a low speed to a distance set by the distance measuring sensor from point A, and outputs the Z-axis coordinate Za of point A and the coordinates of point A (Xa, Ya, Za); and the coordinates of point B (Xb, Yb, Zb) and point C (Xc, Yc, Zc) are synchronously determined in the above manner.

9. A high-precision automatic leveling method for a polyhedral optical element according to claim 8, characterized in that: The process of calculating the α and β angle values ​​in step 4 is as follows: The process of calculating the values ​​of α and β angles Zf=Za,Yf=Yc tanα=(Zf-Zc) / (Yf-Ya) =(Za-Zc) / (Yc-Ya) α=arctan[(Za-Zc) / (Yc-Ya)] Xc=Xb,Ze=Za tanβ=(Ze-Zb) / (Xe-Xa) =(Za-Zb) / (Xb-Xa) β=arctan[(Za-Zb) / (Xb-Xa)] When the angle is positive, it rotates counterclockwise, and when it is negative, it rotates clockwise.

10. A high-precision automatic leveling method for a polyhedral optical element according to claim 9, characterized in that: The control mechanism drives the polyhedron optical element (1) to move in the X-axis and Z-axis directions, and drives the polyhedron optical element (1) to rotate around the central axis of the top end surface of the vacuum adsorption platform (2); the control mechanism drives the β angle initial positioning visual detection system (16) and the distance measurement sensor (10) to move in the Y-axis direction.

Images