Beam extraction structure for a multi-modal field negative hydrogen ion source

Abstract

The application discloses a kind of multi-peak field negative hydrogen ion source beam extraction structure, it is related to the field of multi-peak negative hydrogen ion source.The multi-peak field negative hydrogen ion source beam extraction structure, including shielding outer shell and installing magnetic guiding mechanism in shielding outer shell interior, the middle part of the magnetic guiding mechanism is equipped with beam pipeline, shielding outer shell, magnetic guiding mechanism and beam pipeline between pouring heat-conducting epoxy resin.The multi-peak field negative hydrogen ion source beam extraction structure, by optimizing the inner diameter size of beam pipeline and the structure design of beam cover plate, so that the required vacuum chamber volume is reduced, while magnetic guiding mechanism and beam pipeline are poured in shielding outer shell interior by heat-conducting epoxy resin, spiral cooling copper pipe is arranged in shielding outer shell, to simplify assembly process, improve overall heat dissipation efficiency, while optimizing the vacuum efficiency and mode.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of multi-peak field negative hydrogen ion source, in particular to a beam extraction structure of multi-peak field negative hydrogen ion source. BACKGROUND

[0002] The beam of the multi-peak field negative hydrogen ion source needs to be extracted and guided by two separate mechanisms; at present, the two mechanisms are combined by using a mechanical structure combination.

[0003] The guiding magnet of the multi-peak field negative hydrogen ion source for the vacuum chamber has limitations in the working environment, which are as follows:

[0004] I. Cooling method

[0005] Firstly, the guiding iron works completely in a vacuum environment. Although the power of the guiding magnet after energization is not large, a certain amount of heat will still be generated after long-time work. Therefore, under the background of considering the conventional vacuum cooling method, the original consideration is to cool the head by selecting a metal material with relatively high specific heat capacity as the head material and assisting with water cooling. However, the direct water cooling method only works on the head beam cover plate, but the shielding shell and the guiding magnet lack corresponding water cooling protection, which may be overheated and damaged.

[0006] II. Space layout

[0007] In the entire ion source system, the vacuum system is a very critical factor. In addition to the vacuum degree, the efficiency of vacuum pumping is also a major factor. The system volume is one of the factors affecting the vacuum pumping time. In the original design, the beam cover plate needs to be water-cooled by water-cooled copper pipes without blocking the beam. This will increase the inner diameter of the beam pipe, which will increase the number of turns of the guiding magnet, thereby increasing the size of the entire guiding iron, ultimately increasing the volume of the entire vacuum cavity, affecting the efficiency of vacuum pumping.

[0008] III. Installation method

[0009] Because the guiding iron needs to work in a vacuum environment, its installation space is necessarily limited. Therefore, the original design requires the fixed seat, the guiding magnet and the shielding shell to be installed in sequence in the narrow cavity, which has the problems of difficult installation and long installation time.

[0010] To solve the above problems, a beam extraction structure of multi-peak field negative hydrogen ion source is provided. SUMMARY

[0011] To address the shortcomings of existing technologies, this invention provides a beam extraction structure for a multi-peak field negative hydrogen ion source, which solves the problems of unreasonable cooling methods, excessively large spatial layout affecting vacuuming efficiency, and high installation difficulty and time in existing multi-peak field negative hydrogen ion source beam extraction structures.

[0012] To achieve the above objectives, the present invention is implemented through the following technical solution: a beam extraction structure for a multi-peak field negative hydrogen ion source, comprising a shielded outer shell and a magnetic guiding mechanism installed inside the shielded outer shell, wherein a beam pipe is installed in the middle of the magnetic guiding mechanism, and thermally conductive epoxy resin is poured between the shielded outer shell, the magnetic guiding mechanism and the beam pipe.

[0013] The inner diameter of the upper end of the beam channel is smaller than the inner diameter of the lower end;

[0014] The cooling copper pipes in the inner wall interlayer of the shielding outer shell are arranged in a spiral manner.

[0015] The magnetic guiding mechanism includes a vacuum chamber and a guide magnet disposed inside the vacuum chamber. Fixed pull rods are installed at both the upper and lower ends of the vacuum chamber. The fixed pull rods at the upper and lower ends fix the upper and lower ends of the guide magnet, so that the guide magnet remains suspended inside the vacuum chamber.

[0016] One of the fixed tie rods has a vacuum channel inside that is connected to the vacuum chamber, and the vacuum channel is equipped with a vacuum sealing component.

[0017] Preferably, the shielding housing includes an outer shell and a beam cover plate and a beam base fixedly installed at the upper and lower ends of the outer shell. An annular chamber is provided in the middle of the outer shell. The cooling copper pipe is assembled inside the annular chamber, and both ends of the cooling copper pipe are connected to coolant circulation pipes that penetrate the outer wall of the vacuum chamber.

[0018] Preferably, the bottom of the outer casing is provided with an assembly station, and the lower outer surface of the outer casing is integrally formed with a mounting flange ring. The beam base includes a base plate and an annular contact plate integrally formed on the top of the base plate. The annular contact plate is fixedly welded in the assembly station.

[0019] Preferably, the base plate has a through groove in the middle, the beam cover plate includes a sealing top plate and a diffuser shroud integrally formed on the top of the sealing top plate, the outer surface of the diffuser shroud has a diffuser groove, the sealing top plate has a positioning part integrally formed in the middle, and the two ends of the beam pipe are fixedly installed in the positioning part and the through groove.

[0020] Preferably, the outer casing is welded together from an inner ring shell and an outer cover shell. The bottom end of the positioning part is fixedly inserted into the inner ring shell. A sealing edge is provided on the outer side of the sealing top plate, and the sealing edge is fixedly welded to the top of the outer cover shell.

[0021] Preferably, the beam conduit includes a tube body, a diffuser section groove at the top inner part of the tube body, and a beam groove at the bottom inner part of the tube body, wherein the diffuser section groove is connected to the beam groove.

[0022] Preferably, the vacuum chamber is fixedly assembled inside the inner ring shell, and thermally conductive epoxy resin is densely filled between the two. The fixing rod passes through the upper and lower sides of the inner ring shell, and the lower fixing rod passes through the bottom plate.

[0023] Preferably, the end of the fixed pull rod is integrally formed with a threaded connector, the threaded connector is threaded into the side wall of the guide magnet, a sealing element is fixedly installed on the side wall of the vacuum chamber, and the fixed pull rod passes through the sealing element.

[0024] Preferably, the upper outer surface of the fixed pull rod is provided with an air guide hole, the air guide hole is located inside the vacuum chamber and is connected to the vacuum channel, and the vacuum sealing component is used to seal the air guide hole.

[0025] Preferably, the vacuum sealing component includes a threaded head and a top shaft fixedly disposed at the end of the threaded head. A sealing plug is installed on the outer surface of the end of the top shaft. The sealing plug fits against the inner wall of the air guide hole. A threaded assembly groove is opened at the outer end of the vacuum channel, and the threaded head is threadedly connected in the threaded assembly groove.

[0026] This invention discloses a beam extraction structure for a multi-peak field negative hydrogen ion source, which has the following beneficial effects:

[0027] 1. The beam extraction structure of this multi-peak field negative hydrogen ion source uses a spirally wound cooling copper tube set in the annular cavity of the shielded shell. At the same time, the two ends of the cooling copper tube extend to the outside of the shielded shell and are connected to two sets of coolant circulation connecting pipes. They are connected through an external coolant circulation device to achieve liquid cooling circulation. Meanwhile, inside the shielded shell, the magnetic guiding mechanism and beam pipe are fixed with thermally conductive epoxy resin, which simplifies the overall assembly steps, facilitates integral installation, reduces installation difficulty and saves installation time, and cools the magnetic guiding mechanism and beam pipe inside the entire shielded shell.

[0028] 2. The beam extraction structure of this multi-peak field negative hydrogen ion source optimizes the inner diameter of the beam pipe and the structural design of the beam cover plate. When deflecting a beam of the same energy, the smaller the radius of the guide magnet, the lower the power required by the magnet, the fewer the number of turns the magnet needs to be wound, the smaller the overall size of the magnet, and the lower the power required by the magnet. This reduces the required vacuum chamber volume, thereby shortening the time required for vacuuming and improving vacuuming efficiency.

[0029] 3. The beam extraction structure of this multi-peak field negative hydrogen ion source uses fixed tie rods to suspend and fix the guide magnet inside the vacuum chamber. A vacuum sealing component is installed inside a set of fixed tie rods. In use, by unscrewing the threaded head from the threaded assembly groove, the threaded head pulls the sealing plug outward through the top shaft, causing the sealing plug to move out of the gas vent. At this time, the entire vacuum chamber is evacuated through the fixed tie rods. After the evacuation is completed, the sealing plug is installed back into the gas vent for sealing, which facilitates the evacuation operation and effectively maintains the sealing state of the vacuum chamber. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a cross-sectional view of the overall structure of the present invention;

[0032] Figure 2 This is a schematic diagram of the overall outer surface structure of the present invention;

[0033] Figure 3 This is a cross-sectional view of the internal structure of the shielding shell of the present invention;

[0034] Figure 4 This is a cross-sectional view of the internal structure of the magnetic guiding mechanism of the present invention;

[0035] Figure 5 This is a schematic diagram of the vacuum sealing component structure of the present invention;

[0036] Figure 6 This is an exploded view of the internal structure of the shielding shell of the present invention.

[0037] In the diagram: 1. Shielding outer shell; 11. Outer shell component; 111. Inner annular shell; 112. Annular chamber; 113. Mounting flange ring; 114. Outer shell; 115. Assembly station; 12. Beam cover plate; 121. Sealing top plate; 122. Diffuser; 123. Positioning part; 124. Diffuser slot; 125. Sealing edge; 13. Beam base; 131. Base plate; 132. Annular contact plate; 133. Through slot; 14. Cooling copper pipe; 15. Coolant circulation connecting pipe; 2. Magnetic guiding mechanism; 21. Vacuum chamber; 22. Guide magnet; 23. Fixed tie rod; 231. Vacuuming channel; 232. Air vent; 24. Seal; 25. Threaded connector; 26. Vacuum sealing component; 261. Threaded head; 262. Threaded assembly groove; 263. Top shaft; 264. Sealing plug; 3. Beam conduit; 31. Pipe body; 32. Beam conduit; 33. Diffusion section through groove; 4. Thermally conductive epoxy resin. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are described clearly and completely. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] This application provides a beam extraction structure for a multi-peak field negative hydrogen ion source, which solves the problems of unreasonable cooling methods, excessive space layout affecting vacuuming efficiency, and high installation difficulty and time in existing multi-peak field negative hydrogen ion source beam extraction structures.

[0040] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0041] This invention discloses a beam extraction structure for a multi-peak field negative hydrogen ion source.

[0042] According to the appendix Figures 1-6 As shown, it includes a shielded outer shell 1 and a magnetic guiding mechanism 2 installed inside the shielded outer shell 1. A beam pipe 3 is installed in the middle of the magnetic guiding mechanism 2. Thermally conductive epoxy resin 4 is poured between the shielded outer shell 1, the magnetic guiding mechanism 2 and the beam pipe 3.

[0043] The inner diameter of the upper end of the beam pipe 3 is smaller than the inner diameter of the lower end;

[0044] The cooling copper pipe 14 is arranged in a spiral loop in the inner wall interlayer of the shielded outer shell 1.

[0045] The magnetic guiding mechanism 2 includes a vacuum chamber 21 and a guide magnet 22 disposed inside the vacuum chamber 21. Fixed pull rods 23 are installed at both the upper and lower ends of the vacuum chamber 21. The fixed pull rods 23 at the upper and lower ends fix the upper and lower ends of the guide magnet 22 respectively, so that the guide magnet 22 remains suspended inside the vacuum chamber 21.

[0046] One of the fixed tie rods 23 has a vacuum channel 231 inside that is connected to the vacuum chamber 21, and a vacuum sealing component 26 is installed inside the vacuum channel 231.

[0047] The shielded housing 1 includes a housing component 11 and a beam cover plate 12 and a beam base 13 fixedly installed at the upper and lower ends of the housing component 11. An annular chamber 112 is provided in the middle of the housing component 11. A cooling copper pipe 14 is assembled inside the annular chamber 112, and both ends of the cooling copper pipe 14 penetrate the outer wall of the vacuum chamber 21 and are equipped with coolant circulation connection pipes 15. The coolant circulation connection pipes 15 are connected to an external coolant circulation device to achieve liquid cooling circulation. Thermally conductive epoxy resin 4 is used to conduct heat and cool the magnetic guiding mechanism 2 and beam pipe 3 inside the entire shielded housing 1.

[0048] An assembly station 115 is provided at the bottom of the outer casing 11. An installation flange ring 113 is integrally formed on the lower outer surface of the outer casing 11. The beam base 13 includes a base plate 131 and an annular contact plate 132 integrally formed on the top of the base plate 131. The annular contact plate 132 is fixedly welded in the assembly station 115, so that the beam base 13 can be embedded in the bottom of the outer casing 11.

[0049] A through groove 133 is provided in the middle of the base plate 131. The beam cover plate 12 includes a sealing top plate 121 and a diffuser shroud 122 integrally formed on the top of the sealing top plate 121. A diffuser slot 124 is provided on the outer surface of the diffuser shroud 122. A positioning part 123 is integrally formed in the middle of the sealing top plate 121. Both ends of the beam pipe 3 are fixedly installed in the positioning part 123 and the through groove 133, which has a fixing effect on the beam pipe 3.

[0050] The outer casing 11 is composed of an inner ring shell 111 and an outer cover shell 114 welded together. The bottom end of the positioning part 123 is fixedly inserted into the inner ring shell 111. A sealing edge 125 is provided on the outer side of the sealing top plate 121. The sealing edge 125 is fixedly welded to the top of the outer cover shell 114, so that the top of the entire outer casing 11 is in a closed state.

[0051] The beam pipe 3 includes a pipe body 31, a diffuser section through groove 33 at the inner top of the pipe body 31, and a beam groove 32 at the inner bottom of the pipe body 31. The diffuser section through groove 33 is connected to the beam groove 32, and the inner diameter of the diffuser section through groove 33 is smaller than the inner diameter of the beam groove 32.

[0052] The vacuum chamber 21 is fixedly assembled inside the inner ring shell 111, and the thermally conductive epoxy resin 4 is densely filled between the two. The fixing rod 23 passes through the upper and lower sides of the inner ring shell 111, and the lower fixing rod 23 passes through the bottom plate 131. The fixing rod 23 allows the guide magnet 22 to be suspended and fixed inside the vacuum chamber 21.

[0053] The end of the fixed pull rod 23 is integrally formed with a threaded connector 25, which is threaded into the side wall of the guide magnet 22. A sealing element 24 is fixedly installed on the side wall of the vacuum chamber 21, and the fixed pull rod 23 passes through the sealing element 24. At the same time, thermally conductive epoxy resin 4 is wrapped around the outer surface of the connection between the three, so that the fixed pull rod 23 and the vacuum chamber 21 have a good sealing connection effect.

[0054] A vent hole 232 is provided on the upper outer surface of the fixed pull rod 23. The vent hole 232 is located inside the vacuum chamber 21 and is connected to the vacuum channel 231. A vacuum sealing component 26 is used to seal the vent hole 232. The vacuum sealing component 26 includes a threaded head 261 and a top shaft 263 fixedly installed at the end of the threaded head 261. A sealing plug 264 is installed on the outer surface of the end of the top shaft 263. The sealing plug 264 fits against the inner wall of the vent hole 232. A threaded assembly groove 262 is provided at the outer end of the vacuum channel 231. The threaded head 261 is threaded into the threaded assembly groove 262. By unscrewing the threaded head 261 from the threaded assembly groove 262, the threaded head 261 pulls the sealing plug 264 outward through the top shaft 263, causing the sealing plug 264 to move out of the air guide hole 232. At this time, the entire vacuum chamber 21 is evacuated through the fixed pull rod 23. After the evacuation is completed, the sealing plug 264 is installed back into the air guide hole 232 to seal, thereby facilitating the evacuation operation and effectively maintaining the sealing state of the vacuum chamber 21.

[0055] Working principle: The device uses a spirally wound cooling copper pipe 14 in the annular chamber 112 of the shielded outer shell 1. The two ends of the cooling copper pipe 14 extend to the outside of the shielded outer shell 1 and are connected to two sets of coolant circulation connecting pipes 15. They are connected through an external coolant circulation device to achieve liquid cooling circulation. At the same time, the magnetic guiding mechanism 2 and the beam pipe 3 are fixed inside the shielded outer shell 1 by thermally conductive epoxy resin 4, which simplifies the overall assembly steps, facilitates integral installation, reduces installation difficulty and saves installation time, and cools the magnetic guiding mechanism 2 and the beam pipe 3 inside the entire shielded outer shell 1.

[0056] By optimizing the inner diameter of the beam pipe 3 and the structural design of the beam cover plate 12, when deflecting a beam of the same energy, the smaller the radius of the guide magnet 22, the lower the power required by the magnet, the fewer the number of turns the magnet is wound, the smaller the overall size of the guide magnet 22, and the lower the power required by the guide magnet 22. This reduces the volume of the required vacuum chamber 21, thereby shortening the time required for the vacuum chamber 21 to perform vacuuming and improving the vacuuming efficiency.

[0057] Meanwhile, a fixed pull rod 23 is used to suspend and fix the guide magnet 22 inside the vacuum chamber 21. A vacuum sealing component 26 is set inside a set of fixed pull rods 23. In use, by unscrewing the threaded head 261 from the threaded assembly groove 262, the threaded head 261 pulls the sealing plug 264 outward through the top shaft 263, so that the sealing plug 264 moves out from the air guide hole 232. At this time, the fixed pull rod 23 is used to evacuate the entire vacuum chamber 21. After the evacuation is completed, the sealing plug 264 is installed back into the air guide hole 232 to seal, thereby facilitating the evacuation operation and effectively maintaining the sealing state of the vacuum chamber 21.

[0058] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A beam extraction structure for a multi-peak field negative hydrogen ion source, comprising a shielded outer shell (1) and a magnetic guiding mechanism (2) installed inside the shielded outer shell (1), wherein a beam channel (3) is installed in the middle of the magnetic guiding mechanism (2), characterized in that, Thermally conductive epoxy resin (4) is poured between the shielding shell (1), the magnetic guiding mechanism (2) and the beam pipe (3); The inner diameter of the upper end of the beam pipe (3) is smaller than the inner diameter of the lower end; The cooling copper pipe (14) in the inner wall interlayer of the shielding outer shell (1) is arranged in a spiral manner; The magnetic guiding mechanism (2) includes a vacuum chamber (21) and a guide magnet (22) disposed inside the vacuum chamber (21). Fixed pull rods (23) are installed at both the upper and lower ends of the vacuum chamber (21). The fixed pull rods (23) at the upper and lower ends fix the upper and lower ends of the guide magnet (22) respectively, so that the guide magnet (22) remains suspended inside the vacuum chamber (21). Among them, a set of fixed tie rods (23) is provided with a vacuum channel (231) that is connected to the vacuum chamber (21), and a vacuum sealing component (26) is provided inside the vacuum channel (231).

2. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 1, characterized in that: The shielding housing (1) includes a housing component (11) and a beam cover plate (12) and a beam base (13) fixedly installed at the upper and lower ends of the housing component (11). An annular chamber (112) is provided in the middle of the housing component (11). The cooling copper pipe (14) is assembled inside the annular chamber (112), and the two ends of the cooling copper pipe (14) are connected to the coolant circulation connection pipe (15) through the outer wall of the vacuum chamber (21).

3. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 2, characterized in that: The bottom of the outer shell (11) is provided with an assembly station (115). The lower outer surface of the outer shell (11) is integrally formed with an installation flange ring (113). The beam base (13) includes a base plate (131) and an annular contact plate (132) integrally formed on the top of the base plate (131). The annular contact plate (132) is fixedly welded in the assembly station (115).

4. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 3, characterized in that: The base plate (131) has a through groove (133) in the middle. The beam cover plate (12) includes a sealing top plate (121) and a diffuser cover (122) integrally formed on the top of the sealing top plate (121). The outer surface of the diffuser cover (122) has a diffuser opening (124). The sealing top plate (121) has a positioning part (123) integrally formed in the middle. The two ends of the beam pipe (3) are fixedly installed in the positioning part (123) and the through groove (133).

5. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The outer shell (11) is composed of an inner ring shell (111) and an outer cover shell (114) welded together. The bottom end of the positioning part (123) is fixedly inserted into the inner ring shell (111). A sealing edge (125) is provided on the outer side of the sealing top plate (121), and the sealing edge (125) is fixedly welded to the top of the outer cover shell (114).

6. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 4, characterized in that: The beam pipe (3) includes a pipe body (31), a diffuser section through groove (33) at the top inner part of the pipe body (31), and a beam groove (32) at the bottom inner part of the pipe body (31). The diffuser section through groove (33) is connected to the beam groove (32).

7. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 5, characterized in that: The vacuum chamber (21) is fixedly assembled inside the inner ring shell (111), and thermally conductive epoxy resin (4) is densely filled between the two. The fixing rod (23) passes through the upper and lower sides of the inner ring shell (111), and the lower fixing rod (23) passes through the bottom plate (131).

8. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 7, characterized in that: The end of the fixed pull rod (23) is integrally formed with a threaded connector (25), which is threadedly connected to the side wall of the guide magnet (22). A sealing element (24) is fixedly installed on the side wall of the vacuum chamber (21), and the fixed pull rod (23) passes through the sealing element (24).

9. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 8, characterized in that: The upper outer surface of the fixed pull rod (23) is provided with a vent hole (232), the vent hole (232) is located inside the vacuum chamber (21), and the vent hole (232) is connected to the vacuum channel (231). The vacuum sealing component (26) is used to seal the vent hole (232).

10. The beam extraction structure of a multi-peak field negative hydrogen ion source according to claim 9, characterized in that: The vacuum sealing component (26) includes a threaded head (261) and a top shaft (263) fixedly disposed at the end of the threaded head (261). A sealing plug (264) is installed on the outer surface of the end of the top shaft (263). The sealing plug (264) fits against the inner wall of the air guide hole (232). A threaded assembly groove (262) is provided at the outer end of the vacuum channel (231). The threaded head (261) is threadedly connected in the threaded assembly groove (262).

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