A loading and unloading device for a coating equipment

Abstract

The present invention belongs to the technical field of solar coating, and specifically relates to a loading and unloading device for coating equipment, including a support frame. An elevating mechanism is installed inside the support frame, a material feeding and taking mechanism is installed above the elevating mechanism, a feeding plate is installed at the top of the material feeding and taking mechanism, a silicon wafer carrier plate is arranged above the feeding plate, a coating assembly is installed on one side of the top of the support frame away from the material feeding and taking mechanism, a placement tray is arranged inside the coating assembly, and the groove inside the placement tray matches the shape of the silicon wafer carrier plate; the position of the silicon wafer carrier plate is photographed by a camera, the silicon wafer carrier plate is clamped by a clamping plate when the lifting plate descends, then the silicon wafer carrier plate can be aligned by rotating the direction of the lifting plate, and then the silicon wafer carrier plate is placed back on the top of the feeding plate to realize the correction of the silicon wafer carrier plate.

Description

Technical Field

[0001] The invention belongs to the technical field of solar coating, and specifically relates to a loading and unloading device for coating equipment. Background Art

[0002] Solar energy is a clean energy source that is often seen in daily life. To generate electricity from solar energy, solar cells are required to convert the solar light energy into electrical energy. Silicon wafers are used in solar cells, and after the production of silicon wafers, they need to be coated. Coating can make the conversion efficiency of solar cells higher. To coat the silicon wafers, they need to be placed in a coating chamber, and a loading and unloading device is required to put the silicon wafers in.

[0003] During use, the silicon wafer carrier is placed into the coating chamber through the loading and unloading device. However, after the silicon wafer carrier is placed on the top of the feeding plate, it is prone to being placed obliquely. At this time, the silicon wafer carrier cannot be loaded into the placement tray in the coating chamber, and during the feeding process, the silicon wafer carrier is prone to slipping off the top of the feeding plate, which may cause damage to the silicon wafers and affect subsequent use.

[0004] Therefore, the invention provides a loading and unloading device for coating equipment. Summary of the Invention

[0005] In order to make up for the deficiencies of the prior art and solve at least one of the technical problems proposed in the background art.

[0006] The technical solution adopted by the invention to solve its technical problems is as follows: A loading and unloading device for coating equipment of the invention includes a support frame. An elevating mechanism is installed inside the support frame. A material feeding and taking mechanism is installed above the elevating mechanism. A feeding plate is installed at the top of the material feeding and taking mechanism. A silicon wafer carrier is arranged above the feeding plate. A coating assembly is installed on one side of the top of the support frame away from the material feeding and taking mechanism. A placement tray is arranged inside the coating assembly. The groove inside the placement tray matches the shape of the silicon wafer carrier. A fixing frame is arranged above the material feeding and taking mechanism. The bottom end of the fixing frame is fixedly connected to the support frame. An installation frame is fixed at the top end inside the fixing frame. A first lifting frame is slidably connected inside the installation frame. A first motor is installed at the top of the installation frame. A threaded column is fixed at the end of the rotating shaft of the first motor. The threaded column is threadedly connected to the first lifting frame. The bottom end of the first lifting frame is rotatably connected to a steering column. A second motor is installed on one side of the steering column. A gear is fixed at the end of the rotating shaft of the second motor. A gear is also fixed at the top end of the steering column. The gear of the second motor is meshed with the gear of the steering column. A lifting plate is fixed at the bottom end of the steering column. A camera is installed at the bottom end of the lifting plate. Clamping plates are arranged on both sides of the lifting plate.

[0007] Preferably, an activity cavity is formed inside the lifting plate. A telescopic plate is slidably connected inside the activity cavity. One end of the telescopic plate is fixedly connected to the clamping plate.

[0008] Preferably, a second hydraulic cylinder is arranged inside the lifting plate. A second piston is slidably connected inside the second hydraulic cylinder. One end of the second piston is fixed with a second telescopic rod. The other end of the second telescopic rod is fixedly connected to one side of the top end of the telescopic plate close to the clamping plate. On one side of the first lifting frame away from the mounting frame, a first hydraulic cylinder is installed. The bottom end of the first hydraulic cylinder is fixed with an infusion pipe. The other end of the infusion pipe is communicated with the top end of the lifting plate. A first piston is slidably connected inside the first hydraulic cylinder. The top end of the first piston is fixed with a first telescopic rod. The first telescopic rod penetrates through the top end of the first hydraulic cylinder. A first spring is sleeved outside the first telescopic rod. The bottom end of the first spring is fixedly connected to the top end of the first piston. The top end of the first spring is fixedly connected to the top end inside the first hydraulic cylinder.

[0009] Preferably, a lifting block is fixed to the top end of the first telescopic rod. Pull rods are fixed to both sides of the lifting block. A plurality of teeth are equally spaced and fixed to both sides of the inner part of the mounting frame away from one end of the first lifting frame. The teeth are arranged in the upper area inside the mounting frame. Winding gears are rotatably connected to both sides of the first lifting frame. The winding gears can be meshed with the teeth. A winding disc is fixed to the end of the winding gear away from the first lifting frame. A pull rope is wound around the outside of the winding disc. Pulley guide blocks are fixed to both sides of the top end of the mounting frame. The pull rope penetrates through the inside of the pulley guide block. The other end of the pull rope is fixedly connected to the end of the pull rod of the lifting block.

[0010] Preferably, a clamping groove is formed on one side of the lifting block. A support plate is fixed to one side of the first hydraulic cylinder close to the clamping groove. A clamping block is arranged on one side of the top end of the support plate close to the lifting block. The clamping block can be snap-connected with the clamping groove. A telescopic column is fixed to the end of the clamping block close to the support plate. The telescopic column penetrates through the inside of the support plate. A third spring is sleeved outside the telescopic column. One end of the third spring is fixedly connected to the clamping block. The other end of the third spring is fixedly connected to the support plate.

[0011] Preferably, a connecting frame is arranged on the side of the support plate away from the clamping block. The other end of the telescopic column of the clamping block is fixedly connected to the connecting frame. Push blocks are fixed to both sides of the bottom end of the connecting frame. Top columns are arranged on both sides of the first lifting frame. The top columns are fixedly connected to the mounting frame.

[0012] Preferably, limit blocks are fixed to both sides of the bottom end of the silicon wafer carrier plate. Limit grooves are formed on both sides of one end of the feeding plate. The limit blocks and the limit grooves can be snap-connected with each other.

[0013] Preferably, a runner is rotatably connected to the side of the clamping plate close to the camera. A first tooth disc is fixed to the top end of the runner. A second tooth disc is arranged above the first tooth disc. The second tooth disc is slidably connected inside the clamping plate.

[0014] Preferably, a third telescopic rod is fixed to the top end of the second toothed disc. A second spring is sleeved outside the third telescopic rod. The bottom end of the second spring is fixedly connected to the top end of the second toothed disc, and the top end of the second spring is fixedly connected to the clamping plate. The top end of the third telescopic rod is fixed with a second lifting frame. One end of the second lifting frame is slidably connected inside the clamping plate, and the end of the second lifting frame away from the clamping plate is fixed with an extension rod.

[0015] Preferably, a ball is rotatably connected to the bottom end of the extension rod.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. For the loading and unloading device for a coating equipment described in the present invention, the position of the silicon wafer carrier is photographed by a camera, and the silicon wafer carrier is clamped by the clamping plate when the lifting plate descends. Then, the silicon wafer carrier can be aligned by rotating the lifting plate, and then the silicon wafer carrier is placed back on the top of the feeding plate to achieve the rectification of the silicon wafer carrier.

[0018] 2. For the loading and unloading device for a coating equipment described in the present invention, the two sides of the silicon wafer carrier can be limited during the feeding process of the silicon wafer carrier on the feeding plate by the rotating wheel, ensuring that the silicon wafer carrier is in a stable state during the feeding process. At the same time, when the clamping plate clamps the silicon wafer carrier, the rotating wheel is limited by the second toothed disc and the first toothed disc, which can ensure a stable state between the rotating wheel and the silicon wafer carrier during the clamping process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the drawings.

[0020] Figure 1 is a perspective view of the present invention;

[0021] Figure 2 is a schematic internal structure diagram of the present invention;

[0022] Figure 3 is a schematic diagram of the limiting groove and limiting block structure in the present invention;

[0023] Figure 4 is a schematic diagram of the mounting frame structure in the present invention;

[0024] Figure 5 is a schematic diagram of the first lifting frame structure in the present invention;

[0025] Figure 6 is a schematic diagram of the internal structure of the lifting plate in the present invention;

[0026] Figure 7 is a schematic diagram of the internal structure of the first oil cylinder in the present invention;

[0027] Figure 8 is a schematic diagram of the internal structure of the clamping plate in the present invention.

[0028] In the figure: 1. Support frame; 11. Loading and unloading mechanism; 111. Feeding plate; 112. Limit groove; 12. Lifting mechanism; 2. Wafer carrier; 21. Limit block; 3. Coating assembly; 31. Placing plate; 4. Fixed frame; 41. Mounting frame; 411. First motor; 412. Threaded column; 413. Pulley guide block; 414. Teeth; 415. Jacking column; 42. First lifting frame; 421. Winding gear; 422. Winding disc; 423. Pulling rope; 424. Second motor; 425. Steering column; 43. First hydraulic cylinder; 431. Liquid infusion pipe; 432. First piston; 433. First spring; 434. First telescopic rod; 435. Lifting block; 436. Card slot; 44. Lifting plate; 441. Activity cavity; 442. Telescopic plate; 443. Second telescopic rod; 444. Second piston; 445. Second hydraulic cylinder; 45. Camera; 46. Clamping plate; 461. Runner; 462. First gear disc; 463. Second gear disc; 464. Second spring; 465. Third telescopic rod; 466. Second lifting frame; 467. Extension rod; 468. Ball; 47. Support plate; 471. Connecting frame; 472. Pushing block; 473. Clamping block; 474. Third spring. Detailed implementation manners

[0029] In order to make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners.

[0030] As Figures 1 to 5As shown in the figure, a loading and unloading device for a coating equipment according to an embodiment of the present invention includes a support frame 1. An elevating mechanism 12 is installed inside the support frame 1. A material feeding and taking mechanism 11 is installed above the elevating mechanism 12. A feeding plate 111 is installed at the top end of the material feeding and taking mechanism 11. A silicon wafer carrier 2 is arranged above the feeding plate 111. A coating component 3 is installed on one side of the top end of the support frame 1 away from the material feeding and taking mechanism 11. A placing tray 31 is arranged inside the coating component 3. The groove inside the placing tray 31 matches the shape of the silicon wafer carrier 2. A fixing frame 4 is arranged above the material feeding and taking mechanism 11. The bottom end of the fixing frame 4 is fixedly connected to the support frame 1. An installation frame 41 is fixed at the top end inside the fixing frame 4. A first elevating frame 42 is slidably connected inside the installation frame 41. A first motor 411 is installed at the top end of the installation frame 41. A threaded column 412 is fixed at the end of the rotating shaft of the first motor 411. The threaded column 412 is in threaded connection with the first elevating frame 42. The bottom end of the first elevating frame 42 is rotatably connected to a steering column 425. A second motor 424 is installed on one side of the steering column 425. A gear is fixed at the end of the rotating shaft of the second motor 424. A gear is also fixed at the top end of the steering column 425. The gear of the second motor 424 is meshed with the gear of the steering column 425. A lifting plate 44 is fixed at the bottom end of the steering column 425. A camera 45 is installed at the bottom end of the lifting plate 44. Clamping plates 46 are arranged on both sides of the lifting plate 44;

[0031] After the production of the silicon wafer, in order to make its conversion efficiency higher, it needs to be coated. At this time, a loading and unloading device is required. Before coating, the loading and feeding mechanism 11 and the feeding plate 111 are in the lowest position. At this time, the silicon wafer carrier 2 loaded with silicon wafers can be placed on the top of the feeding plate 111. Then, the lifting mechanism 12 is started to drive the loading and feeding mechanism 11 and the feeding plate 111 to rise. At this time, the feeding plate 111 can drive the silicon wafer carrier 2 to the position of the feeding port of the coating component 3. At the same time, the lifting plate 44 is at the highest position. The camera 45 takes pictures of the silicon wafer carrier 2 during its rising process and judges whether the silicon wafer carrier 2 is in the correct position. When the silicon wafer carrier 2 is in the correct position, the loading and feeding mechanism 11 is started to drive the feeding plate 111 to send the silicon wafer carrier 2 into the interior of the placement tray 31 for coating. After the coating is completed, the loading and feeding mechanism 11 and the lifting mechanism 12 are moved in the reverse direction to take out the silicon wafer carrier 2. When the silicon wafer carrier 2 is not in the correct position, at this time, the second motor 424 is started to drive the steering column 425 to rotate through the gear. The steering column 425 drives the lifting plate 44 to rotate and automatically align with the inclination angle of the current silicon wafer carrier 2. After alignment, the second motor 424 stops rotating. At this time, the first motor 411 is started to drive the threaded column 412 to rotate. The rotation of the threaded column 412 drives the first lifting frame 42 to move downward inside the mounting frame 41. At this time, the first lifting frame 42 drives the lifting plate 44 to move downward. When the first lifting frame 42 moves to the bottom end inside the mounting frame 41, the two clamping plates 46 move towards the direction of the camera 45. At this time, the silicon wafer carrier 2 can be clamped under the lifting plate 44. Then, the first motor 411 is started to drive the first lifting frame 42 to rise. The first lifting frame 42 drives the lifting plate 44 to rise. At this time, the lifting plate 44 drives the clamping plates 46 to clamp the silicon wafer carrier 2. Then, the second motor 424 drives the lifting plate 44 to rotate to the correct angle. Subsequently, the lifting plate 44 descends to drive the silicon wafer carrier 2 to be placed on the top of the feeding plate 111. Then, the feeding plate 111 can send the correctly positioned silicon wafer carrier 2 into the interior of the coating component 3 and place it inside the placement tray 31. Then, coating is carried out, which can automatically correct the position of the silicon wafer carrier 2 and prevent the feeding process from being affected due to the position deviation of the silicon wafer carrier 2.

[0032] As Figures 4 to 6 shown, an activity cavity 441 is opened inside the lifting plate 44. A telescopic plate 442 is slidably connected inside the activity cavity 441. One end of the telescopic plate 442 is fixedly connected to the clamping plate 46;

[0033] When the clamping plate 46 approaches the camera 45, the telescopic plate 442 slides inside the activity cavity 441. At this time, the telescopic plate 442 can pull the clamping plate 46, and the clamping plate 46 can clamp the silicon wafer carrier 2, which can facilitate the grasping of the silicon wafer carrier 2.

[0034] As Figures 4 to 7As shown, a second hydraulic cylinder 445 is provided inside the lifting plate 44. A second piston 444 is slidably connected inside the second hydraulic cylinder 445. One end of the second piston 444 is fixed with a second telescopic rod 443. The other end of the second telescopic rod 443 is fixedly connected to the side of the top end of the telescopic plate 442 close to the clamping plate 46. On the side of the first lifting frame 42 away from the mounting frame 41, a first hydraulic cylinder 43 is installed. The bottom end of the first hydraulic cylinder 43 is fixed with an infusion pipe 431. The other end of the infusion pipe 431 is communicated with the top end of the lifting plate 44. A first piston 432 is slidably connected inside the first hydraulic cylinder 43. The top end of the first piston 432 is fixed with a first telescopic rod 434. The first telescopic rod 434 penetrates through the top end of the first hydraulic cylinder 43. A first spring 433 is sleeved outside the first telescopic rod 434. The bottom end of the first spring 433 is fixedly connected to the top end of the first piston 432. The top end of the first spring 433 is fixedly connected to the top end inside the first hydraulic cylinder 43;

[0035] The inside of the first hydraulic cylinder 43 below the first piston 432 and the inside of the infusion pipe 431 are filled with hydraulic oil. At the same time, the first spring 433 is in a compressed state. When the telescopic plate 442 needs to pull the clamping plate 46, the elastic force of the first spring 433 pushes the first piston 432, and the first piston 432 squeezes the hydraulic oil inside the first hydraulic cylinder 43. At this time, the hydraulic oil is injected into the inside of the second hydraulic cylinder 445 through the infusion pipe 431. Under the push of the hydraulic oil, the second piston 444 pushes the second telescopic rod 443 to move. At this time, the second telescopic rod 443 can push the telescopic plate 442 to move. At this time, the telescopic plate 442 can pull the clamping plate 46 to clamp the silicon wafer carrier 2.

[0036] As Figures 4 to 7 As shown, a lifting block 435 is fixed to the top end of the first telescopic rod 434. Pulling rods are fixed to both sides of the lifting block 435. A plurality of teeth 414 are equally spaced and fixed to both sides of the inner side of the mounting frame 41 away from the first lifting frame 42. The teeth 414 are arranged in the upper area inside the mounting frame 41. Winding gears 421 are rotatably connected to both sides of the first lifting frame 42. The winding gears 421 can be meshed with the teeth 414. A winding disc 422 is fixed to the end of the winding gear 421 away from the first lifting frame 42. A pull rope 423 is wound around the outside of the winding disc 422. Pulley guide blocks 413 are fixed to both sides of the top end of the mounting frame 41. The pull rope 423 passes through the inside of the pulley guide blocks 413. The other end of the pull rope 423 is fixedly connected to the end of the pulling rod of the lifting block 435;

[0037] After the splint 46 clamps the silicon wafer carrier 2, the first lifting frame 42 drives the lifting plate 44 to rise. At this time, the stroke of the first lifting frame 42 is short, and the winding gear 421 cannot mesh with the tooth 414. At this time, the winding disc 422 is in a relaxed state, enabling the pulling rope 423 to move freely. When the silicon wafer carrier 2 is placed inside the coating assembly 3, the first lifting frame 42 needs to reset. The first lifting frame 42 moves upward. When the winding gear 421 moves to the position of the tooth 414, it meshes with it. At this time, the winding gear 421 drives the winding disc 422 to wind the pulling rope 423. At this time, the pulling rope 423 pulls the rod of the lifting block 435, and the lifting block 435 pulls the first telescopic rod 434 to drive the first piston 432 to move. At this time, the first piston 432 can extract hydraulic oil into the first oil cylinder 43, and at the same time, the first spring 433 is compressed. At the same time, the hydraulic oil drives the second piston 444 to pull the second telescopic rod 443, and the second telescopic rod 443 pulls the telescopic plate 442 to drive the splint 46 to open, so as to realize the reset of the splint 46.

[0038] As Figures 4 to 7 shown, a clamping groove 436 is formed on one side of the lifting block 435. A support plate 47 is fixed on one side of the first oil cylinder 43 close to the clamping groove 436. A clamping block 473 is arranged on the top end of the support plate 47 close to the lifting block 435. The clamping block 473 can form a clamping connection with the clamping groove 436. A telescopic column is fixed at one end of the clamping block 473 close to the support plate 47. The telescopic column penetrates inside the support plate 47. A third spring 474 is sleeved outside the telescopic column. One end of the third spring 474 is fixedly connected with the clamping block 473, and the other end of the third spring 474 is fixedly connected with the support plate 47;

[0039] When the clamping groove 436 is lifted upward, its top end will push the inclined surface of the clamping block 473. At this time, the clamping block 473 is squeezed and moves in the direction of the support plate 47, and at the same time, the third spring 474 is compressed. When the first lifting frame 42 moves to the highest position, the positions of the clamping groove 436 and the clamping block 473 are aligned. At this time, the elastic force of the third spring 474 pushes the clamping block 473 to snap into the inside of the clamping groove 436, so as to limit the lifting block 435 and keep the state of the hydraulic oil inside the first oil cylinder 43.

[0040] As Figures 4 to 7 shown, a connecting frame 471 is arranged on the side of the support plate 47 away from the clamping block 473. The other end of the telescopic column of the clamping block 473 is fixedly connected with the connecting frame 471. Push blocks 472 are fixedly connected to both sides of the bottom end of the connecting frame 471. Top columns 415 are arranged on both sides of the first lifting frame 42. The top columns 415 are fixedly connected with the mounting frame 41;

[0041] When the first lifting frame 42 moves to the bottommost position for the first time, the clamping plate 46 needs to clamp the silicon wafer carrier 2. Therefore, when the first lifting frame 42 moves to the bottommost position, the inclined surface of the push block 472 is pushed by the ejector pin 415. At this time, the push block 472 is pushed and drives the connecting frame 471 to move. At this time, the connecting frame 471 pulls the clamping block 473 away from the clamping groove 436, and the fixation of the lifting block 435 can be released. At this time, the first spring 433 can push the first piston 432 to move downward, so that the clamping plate 46 can automatically clamp the silicon wafer carrier 2 when the first lifting frame 42 descends for the first time.

[0042] As Figure 3 shown, limiting blocks 21 are fixed on both sides of the bottom end of the silicon wafer carrier 2, limiting grooves 112 are opened on both sides of one end of the feeding plate 111, and a snap connection can be formed between the limiting blocks 21 and the limiting grooves 112;

[0043] When the clamping plate 46 clamps the silicon wafer carrier 2 and places it on the top of the feeding plate 111, the silicon wafer carrier 2 is aligned. At this time, the limiting blocks 21 and the limiting grooves 112 are engaged. When the feeding plate 111 sends the silicon wafer carrier 2 into the coating assembly 3, the silicon wafer carrier 2 can be pulled out from between the clamping plates 46.

[0044] As Figure 8 shown, a runner 461 is rotatably connected to one side of the clamping plate 46 close to the camera 45. A first gear disk 462 is fixed to the top of the runner 461. A second gear disk 463 is arranged above the first gear disk 462, and the second gear disk 463 is slidably connected inside the clamping plate 46;

[0045] When the clamping plate 46 clamps the silicon wafer carrier 2, the runner 461 can contact the silicon wafer carrier 2. When the feeding plate 111 pulls the silicon wafer carrier 2 out from between the clamping plates 46, the runner 461 rolls to reduce a large amount of friction, which is more convenient for the separation between the clamping plate 46 and the silicon wafer carrier 2.

[0046] As Figure 8 shown, a third telescopic rod 465 is fixed to the top of the second gear disk 463. A second spring 464 is sleeved outside the third telescopic rod 465. The bottom end of the second spring 464 is fixedly connected to the top of the second gear disk 463, the top end of the second spring 464 is fixedly connected to the clamping plate 46, the top end of the third telescopic rod 465 is fixed to a second lifting frame 466, one end of the second lifting frame 466 is slidably connected inside the clamping plate 46, and an extension rod 467 is fixed to the end of the second lifting frame 466 away from the clamping plate 46;

[0047] During the process of the clamping plate 46 clamping and aligning the wafer carrier 2, the wafer carrier 2 may drive the rolling wheel 461 to roll, resulting in the wafer carrier 2 slipping. Therefore, when the clamping plate 46 is at the lowest position, the extension rod 467 will support on the top of the support frame 1. At this time, the extension rod 467 drives the second lifting frame 466 to pull the third telescopic rod 465, and the third telescopic rod 465 pulls up the second gear disk 463. At this time, the second gear disk 463 is separated from the first gear disk 462, and the rolling wheel 461 can roll. When the clamping plate 46 clamps the wafer carrier 2, the extension rod 467 is separated from the top of the support frame 1. At this time, the second spring 464 pushes the second gear disk 463 to engage with the first gear disk 462. At this time, the rolling wheel 461 can be fixed, and it can prevent the rolling wheel 461 from rolling when the clamping plate 46 clamps the wafer carrier 2. When the feeding plate 111 drives the wafer carrier 2 to move, the clamping plate 46 will return to the lowest position. Therefore, the rolling wheel 461 is in a state where it can roll, which does not affect the feeding of the wafer carrier 2 by the feeding plate 111.

[0048] As Figure 8 shown, a ball 468 is rotatably connected to the bottom end of the extension rod 467;

[0049] When the clamping plate 46 clamps and adjusts the angle of the wafer carrier 2, the bottom end of the extension rod 467 may contact the top of the support frame 1. At this time, the ball 468 can roll at the bottom end of the extension rod 467, reducing the friction between the extension rod 467 and the top of the support frame 1.

[0050] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A loading and unloading device for a coating equipment, characterized in that, It includes a support frame (1). An elevating mechanism (12) is installed inside the support frame (1). A material feeding and taking mechanism (11) is installed above the elevating mechanism (12). A feeding plate (111) is installed at the top end of the material feeding and taking mechanism (11). A silicon wafer carrier (2) is arranged above the feeding plate (111). A coating assembly (3) is installed on one side of the top end of the support frame (1) away from the material feeding and taking mechanism (11). A placing tray (31) is arranged inside the coating assembly (3). The groove inside the placing tray (31) matches the shape of the silicon wafer carrier (2). A fixing frame (4) is arranged above the material feeding and taking mechanism (11). The bottom end of the fixing frame (4) is fixedly connected to the support frame (1). An installation frame (41) is fixed at the top end inside the fixing frame (4). A first elevating frame (42) is slidably connected inside the installation frame (41). A first motor (411) is installed at the top end of the installation frame (41). A threaded column (412) is fixed at the end of the rotating shaft of the first motor (411). The threaded column (412) is threadedly connected to the first elevating frame (42). A steering column (425) is rotatably connected to the bottom end of the first elevating frame (42). A second motor (424) is installed on one side of the steering column (425). A gear is fixed at the end of the rotating shaft of the second motor (424). A gear is also fixed at the top end of the steering column (425). The gear of the second motor (424) is meshed with the gear of the steering column (425). A lifting plate (44) is fixed at the bottom end of the steering column (425). A camera (45) is installed at the bottom end of the lifting plate (44). Clamping plates (46) are arranged on both sides of the lifting plate (44).

2. The loading and unloading device for a coating equipment according to claim 1, wherein: An activity cavity (441) is formed inside the lifting plate (44). A telescopic plate (442) is slidably connected inside the activity cavity (441). One end of the telescopic plate (442) is fixedly connected to the clamping plate (46).

3. The loading and unloading device for a coating equipment according to claim 2, characterized in that: A second oil cylinder (445) is arranged inside the lifting plate (44). A second piston (444) is slidably connected inside the second oil cylinder (445). One end of the second piston (444) is fixed with a second telescopic rod (443). The other end of the second telescopic rod (443) is fixedly connected to the side of the top end of the telescopic plate (442) close to the clamping plate (46). A first oil cylinder (43) is installed on the side of the first elevating frame (42) away from the installation frame (41). The bottom end of the first oil cylinder (43) is fixed with an infusion pipe (431). The other end of the infusion pipe (431) is communicated with the top end of the lifting plate (44). A first piston (432) is slidably connected inside the first oil cylinder (43). A first telescopic rod (434) is fixed at the top end of the first piston (432). The first telescopic rod (434) penetrates through the top end of the first oil cylinder (43). A first spring (433) is sleeved outside the first telescopic rod (434). The bottom end of the first spring (433) is fixedly connected to the top end of the first piston (432). The top end of the first spring (433) is fixedly connected to the top end inside the first oil cylinder (43).

4. The loading and unloading device for a coating equipment according to claim 3, characterized in that: A lifting block (435) is fixed to the top end of the first telescopic rod (434). Tie rods are fixed to both sides of the lifting block (435). A plurality of teeth (414) are evenly spaced and fixed to both sides of the inner part of the mounting frame (41) away from one end of the first lifting frame (42). The teeth (414) are arranged in the upper area inside the mounting frame (41). Winding gears (421) are rotatably connected to both sides of the first lifting frame (42). The winding gears (421) can be meshed with the teeth (414). A winding disc (422) is fixed to the end of the winding gear (421) away from the first lifting frame (42). A pull rope (423) is wound around the outside of the winding disc (422). Pulley guide blocks (413) are fixed to both sides of the top end of the mounting frame (41). The pull rope (423) passes through the inside of the pulley guide block (413). The other end of the pull rope (423) is fixedly connected to the end of the tie rod of the lifting block (435).

5. The loading and unloading device for a coating equipment according to claim 3, characterized in that: A clamping groove (436) is formed on one side of the lifting block (435). A support plate (47) is fixed to one side of the first oil cylinder (43) close to the clamping groove (436). A clamping block (473) is arranged on the top end of the support plate (47) close to the lifting block (435). The clamping block (473) can be snap-fitted with the clamping groove (436). A telescopic column is fixed to the end of the clamping block (473) close to the support plate (47). The telescopic column passes through the inside of the support plate (47). A third spring (474) is sleeved on the outside of the telescopic column. One end of the third spring (474) is fixedly connected to the clamping block (473). The other end of the third spring (474) is fixedly connected to the support plate (47).

6. The loading and unloading device for a coating equipment according to claim 5, characterized in that: A connecting frame (471) is arranged on the side of the support plate (47) away from the clamping block (473). The other end of the telescopic column of the clamping block (473) is fixedly connected to the connecting frame (471). Push blocks (472) are fixed to both sides of the bottom end of the connecting frame (471). Top columns (415) are arranged on both sides of the first lifting frame (42). The top columns (415) are fixedly connected to the mounting frame (41).

7. The loading and unloading device for a coating equipment according to claim 1, wherein: Limit blocks (21) are fixed to both sides of the bottom end of the silicon wafer carrier plate (2). Limit grooves (112) are formed on both sides of one end of the feeding plate (111). The limit blocks (21) and the limit grooves (112) can be snap-fitted with each other.

8. The loading and unloading device for a coating equipment according to claim 1, characterized in that: A runner (461) is rotatably connected to the side of the clamping plate (46) close to the camera (45). A first tooth disc (462) is fixed to the top end of the runner (461). A second tooth disc (463) is arranged above the first tooth disc (462). The second tooth disc (463) is slidably connected inside the clamping plate (46).

9. The loading and unloading device for a coating equipment according to claim 8, wherein: The top end of the second gear disc (463) is fixed with a third telescopic rod (465). A second spring (464) is sleeved outside the third telescopic rod (465). The bottom end of the second spring (464) is fixedly connected to the top end of the second gear disc (463), and the top end of the second spring (464) is fixedly connected to the clamping plate (46). The top end of the third telescopic rod (465) is fixed with a second lifting frame (466). One end of the second lifting frame (466) is slidably connected inside the clamping plate (46). A extension rod (467) is fixed to the end of the second lifting frame (466) away from the clamping plate (46).

10. The loading and unloading device for a coating equipment according to claim 9, characterized in that: A ball (468) is rotatably connected to the bottom end of the extension rod (467).

Images