A standard SMIF device for transporting masks between different devices

Abstract

The present invention discloses a standard SMIF device for transporting masks on different devices, and relates to the field of mask transport technology, including a frame, a lifting mechanism fixedly installed on the frame, a support frame installed on the lifting mechanism, a box opening mechanism arranged on the frame and inside the support frame, a mask tray installed on the frame is arranged on the top of the box opening mechanism, a support frame is fixedly installed on the top of the support frame, a mask box is installed on the support frame, and an information recognition mechanism is arranged at the bottom of the support frame. The present invention provides a standard SMIF device for transporting masks on different devices, and after the information recognition mechanism is arranged at the bottom of the support frame, it can be realized that in the process of transporting the mask, multiple mapping sensors can be used to identify information such as the position and quantity of the mask, thereby improving the accuracy of mask transmission and avoiding the impact of errors in the transportation of the mask on the production and manufacturing of semiconductors.

Description

Technical Field

[0001] The invention relates to the technical field of mask transport, in particular to a standard SMIF device used for transporting masks on different devices. Background Art

[0002] A mask, also known as a photomask, photolithography mask, etc., is a graphic master used in the photolithography process in microelectronics manufacturing. An opaque light-shielding film forms a mask pattern on a transparent substrate, and the pattern is transferred to the product substrate through exposure. The mask is the graphic "negative" in the chip manufacturing process, used to transfer high-precision circuit designs, and carries intellectual property information such as graphic design and process technology. The mask is used for mass production of chips and is a key part of the downstream production process connection. It is one of the determining factors of chip accuracy and quality. Masks are widely used in flat panel display, semiconductor, touch screen, circuit board and other industries, and play a vital role in the production and manufacturing process of these industries.

[0003] SMIF equipment, or standard mechanical interface equipment, is an automated equipment widely used in the semiconductor manufacturing process. Its main function is to ensure the quality of semiconductors when they are transported between different processes during the semiconductor manufacturing process and to prevent the semiconductors from being contaminated by dust or other pollution. For the transportation of masks, SMIF equipment is generally used to transport masks between different equipment. However, commonly used SMIF equipment does not have information functions such as the number of masks, whether they are in place, and front and back identification. This results in low accuracy in mask transportation. Errors in the transportation of masks will have a certain impact on the production and manufacturing of semiconductors. Summary of the invention

[0004] The object of the present invention is to provide a standard SMIF device for transporting masks on different devices, so as to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a standard SMIF device for transporting masks on different devices, comprising a frame, a lifting mechanism fixedly installed on the frame, a support frame installed on the lifting mechanism, a box opening mechanism is arranged on the frame and inside the support frame, a mask tray installed on the frame is arranged on the top of the box opening mechanism, a support frame is fixedly installed on the top of the support frame, a mask box is installed on the support frame, an information recognition mechanism is arranged on the bottom of the support frame, the information recognition mechanism includes a plurality of fixing seats symmetrically fixedly installed on the bottom of the support frame, a mounting block is installed on the fixing seat, and a mapping sensor is fixedly installed on the bottom of the mounting block.

[0006] As a further solution of the present invention: two first grooves are symmetrically provided inside the fixing seat, a first spring is fixedly installed inside the first groove, a clamping rod is fixedly installed at one end of the first spring, and a clamping block is fixedly installed on the top of the mounting block.

[0007] As a further solution of the present invention: the diameter of the clamping rod matches the inner diameter of the clamping groove on the clamping block, and one end of the clamping rod is arranged in an arc shape.

[0008] As a further solution of the present invention: a fixing mechanism is provided on the top of the support frame, and the fixing mechanism includes two frames symmetrically fixedly installed on the support frame, two first electric telescopic rods are symmetrically fixedly installed inside the frame, and a push block is fixedly installed on the output end of the first electric telescopic rod, and a support block connected by a plurality of second springs is provided on the inner wall of the support frame, one side of the support block is in contact with the push block, and a limit block passing through the frame is fixedly installed on the other side of the support block, and limit grooves are provided on both sides of the mask box body.

[0009] As a further solution of the present invention: a plurality of support columns are arranged on the top of the mask tray, a plurality of second grooves are opened on the mask tray, a second electric telescopic rod is fixedly installed inside the second groove, and a fixed block connected to the bottom of the support column is fixedly installed on the output end of the second electric telescopic rod.

[0010] As a further solution of the present invention: a rubber pad is fixedly installed on the top of the support column.

[0011] As a further solution of the present invention: a base is fixedly installed on the bottom of the frame, and a plurality of universal wheels are fixedly installed on the bottom of the base.

[0012] As a further solution of the present invention: a fixing frame is fixedly installed on both sides of the base, a support rod is movably installed on the fixing frame, a support seat is fixedly installed on the bottom of the support rod, and a plurality of third springs are installed between the support seat and the fixing frame.

[0013] As a further solution of the present invention: a fixing plate is fixedly installed on the top of the fixing frame, bolts are installed on the fixing plate, and a threaded groove is opened on one side of the support rod.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present invention provides a standard SMIF device for transporting masks on different devices. By setting an information recognition mechanism at the bottom of a support frame, it is possible to rely on multiple mapping sensors to recognize information such as the position and quantity of the mask during the transportation of the mask, thereby improving the accuracy of mask transmission and avoiding the impact of errors in mask transportation on semiconductor production.

[0016] 2. The present invention arranges the first groove, the first spring, the clamping rod and the clamping block, and utilizes the clamping engagement of the clamping rod and the clamping block to install and connect the mounting block with the fixing seat. Since one end of the clamping rod is connected to the first spring, the clamping engagement of the clamping rod and the clamping block has a certain degree of mobility, so that the clamping rod can move in the first groove, thereby allowing the clamping rod to detach from the clamping block. After detachment, the mapping sensor can be removed from the fixing seat, which is convenient for replacement when it fails.

[0017] 3. The present invention can fix the mask box more conveniently and stably through the setting of the fixing mechanism, and prevent the mask box from falling off the support frame. The two first electric telescopic rods are started synchronously to push the push blocks to move, so that the two push blocks squeeze the support blocks. After the support blocks are squeezed, the limit blocks are pushed out of the frame, so that the limit blocks are connected to the limit grooves on the mask box, thereby fixing the mask box. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure in an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the lifting mechanism structure in an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the structure of a mapping sensor in an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the expanded structure of the clamping rod and the clamping block in an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the internal structure of the framework in an embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram of the limiting groove structure in an embodiment of the present invention;

[0024] Figure 7 This is a schematic diagram of the structure of a mask tray in an embodiment of the present invention;

[0025] Figure 8 It is a cross-sectional view of the internal structure of the fixing frame in an embodiment of the present invention.

[0026] In the figure: 1. frame; 2. lifting mechanism; 3. support frame; 4. box opening mechanism; 5. mask tray; 6. support frame; 7. mask box; 8. information identification mechanism; 9. fixing seat; 10. mounting block; 11. mapping sensor; 12. first groove; 13. first spring; 14. clamping rod; 15. clamping block; 16. fixing mechanism; 17. frame; 18. first electric telescopic rod; 19. push block; 20. second spring; 21. support block; 22. limit block; 23. limit groove; 24. support column; 25. second groove; 26. second electric telescopic rod; 27. fixing block; 28. rubber pad; 29. ​​base; 30. universal wheel; 31. fixing frame; 32. support rod; 33. support seat; 34. third spring; 35. fixing plate; 36. bolt; 37. threaded groove. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with the accompanying drawings.

[0028] Reference Figure 1 , Figure 2 as well as Figure 3 As shown, a standard SMIF device for transporting masks on different devices is shown in the figure of the embodiment of the present invention, including a frame 1, a lifting mechanism 2 is fixedly installed on the frame 1, a support frame 3 is installed on the lifting mechanism 2, an opening mechanism 4 is arranged on the frame 1 and inside the support frame 3, a mask tray 5 installed on the frame 1 is arranged on the top of the opening mechanism 4, a support frame 6 is fixedly installed on the top of the support frame 3, a mask box 7 is installed on the support frame 6, an information recognition mechanism 8 is arranged at the bottom of the support frame 6, the information recognition mechanism 8 includes a plurality of fixing seats 9 symmetrically fixedly installed on the bottom of the support frame 6, a mounting block 10 is installed on the fixing seat 9, and a mapping sensor 11 is fixedly installed at the bottom of the mounting block 10. By setting the information recognition mechanism 8 at the bottom of the support frame 6, it is possible to rely on multiple mapping sensors 11 to identify the position, quantity and other information of the mask during the transportation of the mask. It should be noted that the multiple mapping sensors 11 record the orientation of each mask, such as 0 degrees, 90 degrees, and 180 degrees. Such records are convenient for subsequent processing of each mask, so that the status of each mask when it is taken out can be clearly grasped, thereby improving the accuracy of mask transmission and avoiding the impact of errors in mask transportation on semiconductor production.

[0029] Refer to the figure Figure 3 and Figure 4As other embodiments of the present invention: two first grooves 12 are symmetrically provided inside the fixing seat 9, a first spring 13 is fixedly installed inside the first groove 12, a clamping rod 14 is fixedly installed at one end of the first spring 13, a clamping block 15 is fixedly installed on the top of the mounting block 10, the diameter of the clamping rod 14 is consistent with the inner diameter of the clamping groove on the clamping block 15, and one end of the clamping rod 14 is set to be arc-shaped. By setting the first groove 12, the first spring 13, the clamping rod 14 and the clamping block 15, the mounting block 10 is installed and connected to the fixing seat 9 by utilizing the clamping engagement of the clamping rod 14 and the clamping block 15. Since one end of the clamping rod 14 is connected to the first spring 13, the clamping engagement of the clamping rod 14 and the clamping block 15 has a certain degree of mobility, so that the clamping rod 14 can move in the first groove 12, so that the clamping rod 14 can be detached from the clamping block 15. After detachment, the mapping sensor 11 can be disassembled from the fixing seat 9, which is convenient for replacement when it fails. After the diameter of the clamping rod 14 is matched with the inner diameter of the clamping groove on the clamping block 15, the connection between the clamping rod 14 and the clamping block 15 is more stable, which prevents the mapping sensor 11 from shaking and affecting the recognition effect. At the same time, after one end of the clamping rod 14 is set to an arc shape, it is easier for the clamping block 15 to squeeze the clamping rod 14 during the disassembly and assembly process.

[0030] As a further solution of the present invention: a fixing mechanism 16 is provided on the top of the support frame 6, and the fixing mechanism 16 includes two frames 17 symmetrically fixedly installed on the support frame 6, and two first electric telescopic rods 18 are symmetrically fixedly installed inside the frame 17, and a push block 19 is fixedly installed on the output end of the first electric telescopic rod 18, and a support block 21 installed and connected by a plurality of second springs 20 is provided on the inner wall of the support frame 6, one side of the support block 21 is in contact with the push block 19, and a limit block 22 penetrating the frame 17 is fixedly installed on the other side of the support block 21, and limit grooves 23 are provided on both sides of the mask box body 7, and a plurality of support columns 24 are provided on the top of the mask tray 5, and a plurality of second grooves 25 are provided on the mask tray 5, and a second electric telescopic rod 26 is fixedly installed inside the second groove 25, and a fixing block 27 connected to the bottom of the support column 24 is fixedly installed on the output end of the second electric telescopic rod 26, and a rubber pad 28 is fixedly installed on the top of the support column 24. By setting the fixing mechanism 16, the mask box body 7 can be fixed more conveniently and stably to prevent the mask box body 7 from falling off the support frame 6. The two first electric telescopic rods 18 are synchronously started to push the push block 19 to move, so that the two push blocks 19 squeeze the support block 21. After the support block 21 is squeezed, the limit block 22 is pushed out of the frame 17, so that the limit block 22 is connected to the limit groove 23 on the mask box body 7, so as to fix the mask box body 7. , the second electric telescopic rod 26, the fixed block 27 and the rubber pad 28 are set. The second electric telescopic rod 26 is started to make its output end telescopic. The support column 24 can be pulled by the second electric telescopic rod 26, so that the position of the support column 24 on the mask tray 5 can be adjusted. After the multiple support columns 24 are adjusted, the spacing between the multiple support columns 24 can be changed to support masks of different specifications. At the same time, the rubber pad 28 can reduce the collision and friction between the mask and the support column 24, thereby protecting the mask.

[0031] Other embodiments of the present invention: A base 29 is fixedly installed at the bottom of the frame 1, a plurality of universal wheels 30 are fixedly installed at the bottom of the base 29, a fixed frame 31 is fixedly installed on both sides of the base 29, a support rod 32 is movably installed on the fixed frame 31, a support seat 33 is fixedly installed at the bottom of the support rod 32, and a plurality of third springs 34 are installed between the support seat 33 and the fixed frame 31. Through the arrangement of the base 29 and the universal wheels 30, the frame 1 can be supported to move, which is convenient for moving between multiple devices. Through the arrangement of the fixing frame 31, the support rod 32, the support seat 33, the third spring 34, the fixing plate 35, the bolt 36 and the threaded groove 37, after the frame 1 is moved, the support seat 33 is lowered to contact the ground under the support of multiple third springs 34, and the frame 1 is supported as a whole under the support connection between the support rod 32 and the fixing frame 31 and the friction between the support seat 33 and the ground to prevent the frame 1 from moving during transportation. When the frame 1 is moved, the support rod 32 drives the support seat 33 to be pulled upward, and then one end of the bolt 36 is inserted into the threaded groove 37 to limit and fix the support rod 32, thereby preventing the support seat 33 from falling and contacting the ground, effectively preventing the moving frame 1 from being affected.

[0032] The working principle of the present invention is: the present invention provides a standard SMIF device for transporting mask plates on different devices. After the mask plate box body 7 is placed on the support frame 6 and fixed by the fixing mechanism 16, the lifting mechanism 2 is started to drive the support frame 3 to descend, so that the support frame 3 drives the mask plate box body 7 to descend until its bottom contacts the mask plate tray 5, so that the mask plate tray 5 supports the mask plate in the mask plate box body 7, and then the mask plate box body 7 is opened by relying on the opening mechanism 4 equipped on the frame 1. After the opening is completed, the lifting mechanism 2 is started again to drive the support frame 3 to rise to separate the mask plate box body 7 from the mask plate inside it. During the rising process of the support frame 3, the multiple mapping sensors 11 arranged on the support frame 6 identify the number and position of the mask plates during the movement, so as to confirm the transportation of the mask plates.

[0033] In summary, in this embodiment, according to one of the embodiments, by setting the information recognition mechanism 8 at the bottom of the support frame 6, it is possible to rely on multiple mapping sensors 11 to recognize the position, quantity and other information of the mask during the transportation of the mask, thereby improving the accuracy of mask transmission and avoiding the impact of errors in the transportation of the mask on the production and manufacturing of semiconductors. Through the arrangement of the first groove 12, the first spring 13, the clamping rod 14 and the clamping block 15, the mounting block 10 is installed and connected to the fixing seat 9 by utilizing the clamping of the clamping rod 14 and the clamping block 15. Since one end of the clamping rod 14 is connected to the first spring 13, This makes the engagement between the card rod 14 and the card block 15 have a certain degree of mobility, so that the card rod 14 can move in the first groove 12, so that the card rod 14 can be detached from the card block 15. After detachment, the mapping sensor 11 can be removed from the fixing seat 9, which is convenient for replacement when it fails. After the diameter of the card rod 14 is set to match the inner diameter of the card groove on the card block 15, the connection between the card rod 14 and the card block 15 is more stable, avoiding the mapping sensor 11 from shaking and affecting the recognition effect. At the same time, after one end of the card rod 14 is set to an arc shape, it is easier for the card block 15 to squeeze the card rod 14 during the disassembly and assembly process.

[0034] By setting the fixing mechanism 16, the mask box body 7 can be fixed more conveniently and stably to prevent the mask box body 7 from falling from the support frame 6. The two first electric telescopic rods 18 are synchronously started to push the push block 19 to move, so that the two push blocks 19 squeeze the support block 21. After the support block 21 is squeezed, the limit block 22 is pushed outward from the frame 17, so that the limit block 22 is connected to the limit groove 23 on the mask box body 7, so as to fix the mask box body 7. By setting the support column 24, the second groove 25, the second electric telescopic rod 26, the fixing block 27 and the rubber pad 28, the second electric telescopic rod 26 is started to make its output end telescopic so that the support column 24 can be pulled by the second electric telescopic rod 26, so that the position of the support column 24 on the mask tray 5 can be adjusted. After the multiple support columns 24 are adjusted, the spacing between the multiple support columns 24 can be changed to support masks of different specifications. The support frame 33 is supported by the support rod 32 and the support seat ...

[0035] The above are only preferred specific implementation modes of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and inventive concepts of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A standard SMIF device for transporting masks on different devices, comprising a frame (1), a lifting mechanism (2) fixedly mounted on the frame (1), a support frame (3) mounted on the lifting mechanism (2), a box opening mechanism (4) disposed on the frame (1) and inside the support frame (3), a mask tray (5) mounted on the frame (1) disposed on the top of the box opening mechanism (4), a support frame (6) fixedly mounted on the top of the support frame (3), a mask box (7) mounted on the support frame (6), characterized in that: An information recognition mechanism (8) is provided at the bottom of the support frame (6), the information recognition mechanism (8) comprising a plurality of fixing seats (9) symmetrically fixedly mounted on the bottom of the support frame (6), a mounting block (10) being mounted on the fixing seat (9), and a mapping sensor (11) being fixedly mounted on the bottom of the mounting block (10), wherein: Two first grooves (12) are symmetrically formed inside the fixing seat (9), a first spring (13) is fixedly mounted inside the first groove (12), a clamping rod (14) is fixedly mounted on one end of the first spring (13), and a clamping block (15) is fixedly mounted on the top of the mounting block (10); The diameter of the clamping rod (14) matches the inner diameter of the clamping groove on the clamping block (15), and one end of the clamping rod (14) is arranged in an arc shape; A fixing mechanism (16) is arranged on the top of the support frame (6), and the fixing mechanism (16) comprises two frames (17) symmetrically fixedly mounted on the support frame (6); two first electric telescopic rods (18) are symmetrically fixedly mounted inside the frames (17); a push block (19) is fixedly mounted on the output end of the first electric telescopic rod (18); a support block (21) connected by a plurality of second springs (20) is arranged on the inner wall of the support frame (6); one side of the support block (21) is in contact with the push block (19); a limit block (22) penetrating the frame (17) is fixedly mounted on the other side of the support block (21); and limit grooves (23) are provided on both sides of the mask box (7).

2. A standard SMIF device for transporting masks on different devices according to claim 1, characterized in that: A plurality of support columns (24) are arranged on the top of the mask tray (5), a plurality of second grooves (25) are formed on the mask tray (5), a second electric telescopic rod (26) is fixedly mounted inside the second groove (25), and a fixing block (27) connected to the bottom of the support column (24) is fixedly mounted on the output end of the second electric telescopic rod (26).

3. A standard SMIF device for transporting masks on different devices according to claim 2, characterized in that: A rubber pad (28) is fixedly mounted on the top of the support column (24).

4. A standard SMIF device for transporting masks on different devices according to claim 1, characterized in that: A base (29) is fixedly mounted on the bottom of the frame (1), and a plurality of universal wheels (30) are fixedly mounted on the bottom of the base (29).

5. A standard SMIF device for transporting masks on different devices according to claim 4, characterized in that: A fixing frame (31) is fixedly mounted on both sides of the base (29), a support rod (32) is movably mounted on the fixing frame (31), a support seat (33) is fixedly mounted on the bottom of the support rod (32), and a plurality of third springs (34) are mounted between the support seat (33) and the fixing frame (31).

6. A standard SMIF device for transporting masks on different devices according to claim 5, characterized in that: A fixing plate (35) is fixedly mounted on the top of the fixing frame (31), bolts (36) are mounted on the fixing plate (35), and a threaded groove (37) is formed on one side of the support rod (32).

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