Opposite multi-shaft operation equipment

Abstract

The invention discloses an opposite-direction type multi-shaft working device. The opposite-direction type multi-shaft working device comprises a first working mechanism, a second working mechanism and an indicator, wherein the second working mechanism is separated from the first working mechanism, and the indicator is located between the first working mechanism and the second working mechanism. The first operation mechanism comprises a first track and a bearing table installed on the first track. The second operation mechanism comprises a second track and a working part installed on the second track. The indicator comprises a carrier, a first scale and a second scale, wherein the first scale and the second scale are located on the carrier. The bearing table and the working part face the first scale and the second scale respectively so as to obtain respective real-time positions, so that the working part carries out a preset step towards a target object located on the bearing table through a window of the carrier. Therefore, the distance between the first operation mechanism and the second operation mechanism relative to the alignment reference is effectively reduced, the tolerance is reduced, and the requirement for higher precision is met.

Description

Technical Field

[0001] The invention relates to an operating device, in particular to an opposing multi-axis operating device. Background Art

[0002] The multiple working mechanisms included in the existing multi-axis operation equipment need to be aligned during operation to achieve the requirements of operation accuracy. However, in the existing multi-axis operation equipment, the tolerances generated by the alignment methods of the multiple working mechanisms (such as using the fixed parts of one of the working mechanisms as the basis for the alignment of the other working mechanisms) have gradually made it unable to meet the higher operation accuracy requirements.

[0003] Therefore, the inventors believed that the above defects could be improved, and they devoted themselves to research and applied scientific principles, and finally proposed the present invention which has a reasonable design and effectively improves the above defects. Summary of the invention

[0004] An embodiment of the present invention provides an opposing multi-axis operation device, which can effectively improve the defects that may occur in existing multi-axis operation devices.

[0005] The embodiment of the present invention discloses an opposing multi-axis operation device, which comprises: a first operation mechanism, comprising: a first track; and a carrier installed on the first track and used for setting a target object; wherein the carrier is equipped with a first position sensor, and the carrier can move relative to the first track along a first direction; a second operation mechanism, which is arranged with the first operation mechanism in a spacing direction perpendicular to the first direction, and the second operation mechanism comprises: a second track; and a working component installed on the second track and equipped with a second position sensor; wherein the working component can move relative to the second track along a second direction perpendicular to the spacing direction; wherein the second direction is not parallel to the first direction; and an indicator, which is arranged between the first operating mechanism and the second operating mechanism, and the indicator includes: a carrier, which is formed with an operating window, and the working component faces the target object along the spacing direction through the operating window; and a first scale and a second scale, which are located on the carrier, and the first position sensor faces the first scale along the spacing direction, and the second position sensor faces the second scale along the spacing direction; wherein, when the opposing multi-axis operating equipment performs a preset operation, the carrier and the working component can pass through the first position sensor and the second position sensor, and their real-time positions can be confirmed by the first scale and the second scale of the indicator respectively, so that the working component can implement a preset step through the operating window along the spacing direction toward the preset area of ​​the target object.

[0006] Preferably, the first position sensor can move along a first path, and a first projection area formed by orthographically projecting the first path onto the carrier along the spacing direction overlaps with the first scale.

[0007] Preferably, the second position sensor can move along a second path, and a second projection area formed by orthographically projecting the second path onto the carrier along the spacing direction overlaps with the second scale.

[0008] Preferably, the working window has a width corresponding to the first direction and a length corresponding to the second direction, and the length of the working window is not less than the outer diameter of the target object in the second direction.

[0009] Preferably, the width of the working window is smaller than the outer diameter of the target object in the first direction and there is a difference therebetween, and the supporting platform can move a first stroke not less than the difference along the first direction.

[0010] Preferably, the carrier is plate-shaped and has a first plate surface and a second plate surface located on opposite sides thereof, and the operation window is through-shaped, the first scale is located on the first plate surface, and the second scale is located on the second plate surface.

[0011] Preferably, the first scale and the second scale are each a linear encoder, and the first scale is perpendicular to the second scale.

[0012] Preferably, the opposing multi-axis operating equipment further includes a correction mechanism, which is arranged along the second direction with the operating window; wherein, the working component can be used to obtain a chip from a chip supply table located outside the first operating mechanism, and the working component can confirm the position of the obtained chip through the correction mechanism, and then in a preset operation, the chip is passed through the operating window along the spacing direction and set on a preset area of ​​the target object.

[0013] Preferably, the first position sensor is spaced apart from the first scale by a first sensing distance along the spacing direction, and the second position sensor is spaced apart from the second scale by a second sensing distance along the spacing direction; wherein the first sensing distance is 90% to 110% of the second sensing distance.

[0014] Preferably, the support platform can move a first stroke in a first direction, and the first sensing distance is less than 50% of the first stroke; the working component can move a second stroke in a second direction, and the second sensing distance is less than 50% of the second stroke.

[0015] To summarize, the opposing multi-axis operating equipment disclosed in the embodiment of the present invention, by providing the indicator as a fixed part between the first operating mechanism and the second operating mechanism, can effectively reduce the distance between the first operating mechanism and the second operating mechanism relative to the alignment reference (that is, the indicator), thereby reducing the possible tolerance to meet higher operating accuracy requirements.

[0016] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the description and drawings are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of an opposing multi-axis operating device according to an embodiment of the present invention.

[0018] Figure 2 For along Figure 1 Schematic cross-sectional view of section line II-II.

[0019] Figure 3 for Figure 1 Schematic diagram of the decomposition.

[0020] Figure 4 for Figure 1 A schematic diagram of another perspective of the decomposition.

[0021] Figure 5 for Figure 1 Schematic top view of .

[0022] Figure 6 for Figure 1 A three-dimensional cross-sectional schematic diagram of the subsequent actions of.

[0023] Figure 7 for Figure 6 A three-dimensional cross-sectional schematic diagram of the subsequent actions of.

[0024] Figure 8 for Figure 7 A three-dimensional cross-sectional schematic diagram of the subsequent actions of.

[0025] Fig. 9 for Figure 8 A three-dimensional cross-sectional schematic diagram of the subsequent actions of.

[0026] Fig.10 for Fig. 9 A three-dimensional cross-sectional schematic diagram of the subsequent actions of. DETAILED DESCRIPTION

[0027] The following is an explanation of the implementation methods of the "opposed multi-axis operating equipment" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, it should be stated in advance that the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. The following implementation methods will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

[0028] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0029] See also Figures 1 to 10 As shown, it is an embodiment of the present invention. Figures 1 to 5 As shown, this embodiment discloses a facing multi-axis operation device 100, which can be used to perform a preset operation, and the preset operation can be adjusted and changed according to design requirements. For example, the facing multi-axis operation device 100 in the drawings of this embodiment is described by being matched with a chip supply station 200 to perform a die bonding operation, but in other embodiments not shown in the present invention, the facing multi-axis operation device 100 can also be used to perform a die extraction operation or a detection operation according to design requirements.

[0030] like Figures 2 to 4 As shown, the opposing multi-axis operating equipment 100 in this embodiment includes a first operating mechanism 1, a second operating mechanism 2 arranged along a spacing direction Ds and spaced from the first operating mechanism 1, an indicator 3 (spaced) between the first operating mechanism 1 and the second operating mechanism 2, and a correction mechanism 4 arranged corresponding to the indicator 3, but the present invention is not limited thereto.

[0031] For example, in other embodiments not shown in the present invention, the correction mechanism 4 can be omitted or replaced by other components according to design requirements. In addition, the spacing direction Ds is described as a plumb direction in this embodiment, but the present invention is not limited thereto. The following will first introduce the specific structure of each mechanism included in the opposing multi-axis operation device 100 in this embodiment, and then explain the connection relationship between the multiple mechanisms in due course.

[0032] The first operating mechanism 1 includes a first rail 11 and a carrier 12 mounted on the first rail 11. The first rail 11 is, for example, a linear slide rail, which is straight and parallel to a first direction D1 perpendicular to the spacing direction Ds, but is not limited thereto. The carrier 12 is used to place a target object O (such as a chip carrier), and the carrier 12 can move relative to the first rail 11 along the first direction D1.

[0033] In more detail, the carrier 12 in this embodiment includes a bottom plate 121, a top plate 122 spaced from the bottom plate 121 along the spacing direction Ds, a plurality of fine-tuning members 123 clamped and connected between the bottom plate 121 and the top plate 122, and a plurality of first position sensors 124 disposed on the top plate 122, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the structure formed by the bottom plate 121, the top plate 122, and the plurality of fine-tuning members 123 can be adjusted, changed, or omitted according to design requirements, and the number of the plurality of first position sensors 124 can be at least one.

[0034] In this embodiment, the bottom plate 121 is movably disposed on the first track 11 along the first direction D1, and the relative position between the bottom plate 121 and the top plate 122 can be adjusted by a plurality of the fine-tuning members 123. For example, the plurality of the fine-tuning members 123 can have different lengths in the spacing direction Ds, thereby effectively adjusting the horizontality of the top plate 122 relative to the bottom plate 121.

[0035] Furthermore, the top surface of the top plate 122 is used for setting the target object O, and the plurality of first position sensors 124 are configured on the top surface of the top plate 122 and located around the target object O, so as to facilitate the plurality of first position sensors 124 to detect and operate in conjunction with the indicator 3.

[0036] In more detail, the plurality of first position sensors 124 include a plurality of first XY axis sensors 1241 and a plurality of first Z axis sensors 1242. The plurality of first XY axis sensors 1241 may be arranged along a second direction D2 perpendicular to the spacing direction Ds and the first direction D1, and thus respectively located on opposite sides of the target object O. The plurality of first Z axis sensors 1242 are respectively arranged in two rows parallel to the first direction D1 with the plurality of first XY axis sensors 1241, and the plurality of first Z axis sensors 1242 are preferably arranged corresponding to the position configuration of the plurality of fine adjustment members 123, so as to provide the sensing data required for the operation of the plurality of fine adjustment members 123 more accurately.

[0037] It should be additionally explained that, although the second direction D2 is described as being perpendicular to the first direction D1 in this embodiment, the second direction D2 may also be non-parallel to the first direction D1.

[0038] The second operating mechanism 2 includes a second rail 21 and a working component 22 mounted on the second rail 21. The second rail 21 is, for example, a linear slide rail, which is straight and parallel to the second direction D2, but the present invention is not limited thereto. The working component 22 can move relative to the second rail 21 along the second direction D2.

[0039] The working part 22 in this embodiment includes an annular plate 221, an acquisition device 222 movably disposed in the annular plate 221, and a plurality of second position sensors 223 disposed on the annular plate 221, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the number of the plurality of second position sensors 223 can be at least one; or, the acquisition device 222 can be adjusted and changed according to design requirements (e.g., when the opposing multi-axis operation device 100 is used to perform the detection operation, the acquisition device 222 can be replaced by a camera).

[0040] In this embodiment, the annular plate 221 is movably disposed on the second track 21 along the second direction D2, and the annular plate 221 can drive the acquirer 222 to move along the second direction D2, and the acquirer 222 can also move along the spacing direction Ds relative to the annular plate 221. Furthermore, a plurality of second position sensors 223 are disposed on the bottom surface of the annular plate 221 and are located around the acquirer 222.

[0041] In more detail, the plurality of second position sensors 223 include a plurality of second XY axis sensors 2231 and a plurality of second Z axis sensors 2232. The plurality of second XY axis sensors 2231 may be arranged along the first direction D1, and thus respectively located on opposite sides of the acquirer 222. The plurality of second Z axis sensors 2232 are respectively arranged with the plurality of second XY axis sensors 2231 in two rows parallel to the second direction D2, so as to more accurately provide the sensing data required for the operation of the acquirer 222.

[0042] The indicator 3 includes a carrier 33 and a first scale 31 and a second scale 32 located on opposite sides of the carrier 33. It should be noted that the first scale 31 and the second scale 32 can be integrally formed on the carrier 33 to form a single-piece structure (for example, the first scale 31 and the second scale 32 can also be engraved on the surface of the carrier 33); or, the first scale 31 and the second scale 32 can be additionally processed or installed on the carrier 33, and the present invention is not limited here.

[0043] More specifically, the carrier 33 in this embodiment is plate-shaped and has a first plate surface 331 and a second plate surface 332 located on opposite sides thereof, and the carrier 33 is formed with a through-shaped operation window 333, and the first scale 31 is located on the first plate surface 331, and the second scale 32 is located on the second plate surface 332, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, when the opposing multi-axis operation device 100 is used to perform the detection operation, the operation window 333 can be a transparent plate instead of a through-shaped one.

[0044] In this embodiment, the first scale 31 and the second scale 32 are two linear encoders 311 and 321, such as an optical ruler. The two linear encoders 311 of the first scale 31 are parallel to the first direction D1 and are arranged on opposite sides of the operation window 333 along the second direction D2. Furthermore, the two linear encoders 321 of the second scale 32 are parallel to the second direction D2 and are arranged on opposite sides of the operation window 333 along the first direction D1.

[0045] In more detail, each of the first position sensors 124 faces the first scale 31 along the spacing direction Ds, and each of the first position sensors 124 is separated from the first scale 31 by a first sensing distance S1 along the spacing direction Ds. In other words, when the carrier 12 moves relative to the first track 11 along the first direction D1 so that each of the first position sensors 124 moves along a first path, a first projection area formed by the positive projection of the first path along the spacing direction Ds onto the carrier 33 overlaps with the first scale 31.

[0046] Furthermore, each of the second position sensors 223 faces the second scale 32 along the spacing direction Ds, and the second position sensor 223 and the second scale 32 are separated by a second sensing distance S2 along the spacing direction Ds. The first sensing distance S1 is preferably 90% to 110% of the second sensing distance S2. In other words, when the working member 22 moves relative to the second track 21 along the second direction D2, so that each of the second position sensors 223 moves along a second path, and a second projection area formed by the positive projection of the second path on the carrier 33 along the spacing direction Ds overlaps with the second scale 32.

[0047] In addition, the working part 22 of the second working mechanism 2 faces the target object O disposed on the first working mechanism 1 along the spacing direction Ds through the working window 333 of the indicator 3. In order to facilitate the facing multi-axis working device 100 to perform the preset operation relative to the target object O, the working window 333 preferably meets at least some of the following conditions.

[0048] The operation window 333 has a width W333 corresponding to the first direction D1 and a length L333 corresponding to the second direction D2. The length L333 of the operation window 333 is not less than the outer diameter R2 of the target object O in the second direction D2, and the width W333 of the operation window 333 is less than the outer diameter R1 of the target object O in the first direction D1 and there is a difference therebetween.

[0049] Furthermore, the supporting platform 12 can move a first stroke not less than the difference along the first direction D1, and the working component 22 can move a second stroke along the second direction D2, so as to facilitate the movement of the supporting platform 12 and the working component 22 in combination with the specific size configuration of the working window 333, so that the working component 22 can perform the preset operation corresponding to any area of ​​the target object O.

[0050] It should be additionally explained that, in order to enable the opposing multi-axis operating device 100 to have higher operating accuracy, the first sensing distance S1 is preferably less than 50% of the first stroke, and the second sensing distance S2 is preferably less than 50% of the second stroke, but the present invention is not limited thereto.

[0051] As described above, when the opposed multi-axis operation device 100 performs the preset operation (such as the die bonding operation, the die extraction operation or the detection operation), the carrier 12 and the working component 22 can confirm their real-time positions through the first position sensor 124 and the second position sensor 223, respectively, by the first scale 31 and the second scale 32 of the indicator 3, so that the working component 22 can implement a preset step (such as: Figure 7 and Figure 8 ).

[0052] Accordingly, in the present embodiment, the opposing multi-axis operating equipment 100 has the indicator 3 as a fixed part disposed between the first operating mechanism 1 and the second operating mechanism 2, so as to effectively reduce the distance between the first operating mechanism 1 and the second operating mechanism 2 relative to the alignment reference (that is, the indicator 3), thereby reducing the possible tolerance to meet higher operating accuracy requirements.

[0053] Furthermore, when the preset operation is the die bonding operation, the opposing multi-axis operation device 100 preferably further uses the calibration mechanism 4 to cooperate with the working component 22 to adjust or confirm the relative position between the acquirer 222 and the acquired chip 201 (e.g.: Figure 6 ).

[0054] like Figures 2 to 4 As shown, the calibration mechanism 4 in this embodiment is arranged along the second direction D2 with the operation window 333 and is located between the two linear encoders 321 of the second scale 32. The carrier 33 has a detection window 334 formed on one side of the operation window 333, and the calibration mechanism 4 is installed on the detection window 334.

[0055] Accordingly, the working component 22 can be used to obtain a chip 201 from the chip supply station 200 located outside the first operating mechanism 1 (eg: Figure 5 ), and the working part 22 can confirm the position of the chip 201 obtained by the calibration mechanism 4 (such as: Figure 6 ), and then in the preset operation, the chip 201 is placed on the preset area of ​​the target object O along the spacing direction Ds through the operation window 333 (eg: Figure 7 and Figure 8 ).

[0056] In addition, if Fig. 9 and Fig.10As shown, the opposing multi-axis operation device 100 can then perform another preset operation; that is, the working component 22 can be used to obtain another chip 201 from the chip supply table 200, and the working component 22 can confirm the position of the other chip 201 it has obtained through the correction mechanism 4, and then pass the chip 201 through the operation window 333 and set it on another preset area of ​​the target object O.

[0057] [Technical Effects of Embodiments of the Invention]

[0058] To summarize, the opposing multi-axis operating equipment disclosed in the embodiment of the present invention, by providing the indicator as a fixed part between the first operating mechanism and the second operating mechanism, can effectively reduce the distance between the first operating mechanism and the second operating mechanism relative to the alignment reference (that is, the indicator), thereby reducing the possible tolerance to meet higher operating accuracy requirements.

[0059] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. An opposing multi-axis operation device, characterized in that: The opposed multi-axis operation equipment comprises: A first operating mechanism, comprising: a first track; and A carrier, mounted on the first track and used to place a target object; wherein the carrier is equipped with a first position sensor, and the carrier can move relative to the first track along a first direction; a second operating mechanism, arranged spaced apart from the first operating mechanism along a spacing direction perpendicular to the first direction, and the second operating mechanism comprises: a second track; and a working component mounted on the second track and provided with a second position sensor; wherein the working component can move relative to the second track along a second direction perpendicular to the spacing direction; wherein the second direction is not parallel to the first direction; and an indicator, disposed between the first operating mechanism and the second operating mechanism, and the indicator comprises: a carrier, formed with an operation window, and the working component faces the target object along the spacing direction through the operation window; and A first scale and a second scale are located on the carrier, and the first position sensor faces the first scale along the spacing direction, and the second position sensor faces the second scale along the spacing direction; Among them, when the opposing multi-axis operating equipment performs a preset operation, the support platform and the working component can confirm the real-time positions of the support platform and the working component respectively by the first scale and the second scale of the indicator through the first position sensor and the second position sensor, so that the working component can implement a preset step through the operating window along the spacing direction toward the preset area of ​​the target object.

2. The opposing multi-axis operation equipment according to claim 1, characterized in that: The first position sensor can move along a first path, and a first projection area formed by orthographically projecting the first path onto the carrier along the spacing direction overlaps with the first scale.

3. The opposed multi-axis operation equipment according to claim 2, characterized in that: The second position sensor can move along a second path, and a second projection area formed by orthographically projecting the second path onto the carrier along the spacing direction overlaps with the second scale.

4. The opposed multi-axis operation equipment according to claim 1, characterized in that: The operation window has a width corresponding to the first direction and a length corresponding to the second direction, and the length of the operation window is not less than an outer diameter of the target object in the second direction.

5. The opposed multi-axis operation equipment according to claim 4, characterized in that: The width of the operating window is smaller than the outer diameter of the target object in the first direction and there is a difference between the width of the operating window and the outer diameter of the target object in the first direction, and the support platform can move a first stroke not less than the difference along the first direction.

6. The opposing multi-axis operation equipment according to claim 1, characterized in that: The carrier is plate-shaped and has a first plate surface and a second plate surface respectively located on opposite sides thereof, and the operation window is through-shaped, the first scale is located on the first plate surface, and the second scale is located on the second plate surface.

7. The opposed multi-axis working equipment according to claim 6, characterized in that: The first scale and the second scale are respectively a linear encoder, and the first scale is perpendicular to the second scale.

8. The opposed multi-axis operation equipment according to claim 6, characterized in that: The opposing multi-axis operation equipment further includes a correction mechanism, which is arranged along the second direction with the operation window; wherein the working component can be used to obtain a chip from a chip supply station located outside the first operation mechanism, and the working component can confirm the position of the chip obtained by the working component through the correction mechanism, and then in the preset operation, the chip is passed through the operation window along the spacing direction and is set on the preset area of ​​the target object.

9. The opposing multi-axis operation equipment according to claim 1, characterized in that: The first position sensor is spaced apart from the first scale by a first sensing distance along the spacing direction, and the second position sensor is spaced apart from the second scale by a second sensing distance along the spacing direction; wherein the first sensing distance is 90% to 110% of the second sensing distance.

10. The opposing multi-axis operation equipment according to claim 9, characterized in that: The support platform can move a first stroke along the first direction, and the first sensing distance is less than 50% of the first stroke; the working component can move a second stroke along the second direction, and the second sensing distance is less than 50% of the second stroke.

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