Auxiliary device for realizing precise preassembling of matched pipeline of semiconductor equipment

Abstract

The invention discloses an auxiliary device for achieving precise preassembling of a matched pipeline of semiconductor equipment, the auxiliary device comprises an XYZ three-axis fine tuning platform, a pipeline positioning piece and a laser positioning piece, the XYZ three-axis fine tuning platform comprises a workbench and a base, the pipeline positioning piece is fixedly connected with the workbench of the XYZ three-axis fine tuning platform, and the laser positioning piece is fixedly connected with the workbench of the XYZ three-axis fine tuning platform. The laser positioning piece comprises a laser pen and a laser pen fixing base, and the laser pen fixing base is fixedly installed on the pipeline positioning piece. By the adoption of the auxiliary device, accurate preassembling of the matched pipeline of the semiconductor equipment can be easily achieved, operation is easy, implementation is easy, and the auxiliary device has important significance and remarkable practical value for improving the installation efficiency of the semiconductor equipment and shortening the operation period of the semiconductor equipment.

Description

Technical Field

[0001] The present invention relates to an auxiliary device for realizing accurate pre-installation of supporting pipelines of semiconductor equipment, and belongs to the technical field of precision installation. Background Art

[0002] With the rapid development of technologies such as artificial intelligence, the Internet of Things, and 5G, the demand for semiconductors is also growing rapidly. With the strong support of the country for the semiconductor industry, the industry has flourished. Semiconductor equipment is equipment that processes pure silicon wafers (wafers) into electronic devices. It is mainly used to produce integrated circuits and has a wide range of applications.

[0003] Due to the normal operation of semiconductor equipment, it is necessary to install many pipelines such as process pipelines, gas source pipelines, water source pipelines, vacuum pipelines, exhaust pipelines, etc., and the current installation procedure of semiconductor equipment requires the precise positioning and installation of supporting pipelines after the semiconductor equipment arrives on site, which not only makes the installation efficiency of semiconductor equipment very low, but also affects the operation period of semiconductor equipment. If the supporting pipelines can be pre-installed in advance before the arrival of the semiconductor equipment, after the arrival of the semiconductor equipment, it is only necessary to dock the pipelines with the semiconductor equipment. In theory, it will greatly improve the installation efficiency of semiconductor equipment and significantly shorten the operation period of semiconductor equipment, because the installation of pipelines and the transportation of semiconductor equipment can be carried out simultaneously. However, if the pre-installed position of the pipeline is not accurate, it will not only affect the installation efficiency of the semiconductor equipment, but also may lead to the risk of rework that cannot be connected to the semiconductor equipment. Therefore, this field urgently needs to solve the problem of how to achieve accurate pre-installation of supporting pipelines before the arrival of semiconductor equipment. Summary of the invention

[0004] In view of the above problems and needs in the prior art, an object of the present invention is to provide an auxiliary device for realizing accurate pre-installation of supporting pipelines of semiconductor equipment.

[0005] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:

[0006] An auxiliary device for realizing accurate pre-installation of supporting pipelines of semiconductor equipment comprises an XYZ three-axis fine-tuning platform, a pipeline positioning piece and a laser positioning piece, wherein the XYZ three-axis fine-tuning platform comprises a workbench and a base, the pipeline positioning piece is fixedly connected to the workbench of the XYZ three-axis fine-tuning platform, and the laser positioning piece comprises a laser pen and a laser pen fixing seat, and the laser pen fixing seat is fixedly mounted on the pipeline positioning piece.

[0007] In one embodiment, the auxiliary device also includes a fixed base plate, and the XYZ three-axis fine-tuning platform is fixedly installed on the fixed base plate.

[0008] In one embodiment, the fixing base plate is symmetrically provided with a plurality of bolt holes for fixing the fixing base plate to the installation ground, floor or tower.

[0009] In one embodiment, the pipeline positioning member is provided with a plurality of pipeline penetration holes and / or air pipe joints.

[0010] In one embodiment, the pipeline positioning member is at least one of a metal plate, a metal frame, and a metal seat.

[0011] In one embodiment, the auxiliary device includes at least two laser positioning components.

[0012] In one implementation scheme, the laser pen fixing seat includes a fixing part and a laser pen mounting part, the side surface of the fixing part is in an inverted L shape, the top surface of the fixing part is in a U shape, the laser pen mounting part is embedded in the U-shaped opening and fixedly connected to the side arms of the two U-shaped openings, and a laser pen oblique insertion hole is provided on the laser pen mounting part, and a locking screw hole is provided on the front end surface of the laser pen mounting part.

[0013] In one implementation manner, the laser pen mounting piece is fixedly connected to the side arms of the two U-shaped openings by means of screws.

[0014] In one implementation scheme, front screw fixing holes A are symmetrically provided on both sides near the front end of the laser pen mounting piece, rear screw fixing holes A are symmetrically provided on both sides near the rear end of the laser pen mounting piece, and front screw fixing holes B and rear screw fixing holes B are correspondingly provided on the side arms of the two U-shaped openings.

[0015] In a preferred embodiment, a plurality of rear screw fixing holes A arranged in a longitudinal arc shape are symmetrically provided on both sides near the rear end of the laser pen mounting member.

[0016] In one implementation manner, the front end surface of the laser pen mounting piece is composed of an upper rectangular surface inclined downward, a lower rectangular surface inclined upward, and an intermediate rectangular surface connected between the upper rectangular surface and the lower rectangular surface.

[0017] In a further implementation scheme, the locking screw hole is arranged on the upper rectangular surface, and the laser pen oblique insertion hole is formed by passing the top surface of the laser pen mounting part through the lower rectangular surface.

[0018] In one embodiment, the two sides of the fixing member are symmetrically provided with a plurality of side screw fixing holes arranged in a longitudinal straight line, and the back of the fixing member is provided with a plurality of front screw fixing holes arranged in a longitudinal or / and transverse straight line.

[0019] Compared with the prior art, the beneficial technical effects of the present invention are:

[0020] By adopting the auxiliary device described in the present invention, it is not only easy to achieve accurate pre-installation of the supporting pipelines of the semiconductor equipment, but also simple to operate and easy to implement, which is of great significance and significant practical value for improving the installation efficiency of semiconductor equipment and shortening the operation period of semiconductor equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a three-dimensional structural schematic diagram of an auxiliary device for realizing accurate pre-installation of supporting pipelines of semiconductor equipment provided by an embodiment;

[0022] Figure 2 yes Figure 1 The three-dimensional structural schematic diagram of the auxiliary device shown in another viewing angle;

[0023] Figure 3 It is a manifestation Figure 1 A front structural schematic diagram of two laser positioning parts in different installation modes in the auxiliary device shown;

[0024] Figure 4 It is a manifestation Figure 1 A schematic diagram of the back structure of two laser positioning parts in different installation methods in the auxiliary device shown;

[0025] Figure 5 is a schematic diagram of the three-dimensional structure of the laser positioning component described in the embodiment;

[0026] Figure 6 yes Figure 5 The three-dimensional structural schematic diagram of the laser positioning component shown in another viewing angle;

[0027] Figure 7 yes Figure 5 A side view of the laser positioning member shown;

[0028] Figure 8 is a schematic diagram of the three-dimensional structure of the fixing member described in the embodiment;

[0029] Fig. 9 yes Figure 8 A schematic diagram of the three-dimensional structure of the fixing member shown in another viewing angle;

[0030] Fig.10 yes Figure 8 a side view of the fixing member shown;

[0031] Fig.11 yes Figure 8 a top view of the fixing member shown;

[0032] Fig.12 is a schematic diagram of the three-dimensional structure of the laser pen mounting member described in the embodiment;

[0033] Fig.13 yes Fig.12 The three-dimensional structure schematic diagram of the laser pointer mounting part shown in another viewing angle;

[0034] Fig.14 This is a state diagram of the laser positioning component when the laser pen is installed tilted backward;

[0035] Fig.15 This is a state diagram of the laser positioning component when the laser pen is installed leaning forward;

[0036] The numbers in the figure are as follows:

[0037] 1. XYZ three-axis fine-tuning platform; 1-1. Workbench; 1-2. Base; 2. Pipe positioning piece; 2-1. Pipe perforation; 2-2. Air pipe joint; 3. Laser positioning piece; 3-1. Laser pen; 3-2. Laser pen fixing seat; 3-21. Fixing piece; 3-211. Side arm with U-shaped opening; 3-212. Front screw fixing hole B; 3-213. Rear screw fixing hole B; 3-214. Side screw fixing Fixing hole; 3-215, positive screw fixing hole; 3-22, laser pen mounting piece; 3-221, laser pen oblique insertion hole; 3-222, locking screw hole; 3-223, front screw fixing hole A; 3-224, rear screw fixing hole A; 3-225, upper rectangular surface; 3-226, lower rectangular surface; 3-227, middle rectangular surface; 4, fixing base plate; 4-1, bolt hole; 5, locking screw; 6, screw. DETAILED DESCRIPTION

[0038] The technical solution of the present invention will be further clearly and completely described below in conjunction with the accompanying drawings and embodiments. In addition, it should be noted that the terms used in the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. Unless otherwise defined, the technical terms or scientific terms used in the present invention should be the usual meanings understood by people with ordinary skills in the field. The orientations or positional relationships indicated by the terms "inside", "outside", "upper", "lower", "front", "back", etc. are all based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0039] Example 1

[0040] Please combine Figure 1 and Figure 2As shown: The present invention provides an auxiliary device for realizing precise pre-installation of supporting pipelines of semiconductor equipment, comprising an XYZ three-axis fine-tuning platform 1, a pipeline positioning component 2 and a laser positioning component 3. The XYZ three-axis fine-tuning platform 1 comprises a workbench 1-1 and a base 1-2. The pipeline positioning component 2 is fixedly connected to the workbench 1-1 of the XYZ three-axis fine-tuning platform 1. The laser positioning component 3 comprises a laser pen 3-1 and a laser pen fixing seat 3-2. The laser pen fixing seat 3-2 is fixedly installed on the pipeline positioning component 2.

[0041] In this embodiment, the auxiliary device also includes a fixed base plate 4, and the XYZ three-axis fine-tuning platform 1 is fixedly installed on the fixed base plate 4. The fixed base plate 4 is symmetrically provided with multiple bolt holes 4-1 for fixed connection with the installation ground or floor or tower.

[0042] It should be noted here that the XYZ three-axis fine-tuning platform 1 described in the present invention is a commercially available product, which can be a manual fine-tuning platform, an automatic fine-tuning platform, or a three-axis fine-tuning platform with a lifting function, so it is simplified in the accompanying drawings. The XYZ three-axis fine-tuning platform 1 is used to adjust the position of the pipe positioning member 2 fixed on the workbench 1-1 of the XYZ three-axis fine-tuning platform 1 in the three-axis direction. The operation can be performed by referring to the manual of the purchased product. It is a known technology, so it will not be repeated here.

[0043] In addition, in this embodiment, the pipe positioning member 2 is provided with a plurality of pipe penetrations 2-1 and / or air pipe joints 2-2; the pipe positioning member 2 is at least one of a metal plate, a metal frame, and a metal seat, and the shape of the pipe positioning member 2 is designed accordingly according to the pipeline layout drawing to be installed, and the number and direction of the pipe penetrations 2-1 and the air pipe joints 2-2 are designed accordingly according to the construction drawings.

[0044] In addition, the auxiliary device includes at least two laser positioning members 3, two of which are shown in this embodiment, see Figures 1 to 4 As shown, one of the laser positioning parts 3 is installed forwardly, and the other laser positioning part 3 is installed laterally. Through the cooperation of the laser positioning parts 3 in two different directions and the XYZ three-axis fine-tuning platform 1, not only the precise positioning of the installation position can be achieved, but also the rapidity and convenience of adjustment can be guaranteed.

[0045] Please combine again Figures 5 to 13As shown, in this embodiment, the laser pen fixing seat 3-2 includes a fixing member 3-21 and a laser pen mounting member 3-22, the side surface of the fixing member 3-21 is in an inverted L-shape, and the top surface of the fixing member 3-21 is in a U-shape; the laser pen mounting member 3-22 is embedded in the U-shaped opening and fixedly connected to the side arms 3-211 of the two U-shaped openings; and, a laser pen oblique insertion hole 3-221 is provided on the laser pen mounting member 3-22, and a locking screw hole 3-222 is provided on the front end surface of the laser pen mounting member 3-22, the laser pen 3-1 is inserted into the laser pen oblique insertion hole 3-221, and the laser pen 3-1 is locked and fixed by inserting the locking screw 5 into the locking screw hole 3-222.

[0046] As a preferred solution, the laser pen mounting component 3-22 is fixedly connected to the side arms 3-211 of the two U-shaped openings by screws 6. The specific implementation of this embodiment is as follows: front screw fixing holes A 3-223 are symmetrically provided on both sides near the front end of the laser pen mounting component 3-22, and rear screw fixing holes A 3-224 are symmetrically provided on both sides near the rear end of the laser pen mounting component 3-22. Front screw fixing holes B 3-212 and rear screw fixing holes B 3-213 are correspondingly provided on the side arms 3-211 of the two U-shaped openings. By simultaneously inserting one screw 6 into the front screw fixing hole B 3-212 and the front screw fixing hole A 3-223, and simultaneously inserting another screw 6 into the rear screw fixing hole B 3-213 and the rear screw fixing hole A 3-224, the laser pen mounting component 3-22 can be detachably fixedly connected to the side arms 3-211 of the two U-shaped openings.

[0047] In addition, in this embodiment, the two sides of the fixing member 3-21 are symmetrically provided with a plurality of side screw fixing holes 3-214 arranged in a longitudinal straight line, and the back of the fixing member 3-21 is provided with a plurality of front screw fixing holes 3-215 arranged in a longitudinal or / and transverse straight line. The side screw fixing holes 3-214 can realize the lateral installation of the laser positioning member 3, and the front screw fixing holes 3-215 can realize the front installation of the laser positioning member 3 (see Figure 3 and Figure 4 as shown).

[0048] Please see again Fig.12 and Fig.13 As shown, in this embodiment, the front end face of the laser pen mounting component 3-22 is composed of a downwardly inclined upper rectangular surface 3-225, an upwardly inclined lower rectangular surface 3-226, and an intermediate rectangular surface 3-227 connected between the upper rectangular surface 3-225 and the lower rectangular surface 3-226, the locking screw hole 3-222 is provided on the upper rectangular surface 3-225, and the laser pen oblique insertion hole 3-221 is formed by the top surface of the laser pen mounting component 3-22 passing through the lower rectangular surface 3-226.

[0049] As a preferred solution, a plurality of rear screw fixing holes A 3-224 arranged in a longitudinal arc are symmetrically provided on both sides near the rear end of the laser pen mounting member 3-22. Three are shown in the figure, but the number is not limited to three. There may be two or more than three. By providing a plurality of rear screw fixing holes A 3-224 arranged in a longitudinal arc, the installation angle of the laser pen 3-1 can be adjusted to avoid the inappropriate installation position of the laser pen 3-1, which affects the inability to find a suitable positioning point at the installation site. Moreover, the more the number of rear screw fixing holes A 3-224 is, the more precise the angle adjustment can be. In this embodiment, by providing the rear screw fixing holes A 3-224 in three positions, three installation angles of the laser pen 3-1 can be achieved. Specifically, when the rear portion of the laser pen mounting member 3-22 is fixedly connected to the side arms 3-211 of the two U-shaped openings through the rear screw fixing holes A 3-224 located at the top, the laser pen 3-1 will be installed on the laser pen mounting member 3-22 at a backward angle (see Fig.14 As shown in the figure, this installation angle allows the laser pen 3-1 to be emitted at a longer distance to find a suitable positioning point; when the rear portion of the laser pen mounting member 3-22 is fixedly connected to the side arms 3-211 of the two U-shaped openings through the rear screw fixing hole A 3-224 located at the bottom, the laser pen 3-1 will be installed on the laser pen mounting member 3-22 at a forward-leaning angle (see Fig.15 As shown in FIG. 1 , this installation angle allows the laser pen 3-1 to emit closer to find a suitable positioning point. Through this design, the present invention can make the laser positioning member 3 more flexible to use and more versatile, and can be applied to various complex installation site environments.

[0050] The method for realizing accurate pre-installation of supporting pipelines of semiconductor equipment by using the auxiliary device of the present invention is as follows:

[0051] Please combine Figure 1 and Figure 2As shown, according to the installation manual of the purchased semiconductor equipment, a pipe positioning member 2 that is compatible with the piping requirements of the semiconductor equipment is designed and manufactured; first, the fixed base plate 4 is fixed to the ground, floor or tower on the site where the pipes need to be pre-installed, and the bottom of the XYZ three-axis fine-tuning platform 1 is fixed to the fixed base plate 4, and the manufactured pipe positioning member 2 is fixed to the workbench 1-1 of the XYZ three-axis fine-tuning platform 1; then, the three-axis directions are fine-tuned by the XYZ three-axis fine-tuning platform 1, and precise positioning is performed by the laser positioning member 3 fixed on the pipe positioning member 2; when the pipe perforation 2-1 and / or the air pipe joint 2-2 on the pipe positioning member 2 are in the required installation position, the position of the XYZ three-axis fine-tuning platform 1 is locked, and then the corresponding pipe is laid and installed. When the pipe is laid and installed, the auxiliary device described in the present invention can be removed; when the purchased semiconductor equipment arrives at the installation site, it is only necessary to connect the pre-installed pipes to the corresponding pipe joints on the installed semiconductor equipment after the semiconductor equipment itself is installed.

[0052] From the above, it can be seen that by adopting the auxiliary device described in the present invention, it is not only easy to achieve accurate pre-installation of the supporting pipelines of the semiconductor equipment, but also simple to operate and easy to implement, which is of great significance and significant practical value for improving the installation efficiency of semiconductor equipment and shortening the operation period of semiconductor equipment.

[0053] Finally, it is necessary to point out here that the above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. An auxiliary device for realizing accurate pre-installation of supporting pipelines of semiconductor equipment, characterized in that: It includes an XYZ three-axis fine-tuning platform, a pipeline positioning piece and a laser positioning piece. The XYZ three-axis fine-tuning platform includes a workbench and a base. The pipeline positioning piece is fixedly connected to the workbench of the XYZ three-axis fine-tuning platform. The laser positioning piece includes a laser pen and a laser pen fixing seat. The laser pen fixing seat is fixedly installed on the pipeline positioning piece.

2. The auxiliary device according to claim 1, characterized in that: The auxiliary device also includes a fixed base plate, on which the XYZ three-axis fine-tuning platform is fixedly mounted, and the fixed base plate is symmetrically provided with a plurality of bolt holes for fixedly connecting with the installation ground or floor or tower.

3. The auxiliary device according to claim 1, characterized in that: The pipeline positioning piece is provided with a plurality of pipeline penetration holes and / or air pipe joints.

4. The auxiliary device according to claim 1, characterized in that: The auxiliary device comprises at least two laser positioning components.

5. The auxiliary device according to claim 1, characterized in that: The laser pen fixing seat comprises a fixing part and a laser pen mounting part, the side surface of the fixing part is in an inverted L shape, the top surface of the fixing part is in a U shape, the laser pen mounting part is embedded in the U-shaped opening and fixedly connected to the side arms of the two U-shaped openings, and the laser pen mounting part is provided with a laser pen oblique insertion hole, and a locking screw hole is provided on the front end surface of the laser pen mounting part.

6. The auxiliary device according to claim 5, characterized in that: The laser pen mounting piece is fixedly connected to the side arms of the two U-shaped openings by means of screws.

7. The auxiliary device according to claim 6, characterized in that: Front screw fixing holes A are symmetrically arranged on both sides near the front end of the laser pen mounting piece, and rear screw fixing holes A are symmetrically arranged on both sides near the rear end of the laser pen mounting piece. Front screw fixing holes B and rear screw fixing holes B are correspondingly arranged on the side arms of the two U-shaped openings.

8. The auxiliary device according to claim 7, characterized in that: A plurality of rear screw fixing holes A arranged in a longitudinal arc shape are symmetrically arranged on both sides near the rear end of the laser pen mounting piece.

9. The auxiliary device according to claim 5, characterized in that: The front end surface of the laser pen mounting piece is composed of an upper rectangular surface inclined downward, a lower rectangular surface inclined upward, and an intermediate rectangular surface connected between the upper rectangular surface and the lower rectangular surface. The locking screw hole is arranged on the upper rectangular surface, and the laser pen oblique insertion hole is formed by the top surface of the laser pen mounting piece passing through the lower rectangular surface.

10. The auxiliary device according to claim 5, characterized in that: The two sides of the fixing piece are symmetrically provided with a plurality of side screw fixing holes arranged in a longitudinal straight line, and the back of the fixing piece is provided with a plurality of front screw fixing holes arranged in a longitudinal or / and transverse straight line.

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