Magnetron sputtering coating equipment convenient to cool

Abstract

The invention discloses magnetron sputtering coating equipment convenient to cool. The magnetron sputtering coating equipment convenient to cool comprises a machine box, a vacuum coating chamber is formed in the machine box, the top of the machine box is fixedly connected with a gas conveying pipe, a waterproof box is installed at the top end of the interior of the vacuum coating chamber, the bottom end of the interior of the waterproof box is fixedly connected with a target material, and the front end of the waterproof box is fixedly connected with a lower water outlet. The rear end of the waterproof box is fixedly connected with an upper water inlet, a heat exchanger is fixedly installed at the top of the machine box, an electric rotating disc is installed at the bottom end in the vacuum coating chamber, a rotating cylinder is installed on the surface of the electric rotating disc, the side end in the rotating cylinder is rotationally connected with a motor shaft, and the top end of the motor shaft is fixedly connected with an adjusting base. According to the device, the interior of the device can be cooled, the working environment of the device is maintained, multiple sets of adjusting and limiting devices are arranged in the device, the angle of a base material can be rapidly adjusted in multiple directions, and the base material can be evenly coated.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetron sputtering, and in particular relates to a magnetron sputtering coating device which is convenient for cooling. Background Art

[0002] Magnetron sputtering coating equipment is a kind of equipment commonly used for thin film deposition, which is widely used in electronics, optics, solar energy, sensors and other fields. Magnetron sputtering technology uses high-energy particles to bombard the target material, sputtering the target atoms onto the surface of the substrate to form a thin film.

[0003] The magnetron sputtering coating equipment currently on the market can apply an electric field to the target material under high voltage. The electric field accelerates argon atoms to generate plasma. The ions in the plasma will continuously hit the surface of the target material, sputtering the target atoms or molecules, and the sputtered atoms or molecules will fly to the surface of the substrate and accumulate on its surface to form a thin film.

[0004] However, when this type of magnetron sputtering coating equipment is coating, the target material and other equipment components may generate high heat. When the equipment is overheated, it may affect the coating of the substrate. It is difficult to quickly adjust the coating angle of the substrate in multiple directions during coating, resulting in poor final coating effect. Summary of the invention

[0005] The purpose of the present invention is to provide a magnetron sputtering coating device that is easy to cool down in order to solve the problems that the target material and other equipment components may generate high heat during coating in the above-mentioned magnetron sputtering coating equipment, which may affect the coating of the substrate when the equipment is overheated, and it is difficult to quickly adjust the coating angle of the substrate in multiple directions during coating, resulting in a poor final coating effect.

[0006] The technical solution adopted by the present invention is as follows: a magnetron sputtering coating device that is easy to cool down, comprising a chassis, a vacuum coating chamber is opened inside the chassis, an air supply pipe is fixedly connected to the top of the chassis, a waterproof box is installed at the top of the vacuum coating chamber, a target material is fixedly connected to the bottom of the waterproof box, a lower water outlet is fixedly connected to the front end of the waterproof box, an upper water inlet is fixedly connected to the rear end of the waterproof box, a heat exchanger is fixedly installed on the top of the chassis, an electric turntable is installed at the bottom of the vacuum coating chamber, a rotating drum is installed on the surface of the electric turntable, a motor shaft is rotatably connected to the side end of the rotating drum, an adjusting seat is fixedly connected to the top of the motor shaft, a slide groove is opened inside the adjusting seat, a screw rod is rotatably connected to the slide groove, a slide seat is threadedly connected to the surface of the screw rod, an electric telescopic rod is fixedly connected to the top of the slide seat, and a plurality of baffles are installed on the side end of the adjusting seat.

[0007] In a preferred embodiment, the top end of the lower water outlet is fixedly connected to a water outlet pipe, the top end of the water outlet pipe is fixedly connected to a heat exchanger, the rear end of the heat exchanger is fixedly connected to a water inlet pipe, the lower end of the water inlet pipe is fixedly connected to an upper water inlet, the front end of the heat exchanger is fixedly connected to a hot water pipe, and the rear end of the heat exchanger is fixedly connected to a water inlet pipe.

[0008] In a preferred embodiment, a waterproof barrier is installed inside the waterproof box and at the side end of the target material, and a strong magnet array is installed on the surface of the target material.

[0009] In a preferred embodiment, an upper wiring seat is fixedly connected to the surface of the target material, and a process power supply is fixedly installed on the top of the upper wiring seat and located on the top of the chassis.

[0010] In a preferred embodiment, the side end of the adjustment seat is rotatably connected to an adjustment knob, and the top end of the adjustment knob is fixedly connected to a screw rod.

[0011] In a preferred embodiment, a first clamp is slidably connected to the surface of the adjustment seat, an anti-slip pad is installed inside the first clamp, and a second clamp is slidably connected to the surface of the adjustment seat and located at the side end of the first clamp.

[0012] In a preferred embodiment, a power supply socket is fixedly installed at the inner bottom end of the rotating drum, a conductive wire is fixedly connected to the top of the power supply socket, a substrate is installed inside the first clamp, and a conductive wire is installed at the lower end of the substrate.

[0013] In a preferred embodiment, a motor is fixedly mounted on the outer end of the motor shaft, a hinge is mounted on the side end of the rotating drum, a partition door is rotatably connected to the side end of the rotating drum via the hinge, and a lock is mounted on the side end of the rotating drum.

[0014] In a preferred embodiment, a plug hole is provided on the top of the rotating drum, a socket is installed on the top of the rotating drum through the plug hole, and a hopper is fixedly connected to the top of the socket.

[0015] In a preferred embodiment, an argon gas delivery platform is fixedly mounted on the side end of the chassis, a gas delivery pipe is fixedly connected to the top of the argon gas delivery platform, a console is fixedly mounted on the side end of the chassis, and a door is mounted on the front end of the chassis.

[0016] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0017] 1. In the present invention, circulating water and heat exchange devices can be used to cool the internal target material. A waterproof structure is added around the target material to prevent water from flowing out from the lower end of the waterproof box and dripping onto the surface of the substrate. A circulating cooling device is used to keep the target material temperature stable, prevent the equipment from overheating, and save water resources.

[0018] 2. In the present invention, four clamping devices are installed inside the rotating drum, and multiple sets of clamping devices can be used to adjust the angle and position of the substrate, and substrates of different sizes can be coated. The distance between the first clamp and the second clamp at both ends can be adjusted by adjusting the rotation of the screw rod in the adjustment seat, and the clamping width can be adjusted. The length of the clamping device can be adjusted by the electric telescopic rod. Improve the applicability of the device.

[0019] 3. In the present invention, during coating, the motor can be started to drive the motor shaft to rotate, thereby driving the substrate to rotate, adjusting the vertical angle of the base groove, starting the electric turntable to drive the drum to rotate, and adjusting the horizontal angle of the substrate, so that the surface of the substrate can be evenly coated. During coating, the clamping device can be protected by adjusting the multiple baffles on the side end of the seat. Opening the partition door can facilitate the installation and removal of the internal coating substrate, and the partition door can be fixed by the lock buckle, and the substrate is enclosed in the drum to improve the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the overall structure of a magnetron sputtering coating device that is easy to cool down according to the present invention;

[0021] Figure 2 It is a schematic diagram of the target material and part of its adjacent structure in the present invention;

[0022] Figure 3 It is a schematic structural diagram of the substrate coating device in the present invention;

[0023] Figure 4 It is a schematic diagram of the internal structure of the coating device in the present invention;

[0024] Figure 5 It is a plan view of the target device structure inside the coating chamber of the present invention;

[0025] Figure 6 It is a plan view of the structure of the substrate device inside the coating chamber of the present invention.

[0026] Markings in the figure: 1-chassis, 2-vacuum coating chamber, 3-chamber door, 4-argon gas delivery platform, 5-gas delivery pipe, 6-control console, 7-process power supply, 8-heat exchanger, 9-water outlet pipe, 10-water inlet pipe, 11-cold water pipe, 12-hot water pipe, 13-electric turntable, 14-upper terminal block, 15-waterproof box, 16-waterproof barrier, 17-target material, 18-strong magnet array, 19-lower water outlet, 20-upper water inlet, 2 1-drum, 22-hinge, 23-partition door, 24-lock, 25-motor, 26-motor shaft, 27-jack, 28-socket, 29-hopper, 30-adjustment seat; 31-slide, 32-screw, 33-adjustment knob, 34-slide, 35-electric telescopic rod, 36-first clamp, 37-anti-slip pad, 38-power socket, 39-conducting wire, 40-substrate, 41-second clamp, 42-baffle. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0028] Reference Figure 1-6The inside of the chassis 1 is provided with a vacuum coating chamber 2, the top of the chassis 1 is fixedly connected with an air delivery pipe 5, the top of the vacuum coating chamber 2 is provided with a waterproof box 15, the bottom of the waterproof box 15 is fixedly connected with a target material 17, the front end of the waterproof box 15 is fixedly connected with a lower water outlet 19, the rear end of the waterproof box 15 is fixedly connected with an upper water inlet 20, the top of the chassis 1 is fixedly provided with a heat exchanger 8, the bottom of the vacuum coating chamber 2 is provided with an electric turntable 13, the surface of the electric turntable 13 is provided with a rotating drum 21, the side end of the rotating drum 21 is rotatably connected with a motor shaft 26, the top of the motor shaft 26 is fixedly connected with an adjustment seat 30, the inside of the adjustment seat 30 is provided with a slide groove 31, the inside of the slide groove 31 is rotatably connected with a screw rod 32, the surface of the screw rod 32 is threadedly connected with a slide seat 34, the top of the slide seat 34 is fixedly connected with an electric telescopic rod 35, and the side end of the adjustment seat 30 is provided with a plurality of baffles 42. The inside of the vacuum coating chamber 2 is used to install a substrate coating device and a target device. The gas pipe 5 is used to input argon gas into the interior of the vacuum coating chamber 2. Argon is injected into the vacuum chamber to provide the required ion source for the sputtering process. The waterproof box 15 is used to install the target material 17. Circulating cooling water is injected on the surface of the target material 17 inside the waterproof box 15, which can cool the device when the target material 17 is powered on. When powered on, a pump is provided between the lower water outlet 19 and the water outlet pipe 9, which can pump the hot water in the waterproof box 15 to the interior of the heat exchanger 8, and then send it back to the interior of the waterproof box 15 from the water inlet pipe 10 after heat exchange and cooling in the heat exchanger 8. A circulating cooling device is used to keep the temperature of the target material stable and prevent the equipment from overheating. The electric turntable 13 installed at the bottom of the vacuum coating chamber 2 can be driven by a motor to rotate, thereby driving the rotating drum 21 to rotate. The rotating drum 21 is columnar, and a substrate clamping device is installed inside the rotating drum 21. Two sets of adjustment seats 30 are installed at both ends of the rotating drum 21. Two sets of clamping devices are installed inside the adjustment seat 30, which can clamp and limit the four corners of the substrate. During coating, the motor 25 can be started to drive the motor shaft 26 to rotate, thereby driving the substrate to rotate, adjusting the vertical angle of the base groove, and starting the electric turntable 13 to drive the rotating drum 21 to rotate, adjusting the horizontal angle of the substrate, so that the surface of the substrate can be evenly coated. When installing the substrate, the screw rod in the adjustment seat 30 can be adjusted to rotate, thereby adjusting the distance between the first clamp 36 and the second clamp 41 at both ends, adjusting the clamping width, and adjusting the clamping length through the electric telescopic rod 35. During coating, the clamping device can be protected by multiple baffles 42 at the side end of the adjustment seat 30.

[0029] Reference Figure 1 and Figure 2The top of the lower water outlet 19 is fixedly connected with the water outlet pipe 9, the top of the water outlet pipe 9 is fixedly connected with the heat exchanger 8, the rear end of the heat exchanger 8 is fixedly connected with the water inlet pipe 10, the lower end of the water inlet pipe 10 is fixedly connected with the upper water inlet 20, the front side end of the heat exchanger 8 is fixedly connected with the hot water pipe 12, and the rear side end of the heat exchanger 8 is fixedly connected with the water inlet pipe 10. A pump is installed between the water outlet pipe 9 and the lower water outlet 19, and the hot water in the waterproof box 15 is pumped out by the pump and sent to the inside of the heat exchanger 8. The hot water flows from the front end to the rear end of the heat exchanger 8, and the cold water for heat exchange is introduced into the cold water pipe 11 at the rear end of the heat exchanger 8. After the cold water exchanges heat with the circulating water, it is discharged from the hot water pipe 12 at the front end of the water outlet pipe 9. After heat exchange, the circulating water flows back to the device from the water inlet pipe 10 and the upper water inlet 20.

[0030] Reference Figure 2 A waterproof barrier 16 is installed inside the waterproof box 15 and at the side of the target 17, and a strong magnet array 18 is installed on the surface of the target 17. The waterproof barrier 16 plays a waterproof role, preventing water from flowing out from the lower end of the waterproof box 15 and dripping onto the surface of the substrate. The target 17 generates sputtering through high voltage, and the strong magnet array 18 makes the sputtering efficiency higher, so that the substrate under the target 17 can be fully coated.

[0031] Reference Figure 1 and Figure 5 The surface of the target 17 is fixedly connected with an upper wiring seat 14, and a process power supply 7 is fixedly installed on the top of the upper wiring seat 14 and located on the top of the chassis 1. The process power supply 7 and the upper wiring seat 14 are used to pass a high voltage to the target 17.

[0032] Reference Figure 4 The side end of the adjusting seat 30 is rotatably connected with an adjusting knob 33, and the top of the adjusting knob 33 is fixedly connected with a screw rod 32. By holding the adjusting knob 33 and rotating it, the screw rod 32 can be driven to rotate, thereby adjusting the slide seat 34 to move left and right, and adjusting the left and right position of the clamping device.

[0033] Reference Figure 4 and Figure 6 The surface of the adjustment seat 30 is slidably connected with a first clamp 36, an anti-slip pad 37 is installed inside the first clamp 36, and the surface of the adjustment seat 30 and the side end of the first clamp 36 are slidably connected with a second clamp 41. Four clamping devices are installed inside the rotating drum 21, and multiple sets of clamping devices can be used to adjust the angle and position of the substrate, and substrates of different sizes can be coated.

[0034] Reference Figure 6A power supply base 38 is fixedly installed at the bottom of the rotating drum 21, and a conductive wire 39 is fixedly connected to the top of the power supply base 38. A substrate 40 is installed inside the first fixture 36, and a conductive wire 39 is installed at the lower end of the substrate 40. The power supply base 38 and the conductive wire 39 are used to pass positive electricity to the substrate to attract the sputtered atoms or molecules, so that they will fly to the surface of the substrate and accumulate on the surface to form a thin film.

[0035] Reference Figure 3 The motor 25 is fixedly mounted on the outer end of the motor shaft 26, the side end of the drum 21 is provided with a hinge 22, the side end of the drum 21 is rotatably connected with a partition door 23 through the hinge 22, and the side end of the drum 21 is provided with a lock 24. The partition door 23 can be opened to facilitate installation and removal of the internal coating substrate, and the partition door 23 can be fixed by the lock 24, and the substrate is enclosed in the drum 21 to improve the coating effect.

[0036] Reference Figure 3 The top of the drum 21 is provided with a socket 27, a socket 28 is installed on the top of the drum 21 through the socket 27, and a hopper 29 is fixedly connected to the top of the socket 28. The hopper 29 is installed at the top of the drum 21 and below the target 17, and is used to introduce atoms or molecules for coating.

[0037] Reference Figure 1 The side end of the chassis 1 is fixedly mounted with an argon delivery platform 4, the top of which is fixedly connected with a gas delivery pipe 5, the side end of the chassis 1 is fixedly mounted with a console 6, and the front end of the chassis 1 is mounted with a door 3. The interior of the argon delivery platform 4 is used to store and deliver argon. The console 6 facilitates the staff to operate the equipment.

[0038] Working principle: The interior of the vacuum coating chamber 2 is used to install the substrate coating device and the target device. The gas delivery pipe 5 is used to input argon gas into the interior of the vacuum coating chamber 2. Argon is injected into the vacuum chamber to provide the required ion source for the sputtering process. The waterproof box 15 is used to install the target 17. The surface of the target 17 inside the waterproof box 15 is injected with circulating cooling water, which can cool the device when the target 17 is powered on. When powered on, a pump is provided between the lower water outlet 19 and the water outlet pipe 9, which can pump the hot water in the waterproof box 15 to the inside of the heat exchanger 8, and then send it back to the inside of the waterproof box 15 from the water inlet pipe 10 after heat exchange and cooling in the heat exchanger 8. The hot water flows from the front end to the rear end of the heat exchanger 8, and the cold water for heat exchange is introduced into the cold water pipe 11 at the rear end of the heat exchanger 8. After the cold water exchanges heat with the circulating water, it is discharged from the hot water pipe 12 at the front end of the water outlet pipe 9. After heat exchange, the circulating water flows back to the device from the water inlet pipe 10 and the upper water inlet 20. A circulating cooling device is used to keep the target temperature stable, prevent the equipment from overheating, and save water resources.

[0039] When installing the substrate, the distance between the first clamp 36 and the second clamp 41 at both ends can be adjusted by adjusting the screw in the adjustment seat 30, and the clamping width can be adjusted. The clamping length can be adjusted by the electric telescopic rod 35. By holding the adjustment knob 33 and turning it, the screw 32 can be driven to rotate, and then the slide seat 34 can be adjusted to move left and right, and the left and right position of the clamping device can be adjusted. There are four clamping devices installed inside the rotating drum 21. Multiple sets of clamping devices can be used to adjust the angle and position of the substrate, and substrates of different sizes can be coated.

[0040] The electric turntable 13 installed at the bottom of the vacuum coating chamber 2 can be driven by a motor to rotate, thereby driving the rotating drum 21 to rotate. The rotating drum 21 is cylindrical. During coating, the motor 25 can be started to drive the motor shaft 26 to rotate, thereby driving the substrate to rotate, adjusting the vertical angle of the base groove, starting the electric turntable 13 to drive the rotating drum 21 to rotate, and adjusting the horizontal angle of the substrate so that the surface of the substrate can be evenly coated. During coating, the clamping device can be protected by multiple baffles 42 at the side end of the adjustment seat 30. Opening the partition door 23 can facilitate the installation and removal of the internal coating substrate. The partition door 23 can be fixed by the lock 24, and the substrate can be enclosed in the interior of the rotating drum 21 to improve the coating effect. This device can cool and dissipate the heat inside the device to maintain the working environment of the equipment. Multiple sets of adjustment limit devices are added inside, and the angle of the substrate can be quickly adjusted in multiple directions so that the substrate can be evenly coated.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A magnetron sputtering coating device that is easy to cool down, comprising a chassis (1), characterized in that: A vacuum coating chamber (2) is provided inside the chassis (1), a gas pipe (5) is fixedly connected to the top of the chassis (1), a waterproof box (15) is installed at the top of the vacuum coating chamber (2), a target material (17) is fixedly connected to the bottom of the waterproof box (15), a lower water outlet (19) is fixedly connected to the front end of the waterproof box (15), an upper water inlet (20) is fixedly connected to the rear end of the waterproof box (15), a heat exchanger (8) is fixedly installed on the top of the chassis (1), and an electric turntable (15) is installed at the bottom of the vacuum coating chamber (2). 3), a rotating drum (21) is installed on the surface of the electric turntable (13), the inner side end of the rotating drum (21) is rotatably connected to a motor shaft (26), the top end of the motor shaft (26) is fixedly connected to an adjustment seat (30), a slide groove (31) is provided inside the adjustment seat (30), a screw rod (32) is rotatably connected inside the slide groove (31), the surface of the screw rod (32) is threadedly connected to a slide seat (34), the top end of the slide seat (34) is fixedly connected to an electric telescopic rod (35), and a plurality of baffles (42) are installed on the side end of the adjustment seat (30).

2. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: The top end of the lower water outlet (19) is fixedly connected to a water outlet pipe (9), the top end of the water outlet pipe (9) is fixedly connected to a heat exchanger (8), the rear end of the heat exchanger (8) is fixedly connected to a water inlet pipe (10), the lower end of the water inlet pipe (10) is fixedly connected to an upper water inlet (20), the front end of the heat exchanger (8) is fixedly connected to a hot water pipe (12), and the rear end of the heat exchanger (8) is fixedly connected to the water inlet pipe (10).

3. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: A waterproof barrier layer (16) is installed inside the waterproof box (15) and at the side end of the target material (17), and a strong magnet array (18) is installed on the surface of the target material (17).

4. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: An upper wiring seat (14) is fixedly connected to the surface of the target material (17), and a process power supply (7) is fixedly installed at the top of the upper wiring seat (14) and located at the top of the chassis (1).

5. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: The side end of the adjustment seat (30) is rotatably connected to an adjustment knob (33), and the top end of the adjustment knob (33) is fixedly connected to a screw rod (32).

6. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: The surface of the adjustment seat (30) is slidably connected to a first clamp (36), an anti-slip pad (37) is installed inside the first clamp (36), and the surface of the adjustment seat (30) and the side end of the first clamp (36) are slidably connected to a second clamp (41).

7. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: A power supply seat (38) is fixedly installed at the bottom end of the rotating drum (21), and a conductive wire (39) is fixedly connected to the top end of the power supply seat (38). A base material (40) is installed inside the first clamp (36), and a conductive wire (39) is installed at the lower end of the base material (40).

8. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: A motor (25) is fixedly mounted on the outer end of the motor shaft (26); a hinge (22) is mounted on the side end of the rotating drum (21); a partition door (23) is rotatably connected to the side end of the rotating drum (21) via the hinge (22); and a lock (24) is mounted on the side end of the rotating drum (21).

9. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: The top of the rotating drum (21) is provided with an insertion hole (27), the top of the rotating drum (21) is provided with a socket (28) through the insertion hole (27), and the top of the socket (28) is fixedly connected with a hopper (29).

10. The magnetron sputtering coating device that is easy to cool down according to claim 1, characterized in that: An argon gas delivery platform (4) is fixedly mounted on the side end of the chassis (1), a gas delivery pipe (5) is fixedly connected to the top of the argon gas delivery platform (4), a control console (6) is fixedly mounted on the side end of the chassis (1), and a cabinet door (3) is mounted on the front end of the chassis (1).

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