Coating thickness monitoring device

Abstract

The invention discloses a coating thickness monitoring device which comprises a placing base, a supporting frame, a monitoring assembly and a height adjusting assembly, the height adjusting assembly comprises a lower clamping cover, and the monitoring assembly comprises a fixing clamping frame; the bottom of the lower clamping cover is fixedly connected with the top of the placing base, an upper top cover is connected to the top of the lower clamping cover in a clamped mode, the upper top cover is in a disc shape with the concave top, the lower clamping cover is in a cylindrical shape with the hollow top, and an inserting convex column is connected to the center of the upper top cover in an inserted mode; the top end of the insertion convex column is fixedly connected with a placement chuck, and the bottom end of the insertion convex column penetrates through the upper top cover and extends into the lower clamping cover. According to the invention, through the arrangement of the height adjusting assembly, monitoring at different heights is carried out, and after multiple groups of monitoring data are recorded, multiple groups of data comparison is carried out; therefore, the accuracy of monitoring results is improved.

Description

Technical Field

[0001] The invention relates to the technical field of coating technology, and in particular to a coating thickness monitoring device. Background Art

[0002] The coating process is a technology that deposits one or more layers of materials with specific functions on the surface of a substrate to improve its physical, chemical or mechanical properties. It is widely used in semiconductors, optics, magnetic materials, construction, automobiles, aerospace and other fields.

[0003] With the continuous development of science and technology, the coating process is also constantly innovating and improving. The most important thing for coating work is to monitor the film thickness. This is mainly because the accuracy of the film thickness monitoring data directly determines the difference in the spectral response curve between the actual prepared film and the ideal designed film system. The current coating thickness monitoring is mainly the crystal oscillator monitoring method. This method monitors the exposed part of the crystal oscillator. When the position of the crystal oscillator and the coated lens is fixed, the thickness of the film deposited on the crystal oscillator is deduced from the thickness of the film deposited on the coated lens. This method does not directly monitor the film thickness, and the accuracy of the monitoring results needs to be improved. In addition, each monitoring is at a fixed height, and there is no comparison of multiple groups during monitoring, which will affect the accuracy of the results. The overall efficiency of coating thickness monitoring needs to be improved. Therefore, a coating thickness monitoring device is designed to solve the problem that the monitoring accuracy needs to be improved, and the height cannot be adjusted and multiple groups of monitoring data cannot be compared. Summary of the invention

[0004] The object of the present invention is to provide a coating thickness monitoring device to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a coating thickness monitoring device, comprising a placement base, a support frame, a monitoring component and a height adjustment component, the height adjustment component comprising a lower card cover, and the monitoring component comprising a fixed card frame; The top end of the support leg is fixedly connected to the bottom of the support leg, and the bottom end of the support leg is fixedly connected to the bottom of the support leg. The top of the support leg is fixedly connected to the top of the support leg, and the top of the support leg is fixedly connected to the limit position slip ring. A circular abutting cover is inserted between the surface of the placement chuck and the inner side of the upper top cover. The center of the top of the circular abutting cover is fixedly connected to an electric telescopic rod, and the top of the electric telescopic rod is fixedly connected to a rotating power supply seat. The bottom of the fixed card bracket is fixedly connected to one side of the top of the circular abutment cover, a detection port is provided at the top of the circular abutment cover and directly below the fixed card bracket, a height monitoring probe is fixedly connected to the surface of the fixed card bracket, and the bottom end of the height monitoring probe passes through the fixed card bracket and extends to the inside of the detection port.

[0006] The present invention further illustrates that the bottom of the support frame is fixedly connected to one side of the placement base, the surface of the support frame is fixedly connected to a motor barrel, the interior of the motor barrel is fixedly connected to an electric motor, the motor barrel and the electric motor are both configured to be placed vertically, the output shaft of the motor is fixedly connected to a transmission shaft through a coupling, the bottom end of the transmission shaft passes through the motor barrel and extends to the bottom of the motor barrel, and one end of the transmission shaft located at the bottom of the motor barrel is fixedly connected to the top of the rotating power supply seat.

[0007] The present invention further illustrates that a placement card hole is provided on the surface of the placement chuck, a sliding card slot is provided on the inner wall of the placement card hole, a spring telescopic rod is fixedly connected to the inner wall of the sliding card slot, one end of the spring telescopic rod is fixedly connected to a limiting clamp block, and the limiting clamp block clamps toward the center of the placement chuck.

[0008] The present invention further illustrates that the inner side of the limiting slip ring is slidably connected to the surface of the plug-in boss, and the top of the limiting slip ring abuts against the middle of the surface of the plug-in boss.

[0009] The present invention further describes that a power-carrying wire is fixedly connected to the surface of the rotating power supply seat, and one end of the power-carrying wire away from the rotating power supply seat is fixedly connected to the top of the height monitoring probe.

[0010] The present invention further describes that an assembly hole is opened on the surface of the upper top cover, and a lower pad is clamped at the bottom of the upper top cover and located on the inner side of the assembly hole. The number of the assembly holes is set to six, and the six assembly holes are evenly arranged on the circumference of the surface of the upper top cover.

[0011] The present invention further describes that the number of the placement card holes is set to six, and the six placement card holes are evenly arranged on the surface circumference of the placement chuck, and the number of the spring telescopic rods and the limiting clamps are set to multiple, and the multiple spring telescopic rods and the limiting clamps are symmetrically arranged on the inner walls of the six placement card holes.

[0012] The present invention further describes that an upper gasket is clamped between the bottom of the chuck and the top of the lower chuck cover, and the inner side of the upper gasket is sleeved on the surface of the lower gasket.

[0013] The present invention further describes that a fixing bolt is threadedly connected to the top of the upper cover, and one end of the fixing bolt passes through the upper cover and the lower cover in sequence and extends to the interior of the lower cover.

[0014] The present invention further describes that an arc-shaped plug-in plate is fixedly connected to the outer side of the bottom of the upper top cover, an arc-shaped plug-in groove is opened on the surface of the lower card cover, and the arc-shaped plug-in plate is plugged into the inside of the arc-shaped plug-in groove.

[0015] Compared with the prior art, the beneficial effects achieved by the present invention are: By setting the height adjustment component, when working, the coated lens is first placed on the top of the upper cover. At this time, the upper cover and the placement chuck on its top are not in contact with the circular resisting cover, and the plug-in boss at the bottom is provided with a compression spring. The compression spring supports the placement chuck in the initial position within its elastic limit. At this time, the initial monitoring is performed and the monitoring data is recorded. After that, the electric telescopic rod drives the circular resisting cover to move downward. This downward movement process can monitor the coated lens at different heights. Later, when the circular resisting cover contacts the placement chuck, the downward movement of the circular resisting cover will drive the placement chuck to move downward. Since the bottom of the coated lens is in contact with the top of the upper cover, the downward movement of the placement chuck will not drive the coated lens to move downward. At this time, monitoring at different heights can still be performed until multiple sets of monitoring data are recorded, and then multiple sets of data are compared, thereby improving the accuracy of the monitoring results.

[0016] By setting a rotating component, the position of the detection port and the height monitoring probe can be adjusted. When the height is fixed, the coated lenses in different placement card holes can be monitored, so that the height is guaranteed to be unchanged, multiple groups of coated lenses can be monitored, and the monitoring comparison data is increased. In addition, a spring telescopic rod and a limit clamp block are set to play a certain clamping role on the coated lens. At the beginning of monitoring, the limit clamp block only clamps the top of the coated lens, and the bottom of the coated lens is still at the top of the upper cover. The placement chuck is pressed down by the circular stop cover, so that the limit clamp block gradually completely clamps the coated lens, so that the rear circular stop cover moves up. The compression spring needs to be compressed because the elastic force after compression is greater than the weight of the placement chuck and its internal spring telescopic rod and limit clamp block, so it will gradually lift the placement chuck and drive the coated lens to move up together. In this process, the distance between the height detection probe and the coated lens remains unchanged, and the height of the coated lens changes, so that the thickness of the coated lenses at different heights can be monitored, and the monitoring data for comparison can be increased again, which further improves the accuracy of the monitoring results. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings: Figure 1 is a first stereoscopic diagram of a coating thickness monitoring device according to an embodiment of the present invention; Figure 2 is a second stereoscopic diagram of a coating thickness monitoring device according to an embodiment of the present invention; Figure 3 is a first cross-sectional view of a coating thickness monitoring device according to an embodiment of the present invention; Figure 4 is a second cross-sectional view of a coating thickness monitoring device according to an embodiment of the present invention; Figure 5 is a schematic diagram of an upper cover in an embodiment of the present invention; Figure 6 is a schematic diagram of a lower card cover in an embodiment of the present invention; Figure 7 is a schematic diagram of the bottom structure of a circular abutment cover in an embodiment of the present invention; Figure 8 is a schematic diagram of a chuck connection structure placed in an embodiment of the present invention; Fig. 9 is a schematic diagram of a top structure for placing a chuck in an embodiment of the present invention; Fig.10 is a schematic diagram comparing the front and rear clamping of the limiting clamp block in an embodiment of the present invention; In the figure: 1. Placement base; 2. Support frame; 3. Lower card cover; 4. Fixed card frame; 5. Upper cover; 6. Plug-in boss; 7. Placement chuck; 8. Compression spring; 9. Limiting slip ring; 10. Round abutment cover; 11. Electric telescopic rod; 12. Rotating power supply seat; 13. Detection port; 14. Height monitoring probe; 15. Motor cylinder; 16. Motor; 17. Transmission shaft; 18. Placement card hole; 19. Sliding card slot; 20. Spring telescopic rod; 21. Limiting clamp block; 22. Power-carrying wire; 23. Assembly hole; 24. Lower pad; 25. Upper pad ring; 26. Fixing bolt; 27. Arc-shaped plug-in plate; 28. Arc-shaped plug-in slot. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] refer to Figure 1 - Fig.10 , an embodiment of the present invention provides a coating thickness monitoring device, such as Figure 1 As shown, the coating thickness monitoring device includes a placement base 1, a support frame 2, a monitoring component and a height adjustment component, the height adjustment component includes a lower card cover 3, and the monitoring component includes a fixed card frame 4.

[0020] The bottom of the lower card cover 3 is fixedly connected to the top of the placement base 1, and the placement base 1 supports the lower card cover 3. The top of the lower card cover 3 is clamped with an upper cover 5, and the shape of the upper cover 5 is set to a disc with a concave top, and the shape of the lower card cover 3 is set to a cylindrical shape with a hollow top; a plug-in boss 6 is inserted at the center of the upper top cover 5, and a placement chuck 7 is fixedly connected to the top of the plug-in boss 6, and the plug-in boss 6 can drive the placement chuck 7 to slide up and down; the bottom end of the plug-in boss 6 passes through the upper top cover 5 and extends to the inside of the lower card cover 3, and the surface of the plug-in boss 6 located inside the lower card cover 3 is sleeved with a compression spring 8, and the bottom end of the compression spring 8 is fixedly connected to the center of the bottom of the inner wall of the lower card cover 3, and the top of the compression spring 8 is fixedly connected to the bottom of the inner wall of the lower card cover 3. The end is fixedly connected with a limiting slip ring 9, which can provide initial support for the placement chuck 7 within the elastic limit of the compression spring 8; a circular abutment cover 10 is inserted between the surface of the placement chuck 7 and the inner side of the upper top cover 5, and a gap is formed between the placement chuck 7 and the upper top cover 5. The circular abutment cover 10 is a hollow cover, consisting of a disc and a ring, and the ring of the circular abutment cover 10 is inserted in this gap; an electric telescopic rod 11 is fixedly connected to the center of the top of the circular abutment cover 10, and a rotating power supply seat 12 is fixedly connected to the top of the electric telescopic rod 11. The height of the rotating power supply seat 12 is fixed and will not be raised or lowered, so that the electric telescopic rod 11 can drive the circular abutment cover 10 to be raised or lowered when it works.

[0021] The bottom of the fixed card frame 4 is fixedly connected to one side of the top of the circular stop cover 10, and the fixed card frame 4 is supported by the circular stop cover 10. A detection port 13 is provided at the top of the circular stop cover 10 and directly below the fixed card frame 4, and a height monitoring probe 14 is fixedly connected to the surface of the fixed card frame 4. The height monitoring probe 14 is supported by the fixed card frame 4, and the coated lens is placed at the bottom of the inner wall of the detection port 13. The bottom end of the height monitoring probe 14 penetrates the fixed card frame 4 and extends to the inside of the detection port 13, and the height monitoring probe 14 is used to monitor the thickness.

[0022] like Figure 1 and Figure 2As shown, the bottom of the support frame 2 is fixedly connected to one side of the placement base 1, and the surface of the support frame 2 is fixedly connected with a motor barrel 15, and the inside of the motor barrel 15 is fixedly connected with a motor 16. The motor barrel 15 and the motor 16 are both arranged to be placed vertically, and the output shaft of the motor 16 is fixedly connected with a transmission shaft 17 through a coupling, and the bottom end of the transmission shaft 17 passes through the motor barrel 15 and extends to the bottom of the motor barrel 15. One end of the transmission shaft 17 located at the bottom of the motor barrel 15 is fixedly connected to the top of the rotating power supply seat 12. The support frame 2 supports the motor barrel 15, and the motor barrel 15 is used to support and install the motor 16. After the motor 16 is started, the motor 16 starts to rotate by driving the transmission shaft 17 through the output shaft, and after the transmission shaft 17 rotates, it drives the rotating power supply seat 12 to rotate; the electric telescopic rod 11 is fixed at the bottom of the rotating power supply seat 12, and it can rotate with the rotation of the rotating power supply seat 12, thereby driving the circular stop cover 10 to rotate, and the horizontal position of the detection port 13 and the height monitoring probe 14 can be adjusted under the condition of fixed height.

[0023] like Figure 8 - Fig.10 As shown, a placement card hole 18 is provided on the surface of the placement chuck 7, and a sliding card slot 19 is provided on the inner wall of the placement card hole 18. A spring telescopic rod 20 is fixedly connected to the inner wall of the sliding card slot 19. One end of the spring telescopic rod 20 is fixedly connected to a limiting clamp block 21, and the limiting clamp block 21 clamps toward the center of the placement chuck 7. Height monitoring is performed inside the placement card hole 18, and at the same time, a sliding card slot 19 is provided inside the placement card hole 18. The spring telescopic rod 20 is fixed in the sliding card slot 19. The spring telescopic rod 20 has a tendency to stretch toward the center of the placement chuck 7, so that the spring telescopic rod 20 cooperates with the limiting clamp block 21 to play a certain clamping role on the coated lens. At the beginning of monitoring, the limiting clamp block 21 only clamps the top of the coated lens, and the bottom of the coated lens is still at the top of the upper top cover 5; the circular stop cover 10 is pressed down and moved in cooperation with the placement chuck 7, so that the limiting clamp block 21 The coated lens is gradually clamped completely. After the compression spring 8 is compressed, the electric telescopic rod can also drive the circular stop cover 10 to move upward. At this time, the compression spring 8 will gradually lift up the placement chuck 7 and drive the coated lens to move upward because the elastic force after compression is greater than the weight of the placement chuck 7 and its internal spring telescopic rod 20 and the limit clamp 21. In this process, the distance between the height detection probe and the coated lens remains unchanged, and what changes is the height of the coated lens. Therefore, the thickness of the coated lenses at different heights can be monitored, which can increase the monitoring data for comparison again and further improve the accuracy of the monitoring results.

[0024] like Figure 3 and Figure 6As shown, the inner side of the limit slip ring 9 is slidably connected with the surface of the plug-in boss 6, and the top of the limit slip ring 9 abuts against the middle of the surface of the plug-in boss 6. The limit slip ring 9 can slide on the surface of the plug-in boss 6 due to the action of the compression spring 8, and the limit slip ring 9 abuts against the middle of the surface of the plug-in boss 6, so that the compression spring 8 can lift the plug-in boss 6 after restoring its deformation.

[0025] like Figure 2 As shown, a power-carrying wire 22 is fixedly connected to the surface of the rotating power supply seat 12, and one end of the power-carrying wire 22 away from the rotating power supply seat 12 is fixedly connected to the top of the height monitoring probe 14. The rotating power supply seat 12 can supply energy to the height monitoring probe 14. When working, the rotating power supply seat 12 can transmit electrical energy to the height monitoring probe 14 through the power-carrying wire 22. This design enables the power-carrying wire 22, the rotating power supply seat 12 and the height monitoring probe 14 to form a whole, and they can rotate together when rotating, thereby avoiding the power-carrying wire 22 from getting tangled when rotating.

[0026] like Figure 3 , Figure 5 and Fig. 9 As shown, an assembly hole 23 is opened on the surface of the upper cover 5, and a lower pad 24 is clamped at the bottom of the upper cover 5 and located on the inner side of the assembly hole 23. The lower pad 24 is clamped and installed inside the assembly hole 23. The number of the assembly holes 23 is set to six, and the six assembly holes 23 are evenly arranged on the surface circumference of the upper cover 5. The number of the placement card holes 18 is set to six, and the six placement card holes 18 are evenly arranged on the surface circumference of the placement chuck 7. The number of spring telescopic rods 20 and limit clamps 21 is set to be multiple, and the multiple spring telescopic rods 20 and limit clamps 21 are symmetrically arranged on the inner walls of the six placement holes 18, respectively. The placement hole 18 corresponds to the detection port 13, and the coated lens is at the bottom of the detection port 13 and is located inside the placement hole 18. The purpose of setting six placement holes 18 is mainly to cooperate with the horizontal rotation of the detection port 13 and the height monitoring probe 14 to monitor the coated lenses inside different placement holes 18, so that the height is guaranteed to be unchanged, multiple groups of coated lenses can be monitored, and the monitoring comparison data is increased. An upper gasket 25 is clamped between the bottom of the placement chuck 7 and the top of the lower card cover 3, and the inner side of the upper gasket 25 is sleeved on the surface of the lower gasket 24. The upper gasket 25 is sleeved on the surface of the lower gasket 24, which mainly plays an insulating role.

[0027] like Figure 1 , Figure 5 and Figure 6As shown, the top of the upper cover 5 is threadedly connected with a fixing bolt 26, one end of which passes through the upper cover 5 and the lower card cover 3 in sequence and extends to the inside of the lower card cover 3, and the outer side of the bottom of the upper cover 5 is fixedly connected with an arc plug-in plate 27, and the surface of the lower card cover 3 is provided with an arc plug-in groove 28, and the arc plug-in plate 27 is plugged into the inside of the arc plug-in groove 28. During the specific assembly, the arc plug-in plate 27 on the outer side of the bottom of the upper cover 5 is inserted into the arc plug-in groove 28 on the surface of the lower card cover 3, so that the upper cover 5 can be locked in the lower card cover 3, and it is not easy to deviate sideways, and the upper cover 5 and the lower card cover 3 are connected and fixed together with the fixing bolt 26 later.

[0028] Working principle: first assemble the upper cover 5 on the lower card cover 3. During the specific assembly, insert the arc-shaped plug-in plate 27 on the outer side of the bottom of the upper cover 5 into the arc-shaped plug-in groove 28 on the surface of the lower card cover 3. In this way, the upper cover 5 can be locked in the lower card cover 3, and it is not easy to deviate sideways. Later, the upper cover 5 and the lower card cover 3 are connected and fixed together with the fixing bolts 26. Then, the coated lens is placed on the top of the upper cover 5, and its specific position is placed in the placement card hole 18 of the placement chuck 7. At the same time, the placement card hole 18 and the assembly hole 23 on the surface of the upper cover 5 are matched one by one. An upper gasket 25 is clamped between the bottom of the placement chuck 7 and the top of the lower card cover 3. The bottom of the assembly hole 23 is sleeved with a lower gasket 24. The lower gasket 24 and the upper gasket 25 They are plugged into each other, and the lower pad 24 and the upper pad ring 25 can play an insulating role. When the coated lenses are placed, the coated lenses can be placed inside the six placement card holes 18; after the placement is completed, the motor 16 can be started. After the motor 16 works, the transmission shaft 17 starts to rotate through the output shaft. After the transmission shaft 17 rotates, it drives the rotating power supply seat 12 to rotate. The electric telescopic rod 11 is fixed to the bottom of the rotating power supply seat 12, and it can rotate with the rotation of the rotating power supply seat 12, thereby driving the circular positioning cover 10 to rotate, which can adjust the position of the detection port 13 and the height monitoring probe 14. Under the condition of fixed height, the coated lenses in different placement card holes 18 can be The film is monitored, so that the height is guaranteed to be unchanged, multiple groups of coated lenses can be monitored, and the comparative data of monitoring is increased; the electric telescopic rod 11 can drive the circular resisting cover 10 to rise and fall. At the beginning, the upper top cover 5 and the placement chuck 7 on its top are not in contact with the circular resisting cover 10. The plug-in boss 6 at the bottom is sleeved with a compression spring 8. The compression spring 8 supports the placement chuck 7 in its initial position within its elastic limit. At this time, the initial monitoring is done and the monitoring data is recorded; the electric telescopic rod 11 drives the circular resisting cover 10 to move downward. This downward movement process can monitor the coated lenses at different heights. Later, when the circular resisting cover 10 contacts the placement chuck 7, the circular The downward movement of the circular abutment cover 10 will drive the placement chuck 7 to move downward, and because the bottom of the coated lens contacts the top of the upper cover 5, the downward movement of the placement chuck 7 will not drive the coated lens to move downward. At this time, monitoring at different heights can still be performed until multiple sets of monitoring data are recorded, and then multiple sets of data are compared, thereby improving the accuracy of the monitoring results; in addition, a spring telescopic rod 20 and a limit clamp 21 are provided, which can play a certain clamping role on the coated lens. At the beginning of monitoring, the limit clamp 21 only clamps the top of the coated lens, and the bottom of the coated lens is still at the top of the upper cover 5. With the downward pressure of the circular abutment cover 10 on the placement chuck 7, the limit clamp 21 gradually clamps the coated lens completely;After that, the electric telescopic rod 11 will also drive the circular stop cover 10 to move upward. Since the compression force of the compression spring 8 is greater than the weight of the placement chuck 7 and its internal spring telescopic rod 20 and the limit clamp 21, the placement chuck 7 will be gradually lifted up. In this process, the placement chuck 7 always rests on the bottom of the circular stop cover 10. Before the elastic force of the compression spring 8 is reduced to the weight of the placement chuck 7 and its internal spring telescopic rod 20 and the limit clamp 21, there will be no reciprocating shaking, and the coated lens will also be driven to move upward. In this process, the distance between the height detection probe and the coated lens remains unchanged, and the height of the coated lens changes, so that the thickness of the coated lenses at different heights can be monitored, and the monitoring data for comparison can be increased again, further improving the accuracy of the monitoring results. ;

[0029] In the description of the present invention, it is necessary to understand that the terms "up", "down", "front", "back", "left", "right", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A coating thickness monitoring device, comprising a placement base (1), a support frame (2), a monitoring component and a height adjustment component, characterized in that: The height adjustment component comprises a lower card cover (3), and the monitoring component comprises a fixed card frame (4); The bottom of the lower card cover (3) is fixedly connected to the top of the placement base (1); the top of the lower card cover (3) is clamped with an upper cover (5); the shape of the upper cover (5) is set to be a disc with a concave top; the shape of the lower card cover (3) is set to be a cylindrical shape with a hollow top; a plug-in boss (6) is inserted at the center of the upper cover (5); the top of the plug-in boss (6) is fixedly connected to a placement chuck (7); the bottom end of the plug-in boss (6) passes through the upper cover (5) and extends to the interior of the lower card cover (3); the plug-in boss (6) is inserted into the center of the upper cover (5); the top of the plug-in boss (6) is fixedly connected to the ... A compression spring (8) is sleeved on the surface of the column (6) located inside the lower card cover (3), the bottom end of the compression spring (8) is fixedly connected to the center of the bottom of the inner wall of the lower card cover (3), the top end of the compression spring (8) is fixedly connected to a limit slip ring (9), a circular stop cover (10) is inserted between the surface of the chuck (7) and the inner side of the upper cover (5), the center of the top of the circular stop cover (10) is fixedly connected to an electric telescopic rod (11), and the top end of the electric telescopic rod (11) is fixedly connected to a rotating power supply seat (12); The bottom of the fixed card frame (4) is fixedly connected to one side of the top of the circular abutment cover (10); a detection port (13) is provided at the top of the circular abutment cover (10) and directly below the fixed card frame (4); a height monitoring probe (14) is fixedly connected to the surface of the fixed card frame (4); the bottom end of the height monitoring probe (14) passes through the fixed card frame (4) and extends to the inside of the detection port (13).

2. A coating thickness monitoring device according to claim 1, characterized in that: The bottom of the support frame (2) is fixedly connected to one side of the placement base (1); a motor barrel (15) is fixedly connected to the surface of the support frame (2); an electric motor (16) is fixedly connected to the interior of the motor barrel (15); the motor barrel (15) and the electric motor (16) are both arranged to be placed vertically; the output shaft of the electric motor (16) is fixedly connected to a transmission shaft (17) via a coupling; the bottom end of the transmission shaft (17) passes through the motor barrel (15) and extends to the bottom of the motor barrel (15); one end of the transmission shaft (17) located at the bottom of the motor barrel (15) is fixedly connected to the top of the rotating power supply seat (12).

3. A coating thickness monitoring device according to claim 1, characterized in that: A placement clamping hole (18) is provided on the surface of the placement clamping disc (7), a sliding clamping groove (19) is provided on the inner wall of the placement clamping hole (18), a spring telescopic rod (20) is fixedly connected to the inner wall of the sliding clamping groove (19), one end of the spring telescopic rod (20) is fixedly connected to a limit clamping block (21), and the limit clamping block (21) clamps toward the center of the placement clamping disc (7).

4. A coating thickness monitoring device according to claim 1, characterized in that: The inner side of the limiting slip ring (9) is slidably connected to the surface of the plug-in boss (6), and the top of the limiting slip ring (9) abuts against the middle of the surface of the plug-in boss (6).

5. The coating thickness monitoring device according to claim 1, characterized in that: A power-carrying wire (22) is fixedly connected to the surface of the rotating power supply seat (12), and one end of the power-carrying wire (22) away from the rotating power supply seat (12) is fixedly connected to the top of the height monitoring probe (14).

6. A coating thickness monitoring device according to claim 1, characterized in that: The surface of the upper cover (5) is provided with an assembly hole (23), and a lower cushion block (24) is clamped at the bottom of the upper cover (5) and located inside the assembly hole (23). The number of the assembly holes (23) is set to six, and the six assembly holes (23) are evenly arranged on the circumference of the surface of the upper cover (5).

7. A coating thickness monitoring device according to claim 3, characterized in that: The number of the placement card holes (18) is set to six, and the six placement card holes (18) are evenly arranged on the surface circumference of the placement chuck (7), the number of the spring telescopic rods (20) and the limiting clamp blocks (21) are both set to multiple, and the multiple spring telescopic rods (20) and the limiting clamp blocks (21) are symmetrically arranged on the inner walls of the six placement card holes (18).

8. A coating thickness monitoring device according to claim 1, characterized in that: An upper gasket ring (25) is clamped between the bottom of the placement chuck (7) and the top of the lower chuck cover (3), and the inner side of the upper gasket ring (25) is sleeved on the surface of the lower gasket block (24).

9. The coating thickness monitoring device according to claim 1, characterized in that: The top of the upper cover (5) is threadedly connected with a fixing bolt (26), and one end of the fixing bolt (26) passes through the upper cover (5) and the lower card cover (3) in sequence and extends to the interior of the lower card cover (3).

10. The coating thickness monitoring device according to claim 1, characterized in that: An arc-shaped plug-in plate (27) is fixedly connected to the outer side of the bottom of the upper top cover (5), and an arc-shaped plug-in groove (28) is provided on the surface of the lower card cover (3), and the arc-shaped plug-in plate (27) is plugged into the inside of the arc-shaped plug-in groove (28).

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