Measuring device for temperature uniformity of deposition furnace

Abstract

The invention provides a temperature uniformity measuring device for a deposition furnace. The temperature uniformity measuring device for the deposition furnace comprises a temperature measuring furnace cover, a plurality of temperature thermocouples and a thermocouple lifting device, the temperature measuring furnace cover is provided with a plurality of temperature measuring holes which are in one-to-one correspondence with the plurality of temperature measuring thermocouples. And the thermocouple lifting device is connected with the plurality of temperature thermocouples and is used for adjusting the heights of the plurality of temperature thermocouples in the furnace chamber of the deposition furnace. And the plurality of temperature thermocouples are used for measuring the circumferential temperature uniformity at the same height in the furnace chamber. The multiple temperature measuring holes are formed in the temperature measuring furnace cover, the multiple temperature measuring thermocouples extend into the furnace cavity of the deposition furnace at the same time through the thermocouple lifting device, and therefore the problem that only temperature distribution on the axis of the deposition furnace can be measured and temperature distribution of the area outside the axis of the deposition furnace cannot be measured in an existing method is solved.

Description

Technical Field

[0001] The present application belongs to the technical field of temperature distribution measurement and detection, and specifically relates to a deposition furnace temperature uniformity measurement device. Background Art

[0002] The fuel elements used in high temperature gas-cooled reactors adopt a structure in which all-ceramic TRISO (tri-structural isotropic) coated fuel particles (hereinafter referred to as TRISO particles) are dispersed in a graphite matrix.

[0003] TRISO particles are continuously prepared in a chemical vapor deposition furnace (hereinafter referred to as deposition furnace) through a fluidized bed chemical vapor deposition (FB-CVD) process. During the FB-CVD particle coating process, the particles are fluidized under the action of a high-speed gas flow, and the gas reactants enter the fluidized bed in the form of a carrier, undergo chemical reactions in the high-temperature zone, and produce ultrafine powders that are deposited on the particle surface.

[0004] Since the rate and products of chemical vapor deposition reactions are largely affected by the reaction temperature, in order to ensure the coating quality of each coating layer of the TRISO particles, the actual temperature in the chemical vapor deposition reaction zone in the deposition furnace needs to be controlled as close to the process temperature as possible.

[0005] In addition, according to production experience and related research, if the temperature zone control of the fluidized bed is not suitable, the cracking of the gas in the fluidized bed chemical vapor deposition process will begin at the gas inlet, and the cracking products will undergo orifice deposition at the gas inlet, which is not conducive to the long-term stable operation of the reaction. Therefore, it is necessary to ensure that the temperature at the gas inlet is as low as possible.

[0006] In summary, the temperature distribution in the deposition furnace is a key factor in determining the continuous, stable and high-quality production of TRISO particles. In order to ensure the product quality of TRISO particles, during the continuous production of TRISO particles, it is necessary to regularly measure the temperature distribution in the deposition furnace and conduct furnace temperature uniformity tests to ensure that the vapor deposition process meets the process requirements.

[0007] On the other hand, the temperature distribution in the deposition furnace is largely affected by the heating element structure of the deposition furnace. The measurement of the temperature distribution of the deposition furnace is the premise and basis for improving and optimizing the heating element structure.

[0008] The deposition furnace is equipped with temperature measuring ports along the axial direction of the furnace body and an optical thermometer. In actual production, the actual temperature measured by the optical thermometer is used as the process temperature for furnace temperature control. However, the temperature measurement target of the optical thermometer is on the outer wall of the fluidizing tube, which cannot accurately reflect the actual temperature of the reaction zone.

[0009] According to a method for calibrating the temperature uniformity of a CVD furnace that has been disclosed, two thermocouples can be inserted into the furnace from the temperature measuring holes above and below the CVD furnace respectively. The two thermocouples are simultaneously pushed toward each other a certain distance at regular intervals. After the temperature stabilizes, the temperature at the corresponding position is measured and recorded until the distance between the two thermocouples is ≤100mm, thereby measuring the temperature uniformity of the furnace.

[0010] However, due to the internal structure of the deposition furnace used for TRISO particle production, it is impossible to set a temperature measuring hole underneath it, and this method can only measure the temperature distribution on the axis of the deposition furnace, and cannot measure the temperature distribution outside the axis of the deposition furnace. Summary of the invention

[0011] In view of this, the present application is dedicated to providing a deposition furnace temperature uniformity measurement device. By arranging multiple temperature measuring holes on the temperature measuring furnace cover and using a thermocouple lifting device, multiple temperature measuring thermocouples can be simultaneously extended into the furnace chamber of the deposition furnace, so as to solve the problem that the existing method can only measure the temperature distribution on the axis of the deposition furnace, but cannot measure the temperature distribution outside the axis of the deposition furnace.

[0012] The present application provides a deposition furnace temperature uniformity measurement device, which includes a temperature measuring furnace cover, a plurality of temperature measuring thermocouples and a thermocouple lifting device. The temperature measuring furnace cover is provided with a plurality of temperature measuring holes corresponding to the plurality of temperature measuring thermocouples. The thermocouple lifting device is connected to the plurality of temperature measuring thermocouples, and the thermocouple lifting device is used to adjust the height of the plurality of temperature measuring thermocouples in the deposition furnace chamber. The plurality of temperature measuring thermocouples are used to measure the circumferential temperature uniformity at the same height in the furnace chamber.

[0013] In a specific embodiment of the present application, the number of the plurality of temperature measuring holes and the number of the plurality of temperature measuring thermocouples are both four. There is a temperature measuring hole at the center of the temperature measuring furnace cover, and the center of the temperature measuring hole is coaxial with the center of the deposition furnace, and is used to measure the temperature uniformity on the axis of the deposition furnace. The remaining three temperature measuring holes on the temperature measuring furnace cover are evenly distributed in an annular direction around the center of the temperature measuring furnace cover.

[0014] In a specific embodiment of the present application, the deposition furnace temperature uniformity measurement device further includes a plurality of thermocouple protection sleeves, which are respectively arranged on the outer sides of the upper ends of the plurality of temperature measuring thermocouples. A fixed pulley is installed in the center of the top connecting rod of the thermocouple lifting bracket. The signal line of the temperature measuring thermocouple passes through the thermocouple protection sleeve, bypasses the fixed pulley, and is connected to the input end of the thermocouple temperature display.

[0015] In a specific embodiment of the present application, the deposition furnace temperature uniformity measurement device also includes a plurality of temperature measuring hole clamps. The temperature measuring hole clamps are arranged on the upper edge of the temperature measuring hole. The orthographic projection area of ​​the temperature measuring hole clamp on the temperature measuring furnace cover is larger than the area of ​​the temperature measuring hole, and is used to cooperate with the cover plate of the temperature measuring hole to block certain unused temperature measuring holes to avoid a large amount of heat loss from the temperature measuring hole during the temperature measurement process, which affects the temperature measurement accuracy. When the temperature is not measured, all the temperature measuring holes are covered with cover plates, and the cover plates are fixed above the temperature measuring holes by the temperature measuring hole clamps to prevent debris or impurities from falling from the temperature measuring holes into the deposition furnace and polluting or damaging the deposition furnace cavity.

[0016] In a specific embodiment of the present application, the thermocouple lifting device includes a thermocouple lifting bracket and a lifting rope. The thermocouple lifting bracket is arranged at the top of the temperature measuring furnace cover. A protective sleeve lifting ring is arranged at the top of the thermocouple protective sleeve. One end of the lifting rope is connected to the protective sleeve lifting ring, and the other end of the lifting rope is passed around the fixed pulley.

[0017] In a specific embodiment of the present application, vertical position scales are provided on the support rods on both sides of the thermocouple lifting bracket, and the vertical position scales are used to determine the lifting height of the temperature measuring thermocouple each time.

[0018] In a specific embodiment of the present application, a guide rope wheel is fixed on the temperature measuring furnace cover, and the end of the lifting rope is fixed on the guide rope wheel; the thermocouple lifting device also includes a motor. The end of the lifting rope is fixed on the motor, and the motor is used to drive the temperature measuring thermocouple to move up and down in the furnace cavity.

[0019] In a specific embodiment of the present application, the deposition furnace temperature uniformity measurement device further comprises a plurality of spiral clamps. The plurality of spiral clamps are evenly distributed on the temperature measuring furnace cover. The spiral clamp comprises an upper clamp, a rotating fixed screw and a lower clamp. The upper clamp is clamped on the upper edge of the temperature measuring furnace cover and is fastened by rotating the fixed screw. The lower clamp is used to clamp on the upper edge of the deposition furnace drum.

[0020] In a specific embodiment of the present application, the temperature measuring furnace cover is a double-layer water-cooled structure, and there are two cooling water interfaces on the temperature measuring furnace cover, one cooling water interface is used for cooling water inlet, and the other cooling water interface is used for cooling water outlet.

[0021] In a specific embodiment of the present application, at least one furnace cover lifting ring is provided on the temperature measuring furnace cover, and the at least one furnace cover lifting ring is used to fix the lifting hook when lifting the temperature measuring furnace cover.

[0022] The beneficial effect of the technical solution of the present application is that: by setting up multiple temperature measuring holes and using a thermocouple lifting device to simultaneously extend multiple temperature measuring thermocouples into the furnace chamber of the deposition furnace, the temperature at different circumferential positions at the same axial height of the furnace chamber is measured. The deposition furnace temperature uniformity measurement device can be applied to the temperature uniformity measurement of the chemical vapor deposition furnace for the production of TRISO coated fuel particles, and realizes the measurement of the circumferential temperature uniformity at the same height of the deposition furnace, providing a basis for evaluating the heating element, and also realizes the measurement of the axial temperature distribution of the deposition furnace, providing a basis and reference for the quality analysis of the coated particle product and the optimization of the heating element structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Shown is a top view of a deposition furnace temperature uniformity measurement device provided by an embodiment of the present application.

[0024] Figure 2 Shown is a front view of a deposition furnace temperature uniformity measurement device provided by an embodiment of the present application.

[0025] Figure 3 Shown is a partial structural schematic diagram of a deposition furnace temperature uniformity measurement device provided in one embodiment of the present application.

[0026] Figure 4 Shown is a measured curve diagram of temperature uniformity measurement of a deposition furnace provided in one embodiment of the present application. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] At least one embodiment of the present application provides a deposition furnace temperature uniformity measurement device, referring to Figures 1 to 3 The deposition furnace temperature uniformity measuring device comprises a temperature measuring furnace cover 1, a plurality of temperature measuring thermocouples 7 and a thermocouple lifting device. The temperature measuring furnace cover 1 is provided with a plurality of temperature measuring holes 2 corresponding to the plurality of temperature measuring thermocouples 7 one by one. The thermocouple lifting device is connected to the plurality of temperature measuring thermocouples 7 and is used to adjust the height of the plurality of temperature measuring thermocouples 7 in the furnace cavity. The plurality of temperature measuring thermocouples 7 extend into the deposition furnace cavity through the plurality of temperature measuring holes 2 respectively. The plurality of temperature measuring thermocouples 7 are used to measure the circumferential temperature uniformity at the same height in the furnace cavity.

[0029] It should be noted that the length and performance of the temperature measuring thermocouple 7 can be selected according to actual needs, as long as the temperature in the furnace chamber of the deposition furnace can be measured. On this basis, the embodiment of the present application does not specifically limit the length and performance of the temperature measuring thermocouple 7. The length of the temperature measuring thermocouple 7 is usually greater than the height of the furnace chamber of the deposition furnace. For example, the length of the temperature measuring thermocouple 7 is ≥2000mm. The temperature range of the furnace chamber of the deposition furnace can be within the operating temperature range of the temperature measuring thermocouple 7. For example, the operating temperature range of the temperature measuring thermocouple 7 is 0℃~1800℃. The graduation number of the temperature measuring thermocouple 7 can be C graduation, the fixed end material of the temperature measuring thermocouple 7 is inconel600, and the temperature measurement accuracy of the temperature measuring thermocouple 7 can be 0.2%.

[0030] In the technical solution provided by the embodiment of the present application, multiple temperature measuring holes 2 are provided on the temperature measuring furnace cover 1, and multiple temperature measuring thermocouples 7 are simultaneously extended into the furnace chamber of the deposition furnace by using a thermocouple lifting device, so as to measure the temperature at different circumferential positions at the same axial height of the furnace chamber. The deposition furnace temperature uniformity measurement device can be applied to the temperature uniformity measurement of the chemical vapor deposition furnace for the production of TRISO coated fuel particles, and realizes the measurement of the circumferential temperature uniformity at the same height of the deposition furnace, providing a basis for evaluating the heating element, and also realizes the measurement of the temperature values ​​at different axial heights of the deposition furnace, providing a basis and reference for the quality analysis of the coated particle products and the optimization of the heating element structure.

[0031] The number of the multiple temperature measuring holes 2 and the number of the multiple temperature measuring thermocouples 7 can be selected according to actual conditions, for example, 2, 3, 5, 8, or even more. For example, in at least one embodiment of the present application, the number of the multiple temperature measuring holes 2 and the number of the multiple temperature measuring thermocouples 7 are both four. There is a temperature measuring hole 2 at the center of the temperature measuring furnace cover 1, and the center of the temperature measuring hole 2 is coaxial with the center of the deposition furnace, which is used to measure the temperature uniformity on the axis of the deposition furnace. The remaining three temperature measuring holes 2 on the temperature measuring furnace cover 1 are evenly distributed around the center of the temperature measuring furnace cover 1.

[0032] It should be noted that the maximum diameter of the circle where the center of the three outer temperature measuring holes 2 is located is limited by the inner diameter of the heating element and the fluidizing tube of the deposition furnace, and the minimum diameter of the circle is limited by the inner diameter of the temperature measuring hole 2, and the minimum is the inner diameter of the temperature measuring hole 2.

[0033] In at least one embodiment of the present application, the deposition furnace temperature uniformity measurement device also includes a plurality of thermocouple protection sleeves 6, and the plurality of thermocouple protection sleeves 6 are respectively arranged on the outer sides of the upper ends of the plurality of temperature measuring thermocouples 7. A fixed pulley 4 is installed in the center of the top connecting rod of the thermocouple lifting bracket 3. The signal line 13 of the temperature measuring thermocouple 7 passes through the thermocouple protection sleeve 6, bypasses the fixed pulley 4, and is connected to the input end of the thermocouple temperature display. In this way, the thermocouple protection sleeve 6 can be used to protect the temperature measuring thermocouple 7, and also avoids damage to the temperature measuring furnace cover 1 caused by the excessive temperature of the temperature measuring thermocouple 7. In addition, the signal line 13 of the temperature measuring thermocouple 7 passes through the thermocouple protection sleeve 6, bypasses the fixed pulley 4, and is connected to the input end of the thermocouple temperature display, so that the user can observe the temperature measured by the temperature measuring thermocouple 7 in real time through the thermocouple temperature display.

[0034] In some embodiments, the material of the thermocouple protection sheath 6 is stainless steel.

[0035] In at least one embodiment of the present application, reference Figure 3 , the deposition furnace temperature uniformity measurement device also includes a plurality of temperature measuring hole clamps 11. The temperature measuring hole clamps 11 are arranged on the upper edge of the temperature measuring hole 2. The orthographic projection area of ​​the temperature measuring hole clamps 11 on the temperature measuring furnace cover 1 is larger than the area of ​​the temperature measuring hole 2, and is used to cooperate with the cover plate of the temperature measuring hole 2 to block certain unused temperature measuring holes 2, so as to avoid a large amount of heat loss from the temperature measuring hole 2 during the temperature measurement process, thereby affecting the temperature measurement accuracy. When the temperature is not measured, all the temperature measuring holes 2 are covered with cover plates, and the cover plates are fixed above the temperature measuring holes 2 by the temperature measuring hole clamps 11, so as to prevent debris or impurities from falling into the deposition furnace from the temperature measuring holes 2, and polluting or damaging the deposition furnace cavity.

[0036] In at least one embodiment of the present application, reference Figure 2 The thermocouple lifting device includes a thermocouple lifting bracket 3 and a lifting rope 8. The thermocouple lifting bracket 3 is arranged at the top of the temperature measuring furnace cover 1. A protective sleeve lifting ring 12 is provided at the top of the thermocouple protective sleeve 6. One end of the lifting rope 8 is connected to the protective sleeve lifting ring 12, and the other end of the lifting rope 8 is passed around the fixed pulley 4. In this way, a method for manually adjusting the height of the temperature measuring thermocouple 7 in the furnace cavity is provided. By pulling the end of the lifting rope 8, the height of the temperature measuring thermocouple 7 in the furnace cavity can be adjusted.

[0037] It should be noted that the protective sleeve ring 12 is used to fix the lifting rope 8 of the thermocouple lifting device. The protective sleeve ring 12 can be welded to the top of the thermocouple protective sleeve 6, and the connection between the protective sleeve ring 12 and the thermocouple protective sleeve 6 can be strengthened by welding. The thermocouple lifting bracket 3 can be connected to the temperature measuring furnace cover 1 by welding.

[0038] In at least one embodiment of the present application, vertical position scales are provided on the support rods on both sides of the thermocouple lifting bracket 3 , and the vertical position scales are used to determine the lifting height of the temperature measuring thermocouple 7 each time.

[0039] The length of the thermocouple lifting bracket 3 can be set according to actual needs, and the embodiment of the present application does not specifically limit this. For example, in some embodiments, the length of the thermocouple lifting bracket 3 is ≥ 2500 mm.

[0040] In at least one embodiment of the present application, a guide rope wheel is fixed on the temperature measuring furnace cover 1, and the end of the lifting rope 8 is fixed on the guide rope wheel. In this way, another method of manually adjusting the height of the temperature measuring thermocouple 7 in the furnace cavity is provided. By turning the handle of the guide rope wheel, the height of the temperature measuring thermocouple 7 in the furnace cavity can be manually adjusted.

[0041] In at least one embodiment of the present application, the thermocouple lifting device further comprises a motor. The end of the lifting rope 8 is fixed to the motor. The motor is used to drive the temperature measuring thermocouple 7 to move up and down in the furnace cavity. In this way, a method of electrically adjusting the height of the temperature measuring thermocouple 7 in the furnace cavity is provided. Each time the motor rotates a certain angle, it drives the temperature measuring thermocouple 7 to be lifted to a certain height in the furnace cavity.

[0042] In at least one embodiment of the present application, the deposition furnace temperature uniformity measurement device further includes a plurality of spiral clamps 5. The plurality of spiral clamps 5 are evenly distributed on the temperature measuring furnace cover 1. The spiral clamp 5 includes an upper clamp, a rotating fixed screw and a lower clamp. The upper clamp is clamped on the upper edge of the temperature measuring furnace cover 1 and is fastened by rotating the fixed screw. The lower clamp is used to clamp on the upper edge of the deposition furnace drum.

[0043] In some embodiments, the number of the plurality of spiral clamps 5 is three, and the three spiral clamps 5 are evenly distributed circumferentially on the outside of the temperature measuring furnace cover 1. In this way, the three spiral clamps 5 can be used to fix the temperature measuring furnace cover 1 and the deposition furnace body.

[0044] In at least one embodiment of the present application, the temperature measuring furnace cover 1 is a double-layer water-cooled structure, and there are two cooling water interfaces 9 on the temperature measuring furnace cover 1, one cooling water interface 9 is used for cooling water inlet, and the other cooling water interface 9 is used for cooling water outlet. In this way, by adding two cooling water interfaces 9 to the temperature measuring furnace cover 1, the temperature measuring furnace cover 1 can be connected to cooling water for cooling, thereby effectively preventing the temperature of the temperature measuring furnace cover 1 from being too high.

[0045] In at least one embodiment of the present application, at least one furnace cover lifting ring 10 is provided on the temperature measuring furnace cover 1, and the at least one furnace cover lifting ring 10 is used to fix the lifting hook when lifting the temperature measuring furnace cover 1.

[0046] For example, the number of the at least one furnace roof hanging ring 10 is two.

[0047] In the following, in combination with a specific embodiment, the deposition furnace temperature uniformity measurement device in the above embodiment is used to illustrate the deposition furnace temperature uniformity measurement process. The deposition furnace temperature uniformity measurement process mainly includes the following steps.

[0048] Step 1: insert multiple temperature measuring thermocouples 7 into the furnace cavity through the temperature measuring holes 2 on the temperature measuring furnace cover 1;

[0049] Step 2: The deposition furnace starts to heat up, and the start time of heating up and the room temperature are recorded;

[0050] Step three, monitor the temperature inside the furnace through the infrared thermometer on the side wall of the deposition furnace. After the temperature inside the furnace rises to the process temperature, stop heating, start insulation, and record the insulation start time. The insulation time is 5min to 60min. If the insulation time is too short, the temperature distribution in the furnace has not reached the thermal equilibrium state, the temperature of the low temperature zones at the upper and lower ends of the furnace is still rising, and the temperature of the high temperature zone in the middle of the furnace is still decreasing. The actual measured temperature in the low temperature zone is low, and the actual measured temperature in the high temperature zone is high. If the insulation time is too long, it will affect the temperature measurement efficiency. The process temperature is 1000℃~1800℃;

[0051] For example, the measured temperature uniformity curves of the deposition furnace at three process temperatures of 1200°C, 1400°C, and 1600°C can be referenced. Figure 4 shown.

[0052] Step 4: The deposition furnace heat preservation ends, and the heat preservation end time is recorded;

[0053] Step 5, keep warm at the temperature measuring point for 2 to 5 minutes. The insulation time should not be too short, otherwise the heat conduction between the temperature measuring point and the temperature measuring thermocouple 7 has not reached a thermal equilibrium state, and there is a deviation between the measured temperature and the actual temperature. For example, as the temperature measuring thermocouple 7 is raised from the low temperature zone to the high temperature zone, the temperature of the temperature measuring thermocouple 7 will rise. When the insulation time is too short, the measured temperature will be low. As the temperature measuring thermocouple 7 is raised from the high temperature zone to the low temperature zone, the temperature of the temperature measuring thermocouple 7 will decrease. When the insulation time is too short, the measured temperature will be high. The insulation time should not be too long, otherwise it will affect the temperature measurement efficiency. After the insulation is completed, observe the temperature changes of each temperature measuring thermocouple 7. After the temperature of the temperature measuring thermocouple 7 is stable, record the temperature measurement time, the temperature value of the infrared thermometer, the temperature value of each temperature measuring thermocouple 7 and the corresponding height, the inlet and outlet temperature of the cooling water, the heating power of the deposition furnace, the heating current, the heating voltage, etc.

[0054] Step 6: After recording is completed, adjust the height of the temperature measuring thermocouple 7 in the furnace chamber. The temperature measuring thermocouple 7 is raised by 10mm to 500mm each time. The lifting height is set according to the degree of influence of the temperature at different heights of the furnace chamber on the process and product quality. Preferably, the lifting height of the temperature measuring thermocouple 7 is set to 10mm to 50mm for locations that have a greater impact on the process and product quality, such as the main area where the chemical vapor deposition reaction occurs; and the lifting height of the temperature measuring thermocouple 7 is set to 100mm to 500mm for other areas.

[0055] Step 7. Repeat steps 5 and 6 until all required temperature points are measured.

[0056] It should be noted that the combination of the various technical features in the embodiments of the present application is not limited to the combination described in the embodiments of the present application or the combination described in the specific embodiments, and all technical features described in the present application can be freely combined or combined in any way unless there is a contradiction between them.

[0057] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the term "comprising" only indicates that the steps and elements that have been clearly identified are included, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0058] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A deposition furnace temperature uniformity measurement device, characterized in that: It includes a temperature measuring furnace cover, multiple temperature measuring thermocouples and a thermocouple lifting device. Wherein, a plurality of temperature measuring holes corresponding to a plurality of temperature measuring thermocouples are arranged on the temperature measuring furnace cover; The thermocouple lifting device is connected to a plurality of temperature measuring thermocouples and is used to adjust the height of the plurality of temperature measuring thermocouples in the furnace cavity. The plurality of temperature measuring thermocouples extend into the furnace cavity of the deposition furnace through a plurality of temperature measuring holes respectively. Multiple temperature measuring thermocouples are used to measure the circumferential temperature uniformity at the same height in the furnace chamber.

2. The deposition furnace temperature uniformity measurement device according to claim 1, characterized in that: The number of multiple temperature measuring holes and the number of multiple temperature measuring thermocouples are both four. Among them, there is a temperature measuring hole in the center of the temperature measuring furnace cover, the center of the temperature measuring hole is coaxial with the center of the deposition furnace, and is used to measure the temperature uniformity on the axis of the deposition furnace; the other three temperature measuring holes on the temperature measuring furnace cover are evenly distributed around the center of the temperature measuring furnace cover.

3. The deposition furnace temperature uniformity measurement device according to claim 1, characterized in that: Also included are several thermocouple protection sleeves, Among them, multiple thermocouple protection sleeves are respectively arranged on the outer sides of the upper ends of multiple temperature measuring thermocouples, and a fixed pulley is installed in the center of the top connecting rod of the thermocouple lifting bracket; The signal line of the temperature measuring thermocouple passes through the thermocouple protection cover, bypasses the fixed pulley, and is connected to the input end of the thermocouple temperature display instrument.

4. The deposition furnace temperature uniformity measurement device according to claim 3, characterized in that: It also includes multiple temperature measuring hole clamps. Among them, the temperature measuring hole clamp is arranged on the upper edge of the temperature measuring hole; the orthographic projection area of ​​the temperature measuring hole clamp on the temperature measuring furnace cover is larger than the area of ​​the temperature measuring hole; the temperature measuring hole clamp is used to cooperate with the cover plate of the temperature measuring hole to seal some unused temperature measuring holes to avoid a large amount of heat loss from the temperature measuring hole during the temperature measurement process, which affects the temperature measurement accuracy. When the temperature is not measured, all the temperature measuring holes are covered with cover plates, and the cover plates are fixed above the temperature measuring holes by the temperature measuring hole clamp to prevent debris or impurities from falling into the deposition furnace from the temperature measuring hole and polluting or damaging the deposition furnace cavity.

5. The deposition furnace temperature uniformity measurement device according to claim 3, characterized in that: The thermocouple lifting device includes a thermocouple lifting bracket and a lifting rope. The thermocouple lifting bracket is arranged at the top of the temperature measuring furnace cover, and a protective sleeve lifting ring is arranged at the top of the thermocouple protective sleeve. One end of the lifting rope is connected to the protective sleeve lifting ring, and the other end of the lifting rope is passed around the fixed pulley.

6. The deposition furnace temperature uniformity measurement device according to claim 5, characterized in that: Vertical position scales are provided on the support rods on both sides of the thermocouple lifting bracket, and the vertical position scales are used to judge the lifting height of the temperature measuring thermocouple each time.

7. The deposition furnace temperature uniformity measurement device according to claim 5, characterized in that: A guide rope wheel is fixed on the temperature measuring furnace cover, and the end of the lifting rope is fixed on the guide rope wheel; the thermocouple lifting device also includes a motor, and the end of the lifting rope is fixed on the motor, and the motor is used to drive the temperature measuring thermocouple to move up and down in the furnace cavity.

8. A deposition furnace temperature uniformity measurement device according to any one of claims 1 to 7, characterized in that: Also included are multiple screw-type clamps. Among them, a plurality of spiral clamps are evenly distributed on the temperature measuring furnace cover, and the spiral clamps include an upper clamping jaw, a rotating fixed screw and a lower clamping jaw; The upper clamping jaw is clamped on the upper edge of the temperature measuring furnace cover and is fastened by rotating the fixing screw; the lower clamping jaw is used to clamp on the upper edge of the deposition furnace barrel.

9. A deposition furnace temperature uniformity measurement device according to any one of claims 1 to 7, characterized in that: The temperature measuring furnace cover is a double-layer water-cooled structure. There are two cooling water interfaces on the temperature measuring furnace cover, one cooling water interface is used for cooling water inlet, and the other cooling water interface is used for cooling water outlet.

10. A deposition furnace temperature uniformity measurement device according to any one of claims 1 to 7, characterized in that: At least one furnace cover lifting ring is arranged on the temperature measuring furnace cover, and the at least one furnace cover lifting ring is used to fix the lifting hook when lifting the temperature measuring furnace cover.

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