Product processing method and system, computer equipment and storage medium

By obtaining batch information of the products to be processed and determining their pollution types, the pollution control problem caused by different cleanliness requirements between different working steps has been solved in the semiconductor manufacturing industry, and a method of effectively avoiding cross-contamination and ensuring the yield of finished products is achieved.

CN119644928APending Publication Date: 2025-03-18BOE TECHNOLOGY GROUP CO LTD +2
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Patent Information

Application Number
CN202411545577.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-31
Publication Date
2025-03-18

AI Technical Summary

Technical Problem

In the semiconductor manufacturing industry, during the production line flow process of product batches, the cleanliness requirements for processing equipment and vehicles at different working steps are different, resulting in the pollution types being less likely to be effectively controlled, increasing the risk of cross-contamination.

Method used

By obtaining batch information of the products to be processed, determining the first type of pollution, and when the second type of pollution in the current step does not cover the first type of pollution, a cut-off instruction is generated to prevent the products to be processed in the current step, thereby avoiding cross-contamination.

Benefits of technology

It effectively avoids cross-contamination between the second pollutant type and the first pollutant type, ensures the yield of the finished product, and reduces the complexity and cost of pollution control.

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Abstract

The invention provides a product processing method and system, computer equipment and a storage medium, and belongs to the technical field of data processing and semiconductor manufacturing. The product processing method disclosed by the invention comprises the following steps: acquiring a to-be-processed product of a current working step; determining a first pollution type of the to-be-processed product according to the batch information of the to-be-processed product; under the condition that the second pollution type of the current working step does not cover the first pollution type, a cut-off instruction is generated to control the to-be-machined product not to be allowed to enter the current working step for machining; the second pollution type comprises an equipment pollution type corresponding to the target equipment; the target equipment is machining equipment used for machining the to-be-machined product in the current working step.
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