Ultra-clean collection device for electronic grade ultrapure water analysis
By designing an ultra-clean collection device integrating air purification and intelligent collection technology, the problems of high power consumption, low cleanliness and low efficiency of ultra-clean water sample collection equipment in the existing technology are solved, and efficient and clean ultra-pure water collection is achieved.
Patent Information
- Application Number
- CN202411710379.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-27
- Publication Date
- 2025-03-21
AI Technical Summary
The existing ultra-pure water sample collection equipment has problems such as high power consumption, low cleanliness of the water sample collection box, and low water sample collection efficiency, making it difficult to achieve efficient ultra-pure water collection under high cleanliness conditions.
An ultra-clean collection device including efficient filtering of suspended particles, aerosols, volatile organic matter, intelligent water sample collection component, and gas flow control module is designed. Through air purification and intelligent acquisition technology, efficient ultra-pure water collection is achieved.
It realizes efficient collection of ultrapure water under high cleanliness conditions, improves the efficiency and cleanliness of water sample collection, and reduces power consumption.
Smart Images
Figure CN119657239A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of ultra-clean sampling technology, and in particular to an ultra-clean collection device for electronic-grade ultra-pure water analysis, which is suitable for the rapid collection of effluent water from an electronic-grade ultra-pure water system in the semiconductor industry. Background Art
[0002] Electronic-grade ultrapure water is widely used in the cleaning process of electronic component production in the semiconductor industry. Since electronic components have high requirements for the content of metal ions in ultrapure water, accurate analysis of ultrapure water quality has become an important part of the semiconductor industry's production process. Ultrapure water collection is easily interfered with and contaminated by impurities in the sampling environment. However, existing ultraclean water sample collection equipment has problems such as high power consumption, low cleanliness of the water sample collection box, and low water sample collection efficiency. Optimizing the structure and water inlet method of the ultraclean sampler and achieving efficient collection of ultrapure water under high cleanliness conditions are currently hot topics of concern and research and development in the field of ultrapure water sampling technology. Therefore, the development of an ultraclean sampler that uses air as a clean gas source and has intelligent water sample collection is a breakthrough point for achieving accurate analysis of ultrapure water in the semiconductor industry. Summary of the invention
[0003] The purpose of the present invention is to provide an ultra-clean collection device for electronic grade ultrapure water analysis. The collection system is equipped with an air purification component for efficiently filtering suspended particulate matter, aerosols, and volatile organic compounds, an intelligent water sample collection component, a gas flow control module, etc., which solves the key technical problems of low cleanliness and low water sample collection efficiency in the ultrapure water collection process.
[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an ultra-clean collection device for electronic grade ultra-pure water analysis, comprising an ultra-clean sampler body, the sampling chamber body comprising a sampling chamber body, a gas control chamber body, an air purification chamber body and a discharge chamber body, a gas control chamber body is arranged on one side of the sampling chamber body, an air purification chamber body is arranged at the lower end of the gas control chamber body, a discharge chamber body is arranged at the lower end of the sampling chamber body, a water inlet is arranged on the top of the sampling chamber body, the water inlet is fixedly connected to the ultra-pure water sampling port, a sampling chamber sampling door is arranged on the other side of the sampling chamber body, a sampling and collection device is arranged at the lower end of the sampling chamber sampling door, a glove operation hole is arranged on the sampling and sampling device, the glove operation hole operates the sampling and sampling device, the gas control chamber body comprises a gas purge device, the gas purge device is connected to the sampling chamber body, the air purification chamber body comprises a filtering device, and the discharge chamber body comprises a discharge water pipe and a discharge air pipe.
[0005] The sampling device includes a sampling bottle, a porous plate is provided at the lower end of the sampling bottle, a groove is provided on the porous plate, the sampling bottle is fixed in the groove, the groove is arranged corresponding to the collection tube, a water quality detection probe is provided at the lower end of the collection tube, and a mechanical operating arm is provided on one side of the collection tube.
[0006] The mechanical operating arm includes a moving rod, a gripper is provided at the lower end of the moving rod, a slide groove is provided at the upper end of the moving rod, the moving rod is slidably connected in the slide groove, a moving motor is provided on the moving rod, the moving motor drives the moving rod to move, and an identification sensor is provided on the gripper, and the identification sensor identifies the identification contact on the sampling bottle.
[0007] The gripper is provided with a first claw rod, a second claw rod, a third claw rod and a fourth claw rod, and the first claw rod, the second claw rod, the third claw rod and the fourth claw rod are respectively provided with claw sleeves, and the claw sleeves are rubber claw sleeves.
[0008] A rotating device is provided at the lower end of the porous plate, and the rotating device includes a rotating plate. The rotating plate is provided on a circumferential support rotating frame of the sampling chamber body. The supporting rotating frame includes a first rotating seat, a second rotating seat, a third rotating seat and a fourth rotating seat. A rotating motor is provided at the lower end of the third rotating seat, and the rotating motor drives the porous plate to rotate. The mechanical operating arm places the sampling bottle in the groove and rotates it to the lower end of the collection tube through the porous plate.
[0009] The gas purge device comprises a purge port, a purge pipe is arranged at the purge port, the purge pipe runs through the sampling chamber body and the gas control chamber body, a gas flow meter is arranged in the gas control chamber body, and the gas flow meter is arranged at the lower end of the purge pipe.
[0010] The filtering device includes a multi-layer filter screen, and the multi-layer filter screen is layered from bottom to top. The upper and lower ends of the filter screen are respectively provided with a first barometer and a second barometer. The first barometer displays a value of P1, and the second barometer displays a value of P2. The pressure difference between the first barometer and the second barometer is Q1. When the pressure difference Q1 is greater than or equal to 0.5MPa, the warning light of the air purification room body lights up. The filter screen is composed of a cellulose filter membrane modified with polyglycolic acid and a long-acting activated carbon layer, and can remove suspended particulate matter, aerosols, volatile organic matter and moisture in the air.
[0011] The water quality detection probe can intelligently detect the conductivity, pH, dissolved oxygen and anion (Cl-, SO42-, NO3-, NO2-) concentration in water.
[0012] A telescopic glove is arranged in the glove operation hole, and the telescopic glove is arranged inside the sampling chamber body. A telescopic rod is arranged inside the sampling chamber, and the telescopic rod is installed on the inner wall of the sampling chamber. The telescopic rod is slidably connected to the telescopic glove. The telescopic glove includes a left glove and a right glove, and the position of the left glove is higher than that of the right glove.
[0013] Compared with the prior art, the present invention has the following beneficial effects:
[0014] 1. Use ultra-clean air to purge the collection room and discharge the original impurity gas from the sampling room to achieve an ultra-clean environment.
[0015] 2. Open the sampling bottle through the glove operation hole, turn on the water sample collection switch on the top of the sampling chamber, select different water inlet fluxes according to the needs of the water sample collection volume, and after the water sample collection indicator light changes color, tighten the sampling bottle through the robotic arm to complete the water sample collection.
[0016] 3. The setting of the steering wheel on the base makes it easier to move the device and improves the sampling efficiency of the device at different sampling points. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 The figure is a schematic diagram of the overall structure of the ultra-clean collection device for electronic grade ultra-pure water analysis of the present invention.
[0018] Figure 2 The figure is a schematic diagram of the internal structure of the ultra-clean collection device for electronic grade ultra-pure water analysis of the present invention.
[0019] Figure 3 It is a schematic diagram of the structural principle of the mechanical operating arm of the present invention.
[0020] Figure 4 It is a schematic diagram of the structural principle of the rotating device of the present invention.
[0021] Figure 5 It is a schematic diagram of the structural principle of the rotating plate and the supporting rotating frame of the present invention.
[0022] Figure 6 The figure is a schematic diagram of the structural principle of the telescopic gloves of the present invention.
[0023] Figure numerals: 1, sampling door of sampling chamber, 2, glove operation hole, 3, sampling chamber body, 4, collection tube, 5, discharge water pipe, 6, sampling bottle, 7, porous plate, 8, purge port, 9, gas flow meter, 10, gas control chamber body, 11, air purification chamber body, 12, water quality detection probe, 13, mechanical operation arm, 14, ultra-clean sampler body, 15, discharge chamber body, 16, sampling chamber body, 17, sampling and collection device, 18, gas purge device, 19, filter device, 20, discharge air pipe, 21, groove, 22, moving rod, 23, gripper, 24. Slide slot, 25. Moving motor, 26. Identification sensor, 27. First claw rod, 28. Second claw rod, 29. Third claw rod, 30. Fourth claw rod, 31. Claw sleeve, 32. Rotating device, 33. Rotating plate, 34. Supporting rotating frame, 35. First rotating seat, 36. Second rotating seat, 37. Third rotating seat, 38. Fourth rotating seat, 39. Rotating motor, 40. Purge port, 41. Purge pipe, 42. Multi-layer filter, 43. First barometer, 44. Second barometer, 45. Telescopic gloves, 46. Telescopic rod, 47. Left glove, 48. Right glove. DETAILED DESCRIPTION
[0024] The following content describes in detail the specific implementation of the present invention in conjunction with the accompanying drawings.
[0025] An ultra-clean collection device for electronic grade ultrapure water analysis, comprising an ultra-clean sampler body 14, wherein the sampling chamber body 14 comprises a sampling chamber body 16, a gas control chamber body 10, an air purification chamber body 11 and a discharge chamber body 15, wherein the gas control chamber body 10 is arranged on one side of the sampling chamber body, the air purification chamber body 11 is arranged at the lower end of the gas control chamber body 10, the discharge chamber body 15 is arranged at the lower end of the sampling chamber body 16, a water inlet is arranged on the top of the sampling chamber body 16, the water inlet is fixedly connected to the ultrapure water sampling port, a sampling chamber sampling door 1 is arranged on the other side of the sampling chamber body 16, a sampling device 17 is arranged at the lower end of the sampling chamber sampling door 1, and a glove operation hole 2 is arranged on the sampling device 17, and the glove operation hole 2 is operated The sampling device 17 is operated, the gas control chamber body 10 includes a gas purge device 18, and the gas purge device 18 is connected to the sampling chamber body 16. The air purification chamber body 11 includes a filtering device 19. The discharge chamber body 15 includes a discharge water pipe 5 and an exhaust air pipe 20. The lower end of the ultra-clean sampler body 14 is provided with a movable steering wheel; the sampling bottle cap is opened or tightened through the glove operation hole, and the sampling bottle position can be intelligently adjusted through the mechanical arm. The air inlet of the water sample collection chamber of the sampler is plugged with an air inlet pipe, and the air inlet pipe is connected to the air purification device. The outer wall of one side of the air purifier is fixed with a gas flow meter and a gas flow regulating device by bolts. The air purifier main body filtering structure is a cellulose filter membrane modified with polyglycolic acid and a long-acting activated carbon layer.
[0026] The sampling device 17 includes a sampling bottle 6, a porous plate 7 is provided at the lower end of the sampling bottle 6, a groove 21 is provided on the porous plate 7, the sampling bottle 6 is fixed in the groove 21, the groove 21 is arranged corresponding to the collection tube 4, a water quality detection probe 12 is provided at the lower end of the collection tube 4, and a mechanical operating arm 13 is provided on one side of the collection tube 4; the sampling device 17 is provided with a high-precision probe, which can dynamically analyze indicators such as pH, dissolved oxygen, conductivity and anion concentration in the water to remove particles, organic matter and moisture in the air, and the outer wall of one side of the gas cylinder chamber is fixed with a gas flow meter and a gas flow regulating device by bolts.
[0027] The mechanical operating arm 13 includes a moving rod 22, a gripper 23 is provided at the lower end of the moving rod 22, a slide groove 24 is provided at the upper end of the moving rod 22, the moving rod 22 is slidably connected in the slide groove 24, a moving motor 25 is provided on the moving rod 22, the moving motor 25 drives the moving rod 22 to move, and an identification touch sensor 26 is provided on the gripper 23, and the identification touch sensor 26 identifies the identification contact on the sampling bottle 6.
[0028] The gripper 23 is provided with a first claw rod 27, a second claw rod 28, a third claw rod 29 and a fourth claw rod 30, and the first claw rod 27, the second claw rod 28, the third claw rod 29 and the fourth claw rod 30 are respectively provided with claw sleeves 31, and the claw sleeves 31 are rubber claw sleeves.
[0029] A rotating device 32 is provided at the lower end of the porous plate 7, and the rotating device 32 includes a rotating plate 33. The rotating plate 33 is arranged on a circumferential supporting rotating frame 34 of the sampling chamber body 3. The supporting rotating frame 34 includes a first rotating seat 35, a second rotating seat 36, a third rotating seat 37 and a fourth rotating seat 38. A rotating motor 39 is provided at the lower end of the third rotating seat 37. The rotating motor 39 drives the porous plate 7 to rotate. The mechanical operating arm 13 places the sampling bottle 6 in the groove 21 and rotates it to the lower end of the collection tube 4 through the porous plate 7.
[0030] The gas purge device 18 includes a purge port 40, a purge pipe 41 is provided at the purge port 40, the purge pipe 41 passes through the sampling chamber body 16 and the gas control chamber body 10, a gas flow meter 9 is provided in the gas control chamber body 10, and the gas flow meter 9 is provided at the lower end of the purge pipe 41.
[0031] The filter device 19 includes a multi-layer filter screen 42, and the multi-layer filter screen 42 is layered from bottom to top. The upper and lower ends of the filter screen 42 are respectively provided with a first barometer 43 and a second barometer 44. The first barometer 43 displays a value of P1, and the second barometer 44 displays a value of P2. The pressure difference between the first barometer 43 and the second barometer 44 is Q1. When the pressure difference Q1 is greater than or equal to 0.5MPa, the warning light of the air purification chamber body 11 lights up. The filter screen 42 is composed of a cellulose filter membrane modified by polyglycolic acid and a long-lasting activated carbon layer, which can remove suspended particulate matter, aerosols, volatile organic matter and moisture in the air. The warning light in the air purification device can indicate the effective life of the activated carbon layer. When the activated carbon is saturated with adsorption, the color of the warning light changes, prompting the user to replace the activated carbon.
[0032] The water quality detection probe 12 can intelligently detect the conductivity, pH, dissolved oxygen and anion (Cl-, SO42-, NO3-, NO2-) concentration in the water. The water sample collection rate can be fed back through the liquid flow meter, the sampling bottle flushing time can be set through the program in the control room, and the water sample collection bottle can be replaced according to the color change of the water sample collection indicator light.
[0033] The control room of the ultra-clean sampler body 14 is equipped with an operation display screen by bolts, and the functional modules include adjusting the gas purge intensity and purge time, water sample flow rate, online detection probe accuracy, and robotic arm grabbing efficiency.
[0034] A telescopic glove 45 is arranged in the glove operation hole 2, and the telescopic glove 45 is arranged inside the sampling chamber body 16. A telescopic rod 46 is arranged inside the sampling chamber body 16, and the telescopic rod 46 is installed on the inner wall of the sampling chamber body 16. The telescopic rod 46 is slidably connected to the telescopic glove 45. The telescopic glove 45 includes a left glove 47 and a right glove 48, and the position of the left glove 47 is higher than that of the right glove 48.
[0035] Working principle: When in use, open the sampling door of the sampling chamber, put the sample bottle into the groove of the porous plate 7, turn on the power switch, and the air purification device uses a cellulose filter membrane modified with polyglycolic acid and a long-lasting activated carbon layer to remove suspended particulate matter, aerosols, volatile organic matter and moisture in the air, and pass the purified gas into the sampling chamber. Adjust the purge time and purge intensity through the display screen of the control panel, open the sample bottle through the glove hole, adjust the water sample flow rate, volume and sampling time, and dynamically analyze the conductivity, pH, dissolved oxygen and anion (Cl-, SO42-, NO3-, NO2-) concentration in the water through the probe. After waiting for the sampling prompt light to change color, collect the sample bottle through the robotic arm and take out the water sample from the sampling door of the sampling chamber.
[0036] The above is only a preferred embodiment of the present invention. It should be pointed out that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions are deemed to be within the scope of protection of the present invention.
Claims
1. An ultra-clean collection device for electronic grade ultra-pure water analysis, comprising an ultra-clean sampler body, characterized in that: The sampling chamber body includes a sampling chamber body, a gas control chamber body, an air purification chamber body and a discharge chamber body. A gas control chamber body is arranged on one side of the sampling chamber body, an air purification chamber body is arranged at the lower end of the gas control chamber body, and a discharge chamber body is arranged at the lower end of the sampling chamber body. A water inlet is arranged on the top of the sampling chamber body, and the water inlet is fixedly connected to the ultrapure water sampling port. A sampling chamber sampling door is arranged on the other side of the sampling chamber body, and a sampling device is arranged at the lower end of the sampling chamber sampling door. A glove operation hole is arranged on the sampling device, and the glove operation hole operates the sampling device. The gas control chamber body includes a gas purge device, and the gas purge device is connected to the sampling chamber body. The air purification chamber body includes a filtering device, and the discharge chamber body includes a discharge water pipe and a discharge air pipe.
2. The ultra-clean collection device for electronic grade ultrapure water analysis according to claim 1, characterized in that: The sampling device includes a sampling bottle, a porous plate is provided at the lower end of the sampling bottle, a groove is provided on the porous plate, the sampling bottle is fixed in the groove, the groove is arranged corresponding to the collection tube, a water quality detection probe is provided at the lower end of the collection tube, and a mechanical operating arm is provided on one side of the collection tube.
3. The ultra-clean collection device for electronic grade ultrapure water analysis according to claim 2, characterized in that: The mechanical operating arm includes a moving rod, a gripper is provided at the lower end of the moving rod, a slide groove is provided at the upper end of the moving rod, the moving rod is slidably connected in the slide groove, a moving motor is provided on the moving rod, the moving motor drives the moving rod to move, and an identification sensor is provided on the gripper, and the identification sensor identifies the identification contact on the sampling bottle.
4. The ultra-clean collection device for electronic grade ultra-pure water analysis according to claim 3, characterized in that: The gripper is provided with a first claw rod, a second claw rod, a third claw rod and a fourth claw rod, and the first claw rod, the second claw rod, the third claw rod and the fourth claw rod are respectively provided with claw sleeves, and the claw sleeves are rubber claw sleeves.
5. The ultra-clean collection device for electronic grade ultra-pure water analysis according to claim 3, characterized in that: A rotating device is provided at the lower end of the porous plate, and the rotating device includes a rotating plate. The rotating plate is provided on a circumferential support rotating frame of the sampling chamber body. The supporting rotating frame includes a first rotating seat, a second rotating seat, a third rotating seat and a fourth rotating seat. A rotating motor is provided at the lower end of the third rotating seat, and the rotating motor drives the porous plate to rotate. The mechanical operating arm places the sampling bottle in the groove and rotates it to the lower end of the collection tube through the porous plate.
6. The ultra-clean collection device for electronic grade ultra-pure water analysis according to claim 1, characterized in that: The gas purge device comprises a purge port, a purge pipe is arranged at the purge port, the purge pipe runs through the sampling chamber body and the gas control chamber body, a gas flow meter is arranged in the gas control chamber body, and the gas flow meter is arranged at the lower end of the purge pipe.
7. The ultra-clean collection device for electronic grade ultrapure water analysis according to claim 1, characterized in that: The filtering device includes a multi-layer filter screen, and the multi-layer filter screen is layered from bottom to top. The upper and lower ends of the filter screen are respectively provided with a first barometer and a second barometer. The first barometer displays a value of P1, and the second barometer displays a value of P2. The pressure difference between the first barometer and the second barometer is Q1. When the pressure difference Q1 is greater than or equal to 0.5MPa, the warning light of the air purification room body lights up. The filter screen is composed of a cellulose filter membrane modified with polyglycolic acid and a long-acting activated carbon layer, and can remove suspended particulate matter, aerosols, volatile organic matter and moisture in the air.
8. The ultra-clean collection device for electronic grade ultra-pure water analysis according to claim 2, characterized in that: The water quality detection probe can intelligently detect the conductivity, pH, dissolved oxygen and anion (Cl-, SO42-, NO3-, NO2-) concentration in water.
9. The ultra-clean collection device for electronic grade ultra-pure water analysis according to claim 1, characterized in that: A telescopic glove is arranged in the glove operation hole, and the telescopic glove is arranged inside the sampling chamber body. A telescopic rod is arranged inside the sampling chamber, and the telescopic rod is installed on the inner wall of the sampling chamber. The telescopic rod is slidably connected to the telescopic glove. The telescopic glove includes a left glove and a right glove, and the position of the left glove is higher than that of the right glove.