Cleaning method for rolling oil on alloy of mask plate

By adopting a comprehensive method of pre-cleaning, heat treatment, ultrasonic cleaning, alkaline washing, water washing, pickling and drying on Invar alloy, the problem of residual rolling oil on the surface and interior of the alloy is solved, which significantly improves the surface cleanliness and ensures the quality of subsequent processing.

CN119663292APending Publication Date: 2025-03-21ZHEJIANG ZHONGLING TECH CO LTD
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Patent Information

Application Number
CN202411905723.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-23
Publication Date
2025-03-21

AI Technical Summary

Technical Problem

In the cold rolling production of Invar alloys, the rolling oil may remain randomly on the surface and inside of the alloy, resulting in a degradation of the quality of subsequent etching processes, affecting the quality of the FMM opening and the display effect of the OLED panel.

Method used

A method including pre-cleaning, heat treatment, ultrasonic cleaning, alkaline washing, water washing, pickling and drying is used to clean the rolled oil on the surface of Inwa alloy. The specific steps include pre-cleaning with a concentration of 5% NaOH alkaline cleaning agent, heat treatment of circulating hot water, high-pressure air knife to remove moisture and grease, ultrasonic cleaning to remove internal grease, alkaline washing, water washing, acid washing to remove residues, and finally drying.

Benefits of technology

Through this method, the appearance of Inwa alloy is significantly improved, and there is no oil stains or dust residue on the surface. No abnormal elements are found in the component analysis, which improves the surface cleanliness and provides a good foundation for subsequent processing.

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Abstract

The invention provides a method for cleaning rolling oil on an alloy of a mask, and relates to the technical field of fine metal masks. The cleaning method for the rolling oil on the alloy of the mask plate comprises the following steps: pre-cleaning the invar alloy; the invar alloy is subjected to heat treatment after being cleaned, and the heat treatment temperature does not exceed 450 DEG C; and after heat treatment is completed, the cooled invar alloy is subjected to ultrasonic cleaning and then subjected to alkali washing, water washing, acid pickling and water washing, and then the cleaned invar alloy is dried. The technical effect of cleaning the rolling oil on the invar alloy is achieved.
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Description

Technical Field

[0001] The invention relates to the technical field of fine metal mask plates, in particular to a method for cleaning rolling oil on an alloy used for mask plates. Background Art

[0002] Fine Metal Mask (FMM) is a key link in the manufacturing of OLED panels. It is highly dependent on the low thermal expansion characteristics of Invar alloy to ensure the accuracy of the evaporation process of organic light-emitting materials. In the cold rolling production of Invar alloy, rolling oil plays a vital role. It not only significantly reduces the friction coefficient between the roller and the material, reduces energy consumption, and reduces the rolling force, but also acts as a cooling medium to effectively dissipate the heat generated during the rolling process, prevent overheating of the material, and protect its microstructure and performance, thereby improving production efficiency and stability. However, the use of rolling oil also brings challenges. The huge rolling force generated during the rolling process may cause rolling oil to randomly remain on the surface and inside of the Invar alloy. Since the rolling oil is similar in color to the surface of the Invar alloy, these residues are difficult to detect in visual inspection, especially the rolling oil remaining inside, which is more difficult to detect. The residual rolling oil may interfere with the subsequent etching process, forming a "dark spot" that affects the quality of the FMM opening, thereby affecting the performance of the evaporation process, and ultimately having a negative impact on the display effect of the OLED panel. Summary of the invention

[0003] The object of the present invention is to provide a method for cleaning rolling oil on an alloy of a mask plate, so as to alleviate the technical problem of the rolling oil on the Invar alloy not being cleaned thoroughly in the prior art.

[0004] In a first aspect, an embodiment of the present invention provides a method for cleaning rolling oil on an alloy of a mask, comprising the following steps:

[0005] Pre-cleaning of Invar alloy;

[0006] After cleaning, the Invar alloy is heat treated at a temperature not exceeding 450°C;

[0007] After the heat treatment is completed, the cooled Invar alloy is ultrasonically cleaned, then alkali-washed, acid-washed, and then the cleaned Invar alloy is dried.

[0008] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein the pre-cleaning includes using a 5% NaOH alkaline cleaning agent to dissolve the rolling oil on the surface of the Invar alloy by chemical and emulsification.

[0009] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein after pre-cleaning with a 5% NaOH alkaline cleaning agent, the Invar alloy is cleaned with circulating hot water, and the temperature of the circulating hot water is between 55° C. and 65° C.;

[0010] After hot water cleaning, use a high-pressure air knife to remove moisture and loose grease from the surface and gaps of the Invar alloy to prevent water spots and secondary contamination. The air pressure is between 0.03Mpa and 0.05Mpa.

[0011] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein, in the heat treatment stage, the Invar alloy is preheated and gradually heated to 300° C.;

[0012] After preheating, gradually heat the Invar alloy to 400°C and keep it warm;

[0013] After holding, the Invar alloy is rapidly cooled.

[0014] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein, in the preheating process of gradually heating the Invar alloy to 300° C., the heating time is 90 seconds.

[0015] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein, in the process of heating the Invar alloy to 400° C., the heating time is 60 seconds and the heat preservation time is 500 seconds.

[0016] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein, during the rapid cooling of the Invar alloy, the furnace temperature is set to room temperature, and inert gas is introduced for cooling, and the cooling time is 100 seconds.

[0017] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein after the heat-treated Invar alloy is ultrasonically cleaned, it is purged with an air flow at a pressure of 0.04 MPa.

[0018] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein the purged Invar alloy is alkaline washed with a 3% NaOH alkaline cleaning agent, and then washed with circulating hot water at a temperature of 60°C, and then pickled with a 2% HCL solution, and then washed with pure water at room temperature.

[0019] In combination with the first aspect, an embodiment of the present invention provides a possible implementation of the first aspect, wherein after being washed with pure water, the Invar alloy is dried at a drying temperature of 50°C.

[0020] Beneficial effects:

[0021] The invention provides a method for cleaning rolling oil on an alloy of a mask, comprising the following steps: pre-cleaning an Invar alloy; heat-treating the Invar alloy after cleaning, wherein the heat-treatment temperature does not exceed 450°C; after the heat-treatment is completed, ultrasonic cleaning is performed on the cooled Invar alloy, and then alkali cleaning-water cleaning-acid cleaning-water cleaning is performed, and then the cleaned Invar alloy is dried.

[0022] Specifically, the Invar alloy was cleaned using the cleaning method of rolling oil on the alloy of the mask. After cleaning, the appearance of the Invar alloy was significantly improved, and no oil stains, dust and dirt remained on the surface. Further composition analysis showed that no obvious abnormal elements were found, and the surface cleanliness was effectively improved, providing a good foundation for subsequent processing or analysis work. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic diagram showing a comparison of the surface of Invar alloy after and before cleaning using a method for cleaning rolling oil on an alloy of a mask provided in an embodiment of the present invention (the upper part of the figure shows after cleaning, and the lower part shows before cleaning);

[0025] Figure 2 A schematic diagram comparing the method for cleaning rolling oil on an alloy of a mask provided in an embodiment of the present invention with respect to Invar alloy before and after cleaning under an electron microscope (the upper part of the figure is after cleaning, and the lower part is before cleaning). DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] The present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0031] See also Figure 1 and Figure 2 As shown, this embodiment provides a method for cleaning rolling oil on an alloy used for a mask, comprising the following steps: pre-cleaning the Invar alloy; heat treating the Invar alloy after cleaning, with the heat treatment temperature not exceeding 450°C; after the heat treatment is completed, ultrasonically cleaning the cooled Invar alloy, and then performing alkali washing - water washing - acid washing - water washing, and then drying the cleaned Invar alloy.

[0032] Specifically, the Invar alloy was cleaned using the cleaning method of rolling oil on the alloy of the mask. After cleaning, the appearance of the Invar alloy was significantly improved, and no oil stains, dust and dirt remained on the surface. Further composition analysis showed that no obvious abnormal elements were found, and the surface cleanliness was effectively improved, providing a good foundation for subsequent processing or analysis work.

[0033] In an optional solution of this embodiment, the pre-cleaning includes using an alkaline cleaning agent of 5% NaOH to dissolve the rolling oil on the surface of the Invar alloy by means of formation and emulsification.

[0034] In an optional scheme of this embodiment, after pre-cleaning with a 5% NaOH alkaline cleaning agent, the Invar alloy is cleaned with circulating hot water, and the circulating hot water temperature is between 55°C and 65°C; after hot water cleaning, a high-pressure air knife is used to remove moisture and loose grease on the surface and in the gaps of the Invar alloy to prevent water spots and secondary contamination, and the air pressure is between 0.03Mpa and 0.05Mpa.

[0035] In an optional solution of this embodiment, during the heat treatment stage, the Invar alloy is preheated and gradually heated to 300°C; after the preheating is completed, the Invar alloy is gradually heated to 400°C and kept warm; after keeping warm, the Invar alloy is quickly cooled.

[0036] In an optional solution of this embodiment, during the preheating process of gradually heating the Invar alloy to 300° C., the heating time is 90 seconds.

[0037] In an optional solution of this embodiment, in the process of heating the Invar alloy to 400° C., the heating time is 60 seconds and the heat preservation time is 500 seconds.

[0038] In an optional solution of this embodiment, during the rapid cooling process of the Invar alloy, the furnace temperature is set to room temperature, and inert gas is introduced to cool the alloy for 100 seconds.

[0039] In an optional solution of this embodiment, after the heat-treated Invar alloy is ultrasonically cleaned, it is purged with an air flow at a pressure of 0.04 MPa.

[0040] In an optional scheme of this embodiment, the purged Invar alloy is alkaline washed with a 3% NaOH alkaline cleaning agent, and then washed with circulating hot water at a temperature of 60°C, and then pickled with a 2% HCL solution, and then washed with pure water at room temperature.

[0041] In an optional solution of this embodiment, after being washed with pure water, the Invar alloy is dried at a drying temperature of 50°C.

[0042] Specifically, the method for cleaning rolling oil on the alloy of the mask provided in this embodiment includes a pre-treatment cleaning stage, a vacuum furnace heat treatment purification stage and a precision cleaning final stage.

[0043] Among them, the pre-treatment cleaning stage includes alkaline cleaning: using NaOH alkaline cleaning agent (concentration 5%) to dissolve rolling oil through chemical and emulsification. Alkaline cleaning helps to break the oil film and prepare for the subsequent cleaning steps. Hot water cleaning: using circulating hot water (pure water, temperature 60°C) to further dissolve grease and help remove residues after alkaline cleaning. Air knife blowing: without damaging the Invar thin strip, use high-pressure (pressure 0.04Mpa) air knife to remove moisture and loose grease from the surface and gaps to prevent water spots and secondary pollution.

[0044] Among them, the vacuum furnace heat treatment purification stage includes preheating heat treatment: gradually heating the material to 300℃, and the preheating time is controlled within 90 seconds to reduce thermal stress and material deformation. Heating heat treatment: heating the material to 400℃, and the heating time is controlled within 60 seconds, so that the rolling oil is easier to detach from the micropores of Invar to promote the volatilization and thermal decomposition of oil. Insulation: maintaining high temperature for a period of time, the insulation time is controlled within 500 seconds to ensure that the oil is fully volatilized and the temperature inside the material is uniform. And rapid cooling treatment: by setting the furnace temperature to room temperature and using inert gas (nitrogen), the temperature of the surface of the Invar material is quickly reduced (the cooling process time is controlled within 100 seconds).

[0045] In addition, the final stage of precision cleaning includes ultrasonic cleaning: using the high-frequency vibration generated by the ultrasonic cleaning machine to further remove grease and residues in the microstructure of the Invar material. Air knife blowing: using the air knife (pressure 0.04Mpa) again to remove the moisture on the surface after ultrasonic cleaning. Alkaline cleaning: using NaOH alkaline cleaning agent (concentration 3%) to further remove the rolling oil (creation and emulsification reaction) that has been separated from the inside to ensure that the grease is completely removed. Hot water cleaning: using circulating hot water (pure water, temperature 60°C) to clean and remove residual cleaning agents and grease. Pickling cleaning: using HCl (2%) solution to neutralize and remove specific types of residues, such as foreign matter and stubborn stains in raw materials. Pure water cleaning: using pure water at room temperature for the final rinse to ensure that there is no chemical residue. Then oven drying: drying the material at 50°C to ensure uniform drying and avoid contamination. Finally, using a film thickness gauge to measure the thickness: testing the uniformity of the film thickness of the thin strip.

[0046] See also Figure 1 and Figure 2 As shown in the figure, before the rolling oil is removed, obvious oil stains and dust residues can be observed on the surface of Invar alloy. By analyzing the composition of this area, the presence of unexpected elements such as carbon (C) and oxygen (O) was detected. The type and content of these elements are similar to the composition of the dark spot area on the surface. Among them, the presence of the dark spot area indicates that there is a clear difference in roughness and composition here.

[0047] See also Figure 1 and Figure 2 As shown, after being treated by the method for cleaning rolling oil on the alloy for the mask provided in this embodiment, the appearance of the Invar alloy is significantly improved, and no oil stains, dust or dirt remain on the surface. Further component analysis shows that no obvious abnormal elements are found, which indicates that the surface cleanliness is effectively improved, providing a good basis for subsequent processing or analysis.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for cleaning rolling oil on an alloy for a mask, characterized in that: The following steps are involved: Pre-cleaning of Invar alloy; After cleaning, the Invar alloy is heat treated at a temperature not exceeding 450°C; After the heat treatment is completed, the cooled Invar alloy is ultrasonically cleaned, then alkali-washed, acid-washed, and then the cleaned Invar alloy is dried.

2. The method for cleaning rolling oil on an alloy for a mask according to claim 1, characterized in that: The pre-cleaning includes using a 5% NaOH alkaline cleaning agent to dissolve the rolling oil on the surface of the Invar alloy through chemical and emulsification.

3. The method for cleaning rolling oil on an alloy for a mask according to claim 2, characterized in that: After pre-cleaning with 5% NaOH alkaline cleaning agent, the Invar alloy is cleaned with circulating hot water, and the circulating hot water temperature is between 55°C and 65°C; After hot water cleaning, use a high-pressure air knife to remove moisture and loose grease from the surface and gaps of the Invar alloy to prevent water spots and secondary contamination. The air pressure is between 0.03Mpa and 0.05Mpa.

4. The method for cleaning rolling oil on an alloy for a mask according to claim 1, characterized in that: In the heat treatment stage, the Invar alloy is preheated and gradually heated to 300°C; After preheating, gradually heat the Invar alloy to 400°C and keep it warm; After holding, the Invar alloy is rapidly cooled.

5. The method for cleaning rolling oil on an alloy for a mask according to claim 4, characterized in that: In the preheating process of gradually heating the Invar alloy to 300° C., the heating time is 90 seconds.

6. The method for cleaning rolling oil on an alloy for a mask according to claim 4, characterized in that: In the process of heating the Invar alloy to 400° C., the heating time is 60 seconds and the heat preservation time is 500 seconds.

7. The method for cleaning rolling oil on an alloy for a mask according to claim 6, characterized in that: During the rapid cooling of the Invar alloy, the furnace temperature was set to room temperature, and inert gas was introduced for cooling for 100 seconds.

8. The method for cleaning rolling oil on an alloy for a mask according to claim 1, characterized in that: After the heat-treated Invar alloy is ultrasonically cleaned, it is purged with an air flow at a pressure of 0.04 MPa.

9. The method for cleaning rolling oil on an alloy for a mask according to claim 8, characterized in that: The purged Invar alloy is alkaline washed with 3% NaOH alkaline cleaning agent, then washed with circulating hot water at 60°C, then pickled with 2% HCL solution, then washed with pure water at room temperature.

10. The method for cleaning rolling oil on an alloy for a mask according to claim 9, characterized in that: After being washed with pure water, the Invar alloy is dried at a drying temperature of 50°C.