External counter-force measuring device based on stepping motion mechanism

Abstract

The invention provides an external counterforce measuring device based on a stepping motion mechanism, and relates to the technical field of semiconductor manufacturing equipment.The external counterforce measuring device based on the stepping motion mechanism comprises the stepping motion mechanism, a marble platform and a two-dimensional force sensor mechanism; the stepping motion mechanism comprises a supporting frame, a load, a Y-direction execution mechanism and an X-direction execution mechanism, the load is arranged on the Y-direction execution mechanism, the Y-direction execution mechanism is arranged on the X-direction execution mechanism, the X-direction execution mechanism is arranged on the supporting frame, the two-dimensional force sensor mechanism is arranged between the supporting frame and the marble platform, and the two-dimensional force sensor mechanism is arranged on the supporting frame. And a plurality of first air floatation holes are uniformly distributed in the marble platform. Compared with the prior art, the external counter-force measuring device based on the stepping motion mechanism can accurately measure the counter-force generated by the stepping motion mechanism on the mechanical installation interface of the foundation frame in the working process, and the motion and measurement precision of the stepping motion mechanism can be further ensured through calculation.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to an external reaction force measuring device based on a stepping motion mechanism. Background Art

[0002] The continuous development of the integrated circuit (IC) field has provided a solid foundation for technological progress in the information age. Photolithography machines are the core high-end equipment in integrated circuit manufacturing. In the course of more than 60 years of development, they have continuously challenged the limits of human ultra-precision manufacturing equipment, and promoted the continuous advancement of Moore's Law and the rapid development of the information age. The research and development of integrated circuit manufacturing equipment has far-reaching strategic significance for a country's scientific and technological strength and industrial competitiveness.

[0003] As the most core and technically difficult equipment in IC manufacturing, the lithography machine has developed from contact type, proximity type, etc. to the mainstream step-and-scan type. The step-and-scan lithography machine is composed of an optical projection lens system, a motion stage system, and an alignment system. Among them, the high-acceleration and high-precision motion stage system is one of the key subsystems for completing silicon wafer exposure. Its trajectory tracking performance and stability directly affect the production efficiency of the integrated circuit industry. However, the impact of the motion mechanism on the base frame during high-speed movement will lead to the deterioration of the motion measurement results, affecting the motion and measurement accuracy of the motion mechanism. Therefore, how to accurately measure the reaction force generated by the motion mechanism on the mechanical mounting interface of the base frame during operation has become an urgent problem to be solved. Summary of the invention

[0004] The problem to be solved by the present invention is: how to accurately measure the reaction force generated by the stepping motion mechanism on the mechanical installation interface of the base frame during its operation.

[0005] The present invention provides an external reaction force measurement device based on a stepping motion mechanism, comprising: a stepping motion mechanism, a marble platform and a two-dimensional force sensor mechanism, wherein the stepping motion mechanism comprises a supporting frame, a load, a Y-direction actuator and an X-direction actuator, wherein the load is arranged on the Y-direction actuator, the Y-direction actuator is arranged on the X-direction actuator, the X-direction actuator is arranged on the supporting frame, the supporting frame is arranged on the marble platform, a plurality of the two-dimensional force sensor mechanisms are arranged at intervals between the supporting frame and the marble platform, a plurality of first air flotation holes are evenly distributed on the end surface of the marble platform facing the supporting frame, and the first air flotation holes are used to form an air film between the supporting frame and the marble platform to float the supporting frame and the stepping motion mechanism.

[0006] The external reaction force measuring device based on the stepping motion mechanism provided by the present invention has, compared with the prior art, but is not limited to the following beneficial effects:

[0007] The external reaction force measuring device based on the stepping motion mechanism described in the present invention can be connected to the mechanical installation interface of the base frame at the four corners of the support frame respectively, and the load can be driven to realize two-dimensional plane movement in the Y direction and the X direction through the Y-direction actuator and the X-direction actuator. Relevant sensor devices are usually installed on the load. The Y-direction actuator and the X-direction actuator are used to drive the load to move to perform related work. In the initial state, the central axes of the load, the Y-direction actuator and the X-direction actuator coincide. When the load moves along the X-axis direction, the X-direction actuator needs to drive the load and the Y-direction actuator to move at the same time to realize the movement of the load along the X-axis direction. The stepping motion mechanism can adopt a stacked arrangement to realize the compact structure of the stepping motion mechanism. When the X-direction actuator and the Y-direction actuator drive the load to move, according to the law of conservation of momentum of the closed system, it can be known that at this time, the support frame will generate a reaction force on the mechanical installation interface of the base frame, thereby affecting the movement and measurement accuracy of the stepping motion mechanism. When the load moves and generates a reaction force on the mechanical installation interface of the base frame, the multiple two-dimensional force sensor mechanisms located between the support frame and the marble platform will detect the change in force, so that the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism can be obtained through the force detected by the multiple two-dimensional force sensor mechanisms; and, since the marble platform is evenly distributed with multiple first air flotation holes on the end surface facing the support frame, the first air flotation holes are used to form an air film between the support frame and the marble platform to float the stepping motion mechanism. At this time, on the one hand, there is no contact between the support frame and the marble platform under the action of air flotation, and no friction is generated between the two, thereby avoiding the influence of friction between the two on the measurement accuracy of the two-dimensional force sensor mechanism, and on the other hand, it can avoid that the entire gravity of the stepping motion mechanism falls on the two-dimensional force sensor mechanism, and can reduce the influence of the overall gravity of the stepping motion mechanism on the detection accuracy of the multiple two-dimensional force sensor mechanisms, so that the change in force detected by the multiple two-dimensional force sensor mechanisms is closer to the force generated by the support frame on the mechanical installation interface of the base frame, thereby accurately measuring the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism. Compared with the prior art, the external reaction force measuring device based on the stepping motion mechanism of the present invention can accurately measure the reaction force generated on the mechanical installation interface of the basic frame during the operation of the stepping motion mechanism, and can further ensure the movement and measurement accuracy of the stepping motion mechanism through calculation.

[0008] Optionally, the two X-axis actuators are relatively arranged on both sides of the supporting frame, and the X-axis actuator includes an X-layer frame, an X-axis linear motor, an X-axis linear guide and a first slider, the X-axis linear guide is arranged on the supporting frame, the first slider is slidably connected to the X-axis linear guide, the X-layer frame is connected to the first slider, the X-layer frame is located above the marble platform, the X-axis linear motor includes a first U-shaped magnetic steel and a first coil, the first U-shaped magnetic steel is connected to the supporting frame, and the first coil is connected to the X-layer frame.

[0009] Optionally, the X-axis actuator also includes a first connecting frame, a second connecting frame, an X-axis grating scale and a first reading head, one end of the first connecting frame is connected to the first coil, and the other end is connected to the X-layer frame, the second connecting frame is connected to the supporting frame, the first reading head is arranged on the first connecting frame, the X-axis grating scale is arranged on the second connecting frame, and the first reading head is used to read the scale on the X-axis grating scale.

[0010] Optionally, the two Y-axis actuators are relatively arranged on both sides of the support frame, and the Y-axis actuator includes a Y-axis linear motor, a Y-axis linear guide and a second slider, the Y-axis linear guide is arranged on the X-layer frame, the second slider is slidably connected to the Y-axis linear guide, the load is connected to the second slider, the Y-axis linear motor includes a second U-shaped magnet and a second coil, the second U-shaped magnet is connected to the load, and the second coil is connected to the X-layer frame.

[0011] Optionally, the Y-axis actuator also includes a third connecting frame, a fourth connecting frame, a Y-axis grating scale and a second reading head, the third connecting frame is connected between the load and the second slider, the second U-shaped magnetic steel is connected to the third connecting frame, the fourth connecting frame is connected to the X-layer frame, the Y-axis grating scale is arranged on the third connecting frame, the second reading head is arranged on the fourth connecting frame, and the second reading head is used to read the scale on the Y-axis grating scale.

[0012] Optionally, the two-dimensional force sensor mechanism includes a two-dimensional force sensor, a height adjustment member and a flange connection plate, wherein two ends of the two-dimensional force sensor are respectively connected to the height adjustment member and the marble platform, one end of the flange connection plate is connected to the height adjustment member, and the other end is connected to the support frame.

[0013] Optionally, the two-dimensional force sensor mechanism also includes a bearing, the height adjustment member includes a threaded protrusion and a nut structure threadedly connected to the threaded protrusion, the threaded protrusion is connected to the two-dimensional force sensor, the bearing is mounted on the flange connecting plate, the flange connecting plate is connected to the outer ring of the bearing, and the nut structure is connected to the inner ring of the bearing.

[0014] Optionally, a plurality of second air flotation holes are evenly distributed on the end surface of the load facing the marble platform, and the second air flotation holes are used to form an air film between the load and the marble platform.

[0015] Optionally, a plurality of third air flotation holes are evenly distributed on the end surface of the X-layer frame facing the marble platform, and the third air flotation holes are used to form an air film between the X-layer frame and the marble platform.

[0016] Optionally, the marble platform is of a rectangular structure, grooves are respectively provided at the four corners of the marble platform, and the two-dimensional force sensor mechanism is correspondingly arranged at each groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A three-dimensional diagram of an external reaction force measuring device based on a step-by-step motion mechanism according to an embodiment of the present invention;

[0018] Figure 2 A side view of the external reaction force measuring device based on the stepping motion mechanism according to an embodiment of the present invention Figure 1 ;

[0019] Figure 3 for Figure 2 A partial enlarged view of the middle part;

[0020] Figure 4 A side view of the external reaction force measuring device based on the stepping motion mechanism according to an embodiment of the present invention Figure 2 ;

[0021] Figure 5 for Figure 4 A partial enlarged view of point B in the middle;

[0022] Figure 6 is a schematic structural diagram of a two-dimensional force sensor mechanism according to an embodiment of the present invention;

[0023] Figure 7 for Figure 6 Middle CC section view;

[0024] Figure 8 A schematic diagram of the structure of an X-layer framework according to an embodiment of the present invention;

[0025] Fig. 9 is a schematic diagram of the structure of a load according to an embodiment of the present invention;

[0026] Fig.10 Schematic diagram of the structure of a marble platform according to an embodiment of the present invention.

[0027] Description of reference numerals:

[0028] 1. Support frame; 2. Marble platform; 21. First air-floating hole; 3. Two-dimensional force sensor mechanism; 31. Two-dimensional force sensor; 32. Height adjustment member; 321. Threaded protrusion; 322. Nut structure; 33. Flange connection plate; 34. Bearing; 4. Load; 41. Second air-floating hole; 5. X-axis actuator; 51. X-layer frame; 511. Third air-floating hole; 52. X-axis linear motor; 521. First U-shaped magnetic steel; 522 , the first coil; 53, X-axis linear guide; 54, the first slider; 55, the first connecting frame; 56, the second connecting frame; 57, the X-axis grating ruler; 58, the first reading head; 6, the Y-axis actuator; 61, the Y-axis linear motor; 611, the second U-shaped magnet; 612, the second coil; 62, the Y-axis linear guide; 63, the second slider; 64, the third connecting frame; 65, the fourth connecting frame; 66, the Y-axis grating ruler; 67, the second reading head. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] In the description of the present invention, the directions or positional relationships indicated by “up”, “down”, “left”, “right”, “top”, “bottom”, “front”, “back”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention. They do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the scope of protection of the present invention.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the description of this specification, the description with reference to the terms "embodiment", "one embodiment" and "one implementation" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or implementation are included in at least one embodiment or implementation of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or implementation. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or implementations in a suitable manner.

[0033] Moreover, the Z-axis in the accompanying drawings represents the vertical direction, that is, the up and down position, and the positive direction of the Z-axis (that is, the direction of the arrow of the Z-axis) represents the top, and the negative direction of the Z-axis (that is, the direction opposite to the positive direction of the Z-axis) represents the bottom; the X-axis in the accompanying drawings represents the horizontal direction, that is, the left and right position, and the positive direction of the X-axis (that is, the direction of the arrow of the X-axis) represents the right, and the negative direction of the X-axis (that is, the direction opposite to the positive direction of the X-axis) represents the left; the Y-axis in the accompanying drawings represents the longitudinal direction, that is, the front and back position, and the positive direction of the Y-axis (that is, the direction of the arrow of the Y-axis) represents the front, and the negative direction of the Y-axis (that is, the direction opposite to the positive direction of the Y-axis) represents the back.

[0034] It should also be noted that the aforementioned Z-axis, X-axis and Y-axis are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] like Figures 1 to 2 As shown, the external reaction force measuring device based on the stepping motion mechanism of the embodiment of the present invention includes: a stepping motion mechanism, a marble platform 2 and a two-dimensional force sensor mechanism 3, the stepping motion mechanism includes a support frame 1, a load 4, a Y-axis actuator 6 and an X-axis actuator 5, the load 4 is arranged on the Y-axis actuator 6, the Y-axis actuator 6 is arranged on the X-axis actuator 5, the X-axis actuator 5 is arranged on the support frame 1, the support frame 1 is arranged on the marble platform 2, a plurality of the two-dimensional force sensor mechanisms 3 are arranged at intervals between the support frame 1 and the marble platform 2, and a plurality of first air flotation holes 21 are evenly distributed on the end surface of the marble platform 2 facing the support frame 1, the first air flotation holes 21 are used to form an air film between the support frame 1 and the marble platform 2 to float the support frame 1 and the stepping motion mechanism.

[0036] In this embodiment, combined with the attached Figure 1 As shown, the four corners of the support frame 1 can be connected to the mechanical installation interface of the base frame respectively, and the load 4 can be driven to realize the Y direction (attached Figure 1 Y-axis direction) and X-axis direction (attached Figure 1 The two-dimensional plane (with X-axis direction) Figure 1 The load 4 moves in the plane where the X-axis and Y-axis are located. Related sensors are usually installed on the load 4. The Y-axis actuator 6 and the X-axis actuator 5 are used to drive the load 4 to move to perform related work. In the initial state, the central axes of the load 4, the Y-axis actuator 6 and the X-axis actuator 5 coincide. When the load moves along the X-axis direction, the X-axis actuator 5 needs to drive the load 4 and the Y-axis actuator 6 to move at the same time to realize the movement of the load 4 along the X-axis direction. The stepping motion mechanism can adopt a stacked arrangement to achieve a compact structure of the stepping motion mechanism. When the X-axis actuator 3 and the Y-axis actuator 2 drive the load 1 to move, according to the law of conservation of momentum of the closed system, it can be known that at this time, the support frame 1 will generate a reaction force on the mechanical installation interface of the basic frame, thereby affecting the movement and measurement accuracy of the stepping motion mechanism.

[0037] In the external reaction force measurement device of the present embodiment, when the load 1 moves and causes a reaction force to be generated on the mechanical installation interface of the base frame, the multiple two-dimensional force sensor mechanisms 3 located between the support frame 1 and the marble platform 2 will detect the change in force, so that the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism can be obtained through the forces detected by the multiple two-dimensional force sensor mechanisms 3; and, since the marble platform 2 has multiple first air flotation holes 21 evenly distributed on the end surface facing the support frame 1, the first air flotation holes 21 are used to form an air film between the support frame 1 and the marble platform 2 to float the stepping motion mechanism. At this time, on the one hand, the support frame 1 There is no contact between the two-dimensional force sensor mechanism 3 and the marble platform 2 under the action of air buoyancy, and no friction is generated between the two, thereby avoiding the influence of the friction between the two on the measurement accuracy of the two-dimensional force sensor mechanism 3. On the other hand, it can avoid that the entire gravity of the stepping motion mechanism falls on the two-dimensional force sensor mechanism 3, and can reduce the influence of the overall gravity of the stepping motion mechanism on the detection accuracy of multiple two-dimensional force sensor mechanisms 3, so that the change of the force detected by the multiple two-dimensional force sensor mechanisms 3 is closer to the force generated by the support frame 1 on the mechanical installation interface of the base frame, thereby accurately measuring the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism. Compared with the prior art, the external reaction force measurement device based on the stepping motion mechanism of the present invention can accurately measure the reaction force generated on the mechanical installation interface of the base frame during the operation of the stepping motion mechanism, and can further ensure the movement and measurement accuracy of the stepping motion mechanism through calculation.

[0038] In addition, combined with Fig. 9As shown, the marble platform 2 as a whole can be a rectangular two-level stepped structure, wherein a first air duct is opened on the marble platform 2, and a plurality of first air flotation holes 21 connected to the first air duct are evenly distributed on the first step surface of the marble platform 2. The second step surface of the marble platform 2 is the upper end surface of the marble platform 2, and the support frame 1 is a rectangular frame structure. The support frame 1 can be mounted on the marble platform 2, and the first step surface of the marble platform 2 is in contact with the support frame 1.

[0039] In addition, the external reaction force measurement device based on the stepping motion mechanism of this embodiment also includes an air supply device for providing compressed air. A gas channel connected to multiple first air flotation holes 21 is provided on the marble platform 2, and the air supply device is used to transport compressed air into the gas channel.

[0040] Optionally, the two X-axis actuators 5 are relatively arranged on both sides of the support frame 1, and the X-axis actuator 5 includes an X-layer frame 51, an X-axis linear motor 52, an X-axis linear guide 53 and a first slider 54, the X-axis linear guide 53 is arranged on the support frame 1, the first slider 54 is slidably connected to the X-axis linear guide 53, the X-layer frame 51 is connected to the first slider 54, the X-layer frame 51 is located above the marble platform 2, the X-axis linear motor 52 includes a first U-shaped magnetic steel 521 and a first coil 522, the first U-shaped magnetic steel 521 is connected to the support frame 1, and the first coil 522 is connected to the X-layer frame 51.

[0041] In this embodiment, combined with the attached Figure 2 and attached Figure 3 As shown, the two X-direction actuators 5 are arranged opposite to each other (see Figure 2 The X-axis direction is on both sides of the support frame 1, the X-layer frame 51 is placed on the upper end surface of the marble platform 2, and the X-direction linear guide 53 is along the attached Figure 1 The X-axis direction is laid on the support frame 1, the X-layer frame 51 is slidably connected to the X-direction linear guide 53 through the first slider 54, the first U-shaped magnetic steel 521 of the X-direction linear motor 52 is fixedly connected to the support frame 1, and the first coil 522 is fixedly connected to the X-layer frame 51. When the X-direction linear motor 52 is powered on, the first coil 522 will move relative to the first U-shaped magnetic steel 521 along the attached Figure 1 The X-axis moves in the middle, thereby driving the X-layer frame 51 to move.

[0042] Optionally, the X-axis actuator 5 also includes a first connecting frame 55, a second connecting frame 56, an X-axis grating scale 57 and a first reading head 58, one end of the first connecting frame 55 is connected to the first coil 522, and the other end is connected to the X-layer frame 51, the second connecting frame 56 is connected to the supporting frame 1, the first reading head 58 is arranged on the first connecting frame 55, the X-axis grating scale 57 is arranged on the second connecting frame 56, and the first reading head 58 is used to read the scale on the X-axis grating scale 57.

[0043] In this embodiment, combined with the attached Figure 3 As shown, the cross-section of the first connecting frame 55 is a Z-shaped structure, one end of which can be connected to the X-layer frame 51 by bolts, and the other end can be connected to the first coil 522 by bolts. The cross-section of the second connecting frame 56 is a C-shaped structure, and the second connecting frame 56 can be connected to the supporting frame 1 by bolts. The first reading head 58 can be connected to the first connecting frame 55 by bolts, and the X-axis grating scale 57 can be connected to the second connecting frame 56 by bolts. The first reading head 58 is used to read the scale on the X-axis grating scale 57 to facilitate the measurement of the displacement distance.

[0044] Optionally, the two Y-axis actuators 6 are relatively arranged on both sides of the support frame 1, and the Y-axis actuator 6 includes a Y-axis linear motor 61, a Y-axis linear guide 62 and a second slider 63. The Y-axis linear guide 62 is arranged on the X-layer frame 51, and the second slider 63 is slidably connected to the Y-axis linear guide 62. The load 4 is connected to the second slider 63. The Y-axis linear motor 61 includes a second U-shaped magnet 611 and a second coil 612. The second U-shaped magnet 611 is connected to the load 4, and the second coil 612 is connected to the X-layer frame 51.

[0045] In this embodiment, combined with the attached Figure 4 and attached Figure 5 As shown, the two Y-direction actuators 6 are arranged opposite to each other (see Figure 4 In the X-axis direction) on both sides of the support frame 1, the Y-axis linear guide rails 62 are arranged along the attached Figure 1 The load 4 is slidably connected to the Y-axis linear guide 62 through the second slider 63. The second U-shaped magnetic steel 611 of the Y-axis linear motor 61 is fixedly connected to the load 4. The second coil 612 is fixedly connected to the X-layer frame 51. When the Y-axis linear motor 61 is powered on, the second U-shaped magnetic steel 611 will move relative to the second coil 612 along the attached Figure 1 The middle Y-axis moves, thereby driving the load 4 to move.

[0046] Optionally, the Y-axis actuator 6 also includes a third connecting frame 64, a fourth connecting frame 65, a Y-axis grating scale 66 and a second reading head 67, the third connecting frame 64 is connected between the load 4 and the second slider 63, the second U-shaped magnetic steel 611 is connected to the third connecting frame 64, the fourth connecting frame 65 is connected to the X-layer frame 51, the Y-axis grating scale 66 is arranged on the third connecting frame 64, the second reading head 67 is arranged on the fourth connecting frame 65, and the second reading head 67 is used to read the scale on the Y-axis grating scale 66.

[0047] In this embodiment, combined with the attached Figure 5 As shown, the cross-section of the third connecting frame 64 is a Z-shaped structure, one end of which can be connected to the load 4 by bolts, and the other end can be connected to the second slider 63 by bolts. The cross-section of the fourth connecting frame 65 is an L-shaped structure, and the fourth connecting frame 65 can be connected to the X-layer frame 51 by bolts. The second reading head 67 can be connected to the fourth connecting frame 65 by bolts, and the Y-axis grating scale 66 can be connected to the third connecting frame 64 by bolts. The second reading head 67 is used to read the scale on the Y-axis grating scale 66 to facilitate the measurement of the displacement distance.

[0048] Optionally, the two-dimensional force sensor mechanism 3 includes a two-dimensional force sensor 31, a height adjustment member 32 and a flange connection plate 33, the two ends of the two-dimensional force sensor 31 are respectively connected to the height adjustment member 32 and the marble platform 2, one end of the flange connection plate 33 is connected to the height adjustment member 32, and the other end is connected to the support frame 1.

[0049] In this embodiment, combined with the attached Figure 1 and attached Fig. 9 As shown, the marble platform 2 is a rectangular structure, and grooves are respectively provided at the four corners of the marble platform 2, and the two-dimensional force sensor mechanism 3 is correspondingly provided at each groove. Figure 6 As shown, the two-dimensional force sensor mechanism 3 includes a two-dimensional force sensor 31, a height adjustment member 32 and a flange connection plate 33. The upper and lower ends of the two-dimensional force sensor 31 (attached Figure 6 The height adjustment member 32 and the marble platform 2 can be connected to each other through screws (in the Z-axis direction), and the height adjustment member 32 is connected to the flange connection plate 33 above, and the flange connection plate 33 can be connected to the support frame 1 through screws. When the stepping motion mechanism generates a reaction force on the marble platform 2, the reaction force acts on the two-dimensional force sensor 31, causing the resistance strain gauge inside the sensor to deform, thereby measuring the magnitude and direction of the force.

[0050] Optionally, the two-dimensional force sensor mechanism 3 also includes a bearing 34, the height adjustment member 32 includes a threaded protrusion 321 and a nut structure 322 threadedly connected to the threaded protrusion 321, the threaded protrusion 321 is connected to the two-dimensional force sensor 31, the bearing 34 is installed on the flange connecting plate 33, the flange connecting plate 33 is connected to the outer ring of the bearing 34, and the nut structure 322 is connected to the inner ring of the bearing 34.

[0051] In this embodiment, combined with the attached Figure 7 As shown, a flange can be installed at the upper end of the two-dimensional force sensor 31, wherein a threaded protrusion 321 can be connected to the upper end surface of the flange by screws, and the bearing 34 installed on the flange connecting plate 33 can be a cylindrical roller bearing, and the nut structure 322 is interference-connected with the inner ring of the cylindrical roller bearing, and the nut structure 322 is threadedly connected to the threaded protrusion 321 to facilitate adjustment of the distance between the flange connecting plate 33 and the two-dimensional force sensor 31. Moreover, under the action of the bearing 34, when the nut structure 322 is rotated, the flange connecting plate 33 does not rotate with the nut structure 322, which can ensure that the connecting hole on the flange connecting plate 33 and the connecting hole on the support frame 1 remain coaxial and do not affect the docking between the two.

[0052] Optionally, a plurality of second air flotation holes 41 are evenly distributed on the end surface of the load 4 facing the marble platform 2 , and the second air flotation holes 41 are used to form an air film between the load 4 and the marble platform 2 .

[0053] In this embodiment, combined with the attached Figure 8 As shown, the load 4 includes a flat plate structure and a cylindrical structure connected to each other, wherein the flat plate structure is used to connect with the mechanical installation interface of the base frame, the cylindrical structure is provided with a second air passage, and a plurality of second air flotation holes 41 connected with the second air passage are evenly distributed on the end surface of the cylindrical structure facing the marble platform 2, and the second air flotation holes 41 are used to form an air film between the load 4 and the marble platform 2, thereby performing gravity unloading on the load 4 and eliminating deformation of the load 4 caused by the gravity of the load 4. Specifically, in combination with the attached Figure 8 As shown, four connecting plates are protruding outward from the flat plate structure of the load 4, and the connecting plates are used to connect with the Y-axis actuator 6. Except for the four connecting plates, the other parts are in a suspended state and are not supported. Therefore, the connecting plates are subjected to concentrated force and are prone to deformation. By gravity unloading the load 4, the deformation of the connecting plates caused by the gravity of the load 4 can be eliminated.

[0054] Optionally, a plurality of third air flotation holes 511 are evenly distributed on the end surface of the X-layer frame 51 facing the marble platform 2 , and the third air flotation holes 511 are used to form an air film between the X-layer frame 51 and the marble platform 2 .

[0055] In this embodiment, combined with the attached Figure 7 As shown, the X-layer frame 51 is an overall rectangular frame structure, and a third air channel is opened on the X-layer frame 51. A plurality of third air flotation holes 511 connected to the third air channel are evenly distributed on the end surface of the X-layer frame 51 facing the marble platform 2. The third air flotation holes 511 are used to form an air film between the X-layer frame 51 and the marble platform 2 to reduce the influence of external vibration on the stepping motion mechanism, avoid contact between the X-layer frame 51 and the marble platform 2 due to external vibration, prevent friction between the X-layer frame 51 and the marble platform 2, ensure the stability of the X-layer frame 51 driving the load to move, and further ensure the measurement accuracy of the external reaction force measuring device.

[0056] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0057] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. An external reaction force measuring device based on a stepping motion mechanism, characterized in that: include: A stepping motion mechanism, a marble platform (2) and a two-dimensional force sensor mechanism (3), wherein the stepping motion mechanism comprises a support frame (1), a load (4), a Y-axis actuator (6) and an X-axis actuator (5), wherein the load (4) is arranged on the Y-axis actuator (6), the Y-axis actuator (6) is arranged on the X-axis actuator (5), the X-axis actuator (5) is arranged on the support frame (1), the support frame (1) is arranged on the marble platform (2), a plurality of the two-dimensional force sensor mechanisms (3) are arranged at intervals between the support frame (1) and the marble platform (2), a plurality of first air flotation holes (21) are evenly distributed on the end surface of the marble platform (2) facing the support frame (1), and the first air flotation holes (21) are used to form an air film between the support frame (1) and the marble platform (2) to float the support frame (1) and the stepping motion mechanism.

2. The external reaction force measuring device based on the stepping motion mechanism according to claim 1 is characterized in that: The two X-direction actuators (5) are arranged on opposite sides of the support frame (1). The X-direction actuator (5) comprises an X-layer frame (51), an X-direction linear motor (52), an X-direction linear guide rail (53) and a first slider (54). The X-direction linear guide rail (53) is arranged on the support frame (1). The first slider (54) is slidably connected to the X-direction linear guide rail (53). The X-layer frame (51) is connected to the first slider (54). The X-layer frame (51) is located above the marble platform (2). The X-direction linear motor (52) comprises a first U-shaped magnetic steel (521) and a first coil (522). The first U-shaped magnetic steel (521) is connected to the support frame (1), and the first coil (522) is connected to the X-layer frame (51).

3. The external reaction force measuring device based on the stepping motion mechanism according to claim 2 is characterized in that: The X-axis actuator (5) also includes a first connecting frame (55), a second connecting frame (56), an X-axis grating ruler (57) and a first reading head (58), wherein one end of the first connecting frame (55) is connected to the first coil (522), and the other end is connected to the X-layer frame (51), the second connecting frame (56) is connected to the supporting frame (1), the first reading head (58) is arranged on the first connecting frame (55), the X-axis grating ruler (57) is arranged on the second connecting frame (56), and the first reading head (58) is used to read the scale on the X-axis grating ruler (57).

4. The external reaction force measuring device based on the stepping motion mechanism according to claim 2 is characterized in that: The two Y-axis actuators (6) are arranged on both sides of the support frame (1) opposite to each other. The Y-axis actuator (6) comprises a Y-axis linear motor (61), a Y-axis linear guide rail (62) and a second slider (63). The Y-axis linear guide rail (62) is arranged on the X-layer frame (51). The second slider (63) is slidably connected to the Y-axis linear guide rail (62). The load (4) is connected to the second slider (63). The Y-axis linear motor (61) comprises a second U-shaped magnetic steel (611) and a second coil (612). The second U-shaped magnetic steel (611) is connected to the load (4). The second coil (612) is connected to the X-layer frame (51).

5. The external reaction force measuring device based on the stepping motion mechanism according to claim 4 is characterized in that: The Y-axis actuator (6) also includes a third connecting frame (64), a fourth connecting frame (65), a Y-axis grating ruler (66) and a second reading head (67), wherein the third connecting frame (64) is connected between the load (4) and the second slider (63), the second U-shaped magnetic steel (611) is connected to the third connecting frame (64), the fourth connecting frame (65) is connected to the X-layer frame (51), the Y-axis grating ruler (66) is arranged on the third connecting frame (64), the second reading head (67) is arranged on the fourth connecting frame (65), and the second reading head (67) is used to read the scale on the Y-axis grating ruler (66).

6. The external reaction force measuring device based on the stepping motion mechanism according to claim 1 is characterized in that: The two-dimensional force sensor mechanism (3) comprises a two-dimensional force sensor (31), a height adjustment member (32) and a flange connection plate (33); two ends of the two-dimensional force sensor (31) are respectively connected to the height adjustment member (32) and the marble platform (2); one end of the flange connection plate (33) is connected to the height adjustment member (32), and the other end is connected to the support frame (1).

7. The external reaction force measuring device based on the stepping motion mechanism according to claim 6 is characterized in that: The two-dimensional force sensor mechanism (3) also includes a bearing (34), the height adjustment member (32) includes a threaded protrusion (321) and a nut structure (322) threadedly connected to the threaded protrusion (321), the threaded protrusion (321) is connected to the two-dimensional force sensor (31), the bearing (34) is mounted on the flange connection plate (33), the flange connection plate (33) is connected to the outer ring of the bearing (34), and the nut structure (322) is connected to the inner ring of the bearing (34).

8. The external reaction force measuring device based on a stepping motion mechanism according to claim 1 is characterized in that: A plurality of second air flotation holes (41) are evenly distributed on the end surface of the load (4) facing the marble platform (2), and the second air flotation holes (41) are used to form an air film between the load (4) and the marble platform (2).

9. The external reaction force measuring device based on a stepping motion mechanism according to claim 2 is characterized in that: A plurality of third air flotation holes (511) are evenly distributed on the end surface of the X-layer frame (51) facing the marble platform (2), and the third air flotation holes (511) are used to form an air film between the X-layer frame (51) and the marble platform (2).

10. The external reaction force measuring device based on a stepping motion mechanism according to claim 1, characterized in that: The marble platform (2) is of a rectangular structure, and grooves are respectively provided at the four corners of the marble platform (2), and the two-dimensional force sensor mechanism (3) is correspondingly arranged at each groove.

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