A vision inspection device for semiconductor module packaging

Abstract

The present invention discloses a vision detection device for semiconductor module packaging, which relates to the technical field of semiconductor detection and includes a base. A moving component is slidably connected to the top end of the base, and a synchronous belt is rotatably arranged on the inner wall of the base. The top end of the synchronous belt is fixedly connected to the bottom end of the moving component. The moving component includes a sliding seat, and two lower bins are communicated with the bottom end of the sliding seat. A gasbag is communicated with the side wall of each group of lower bins. In the present invention, the synchronous belt pushes the sliding seat to move, so that the sliding seat stretches the gasbag, thereby generating negative pressure inside the gasbag, enabling the air flow to pass above the chip and driving the dust to be inhaled into the gasbag, so that the dust outside the chip packaging is sucked away, avoiding misjudgment in the subsequent vision detection process, preventing unnecessary losses in the process of producing chips, improving the yield rate, reducing the cost, and improving the chip production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor detection, and specifically to a vision detection device for semiconductor module packaging. Background Art

[0002] A semiconductor module is a device that uses a certain semiconductor material as the working substance to generate stimulated emission. It is a part of a semiconductor laser. Semiconductor packaging refers to the process of processing wafers that have passed testing into independent chips according to product models and functional requirements. Vision detection is to use a machine to replace the human eye for measurement and judgment. Vision detection refers to converting the captured target into an image signal through a machine vision product and transmitting it to a dedicated image processing system. It has inestimable value in detecting defects and preventing defective products from being delivered to consumers. Therefore, packaged semiconductors usually need to be inspected by a vision detection device to determine their quality.

[0003] A vision detection device for semiconductor module packaging disclosed in a prior patent (Publication No.: CN118299292B), belonging to the technical field of vision detection, includes a main body module, a drive module, two vision detection modules, and a air supply module. The main body module includes a detection frame, and the bottom of the inner wall of the detection frame is rotatably connected to an annular bottom plate. The drive module includes two lifting components both arranged on the top of the annular bottom plate. A hollow ring is fixedly connected between the tops of the two lifting components. Through the settings of a rotation component, a color-changing lens, a switching disk, a switching component, a ball, and a limiting component, during the process of performing circumferential vision detection on the semiconductor module, different light sources can be continuously switched to supplement light for the semiconductor module to cope with different materials and metals on the semiconductor module, facilitating the highlighting of surface defects of different materials and metals, thereby improving the accuracy of vision detection of this device.

[0004] However, the above technical solution still has certain defects. After the chip is packaged, when the chip moves inside the device, dust in the air will fall on the outer package of the chip, resulting in the dust particles on the outer package being misjudged as defects on the chip by the vision detection instrument main body during subsequent vision detection, leading to misjudgment phenomena during the production process. For this reason, a vision detection device for semiconductor module packaging is proposed. Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. For this purpose, the present invention proposes a vision detection device for semiconductor module packaging, which can avoid misjudgment during subsequent vision detection, prevent unnecessary losses during the production of chips, and improve the yield.

[0006] A vision detection device for semiconductor module packaging provided by an embodiment of the present invention includes a base, a moving component is slidably connected to the top end of the base, a synchronous belt is rotatably arranged on the inner wall of the base, and the top end of the synchronous belt is fixedly connected to the bottom end of the moving component;

[0007] The moving component includes a sliding seat, two lower bins are communicated with the bottom end of the sliding seat, one airbag is communicated with the side wall of each group of lower bins, a second flap is hinged at the connection of the airbag and the lower bin, a first flap is hinged at the end of the airbag far from the lower bin, an opening is arranged at the connection of the airbag and the first flap, a dust suction head is arranged at the top end of the sliding seat, the dust suction head is communicated to the inside of the lower bin, and the bottom end of the sliding seat is fixedly connected to the top end of the synchronous belt.

[0008] According to some embodiments of the present invention, a fixed block is slidably sleeved on the top end of the sliding seat, a groove is arranged at the contact position of the sliding seat and the fixed block, two magnetic strips are fixedly connected to the top end of the sliding seat, the magnetic strips are tightly adsorbed on the bottom end of the fixed block, the lower bin is communicated to the inside of the groove, a chip is arranged at the top end of the fixed block, and two racks are fixedly connected to the bottom end of the sliding seat.

[0009] According to some embodiments of the present invention, a blanking mechanism is arranged at one end of the base, the blanking mechanism includes two toothed discs, the two toothed discs are rotatably connected to the side wall of the base, one rotating arm is fixedly connected to the side wall of each group of toothed discs, the ends of the two rotating arms are rotatably connected to a hoisting plate, and the top end of the hoisting plate is communicated to an air pump.

[0010] According to some embodiments of the present invention, a plurality of suction heads are communicated with the bottom end of the hoisting plate, a sleeve is sleeved on the outer wall of each suction head, a silica gel pad is fixedly connected to the bottom end of the sleeve, a plurality of sliders extending into the suction head are fixedly connected to the inner wall of the sleeve, and a first spring is fixedly connected to the top end of each slider, and the top end of the first spring is fixedly connected to the inner wall of the suction head.

[0011] According to some embodiments of the present invention, two clamping blocks are slidably connected to the top end of each group of fixed blocks, one second spring is fixedly connected to the side wall of each group of clamping blocks, and the end of each second spring is fixedly connected to the inner wall of the fixed block.

[0012] According to some embodiments of the present invention, a detection mechanism is fixedly connected to the top end of the base, the detection mechanism includes two fixed sleeves, a plurality of guide pipes are fixedly connected to the inner wall of each group of fixed sleeves, a light collecting cover is communicated with the top ends of the plurality of guide pipes, and a vision detector main body is fixedly sleeved on the inner wall of the light collecting cover.

[0013] According to some embodiments of the present invention, a group of first refractive mirrors are respectively fixedly connected to the inner walls of each group of the conduits, a second refractive mirror is fixedly connected to the inner wall of the conduit and is located beside the first refractive mirror, and two groups of LED lamp beads are fixedly connected to the position near the bottom end of the inner wall of the conduit.

[0014] According to some embodiments of the present invention, an elastic strip is slidably sleeved at the bottom end of the fixing sleeve, and a plurality of groups of lenses are fixedly connected to the outer wall of the elastic strip, and the lenses are attached to the bottom end of the fixing sleeve.

[0015] According to some embodiments of the present invention, a rotating sleeve is rotatably connected to the bottom end of the fixing sleeve, a motor is fixedly connected to the bottom end of the fixing sleeve, the output end of the motor is fixedly connected to the bottom end of the rotating sleeve, and a plurality of groups of sliding rods are slidably sleeved on the inner wall of the rotating sleeve.

[0016] According to some embodiments of the present invention, one end of the sliding rod extends to the outer wall of the rotating sleeve, the end of the sliding rod outside the rotating sleeve is hinged to the side wall of the lens, and one end of the sliding rod inside the rotating sleeve is fixedly connected with a telescopic spring, and the end of the telescopic spring is fixedly connected to the inside of the rotating sleeve.

[0017] In summary, the present invention mainly has the following beneficial effects:

[0018] 1. In the present invention, the synchronous belt is used to push the sliding seat to move, so that the sliding seat stretches the airbag, thereby generating negative pressure inside the airbag, enabling the air flow to pass above the chip and driving the dust to be inhaled into the airbag, so that the dust outside the chip package is sucked away, avoiding misjudgment during subsequent visual inspection, preventing unnecessary losses during the chip production process, improving the yield rate, reducing costs, and improving the chip production efficiency;

[0019] 2. In the present invention, the sliding seat drives the rack, so that the toothed disk drives the rotating arm to flip, so that the suction head fits on the top of the chip, and the silicone pad fits on the PCB board of the chip, taking the chip off the moving component, and the blanking component does not contact the package of the chip, preventing the chip from being damaged during the blanking process, and the visual inspection device can be connected to the subsequent processing device through the conveyor belt, so that the chip can be quickly and efficiently blanked through the blanking mechanism after visual inspection, further improving the chip production efficiency;

[0020] 3. In the present invention, the light from two groups of LED lamp beads irradiates on the top of the chip through the lens. By aligning different lenses with the catheter, lights of different colors irradiate on the outside of the chip. The first refracting mirror and the second refracting mirror are used to refract the light, enabling the main body of the vision detector to detect multiple groups of chips simultaneously, making the detection efficiency higher. During the above process, the main body of the vision detector is sleeved inside the light collecting cover, preventing dust particles in the air from adhering to the lens of the main body of the vision detector and avoiding misjudgment during the detection process. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the following description of the embodiments in conjunction with the accompanying drawings, where:

[0022] Figure 1 is the front view structural schematic diagram of the embodiment of the present invention;

[0023] Figure 2 is the bottom view structural schematic diagram of the embodiment of the present invention;

[0024] Figure 3 is the bottom view structural schematic diagram of the sliding seat of the embodiment of the present invention;

[0025] Figure 4 is the sectional structural schematic diagram of the lower bin of the embodiment of the present invention;

[0026] Figure 5 is the structural schematic diagram of the state where the suction head is attached to the chip of the embodiment of the present invention;

[0027] Figure 6 is the sectional structural schematic diagram of the suction head and the fixing block of the embodiment of the present invention;

[0028] Figure 7 is the sectional structural schematic diagram of the airbag of the embodiment of the present invention;

[0029] Figure 8 is the bottom view structural schematic diagram of the detection mechanism of the embodiment of the present invention;

[0030] Figure 9 is the exploded structural schematic diagram of the detection mechanism of the embodiment of the present invention;

[0031] Figure 10 is the first sectional structural schematic diagram of the detection mechanism of the embodiment of the present invention;

[0032] Figure 11 is the second sectional structural schematic diagram of the detection mechanism of the embodiment of the present invention;

[0033] Figure 12 is the sectional structural schematic diagram of the rotating sleeve of the embodiment of the present invention.

[0034] In the figure: 1. Base; 2. Moving component; 3. Material discharging mechanism; 4. Detection mechanism; 5. Synchronous belt;

[0035] 201. Sliding seat; 202. Fixed block; 203. Chip; 204. Dust suction head; 205. Lower bin; 206. Airbag; 207. First flap; 208. Second flap; 209. Magnetic strip;

[0036] 301. Tooth disc; 302. Rotary arm; 303. Hoisting plate; 304. Suction head; 305. Sleeve; 306. Slide block; 307. First spring; 308. Clamping block; 309. Second spring; 310. Silicone pad; 311. Rack;

[0037] 401. Fixed sleeve; 402. Conduit; 403. Light collecting cover; 404. First refracting mirror; 405. Second refracting mirror; 406. LED lamp bead; 407. Visual detector main body; 408. Elastic strip; 409. Lens; 410. Rotating sleeve; 411. Slide bar; 412. Telescopic spring; 413. Motor. Detailed implementation mode

[0038] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0039] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0040] In the description of the present invention, the meaning of several is one or more, the meaning of multiple is more than two, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0041] In the description of the present invention, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0042] The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments:

[0043] A vision inspection device for semiconductor module packaging provided by the present invention, as Figures 1 to 12 shown, includes a base 1. A moving component 2 is slidably connected to the top end of the base 1. A synchronous belt 5 is rotatably arranged on the inner wall of the base 1. The top end of the synchronous belt 5 is fixedly connected to the bottom end of the moving component 2;

[0044] The moving component 2 includes a sliding seat 201. Two lower chambers 205 are communicated with the bottom end of the sliding seat 201. A group of air bags 206 are respectively communicated with the side walls of each group of lower chambers 205. A second flap 208 is hinged at the connection of the air bag 206 and the lower chamber 205. A first flap 207 is hinged at one end of the air bag 206 away from the lower chamber 205. An opening is provided at the connection of the air bag 206 and the first flap 207. A dust suction head 204 is arranged at the top end of the sliding seat 201. The dust suction head 204 is communicated to the inside of the lower chamber 205. The bottom end of the sliding seat 201 is fixedly connected to the top end of the synchronous belt 5. A fixing block 202 is slidably sleeved on the top end of the sliding seat 201. A groove is provided at the position where the sliding seat 201 contacts the fixing block 202. Two magnetic strips 209 are fixedly connected to the top end of the sliding seat 201. The magnetic strips 209 are tightly adsorbed on the bottom end of the fixing block 202. The lower chamber 205 is communicated to the inside of the groove. A chip 203 is arranged at the top end of the fixing block 202. Two racks 311 are fixedly connected to the bottom end of the sliding seat 201.

[0045] The sliding seat 201 is pushed by the synchronous belt 5 to slide on the top of the base 1, so that the sliding seat 201 slides from one end of the base 1 to the other end. During the process of the sliding seat 201 moving towards the detection mechanism 4, the sliding seat 201 pulls the airbag 206, causing the airbag 206 to be deployed, thereby generating a negative pressure inside the airbag 206. At this time, the second flap 208 flips open, so that the negative pressure inside the airbag 206 sucks external air into the airbag 206, allowing the air to pass over the surface of the chip 203 and taking away the dust on the surface of the chip 203. Then these airflows enter the inside of the dust suction head 204, and then enter the airbag 206. After the chip 203 is removed by the blanking mechanism 3, the synchronous belt 5 pushes the sliding seat 201 to slide back in the reverse direction, so that the sliding seat 201 compresses the airbag 206, thereby generating a high-pressure state inside the airbag 206, causing the second flap 208 to close, and at this time the first flap 207 is pushed by the air pressure to flip open, so that the air is discharged from the inside of the airbag 206. The fixing block 202 is adsorbed on the top of the sliding seat 201 through the magnetic strip 209, so that the corresponding fixing block 202 can be quickly replaced when visually detecting chips 203 of different models. During the movement of the sliding seat 201, the negative pressure inside the lower bin 205 causes the negative pressure to generate an adsorption force on the fixing block 202, so that the fixing seat is separated from the sliding seat 201 during the visual detection process, resulting in damage to the chip 203.

[0046] Please refer specifically to Figure 1 、 Figure 2 、 Figure 3 、 Figure 5 and Figure 6 At one end of the base 1, there is a blanking mechanism 3. The blanking mechanism 3 includes two groups of toothed discs 301. The two groups of toothed discs 301 are rotatably connected to the side wall of the base 1. A group of rotating arms 302 are respectively fixedly connected to the side walls of each group of toothed discs 301. The ends of the two groups of rotating arms 302 are rotatably connected to a hoisting plate 303. The top of the hoisting plate 303 is communicated with an air pump, and the bottom of the hoisting plate 303 is communicated with multiple suction heads 304. A set of sleeves 305 are respectively sleeved on the outer walls of each group of suction heads 304. A silica gel pad 310 is fixedly connected to the bottom of the sleeve 305. Multiple sliders 306 extending into the inside of the suction head 304 are fixedly connected to the inner wall of the sleeve 305. Two groups of clamping blocks 308 are respectively slidably connected to the top of each group of fixing blocks 202. A group of second springs 309 are respectively fixedly connected to the side walls of each group of clamping blocks 308, and the ends of each group of second springs 309 are fixedly connected to the inner wall of the fixing block 202.

[0047] After the sliding seat 201 passes through the detection mechanism 4, the sliding seat 201 continues to move in the direction of the blanking mechanism 3, so that the sliding seat 201 drives the rack 311 to engage with the gear disk 301, thereby pushing the gear disk 301 to rotate. During the rotation of the gear disk 301, the rotating arm 302 is driven to turn over, so that the rotating arm 302 drives the lifting plate 303 to turn over. And because the center of gravity of the lifting plate 303 itself is relatively low, the suction head 304 always faces downward. Then, as the rotating arm 302 turns over, the lifting plate 303 is reversed above the sliding seat 201, so that the sleeve 305 contacts the chuck. Then, as the lifting plate 303 continues to press down, the suction head 304 compresses the first spring 307. When the first spring 307 is compressed to the limit, the downward pressure of the suction head 304 is transmitted to the top of the slider 306, thereby pushing the sleeve 305 downward to push the chuck, so that the chuck slides on the top of the fixed block 202 and compresses the second spring 309. When the bottom end of the sleeve 305 fits on the top of the fixed block 202, at this time the silica gel pad 310 fits on the top of the PCB of the chip 203. Under the action of the air pump, suction is generated inside the suction head 304, so that the chip 203 is sucked, and the chuck is blocked by the sleeve 305 and does not generate a clamping force on the chip 203. Then, when the sliding seat 201 slides back and resets in the reverse direction, the sliding seat 201 drives the rack 311 to move in the reverse direction, thereby causing the gear disk 301 to rotate in the reverse direction, so that the rotating arm 302 turns over in the reverse direction, and the lifting plate 303 turns over in the reverse direction. During the rising process of the lifting plate 303, the first spring 307 gradually rebounds, so that the sleeve 305 is always located between the two sets of clamping blocks 308, and the chip 203 slides into the sleeve 305 under the drive of the suction head 304. When the slider 306 slides to the bottom end of the inner wall of the suction head 304 and cannot slide any further, the slider drives the sleeve 305 to rise, so that the sleeve 305 is separated from the two sets of clamping blocks 308, thereby causing the second spring 309 to rebound and push the clamping blocks 308 to reset.

[0048] Please refer particularly to Figure 1 、 Figure 2 、 Figure 8 、 Figure 9 、 Figure 10 、 Figure 11 and Figure 12, a detection mechanism 4 is fixedly connected to the top end of the base 1. The detection mechanism 4 includes two groups of fixing sleeves 401. The inner wall of each group of fixing sleeves 401 is fixedly connected with multiple groups of conduits 402. The top ends of the multiple groups of conduits 402 communicate with a light collecting cover 403. A vision detector main body 407 is provided on the inner wall fixing sleeve 401 of the light collecting cover 403. A group of first refracting mirrors 404 are respectively fixedly connected to the inner walls of each group of conduits 402. A second refracting mirror 405 is fixedly connected to the inner wall of the conduit 402 beside the first refracting mirror 404. Two groups of LED lamp beads 406 are fixedly connected to the inner wall of the conduit 402 near the bottom end. An elastic strip 408 is slidably sleeved on the bottom end of the fixing sleeve 401. Multiple groups of lenses 409 are fixedly connected to the outer wall of the elastic strip 408. The lenses 409 are attached to the bottom end of the fixing sleeve 401. A rotating sleeve 410 is rotatably connected to the bottom end of the fixing sleeve 401. A motor 413 is fixedly connected to the bottom end of the fixing sleeve 401. The output end of the motor 413 is fixedly connected to the bottom end of the rotating sleeve 410. Multiple groups of sliding rods 411 are slidably sleeved on the inner wall of the rotating sleeve 410. One end of the sliding rod 411 extends to the outer wall of the rotating sleeve 410. The end of the sliding rod 411 outside the rotating sleeve 410 is hinged to the side wall of the lens 409. One end of the sliding rod 411 inside the rotating sleeve 410 is fixedly connected with a telescopic spring 412. The end of the telescopic spring 412 is fixedly connected to the inside of the rotating sleeve 410.

[0049] When the sliding seat 201 drives the chip 203 to pass under the detection mechanism 4, the synchronous belt 5 stops, enabling the chip 203 to have sufficient time to be detected. The light of the LED lamp beads 406 passes through the lens 409 and irradiates on the surface of the chip 203. Since the color of the lens 409 is different, the light passing through the lens 409 presents corresponding colors, thus facilitating detection under different light conditions. The motor 413 drives the rotating sleeve 410 to rotate, causing the rotating sleeve 410 to drive the sliding rod 411 to rotate, and then the sliding rod 411 drives the lens 409 to rotate. During the rotation of the lens 409, the elastic strip 408 slides at the bottom of the fixed sleeve 401, enabling the lens 409 to accurately rotate to the bottom of the conduit 402. During the rotation of the lens 409, since the position of the lens 409 is restricted by the elastic strip 408, the distance between the lens 409 and the rotating sleeve 410 changes, causing the sliding rod 411 to slide out of the rotating sleeve 410, thereby compressing the telescopic spring 412. When the distance between the lens 409 and the rotating sleeve 410 decreases, the telescopic spring 412 rebounds, and at this time, the sliding rod 411 slides into the interior of the rotating sleeve 410, ensuring that the sliding rod 411 can always push the lens 409 to rotate during the rotation of the rotating sleeve 410 driven by the motor 413. After the light irradiates on the surface of the chip 203, it is reflected back into the conduit 402. After being refracted by the first refracting mirror 404 and the second refracting mirror 405, the light is captured by the vision detector main body 407, enabling the vision detector main body 407 to collect and analyze the image information of multiple groups of chips 203 simultaneously, improving the detection efficiency.

[0050] During use, by pushing the sliding seat 201 to move through the synchronous belt 5, the sliding seat 201 stretches the airbag 206, generating negative pressure inside the airbag 206, causing the air flow to pass above the chip 203 and driving the dust to be inhaled into the airbag 206. Thus, the dust outside the package of the chip 203 is sucked away, avoiding misjudgment during subsequent vision detection, preventing unnecessary losses during the production of the chip 203, improving the yield rate, reducing costs, and enhancing the production efficiency of the chip 203. The parts not involved in this device are the same as or can be implemented using existing technologies.

[0051] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art in the technical field, various changes can be made without departing from the purpose of the present invention.

Claims

1. A visual inspection device for semiconductor module packaging, comprising a base (1), characterized in that: The top end of the base (1) is slidably connected to a moving assembly (2), the inner wall of the base (1) is rotatably provided with a synchronous belt (5), and the top end of the synchronous belt (5) is fixedly connected to the bottom end of the moving assembly (2); The moving assembly (2) comprises a sliding seat (201), the bottom end of the sliding seat (201) is connected to two groups of lower warehouse bodies (205), the side walls of each group of the lower warehouse bodies (205) are respectively connected to a group of air bags (206), the air bags (206) are hingedly connected to a second flap (208) at the connection point with the lower warehouse bodies (205), the end of the air bags (206) away from the lower warehouse bodies (205) is hingedly connected to a first flap (207), the air bags (206) are provided with an opening at the connection point with the first flap (207), the top end of the sliding seat (201) is provided with a dust collector head (204), the dust collector head (204) is connected to the interior of the lower warehouse bodies (205), and the bottom end of the sliding seat (201) is fixedly connected to the top end of the synchronous belt (5); The top sliding sleeve of the sliding seat (201) is provided with a fixed block (202); the sliding seat (201) is provided with a groove at a position where it contacts the fixed block (202); the top of the sliding seat (201) is fixedly connected with two groups of magnetic strips (209); the magnetic strips (209) are tightly adsorbed on the bottom of the fixed block (202); the lower compartment (205) is connected to the inside of the groove; the top of the fixed block (202) is provided with a chip (203); and the bottom of the sliding seat (201) is fixedly connected with two groups of racks (311); A feeding mechanism (3) is provided at one end of the base (1), the feeding mechanism (3) comprising two groups of toothed discs (301), the two groups of toothed discs (301) being rotatably connected to the side walls of the base (1), the side walls of each group of toothed discs (301) being respectively fixedly connected to a group of rotating arms (302), the ends of the two groups of rotating arms (302) being rotatably connected to a hanging plate (303), the top end of the hanging plate (303) being connected to an air pump; The sliding seat (201) moves in the direction of the material discharge mechanism (3), so that the sliding seat (201) drives the rack (311) to mesh with the toothed disc (301), thereby driving the toothed disc (301) to rotate; The bottom end of the hanging plate (303) is connected to a plurality of groups of suction heads (304), the outer wall of each group of the suction heads (304) is respectively sleeved with a group of sleeves (305), the bottom end of the sleeves (305) is fixedly connected to a silicone pad (310), the inner wall of the sleeves (305) is fixedly connected to a plurality of slide blocks (306) extending into the interior of the suction heads (304), the top end of each group of the slide blocks (306) is respectively fixedly connected to a group of first springs (307), and the top end of the first springs (307) is fixedly connected to the inner wall of the suction heads (304).

2. The visual inspection device for semiconductor module packaging according to claim 1, characterized in that: The top of each group of the fixed blocks (202) is slidably connected to two groups of clamping blocks (308), the side walls of each group of the clamping blocks (308) are fixedly connected to a group of second springs (309), and the ends of each group of the second springs (309) are fixedly connected to the inner wall of the fixed block (202).

3. The visual inspection device for semiconductor module packaging according to claim 1, characterized in that: The top of the base (1) is fixedly connected to a detection mechanism (4), the detection mechanism (4) comprising two groups of fixed sleeves (401), the inner wall of each group of the fixed sleeves (401) being fixedly connected to a plurality of groups of conduits (402), the tops of the plurality of groups of conduits (402) being connected to a light collecting cover (403), the inner wall fixed sleeve (401) of the light collecting cover (403) being provided with a visual detector body (407).

4. The visual inspection device for semiconductor module packaging according to claim 3, characterized in that: The inner wall of each group of the conduits (402) is respectively fixedly connected to a group of first refractors (404), the inner wall of the conduits (402) is fixedly connected to a second refractor (405) located next to the first refractors (404), and the inner wall of the conduits (402) is fixedly connected to two groups of LED lamp beads (406) at the bottom end.

5. The visual inspection device for semiconductor module packaging according to claim 3, characterized in that: The bottom sliding sleeve of the fixed sleeve (401) is provided with an elastic strip (408), and the outer wall of the elastic strip (408) is fixedly connected to a plurality of groups of lenses (409), and the lenses (409) are attached to the bottom end of the fixed sleeve (401).

6. The visual inspection device for semiconductor module packaging according to claim 3, characterized in that: The bottom end of the fixed sleeve (401) is rotatably connected to a rotating sleeve (410), the bottom end of the fixed sleeve (401) is fixedly connected to a motor (413), the output end of the motor (413) is fixedly connected to the bottom end of the rotating sleeve (410), and the inner wall sliding sleeve of the rotating sleeve (410) is provided with a plurality of groups of sliding rods (411).

7. The visual inspection device for semiconductor module packaging according to claim 6, characterized in that: One end of the sliding rod (411) extends to the outer wall of the rotating sleeve (410), the end of the sliding rod (411) located outside the rotating sleeve (410) is hinged to the side wall of the lens (409), and the end of the sliding rod (411) located inside the rotating sleeve (410) is fixedly connected to a telescopic spring (412), and the end of the telescopic spring (412) is fixedly connected to the inside of the rotating sleeve (410).

Images