Spark plasma discharge circuit

Abstract

According to the spark plasma discharge circuit provided by the invention, the charging current provided by the direct-current high-voltage power supply is transmitted to the spark circuit formed by connecting a plurality of sparks in series and / or in parallel through the resistor, so that each spark in the spark circuit is independently discharged; the spark electrode materials are subjected to atomic-scale mixing in a small space, and multi-element particles are formed; the energy of single spark discharge is controlled through a capacitor connected in parallel with each spark in the spark circuit and a spark electrode distance, and the discharge frequency of the spark is controlled through a parallel / series resistor. According to the invention, independent discharge of multiple sparks can be realized, mixing of multiple materials is realized, and the energy and frequency of each discharge spark can be controlled, so that regulation and control of the yield of particles of each discharge spark as well as element mixing and composition regulation and control of the materials in the particles can be realized.

Description

Technical Field

[0001] The invention relates to the technical field of atomic and nanometer-scale particle manufacturing, in particular to a spark plasma discharge circuit. Background Art

[0002] Spark discharge discharges by self-radicalizing the gas between electrodes at high voltage. The high-energy plasma pulse formed bombards the electrodes to obtain an atomic vapor cloud containing electrode materials. The electrode materials are then dissolved at the atomic level under high-speed cooling to form particles containing positive and negative electrode materials. The mixing ratio of the materials of the two discharge electrodes can be adjusted by controlling the pulse and electrode polarity. The size of the mixed particles can be as small as atomic clusters, which is a very high-quality method for manufacturing small nanoparticles.

[0003] However, in the existing spark discharge technology, there are the following three problems:

[0004] 1. Low output. Although the particle size produced by spark discharge is extremely small, its output is low and it is difficult to achieve large-scale production.

[0005] 2. The effective power is low. In the spark discharge circuit, only a small part of the power is used for spark discharge, and most of the power energy is consumed in the heat generated by the resistor.

[0006] 3. The mixed materials are limited because the spark is discharged through the positive and negative electrodes, and the pulsed plasma can only melt the materials of the two discharge electrodes and mix the elements. For three or more electrodes, it is impossible to obtain nano-alloy particles with three or more electrode elements mixed. Summary of the invention

[0007] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a spark plasma discharge circuit for solving the technical problems of the prior art spark discharge technology such as low output, low effective power and limited mixed materials.

[0008] To achieve the above-mentioned purpose and other related purposes, the present invention provides a spark plasma discharge circuit, the circuit comprising: a DC high-voltage power supply, a resistor, a spark circuit composed of multiple sparks connected in series and / or in parallel, and a capacitor; wherein each spark is connected in parallel with at least one capacitor; the DC high-voltage power supply is connected to a resistor, and the resistor is connected to the spark circuit; the spark circuit uses a variety of spark electrode materials; the charging current provided by the DC high-voltage power supply is transmitted to the spark circuit through the resistor, so that each spark in the spark circuit is discharged independently, so that each spark electrode material is mixed at the atomic level in a small space to form mixed particles of multiple elements; the energy of a single spark discharge of each spark is controlled by controlling the capacitor connected in parallel with each spark in the spark circuit and the spark electrode spacing, and the discharge frequency is controlled by controlling the current flowing through each spark, and finally the total element yield of each spark is controlled to adjust the element content.

[0009] In one embodiment of the present invention, the spark circuit includes a plurality of spark branches connected in series or a plurality of spark branches connected in parallel; wherein each spark branch includes: one or more sparks.

[0010] In one embodiment of the present invention, each spark in each of the series-connected spark branches is connected in parallel with a resistor, so that the discharge frequency of each spark is controlled by utilizing the resistor connected in parallel with each spark.

[0011] In one embodiment of the present invention, each of the spark branches connected in parallel is respectively connected in series with a resistor, so that the discharge frequency of the spark branch can be controlled by utilizing the resistor connected in series with the spark branch.

[0012] In one embodiment of the present invention, the one or more spark branches connected in parallel include: a plurality of sparks connected in series.

[0013] In one embodiment of the present invention, the corresponding spark can be turned off by reducing the resistance of the spark in parallel in the series spark branch to a preset value.

[0014] In one embodiment of the present invention, the breakdown pressure of the corresponding spark discharge is controlled by adjusting the distance between the discharge electrodes of each spark in the spark circuit, the type of gas between the discharge electrodes, and the gas pressure.

[0015] In one embodiment of the present invention, the parallel spark branches can construct a discharge electrode and multiple discharge electrodes to discharge simultaneously, thereby achieving more complex element mixing.

[0016] In one embodiment of the present invention, the spatial positions of the discharge electrodes of each spark in the spark branch are arranged in a linear distribution or an annular distribution.

[0017] In one embodiment of the present invention, the spark discharge electrode has a shape of one or more of a rod, a sphere, a square and a ring.

[0018] As described above, the present invention is a spark plasma discharge circuit, which has the following beneficial effects: the present invention transmits the charging current provided by the DC high voltage power supply through the resistor to the spark circuit composed of multiple sparks connected in series and / or in parallel, so that each spark in the spark circuit is discharged independently, so that each spark electrode material is mixed at the atomic level in a small space to form multi-element particles; the energy of a single spark discharge is controlled by the capacitor connected in parallel with each spark in the spark circuit and the spark electrode spacing, and the discharge frequency of the spark is controlled by the parallel / series resistor. The present invention can realize the independent discharge of multiple sparks and the mixing of multiple materials, and can also control the energy and frequency of each discharge spark, thereby realizing the regulation of the yield of particles of each discharge spark and the control of the element mixing and composition between the materials in the particles. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic structural diagram of a spark plasma discharge circuit in one embodiment of the present invention.

[0020] Figure 2 It is a schematic diagram showing a single spark connected in parallel with a capacitor in one embodiment of the present invention.

[0021] Figure 3 It is a schematic diagram showing a plurality of sparks connected in parallel with a capacitor in one embodiment of the present invention.

[0022] Figure 4 Shown is a schematic diagram of sparks connected in parallel with multiple capacitors in one embodiment of the present invention.

[0023] Figure 5 It is a schematic diagram of the annular arrangement of discharge electrodes in one embodiment of the present invention.

[0024] Figure 6 Shown is a schematic diagram of electrodes of different shapes according to an embodiment of the present invention.

[0025] Figure 7 It is a schematic diagram of a structure including only series-connected spark branches in one embodiment of the present invention.

[0026] Figure 8 It is a schematic diagram of a structure including only parallel spark branches in one embodiment of the present invention.

[0027] Fig. 9 It is a schematic diagram showing the common discharge of multiple electrodes in a parallel spark branch in one embodiment of the present invention.

[0028] Fig.10 It is a schematic diagram showing a parallel spark branch circuit including a series spark circuit in one embodiment of the present invention.

[0029] Fig.11 It is a schematic diagram showing the structure of a circuit with five sparks connected in series in one embodiment of the present invention.

[0030] Fig.12 It is a schematic diagram showing the structure of a circuit with four sparks connected in parallel in one embodiment of the present invention.

[0031] Fig.13 It is a schematic diagram showing the structure of a circuit with five sparks connected in parallel in one embodiment of the present invention.

[0032] Fig.14 Shown is a schematic diagram of the structure of a circuit of six sparks in one embodiment of the present invention.

[0033] Fig.15 Shown is a schematic diagram of the structure of a circuit of five sparks in one embodiment of the present invention. DETAILED DESCRIPTION

[0034] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0035] It should be noted that in the following description, reference is made to the accompanying drawings, which describe several embodiments of the present invention. It should be understood that other embodiments may also be used, and that mechanical composition, structure, electrical and operational changes may be made without departing from the spirit and scope of the present invention. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present invention is limited only by the claims of the published patents. The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. Spatially related terms, such as "upper", "lower", "left", "right", "below", "below", "lower", "above", "upper", etc., may be used in the text to facilitate the description of the relationship between an element or feature shown in the figure and another element or feature.

[0036] Throughout the specification, when a part is said to be "connected" to another part, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a part is said to "include" a certain constituent element, unless otherwise stated, it does not exclude other constituent elements, but means that other constituent elements may be included.

[0037] The terms first, second and third mentioned herein are used to describe various parts, components, regions, layers and / or segments, but are not limited thereto. These terms are only used to distinguish a certain part, component, region, layer or segment from other parts, components, regions, layers or segments. Therefore, the first part, component, region, layer or segment described below may refer to the second part, component, region, layer or segment within the scope of the present invention.

[0038] Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless there is an indication to the contrary in the context. It should be further understood that the terms "comprise", "include" indicate the presence of the described features, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence or addition of one or more other features, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Exceptions to this definition will only occur when the combination of elements, functions or operations is inherently mutually exclusive in some way.

[0039] The present invention provides a spark plasma discharge circuit, which transmits the charging current provided by the DC high-voltage power supply through the resistor to the spark circuit composed of multiple sparks connected in series and / or in parallel, so that each spark in the spark circuit is discharged independently, so that each spark electrode material is mixed at the atomic level in a small space to form multi-element particles; the energy of a single spark discharge is controlled by the capacitor connected in parallel with each spark in the spark circuit and the spark electrode spacing, and the discharge frequency of the spark is controlled by the parallel / series resistor. The present invention can realize the independent discharge of multiple sparks and the mixing of multiple materials, and can also control the energy and frequency of each discharge spark, thereby realizing the regulation of the yield of particles of each discharge spark and the control of the element mixing between each electrode material in the particle.

[0040] The following is a detailed description of the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0041] like Figure 1 A schematic structural diagram of a spark plasma discharge circuit in an embodiment of the present invention is shown.

[0042] The circuit comprises:

[0043] A DC high-voltage power supply V, a resistor R, a spark circuit composed of multiple sparks, and a capacitor C; the DC high-voltage power supply V serves as the energy supply for the entire circuit, providing stable DC high voltage. Only one DC high-voltage power supply V is required to achieve independent control of each spark. The DC high-voltage power supply V is connected to a resistor R, and the resistor R is connected to the spark circuit; the spark circuit is composed of multiple sparks connected in series and / or in parallel, and uses a variety of spark electrode materials; each spark is composed of a pair of discharge electrodes, and the electrode materials can be the same or different, including conductive materials such as metals and semiconductors.

[0044] Each spark is connected in parallel with at least one capacitor C. Since the capacitor C can store charge and release it when needed, the energy of the spark discharge can be adjusted. By adjusting the capacity and charging voltage of the capacitor, the discharge intensity and time of each spark single spark discharge can be controlled. Figure 1 In the example, multiple sparks are connected in series, and a capacitor C is connected in parallel to each of them.

[0045] The charging current provided by the DC high-voltage power supply V reaches the positive electrode of the first spark in the spark circuit after passing through the resistor R. As the charge accumulates, the potential difference between the spark discharge electrodes gradually increases. After reaching the gas breakdown pressure, the capacitor C and the electrode loop form an oscillating discharge, that is, each spark in the spark circuit discharges independently; the discharge space of multiple sparks can be concentrated in a small area, so that the vapor atom clouds generated by each other are mixed, thereby realizing atomic-level mixing of multi-electrode material elements to form multi-element mixed particles; the energy of a single spark discharge of each spark is controlled by the capacitor C connected in parallel with each spark in the spark circuit and the spark electrode spacing, and the discharge frequency is controlled by controlling the current flowing through each spark, and finally the total element yield of each spark is controlled to achieve adjustment of the element content.

[0046] The present invention connects multiple sparks in series or in parallel, which can realize independent discharge of multiple sparks and mixing of multiple materials. It can also control the energy of a single spark discharge of each spark by connecting a parallel capacitor to each spark and the distance between spark electrodes, thereby realizing the regulation of the yield of particles of each spark and controlling the element mixing ratio between each electrode material in the particles.

[0047] In one embodiment, each spark may be connected in parallel with one capacitor or multiple capacitors;

[0048] In the case of connecting a capacitor in parallel, each spark can be connected in parallel with a capacitor C, so that the capacitor C can independently control the energy of a single discharge of the spark connected in parallel with it; for example, Figure 2 The spark parallel capacitor C1 formed by the discharge electrodes A and B, and the spark parallel capacitor C2 formed by the discharge electrodes B and C; multiple sparks can also be connected in parallel with the same capacitor C to achieve a capacitor C to control the energy of multiple sparks in a single discharge, for example, Figure 3 The sparks formed by the discharge electrodes A and B and the sparks formed by the discharge electrodes B and C are connected in parallel with the capacitor C1.

[0049] For the case of connecting multiple capacitors in parallel, one spark can be connected in parallel with one capacitor alone, and then connected in parallel with another capacitor together with other sparks. Figure 4 The spark formed by the discharge electrodes B and C is connected in parallel with the capacitor C1, and the spark formed by the discharge electrodes A and B is also connected in parallel with the spark formed by the discharge electrodes B and C together with the capacitor C2.

[0050] In one embodiment, the number of sparks in the spark circuit can be set according to demand, and the preferred number is 2 to 100.

[0051] In one embodiment, the breakdown pressure of the corresponding spark discharge is controlled by adjusting the distance between the discharge electrodes of each spark in the spark circuit, the type of gas between the discharge electrodes, and the gas pressure.

[0052] The distance between the discharge electrodes is one of the important factors affecting the breakdown voltage of spark discharge. When the distance between the electrodes decreases, the electric field strength increases, making it easier for the gas molecules to be ionized, thereby reducing the breakdown voltage. On the contrary, when the distance between the electrodes increases, the electric field strength decreases, and the ionization process becomes more difficult, so the breakdown voltage increases. The type of gas also has a significant effect on the breakdown voltage of spark discharge. For gases with lower ionization energy (such as hydrogen, helium, etc.), their molecules are more easily ionized, so the breakdown voltage is relatively low. For gases with lower ionization energy (such as hydrogen, helium, etc.), their molecules are more easily ionized, so the breakdown voltage is relatively low. Gas pressure is another important factor affecting the breakdown voltage of spark discharge. When the gas pressure increases, the density of gas molecules increases, the collision frequency between molecules increases, and the ionization process becomes easier, so the breakdown voltage decreases. On the contrary, when the gas pressure decreases, the density of gas molecules decreases, the collision frequency decreases, and the ionization process becomes more difficult, so the breakdown voltage increases.

[0053] In one embodiment, the spatial position of the discharge electrodes of each spark in the series or parallel spark branches can be flexibly arranged. Preferably, the spatial position of the discharge electrodes of each spark in the spark branch is arranged in a linear distribution or annular distribution; the linearly distributed discharge electrodes can make the discharge area arranged along a straight line. The linearly arranged electrodes help to achieve uniformity and consistency of the discharge area, especially when precise discharge is required along a straight path. Figure 2 , the discharge electrodes A, B and C are distributed linearly.

[0054] The annularly distributed discharge electrodes can make the discharge area arranged in a ring. The annularly distributed discharge electrodes are conducive to forming a stable multi-channel discharge, reducing the inductance and jitter of the switch. This layout can improve the stability and efficiency of the discharge. During the discharge process of the annular electrode, the breakdown positions of adjacent discharge pulses alternate between the center and the edge of the annular electrode. The spatial distribution of the electron density at the peak moment also shows the characteristics of alternating changes between the center advantage and the edge advantage, which helps to improve the utilization rate of the plasma. Figure 5 , discharge electrodes a, b, c, d and e are distributed in a ring.

[0055] In one embodiment, the spark discharge electrode may be in the shape of a rod, a sphere, a square, a ring, etc. For example, Figure 6 , electrodes A and C are square, and electrode B is spherical.

[0056] In one embodiment, the spark circuit comprises a plurality of spark branches connected in series or a plurality of spark branches connected in parallel; wherein each spark branch comprises: one or more sparks.

[0057] First, the specific implementation of the series spark branches is described in detail with reference to the following embodiments.

[0058] In one embodiment, in a series configuration, the spark branches are connected end to end to form a single current path. Figure 1 The spark circuit only includes a plurality of spark branches connected in series, and the energy of a single discharge of each independent spark can be controlled by a parallel capacitor C and a spark electrode spacing.

[0059] In a specific embodiment, if Figure 7 , each spark in each series spark branch is connected in parallel with a resistor; the role of the parallel resistor is to change the current distribution in the spark branch through the shunting effect, thereby indirectly affecting the charging process of the spark discharge. By adjusting the resistance value of the resistor, the discharge frequency of each spark can be controlled. When the resistance value of the resistor increases, the shunting effect weakens, and more current flows to the spark branch, which may speed up the charging speed of the spark discharge and increase the discharge frequency. When the resistance value of the resistor decreases, the shunting effect is enhanced, and the current flowing to the spark branch is reduced, which may slow down the charging speed of the spark discharge and reduce the discharge frequency. The series spark branches can greatly reduce the power consumption required by the resistance elements in the circuit and improve energy utilization.

[0060] In a specific embodiment, when a spark needs to be turned off, it can be achieved by reducing the resistance of the resistor connected in parallel with the spark to a preset value. The preset value is determined according to specific parameters of the circuit and the discharge characteristics of the spark.

[0061] Next, the specific implementation of the parallel spark branches is described in detail in conjunction with the following embodiments.

[0062] In one embodiment, in a parallel configuration, both ends of each spark branch are connected to a common node, and each branch has its own current path. Figure 8 If the spark circuit only includes multiple spark branches in parallel, the energy of each independent spark single spark discharge can be controlled by a parallel capacitor. Each of the spark branches in parallel is respectively connected in series with a resistor, and the function of the resistor is to limit the current passing through the spark branch, thereby controlling the charging process of the spark discharge. By adjusting the resistance value of the resistor, the charging current of the spark branch can be controlled to control the discharge frequency of the spark branch. When the resistance value of the resistor increases, the charging current will decrease, resulting in a longer charging time for the spark discharge and a lower discharge frequency. On the contrary, when the resistance value of the resistor decreases, the charging current will increase, the charging time for the spark discharge will shorten, and the discharge frequency will increase.

[0063] In one embodiment, the parallel spark branch can realize simultaneous discharge of one discharge electrode and multiple discharge electrodes through circuit design and electrode space design, thereby realizing more complex element mixing. Fig. 9 , discharge electrode B, discharge electrode C, and discharge electrode D are arranged in a ring around electrode A, wherein the spark formed by discharge electrode B and discharge electrode A, the spark formed by discharge electrode C and discharge electrode A, and the spark formed by discharge electrode D and discharge electrode A are connected in parallel, so that the three sparks discharge simultaneously, and because the setting distance is close, the atoms formed by each spark discharge can mix with each other, thereby achieving more complex element mixing.

[0064] In one embodiment, in order to achieve more complex discharge requirements, multiple sparks can be connected in series in multiple parallel branches. One or more spark branches in parallel include: multiple sparks in series. Preferably, each spark branch in parallel is connected in series with a resistor; each spark in the spark branch containing series sparks can also be connected in parallel with a resistor. Then for the parallel spark branch containing series sparks, the discharge frequency of the spark branch can be controlled by the resistor connected in series with the branch, and the discharge frequency of the corresponding spark can also be controlled by the capacitor connected in parallel with a single spark. For example, Fig.10 The spark discharge circuit includes four spark branches connected in parallel, and three of the spark branches have a plurality of sparks connected in series, and all the sparks of one spark branch are respectively connected in parallel with a capacitor.

[0065] In order to better realize the above spark plasma discharge circuit, it is now described in conjunction with the following specific embodiments.

[0066] Example 1

[0067] like Fig.11The schematic diagram of the structure of the circuit of five sparks in series in this embodiment. The electrode materials of the five sparks are two kinds: the electrode materials of a1, a2, b1, b2, c1, c2, and d1 are Au; the electrode materials of d2, e1, and e2 are Ag: the electrode diameter is 1mm, and the three sparks formed by a1 and a2, b1 and b2, and c1 and c2 produce pure Au particles, the sparks formed by e1 and e2 produce pure Ag particles, and the sparks formed by d1 and d2 produce AuAg alloy particles. The corresponding capacitors are: C1=C2=C3=2nF, C4=C5=3nF, the external resistance is 10MΩ, the power supply output voltage is 13kV, and the breakdown voltage of the spark is 2-3kV.

[0068] Example 2

[0069] like Figure 5 The schematic diagram of the structure of the circuit of five sparks in series in this embodiment. Five kinds of materials are used for the five electrodes: the electrode material of a is Cu, the electrode material of b is Ni, the electrode material of c is Au, the electrode material of d is Ag, the electrode material of e is Zn, the electrode diameter is 1mm, the capacitance C=2nF, the external resistance is 5MΩ, the power supply output voltage is 6.5kV, and the breakdown voltage of the spark is 1-2kV.

[0070] Example 3

[0071] like Fig.12 The schematic diagram of the structure of the circuit of four sparks in parallel in this embodiment. The electrode materials of the four sparks are five kinds of materials: the electrode materials of a1 and a2 are Au, the electrode materials of b1 and b2 are Ag, the electrode materials of c1 and c2 are Cu, the electrode material of d1 is Ni, and the electrode material of d2 is Ti. The electrode diameter is 1mm. The three sparks formed by a1 and a2, b1 and b2, c1 and c2 respectively produce pure Au, Ag and Cu particles, and the sparks formed by d1 and d2 produce pure NiTi alloy particles. The corresponding resistances are R1=R2=R3=10MΩ, R4=5MΩ, and the capacitances are C1=C2=C3=1nF, C4=2nF, the power supply output voltage is 6.5kV, and the breakdown voltage of the spark is 2-3kV.

[0072] Example 4

[0073] like Fig.13This is a schematic diagram of the structure of the circuit of five sparks in parallel in this embodiment. Five kinds of materials are used for the five electrodes: electrode material a is Cu, electrode material b is Ag, electrode material c is Au, electrode material d is Ni, and electrode material e is Ti. The diameter of electrode a is 2mm, and the diameters of the other electrodes are 1mm. The corresponding resistances are R1=R2=10MΩ, R3=R4=5MΩ, and the capacitances are C1=C2=1nF, C3=C4=2nF, respectively. The output voltage of the power supply is 6.5kV, and the breakdown voltage of the spark is 1~2kV.

[0074] Example 5

[0075] like Fig.14 The schematic diagram of the structure of the circuit of six sparks in this embodiment is shown in Figure 1. It consists of three parallel branches, each of which has 1, 2 and 3 sparks in series. The electrode materials of a1, a2, b1 and b2 are Au, the electrode materials of c1, c2 and d1 are Ag, the electrode materials of d2, e1 and e2 are Cu, the electrode material of f1 is Ni, the electrode material of f2 is Ti, and the electrode diameter is 1mm. The corresponding resistors are R1=R2=10MΩ, R3=5MΩ, R4=20MΩ, and the capacitors are: C1=C2=C4==1nF, C3=C5=C6=2nF, the power supply output voltage is 6.5kV, and the breakdown voltage of the spark is 1~2kV.

[0076] Example 6

[0077] like Fig.15 The schematic diagram of the structure of the circuit of five sparks in this embodiment. There are three branches in parallel corresponding to the sparks formed by a and b, branch adc and branch aef, and the charging current is controlled by three resistors R1, R2 and R3 respectively. The sparks formed by a and d and the sparks formed by d and c in the circuit are series sparks on the branch controlled by the resistor R2. The sparks formed by a and e and the sparks formed by e and f in the circuit are series sparks on the branch controlled by the resistor R1. The electrode materials of a are Cu, the electrode materials of b are Ag, the electrode materials of c are Au, the electrode materials of d are Ni, the electrode materials of e are Ti, and the electrode materials of f are Mo. The diameter of electrode a is 2 mm, and the diameters of the other electrodes are 1 mm. The corresponding resistances are R1=R2=10MΩ, R3=R4=5MΩ, and the capacitances are: C1=C2==C5=1nF, C3=C4=2nF. The power supply output voltage is 6.5kV, and the spark breakdown voltage is 1~2kV.

[0078] Compared with the prior art, the advantages of the present invention include the following:

[0079] 1. Through the design of series or parallel sparks, the energy utilization rate of spark discharge in the entire circuit can be improved.

[0080] 2. Through simple series or parallel spark circuit design, multiple sparks can be independently controlled, and multiple sparks can be used to work together to improve the overall yield.

[0081] 3. A compact electrode discharge area is achieved by connecting the spark circuit in series or in parallel and arranging the electrode space, so that the spark electrode materials are mixed in a small space to obtain multi-element mixed particles.

[0082] 4. Multi-electrode elements can be mixed at one time through multi-electrode discharge, and the element mixing ratio can be adjusted arbitrarily by adjusting the circuit component parameters.

[0083] 5. Through the design of series or parallel sparks, the power consumption required by the resistance elements in the circuit can be greatly reduced, improving energy utilization.

[0084] In summary, the spark plasma discharge circuit of the present invention transmits the charging current provided by the DC high-voltage power supply through the resistor to the spark circuit composed of multiple sparks connected in series and / or in parallel, so that each spark in the spark circuit is discharged independently, so that each spark electrode material is mixed at the atomic level in a small space to form multi-element particles; the energy of a single spark discharge is controlled by the capacitor and the spark electrode spacing connected in parallel with each spark in the spark circuit, and the discharge frequency of the spark is controlled by the parallel / series resistor. The present invention can realize the independent discharge of multiple sparks and the mixing of multiple materials, and can also control the energy and frequency of each discharge spark, thereby realizing the regulation of the yield of particles of each discharge spark and the control of the element mixing and composition between the electrode materials in the particles. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has a high industrial utilization value.

[0085] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A spark plasma discharge circuit, characterized in that: The circuit comprises: a DC high voltage power supply, a resistor, a spark circuit consisting of a plurality of sparks connected in series and / or in parallel, and a capacitor; Wherein, each spark is connected in parallel with at least one capacitor; the DC high voltage power supply is connected to a resistor, and the resistor is connected to the spark circuit; the spark circuit uses a variety of spark electrode materials; The charging current provided by the DC high-voltage power supply is transmitted to the spark circuit through the resistor, so that each spark in the spark circuit discharges independently, and each spark electrode material is mixed at the atomic level in a small space to form multi-element mixed particles; the energy of a single spark discharge of each spark is controlled by the capacitor connected in parallel with each spark in the spark circuit and the spark electrode spacing, and the discharge frequency is controlled by controlling the current flowing through each spark, and finally the total element yield of each spark is controlled to adjust the element content.

2. The spark plasma discharge circuit according to claim 1, characterized in that: The spark circuit includes a plurality of spark branches connected in series or a plurality of spark branches connected in parallel; wherein each spark branch includes: one or more sparks.

3. The spark plasma discharge circuit according to claim 2, characterized in that: Each spark in the series-connected spark branches is connected in parallel with a resistor, so that the magnitude of the discharge frequency of each spark is controlled by utilizing the resistor connected in parallel with each spark.

4. The spark plasma discharge circuit according to claim 2, characterized in that: Each of the parallel spark branches is respectively connected in series with a resistor, so that the discharge frequency of the spark branch can be controlled by utilizing the resistor connected in series with the spark branch.

5. The spark plasma discharge circuit according to claim 4, characterized in that: One or more spark branches connected in parallel include: multiple sparks connected in series.

6. The spark plasma discharge circuit according to claim 2, characterized in that: The corresponding spark can be closed by reducing the resistance of the spark in parallel in the series spark branch to a preset value.

7. The spark plasma discharge circuit according to claim 1, characterized in that: The breakdown pressure of the corresponding spark discharge is controlled by adjusting the distance between the discharge electrodes of each spark in the spark circuit, the type of gas between the discharge electrodes and the gas pressure.

8. The spark plasma discharge circuit according to claim 2, characterized in that: The parallel spark branches can construct a discharge electrode and multiple discharge electrodes to discharge simultaneously, thereby achieving more complex element mixing.

9. The spark plasma discharge circuit according to claim 1, characterized in that: The spatial positions of the discharge electrodes of each spark in the spark branch are arranged in a linear distribution or an annular distribution.

10. The spark plasma discharge circuit according to claim 1, characterized in that: The shape of the spark discharge electrode is one or more of a rod, a sphere, a square and a ring.

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