Transducer

Abstract

The present application relates to a transducer device comprising: a transmission mechanism, comprising a variable amplitude rod and a mounting cover, the mounting cover being connected to the end of the variable amplitude rod, a mounting hole for mounting a splitter being formed at one end of the variable amplitude rod away from the mounting cover, a side surface of the mounting cover being arranged around the axis of the variable amplitude rod and comprising a first plane and a second plane, the first plane and the second plane being spaced apart along the extension direction of the mounting hole; and a transducer mechanism, comprising a fixing cover, a fastener, and a transducer assembly, the transducer assembly being located between the fixing cover and the mounting cover, the fastener being inserted through the fixing cover and the transducer assembly and fixedly connected to the mounting cover. Since the first bearing surface and the second bearing surface are planes, unnecessary interference generated by the bearing head during ultrasonic welding can be avoided during the process of welding the lead wire by the transducer device, thereby increasing the welding area of ​​the lead wire, so that the transducer device has a relatively wide working area, thereby increasing the connection strength of the lead wire, and ultimately increasing the bonding strength of the lead wire.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a transducer device. Background Art

[0002] The semiconductor chip industry is the foundation of industries such as 5G, autonomous driving, new energy, and consumer electronics. Wire bonding, as an integral part of chip manufacturing and packaging, directly impacts chip quality and reliability. Therefore, improving and developing wire bonding technology and its corresponding key modules is of great significance.

[0003] Wire bonding technology generally uses the fusion of ultrasonic vibration and pressure to soften the metal materials between the wire and the substrate, promote the mutual diffusion of atoms between the metals, and form a high-strength connection interface layer, thereby enabling the communication and interaction of electrical signals between chips. In terms of the material system, the lead material generally uses 99.999% pure gold, aluminum, or copper wire with a diameter of 20-500μm. Different materials and diameters are used for different devices. For example, IGBT power devices generally use aluminum wire and copper wire with a diameter of 100-500μm. In recent years, the rapid development of new energy vehicles has led to a large demand for IGBT power devices. Compared with devices such as ICs or LEDs, the difficulty of wire bonding for IGBT power devices lies in the high stability and consistency of the solder joints, which poses a severe challenge to their actuators and control systems.

[0004] The ultrasonic system, centered around the transducer, generates ultrasonic energy and is crucial to the wire bonding process. The transducer operates by leveraging the inverse piezoelectric effect of a piezoelectric ceramic array, generating high-frequency mechanical vibrations when driven by a voltage. This vibration is amplified by the displacement of a horn and transmitted to the end of the wedge, providing the high-frequency ultrasonic energy required for wire bonding. Typically, the transducer is mounted within the entire device, requiring a flange mounting structure. This flange mounting structure considers how to minimize energy transfer and interference with the entire device. Current design methods rely solely on node locations derived from traditional finite element modal analysis as the basis for flange design. However, this approach still results in vibration energy transfer and interference between the two components, significantly detrimental to the transducer's ultrasonic energy output and, consequently, impacting wire bond strength. There are currently no standardized operating procedures for wedge installation in the market, and operators typically rely on personal experience and intuition to adjust wedge length. It is well known that varying wedge lengths generate varying ultrasonic vibration energy, which can be detrimental to wire bonding quality and consistency. Therefore, the development of industrial products and the defects of the current level require higher requirements on the design level of transducer devices. Summary of the Invention

[0005] A technical problem solved by this application is how to improve the bonding strength of the wires.

[0006] A transducer device, comprising:

[0007] The transmission mechanism includes a horn and a mounting cover, the mounting cover being connected to an end of the horn, a mounting hole for mounting a riving knife being defined at one end of the horn away from the mounting cover, and a side surface of the mounting cover surrounding the axis of the horn including a first plane and a second plane, the first plane and the second plane being spaced apart along an extension direction of the mounting hole; and

[0008] The transducer mechanism comprises a fixed cover, a fastener and a transducer assembly, wherein the transducer assembly is located between the fixed cover and the mounting cover, and the fastener is passed through the fixed cover and the transducer assembly and is fixedly connected to the mounting cover.

[0009] In one embodiment, the first plane and the second plane are equidistant from the axis of the horn.

[0010] In one embodiment, the amplitude changing rod includes an amplitude changing section and a bearing head, the amplitude changing section is connected between the mounting cover and the bearing head, the bearing head has a first bearing surface and a second bearing surface, both of which are planes, the first bearing surface and the second bearing surface are spaced apart along the extension direction of the mounting hole, and both ends of the mounting hole pass through the first bearing surface and the second bearing surface.

[0011] In one embodiment, the supporting head includes a limiting ridge, the limiting ridge is protrudingly provided on the first supporting surface, the mounting hole has a mounting opening on the first supporting surface, the limiting ridge includes a limiting portion extending into the mounting opening, and the limiting portion is used to abut against the end of the riving knife.

[0012] In one embodiment, the supporting head is further provided with a fixing hole and an adjustment gap, and the supporting head also has a third supporting surface and a fourth supporting surface, the third supporting surface is connected to one end of the first supporting surface and the second supporting surface, and the fourth supporting surface is connected to the other end of the first supporting surface and the second supporting surface; the adjustment gap passes through the first supporting surface and the second supporting surface and is interconnected with the mounting hole, the fixing hole passes through the third supporting surface and the fourth supporting surface and is connected to the adjustment gap, and the fixing hole is used to install a fixing part.

[0013] In one embodiment, both the third bearing surface and the fourth bearing surface are planes.

[0014] In one embodiment, the bearing head also has a fifth bearing surface and a sixth bearing surface, both of which are planes. The fifth bearing surface and the sixth bearing surface are arranged at intervals along the axial direction of the amplitude changing rod and are connected between the first bearing surface and the second bearing surface. The fifth bearing surface is connected to the end of the amplitude changing rod, and the adjustment gap passes through the fifth bearing surface and the sixth bearing surface.

[0015] In one embodiment, the distances from the adjustment gap to the third bearing surface and the fourth bearing surface are equal.

[0016] In one embodiment, the amplitude transformer includes a cylindrical section, a conical section and a bearing head, the mounting hole is provided in the bearing head, the cylindrical section is connected to the mounting cover, the conical section is connected between the cylindrical section and the bearing head, the cross-sectional dimension of the cylindrical section is larger than the cross-sectional dimension of the conical section, and along the axial direction of the amplitude transformer from the cylindrical section to the conical section, the cross-sectional dimension of the cylindrical section is constant, and the cross-sectional dimension of the conical section decreases.

[0017] In one embodiment, the energy conversion component includes a plurality of mutually stacked piezoelectric ceramic sheets, and any two adjacent piezoelectric ceramic sheets have opposite polarization directions.

[0018] A technical effect of an embodiment of the present application is: given that the first bearing surface and the second bearing surface are planes, and the chopper is installed in the mounting hole, in the process of the transducer device welding the lead using the chopper using an ultrasonic welding process, unnecessary interference caused by the mounting cover during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead. It can be understood that the transducer device has a relatively wide working area, maximizing the working stroke and area of ​​the transducer device, and at the same time eliminating the energy loss caused by interference. This will improve the connection strength between the lead and the welding body such as the substrate or chip, and ultimately improve the bonding strength of the lead. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the exploded structure of a transducer device provided in one embodiment.

[0020] Figure 2 for Figure 1 Schematic diagram of the three-dimensional assembly structure of the transducer device shown.

[0021] Figure 3 for Figure 1 Schematic diagram of the planar structure of the transducer device shown.

[0022] Figure 4 for Figure 1 The schematic diagram of the three-dimensional cross-sectional structure of the transducer device at one position is shown.

[0023] Figure 5 for Figure 1 The schematic diagram of the three-dimensional cross-sectional structure of the energy conversion device shown in another position.

[0024] Figure 10: Transducer 10, riving knife 20, transmission mechanism 100, amplitude transformer 110, amplitude transformer section 111, cylindrical section 1111, conical section 1112, bearing head 112, first bearing surface 1121, second bearing surface 1122, third bearing surface 1123, fourth bearing surface 1124, fifth bearing surface 1125, sixth bearing surface 1126, mounting hole 1127, mounting opening 1127a, adjustment gap 1128, fixing hole 1129, limiting ridge 1130, limiting portion 1130a, mounting cover 120, first plane 121, second plane 122, transducer mechanism 300, fixing cover 310, fastener 320, transducer assembly 330, piezoelectric ceramic piece 331. DETAILED DESCRIPTION

[0025] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0026] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0027] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0028] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0029] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0030] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0031] See Figure 1 、 Figure 2 and Figure 3In one embodiment of the present application, a transducer device 10 is provided for use with a cleaver 20. Specifically, the cleaver 20 is mounted on the transducer device 10, and leads are provided within the cleaver 20. The leads are used to connect to a substrate or chip via ultrasonic welding. The transducer device 10 includes a transmission mechanism 100 and a transducer mechanism 200. The transmission mechanism 100 includes a horn 110 and a mounting cover 120. The mounting cover 120 is connected to the end of the horn 110. The end of the horn 110 away from the mounting cover 120 defines a mounting hole 1127 for mounting the cleaver 20. The mounting hole 1127 is used to mount the cleaver 20. The transducer mechanism 200 includes a fixed cover 210, a fastener 220, and a transducer assembly 230. The transducer assembly 230 is located between the fixed cover 210 and the mounting cover 120. The fastener 220 is disposed in the fixed cover 210 and the transducer assembly 230 and is fixedly connected to the mounting cover 120. The fastener 220 may be a bolt, etc., i.e., the stem of the fastener 220 is disposed in the fixed cover 210 and the transducer assembly 230 and is fixedly connected to the mounting cover 120 by a threaded connection. The cap of the fastener 220 abuts against the fixed cover 210, thereby securing the fixed cover 210 and the transducer assembly 230 to the mounting cover 120. The fixed cover 210 may be made of tungsten steel having high impedance characteristics, and the fastener 220 may be made of high-strength steel, such as high-speed steel having a strength grade of 12.9. The fastener 220 can load a certain torque to the transducer assembly 230 to achieve maximum energy generation of the transducer assembly 230 .

[0032] When an alternating voltage is applied to the transducer assembly 230 for excitation, the transducer assembly 230 converts electrical energy into high-frequency vibration mechanical energy. The high-frequency vibration mechanical energy is transmitted to the chopper 20 through the horn 110, thereby causing the chopper 20 to drive the lead to generate high-frequency friction relative to the substrate or chip and generate heat. The molten liquid generated by the heat solidifies to form a weld, that is, the lead is fixed to the chip or substrate through the weld, thereby welding (i.e., bonding) the lead to the chip or substrate. In this way, the transducer device 10 uses an ultrasonic welding process to bond the lead.

[0033] See Figure 1 、 Figure 2 and Figure 3In some embodiments, the side surface of the mounting cover 120 is connected between two surfaces in the thickness direction of the mounting cover 120. The two surfaces in the thickness direction of the mounting cover 120 are spaced apart along the axial direction of the horn 110. One of the surfaces in the thickness direction of the mounting cover 120 contacts the transducer assembly 230, and the other surface in the thickness direction of the mounting cover 120 is connected to the horn 110. The side surface of the mounting cover 120 is disposed around the axis of the horn 110. The side surface of the mounting cover 120 may include a first flat surface 121 and a second flat surface 122. Both the first flat surface 121 and the second flat surface 122 are planes, and are spaced apart along the extension direction of the mounting hole 1127. The first flat surface 121 and the second flat surface 122 are located on opposite sides of the axis of the horn 110, so that the first flat surface 121 and the second flat surface 122 are equidistant from the axis of the horn 110. The mounting cover 120 may have a through hole extending axially along the horn 110, such that the through hole penetrates the entire mounting cover 120 along the thickness direction. Therefore, the through hole has openings on both surfaces of the mounting cover 120 in the thickness direction. Bolts may be inserted through the through hole, so that the mounting cover 120 is fixed to the support member by the bolts, thereby fixing the entire transducer device 10 to the support member. The cross-section of the mounting cover 120 may be substantially rectangular, for example, the cross-section of the mounting cover 120 may be rectangular or square.

[0034] Given that the side surface of the mounting cover 120 has a first flat surface 121 and a second flat surface 122, when the transducer device 10 is ultrasonically welded to the leads using the splitter 20, unnecessary interference from the mounting cover 120 can be avoided, thereby increasing the lead welding area and maximizing the working range and area of ​​the transducer device 10. This can be understood as the transducer device 10 having a relatively wide working area, while also eliminating energy loss caused by interference, thereby improving the connection strength between the leads and the welding object, such as the substrate or chip, and ultimately improving the bond strength of the leads. Furthermore, the provision of the first flat surface 121 and the second flat surface 122 also makes the transducer device 10 compact, thereby reducing the volume and weight of the transducer device 10 and achieving a miniaturized and lightweight design of the transducer device 10. In some embodiments, the surface of the mounting cover 120 in the thickness direction that contacts the transducer assembly 230 has a roughness of approximately 0.04 mm and a flatness of approximately 0.005 mm. This reduces friction between the transducer assembly 230 and the mounting cover 120, thereby reducing vibration energy loss and ensuring that more vibration energy from the transducer assembly 230 is transmitted to the riving blade 20 via the horn 110. This means that the riving blade 20 receives more vibration energy, thereby improving energy utilization. Of course, the surface of the mounting cover 120 may be recessed to form a groove, which may be arranged around the transducer assembly 230 and filled with a rubber material, thereby insulating and blocking the transducer device 10 from external vibration energy.

[0035] See Figure 1 、 Figure 2 and Figure 3In some embodiments, the transducer assembly 230 includes multiple piezoelectric ceramic discs 231, which can be in a circular shape. The multiple piezoelectric ceramic discs 231 are stacked along the axial direction of the horn 110, with any two adjacent piezoelectric ceramic discs 231 having opposite polarization directions. When an alternating voltage is applied to the piezoelectric ceramic discs 231 for excitation, the piezoelectric ceramic discs 231 convert the electrical energy into high-frequency vibrational mechanical energy. This high-frequency vibrational mechanical energy is transmitted to the splitter 20 through the horn 110, thereby causing the splitter 20 to drive the lead wires against the substrate or chip to generate high-frequency friction and heat, ultimately achieving lead bonding. Therefore, the piezoelectric ceramic discs 231 are the source of high-frequency ultrasonic vibration energy. The piezoelectric ceramic discs 231 can be made of materials such as lead zirconium oxide. The outer diameter of the piezoelectric ceramic discs 231 can be 15 mm to 30 mm, the inner diameter can be 5 mm to 10 mm, and the thickness can be 5 mm to 10 mm. The number of piezoelectric ceramic sheets 231 is 4 to 8, the center position of the piezoelectric ceramic sheet 231 is the node of the vibration source, and a beryllium copper sheet with high conductivity is used to apply voltage between the two piezoelectric ceramic sheets 231. The thickness of the beryllium copper sheet is 0.005 mm to 0.02 mm, and defects such as burrs or notches are not allowed on the edges of the beryllium copper sheet.

[0036] See Figure 2 、 Figure 3 and Figure 4In some embodiments, the horn 110 can be made of materials such as stainless steel. The horn 110 includes a variable amplitude section 111 and a carrier head 112. One end of the variable amplitude section 111 is connected to the mounting cover 120, and the other end of the variable amplitude section 111 is connected to the carrier head 112, so that the variable amplitude section 111 is connected between the mounting cover 120 and the carrier head 112. A mounting hole 1127 is defined in the carrier head 112, so that the carrier head 112 is used to mount the riving knife 20. The roundness tolerance of the mounting hole can be controlled to approximately 0.003 μm. The variable amplitude section 1111 can include a cylindrical section 1111 and a tapered section 1112. The cylindrical section 1111 is connected to the mounting cover 120, and one end of the tapered section 1112 is connected to the cylindrical section 1111, and the other end of the tapered section 1112 is connected to the carrier head 112, that is, the tapered section 1112 is connected between the cylindrical section 1111 and the carrier head 112. The cross-sectional dimensions of the cylindrical section 1111 are greater than those of the conical section 1112. Along the axial direction of the horn 110, the cross-sectional dimensions of the cylindrical section 1111 are constant, while the cross-sectional dimensions of the conical section 1112 decrease. The cylindrical section 1111 may be cylindrical or prismatic, while the conical section 1112 may be truncated or truncated. The entire transmission mechanism 100 may be integrally formed, or the horn 110 may be integrally formed, with the horn 110 and mounting cover 120 being separate components. The horn 110 and mounting cover 120 are assembled separately to form the transmission mechanism 100. Since the horn section 111 includes the cylindrical section 1111 and the conical section 1112, the transmission mechanism 100 can also reduce vibration energy loss, thereby improving energy utilization by the blade 20 and the lead wire. In other embodiments, the cross section of the amplitude-changing section 111 may remain constant along the axial direction, that is, the amplitude-changing section 111 may be substantially cylindrical or prismatic. Figure 2 、 Figure 3 and Figure 4In some embodiments, the carrier head 112 has a first carrier surface 1121 and a second carrier surface 1122, both of which are planes. The first carrier surface 1121 and the second carrier surface 1122 are spaced apart along the extension direction of the mounting hole 1127. Both ends of the mounting hole 1127 pass through the first carrier surface 1121 and the second carrier surface 1122, so the mounting hole 1127 has openings on the first carrier surface 1121 and the second carrier surface 1122, and the roundness tolerance of the mounting hole 1127 can be controlled within 0.003um. Given that the first bearing surface 1121 and the second bearing surface 1122 are planes, and the splitting knife 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead using the ultrasonic welding process through the splitting knife 20, unnecessary interference caused by the bearing head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead. It can be understood that the transducer device 10 has a relatively wide working area, and at the same time can eliminate the energy loss caused by interference, thereby improving the connection strength between the lead and the welding body such as the substrate or chip, and ultimately improving the bonding strength of the lead.

[0037] See Figure 3 、 Figure 4 and Figure 5In some embodiments, the carrier head 112 includes a limiting protrusion 1130 protruding from the first carrier surface 1121. The mounting hole 1127 has a mounting opening 1127a on the first carrier surface 1121. The limiting protrusion 1130 includes a limiting portion 1230a. The limiting protrusion 1130 extends into the mounting opening 1127a, so that the limiting portion 1230a provides a certain degree of coverage for the mounting hole 1127. There can be two limiting protrusions 1130. The two limiting protrusions 1130 can extend along the same diameter of the mounting opening 1127a, such that the two limiting protrusions 1130 are spaced 180 degrees apart along the circumference of the mounting hole 1127. Of course, there can be more than two limiting bosses, each of which can extend along the diameter of the mounting opening 1127a. The multiple limiting bosses can be spaced apart along the circumference of the mounting opening 1127a. The limiting portion 1230a is used to abut the end of the cleaver 20, thereby limiting the installation of the cleaver 20. During the installation process of the cleaver 20, the cleaver 20 is inserted into the mounting hole 1127 on the side of the second bearing surface 1122. When the end of the cleaver 20 abuts the limiting portion 1230a, the cleaver 20 is installed in place. Therefore, the provision of the limiting ridge 1130 allows for automated positioning of the cleaver 20 during installation, improving installation accuracy. This ensures that the length of the cleaver 20 protruding from the second bearing surface 1122 remains consistent, thus meeting the requirement for consistent installation length of the cleaver 20. This improves the stability of the ultrasonic vibration energy output and ultimately enhances the bonding strength of the wires. Furthermore, the positioning of the cleaver 20 by the limiting ridge 1130 also improves the efficiency and accuracy of the automated installation process of the cleaver 20. This facilitates automated installation of the cleaver 20 and ensures consistent installation length of the cleaver 20.

[0038] See Figure 3 、 Figure 4 and Figure 5In some embodiments, the carrier head 112 further defines a fixing hole 1129 and an adjustment gap 1128. The width of the adjustment gap 1128 can be approximately 0.03 mm. The carrier head 112 further includes a third bearing surface 1123 and a fourth bearing surface 1124. The third bearing surface 1123 connects to one end of the first bearing surface 1121 and the second bearing surface 1122, while the fourth bearing surface 1124 connects to the other ends of the first bearing surface 1121 and the second bearing surface 1122. Both the third bearing surface 1123 and the fourth bearing surface 1124 can be planar. The adjustment gap 1128 extends through the first bearing surface 1121 and the second bearing surface 1122 and communicates with the mounting hole 1127. A fixing hole 1129 extends through the third bearing surface 1123 and the fourth bearing surface 1124 and communicates with the adjustment gap 1128. The fixing hole 1129 is used to install a fixing member 300, such as a bolt. The adjustment gap 1128 extends along a straight line, and the mounting hole 1127 can be symmetrically arranged relative to the adjustment gap 1128. For example, the adjustment gap 1128 can be divided by the mounting hole 1127 to form two semicircular holes, and the two semicircular holes can be symmetrically arranged relative to the adjustment gap 1128. Of course, the two limiting protrusions 1130 can also be symmetrically arranged relative to the adjustment gap 1128. The distances from the adjustment gap 1128 to the third bearing surface 1123 and the fourth bearing surface 1124 are equal, thereby allowing the entire bearing head 112 to be symmetrically arranged relative to the adjustment gap 1128. The symmetrical arrangement of the bearing head 112 can reduce the loss of vibration energy by the transmission mechanism 100, thereby improving the energy utilization rate of the splitting knife 20 and the lead wire. It can also reduce the difficulty of processing the bearing head 112, thereby improving the processing efficiency of the bearing head 112 and ultimately reducing the manufacturing cost of the transducer device 10.

[0039] See Figure 3 、 Figure 4 and Figure 5 During installation of the riving knife 20, the riving knife 20 can be gradually inserted into the mounting hole 1127. The squeezing action of the riving knife 20 increases the width of the adjustment gap 1128, thereby reasonably increasing the diameter of the mounting hole 1127. This reduces the mating resistance between the riving knife 20 and the mounting hole 1127, improves the installation efficiency of the riving knife 20, and reduces wear on the riving knife 20. When the riving knife 20 is in contact with the limiting portion 1230a of the limiting ridge 1130 and is installed in place, a fastener 300, such as a bolt, can be inserted into the fixing hole 1129, thereby reducing the width of the adjustment gap 1128 and the diameter of the mounting hole 1127. This improves the mating force between the riving knife 20 and the mounting hole 1127, ultimately improving the stability and reliability of the installation of the riving knife 20.

[0040] See Figure 3 、 Figure 4 and Figure 5Since the third supporting surface 1123 and the fourth supporting surface 1124 are planes and the splitter 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead using the splitter 20 using the ultrasonic welding process, unnecessary interference caused by the carrier head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead, thereby improving the connection strength between the lead and the welding object such as the substrate or chip, and ultimately improving the bonding strength of the lead.

[0041] See Figure 3 、 Figure 4 and Figure 5 In some embodiments, the carrier head 112 further has a fifth bearing surface 1125 and a sixth bearing surface 1126, and the fifth bearing surface 1125 and the sixth bearing surface 1126 are both planes. The fifth bearing surface 1125 and the sixth bearing surface 1126 are arranged at intervals along the axial direction of the amplitude transformer 110, and the fifth bearing surface 1125 and the sixth bearing surface 1126 are connected between the first bearing surface 1121 and the second bearing surface 1122, so that the fifth bearing surface 1125 and the sixth bearing surface 1126 are connected between the third bearing surface 1123 and the fourth bearing surface 1124. At this time, the entire carrier head 112 can be a rectangular parallelepiped or a cube structure, so that the first bearing surface 1121, the second bearing surface 1122, the third bearing surface 1123, the fourth bearing surface 1124, the fifth bearing surface 1125 and the sixth bearing surface 1126 are six faces of a rectangular parallelepiped or a cube. The adjustment gap 1128 can extend through both the fifth bearing surface 1125 and the sixth bearing surface 1126 . This reduces the resistance to increasing the width of the adjustment gap 1128 during installation of the riving knife 20 , thereby further reducing the mating resistance between the riving knife 20 and the mounting hole 1127 , improving installation efficiency of the riving knife 20 and reducing wear on the riving knife 20 .

[0042] Since the fifth bearing surface 1125 and the sixth bearing surface 1126 are both planes and the splitting knife 20 is installed in the mounting hole 1127, when the transducer device 10 welds the lead using the splitting knife 20 using an ultrasonic welding process, unnecessary interference caused by the bearing head 112 during ultrasonic welding can be avoided, thereby increasing the welding area of ​​the lead, and then improving the connection strength between the lead and the welding body such as the substrate or chip, and ultimately improving the bonding strength of the lead.

[0043] During operation, the operating frequency of the transducer device 10 can be 60 kHz to 64 kHz, the length of the transducer device 10 can be approximately 2.5 times the wavelength of the ultrasonic wave, the amplification factor of the end of the cleaver 20 relative to the amplitude of the transducer assembly 230 can be 2 to 4 times, the power of the transducer assembly 230 can be 20 watts to 100 watts, and the output displacement amplitude of the end of the cleaver 20 can be 0 μm to 5 μm.

[0044] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A transducer device, characterized in that: include: The transmission mechanism includes a horn and a mounting cover, the mounting cover being connected to an end of the horn, a mounting hole for mounting a riving knife being defined at one end of the horn away from the mounting cover, and a side surface of the mounting cover surrounding the axis of the horn including a first plane and a second plane, the first plane and the second plane being spaced apart along an extension direction of the mounting hole; and The transducer mechanism includes a fixed cover, a fastener, and a transducer assembly, wherein the transducer assembly is located between the fixed cover and the mounting cover, and the fastener is passed through the fixed cover and the transducer assembly and is fixedly connected to the mounting cover; The amplitude-changing rod includes an amplitude-changing section and a bearing head, wherein the amplitude-changing section is connected between the mounting cover and the bearing head, and the bearing head has a first bearing surface and a second bearing surface, both of which are planes. The first bearing surface and the second bearing surface are spaced apart along the extending direction of the mounting hole, and both ends of the mounting hole pass through the first bearing surface and the second bearing surface. The bearing head includes a limiting convex strip, the limiting convex strip is protrudingly provided on the first bearing surface, the mounting hole has a mounting opening on the first bearing surface, the limiting convex strip includes a limiting portion extending into the mounting opening, the limiting portion is used to abut against the end of the riving knife; The carrying head is also provided with a fixing hole and an adjustment gap, and the carrying head also has a third carrying surface and a fourth carrying surface, the third carrying surface is connected to one end of the first carrying surface and the second carrying surface, and the fourth carrying surface is connected to the other end of the first carrying surface and the second carrying surface; the adjustment gap passes through the first carrying surface and the second carrying surface and is interconnected with the mounting hole, the fixing hole passes through the third carrying surface and the fourth carrying surface and is connected with the adjustment gap, and the fixing hole is used for installing a fixing part.

2. The transducer device according to claim 1, characterized in that: The first plane and the second plane are both equidistant from the axis of the horn.

3. The transducer device according to claim 1, characterized in that: The amplitude transformer is made of stainless steel.

4. The transducer device according to claim 1, characterized in that: The fixed cover is made of tungsten steel material.

5. The transducer device according to claim 1, characterized in that: The fastener is made of steel.

6. The transducer device according to claim 1, characterized in that: Both the third bearing surface and the fourth bearing surface are planes.

7. The transducer device according to claim 1, characterized in that: The bearing head also has a fifth bearing surface and a sixth bearing surface, both of which are planes. The fifth bearing surface and the sixth bearing surface are arranged at intervals along the axial direction of the amplitude rod and connected between the first bearing surface and the second bearing surface. The fifth bearing surface is connected to the end of the amplitude rod, and the adjustment gap runs through the fifth bearing surface and the sixth bearing surface.

8. The energy conversion device according to claim 1, characterized in that: The distances from the adjustment gap to the third bearing surface and the fourth bearing surface are equal.

9. The transducer device according to claim 1, characterized in that: The amplitude variable rod includes a cylindrical section, a conical section and a bearing head, the mounting hole is arranged on the bearing head, the cylindrical section is connected to the mounting cover, the conical section is connected between the cylindrical section and the bearing head, the cross-sectional size of the cylindrical section is larger than the cross-sectional size of the conical section, and along the axial direction of the amplitude variable rod from the cylindrical section to the conical section, the cross-sectional size of the cylindrical section is constant, and the cross-sectional size of the conical section decreases.

10. The energy conversion device according to claim 1, characterized in that: The energy conversion component includes a plurality of mutually stacked piezoelectric ceramic sheets, and the polarization directions of any two adjacent piezoelectric ceramic sheets are opposite.

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