Laser processing method based on dynamic zooming of liquid lens

Abstract

The invention relates to the technical field of laser processing, in particular to a laser processing method based on dynamic zooming of a liquid lens, which comprises the following steps: S1, correcting an xy two-dimensional part of a galvanometer and the liquid lens of the galvanometer to obtain a corrected galvanometer; s2, performing parameter configuration on the corrected galvanometer to obtain a parameter-configured galvanometer; s3, analyzing the processing graph to obtain processing graph XY data and processing graph Z data; s4, controlling a liquid lens of the galvanometer after parameter configuration to perform laser processing according to the Z data of the processing graph to obtain a Z data processing finished product; s5, performing real-time compensation on the liquid lens of the galvanometer after parameter configuration; and S6, the Z data processing finished product is subjected to laser processing, and a processed finished product is obtained.The laser processing precision and efficiency are improved, and the method is suitable for processing of complex three-dimensional graphs.

Description

Technical Field

[0001] The invention relates to the technical field of laser processing, and in particular to a laser processing method based on dynamic zoom of a liquid lens. Background Art

[0002] In the field of laser processing applications, there is an increasing demand for processing three-dimensional workpieces, and laser processing has gradually shifted from conventional two-dimensional plane processing to three-dimensional stereo processing. Therefore, three-axis galvanometers are increasingly used. Compared with two-axis galvanometers, three-axis galvanometers have an additional third axis for dynamic focusing. The conventional third axis generally uses a rotary motor or a linear motor plus a linear guide, a galvanometer deflection motor plus a mechanical linkage or a voice coil motor to drag the focusing lens to achieve zooming. The focusing range is determined by the design parameters of the lens and the movement stroke of the lens. The focusing range is fixed, and the focusing response speed is affected by the performance of the motor, and the response speed is slow. The focusing resolution is affected by the motor control, and the focusing resolution is also relatively low. In addition, the third axis will have motion oscillations during mechanical movement, and factors such as motor acceleration and deceleration will seriously affect the control accuracy of the focal length and the efficiency of the focal length adjustment, thereby affecting the quality and efficiency of laser processing.

[0003] Chinese Patent Publication No.: CN202022528529.4 discloses a dynamic focusing Z-axis structure and a dynamic focusing galvanometer. The dynamic focusing Z-axis structure includes a supporting device and a driving device, the driving device is installed on the supporting device, and also includes a transmission device, the transmission device includes a swing rod and a connecting belt, the swing rod is provided with a cavity, the connecting belt can be elastically deformed but not tensilely deformed, the driving device is connected to the swing rod, the driving device can drive the swing rod to swing, the two sides of the swing rod are respectively provided with connecting belts, and the two connecting belts are cross-arranged at one end away from the swing rod. The utility model uses the flexibility of the steel belt to convert the circular arc swing of the connecting rod into linear motion, and the steel belt is subjected to force in the tangential direction of the circular arc surface of the swing rod, thereby ensuring the consistency of the load and making the rotation of the motor more stable; it can be seen that the following problems exist in the disclosure of a dynamic focusing Z-axis structure and a dynamic focusing galvanometer: 1. The focusing range is determined by the design parameters of the lens and the movement range of the lens, and the focusing range is fixed; 2. The response speed of focusing is affected by the performance of the motor, so the response speed is slow. The resolution of focusing is affected by the motor control, so the resolution of focusing is also low. 3. The third axis will have motion oscillation during mechanical movement, and factors such as motor acceleration and deceleration will seriously affect the control accuracy and efficiency of focal length adjustment. Summary of the invention

[0004] To this end, the present invention provides a laser processing method based on liquid lens dynamic zoom to overcome at least one problem in the prior art.

[0005] To achieve the above object, the present invention provides a laser processing method based on liquid lens dynamic zoom, the method comprising: Step S1, calibrating the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer to obtain a calibrated galvanometer; Step S2, performing parameter configuration on the calibrated galvanometer to obtain a parameter-configured galvanometer; Step S3, analyzing the processed graphics to obtain the processed graphics XY data and processed graphics Z data; Step S4, controlling the liquid lens of the galvanometer mirror after the parameter configuration to zoom according to the processing graphic Z data, and obtaining the laser focus position corresponding to the Z data; Step S5, performing real-time compensation on the liquid lens of the galvanometer mirror after the parameter configuration; Step S6, controlling the xy two-dimensional part of the galvanometer mirror after the parameter configuration according to the processing graphic XY data to perform laser processing at the laser focus position corresponding to the Z data to obtain a processed product.

[0006] Furthermore, in step S1, when the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer are calibrated, the xy two-dimensional part of the galvanometer is calibrated according to the xy two-dimensional part correction method of the galvanometer, and the xy two-dimensional part correction method of the galvanometer includes: Step S100, setting the liquid lens at a zero plane position; Step S101, marking the calibration BOX figure through the xy two-dimensional part of the galvanometer in the workspace coordinate system to obtain the marked calibration BOX figure; Step S102, measuring the actual coordinates of the marked and corrected BOX pattern by an external measuring device to obtain the actual coordinates of nine points in the xy two-dimensional part; Step S103, generating a nine-point calibration file according to the actual coordinates of the nine points of the xy two-dimensional part and the theoretical coordinates of the calibration BOX graphic; Step S104, drawing array marking points in the workspace coordinate system according to the nine-point correction file, marking the array marking points in the galvanometer processing coordinate system using a galvanometer to obtain actual coordinates of the array marking points, measuring the actual coordinates of the array marking points by an external measuring device, comparing and calculating the actual coordinates of the array marking points with the theoretical coordinates of the array marking points, obtaining the relationship between the workspace coordinate system and the galvanometer coordinate system, and completing the correction of the zero plane of the xy two-dimensional part of the galvanometer.

[0007] Furthermore, in the step S1, when the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer are calibrated, the liquid lens of the galvanometer is calibrated according to a liquid lens calibration method, and the liquid lens calibration method includes: Step S110, stratifying the zoom range of the liquid lens to obtain stratified zoom range data, wherein the stratified zoom range data includes data of a positive layer, data of a negative layer, and data of a zero plane, wherein the zero plane is located at a middle position between the positive layer and the negative layer; Step S111, marking a standard rectangle on the zero plane, and using an external measuring device to measure the size of the marked standard rectangle to obtain the size of the zero plane standard rectangle; Step S112, calibrating each layer of the positive layer and the negative layer of the zoom range layered data, marking 9 points for liquid lens correction at the theoretical focal length position of each layer, the 4 positive defocus positions of the positive layer, and the 4 negative defocus positions of the negative layer, and taking the position of the point with the smallest marked point size as the focus of the layer; Step S113, marking a standard rectangle at the focal position of each layer, using an external measuring device to measure the size of the marked standard rectangle, obtaining the size of the standard rectangle of the layer, and comparing and calculating with the size of the standard rectangle marked on the zero plane, obtaining the proportional relationship between the layer and the zero plane, further converting the correction data of the layer according to the correction data of the zero plane and the proportional relationship between the layer and the zero plane, and taking the sum of the correction data of each layer as the correction data set; Step S114, recording the calibration data set to obtain a calibration table.

[0008] Furthermore, in the step S2, when performing parameter configuration, the laser energy intensity parameter, the liquid lens zoom compensation table, the galvanometer acceleration time and the galvanometer speed are configured into the calibrated galvanometer to obtain the parameter-configured galvanometer.

[0009] Furthermore, in the step S3, when the processing graphics are analyzed, the processing graphics are analyzed according to a processing graphics analysis method, and the processing graphics analysis method includes: Step S300, analyzing the processed graphics to obtain 3D curve data, and obtaining node coordinates (x, y, z) according to the 3D curve data; Step S301, setting the x data and y data in the node coordinates (x, y, z) as the processing graph XY data, and setting the z data in the node coordinates (x, y, z) as the processing graph Z data; Step S302, sending the processed pattern XY data to the xy two-dimensional part of the galvanometer after the parameter configuration, and sending the processed pattern Z data to the liquid lens of the galvanometer after the parameter configuration.

[0010] Further, in step S4, the liquid lens of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic Z data to zoom through the Z data processing method to obtain the laser focus position corresponding to the Z data, and the Z data processing method includes: Step S400, after the parameter configuration, the liquid lens of the galvanometer converts the processing pattern Z data into a liquid lens tunable lens control signal; Step S401, after the parameter configuration, the liquid lens of the galvanometer performs lens zooming according to the liquid lens tunable lens control signal to obtain the laser focus position corresponding to the Z data.

[0011] Further, in step S5, the liquid lens of the galvanometer mirror after the parameter configuration is compensated in real time by a compensation method, and the compensation method includes: Step S500, comparing the acquired real-time laser output energy with the liquid lens zoom compensation table to obtain a compensated adjustment liquid lens zoom value; Step S501, performing data processing on the compensation adjustment of the liquid lens zoom value to obtain a zoom driving signal; Step S502 : sending the zoom driving signal to the zoom driving device of the liquid lens of the parameter-configured rear galvanometer mirror to perform zoom compensation on the liquid lens of the parameter-configured rear galvanometer mirror.

[0012] Furthermore, the method for obtaining real-time laser output energy includes: a first method for real-time laser output energy and a second method for real-time laser output energy, wherein the first method for real-time laser output energy includes: Step S510, splitting the laser beam into two beams by using a beam splitter, so that one beam of light is input to a parameter-configured rear galvanometer, and the other beam of light is input to a power meter probe, and the power meter probe obtains the power of the laser output by the laser; Step S511, converting the power of the laser output by the laser into digital form to obtain the real-time energy output by the laser.

[0013] Furthermore, the method for real-time energy output of the second laser includes: Step S520, obtaining a laser energy analog value by monitoring a laser power feedback signal; Step S521, obtaining the real-time output energy of the laser through analog-to-digital conversion according to the laser energy analog quantity.

[0014] Further, in step S6, the xy two-dimensional part of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic XY data, and laser processing is performed at the laser processing focus position corresponding to the Z data by an XY data processing method to obtain a processed product; The XY data processing method comprises: Step S600, after the parameter configuration, the xy two-dimensional part of the galvanometer converts the processing pattern XY data into an XY axis motor driving signal; Step S601, after the parameter configuration, the xy two-dimensional part of the galvanometer is laser processed according to the XY axis motor driving signal to obtain a processed product.

[0015] The beneficial effects of the present invention are as follows: The method corrects the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer through step S1 to obtain a corrected galvanometer, so as to obtain the relationship between the workspace coordinate system and the galvanometer coordinate system, and complete the correction of the zero plane of the xy two-dimensional part of the galvanometer. At the same time, the zoom range of the liquid lens is calibrated in layers to obtain a correction data set of each layer and record it as a correction table, thereby ensuring the accurate correction of the xy two-dimensional part of the galvanometer and the liquid lens, providing a high-precision basis for subsequent processing, thereby significantly improving the processing accuracy. The method configures the parameters of the corrected galvanometer through step S2 to obtain a parameter-configured galvanometer so that the galvanometer can be accurately adjusted and controlled according to different processing requirements during the processing, improves the flexibility and adaptability of the processing, further enhances the stability and reliability of the system, and thus improves the processing efficiency and quality. The method analyzes the processing graphics through step S3 to obtain processing graphics XY data and processing graphics Z data, so as to obtain 3D curve data, and decomposes it into processing graphics XY data and processing graphics Z data, and then sends these data to the xy two-dimensional galvanometer after parameter configuration. Part and liquid lens, this process provides accurate path planning and focus control instructions for laser processing, ensures the high precision and complexity adaptability of the laser processing process, thereby improving the processing precision and efficiency, the method controls the liquid lens of the galvanometer mirror after the parameter configuration to zoom according to the processing graphic Z data through step S4, and obtains the laser focus position corresponding to the Z data so that according to the processing graphic Z data, the Z data is converted into a liquid lens tunable lens control signal, and the lens is zoomed according to the signal to obtain the laser focus position corresponding to the Z data, this process realizes the dynamic adjustment of the laser focus position, ensures that the best processing effect is always maintained in complex laser processing, significantly improves the processing precision and adaptability, and thus provides an important guarantee for high-quality laser processing, the method performs real-time compensation on the liquid lens of the galvanometer mirror after the parameter configuration through step S5 so that by obtaining the real-time output energy of the laser, and comparing it with the liquid lens zoom compensation table, the compensation adjustment liquid lens zoom value is obtained, and then the value is converted into a zoom drive signal and sent to the zoom drive device of the liquid lens to perform zoom compensation on the liquid lens. This process can effectively compensate for the focus shift caused by the change of real-time laser output energy, environmental change or thermal deformation of optical elements, further improving the stability and consistency of the processing process, thereby reducing the influence of system error on processing accuracy. The method controls the xy two-dimensional part of the galvanometer after the parameter configuration according to the processing graphic XY data through step S6 to perform laser processing at the laser focus position corresponding to the Z data to obtain a processed product, so as to convert it into an XY axis motor drive signal according to the processing graphic XY data, and perform laser processing according to the signal to obtain a processed product.This process is combined with the dynamic zoom function of the liquid lens of the galvanometer mirror after parameter configuration to ensure that the laser focus is always in the optimal position, further improving the processing accuracy and efficiency to ensure the quality of the finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the process of the laser processing method based on liquid lens dynamic zoom in this embodiment. DETAILED DESCRIPTION

[0017] In order to make the objects and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with embodiments; it should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0018] Preferred embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0019] It should be noted that, in the description of the present invention, terms such as "up", "down", "left", "right", "inside" and "outside" indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings. This is merely for the convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention.

[0020] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0021] See also Figure 1 As shown, it is a schematic flow chart of the laser processing method based on liquid lens dynamic zoom in this embodiment, and the method includes: Step S1, calibrating the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer to obtain a calibrated galvanometer; Step S2, performing parameter configuration on the calibrated galvanometer to obtain a parameter-configured galvanometer; Step S3, analyzing the processed graphics to obtain the processed graphics XY data and processed graphics Z data; Step S4, controlling the liquid lens of the galvanometer mirror after the parameter configuration to zoom according to the processing graphic Z data, and obtaining the laser focus position corresponding to the Z data; Step S5, performing real-time compensation on the liquid lens of the galvanometer mirror after the parameter configuration; Step S6, controlling the xy two-dimensional part of the galvanometer mirror after the parameter configuration according to the processing graphic XY data to perform laser processing at the laser focus position corresponding to the Z data to obtain a processed product.

[0022] Specifically, the laser processing method based on liquid lens dynamic zoom is applied to laser processing. The method corrects the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer through step S1 to obtain the corrected galvanometer, so as to obtain the relationship between the workspace coordinate system and the galvanometer coordinate system, and complete the correction of the zero plane of the xy two-dimensional part of the galvanometer. At the same time, the zoom range of the liquid lens is calibrated in layers to obtain the correction data set of each layer and record it as a correction table, thereby ensuring the accurate correction of the xy two-dimensional part of the galvanometer and the liquid lens, providing a high-precision foundation for subsequent processing, thereby significantly The processing accuracy is improved. The method configures the parameters of the calibrated galvanometer through step S2 to obtain the parameter-configured galvanometer so that the galvanometer can be accurately adjusted and controlled according to different processing requirements during the processing, thereby improving the flexibility and adaptability of the processing, further enhancing the stability and reliability of the system, and thus improving the processing efficiency and quality. The method parses the processing graphics through step S3 to obtain the processing graphics XY data and the processing graphics Z data, so as to obtain 3D curve data, and decomposes the processing graphics XY data and the processing graphics Z data, and then sends these data to the xy two-dimensional part of the parameter-configured galvanometer and the liquid lens respectively. This process provides accurate path planning and focus control instructions for laser processing, ensuring the high precision and complexity adaptability of the laser processing process, thereby improving the processing accuracy and efficiency. The method controls the liquid lens of the parameter-configured galvanometer to zoom according to the processing graphics Z data through step S4, and obtains the laser focus position corresponding to the Z data, so as to convert the Z data into a liquid lens tunable lens control signal according to the processing graphics Z data, and zoom the lens according to the signal to obtain the corresponding Z data. Laser focus position, this process realizes the dynamic adjustment of laser focus position, ensures that the best processing effect is always maintained in complex laser processing, significantly improves processing accuracy and adaptability, and thus provides an important guarantee for high-quality laser processing. The method performs real-time compensation on the liquid lens of the galvanometer mirror after the parameter configuration through step S5 so as to obtain the real-time output energy of the laser, and compare it with the liquid lens zoom compensation table to obtain the compensation adjustment liquid lens zoom value, and then convert the value into a zoom drive signal and send it to the zoom drive device of the liquid lens to perform zoom compensation on the liquid lens. This process can effectively compensate for the focus offset caused by the change of real-time output energy of the laser, environmental changes or thermal deformation of optical elements, further improve the stability and consistency of the processing process, thereby reducing the influence of system errors on processing accuracy. The method controls the xy two-dimensional part of the galvanometer mirror after the parameter configuration according to the processing graphic XY data through step S6 to perform laser processing at the laser focus position corresponding to the Z data to obtain a processed product, so as to convert it into an XY axis motor drive signal according to the processing graphic XY data, and perform laser processing according to the signal to obtain a processed product.This process is combined with the dynamic zoom function of the liquid lens of the galvanometer mirror after parameter configuration to ensure that the laser focus is always in the optimal position, further improving the processing accuracy and efficiency to ensure the quality of the finished product.

[0023] Specifically, in step S1, when the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer are calibrated, the xy two-dimensional part of the galvanometer is calibrated according to the xy two-dimensional part correction method of the galvanometer, and the xy two-dimensional part correction method of the galvanometer includes: Step S100, setting the liquid lens at the zero plane; Step S101, marking the calibration BOX figure through the xy two-dimensional part of the galvanometer in the workspace coordinate system to obtain the marked calibration BOX figure; Step S102, measuring the actual coordinates of the marked and corrected BOX pattern by an external measuring device to obtain the actual coordinates of nine points in the xy two-dimensional part; Step S103, generating a nine-point calibration file according to the actual coordinates of the nine points of the xy two-dimensional part and the theoretical coordinates of the calibration BOX graphic; Step S104, drawing array marking points in the workspace coordinate system according to the nine-point correction file, marking the array marking points in the galvanometer processing coordinate system using a galvanometer to obtain actual coordinates of the array marking points, measuring the actual coordinates of the array marking points by an external measuring device, comparing and calculating the actual coordinates of the array marking points with the theoretical coordinates of the array marking points, obtaining the relationship between the workspace coordinate system and the galvanometer coordinate system, and completing the correction of the zero plane of the xy two-dimensional part of the galvanometer.

[0024] Specifically, in step S1, when the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer are calibrated, the liquid lens of the galvanometer is calibrated according to a liquid lens calibration method, and the liquid lens calibration method includes: Step S110, stratifying the zoom range of the liquid lens to obtain stratified zoom range data, wherein the stratified zoom range data includes data of a positive layer, data of a negative layer, and data of a zero plane, wherein the zero plane is located at a middle position between the positive layer and the negative layer; Step S111, marking a standard rectangle on the zero plane, and using an external measuring device to measure the size of the marked rectangle to obtain the size of the zero plane standard rectangle; Step S112, calibrating each layer of the positive layer and the negative layer of the zoom range layered data, marking 9 points at the theoretical focal length position of each layer, the four positive defocus positions of the positive layer, and the four negative defocus positions of the negative layer, and taking the position of the point with the smallest marked point size as the focus of the layer; Step S113, marking a standard rectangle at the focal position of each layer, using an external measuring device to measure the size of the marked rectangle, obtaining the standard rectangle size of the layer, and comparing and calculating with the standard rectangle size marked on the zero plane, obtaining the proportional relationship between the layer and the zero plane, further converting the correction data of the layer according to the correction data of the zero plane and the proportional relationship between the layer and the zero plane, and taking the sum of the correction data of each layer as the correction data set; Step S114, recording the calibration data set to obtain a calibration table.

[0025] Specifically, in step S1, by setting the liquid lens of the galvanometer at the zero plane, a reference position is provided for subsequent correction operations. The zero plane is used as the starting point for correction, which can ensure that the subsequent correction operations of the liquid lens of the galvanometer and the xy two-dimensional part of the galvanometer are based on a unified reference plane, thereby improving the accuracy and reliability of the entire correction process; by marking the correction BOX figure, a measurable reference figure of the corrected BOX figure can be generated in the workspace coordinate system, which provides a specific physical mark for subsequent measurement and correction, so that the positioning accuracy of the xy two-dimensional part of the galvanometer can be intuitively evaluated and adjusted; using an external measuring device to perform actual coordinate measurement of the marked correction BOX figure, the marked mark can be accurately obtained. The quasi-rectangular position information enables the deviation between the actual position and the theoretical position of the xy two-dimensional part of the galvanometer to be accurately quantified; by comparing the actual coordinates of the nine points with the theoretical coordinates, a nine-point correction file is generated, which can record in detail the deviation of the xy two-dimensional part of the galvanometer in the workspace coordinate system, providing a specific adjustment basis for subsequent correction operations; by drawing and marking array marker points in the workspace coordinate system, the correction effect of the xy two-dimensional part of the galvanometer is further verified and refined. At the same time, by comparing and calculating the relationship between the workspace coordinate system and the galvanometer processing coordinate system, the two coordinate systems can be accurately aligned, ensuring that the galvanometer can accurately move according to the preset path during subsequent processing, thereby improving processing accuracy.

[0026] Specifically, the workspace coordinate system refers to the workspace of the laser processing control system. The general laser processing control system has its own workspace, which has its own coordinate system, similar to the Cartesian coordinate system of the CNC numerical control system. The external measuring device refers to an independent measuring device outside the processing control system, which can measure the size information in the two-dimensional plane. The general external measuring device refers to a two-dimensional imager. The two-dimensional imager refers to a high-precision measuring device that combines traditional optical projection with computer technology. It uses the principle of optical imaging, a charge-coupled device camera to capture images, and transmits the image data to a computer for processing and analysis, thereby achieving accurate measurement of the workpiece. The nine-point correction file refers to a mapping table, which is a corresponding table of theoretical coordinates and actual coordinate values. The data in the middle of the coordinate values ​​is obtained by calculating the linear difference. The array marking point refers to an array of points in odd rows and odd columns. The multi-point correction process is to sample at equal intervals within the galvanometer processing format. The array points are first marked with theoretical coordinates, and then the actual size is measured to form a mapping of theoretical coordinates and actual coordinates. The galvanometer processing coordinate system refers to the coordinate system of the galvanometer scanning head. The galvanometer scanning head is a common component of laser processing equipment. The galvanometer scanning head has its own coordinate system. The comparison calculation refers to establishing the mapping relationship between the workspace coordinate system and the galvanometer coordinate system through linear interpolation. The specific process is as follows: by marking and measuring the array marking points, several groups of workspace coordinate systems (x workspace coordinate system, y workspace coordinate system) and galvanometer coordinate systems (x galvanometer coordinate system, y galvanometer coordinate system) are obtained. For any unknown point x, if it is located between two known theoretical points (x1, y1) and (x2, y2), its corresponding actual coordinate y can be estimated by the following formula: ,This formula is based on the linear assumption and is used to fill the deviation between the theoretical coordinates and the actual coordinates. The relationship between the workspace coordinate system and the galvanometer coordinate system refers to the global coordinate system of the laser processing system, which defines the absolute position of the processing area (such as the Cartesian coordinate system of the machine tool). The galvanometer coordinate system refers to the local coordinate system of the galvanometer scanning head, whose origin may be inconsistent with the workspace coordinate system, and there are rotation or scaling errors. A set of theoretical marking points are defined in the workspace coordinate system. The galvanometer is used to mark these points in the galvanometer coordinate system, and the actual coordinates are obtained through external measuring equipment. Compare the theoretical coordinates with the actual coordinates, and calculate the position deviation of each point. The workspace is divided into multiple areas, and adjacent known point pairs are selected in each area. The actual deviation of any point in the area is estimated by linear interpolation, and the interpolation results are recorded as a nine-point correction file to form a mapping table of theoretical coordinates and actual coordinates. When processing, the galvanometer dynamically queries the correction file according to the current theoretical coordinates, automatically compensates for the deviation, and ensures the accuracy of the marking position. The theoretical coordinates of the correction BOX graphics refer to the preset ideal coordinate values ​​during laser processing. These coordinates are usually defined based on a standard graphic (such as a square or rectangle) in order to compare them with the actual measured coordinates during the actual processing process for correction. During the correction process, a correction BOX graphic is usually marked and the actual coordinates of the graphic are obtained through an external measuring device. The theoretical coordinate values ​​are calculated based on the designed or preset standard graphic and are usually recorded in the correction file for subsequent correction and adjustment.

[0027] Specifically, in step S2, when performing parameter configuration, the laser energy intensity parameter, the liquid lens zoom compensation table, the galvanometer acceleration time and the galvanometer speed are configured into the calibrated galvanometer to obtain the parameter-configured galvanometer.

[0028] Specifically, a parameter-configured galvanometer is obtained by parameter-configuring the corrected galvanometer. The parameter-configured galvanometer not only improves the processing accuracy and stability, but also enhances the flexibility and adaptability of the system, so that it can meet a variety of complex processing requirements.

[0029] Specifically, in the step S3, when analyzing the processing graph, the processing graph is analyzed according to the processing graph analysis method, and the processing graph analysis method includes: Step S300, analyzing the processed graphics to obtain 3D curve data, and obtaining node coordinates (x, y, z) according to the 3D curve data; Step S301, setting the x data and y data in the node coordinates (x, y, z) as the processing graph XY data, and setting the z data in the node coordinates (x, y, z) as the processing graph Z data; Step S302, sending the processed pattern XY data to the xy two-dimensional part of the galvanometer after the parameter configuration, and sending the processed pattern Z data to the liquid lens of the galvanometer after the parameter configuration.

[0030] Specifically, in step S3, the processing graphics are parsed to extract and decompose the node coordinates into processing graphics XY data and processing graphics Z data, and the processing graphics XY data and processing graphics Z data are sent to the xy two-dimensional part of the galvanometer after parameter configuration and the liquid lens of the galvanometer after parameter configuration, respectively. This provides accurate path planning and focus control instructions for laser processing. At the same time, by parsing 3D curve data, the high precision and complexity adaptability of the laser processing process can be ensured. The node coordinates are decomposed into processing graphics XY data and processing graphics Z data, which simplifies the control logic and improves the response speed and control accuracy of the system. Finally, the data are sent to the corresponding control modules respectively, realizing the coordinated control of the xy two-dimensional movement of the galvanometer after parameter configuration and the zoom operation of the liquid lens of the galvanometer after parameter configuration, which significantly improves the stability and reliability of the processing.

[0031] Specifically, the node coordinates (x, y, z) refer to the core control parameters of 3D laser processing. Through precise analysis and dynamic adjustment, efficient and high-precision processing of complex 3D structures can be achieved. The key is to combine the planar motion of the galvanometer with the vertical zoom of the liquid lens to form a coordinated control system, breaking through the limitations of traditional mechanical focusing. Specifically, in step S4, the liquid lens of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic Z data to zoom through the Z data processing method to obtain the laser focus position corresponding to the Z data, and the Z data processing method includes: Step S400, after the parameter configuration, the liquid lens of the galvanometer converts the processing pattern Z data into a liquid lens tunable lens control signal; Step S401, after the parameter configuration, the liquid lens of the galvanometer performs lens zooming according to the liquid lens tunable lens control signal to obtain the laser focus position corresponding to the Z data.

[0032] Specifically, the liquid lens is composed of a focus-adjustable lens, which is a shape-variable lens based on a combination of optical liquid and polymer film. The core component is composed of two parts, one of which is a container filled with optical liquid and sealed with a thin and elastic polymer film, and the other core component is composed of a motor-driven ring and a liquid pump. The ring pushes the polymer film to shape a tunable lens. The shape curvature of the lens and the radius of the lens can be changed by squeezing the ring or pumping liquid into and out of the container. When the laser passes through the liquid lens, a very small part of the energy of the laser will be absorbed by the liquid lens assembly, and the absorbed energy will be converted into heat, thereby causing the liquid lens lens to deform, resulting in zoom distortion. At this time, by processing the Z data of the processing graphic and converting it into a tunable lens control signal of the liquid lens after parameter configuration, dynamic adjustment of the laser focus position is achieved, so that the laser focus can be adjusted in real time, ensuring that the best processing effect is always maintained in complex laser processing, improving the accuracy and adaptability of laser processing, and providing important guarantees for high-quality laser processing. Specifically, in step S5, the liquid lens of the galvanometer mirror after the parameter configuration is compensated in real time by a compensation method, and the compensation method includes: Step S500, comparing the acquired real-time laser output energy with the liquid lens zoom compensation table to obtain a compensated adjustment liquid lens zoom value; Step S501, performing data processing on the compensation adjustment of the liquid lens zoom value to obtain a zoom driving signal; Step S502 : sending the zoom driving signal to the zoom driving device of the liquid lens of the parameter-configured rear galvanometer mirror to perform zoom compensation on the liquid lens of the parameter-configured rear galvanometer mirror.

[0033] Specifically, the method for obtaining real-time laser output energy includes a first method for real-time laser output energy and a second method for real-time laser output energy. The first method for real-time laser output energy includes: Step S510, splitting the laser beam into two beams by using a beam splitter, so that one beam of light is input to a parameter-configured rear galvanometer, and the other beam of light is input to a power meter probe, and the power meter probe obtains the power of the laser output by the laser; Step S511, converting the power of the laser output by the laser into digital form to obtain the real-time energy output by the laser.

[0034] Specifically, the real-time output energy of the laser is obtained by monitoring the power feedback signal output by the laser and performing analog-to-digital conversion on the power feedback signal output by the monitoring laser; Specifically, the method for real-time energy output of the second laser includes: Step S520, obtaining a laser energy analog value by monitoring a laser power feedback signal; Step S521, obtaining the real-time output energy of the laser through analog-to-digital conversion according to the laser energy analog quantity.

[0035] Specifically, in step S5, the real-time output energy of the laser is compared with the zoom compensation table to obtain the compensation adjustment liquid lens zoom value, thereby ensuring that the zoom operation can be dynamically adjusted according to the change in the real-time output energy of the laser, and the compensation adjustment liquid lens zoom value is converted into a zoom drive signal and sent to the drive device, thereby improving the focus response speed and focus resolution, while avoiding motion oscillation during mechanical movement, motor acceleration and deceleration and other factors, improving the focus control accuracy and focal length adjustment efficiency, and also improving the laser processing effect.

[0036] Specifically, in step S6, the xy two-dimensional part of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic XY data, and laser processing is performed at the laser focus position corresponding to the Z data by the XY data processing method to obtain a processed product; The XY data processing method comprises: Step S600, after the parameter configuration, the xy two-dimensional part of the galvanometer converts the processing pattern XY data into an XY axis motor driving signal; Step S601, after the parameter configuration, the xy two-dimensional part of the galvanometer is laser processed according to the XY axis motor driving signal to obtain a processed product.

[0037] Specifically, the flat processing refers to any product processed by this laser processing method based on liquid lens dynamic zoom, such as high-precision patterns etched on the surface of the material, complex-shaped parts cut out, or precise structures processed in three-dimensional space.

[0038] Specifically, in step S6, the processing graphic XY data is converted into an XY-axis motor drive signal, and laser processing is performed according to the XY-axis motor drive signal to further ensure the stability of the laser processing process and the quality of the processed product, improve the processing accuracy and efficiency, and also ensure that the laser focus is always in the optimal position by combining the dynamic zoom function of the liquid lens of the rear galvanometer after parameter configuration, thereby significantly improving the quality of the processed product.

[0039] So far, the technical solution of the present invention has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.

Claims

1. A laser processing method based on liquid lens dynamic zoom, characterized in that: include: Step S1, calibrating the xy two-dimensional part of the galvanometer and the liquid lens of the galvanometer to obtain a calibrated galvanometer; Step S2, performing parameter configuration on the calibrated galvanometer to obtain a parameter-configured galvanometer; Step S3, analyzing the processed graphics to obtain the processed graphics XY data and processed graphics Z data; Step S4, controlling the liquid lens of the galvanometer mirror after the parameter configuration to zoom according to the processing graphic Z data, and obtaining the laser focus position corresponding to the Z data; Step S5, performing real-time compensation on the liquid lens of the galvanometer mirror after the parameter configuration; Step S6, controlling the xy two-dimensional part of the galvanometer mirror after the parameter configuration according to the processing graphic XY data to perform laser processing at the laser focus position corresponding to the Z data to obtain a processed product.

2. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In the step S1, when the xy two-dimensional part of the galvanometer mirror and the liquid lens of the galvanometer mirror are calibrated, the xy two-dimensional part of the galvanometer mirror is calibrated according to the xy two-dimensional part correction method of the galvanometer mirror, and the xy two-dimensional part correction method of the galvanometer mirror includes: Step S100, setting the liquid lens at the zero plane; Step S101, marking the calibration BOX figure through the xy two-dimensional part of the galvanometer in the workspace coordinate system to obtain the marked calibration BOX figure; Step S102, measuring the actual coordinates of the marked and corrected BOX graphic by an external measuring device to obtain the actual coordinates of nine points in the xy two-dimensional part; Step S103, generating a nine-point calibration file according to the actual coordinates of the nine points of the xy two-dimensional part and the theoretical coordinates of the calibration BOX graphic; Step S104, drawing array marking points in the workspace coordinate system according to the nine-point correction file, marking the array marking points in the galvanometer processing coordinate system using a galvanometer to obtain actual coordinates of the array marking points, measuring the actual coordinates of the array marking points by an external measuring device, comparing and calculating the actual coordinates of the array marking points with the theoretical coordinates of the array marking points, obtaining the relationship between the workspace coordinate system and the galvanometer coordinate system, and completing the correction of the zero plane of the xy two-dimensional part of the galvanometer.

3. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In the step S1, when the xy two-dimensional part of the galvanometer mirror and the liquid lens of the galvanometer mirror are calibrated, the liquid lens of the galvanometer mirror is calibrated according to a liquid lens calibration method, and the liquid lens calibration method includes: Step S110, stratifying the zoom range of the liquid lens to obtain stratified zoom range data, wherein the stratified zoom range data includes data of a positive layer, data of a negative layer, and data of a zero plane, wherein the zero plane is located at a middle position between the positive layer and the negative layer; Step S111, marking a standard rectangle on the zero plane, and using an external measuring device to measure the size of the marked standard rectangle to obtain the size of the zero plane standard rectangle; Step S112, calibrating each layer of the positive layer and the negative layer of the zoom range layered data, marking 9 points for liquid lens correction at the theoretical focal length position of each layer, the 4 positive defocus positions of the positive layer, and the 4 negative defocus positions of the negative layer, and taking the position of the point with the smallest marked point size as the focus of the layer; Step S113, marking a standard rectangle at the focal position of each layer, using an external measuring device to measure the size of the marked rectangle, obtaining the standard rectangle size of the layer, and comparing and calculating with the standard rectangle size marked on the zero plane, obtaining the proportional relationship between the layer and the zero plane, further converting the correction data of the layer according to the correction data of the zero plane and the proportional relationship between the layer and the zero plane, and taking the sum of the correction data of each layer as the correction data set; Step S114, recording the calibration data set to obtain a calibration table.

4. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In step S2, when performing parameter configuration, the laser energy intensity parameter, the liquid lens zoom compensation table, the galvanometer acceleration time and the galvanometer speed are configured into the calibrated galvanometer to obtain the parameter-configured galvanometer.

5. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In the step S3, when analyzing the processing graph, the processing graph is analyzed according to the processing graph analysis method, and the processing graph analysis method includes: Step S300, analyzing the processed graphics to obtain 3D curve data, and obtaining node coordinates (x, y, z) according to the 3D curve data; Step S301, setting the x data and y data in the node coordinates (x, y, z) as the processing graph XY data, and setting the z data in the node coordinates (x, y, z) as the processing graph Z data; Step S302, sending the processed pattern XY data to the xy two-dimensional part of the galvanometer after the parameter configuration, and sending the processed pattern Z data to the liquid lens of the galvanometer after the parameter configuration.

6. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In step S4, the liquid lens of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic Z data to zoom through the Z data processing method to obtain the laser focus position corresponding to the Z data, and the Z data processing method includes: Step S400, after the parameter configuration, the liquid lens of the galvanometer converts the processing pattern Z data into a liquid lens tunable lens control signal; Step S401, after the parameter configuration, the liquid lens of the galvanometer performs lens zooming according to the liquid lens tunable lens control signal to obtain the laser focus position corresponding to the Z data.

7. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In step S5, the liquid lens of the galvanometer mirror after the parameter configuration is compensated in real time by a compensation method, and the compensation method includes: Step S500, comparing the acquired real-time laser output energy with the liquid lens zoom compensation table to obtain a compensated adjustment liquid lens zoom value; Step S501, performing data processing on the compensation adjustment liquid lens zoom value to obtain a zoom driving signal; Step S502 : sending the zoom driving signal to the zoom driving device of the liquid lens of the parameter-configured rear galvanometer mirror to perform zoom compensation on the liquid lens of the parameter-configured rear galvanometer mirror.

8. The laser processing method based on liquid lens dynamic zoom according to claim 7, characterized in that: The method for obtaining real-time laser output energy includes a first method for real-time laser output energy and a second method for real-time laser output energy. The first method for real-time laser output energy includes: Step S510, splitting the laser beam into two beams by using a beam splitter, so that one beam of light is input to a parameter-configured rear galvanometer, and the other beam of light is input to a power meter probe, and the power meter probe obtains the power of the laser output by the laser; Step S511, converting the power of the laser output by the laser into digital form to obtain the real-time energy output by the laser.

9. The laser processing method based on liquid lens dynamic zoom according to claim 8, characterized in that: The method for real-time energy output of the second laser includes: Step S520, obtaining a laser energy analog value by monitoring a laser power feedback signal; Step S521, obtaining the real-time output energy of the laser through analog-to-digital conversion according to the laser energy analog quantity.

10. The laser processing method based on liquid lens dynamic zoom according to claim 1, characterized in that: In step S6, the xy two-dimensional part of the galvanometer mirror after the parameter configuration is controlled according to the processing graphic XY data, and the Z data processing product is laser processed by the XY data processing method to obtain a processed product; The XY data processing method comprises: Step S600, after the parameter configuration, the xy two-dimensional part of the galvanometer converts the processing pattern XY data into an XY axis motor driving signal; Step S601, after the parameter configuration, the xy two-dimensional part of the galvanometer is laser processed according to the XY axis motor driving signal to obtain a processed product.

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