Microtexture cutter with nano TiO2 coating and preparation method of microtexture cutter

Abstract

The invention discloses a micro-texture cutter with a TiO2 coating and a preparation method of the micro-texture cutter, a base material of the cutter is hard alloy, a multi-orientation rhombic micro-texture is machined on a front cutter face, and the coating is the TiO2 coating with the nanoscale thickness; the preparation method comprises the following steps: pretreating a hard alloy matrix, and grinding and polishing the surface of the hard alloy by adopting diamond abrasive paper to enable the hard alloy to be in a mirror surface state; a multi-orientation rhombic microstructure is machined on the surface of the hard alloy cutter base body through a laser machining method; depositing a TiO2 coating on the textured surface by adopting an atomic layer deposition method; and the coating is subjected to annealing post-treatment in a nitrogen atmosphere. The contact area between the cutter and cuttings is reduced through the microtexture, the cuttings and coating falling particles are efficiently collected, and therefore the friction condition in the cutting process is improved. The tool is suitable for cutting operation of low-hardness metal materials, the service life of the tool is prolonged, and the cutting machining efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical cutting tools, in particular to a method for producing a nano-TiO 2 Coated micro-textured tool and method for preparing the same. Background Art

[0002] Innovation in cutting technology, especially the improvement of cutting tool technology, is the key to promoting the development of this field. New processing methods such as dry cutting and high-speed cutting have put forward higher requirements on tool performance, prompting the industry to explore new tool materials, surface micro-textures, coating technologies and geometric structure optimization.

[0003] The surface texturing and coating treatment of cemented carbide tools have become an important way to improve performance. Surface texturing technology forms a micro-texture array with specific size and shape on the surface of the tool by precise processing. Compared with the smooth surface, this specific micro-textured surface exhibits better tribological properties. It can effectively reduce the tool-chip contact area during the processing process, and at the same time has the function of capturing chips and storing lubricating materials, thereby optimizing the cutting process. As an advanced surface modification method, surface coating technology aims to improve the cutting performance of the tool, extend its service life and improve processing efficiency by coating a thin film with specific properties on the surface of the tool.

[0004] However, the bonding problem between the coating and the substrate material has always been the key factor restricting the performance of coated tools. Traditional coating manufacturing technologies, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), have their own advantages, but also have obvious limitations. The deposition temperature of CVD technology is high, which can easily cause thermal damage to the tool substrate material, and the coating thickness control is imprecise and the shape retention is poor; while PVD technology has a fast deposition speed, but the coating bonding force is relatively low. It is mainly suitable for the deposition of planar structures and is difficult to meet the needs of complex structures. ALD technology achieves atomic-level precision control of coating thickness through saturated chemical adsorption self-limiting reaction and exhibits strong bonding force. In addition, its low-temperature deposition characteristics effectively reduce residual thermal stress, and high shape retention ensures high step coverage of the coating on complex structures, especially effective coverage of micro-textured structures. When the coating material reaches the nanoscale, its physical and mechanical properties are significantly improved, showing a lower friction coefficient. More importantly, the synergy between surface texturing technology and surface coating technology is expected to further improve the cutting performance of the tool. How to combine surface texturing technology and ALD deposition technology to develop new nano-scale coating tools with high bonding strength is a technical problem that needs to be solved urgently. Summary of the invention

[0005] Purpose of the invention: The purpose of the present invention is to overcome the shortcomings of the prior art and to provide a nano-TiO 2A coated micro-textured tool and a preparation method thereof, wherein the micro-texture significantly reduces the contact area between the tool and the chips, and provides a place to accommodate the detached coating particles and chips, thereby reducing the friction coefficient and reducing wear during the cutting process; the present invention further improves the coating film-base bonding strength and the physical and mechanical properties of the coating, and improves the cutting performance of the tool; the synergistic effect of the micro-texture and the coating in the present invention significantly reduces the cutting resistance, and greatly improves the cutting performance and service life of the tool.

[0006] Technical solution: The present invention has nano-TiO 2 The coated micro-textured tool has a base material of cemented carbide, a micro-texture on the surface of the base material of the tool, and a multi-oriented diamond micro-texture. The coating is a nano-thick TiO 2 Hard coating.

[0007] The present invention has nano TiO 2 The process of preparing the coated micro-textured tool is as follows: pre-treating the cemented carbide substrate, grinding and polishing the cemented carbide surface with diamond sandpaper to make it mirror-like; processing multi-oriented diamond micro-textures on the surface of the cemented carbide tool substrate by laser processing; depositing TiO on the textured surface by atomic layer deposition 2 The coating is then annealed in a nitrogen atmosphere.

[0008] The present invention has nano TiO 2 A method for preparing a coated micro-textured tool comprises the following steps:

[0009] Step (1), pretreatment of the tool substrate material: grinding and polishing the cemented carbide substrate to a mirror surface with diamond sandpaper of mesh sizes of 240-600-2000-8000, and ultrasonically cleaning with anhydrous ethanol and deionized water for 15 minutes respectively to remove surface impurities and grinding chips.

[0010] Step (2), machining tool surface micro-texture: using nanosecond laser to machine diamond-shaped micro-texture on the mirror surface, the process is as follows:

[0011] Step (2.1), drawing the two-dimensional morphology of the diamond-shaped micro-texture in software such as CAD software, and importing it into the processing software;

[0012] Step (2.2), using laser processing equipment to preheat the laser and galvanometer for 30 minutes to a constant power;

[0013] Step (2.3), place the polished sample on the XY translation stage of the equipment, and adjust the knob to make the sample located in the center of the laser processing area; adjust the Z translation stage so that the surface to be processed is at a set distance from the lens to complete the focus;

[0014] Step (2.4), adjusting the parameters of the laser processing equipment, including the laser scanning speed, laser power, and the number of laser frequency scanning times, according to the material properties of the cemented carbide substrate and the design requirements of the microtexture, to ensure the accuracy and efficiency of the laser processing;

[0015] Step (2.5), starting the laser processing program, using a high-energy density laser beam to ablate the surface of the cemented carbide substrate to form a micro-texture of a predetermined shape and size; the micro-texture reduces the contact area between the tool and the chips, and provides a place to accommodate the detached coating particles and chips, thereby reducing the friction coefficient and wear during the cutting process.

[0016] Step (3), atomic layer deposition to produce nano-scale TiO 2 coating:

[0017] (3.1) ultrasonically cleaning the micro-textured tool obtained in step (2) using acetone, anhydrous ethanol, and deionized water, respectively, and drying with a nitrogen gun to remove organic impurities, inorganic impurities, and static charges;

[0018] (3.2) placing the cleaned micro-textured tool in a quartz tube deposition chamber, with the front cutting surface of the micro-textured tool perpendicular to the airflow direction;

[0019] (3.3) After the pressure in the deposition chamber is pumped down to 0.5 Pa, nitrogen gas is introduced into the pipeline at a nitrogen flow rate of 50 to 200 sccm;

[0020] (3.4) Heat the deposition chamber with a tube furnace at a heating rate of 4-6°C / min to 200°C. At the same time, heat the TiCl 4 Source bottle and H 2 O source bottle, TiCl 4 Source bottle and H 2 Heat the O source bottle to 30-50℃ and keep it warm for 1-1.5h. 4 Source bottle and H 2 The valve of the O source bottle is controlled by a pneumatic valve. 4 and H 2 O vapor is introduced to perform an atomic layer deposition cycle. The cycle is to introduce TiCl 4 —N 2 Cleaning - pass H 2 O—N 2 Cleaning, the preset cycle number is 500 to 2000, and the deposited coating thickness is 50 to 200 nm.

[0021] (3.5) Repeat the preset deposition cycle and deposit different thicknesses of TiO by changing the number of cycles. 2 coating;

[0022] (4)TiO 2 Coating annealing: Place the micro-textured coating tool obtained in step (3) in a tube furnace, evacuate the tube to a pressure of 0.5 Pa, introduce nitrogen, and anneal in a nitrogen atmosphere to obtain TiO 2 Coated micro-textured tool; the heating rate of the tubular furnace is 4-6°C / min, the holding time is 3-4h, and the holding temperature is 400-800°C; after annealing, TiO with anatase structure or rutile structure is obtained 2 Coated micro-textured cutting tools.

[0023] In step (3.4), the process of one cycle of atomic layer deposition is:

[0024] (3.4.1) Using N 2 TiCl was introduced into the reaction chamber. 4 Precursor 1s, TiCl 4 The precursor diffuses to the surface of the micro-textured tool, achieving a chemical saturated adsorption reaction, where Ti atoms replace H atoms in the hydroxyl groups on the surface of the substrate to generate a reaction byproduct, HCl.

[0025] (3.4.2) After the chemical saturated adsorption reaction is completed, N 2 Clean for 10 to 20 seconds to remove the residual TiCl in the deposition chamber. 4 The precursor and the reaction byproduct HCl obtained in step (1);

[0026] (3.4.3) Using N 2 H was introduced into the reaction chamber 2 O precursor, making H 2 O precursor diffuses to the surface of the micro-textured tool to achieve chemical saturation adsorption reaction, H 2 The hydroxyl groups in O replace the Cl atoms adsorbed on the surface of the substrate in step (1), producing a layer of TiO 2 The film forms new surface hydroxyl groups, providing attachment points for the next cycle and generating HCl as a byproduct;

[0027] (3.4.4) After the reaction in step (3.4.3), use N 2 Clean for 10 to 20 seconds to remove the residual H in the deposition chamber. 2 O and HCl, a byproduct of the reaction obtained in step (3).

[0028] Diamond micro-texture was processed on the surface of cemented carbide by laser processing. The parameters of laser processing were as follows: scanning speed of 50 mm / s, laser power of 12 W, laser frequency of 20 kHz, and scanning times of 1 time. The side length of the processed diamond micro-texture was 200-500 μm, the width of the groove was 50 μm, the depth of the groove was 20 μm, and it filled the entire tool-chip contact area. The distance between the main cutting edge and the secondary cutting edge of the tool was 0.1-0.2 mm. After processing, the processed surface was polished with 2000-mesh SiC sandpaper to remove the protrusions on the edge of the micro-texture caused by cooling and recasting, and to reduce the irregular surface contour. The best wear reduction effect was achieved when the side length of the diamond was 400 μm.

[0029] The diamond microtexture has three orientations with a phase difference of 120°, a diamond side length of 200 to 500 μm, a groove width of 50 μm, and a depth of 20 μm.

[0030] The micro-textured area covers at least the tool-chip contact area on the rake face.

[0031] The distance between the micro texture and the main cutting edge and the secondary cutting edge of the tool is 0.1 to 0.2 mm.

[0032] In step (3.4), TiCl 4 Heat to 40~50℃, H 2 O is heated to 40-50°C, high-purity nitrogen is used as carrier gas and cleaning gas, the deposition temperature is 200°C, the deposition pressure is 0.5 Pa, and the deposition thickness is 50-200nm.

[0033] Working principle: The tool base material of the present invention is cemented carbide, multi-oriented diamond micro-texture is processed on the front cutting surface, and the coating is TiO 2 The micro-texture of the coated micro-textured tool is produced by laser processing. 2 The coating is prepared by atomic layer deposition (ALD) technology, and the coating thickness is precisely controlled at 50 to 200 nm, and then annealed to enhance its stability. The microtexture in the present invention reduces the contact area between the tool and the chips, and also has the function of efficiently collecting chips and coating particles, thereby improving the friction conditions during the cutting process. The coating of the coated tool exhibits excellent bonding strength with the substrate, ensuring the high stability of the coating. The surface hardness of the coating is extremely high and the wear resistance is excellent, which significantly improves the overall durability of the tool.

[0034] Beneficial effects: Compared with the prior art, the present invention has the following advantages:

[0035] (1) The present invention processes a multi-oriented diamond micro-texture on the surface of a cemented carbide tool by a comprehensive process of nanosecond laser processing combined with atomic layer deposition and deposits nanoscale TiO2 Coating. Microtexturing technology reduces the actual contact area between the tool surface and the chips, thereby reducing friction resistance and providing space to accommodate the chips, thereby effectively alleviating the bonding phenomenon between the tool and the chips.

[0036] (2) Atomic layer deposition (ALD) technology relies on the saturated chemical adsorption and reaction of chemical precursors on the substrate surface. In each deposition cycle, the precursor molecules are introduced into the reaction chamber and chemically adsorbed with the active sites on the substrate surface to form a monolayer. This adsorption is self-limiting, that is, when the surface active sites are fully occupied, the excess precursor molecules cannot continue to adsorb, thus ensuring that only one atomic layer is deposited in each cycle, achieving precise control of the coating thickness at the atomic scale, showing a high degree of uniformity and conformality, as well as excellent step coverage, ensuring effective and uniform coverage of the micro-texture morphology.

[0037] (3) In addition, the deposition temperature of ALD is low, which avoids the potential damage of high temperature to the tool substrate material and reduces the generation of residual thermal stress. The coating and the tool substrate show strong bonding force. This is because the atomic layer in the nanocoating forms a stable chemical bond connection through chemical saturation adsorption, has a high energy state, is not easy to be destroyed or fall off, and has a higher bonding strength than traditional coatings.

[0038] (4) The present invention performs post-annealing treatment on the deposited coating to further fill the pores and defects in the coating, making the coating structure more compact and uniform, thereby reducing the residual stress of the coating, reducing the stress concentration phenomenon, and improving the bonding strength and hardness of the coating. This treatment process also promotes the growth and phase change of grains in the coating and optimizes the microstructure of the coating.

[0039] (5) The present invention uses atomic layer deposition ALD technology to deposit TiO 2 The coating has high hardness and excellent heat resistance, providing protection for the micro-texture structure and strengthening the tool matrix. The presence of micro-texture not only increases the specific surface area of ​​the tool matrix surface, but also provides more active sites for coating deposition, accelerating the deposition efficiency of the coating. During the cutting process, the nanoparticles produced by the nano-coating material can enter the grooves of the micro-texture and form a sliding-rolling composite friction pair with the chips, thereby improving the friction condition. The synergistic effect of the micro-texture and the coating reduces the cutting resistance and greatly improves the cutting performance and service life of the tool.

[0040] (6) The tool of the present invention is suitable for cutting operations of low-hardness metal materials, greatly prolonging the service life of the tool and significantly improving the production efficiency of cutting processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1The nano-TiO 2 A schematic diagram of the three-dimensional structure of a coated micro-textured tool 100, including a rake face 10, a micro-textured array 11 processed on the rake face 10, and a deposited nano-coating 20;

[0042] Figure 2 Schematic diagram of the specific form and arrangement of the micro texture 11 processed on the rake face 10 in an embodiment of the present invention;

[0043] Figure 3 The coating structure on the micro-texture in the embodiment of the present invention clearly shows the nano-TiO 2 How to uniformly cover the coating 20 on the surface of the micro-textured array 11;

[0044] Figure 4 is a flow chart of a method for preparing a micro-textured tool with a nano-coating in the present invention;

[0045] Figure 5 A flowchart of the atomic layer deposition coating in the present invention;

[0046] Figure 6 Schematic diagram of a single cycle of the atomic layer deposition coating of the present invention. DETAILED DESCRIPTION

[0047] Example:

[0048] The present invention has nano TiO 2 The coated micro-textured turning tool has a substrate made of cemented carbide, a micro-texture on the substrate surface, and a multi-oriented diamond micro-texture. The coating is TiO 2 Hard coating.

[0049] Example 1

[0050] The present invention has nano TiO 2 The preparation method of the coated micro-textured turning tool is as follows:

[0051] Step (1), pretreatment of the tool substrate material: grinding and polishing the cemented carbide substrate to a mirror surface with diamond sandpaper of mesh sizes of 240-600-2000-8000, and ultrasonically cleaning with anhydrous ethanol and deionized water for 15 minutes respectively to remove surface impurities and grinding chips.

[0052] Step (2), processing tool surface microtexture: using nanosecond laser to process diamond microtexture on the mirror surface, the laser parameters used are scanning speed 50mm / s, laser power 12W, laser frequency 20kHz, scanning number 1 time, the processed diamond microtexture has a side length of 300μm, a groove width of 50μm, a groove depth of 20μm, filling the entire tool-chip contact area, and a distance of 0.1mm between the main cutting edge and the secondary cutting edge of the tool; after processing, use 2000 mesh SiC sandpaper to grind the processed surface to remove the protrusions on the edge of the microtexture caused by cooling and recasting, and reduce the irregular surface contour.

[0053] Step (3), atomic layer deposition to produce nano-scale TiO 2 Coating: The micro-textured tool obtained in step (2) was ultrasonically cleaned with acetone, anhydrous ethanol and deionized water respectively, and dried with a nitrogen gun to remove organic impurities, inorganic impurities and static charges; the cleaned micro-textured tool was placed in a quartz tube deposition chamber, with the micro-textured surface perpendicular to the airflow direction, the pressure in the deposition chamber was pumped down to 0.5 Pa, and nitrogen was introduced at a nitrogen flow rate of 50 sccm; the deposition chamber was heated with a tubular furnace at a heating rate of 5°C / min to 200°C, and the front TiCl was heated with a heating belt 4 Source bottle and H 2 O source bottle, TiCl 4 Source bottle and H 2 The O source bottle was heated to 40°C and kept warm for 1.5 hours. After the heat preservation was completed, the valve of the source bottle was opened to carry out the atomic layer deposition cycle. A complete cycle was to pass TiCl 4 (1s)—N 2 Cleaning (10s) - pass H 2 O(1s)—N 2 Cleaning (10s), the preset cycle number is 500, and the deposited coating thickness is 50nm.

[0054] Step (4), TiO 2 Coating annealing: The micro-textured coating tool obtained in step (3) is placed in a tubular furnace, and the tube is evacuated to a pressure of 0.5 Pa; nitrogen is introduced, and annealing is performed in a nitrogen atmosphere; the heating rate of the tubular furnace is 5°C / min, the insulation time is 3h, and the insulation temperature is 400°C; after the annealing is completed, a TiO2 with anatase structure is obtained. 2 Coated micro-textured cutting tools.

[0055] Example 2

[0056] The present invention has nano TiO 2 The preparation method of the coated micro-textured turning tool is as follows:

[0057] Step (1), pretreatment of the tool substrate material: grinding and polishing the cemented carbide substrate to a mirror surface with diamond sandpaper of mesh sizes of 240-600-2000-8000, and ultrasonically cleaning with anhydrous ethanol and deionized water for 15 minutes respectively to remove surface impurities and grinding chips.

[0058] Step (2), processing the micro-texture on the surface of the tool: using nanosecond laser to process diamond micro-texture on the mirror surface, the laser parameters used are scanning speed 50mm / s, laser power 12W, laser frequency 20kHz, scanning number 1 time, the processed diamond micro-texture has a side length of 400μm, a groove width of 50μm, a groove depth of 20μm, filling the entire tool-chip contact area, and a distance of 0.2mm between the main cutting edge and the secondary cutting edge of the tool; after processing, use 2000 mesh SiC sandpaper to grind the processed surface to remove the protrusions on the edge of the micro-texture caused by cooling and recasting, and reduce the irregular surface contour.

[0059] Step (3), atomic layer deposition to produce nano-scale TiO 2 Coating: The micro-textured tool obtained in step (2) was ultrasonically cleaned with acetone, anhydrous ethanol and deionized water respectively, and dried with a nitrogen gun to remove organic impurities, inorganic impurities and static charges; the cleaned micro-textured tool was placed in a quartz tube deposition chamber, with the micro-textured surface perpendicular to the airflow direction, the pressure in the deposition chamber was pumped down to 0.5 Pa, and nitrogen was introduced at a nitrogen flow rate of 200 sccm; the deposition chamber was heated with a tubular furnace at a heating rate of 5°C / min to 200°C, and the TiCl 4 Source bottle and H 2 O source bottle, TiCl 4 Source bottle and H 2 The O source bottle was heated to 50 °C and kept warm for 1 h. After the heat preservation was completed, the valve of the source bottle was opened to carry out the atomic layer deposition cycle. A complete cycle was to pass TiCl 4 (1s)—N 2 Cleaning (20 s) - passing H 2 O(1s)—N 2 Cleaning (20s), the preset cycle number is 1000, and the deposited coating thickness is 100nm.

[0060] Step (4), TiO 2 Coating annealing: The micro-textured coating tool obtained in step (3) is placed in a tubular furnace, and the tube is evacuated to a pressure of 0.5 Pa; nitrogen is introduced and annealing is performed in a nitrogen atmosphere; the heating rate of the tubular furnace is 5°C / min, the insulation time is 4h, and the insulation temperature is 800°C; after the annealing, a TiO2 with a rutile structure is obtained. 2 Coated micro-textured cutting tools.

Claims

1. A micro-textured tool with a nano-TiO2 coating, characterized in that: The tool substrate material is a cemented carbide material, the surface of the tool substrate has a micro texture, the micro texture is a multi-oriented diamond micro texture, and the coating is a TiO2 hard coating.

2. A method for preparing a micro-textured tool with a nano-TiO2 coating as claimed in claim 1, characterized in that: The process is as follows: pre-treat the cemented carbide substrate, grind and polish the cemented carbide surface to a mirror state with diamond sandpaper; process a multi-oriented diamond micro-texture on the surface of the cemented carbide tool substrate by laser processing; deposit a TiO2 coating on the textured surface by atomic layer deposition; and post-treat the coating by annealing in a nitrogen atmosphere.

3. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 2, characterized in that: The following steps are involved: Step (1), pretreatment of the tool substrate material: grinding and polishing the cemented carbide substrate to a mirror surface with diamond sandpaper with a mesh size of 240-600-2000-8000, and ultrasonically cleaning with anhydrous ethanol and deionized water; Step (2), machining tool surface micro-texture: using nanosecond laser to machine diamond-shaped micro-texture on the mirror surface, the process is as follows: Step (2.1), draw the two-dimensional morphology of the diamond microtexture in the software and import it into the processing software; Step (2.2), using laser processing equipment, preheating the laser and the galvanometer to a constant power; Step (2.3), place the polished sample at the center of the laser processing area; adjust the Z-axis translation stage to focus on the surface to be processed; Step (2.4), adjusting the laser scanning speed, laser power and laser frequency scanning times of the laser processing equipment according to the material properties of the cemented carbide substrate and the design requirements of the microtexture; Step (2.5), ablating the surface of the cemented carbide substrate using a laser beam to form a micro-texture of a predetermined shape and size; Step (3), using atomic layer deposition method to manufacture TiO2 coating, the process is as follows: (3.1) ultrasonically cleaning the micro-textured tool obtained in step (2) with acetone, anhydrous ethanol, and deionized water, and drying with a nitrogen gun; (3.2) placing the cleaned micro-textured tool in the deposition chamber, with the front cutting surface of the micro-textured tool perpendicular to the airflow direction; (3.3) Evacuate the deposition chamber, introduce nitrogen into the pipeline, and control the flow rate; (3.4) heating the deposition chamber, the TiCl4 source bottle and the H2O source bottle, and keeping them warm to maintain the temperature at the set temperature; after keeping warm, opening the valves of the TiCl4 source bottle and the H2O source bottle at the same time, using a pneumatic valve to control the introduction of TiCl4 and H2O vapors, and performing an atomic layer deposition cycle, wherein the cycle is: introducing TiCl4—N2 cleaning—introducing H2O—N2 cleaning, and one layer of coating is deposited in one cycle; (3.5) Repeating the preset deposition cycle to deposit TiO2 coatings of different thicknesses by changing the number of cycles; (4) TiO2 coating annealing: placing the micro-textured coating tool obtained in step (3) in a tube furnace and evacuating the tube; Nitrogen was introduced and annealing was performed in a nitrogen atmosphere to obtain a TiO2 coated micro-textured tool.

4. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 3, characterized in that: In step (3.4), the process of one cycle of atomic layer deposition is: (3.4.1) Using N2 to introduce TiCl4 precursor into the reaction chamber, the TiCl4 precursor diffuses onto the surface of the micro-textured tool to achieve a chemical saturated adsorption reaction, whereby Ti atoms replace H atoms in the hydroxyl groups on the surface of the substrate to generate a reaction byproduct, HCl; (3.4.2) After the chemical saturated adsorption reaction is completed, use N2 to clean for 10 to 20 seconds to remove the residual TiCl4 precursor and the reaction byproduct HCl obtained in step (1) in the deposition chamber; (3.4.3) introducing H2O precursor into the reaction chamber by using N2 to diffuse the H2O precursor onto the surface of the micro-textured tool to achieve a chemical saturation adsorption reaction, wherein the hydroxyl groups in the H2O replace the Cl atoms adsorbed on the surface of the substrate in step (1), thereby producing a TiO2 film and forming new surface hydroxyl groups, which provide attachment points for the next cycle and generate HCl as a byproduct; (3.4.4) After the reaction in step (3.4.3), use N2 to purge for 10 to 20 seconds to remove the residual H2O in the deposition chamber and the reaction by-product HCl obtained in step (3).

5. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 3, characterized in that: Laser processing was used to produce diamond micro-texture on the surface of cemented carbide; the parameters of laser processing were: scanning speed of 50 mm / s, laser power of 12 W, laser frequency of 20 kHz, and scanning times of 1 time.

6. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 5, characterized in that: The diamond micro-texture has three orientations with a phase difference of 120°, a diamond side length of 200-500 μm, a groove width of 50 μm, and a depth of 20 μm.

7. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 5, characterized in that: The micro-textured area at least covers the tool-chip contact area on the rake face.

8. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 5, characterized in that: The distance between the micro texture and the main cutting edge and the secondary cutting edge of the tool is 0.1-0.2 mm.

9. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 3, characterized in that: In step (3.4), TiCl4 is heated to 40-50°C, H2O is heated to 40-50°C, high-purity nitrogen is used as carrier gas and cleaning gas, the deposition temperature is 200°C, the deposition pressure is 0.5 Pa, and the deposition thickness is 50-200 nm.

10. The method for preparing a micro-textured tool with a nano-TiO2 coating according to claim 3, characterized in that: In step (1), the tool substrate material is pretreated by grinding and polishing the cemented carbide substrate to a mirror surface using diamond sandpaper with a mesh size of 240-600-2000-8000.

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