Magnetic bearing molecular pump

Abstract

The invention discloses a magnetic bearing molecular pump which comprises a molecular pump main body and a control main body, the molecular pump main body is connected with the control main body, the control main body is used for controlling the molecular pump main body to work, and a vacuum cavity is formed in the molecular pump main body; and the cooling device is arranged outside the vacuum cavity, and the cooling device is in heat exchange fit with at least one of the molecular pump main body and the control main body. According to the magnetic bearing molecular pump, the cooling device is arranged outside the vacuum cavity, the maintenance difficulty of the magnetic bearing molecular pump can be reduced, the risk that a cooling medium leaks in the vacuum cavity can be reduced, and therefore the risk that the production qualification rate of products (such as semiconductors and photovoltaic panels) is reduced due to the fact that the cooling medium leaks is reduced; the sealing structure of the cooling device can be simplified, so that the production cost of the magnetic bearing molecular pump is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of molecular pump cooling, in particular to a magnetic bearing molecular pump. Background Art

[0002] Molecular pumps are mainly used in the fields of semiconductor component production, photovoltaic panel production, etc. By vacuuming with molecular pumps, the production environment requirements of products (such as semiconductors, photovoltaic panels, etc.) can be met.

[0003] In the related art, the molecular pump is cooled by liquid cooling. However, the sealing structure of the liquid-cooled molecular pump is complex, the molecular pump is inconvenient to maintain, the production cost is high, and the cooling system is arranged in the vacuum chamber of the molecular pump. There is a high risk of coolant leakage, and coolant leakage can easily lead to a low product qualification rate. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide a magnetic bearing molecular pump, which reduces the maintenance difficulty and production cost of the magnetic bearing molecular pump, and can also reduce the risk of cooling medium leakage in the vacuum chamber and improve the product qualification rate.

[0005] According to an embodiment of the present invention, a magnetic bearing molecular pump comprises: a molecular pump body and a control body, wherein the molecular pump body and the control body are connected, the control body is used to control the operation of the molecular pump body, and the molecular pump body forms a vacuum chamber; a cooling device, which is arranged outside the vacuum chamber, and the cooling device cooperates with at least one of the molecular pump body and the control body for heat exchange.

[0006] According to the magnetic bearing molecular pump of the embodiment of the present invention, by arranging the cooling device outside the vacuum chamber, it is helpful to reduce the maintenance difficulty of the magnetic bearing molecular pump, and can also reduce the risk of leakage of the cooling medium in the vacuum chamber, thereby reducing the risk of reduced production qualification rate of products (for example: semiconductors, photovoltaic panels, etc.) caused by leakage of the cooling medium. In addition, the cooling device is arranged outside the vacuum chamber, which can simplify the sealing structure of the cooling device, thereby reducing the production cost of the magnetic bearing molecular pump.

[0007] In some embodiments of the present invention, the cooling device includes: a first cooling device, the first cooling device is arranged on the peripheral wall of the molecular pump body and corresponds to the vacuum chamber, and the first cooling device cooperates with the molecular pump body for heat exchange.

[0008] In some embodiments of the present invention, the first cooling device is disposed around the molecular pump body along the circumference of the molecular pump body.

[0009] In some embodiments of the present invention, a mounting groove is formed on the peripheral wall of the molecular pump body, the mounting groove corresponds to the vacuum chamber, and at least a portion of the first cooling device is located in the mounting groove.

[0010] In some embodiments of the present invention, the magnetic bearing molecular pump further comprises: a shielding member, wherein the mounting groove is recessed toward the inside of the molecular pump body and the end of the mounting groove facing away from the vacuum chamber is open, and the shielding member is arranged at the open end of the mounting groove to shield at least part of the open end of the mounting groove.

[0011] In some embodiments of the present invention, the first cooling device includes: a first cooling tube, which is arranged around the molecular pump body along the circumference of the molecular pump body, and has a first inlet joint and a first outlet joint at both ends of the first cooling tube.

[0012] In some embodiments of the present invention, the cooling device includes: a second cooling device, the second cooling device is arranged on the control body, and the second cooling device and the control body cooperate in heat exchange.

[0013] In some embodiments of the present invention, the second cooling device and the first cooling device are connected in series.

[0014] In some embodiments of the present invention, the second cooling device includes: a second cooling pipe, and a second inlet joint and a second outlet joint are respectively provided at both ends of the second cooling pipe; the first cooling device includes a first cooling pipe, and a first inlet joint and a first outlet joint are respectively provided at both ends of the first cooling pipe, and the second inlet joint is connected to the first outlet joint.

[0015] In some embodiments of the present invention, the first cooling pipe has a first cooling channel, the second cooling pipe has a second cooling channel, and the cross-sectional area of ​​the first cooling channel is greater than the cross-sectional area of ​​the second cooling channel.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic structural diagram of a magnetic bearing molecular pump according to an embodiment of the present invention;

[0019] Figure 2 is a schematic structural diagram of a first cooling device according to an embodiment of the present invention;

[0020] Figure 3 is a schematic structural diagram of a second cooling device according to an embodiment of the present invention.

[0021] Reference numerals:

[0022] Magnetic bearing molecular pump 100;

[0023] Molecular pump body 1; mounting groove 11; blade 12;

[0024] Control body 2; control box 21;

[0025] Cooling device 3; first cooling device 31; first cooling pipe 311; first inlet connector 312; first outlet connector 313;

[0026] The second cooling device 32; the second cooling pipe 321; the second inlet connector 322; the second outlet connector 323; the first pipe section 324; the second pipe section 325; the third pipe section 326;

[0027] Shielding member 4. DETAILED DESCRIPTION

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] Reference below Figure 1-Figure 3 A magnetic bearing molecular pump 100 according to an embodiment of the present invention is described.

[0030] like Figure 1-Figure 3 As shown, the magnetic bearing molecular pump 100 according to an embodiment of the present invention includes: a molecular pump body 1 and a control body 2, the molecular pump body 1 and the control body 2 are connected, the control body 2 is used to control the operation of the molecular pump body 1, and the molecular pump body 1 forms a vacuum chamber; a cooling device 3, the cooling device 3 is arranged outside the vacuum chamber, and the cooling device 3 cooperates with at least one of the molecular pump body 1 and the control body 2 for heat exchange.

[0031] Wherein, the molecular pump body 1 may include blades 12, and the blades 12 may be configured as turbine blades. The molecular pump body 1 is formed with a vacuum chamber, and the blades 12 may be assembled in the vacuum chamber. The molecular pump body 1 is connected to the control body 2, for example: the molecular pump body 1 and the control body 2 may be connected via a line, or the molecular pump body 1 and the control body 2 may be connected via Bluetooth, and the control body 2 is used to control the operation of the molecular pump body 1, for example: the control body 2 may control the rotation of the turbine blades, and the high-speed rotating turbine blades transmit momentum to the gas molecules, so that the gas molecules obtain a directional speed, thereby being compressed and driven to the exhaust port and then drawn away, so as to achieve the effect of vacuuming the magnetic bearing molecular pump 100, and thereby the magnetic bearing molecular pump 100 may be applied to the production of semiconductor components, photovoltaic panels and other fields requiring vacuum environment production.

[0032] The cooling device 3 can cool the molecular pump body 1. Since the molecular pump body 1 generates heat during operation, the cooling device 3 can be provided to reduce the risk of failure of the magnetic bearing molecular pump 100 caused by overheating of the molecular pump body 1. The cooling device 3 is provided outside the vacuum chamber. Such a setting can make the position of the cooling device 3 reasonably set. By providing the cooling device 3 outside the vacuum chamber, the occupation of the space inside the vacuum chamber by the cooling device 3 can be avoided, thereby reducing the maintenance difficulty of the magnetic bearing molecular pump 100, and the risk of leakage of the cooling medium in the vacuum chamber can be reduced, thereby reducing the risk of reduced production qualification rate of products (such as semiconductors, photovoltaic panels, etc.) caused by leakage of the cooling medium. In addition, the cooling device 3 is provided outside the vacuum chamber, which can simplify the sealing structure of the cooling device 3, thereby reducing the production cost of the magnetic bearing molecular pump 100.

[0033] The cooling device 3 cooperates with at least one of the molecular pump body 1 and the control body 2 for heat exchange. As some embodiments of the present application, the cooling device 3 cooperates with the molecular pump body 1 for heat exchange. As some embodiments of the present application, the cooling device 3 cooperates with the control body 2 for heat exchange. As some embodiments of the present application, the cooling device 3 cooperates with both the molecular pump body 1 and the control body 2 for heat exchange. The present application is illustrated by taking the heat exchange cooperation between the cooling device 3 and the molecular pump body 1 and the control body 2 as an example. Such a setting is conducive to the cooling device 3 being able to cool both the molecular pump body 1 and the control body 2, reducing the risk of damage to the magnetic bearing molecular pump 100 due to excessive temperature of the cooling device 3 or the molecular pump body 1, and is conducive to improving the reliability and service life of the magnetic bearing molecular pump 100.

[0034] Specifically, the molecular pump body 1 is connected to the control body 2, and the control body 2 is used to control the operation of the molecular pump body 1. By controlling the molecular pump body 1 to evacuate, the magnetic bearing molecular pump 100 can be widely used in various occasions requiring high vacuum. The molecular pump body 1 is formed with a vacuum chamber, and the cooling device 3 is arranged outside the vacuum chamber to reduce the occupation of the cooling device 3 on the internal space of the vacuum chamber, and can also reduce the risk of leakage of the cooling medium in the vacuum chamber. The cooling device 3 cooperates with the molecular pump body 1 and the control body 2 in heat exchange to reduce the risk of excessive temperature of the molecular pump body 1 or the control body 2, so that the magnetic bearing molecular pump 100 can work reliably.

[0035] Therefore, by arranging the cooling device 3 outside the vacuum chamber, it is helpful to reduce the maintenance difficulty of the magnetic bearing molecular pump 100, and can also reduce the risk of leakage of the cooling medium in the vacuum chamber, thereby reducing the risk of reduced production qualification rate of products (for example: semiconductors, photovoltaic panels, etc.) caused by leakage of the cooling medium. In addition, the cooling device 3 is arranged outside the vacuum chamber, which can simplify the sealing structure of the cooling device 3, thereby reducing the production cost of the magnetic bearing molecular pump 100.

[0036] In some embodiments of the present invention, Figure 1-Figure 2 As shown, the cooling device 3 may include: a first cooling device 31, which is arranged on the peripheral wall of the molecular pump body 1 and corresponds to the vacuum chamber, and the first cooling device 31 and the molecular pump body 1 cooperate in heat exchange.

[0037] Among them, the first cooling device 31 is arranged on the peripheral wall of the molecular pump body 1, for example: the first cooling device 31 can be arranged around the molecular pump body 1. Along the radial direction of the vacuum chamber, the first cooling device 31 is arranged corresponding to the vacuum chamber, and the first cooling device 31 and the molecular pump body 1 cooperate in heat exchange. Since the friction of the magnetic bearing molecular pump 100 is small during operation, the heat of the magnetic bearing molecular pump 100 mainly comes from the motor that controls the rotation of the blades 12. By arranging the first cooling device 31 on the peripheral wall of the molecular pump body 1 and corresponding to the vacuum chamber, the structural position of the first cooling device 31 can be reasonably arranged, which is conducive to the first cooling device 31 being arranged close to the motor, facilitating the first cooling device 31 to exchange heat with the motor, thereby keeping the temperature of the molecular pump body 1 in a suitable range, which is conducive to reducing the risk of damage to the molecular pump body 1 due to excessive temperature of the molecular pump body 1, thereby improving the working reliability of the molecular pump body 1, and thus extending the service life of the magnetic bearing molecular pump 100.

[0038] In some embodiments of the present invention, Figure 1-Figure 2 As shown, the first cooling device 31 is arranged around the molecular pump body 1 along the circumference of the molecular pump body 1 .

[0039] Among them, along the circumference of the molecular pump body 1, the first cooling device 31 is arranged around the molecular pump body 1. Such an arrangement can make the structural position of the first cooling device 31 reasonably arranged, which is beneficial to the uniform heat exchange between the first cooling device 31 and the molecular pump body 1 along the circumference of the molecular pump body 1, and reduce the risk of damage to the molecular pump body 1 caused by local overheating of the molecular pump body 1, thereby improving the working reliability of the molecular pump body 1, which is beneficial to further extend the service life of the molecular pump body 1.

[0040] In some embodiments of the present invention, Figure 1-Figure 2 As shown, a mounting groove 11 is formed on the peripheral wall of the molecular pump body 1 , the mounting groove 11 corresponds to the vacuum chamber, and at least a part of the first cooling device 31 is located in the mounting groove 11 .

[0041] The molecular pump body 1 is formed with a mounting groove 11, which is formed on the peripheral wall of the molecular pump body 1. Along the radial direction of the vacuum chamber, the mounting groove 11 is recessed toward the vacuum chamber so that the mounting groove 11 corresponds to the vacuum chamber. The mounting groove 11 can provide an assembly position for the first cooling device 31. At least part of the first cooling device 31 is located in the mounting groove 11. For example, part of the first cooling device 31 is located in the mounting groove 11, or the entire structure of the first cooling device 31 is located in the mounting groove 11. This application is described by taking the first cooling device 31 as being located in the mounting groove 11 as an example. By 1 is arranged in the installation groove 11, which can reduce the overall volume of the magnetic bearing molecular pump 100, thereby facilitating the arrangement of the magnetic bearing molecular pump 100, and is also conducive to the corresponding arrangement of the first cooling device 31 and the vacuum chamber, so that the first cooling device 31 is arranged close to the motor, which is convenient for the first cooling device 31 to exchange heat with the motor, thereby keeping the temperature of the molecular pump body 1 within a suitable range, further reducing the risk of damage to the molecular pump body 1 due to local overheating of the molecular pump body 1, and the side wall and bottom wall of the installation groove 11 can limit the first cooling device 31, so that the first cooling device 31 is firmly installed on the molecular pump body 1.

[0042] In some embodiments of the present invention, Figure 1 As shown, the magnetic bearing molecular pump 100 may further include: a shielding member 4, the mounting groove 11 is recessed toward the molecular pump body 1, and the mounting groove 11 is open at the end away from the vacuum chamber, and the shielding member 4 is arranged at the open end of the mounting groove 11 to shield at least part of the open end of the mounting groove 11.

[0043] Among them, the shielding member 4 can be constructed of rubber material, and the shielding member 4 can also be constructed of metal material. The mounting groove 11 is recessed toward the molecular pump body 1, and the mounting groove 11 is open at the end away from the vacuum chamber, and the shielding member 4 is used to shield the open end of the mounting groove 11. Specifically, the shielding member 4 is arranged at the open end of the mounting groove 11, so that the shielding member 4 shields at least part of the open end of the mounting groove 11, for example: the shielding member 4 can shield part of the open end, and the shielding member 4 can also shield the entire open end. By arranging the shielding member 4 at the open end of the mounting groove 11, the shielding member 4 can shield the first cooling device 31, which is conducive to the stable operation of the first cooling device 31 in the mounting groove 11, reducing the interference of the external environment on the first cooling device 31, and is conducive to improving the working stability of the first cooling device 31. In addition, the shielding member 4 can limit the first cooling device 31 to reduce the risk of the first cooling device 31 moving out of the mounting groove 11 from the open end of the mounting groove 11.

[0044] Furthermore, by setting a shielding member 4 to shield the open end of the mounting groove 11, the risk of heat exchange between the first cooling device 31 and the external environment through the open end of the mounting groove 11 can be reduced, thereby reducing the risk of poor cooling effect of the first cooling device 31 on the molecular pump body 1, which is beneficial to reliable heat exchange between the first cooling device 31 and the molecular pump body 1, thereby reducing the risk of excessive temperature of the molecular pump body 1, which is beneficial to the stable operation of the molecular pump body 1.

[0045] In some embodiments of the present invention, Figure 1-Figure 2 As shown, the first cooling device 31 may include: a first cooling pipe 311, which is arranged around the molecular pump body 1 along the circumference of the molecular pump body 1, and a first inlet joint 312 and a first outlet joint 313 are respectively provided at both ends of the first cooling pipe 311.

[0046] Among them, the structural dimensions of the first cooling tube 311 are adapted to the structural dimensions of the molecular pump body 1. For example, when the cross-section of the molecular pump body 1 is circular, the first cooling tube 311 can also be constructed as a circle, so that along the circumference of the molecular pump body 1, the first cooling tube 311 can be arranged around the molecular pump body 1. Such an arrangement can increase the relative area between the first cooling tube 311 and the molecular pump body 1, which is beneficial to improving the heat exchange effect between the first cooling tube 311 and the molecular pump body 1.

[0047] A first inlet joint 312 and a first outlet joint 313 are respectively provided at both ends of the first cooling pipe 311. The first cooling pipe 311 can form a first cooling channel. The first cooling channel can be arranged around the molecular pump body 1 along the circumference of the molecular pump body 1. The first cooling channel connects the first inlet joint 312 and the first outlet joint 313. After the cooling medium flows out of the refrigerator, it can enter the first cooling channel through the first inlet joint 312 and flow around the circumference of the molecular pump body 1 along the first cooling channel. The cooling medium absorbs the heat of the molecular pump body 1 during the flow in the first cooling channel to achieve the effect of heat exchange with the molecular pump body 1. After the heat exchange is completed, the cooling medium flows out of the first cooling channel through the first outlet joint 313, thereby achieving the effect of the first cooling device 31 cooling the molecular pump body 1.

[0048] In some embodiments of the present invention, Figure 1 and Figure 3 As shown, the cooling device 3 may include: a second cooling device 32, the second cooling device 32 is arranged on the control body 2, and the second cooling device 32 and the control body 2 cooperate in heat exchange.

[0049] Among them, the control body 2 may include a control box 21, and at least part of the second cooling device 32 is arranged in the control box 21 to reduce the risk of heat exchange between the second cooling device 32 and the external environment, which is conducive to reliable heat exchange between the second cooling device 32 and the control body 2. The second cooling device 32 is arranged on the control body 2, for example: the second cooling device 32 and the control body 2 can be connected by bolts, and the second cooling device 32 and the control body 2 can also be connected by snap-on connection. The second cooling device 32 and the control body 2 cooperate in heat exchange. By setting the second cooling device 32, the second cooling device 32 can cool down the control body 2, which is conducive to keeping the temperature of the control body 2 within a suitable range, reducing the risk of damage to the control body 2 due to excessive temperature of the control body 2, thereby improving the working reliability of the control body 2, and making it conducive to the control body 2 to reliably control the molecular pump body 1 to work, thereby extending the service life of the magnetic bearing molecular pump 100.

[0050] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the second cooling device 32 and the first cooling device 31 are connected in series.

[0051] Among them, the second cooling device 32 and the first cooling device 31 are arranged in series. Such an arrangement can make the arrangement of the second cooling device 32 and the first cooling device 31 reasonable. The cooling medium can continue to enter the second cooling device 32 for heat exchange after heat exchange in the first cooling device 31, which is beneficial to reduce the performance loss of the cooling device 3 and improve the utilization efficiency of the cooling medium, thereby reducing the use cost of the magnetic bearing molecular pump 100, and further reducing the production cost of products processed by the magnetic bearing molecular pump 100 (for example: semiconductors, photovoltaic panels, etc.), which is beneficial to improve the economy of the magnetic bearing molecular pump 100.

[0052] In some embodiments of the present invention, Figure 1-Figure 3 As shown, the second cooling device 32 may include: a second cooling pipe 321, and the two ends of the second cooling pipe 321 are respectively provided with a second inlet joint 322 and a second outlet joint 323, and the first cooling device 31 includes a first cooling pipe 311, and the two ends of the first cooling pipe 311 are respectively provided with a first inlet joint 312 and a first outlet joint 313, and the second inlet joint 322 is connected to the first outlet joint 313.

[0053] Wherein, as some embodiments of the present application, the second cooling pipe 321 can be configured as a circular pipe. As some embodiments of the present application, the second cooling pipe 321 can be configured as a "U"-shaped pipe. The second cooling pipe 321 has a second inlet joint 322 and a second outlet joint 323 at both ends, respectively, and the second cooling pipe 321 can form a second cooling channel, and the second cooling channel connects the second inlet joint 322 and the second outlet joint 323.

[0054] As some embodiments of the present application, the second cooling pipe 321 may include a first pipe segment 324, a second pipe segment 325 and a third pipe segment 326, the second pipe segment 325 is bent and connected between the first pipe segment 324 and the third pipe segment 326, the second inlet joint 322 is arranged at the end of the first pipe segment 324 away from the second pipe segment 325, the second outlet joint 323 is arranged at the end of the third pipe segment 326 away from the second pipe segment 325, the second inlet joint 322 and the second outlet joint 323 are arranged at one end of the control body 2, so that the cooling medium can flow into the second cooling pipe 321 through the second inlet joint 322, flow a loop in the second cooling pipe 321, and flow out of the second cooling pipe 321 through the second outlet joint 323, thereby improving the heat exchange effect between the second cooling device 32 and the control body 2.

[0055] The first cooling device 31 includes a first cooling tube 311, and the first inlet joint 312 and the first outlet joint 313 are respectively provided at both ends of the first cooling tube 311, and the second inlet joint 322 is connected to the first outlet joint 313. After the cooling medium flows out of the refrigerator, it can enter the first cooling channel through the first inlet joint 312, and flow circumferentially around the molecular pump body 1 along the first cooling channel. The cooling medium absorbs the heat of the molecular pump body 1 during the flow in the first cooling channel, so as to achieve the effect of heat exchange between the first cooling device 31 and the molecular pump body 1.

[0056] After the heat exchange is completed, the cooling medium flows out of the first cooling channel through the first outlet joint 313, and flows into the second cooling channel through the second inlet joint 322. The cooling medium absorbs the heat of the control body 2 during the flow in the second cooling channel to achieve the effect of heat exchange between the second cooling device 32 and the control body 2. After the heat exchange is completed, the cooling medium flows out of the second cooling channel through the second outlet joint 323, and flows back to the refrigerator for cooling, thereby realizing the recycling of the cooling medium.

[0057] By connecting the second inlet joint 322 with the first outlet joint 313, the distance between the second cooling device 32 and the first cooling device 31 can be reduced, which is beneficial to further reduce the performance loss of the cooling device 3 and improve the utilization efficiency of the cooling medium. It can also achieve the effect of connecting the second cooling device 32 and the first cooling device 31 in series. After the cooling medium is heat exchanged in the first cooling device 31, it can continue to enter the second cooling device 32 for heat exchange, which is beneficial to further improve the utilization efficiency of the cooling medium, thereby reducing the use cost of the magnetic bearing molecular pump 100.

[0058] As some embodiments of the present application, the first cooling tube 311 and the second cooling tube 321 can be constructed as copper tubes, the second inlet joint 322 and the second outlet joint 323 are respectively arranged at both ends of the second cooling tube 321, and the second inlet joint 322 and the second outlet joint 323 can be constructed as compression sleeve type pipe joints, which is beneficial to improve the layout flexibility of the second cooling device 32.

[0059] In some embodiments of the present invention, Figure 2-Figure 3 As shown, the first cooling pipe 311 has a first cooling channel, the second cooling pipe 321 has a second cooling channel, and the cross-sectional area of ​​the first cooling channel is greater than the cross-sectional area of ​​the second cooling channel.

[0060] Among them, the cross-sectional area of ​​the first cooling channel is larger than the cross-sectional area of ​​the second cooling channel. For example, the cross-sectional area of ​​the first cooling channel may be twice, three times, etc., of the cross-sectional area of ​​the second cooling channel. Such a setting can make the cross-sectional area of ​​the first cooling channel and the cross-sectional area of ​​the second cooling channel reasonably set. The cross-sectional area of ​​the first cooling channel is larger than the cross-sectional area of ​​the second cooling channel, which can make the flow rate of the cooling medium in the second cooling channel greater than the flow rate of the cooling medium in the first cooling channel. Since the cooling medium first passes through the first cooling channel and then passes through the second cooling channel, the cooling medium has a faster speed in the second cooling channel, which can reduce the risk of poor cooling effect on the control body 2 due to secondary heat exchange of the cooling medium, thereby helping to improve the heat exchange effect between the second cooling device 32 and the control body 2.

[0061] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0062] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A magnetic bearing molecular pump (100), characterized in that: include: A molecular pump body (1) and a control body (2), wherein the molecular pump body (1) and the control body (2) are connected, the control body (2) is used to control the operation of the molecular pump body (1), and the molecular pump body (1) forms a vacuum chamber; A cooling device (3), wherein the cooling device (3) is arranged outside the vacuum chamber, and the cooling device (3) cooperates with at least one of the molecular pump body (1) and the control body (2) for heat exchange.

2. The magnetic bearing molecular pump (100) according to claim 1, characterized in that: The cooling device (3) comprises: a first cooling device (31), the first cooling device (31) being arranged on the peripheral wall of the molecular pump body (1) and corresponding to the vacuum chamber, and the first cooling device (31) and the molecular pump body (1) being in heat exchange cooperation.

3. The magnetic bearing molecular pump (100) according to claim 2, characterized in that: The first cooling device (31) is arranged around the molecular pump body (1) along the circumference of the molecular pump body (1).

4. The magnetic bearing molecular pump (100) according to claim 2, characterized in that: A mounting groove (11) is formed on the peripheral wall of the molecular pump body (1), the mounting groove (11) corresponds to the vacuum chamber, and at least a portion of the first cooling device (31) is located in the mounting groove (11).

5. The magnetic bearing molecular pump (100) according to claim 4, characterized in that: Also includes: A shielding member (4), wherein the mounting groove (11) is recessed toward the molecular pump body (1), and the end of the mounting groove (11) facing away from the vacuum chamber is open, and the shielding member (4) is arranged at the open end of the mounting groove (11) to shield at least part of the open end of the mounting groove (11).

6. The magnetic bearing molecular pump (100) according to claim 2, characterized in that: The first cooling device (31) comprises: a first cooling tube (311), the first cooling tube (311) being arranged around the molecular pump body (1) along the circumference of the molecular pump body (1), and a first inlet joint (312) and a first outlet joint (313) being respectively arranged at two ends of the first cooling tube (311).

7. The magnetic bearing molecular pump (100) according to any one of claims 2 to 6, characterized in that: The cooling device (3) comprises: a second cooling device (32), the second cooling device (32) being arranged on the control body (2), and the second cooling device (32) and the control body (2) being in heat exchange cooperation.

8. The magnetic bearing molecular pump (100) according to claim 7, characterized in that: The second cooling device (32) and the first cooling device (31) are connected in series.

9. The magnetic bearing molecular pump (100) according to claim 8, characterized in that: The second cooling device (32) comprises: a second cooling pipe (321), the two ends of the second cooling pipe (321) are respectively provided with a second inlet joint (322) and a second outlet joint (323); the first cooling device (31) comprises a first cooling pipe (311), the two ends of the first cooling pipe (311) are respectively provided with a first inlet joint (312) and a first outlet joint (313); the second inlet joint (322) is connected to the first outlet joint (313).

10. The magnetic bearing molecular pump (100) according to claim 9, characterized in that: The first cooling pipe (311) has a first cooling channel, the second cooling pipe (321) has a second cooling channel, and the cross-sectional area of ​​the first cooling channel is greater than the cross-sectional area of ​​the second cooling channel.

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