Eccentricity detection device and method for rolling machining and rolling machining equipment

Abstract

The invention provides an eccentricity detection device and method for rolling machining and rolling machining equipment. The device comprises a crystal bar clamping unit, a detection unit and a control unit, the bracket unit is arranged on the crystal bar clamping unit; the moving unit is connected with the bracket unit and can move along the axial direction of the crystal bar relative to the crystal bar; the distance measuring unit is arranged on the moving unit, the measuring end of the distance measuring unit faces the crystal bar, the distance between the measuring end and an obstacle in the first direction can be measured, and the first direction is the direction perpendicular to the axial direction of the crystal bar; the control unit is used for moving the distance measuring unit to a first target position; controlling the distance measuring unit to measure the distance from the measuring end to the surface of the crystal bar in the rotating process of the crystal bar; according to the distance data, eccentricity information of the crystal bar is obtained, and the eccentricity information comprises at least one of the maximum eccentricity and the maximum eccentricity position. According to the rolling machining eccentricity detection device and method and the rolling machining equipment, the eccentricity correction time can be shortened.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a rounding processing eccentricity detection device and method, and rounding processing equipment. Background Art

[0002] As the demand for epitaxial chips grows, the requirements for the quality of substrate crystal rods are also getting higher and higher. The single crystal silicon rods produced by crystal pulling will be rounded, cut and cut before silicon wafer processing. Among them, rounding is to process the crystal rods with unequal diameters into crystal rods with equal diameters.

[0003] After the crystal rod is rolled, it is necessary to ensure that the roundness of the entire crystal rod meets the requirements. The rolling of the crystal rod is usually completed using a rolling machine, which is equipped with a crystal rod head chuck and a crystal rod tail chuck. In order to meet the roundness requirements of the crystal rod after processing, it is necessary to ensure that the center of the crystal rod is coaxial with the head chuck and the tail chuck of the crystal rod when loading the crystal rod. If the coaxiality between the center of the crystal rod and the head and tail chucks of the crystal rod is abnormally eccentric, the crystal rod after rolling will appear elliptical. Therefore, the eccentricity of the crystal rod needs to be measured before rolling.

[0004] In the prior art, a diameter measuring device is used to measure the eccentricity of a crystal rod. After the crystal rod is loaded, the head chuck and the tail chuck are used to clamp the crystal rod and rotate it. The center of rotation is fixed. Two positions are measured at the head and tail of the crystal rod to obtain four diameter values. Assuming that the maximum diameter value of the four diameter values ​​is D1, the minimum diameter value is D2, and the eccentricity is (D1-D2) / 2, the eccentricity is calculated according to the above formula, and the maximum eccentricity is taken as the eccentricity value of the crystal rod.

[0005] However, the above eccentricity measurement method can only determine the eccentricity value of the crystal rod, but cannot accurately confirm the maximum eccentricity value and the maximum position of the maximum eccentricity. This means that when correcting the eccentricity, it is necessary to re-find the maximum position of the maximum eccentricity and the eccentricity amount, which in turn leads to a long eccentricity correction time, low work efficiency, and low equipment utilization rate. Summary of the invention

[0006] In order to solve at least one technical problem in the above-mentioned prior art, the embodiments of the present disclosure provide a device and method for detecting eccentricity in rounding processing, and a rounding processing equipment.

[0007] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0008] In a first aspect, an embodiment of the present disclosure provides a device for detecting eccentricity in a rounding process, comprising:

[0009] A crystal rod clamping unit, comprising a head clamping piece for clamping a head of the crystal rod and a tail clamping piece for clamping a tail of the crystal rod, wherein the crystal rod clamping unit is configured to clamp and rotate the crystal rod;

[0010] A bracket unit is arranged on the head clamping member and / or the tail clamping member;

[0011] a moving unit connected to the support unit and movable relative to the crystal rod along the axial direction of the crystal rod; and

[0012] a distance measuring unit, which is arranged on the moving unit, and the measuring end of the distance measuring unit faces the crystal rod, and the distance measuring unit is used to measure the distance from the measuring end to the obstacle in a first direction, wherein the first direction is a direction perpendicular to the axial direction of the crystal rod;

[0013] A control unit is connected to the crystal rod clamping unit, the moving unit and the distance measuring unit respectively, and the control unit is used to:

[0014] Control the moving unit to move the distance measuring unit to a first target position corresponding to the axial position of the crystal rod; control the head clamp and the tail clamp to clamp and rotate the crystal rod; during the rotation of the crystal rod, obtain the eccentricity information of the crystal rod according to the distance data measured by the distance measuring unit, wherein the eccentricity information includes at least one of the maximum eccentricity amount and the maximum eccentricity position.

[0015] Exemplarily, the mobile unit includes:

[0016] driving cylinder; and

[0017] A telescopic rod, the axial direction of which is arranged parallel to the axial direction of the crystal rod; wherein,

[0018] The first axial end of the telescopic rod is drivingly connected to the driving cylinder, and the second axial end is connected to the driving cylinder and can be axially telescopic relative to the second axial end under the drive of the driving cylinder. The distance measuring unit is installed on the second axial end.

[0019] Exemplarily, the distance measuring unit includes a distance sensor.

[0020] Exemplarily, the support unit is configured to drive the moving unit and the distance measuring unit to move relative to the crystal rod along the first direction.

[0021] Exemplarily, the control unit is used for:

[0022] Controlling the moving unit to move the distance measuring unit to a second target position, where the second target position is a preset position where the distance measuring unit is located axially outside the crystal rod;

[0023] When the distance measuring unit is located at the second target position, controlling the distance measuring unit to obtain a reference distance L0, where the reference distance L0 is the distance from the distance measuring unit to the head clamp or the tail clamp in the first direction;

[0024] Controlling the moving unit to move the ranging unit to the first target position;

[0025] When the distance measuring unit is located at the first target position, the head clamp and the tail clamp are controlled to clamp and rotate the crystal rod for one circle, and the distance measuring unit is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal rod to obtain N distance data Li;

[0026] According to the N distance data Li, the eccentricity information of the crystal rod is obtained.

[0027] Exemplarily, the control unit is used to:

[0028] Calculate the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li;

[0029] Compare N distance differences △Li to obtain the maximum distance difference △Limax and the minimum distance difference △Limin;

[0030] According to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained;

[0031] According to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod.

[0032] In a second aspect, an embodiment of the present disclosure further provides a method for detecting eccentricity in a rounding process, which is applied to the device for detecting eccentricity in a rounding process as described above, and the method comprises:

[0033] Controlling the moving unit to move the distance measuring unit to a first target position corresponding to the axial position of the crystal rod;

[0034] Controlling the head clamp and the tail clamp to clamp and rotate the crystal rod;

[0035] During the rotation of the crystal rod,

[0036] The eccentricity information of the crystal rod is obtained according to the distance data measured by the distance measuring unit, wherein the eccentricity information includes at least one of a maximum eccentricity amount and a maximum eccentricity position.

[0037] Exemplarily, the method specifically includes:

[0038] Controlling the moving unit to move the distance measuring unit to a second target position, where the second target position is a preset position where the distance measuring unit is located axially outside the crystal rod;

[0039] When the distance measuring unit is located at the second target position, controlling the distance measuring unit to obtain a reference distance L0, where the reference distance L0 is the distance from the distance measuring unit to the head clamp or the tail clamp in the first direction;

[0040] Controlling the moving unit to move the ranging unit to the first target position;

[0041] When the distance measuring unit is located at the first target position, the head clamp and the tail clamp are controlled to clamp and rotate the crystal rod for one circle, and the distance measuring unit is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal rod to obtain N distance data Li;

[0042] According to the N distance data Li, the eccentricity information of the crystal rod is obtained.

[0043] Exemplarily, obtaining the eccentricity information of the crystal rod according to the N distance data Li includes:

[0044] Calculate the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li;

[0045] Compare N distance differences △Li to obtain the maximum distance difference △Limax and the minimum distance difference △Limin;

[0046] According to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained;

[0047] According to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod.

[0048] In a third aspect, an embodiment of the present disclosure further provides a rounding processing device, including the rounding processing eccentricity detection device as described above.

[0049] The beneficial effects brought by the embodiments of the present disclosure are as follows:

[0050] In the rounding processing eccentricity detection device and method, and the rounding processing equipment provided by the embodiments of the present disclosure, a moving unit is installed on the crystal rod clamping unit that clamps the head and tail of the crystal rod through a bracket unit, and a distance measuring unit is installed on the moving unit. The distance measuring unit can be moved to a first target position corresponding to a predetermined position on the axis of the crystal rod by the moving unit, and the crystal rod is clamped and rotated by the head clamping member and the tail clamping member. During the rotation of the crystal rod, the distance from the measuring end to the surface of the crystal rod can be measured by the distance measuring unit. According to the distance data measured by the distance measuring unit, the eccentricity information of the crystal rod can be obtained, wherein the eccentricity information includes at least one of the maximum eccentricity amount and the maximum eccentricity position. In this way, through the eccentricity detection device for rounding processing, a series of distance data corresponding to different rotation angles at the same or different axial position points of the crystal rod can be obtained by obtaining the distance from the measuring unit to the circumferential surface of the crystal rod during the circumferential movement of the crystal rod. Based on this series of distance data, the maximum eccentricity and the maximum eccentricity position can be obtained at the same time, so as to correct the eccentricity of the crystal rod more quickly, reduce the eccentricity correction time, ensure the roundness of the crystal rod after rounding processing, and improve work efficiency and effective utilization rate of equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] Figure 1 A schematic diagram showing the structure of the rounding detection device in the embodiment of the present disclosure when measuring the reference distance;

[0052] Figure 2 A schematic diagram showing the structure of the rounding detection device in the embodiment of the present disclosure when measuring distance data;

[0053] Figure 3 express Figure 1 AA section view. DETAILED DESCRIPTION

[0054] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0055] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0056] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and represent the acceptable deviation range for a specific value determined by ordinary technicians in the field. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0057] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0058] The rounding eccentricity detection device provided in the embodiment of the present disclosure may include a crystal rod clamping unit 100, a support unit 200, a moving unit 300, a distance measuring unit 400 and a control unit (not shown in the figure).

[0059] When the crystal rod 10 is being rounded, the head and tail of the crystal rod 10 can be clamped by the crystal rod clamping unit 100. Figure 1 and Figure 2 As shown, the crystal rod clamping unit 100 may include a head clamping member 110 and a tail clamping member 120. The crystal rod clamping unit 100 in the rounding eccentricity detection device in the embodiment of the present disclosure may be a crystal rod clamping unit in a rounding processing device. The head clamping member 110 is used to clamp the head of the crystal rod 10, and the tail clamping member 120 may be used to clamp the tail of the crystal rod 10. For example, the head clamping member 110 may include a head clamp connecting rod 111 and a head clamp 112, and the tail clamping member 120 may include a tail clamp connecting rod 121 and a tail clamp 122, etc. The crystal rod clamping unit 100 may be configured to clamp and rotate the crystal rod 10.

[0060] The bracket unit 200 is disposed on the head clamping member 110 and / or the tail clamping member 120. For example, see Figure 1 and Figure 2 As shown, the support unit 200 can be fixed on the head chuck connecting rod 111 and / or the tail chuck connecting rod 121. The moving unit 300 is connected to the support unit 200 and can move relative to the crystal rod 10 along the axial direction of the crystal rod 10.

[0061] The distance measuring unit 400 is arranged on the moving unit 300, and can move along the axial direction of the crystal rod 10 driven by the moving unit 300. The measuring end of the distance measuring unit 400 faces the crystal rod 10, and the distance measuring unit 400 is used to measure the distance from the measuring end to the obstacle in the first direction Y, wherein the first direction Y is a direction perpendicular to the axial direction of the crystal rod 10.

[0062] The control unit is connected to the crystal rod clamping unit 100, the moving unit 300 and the distance measuring unit 400 respectively, and the control unit is used for:

[0063] The moving unit 300 is controlled to move the distance measuring unit 400 to a first target position corresponding to a target axial position of the crystal rod 10; the head clamp 110 and the tail clamp 120 are controlled to clamp and rotate the crystal rod 10; during the rotation of the crystal rod 10, the distance measuring unit 400 is controlled to measure the distance from the measuring end to the surface of the crystal rod 10; and according to the distance data measured by the distance measuring unit 400, the eccentricity information of the crystal rod 10 is obtained, wherein the eccentricity information includes at least one of a maximum eccentricity amount and a maximum eccentricity position.

[0064] Exemplarily, the support unit 200 may have an extended length in a first direction Y, and the first direction Y is a direction perpendicular to the axial direction of the crystal ingot 10. The moving unit 300 may be mounted on the support unit 200, and the moving unit 300 maintains a distance from the crystal ingot 10 in the first direction Y, so that the distance measuring unit 400 may have a distance from the surface of the crystal ingot 10, so as to facilitate distance measurement.

[0065] In the above scheme, the moving unit 300 is installed on the crystal rod clamping unit 100 that clamps the head and tail of the crystal rod 10 through the bracket unit 200, and the distance measuring unit 400 is installed on the moving unit 300. The distance measuring unit 400 can be moved to a first target position corresponding to a predetermined position in the axial direction of the crystal rod 10 through the moving unit 300, and the crystal rod 10 is clamped and rotated by the head clamping member 110 and the tail clamping member 120. During the rotation of the crystal rod 10, the distance from the measuring end to the surface of the crystal rod 10 can be measured by the distance measuring unit 400. According to the distance data measured by the distance measuring unit 400, the eccentricity information of the crystal rod 10 can be obtained, wherein the eccentricity information includes at least one of the maximum eccentricity and the maximum eccentricity position.

[0066] In this way, the eccentricity detection device for rounding processing can obtain the distance from the measuring unit to the circumference of the crystal rod 10 during the rotation of the crystal rod 10, so as to obtain a series of distance data corresponding to different rotation angles at the same or different axial position points of the crystal rod 10. According to this series of distance data, the maximum eccentricity and the maximum eccentricity position can be obtained at the same time, so as to correct the eccentricity of the crystal rod 10 more quickly, reduce the eccentricity correction time, ensure the true roundness of the crystal rod 10 after rounding processing, and improve work efficiency and effective utilization rate of equipment.

[0067] In some exemplary embodiments, Figure 1 and Figure 2 As shown, the movable unit 300 includes a driving cylinder 310 and a telescopic rod 320. The axial direction of the telescopic rod 320 is arranged parallel to the axial direction of the crystal rod 10. The axial first end of the telescopic rod 320 is transmission-connected to the driving cylinder 310, and the axial second end is connected to the driving cylinder 310 and can be axially retracted relative to the axial second end. The distance measuring unit 400 is installed to the axial second end.

[0068] By adopting the above solution, the telescopic rod 320 is extended and retracted along the axial direction of the crystal rod 10 by driving the cylinder 310, which has a simple structure and is easy to operate.

[0069] However, it is understandable that in other embodiments not shown, the specific structure of the mobile unit 300 is not limited thereto. For example, the mobile unit 300 may also be implemented using other movable components such as a lead screw, a slider, and a guide rail.

[0070] In some exemplary embodiments, the distance measuring unit 400 includes a distance sensor.

[0071] A distance sensor is a component used to measure the distance between an object and the sensor. The distance sensor can be divided into many types, such as ultrasonic sensors, laser sensors, infrared sensors, electromagnetic wave sensors, optical sensors, capacitive sensors, etc.

[0072] Among them, laser sensors calculate distance by emitting a laser beam and measuring the time it takes for the laser to reflect back. The rectilinear propagation characteristics of laser beams make them highly accurate in long-distance measurements. Infrared sensors determine distance by emitting infrared light and measuring the intensity or time of reflected light. Ultrasonic sensors determine distance by emitting high-frequency sound waves (ultrasonic waves), which are reflected back when they encounter obstacles. The sensor receives the reflected waves and calculates the distance to the obstacle based on the time it takes for the sound waves to propagate. Electromagnetic wave sensors use electromagnetic waves (such as microwaves) for distance measurement. The sensor emits electromagnetic waves, which are reflected after encountering an object. The sensor receives the reflected waves and calculates the distance. Optical sensors determine distance by measuring changes in light intensity or phase difference. Optical sensors can use light sources such as lasers and LEDs. Capacitive sensors determine the distance of an object by measuring changes in capacitance. Capacitance changes as an object approaches.

[0073] For example, in some embodiments, the distance sensor in the embodiments of the present disclosure may be any suitable sensor such as a laser sensor or an infrared sensor.

[0074] In some exemplary embodiments, Figure 1 and Figure 2 As shown, the support unit 200 is configured to drive the moving unit 300 and the distance measuring unit 400 to move relative to the crystal rod 10 along the first direction Y. In this way, the distance measuring unit 400 can be raised and lowered along the first direction Y by the support unit 200 for crystal rods 10 of different diameters to obtain a better distance measuring effect. For example, the support unit 200 can be configured as a retractable support.

[0075] In addition, in some exemplary embodiments, the control unit is specifically configured to:

[0076] Controlling the moving unit 300 to move the distance measuring unit 400 to a second target position, where the second target position is a preset position where the distance measuring unit 400 is located axially outside the crystal rod 10;

[0077] When the distance measuring unit 400 is located at the second target position, the distance measuring unit 400 is controlled to obtain a reference distance L0, where the reference distance L0 is a distance from the distance measuring unit 400 to the head clamping member 110 or the tail clamping member 120 in the first direction Y;

[0078] Controlling the moving unit 300 to move the distance measuring unit 400 to the first target position;

[0079] When the distance measuring unit 400 is located at the first target position, the head clamping member 110 and the tail clamping member 120 are controlled to clamp and rotate the crystal ingot 10 for one circle, and the distance measuring unit 400 is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal ingot 10 to obtain N distance data Li;

[0080] According to the N distance data Li, the eccentricity information of the crystal rod 10 is obtained.

[0081] In the above scheme, the working process of the eccentricity detection device for rounding provided by the embodiment of the present disclosure can be as follows:

[0082] First, the distance measuring unit 400 is moved to the second target position, which is a preset position of the distance measuring unit 400 located axially outside the crystal rod 10. For example, the second target position can be as follows: Figure 1 As shown, it is located above the head chuck link 111 or the tail chuck link 121. In this way, the distance measuring unit 400 can measure the distance between itself and the head chuck link 111 or the tail chuck link 121, and use this distance as the reference distance L0;

[0083] Then, the crystal rod 10 is rotated to a predetermined initial angle, for example, the predetermined initial angle may be the 0° crystal orientation of the crystal rod 10. The 0° crystal orientation may refer to an orientation relative to a certain reference direction (for example, the (100) direction, the (110) direction, etc.). For example, in some cases, 0° may represent a direction parallel to the (100) crystal orientation;

[0084] Then, the crystal ingot 10 can be clamped and rotated by the crystal ingot clamping unit 100, so that the crystal ingot 10 rotates one circle, wherein during the rotation of the crystal ingot 10, a distance measurement is performed every interval of a predetermined rotation angle α, so that during the rotation of the crystal ingot 10, N distance data Li can be obtained, wherein N=360° / α, and the smaller the value of the predetermined rotation angle α is, the more distance values ​​can be measured, and the more accurate the measurement accuracy is, for example, the predetermined rotation angle α can be equal to 5°, 10°, 15°, 20°, etc.;

[0085] Then, according to the N distance data Li, the eccentricity information of the crystal rod 10 can be obtained.

[0086] Specifically, in some exemplary embodiments, obtaining the eccentricity information of the crystal rod 10 according to the N distance data Li specifically includes:

[0087] Calculate the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li;

[0088] Compare N distance differences △Li to obtain the maximum distance difference △Limax and the minimum distance difference △Limin;

[0089] According to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained, △L=(△Limax-△Limin) / 2, and according to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod 10 corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod 10.

[0090] In the above scheme, by rotating the crystal rod 10 for one circle, N distance data Li are obtained and recorded as L1, L2, L3...Li, where i is less than or equal to N, and the difference between the N distance data Li and the reference distance L0 is calculated to obtain N distance difference values ​​△Li, which are recorded as △L1, △L2, △L3...△Li. From the N distance difference values ​​△Li, the maximum distance difference value △Limax and the minimum distance difference value △Limin can be compared and determined, and based on the corresponding relationship between the distance data Li and the rotation angle of the crystal rod 10, the rotation angles corresponding to the maximum distance difference value △Limax and the minimum distance difference value △Limin can be determined. See Figures 1 to 3 As shown, since the reference distance L0 is greater than the distance data Li, the position corresponding to the maximum distance difference △Limax can be determined as the maximum eccentricity position.

[0091] It should be noted that, in the above solution, the distance from the distance measuring unit 400 to the surface of the crystal ingot 10 is used to reflect the diameter change of the crystal ingot 10 , which has a simple structure and high measurement accuracy.

[0092] It should also be noted that, in the above scheme, the distance measuring unit 400 is first moved to the second target position corresponding to the head chuck link 111 or the tail chuck link 121 to measure the position of the distance measuring unit 400 to the head chuck link 111 or the tail chuck link 121 as a reference distance. The reference distance can be obtained in this way. Compared with the method of directly raising and lowering the distance measuring unit 400 to a target height to determine the reference distance, the height error caused by the process of raising and lowering the distance measuring unit 400 can be avoided, thereby making the measurement accuracy in this embodiment more accurate.

[0093] In addition, in some embodiments, the distance measuring unit 400 can be moved to one of the first target positions to measure the diameter of the surface of a certain axial position point in the axial direction of the crystal rod 10. However, it can be understood that in other embodiments, in order to improve accuracy, the distance measuring unit 400 can also be moved to at least two different axial position points, and the crystal rod 10 can be rotated one circle at each axial position point for distance measurement, so as to perform eccentricity detection on the diameters of different axial position points, so as to further improve the roundness of the crystal rod 10.

[0094] In addition, please see Figure 1 and Figure 2 As shown, the support unit 200, the moving unit 300 and the distance measuring unit 400 are all installed on the head clamp 110, so that the eccentricity information of the crystal rod body (Body) near the head position can be measured. In other embodiments, the support unit 200, the moving unit 300 and the distance measuring unit 400 can also be installed on the tail clamp 120, so that the eccentricity information of the crystal rod body (Body) near the tail position can be measured. The measurement principle and process are the same as the principle and process of measuring the eccentricity information of the crystal rod body (Body) near the head position, and will not be repeated here.

[0095] In addition, the embodiment of the present disclosure further provides a method for detecting eccentricity of a rounding process, which is applied to the device for detecting eccentricity of a rounding process provided in the embodiment of the present disclosure. The method comprises the following steps:

[0096] Controlling the moving unit 300 to move the distance measuring unit 400 to a first target position corresponding to a target axial position of the crystal rod 10;

[0097] Controlling the head clamping member 110 and the tail clamping member 120 to clamp and rotate the crystal rod 10;

[0098] During the rotation of the crystal ingot 10, the distance measuring unit 400 is controlled to measure the distance from the measuring end to the surface of the crystal ingot 10;

[0099] According to the distance data measured by the distance measuring unit 400, the eccentricity information of the crystal rod 10 is obtained, wherein the eccentricity information includes at least one of a maximum eccentricity amount and a maximum eccentricity position.

[0100] In some exemplary embodiments, the method further comprises:

[0101] Step S01, controlling the moving unit 300 to move the distance measuring unit 400 to a second target position, where the second target position is a preset position where the distance measuring unit 400 is located axially outside the crystal ingot 10;

[0102] Step S02, when the distance measuring unit 400 is located at the second target position, controlling the distance measuring unit 400 to obtain a reference distance L0, where the reference distance L0 is the distance from the distance measuring unit 400 to the head clamping member 110 or the tail clamping member 120 in the first direction Y;

[0103] Step S03, controlling the moving unit 300 to move the distance measuring unit 400 to the first target position;

[0104] Step S04, when the distance measuring unit 400 is located at the first target position, the head clamping member 110 and the tail clamping member 120 are controlled to clamp and rotate the crystal ingot 10 for one circle, and the distance measuring unit 400 is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal ingot 10 to obtain N distance data Li;

[0105] Step S05 : acquiring eccentricity information of the crystal ingot 10 according to the N distance data Li.

[0106] In some exemplary embodiments, the above step S05 specifically includes:

[0107] Step S051, respectively calculating the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li;

[0108] Step S052, comparing N distance difference values ​​△Li to obtain a maximum distance difference value △Limax and a minimum distance difference value △Limin;

[0109] Step S053, according to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained, △L=(△Limax-△Limin) / 2, and according to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod 10 corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod 10.

[0110] Since the principle of solving the problem by the rounding processing detection method is similar to the principle of solving the problem by the above-mentioned rounding processing detection device, the embodiment of the rounding processing detection method provided in the embodiment of the present disclosure can refer to the embodiment of the above-mentioned rounding processing detection device provided in the embodiment of the present disclosure, and will not be repeated here.

[0111] In addition, the embodiments of the present disclosure further provide a rounding processing device, including the rounding processing eccentricity detection device provided in the embodiments of the present disclosure. The other essential components of the display device (such as the rounding operation component) should be understood by those of ordinary skill in the art, and will not be elaborated here, nor should they be used as limitations on the present disclosure. Since the principle of solving the problem by the rounding processing device is similar to the principle of solving the problem by the above-mentioned rounding processing detection device, the embodiment of the rounding processing device provided in the embodiments of the present disclosure can refer to the embodiment of the above-mentioned rounding processing detection device provided in the embodiments of the present disclosure, and will not be elaborated here.

[0112] In addition, the embodiment of the present disclosure further provides a device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the above method when executing the computer program. Since the above device can implement the above methods when its processor executes the computer program, similarly, it can complete the eccentricity detection of wafer rounding processing.

[0113] In one embodiment, the present disclosure further provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0114] The above-mentioned computer-readable storage medium, because the computer program stored in its memory is executed by the processor to implement the steps in the above-mentioned method embodiments, similarly, the calibration of the wafer position can be automatically completed without opening the equipment chamber for operation, thereby avoiding contamination of the chamber or wafer.

[0115] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory or optical memory, etc. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0116] There are a few points to note:

[0117] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0118] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0119] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0120] The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure shall be based on the protection scope of the claims.

Claims

1. A device for detecting eccentricity during rounding, characterized in that: include: A crystal rod clamping unit, comprising a head clamping piece for clamping a head of the crystal rod and a tail clamping piece for clamping a tail of the crystal rod, wherein the crystal rod clamping unit is configured to clamp and rotate the crystal rod; A bracket unit is arranged on the head clamping member and / or the tail clamping member; A moving unit connected to the support unit and movable relative to the crystal rod along the axial direction of the crystal rod; and a distance measuring unit, which is arranged on the moving unit, and the measuring end of the distance measuring unit faces the crystal rod, and the distance measuring unit is used to measure the distance from the measuring end to the obstacle in a first direction, wherein the first direction is a direction perpendicular to the axial direction of the crystal rod; A control unit is connected to the crystal rod clamping unit, the moving unit and the distance measuring unit respectively, and the control unit is used to: Control the moving unit to move the distance measuring unit to a first target position corresponding to the axial position of the crystal rod; control the head clamp and the tail clamp to clamp and rotate the crystal rod; during the rotation of the crystal rod, obtain the eccentricity information of the crystal rod according to the distance data measured by the distance measuring unit, wherein the eccentricity information includes at least one of the maximum eccentricity amount and the maximum eccentricity position.

2. The eccentricity detection device for rounding process according to claim 1, characterized in that: The mobile unit comprises: driving cylinder; and A telescopic rod, the axial direction of which is arranged parallel to the axial direction of the crystal rod; wherein, The first axial end of the telescopic rod is drivingly connected to the driving cylinder, and the second axial end is connected to the driving cylinder and can be axially telescopic relative to the second axial end under the drive of the driving cylinder. The distance measuring unit is installed on the second axial end.

3. The eccentricity detection device for rounding process according to claim 1, characterized in that: The distance measuring unit includes a distance sensor.

4. The eccentricity detection device for rounding process according to claim 1, characterized in that: The support unit is configured to drive the moving unit and the distance measuring unit to move relative to the crystal rod along the first direction.

5. The eccentricity detection device for rounding process according to claim 1, characterized in that: The control unit is used for: Controlling the moving unit to move the distance measuring unit to a second target position, where the second target position is a preset position where the distance measuring unit is located axially outside the crystal rod; When the distance measuring unit is located at the second target position, controlling the distance measuring unit to obtain a reference distance L0, where the reference distance L0 is the distance from the distance measuring unit to the head clamp or the tail clamp in the first direction; Controlling the moving unit to move the ranging unit to the first target position; When the distance measuring unit is located at the first target position, the head clamp and the tail clamp are controlled to clamp and rotate the crystal rod for one circle, and the distance measuring unit is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal rod to obtain N distance data Li; According to the N distance data Li, the eccentricity information of the crystal rod is obtained.

6. The device for detecting eccentricity during rounding process according to claim 5, characterized in that: The control unit is used for: Calculate the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li; Compare N distance differences △Li to obtain the maximum distance difference △Limax and the minimum distance difference △Limin; According to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained; According to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod.

7. A method for detecting eccentricity in rounding, characterized in that: Applied to the spherical processing eccentricity detection device according to any one of claims 1 to 6, the method comprises: Controlling the moving unit to move the distance measuring unit to a first target position corresponding to the axial position of the crystal rod; Controlling the head clamp and the tail clamp to clamp and rotate the crystal rod; During the rotation of the crystal ingot, eccentricity information of the crystal ingot is obtained according to the distance data measured by the distance measuring unit, wherein the eccentricity information includes at least one of a maximum eccentricity amount and a maximum eccentricity position.

8. The method for detecting eccentricity in rounding according to claim 7, characterized in that: The method comprises: Controlling the moving unit to move the distance measuring unit to a second target position, where the second target position is a preset position where the distance measuring unit is located axially outside the crystal rod; When the distance measuring unit is located at the second target position, controlling the distance measuring unit to obtain a reference distance L0, where the reference distance L0 is the distance from the distance measuring unit to the head clamp or the tail clamp in the first direction; Controlling the moving unit to move the ranging unit to the first target position; When the distance measuring unit is located at the first target position, the head clamp and the tail clamp are controlled to clamp and rotate the crystal rod for one circle, and the distance measuring unit is controlled to measure the distance once every predetermined rotation angle during the rotation of the crystal rod to obtain N distance data Li; According to the N distance data Li, the eccentricity information of the crystal rod is obtained.

9. The method for detecting eccentricity in rounding according to claim 8, characterized in that: The step of obtaining the eccentricity information of the crystal rod according to the N distance data Li includes: Calculate the difference between each distance data Li and the reference distance L0 to obtain N distance difference values ​​△Li; Compare N distance differences △Li to obtain the maximum distance difference △Limax and the minimum distance difference △Limin; According to the maximum distance difference △Limax and the minimum distance difference △Limin, the eccentricity △L is obtained; According to the corresponding relationship between the distance data Li and the rotation angle, the rotation angle of the crystal rod corresponding to the maximum distance difference △Limax is determined to determine the maximum eccentricity position of the crystal rod.

10. A rounding processing equipment, characterized in that: It comprises the eccentricity detection device for rounding processing as described in any one of claims 1 to 6.

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