Integrated photoelectric detection system

Abstract

The invention provides an integrated photoelectric detection system, and the system comprises a first displacement platform which at least can be movably disposed in a first direction; the micro-area detection module and the light source module are integrated above the first displacement platform and are arranged adjacently; the wide-field imaging module is located on one side of the circumferential direction of the first displacement platform, the sample platform is located on the other side, in the imaging mode, the first displacement platform is displaced to a first position, and the wide-field imaging module, the light source module and the sample platform are aligned in the second direction, and in the photoelectric detection mode, the first displacement platform is displaced to the second position, and the micro-area detection module and the sample platform are aligned along the second direction. According to the integrated photoelectric detection system provided by the embodiment of the invention, the light source module and the micro-area detection module are integrated on the same first displacement platform, and switching between an imaging function and a photoelectric detection function is realized through movement of the first displacement platform on the premise of keeping positions of other devices relatively unchanged; and automatic control is facilitated.

Description

Technical Field

[0001] The present application relates to the field of optoelectronic technology, and in particular to an integrated optoelectronic detection system. Background Art

[0002] In the entire production and quality control process, semiconductor testing and photovoltaic device testing must not only ensure high precision and high reliability of the product, but also cope with the ever-increasing testing speed and cost control requirements. Therefore, optoelectronic performance testing technology has attracted much attention in the field of semiconductor and photovoltaic device testing. However, existing technologies are all testing equipment with a single function or means, which cannot complete the task of comprehensively evaluating the overall performance of optoelectronic materials. Summary of the invention

[0003] The embodiment of the present application provides an integrated photoelectric detection system that can integrate a variety of different detection functions on the same platform to achieve comprehensive detection of samples using a variety of detection methods.

[0004] In a first aspect, an integrated photoelectric detection system provided by an embodiment of the present application includes: a first displacement platform, which can be movably arranged and can be moved at least along a first direction; a light source module, integrated above the first displacement platform; a micro-area detection module, integrated above the first displacement platform and arranged adjacent to the light source module along the first direction; a wide-field imaging module, located on one side of the circumference of the first displacement platform; a sample platform, used for carrying a sample to be detected, located on the other side of the first displacement platform away from the wide-field imaging module, in an imaging mode, the first displacement platform is displaced to a first position, and the wide-field imaging module, the light source module and the sample platform are aligned along a second direction, and in a photoelectric detection mode, the first displacement platform is displaced to a second position, and the micro-area detection module and the sample platform are aligned along the second direction, and the first direction intersects with the second direction.

[0005] An integrated photoelectric detection system provided in an embodiment of the first aspect of the present application integrates a light source module for an imaging function and a micro-area detection module for a photoelectric detection function on the same first displacement platform. On the premise of keeping the positions of a sample platform and a wide-field imaging module relatively unchanged, smooth switching between the imaging function and the photoelectric detection function is achieved by moving the first displacement platform along a first direction, and automatic control is conveniently realized.

[0006] According to one aspect of an embodiment of the present application, the light source module also includes a first coaxial light source and a second coaxial light source, the size of the first coaxial light source is larger than the size of the second coaxial light source, the wide-field imaging module also includes a first imaging module and a second imaging module, the resolution of the first imaging module is smaller than the resolution of the second imaging module; in a low-resolution imaging mode, the first displacement platform is displaced to a first sub-position, and the first imaging module, the first coaxial light source and the sample platform are aligned along the second direction; in a high-resolution imaging mode, the first displacement platform is displaced to a second sub-position, and the second imaging module, the second coaxial light source and the sample platform are aligned along the second direction.

[0007] According to one aspect of the embodiments of the present application, the first coaxial light source and the second coaxial light source are arranged on both sides of the micro-area detection module along the first direction, and the first imaging module and the second imaging module are arranged adjacent to each other along the first direction.

[0008] According to one aspect of an embodiment of the present application, it also includes a second displacement platform, which is movably arranged and at least movably arranged along a second direction, the wide-field imaging module is integrated on the second displacement platform, and the first imaging module and the second imaging module are arranged adjacent to each other along the first direction on the second displacement platform.

[0009] According to one aspect of an embodiment of the present application, the sample platform includes a sample clamp and a sample displacement platform, the sample clamp is used to clamp the sample to be tested, the sample displacement platform is located on the side of the sample clamp away from the first displacement platform, and is used to control the displacement of the sample to be tested along the first direction and the third direction, and the third direction intersects with the plane formed by the first direction and the second direction.

[0010] According to one aspect of an embodiment of the present application, it also includes a filter module, which includes a rotating mechanism and a non-filter module and a filter module arranged along the circumference of the rotating mechanism, and the filter module is arranged on the side of the wide-field imaging module close to the first displacement platform along the second direction; in the bright field imaging mode, the rotating mechanism rotates to the first rotation position, and the wide-field imaging module, the non-filter module, the light source module and the sample platform are aligned along the second direction; in the photoelectric imaging mode, the rotating mechanism rotates to the second rotation position, and the wide-field imaging module, the filter module, the light source module and the sample platform are aligned along the second direction.

[0011] According to one aspect of an embodiment of the present application, it also includes an electrical control module, the electrical control module includes an electrical control platform, and the sample platform also includes a sample clamp and electrode modules arranged at both ends of the sample clamp; in the photoluminescence imaging mode, the electrical control platform disconnects the electrical connection with the electrode module, and the wide-field imaging module, the light source module and the sample platform are aligned along the second direction; in the electroluminescence imaging mode, the electrical control platform is electrically connected to the electrode module, and the wide-field imaging module, the light source module and the sample platform are aligned along the second direction.

[0012] According to one aspect of an embodiment of the present application, the electronic control module also includes an industrial computer and an acquisition card. The industrial computer is electrically connected to the first displacement platform, the light source module, the micro-area detection module, the wide-field imaging module and the sample platform, and is used to realize automatic control of an integrated photoelectric detection system. The acquisition card is connected to the industrial computer, the micro-area detection module and the wide-field imaging module, and is used to transmit data collected by the micro-area detection module and the wide-field imaging module to the industrial computer.

[0013] According to one aspect of an embodiment of the present application, the micro-area detection module includes a laser, a dichroic mirror, a spectrometer and an electrical signal acquisition card; in a spectral analysis mode, the light source generated by the laser propagates along a first optical path, passes through the dichroic mirror and irradiates the surface of the sample to be detected, and the fluorescence generated by the excitation of the surface of the sample to be detected enters the dichroic mirror and propagates along a second optical path and is transmitted to the spectrometer; in a photocurrent scanning mode, the light source generated by the laser propagates along the first optical path, passes through the dichroic mirror and irradiates the surface of the sample to be detected, and the current changes generated on the surface of the sample to be detected are transmitted to the electrical signal acquisition card.

[0014] According to one aspect of an embodiment of the present application, the micro-area detection module also includes a piezoelectric adjustment frame and a rotating mirror frame; in the photocurrent scanning mode, the laser controls the intensity of the light source, the piezoelectric adjustment frame controls the focal length of the light source, and the rotating mirror frame controls the direction of the first light path. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The features, advantages and technical effects of exemplary embodiments of the present application will be described below with reference to the accompanying drawings.

[0016] Figure 1 It is a schematic diagram of the overall structure of an integrated photoelectric detection system provided in an embodiment of the first aspect of the present application.

[0017] Figure 2 It is a schematic diagram of a partial structure enlargement of an integrated photoelectric detection system in a low-resolution imaging mode provided by an embodiment of the first aspect of the present application; Figure 3 It is a schematic diagram of a partial structure enlargement of an integrated photoelectric detection system in a high-resolution imaging mode provided by an embodiment of the first aspect of the present application; Figure 4 It is a schematic diagram of a partial structure enlargement of an integrated photoelectric detection system in a photoelectric detection mode provided by an embodiment of the first aspect of the present application; Figure 5 It is an enlarged schematic diagram of a separate structure of a sample fixture in an integrated photoelectric detection system provided by an embodiment of the first aspect of the present application; Figure 6 It is a schematic diagram of a separate structure enlargement of a filter module in an integrated photoelectric detection system provided by an embodiment of the first aspect of the present application; Figure 7 It is a schematic diagram of an enlarged structure of a micro-area detection module in an integrated photoelectric detection system provided in an embodiment of the first aspect of the present application.

[0018] Reference numerals: 100-An integrated photoelectric detection system; 110-first displacement platform; 120-second displacement platform; 130-light source module; 130a-first coaxial light source; 130b-second coaxial light source; 140-micro-area detection module; 140a-laser; 140b-spectrometer; 140c-first optical fiber; 140d-second optical fiber; 140e-first mirror frame; 140f-third mirror frame; 140g-rotating mirror frame; 140h-second mirror frame; 140i-fourth mirror frame; 140j-excitation filter; 140k-collection filter; 140l-high reflective mirror; 140m-dichroic mirror; 140n-piezoelectric adjustment frame; 140p-objective lens; 140q-transmission cable; 140r-electric signal acquisition card; 150-wide field imaging module; 150a-first imaging module; 150b-second imaging module; 160-sample platform; 160a-sample fixture; 160b-sample displacement stage; 160c-electrode module; 170-filter module; 170a-rotating mechanism; 170b-no filter module; 170c-filter module; 180-electrical control module; 180a-electrical control platform; 180b-industrial computer; 180c-acquisition card; 190-housing; X-first direction; Y-second direction; Z-third direction.

[0019] In the drawings, the same reference numerals are used for the same components. The drawings are not drawn to scale. DETAILED DESCRIPTION

[0020] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without the need for some of these specific details. The following description of the embodiments is only to provide a better understanding of the present application by illustrating examples of the present application. In the accompanying drawings and the following description, at least part of the known structures and technologies are not shown to avoid unnecessary ambiguity in the present application; and, for clarity, the size of some structures may be exaggerated. In addition, the features, structures or characteristics described below may be combined in one or more embodiments in any suitable manner.

[0021] The directional words appearing in the following description are all directions shown in the figure, and do not limit the integrated photoelectric detection system provided in the embodiment of the present application. In the description of the present application, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0022] In the related technologies, optical testing technology has always been the main means in the field of semiconductor material testing and photovoltaic device material testing. However, the optical testing equipment provided in the related technologies can only include a single testing function. Now, with the continuous development of photoelectric conversion materials, there is a constant need for testing photoelectric conversion materials, especially the need for a comprehensive understanding of the overall characteristics of new photoelectric conversion materials. Therefore, using multiple testing methods to achieve comprehensive characterization of material performance on the same sample has become a new testing requirement.

[0023] In addition to using imaging technology to obtain sample surface images for observation, common characterization methods also include Raman testing, fluorescence testing and photoelectric effect testing. Raman testing can detect Raman reflected light in the sample reflected light to characterize the molecular structure and chemical composition of the material. Fluorescence testing is used to detect the fluorescence spectrum of the sample generated by laser excitation to react to material characteristics. Photoelectric effect testing detects the working performance of the device after the photoelectric conversion material is made into a device.

[0024] Among them, for semiconductor materials such as silicon carbide, gallium nitride, and gallium oxide, photoelectric effect testing and Raman testing are needed to comprehensively characterize material properties.

[0025] For photovoltaic device materials represented by perovskite solar cells, fluorescence testing, Raman testing and photoelectric effect testing are needed to complete the comprehensive characterization of material performance.

[0026] Therefore, semiconductor materials, perovskite and other materials require the use of multiple optical testing technologies to achieve a comprehensive characterization of the overall performance of the materials. However, the detection means of the detection equipment in the relevant technology are single, and the same sample needs to go through multiple devices to achieve comprehensive detection of multiple optical detection technologies. It is impossible to achieve automated multi-means detection, which increases the labor intensity of operators and is unable to automatically configure a set of different detection functions according to different samples. The detection efficiency is low, and it is difficult to achieve a comprehensive characterization of the performance of the sample material.

[0027] In order to solve the above-mentioned technical problems and meet technical needs, the embodiment of the present application provides an integrated optical testing platform that can integrate multiple different detection functions on the same platform to achieve comprehensive detection of samples using multiple detection methods.

[0028] Figure 1 The overall structure of an integrated photoelectric detection system 100 provided by the first embodiment of the present application is shown. Figure 2 The figure shows a local amplification structure of an integrated photoelectric detection system 100 provided in the first aspect of the present application in a low-resolution imaging mode. Figure 3 The figure shows a local amplification structure of an integrated photoelectric detection system 100 provided in the first aspect of the present application in a high-resolution imaging mode. Figure 4 The figure shows a local amplification structure of an integrated photoelectric detection system 100 provided in the embodiment of the first aspect of the present application in a photoelectric detection mode.

[0029] See also Figures 1 to 4 In a first aspect, an embodiment of the present application provides an integrated photoelectric detection system 100 , including a first displacement platform 110 , a light source module 130 , a micro-area detection module 140 , a wide-field imaging module 150 and a sample platform 160 .

[0030] The first displacement platform 110 is movably disposed and can at least be movable along the first direction X.

[0031] The light source module 130 and the micro-area detection module 140 are integrated above the first displacement platform 110 , and the micro-area detection module 140 and the light source module 130 are adjacently disposed along the first direction X.

[0032] The wide-field imaging module 150 is displaced to one side of the first displacement platform 110 in the circumferential direction.

[0033] The sample platform 160 is used to carry the sample to be detected, and is displaced to the other side of the first displacement platform 110 away from the wide-field imaging module 150. In the imaging mode, the first displacement platform 110 is displaced to the first position, and the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y. In the photoelectric detection mode, the first displacement platform 110 is displaced to the second position, and the micro-area detection module 140 and the sample platform 160 are aligned along the second direction Y, and the first direction X intersects with the second direction Y.

[0034] An integrated photoelectric detection system 100 provided in an embodiment of the first aspect of the present application integrates a light source module 130 for an imaging function and a micro-area detection module 140 for a photoelectric detection function on the same first displacement platform 110. On the premise that the positions of a sample platform 160 and a wide-field imaging module 150 remain relatively unchanged, the first displacement platform 110 is moved along a first direction X to achieve smooth switching between the imaging function and the photoelectric detection function, and automatic control is conveniently achieved.

[0035] The first displacement platform 110 is a movable platform, and the platform itself can at least slide back and forth along the slide rail arranged along the first direction X.

[0036] Optionally, the slide rail itself can be controlled by a motor to facilitate automated control.

[0037] Optionally, the first displacement platform 110 can also adjust its position along the circumferential direction. The circumferential direction should be understood as the circumferential direction in the cylindrical coordinate system established with the first direction X as the axial direction. That is, in addition to being movably arranged along the first direction X, the first displacement platform 110 can also adjust its position around the first direction X, so as to facilitate flexible adjustment, so as to realize that the micro-area detection module 140 and the sample platform 160, the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0038] The light source module 130 and the micro-area detection module 140 are integrated above the first displacement platform 110 and are arranged adjacent to each other. It should be understood that the light source module 130 and the micro-area detection module 140 are arranged on the same surface determined by the first displacement platform 110, and the light source module 130 and the micro-area detection module 140 are integrated as a part of the structure of the first displacement platform 110, and can move simultaneously with the displacement of the first displacement platform 110.

[0039] The light source module 130 and the micro-area detection module 140 can at least move back and forth along the first direction X to adjust their own positions, so that the micro-area detection module 140 and the sample platform 160, the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0040] Optionally, the light source module 130 and the micro-area detection module 140 can also adjust their positions along the circumferential direction, further facilitating flexible adjustment.

[0041] The wide-field imaging module 150 and the sample platform 160 are arranged in such a way that the wide-field imaging module 150 is located on one side of the first displacement platform 110 in the circumferential direction, and the sample platform 160 is located on the other side of the first displacement platform 110 away from the wide-field imaging module 150. It should be understood that the wide-field imaging module 150 is arranged around one side of the first displacement platform 110 with the first direction X as the axis, and the first displacement platform 110 is arranged between the sample platform 160 and the wide-field imaging module 150, so as to facilitate the alignment of the micro-area detection module 140 on the first displacement platform 110 with the sample platform 160 along the second direction Y, and the alignment of the wide-field imaging module 150, the light source module 130 on the first displacement platform 110, and the sample platform 160 along the second direction Y.

[0042] In the imaging mode, the light source module 130 is disposed between the wide-field imaging module 150 and the sample platform 160, and the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y, and the light emitted by the light source module 130 and the light received by the sample platform 160 and the wide-field imaging module 150 are always maintained on an axis along the second direction Y. Since the light is always propagated on the same axis, it is convenient to automatically control the alignment, and the transmission loss and reflection loss of the light source and the light in the optical path are minimized, and the light irradiated on the sample can be evenly distributed, which can provide high-quality lighting.

[0043] In the photoelectric detection mode, since the micro-area detection module 140 needs to be close to the sample to be detected on the sample platform 160, the micro-area detection module 140 is set on the first platform. It is not only convenient to control the distance between the micro-area detection module 140 and the sample to be detected, but also compared with the wide-field imaging module 150 used to obtain imaging information in the imaging mode, the micro-area detection module 140 can be set closer to the sample to be detected, and the detection effect is better.

[0044] The optical testing platform provided in the first aspect of the present application can conveniently realize switching between the imaging mode and the photoelectric detection mode by moving the first displacement platform 110 to a specific first position and a second position, thereby facilitating the realization of automatic control.

[0045] The provision of the first displacement platform 110 can reduce the displacement amplitude of the sample to be detected, thereby further reducing the size of the housing 190 of the integrated photoelectric detection system 100 and facilitating subsequent integration of other detection functions.

[0046] The second direction Y intersects with the first direction X. It should be understood that the second direction Y includes a plurality of directions. The second direction Y can be adjusted at any time along the circumference of the first displacement platform 110 as long as it intersects with the first direction X.

[0047] Exemplarily, the first direction X and the second direction Y intersect perpendicularly.

[0048] Optionally, the second direction Y in which the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned in the imaging mode and the second direction Y in which the micro-area detection module 140 and the sample platform 160 are aligned in the photoelectric detection mode are not the same second direction Y, which further facilitates flexible adjustment and avoids the risk of interference between different devices in the imaging mode and the photoelectric detection mode.

[0049] Optionally, the integrated optical platform is installed in a closed mechanical housing 190, and the housing 190 provides a light-shielding and protection device for the integrated optical platform. The mechanical housing 190 adopts a mutually coupled and spliced ​​structure to ensure that the entire test process on the integrated optical platform is carried out in a darkroom environment to avoid interference from external light.

[0050] See also Figure 2 and Figure 3 In some embodiments, the light source module 130 further includes a first coaxial light source 130a and a second coaxial light source 130b, the size of the first coaxial light source 130a is larger than the size of the second coaxial light source 130b, and the wide-field imaging module 150 further includes a first imaging module 150a and a second imaging module 150b, the resolution of the first imaging module 150a is smaller than the resolution of the second imaging module 150b.

[0051] In the low-resolution imaging mode, the first displacement platform 110 is displaced to the first sub-position, and the first imaging module 150a, the first coaxial light source 130a and the sample platform 160 are aligned along the second direction Y.

[0052] In the high-resolution imaging mode, the first displacement platform 110 is displaced to the second sub-position, and the second imaging module 150 b , the second coaxial light source 130 b and the sample platform 160 are aligned along the second direction Y.

[0053] In these embodiments, by dividing the wide-field imaging module 150 into a first imaging module 150a and a second imaging module 150b with different resolutions, and dividing the light source module 130 into a first coaxial light source 130a and a second coaxial light source 130b with different sizes, two imaging modes with different resolutions are implemented in the imaging mode, and switching between the high-resolution imaging mode and the low-resolution imaging mode only requires moving the first displacement platform 110 to a specific first sub-position and a second sub-position, further facilitating the implementation of automated control.

[0054] The first coaxial light source 130a and the second coaxial light source 130b are used for precise illumination of the imaging function of the wide-field imaging module 150. The first coaxial light source 130a and the second coaxial light source 130b use internal reflectors to align the light beams emitted by the light sources with the imaging optical path of the sample to be detected, thereby reducing deviations and making the light irradiated on the sample to be detected evenly distributed, ensuring that the sample to be detected can obtain high-quality clear imaging.

[0055] The sizes of the first coaxial light source 130a and the second coaxial light source 130b have a significant impact on the beam quality, spot size, and illumination uniformity of the first coaxial light source 130a and the second coaxial light source 130b.

[0056] The second coaxial light source 130b with a smaller size has a smaller light source, has better focus clarity and focusing ability, can produce better beam quality, is conducive to focusing the beam into a higher quality and smaller size spot, and is suitable for high-resolution imaging mode.

[0057] The first coaxial light source 130a with a larger size has a larger light source, can generate a larger light spot, can provide a wider illumination area, and achieve a wider illumination range.

[0058] At the same time, the first imaging module 150a, which cooperates with the first coaxial light source 130a to realize a low-resolution imaging mode, includes a camera and a low-magnification optical lens to realize large-range and large-area imaging.

[0059] The second imaging module 150b, which cooperates with the second coaxial light source 130b to realize a high-resolution imaging mode, includes a camera and a high-magnification optical lens, and can realize high-resolution imaging at sub-micron to micron scales.

[0060] Optionally, the cameras in the first imaging module 150a and the second imaging module 150b can be set as charge-coupled device cameras (CCD). A CCD camera is an imaging device based on a CCD image sensor, which mainly uses the CCD image sensor to convert light signals into electrical signals to capture images.

[0061] Optionally, the first coaxial light source 130a and the second coaxial light source 130b integrated on the first displacement platform 110 can be installed with light sources of different types, wavelengths and powers according to different materials of the samples to be detected, excitation wavelengths and other conditions, so as to facilitate flexible adjustment.

[0062] The optical testing platform provided in the first aspect of the present application can facilitate switching between high-resolution imaging mode and low-resolution imaging mode by moving the first displacement platform 110 to specific first sub-positions and second sub-positions, thereby further facilitating the realization of automated control.

[0063] Exemplarily, the first direction X and the second direction Y intersect perpendicularly.

[0064] Optionally, the second direction Y in which the first imaging module 150a, the first coaxial light source 130a and the sample platform 160 are aligned in the high-resolution imaging mode and the second direction Y in which the second imaging module 150b, the second coaxial light source 130b and the sample platform 160 are aligned in the low-resolution imaging mode are not the same second direction Y, which further facilitates flexible adjustment and avoids the risk of interference between different devices in the high-resolution imaging mode and the low-resolution imaging mode.

[0065] Please continue reading Figure 2 and Figure 3 In some embodiments, the first coaxial light source 130a and the second coaxial light source 130b are arranged on both sides of the micro-area detection module 140 along the first direction X, and the first imaging module 150a and the second imaging module 150b are arranged adjacent to each other along the first direction X.

[0066] In these embodiments, the first displacement platform 110 is displaced to a first sub-position toward the second coaxial light source 130b to achieve a low-resolution imaging mode, and the second displacement platform 120 is displaced to a second sub-position toward the first coaxial light source 130a to achieve a high-resolution imaging mode.

[0067] For example, see Figure 3 , the first displacement platform 110 is displaced to the extreme position toward the second coaxial light source 130b. When the platform of the first displacement platform 110 itself abuts against the slide rail, it is at the first sub-position. At this time, the first imaging module 150a, the first coaxial light source 130a and the sample platform 160 are aligned along the second direction Y, which further facilitates the realization of automatic control.

[0068] See also Figure 2 The second displacement platform 120 is displaced to the extreme position toward the first coaxial light source 130a. When the second displacement platform 120 itself abuts against the slide rail, it is at the second sub-position. At this time, the second imaging module 150b, the second coaxial light source 130b and the sample platform 160 are aligned along the second direction Y, which further facilitates the realization of automatic control.

[0069] See also Figure 1In some embodiments, an integrated photoelectric detection system 100 further includes a second displacement platform 120, which is movably disposed and at least movably disposed along a second direction Y, a wide-field imaging module 150 is integrated on the second displacement platform 120, and a first imaging module 150a and a second imaging module 150b are adjacently arranged along a first direction X on the second displacement platform 120.

[0070] In these embodiments, the first imaging module 150a and the second imaging module 150b are disposed on the second displacement platform 120, and the focal planes of the first imaging module 150a and the second imaging module 150b in different high-resolution imaging modes and low-resolution imaging modes are adjusted to be aligned with the plane of the sample to be detected by moving the second displacement platform 120 along the second direction Y. There is no need to directly adjust the focal length of the imaging module, and focusing can be achieved by controlling the movement of the second displacement platform 120, which further facilitates the realization of automatic control.

[0071] Exemplarily, the low-magnification lens and the high-magnification lens in the first imaging module 150a and the second imaging module 150b are lenses with fixed focal lengths. Therefore, due to the setting of the high-magnification lens, the length dimension of the second imaging module 150b is greater than the length dimension of the first imaging module 150a, and the focal planes of the first imaging module 150a and the second imaging module 150b are located in two different planes. They need to be fixed on the same second displacement platform 120 along the first direction X, and the position can be moved and adjusted along the second direction Y by the second displacement platform 120 to avoid interference while achieving adjustment of different focal length requirements in high-resolution imaging mode and low-resolution imaging mode.

[0072] For example, a low-resolution imaging mode can be used to perform large-area low-resolution imaging of the surface of the sample to be tested, find the local area that requires high-precision imaging, and then switch to the high-resolution imaging mode to perform high-resolution imaging of the specific area, analyze the surrounding structure and morphology of the surface of the sample to be tested in detail, and quickly confirm the defects on the surface of the sample to be tested.

[0073] Optionally, it is also possible to start from a high-resolution imaging mode and then adjust and switch to a low-resolution imaging mode as needed.

[0074] The first displacement platform 110 is moved to the second sub-position, and the second displacement platform 120 is adjusted along the second direction Y to align the focal plane of the second imaging module 150 b with the sample plane, thereby entering a high-resolution imaging mode.

[0075] When the high-resolution imaging mode is switched to the low-resolution imaging mode, directly moving the first displacement platform 110 to align the first coaxial light source 130a and the sample platform 160 along the second direction Y may cause interference between the first coaxial light source 130a and the second imaging module 150b. Therefore, it is necessary to first move the second displacement platform 120 along the second direction Y toward the side away from the first displacement platform 110 for a distance, then move the first displacement platform 110 to the first sub-position, and then adjust the distance of the second displacement platform 120 along the second direction Y to achieve alignment of the focal plane of the first imaging module 150a with the sample plane, and enter the low-resolution imaging mode.

[0076] Figure 5 The diagram shows a separate enlarged structure of a sample holder 160a in an integrated photoelectric detection system 100 provided in an embodiment of the first aspect of the present application.

[0077] See also Figure 1 and Figure 5 In some embodiments, the sample platform 160 includes a sample fixture 160a and a sample displacement platform 160b. The sample fixture 160a is used to clamp the sample to be detected. The sample displacement platform 160b is located on the side of the sample fixture 160a away from the first displacement platform 110, and is used to control the displacement of the sample to be detected along the first direction X and the third direction Z. The third direction Z intersects with the plane formed by the first direction X and the second direction Y.

[0078] In these embodiments, the sample clamp 160a can conveniently clamp samples of different sizes to be tested, while the motor-driven sample displacement stage 160b can also control the sample to be tested to be adjusted to a specific area under the wide-field imaging module 150 and the micro-area detection module 140, thereby achieving high-quality imaging and photoelectric performance detection of the local area.

[0079] Exemplarily, the shape of the sample is usually a plate-like structure, and the sample displacement stage 160b controls the displacement of the sample to be detected along the first direction X and the third direction Z, so as to align a specific local area of ​​the sample with the light source module 130 and the micro-area detection module 140 on the first displacement platform 110 along the second direction Y, thereby achieving more accurate imaging and photoelectric performance detection of the local area.

[0080] Optionally, the sample displacement stage 160b is further equipped with a grating ruler to enable the sample displacement stage 160b to have good displacement accuracy while being able to move over a wide range.

[0081] The third direction Z intersects with a plane formed by the first direction X and the second direction Y. It should be understood that the second direction Y includes a plurality of directions, and the third direction Z can be adjusted at any time as long as it intersects with the first direction X.

[0082] Exemplarily, the third direction Z intersects the plane formed by the first direction X and the second direction Y perpendicularly.

[0083] Exemplarily, the third direction Z intersects perpendicularly with a plane formed by the first direction X and the second direction Y, the first direction X intersects perpendicularly with the second direction Y, and the first direction X, the second direction Y and the third direction Z form a set of rectangular coordinate systems intersecting each other perpendicularly.

[0084] Figure 6 The diagram shows a separate amplification structure of a filter module 170 in an integrated photoelectric detection system 100 provided in an embodiment of the first aspect of the present application.

[0085] See also Figure 1 and Figure 6 In some embodiments, an integrated photoelectric detection system 100 further includes a filter module 170, the filter module 170 includes a rotating mechanism 170a and a non-filter module 170b and a filter module 170c arranged circumferentially along the rotating mechanism 170a, and the filter module 170 is arranged along the second direction Y on the side of the wide-field imaging module 150 close to the first displacement platform 110.

[0086] In the bright field imaging mode, the rotating mechanism 170 a rotates to a first rotating position, and the wide field imaging module 150 , the non-filtering module 170 b , the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0087] In the optoelectronic imaging mode, the rotating mechanism 170 a rotates to the second rotating position, and the wide-field imaging module 150 , the filter module 170 c , the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0088] In these embodiments, the filter module 170 switches between the non-filter module 170b and the filter module 170c, and the filter module 170c can selectively filter the light of specific wavelengths reflected and emitted from the surface of the sample to be detected, so that the wide-field imaging module 150 can only capture the light signal of the specific wavelength, thereby realizing the switching between the bright field imaging mode and the photoelectric imaging mode.

[0089] In the bright field imaging mode, the light source module 130 mainly emits a uniform illumination light source, and the camera in the wide field imaging module 150 mainly captures the reflected light imaging of the surface of the sample to be detected without using a filter.

[0090] In the photoelectric imaging mode, the sample to be detected is photoelectrically stimulated to actively generate emission light. The camera in the wide-field imaging module 150 mainly captures light signals of emission light of a specific wavelength. Therefore, a filter module 170c that can selectively filter specific wavelengths is required.

[0091] Exemplarily, the non-filtering module 170b on the rotating mechanism 170a includes two groups of flat glass, and the filtering module 170c includes two groups of filter lenses, and the flat glass and the filter lenses are sequentially arranged at intervals along the axial direction of the rotating mechanism 170a. By rotating the rotating mechanism 170a, the first imaging module 150a and the second imaging module 150b in the wide-field imaging module 150 can be switched at the same time on the flat glass and the filter lenses on the side close to the first displacement platform 110, so as to facilitate the switching of the first imaging module 150a and the second imaging module 150b in the wide-field imaging module 150 between the bright field imaging mode and the photoelectric imaging mode, thereby realizing automatic control.

[0092] Please continue reading Figure 1 and Figure 5 In some embodiments, an integrated photoelectric detection system 100 further includes an electrical control module 180, the electrical control module 180 includes an electrical control platform 180a, and the sample platform 160 further includes a sample fixture 160a and electrode modules 160c disposed at both ends of the sample fixture 160a.

[0093] In the photoluminescence imaging mode, the electrical control platform 180a is disconnected from the electrode module 160c, and the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0094] In the electroluminescent imaging mode, the electrical control platform 180a is electrically connected to the electrode module 160c, and the wide-field imaging module 150, the light source module 130 and the sample platform 160 are aligned along the second direction Y.

[0095] In these embodiments, in the photoluminescence imaging mode, the light source of the light source module 130 emits light of a specific wavelength to stimulate the surface of the sample to be detected to actively emit light, and the emitted light enters the wide-field imaging module 150 to realize photoluminescence imaging; in the electroluminescence imaging mode, the electrode module 160c on the sample holder 160a realizes the power supply of the sample to be detected to stimulate the surface of the sample to be detected to actively emit light, and the emitted light enters the wide-field imaging module 150 to realize electroluminescence imaging.

[0096] The electric control module 180 is a computing center for realizing automatic control of the entire integrated photoelectric detection system 100 , an electrical connection center with each device of the integrated photoelectric detection system 100 , and a data center for collecting and analyzing data.

[0097] The electrical control platform 180a in the electrical control module 180 is used to control the electrical connection between the power supply and each device, manage and adjust the electrical working state of the electronic components in an integrated photoelectric detection system 100, and is an electrical connection hub of the integrated photoelectric detection system 100.

[0098] The electrode module 160c on the sample holder 160a can realize power on and off with the sample to be detected, so as to stimulate the surface of the sample to be detected to actively emit light in the electroluminescence imaging mode.

[0099] In the photoluminescence imaging mode, the light source module 130 emits an excitation light of a specific wavelength. When the excitation light reaches the surface of the sample to be detected, the sample to be detected will be excited to a higher energy level. When the sample to be detected transitions from the excited state back to the ground state, it will actively emit emission light of a specific wavelength. Therefore, it is necessary to set a filter module 170c in front of the wide-field imaging module 150 to selectively filter out the excitation light and retain the emission light from the light entering the wide-field imaging module 150, so that the camera in the wide-field imaging module 150 can capture the emission light signal of a specific wavelength and complete the photoluminescence imaging.

[0100] In the electroluminescent imaging mode, the electrode module 160c is powered on to electrify the surface of the sample to be detected. After the surface of the sample to be detected is powered on, an external electric field is applied to make the electrons in the sample to be detected hit the luminescent center, so that the electrons transition and change between energy levels, and the electrons and holes recombine, etc., to stimulate the surface of the sample to be detected to actively emit light of a specific wavelength. Therefore, it is necessary to set a filter module 170c in front of the wide-field imaging module 150 to selectively filter out the electromagnetic wave signal of a specific wavelength of the electric field generated by current or voltage excitation from the light entering the wide-field imaging module 150, and retain the emitted light, so that the camera in the wide-field imaging module 150 can capture the emitted light signal of a specific wavelength and complete electroluminescent imaging.

[0101] The control of the excitation light of a specific wavelength of the light source module 130 and the on and off of the electrode module 160c can be achieved through automatic control.

[0102] Please continue reading Figure 1 In some embodiments, the electric control module 180 further includes an industrial computer 180b and an acquisition card 180c. The industrial computer 180b is electrically connected to the first displacement platform 110, the light source module 130, the micro-area detection module 140, the wide-field imaging module 150 and the sample platform 160, so as to realize an automatic control of an integrated photoelectric detection system 100. The acquisition card 180c is connected to the industrial computer 180b, the micro-area detection module 140 and the wide-field imaging module 150, so as to transmit the data collected by the micro-area detection module 140 and the wide-field imaging module 150 to the industrial computer 180b.

[0103] In these embodiments, the industrial computer 180b is a computing center of an integrated photoelectric detection system 100, which can realize parameter adjustment and automatic configuration under different detection functions, adjust the position of the first displacement platform 110, etc.; the industrial computer 180b can also provide input and output windows for operators, and the operators can obtain real-time feedback data through the control software integrated on the industrial computer 180b, and can set different working modes, and start or stop related detection tasks.

[0104] The acquisition card 180c can collect and transmit image data, spectral data or original photoelectric signals from different modules to the industrial computer 180b in real time and efficiently, ensuring that an integrated photoelectric detection system 100 can efficiently acquire data and transmit it to the industrial computer 180b for real-time processing.

[0105] Exemplarily, in a pre-startup phase of an integrated photoelectric detection system 100, different preset positions need to be pre-input into the industrial computer 180b, including but not limited to the first sub-position, the second sub-position and the second position of the first displacement platform 110, the first rotation position and the second rotation position of the rotation mechanism 170a of the filter module 170, the preset position of the focal plane of the first imaging module 150a and the second imaging module 150b in the second displacement platform 120 aligned with the sample surface, etc., to ensure that when switching different detection functions, the integrated optical detection platform can be quickly and accurately adjusted to the appropriate working distance.

[0106] Optionally, the sample displacement stage 160b in the sample platform 160 can be manually controlled by an operator in subsequent local precise imaging and detection functions, or the displacement position can be preset in a pre-startup phase of an integrated photoelectric detection system 100 to achieve automated local area imaging and detection.

[0107] Figure 7 The separate amplification structure of the micro-area detection module 140 in the integrated photoelectric detection system 100 provided in the embodiment of the first aspect of the present application is shown.

[0108] See also Figure 4 and Figure 7 In some embodiments, the micro-area detection module 140 includes a laser 140a, a dichroic mirror 140m, a spectrometer 140b, and an electrical signal acquisition card 140r.

[0109] In the spectral analysis mode, the light source generated by the laser 140a propagates along the first optical path, passes through the dichroic mirror 140m and irradiates the surface of the sample to be detected. The fluorescence generated by the excitation of the surface of the sample to be detected enters the dichroic mirror 140m and propagates along the second optical path and is transmitted to the spectrometer 140b.

[0110] In the photocurrent scanning mode, the light source generated by the laser 140a propagates along the first optical path, passes through the dichroic mirror 140m and irradiates the surface of the sample to be detected, and the current changes generated on the surface of the sample to be detected are transmitted to the electrical signal acquisition card 140r.

[0111] In these embodiments, the spectrum analysis mode and the photocurrent scanning mode share the first optical path, so that the micro-area detection module 140 can simultaneously realize photoelectric detection functions such as spectrum analysis and photocurrent scanning.

[0112] Exemplarily, the fluorescence detection function can be realized in the spectral analysis mode. The realization of the fluorescence detection function requires irradiating high-energy laser to the surface of the sample to be detected, exciting the material of the sample to be detected to transition to an excited state, and then transitioning back to the ground state to release energy and emit fluorescence. The molecular structure and chemical composition of the sample are analyzed by analyzing the fluorescence spectrum.

[0113] When realizing the fluorescence detection function, the laser 140a of the micro-area detection module 140 generates a continuous and stable core light source, which is introduced into the system through the first optical fiber 140c. The first mirror frame 140e fixes the first optical fiber 140c to adjust the incident direction and attenuates it through the filter in the rotating mirror frame 140g. The second mirror frame 140h fixes the collimating lens to collimate and expand the laser. The expanded laser passes through the excitation filter 140j, the high-reflection mirror 140l and the dichroic mirror 140m in turn, and finally passes through the piezoelectric adjustment frame 140n and the objective lens 140p to form an adjustable focusing spot on the surface of the sample to be detected.

[0114] The fluorescence generated by the sample to be detected after excitation is collected and collimated by the objective lens 140p, and after being reflected by the dichroic mirror 140m, enters the second optical path, and is filtered out by the collecting filter 140k to remove the excitation laser. After passing through the collecting lens fixed by the fourth mirror frame 140i, it is focused on the front end face of the second optical fiber 140d fixed on the third mirror frame 140f. Finally, the fluorescence signal is transmitted to the spectrometer 140b through the second optical fiber 140d for analysis.

[0115] Optionally, Raman testing function can also be performed in the spectral analysis mode. The principle of Raman testing is the same as that of fluorescence testing. Raman scattered light is obtained by selecting laser light sources of different wavelengths for excitation, and other scattered light is selectively filtered out through the filter module 170 to ensure that only Raman scattered light enters the wide-field imaging module 150.

[0116] The photocurrent scanning function analyzes the photoelectric properties of the sample to be tested by measuring the current value generated when irradiated with light of a specific wavelength, especially the photoelectric response performance of the semiconductor devices and optoelectronic devices that have been prepared. It comprehensively analyzes the photoelectric performance characterization and the photogenerated carrier characteristics of the optoelectronic materials.

[0117] When realizing the photocurrent scanning function, the laser 140a in the micro-area detection module 140 generates a continuous and stable core light source, which is introduced into the system through the first optical fiber 140c. The first mirror frame 140e fixes the first optical fiber 140c to adjust the incident direction and attenuates it through the filter in the electric rotating mirror frame 140g. The second mirror frame 140h fixes the collimating lens to collimate and expand the laser. The expanded laser passes through the excitation filter 140j, the high-reflection mirror 140l and the dichroic mirror 140m in turn, and finally passes through the piezoelectric adjustment frame 140n and the objective lens 140p to focus on the sample surface.

[0118] The voltage and current values ​​generated on the surface of the sample to be tested are transmitted to the electrical signal acquisition card 140r through the transmission cable 140q, and finally transmitted to the industrial control computer 180b for analysis.

[0119] Optionally, the photocurrent scanning imaging function can also be realized in the photocurrent scanning mode. An integrated photoelectric detection system 100 adjusts the position of the light spot on the sample to be detected by moving the sample displacement stage 160b, performs a serpentine scan on the sample to be detected, collects the real-time voltage of each point and uploads it to the industrial computer 180b for data reconstruction, and outputs the corresponding pseudo-color image and three-dimensional image.

[0120] Please continue reading Figure 7 In some embodiments, the micro-area detection module 140 further includes a piezoelectric adjustment frame 140n and a rotating mirror frame 140g.

[0121] In the photocurrent scanning mode, the laser 140a controls the intensity of the light source, the piezoelectric adjustment frame 140n controls the focal length of the light source, and the rotating mirror frame 140g controls the direction of the first light path.

[0122] In these embodiments, in the photocurrent scanning mode, in order to accurately simulate the effect of sunlight or other test conditions, it is necessary to adjust the piezoelectric adjustment frame 140n, the laser 140a and the electric rotating mirror frame 140g to control the spot size and power density of the light spot on the sample surface.

[0123] Illustratively, the embodiment of the present application further provides a detection method of an integrated photoelectric detection system 100 , and corresponding steps in different imaging modes can be selected according to test requirements.

[0124] Step 1: Preparation. After the whole machine is turned on, it is necessary to check whether the appearance of the sample to be tested is intact and whether the electrode module 160c is damaged. After confirming that there is no error, place the sample to be tested in the sample fixture 160a, and ensure that the sample to be tested is in good contact with the electrode module 160c. Close the cabinet door of the whole machine mechanical housing 190 to ensure that there is no additional light source in the chamber. Then start the control software of the industrial computer 180b, select the appropriate preset parameters according to different samples to be tested, and select the number of shots according to the size of the sample to be tested.

[0125] Step 2: Autofocus and preset parameters. When an integrated photoelectric detection system 100 is turned on for the first time or when a different type of sample is replaced, an autofocus program needs to be used to find the focal plane of the wide-field imaging module 150. The second displacement platform 120 will evaluate and give feedback values ​​based on the imaging results to find the best position for the current imaging. This position will be used as a preset position and passed to the subsequent shooting process.

[0126] Step 3: Bright field imaging mode. In the bright field imaging mode, the filter module 170 is not required, the filter module 170 is rotated to the first rotation position, the first displacement platform 110 is horizontally moved to the first sub-position, the first coaxial light source 130a and the first imaging module 150a are aligned, the second displacement platform 120 performs automatic focusing to ensure that the focal plane of the first imaging module 150a is aligned with the sample plane, and low-resolution large-area bright field imaging is performed.

[0127] Step 4: Photoelectric imaging mode. After completing the test of the bright field imaging mode, the test of the electroluminescent imaging mode and the photoluminescent imaging mode will begin. The filter module 170 rotates to switch the second rotation position, and the first displacement platform 110 moves horizontally to the first sub-position to align the first coaxial light source 130a and the first imaging module 150a. The second displacement platform 120 performs automatic focusing to ensure that the focal plane of the first imaging module 150a is aligned with the sample plane, and the switch of the first coaxial light source 130a is turned on to perform low-resolution large-area photoluminescent imaging. Subsequently, based on the same imaging module and filter module 170c, turn on the power of the electrical control platform 180a, and set the appropriate terminal voltage and current values. After power-on, electroluminescent imaging can be performed with preset parameters.

[0128] Step 5: Fluorescence spectrum detection mode. In order to measure the fluorescence spectrum of the sample to be detected, the control software of the industrial computer 180b can select the position to be detected on the image based on the results of the bright field imaging mode, photoluminescence imaging mode and electroluminescence imaging mode. Then, the first displacement platform 110 moves to the second position to align the micro-area detection module 140 with the center of the sample to be detected, and the sample displacement stage 160b moves the area to be detected of the sample to be detected to just below the light spot. Then, the fluorescence spectrum of the sample to be detected is collected with preset parameters.

[0129] Step 6: Photocurrent scanning imaging mode. The first displacement platform 110 moves to the second position, aligning the micro-area detection module 140 with the center of the sample, and the sample displacement platform 160b moves the detection area of ​​the sample to be detected to just below the light spot. The light spot collects the real-time voltage generated by the sample to be detected every time it passes a point. The sample displacement platform 160b moves the sample to be detected to perform serpentine scanning, thereby realizing photocurrent scanning imaging.

[0130] Step 7: High-resolution bright field imaging mode. No filter is needed. The filter module 170 is rotated to the first rotation position, and the first displacement platform 110 is moved to the second position to align the second coaxial light source 130b with the second imaging module 150b. The second displacement platform 120 performs automatic focusing to ensure that the focal plane of the second imaging module 150b is aligned with the sample plane, and high-resolution large-area bright field imaging is performed.

[0131] Step 8: High-resolution photoluminescence imaging mode. The filter module 170 rotates to switch to the first rotation position, and the first displacement platform 110 moves horizontally to the second position to align the second coaxial light source 130b with the second imaging module 150b. The second displacement platform 120 performs automatic focusing to ensure that the focal plane of the second imaging module 150b is aligned with the sample plane, and the second coaxial light source 130b is turned on to perform high-resolution photoluminescence imaging.

[0132] Step 9: High-resolution electroluminescent imaging mode. Turn on the power of the electrical control platform 180a, set the appropriate terminal voltage and current values, and set the filter module 170, the first displacement platform 110, and the second displacement platform 120 to be consistent with the setting parameters of the photoluminescent imaging mode. After turning on the second imaging module 150b, high-resolution electroluminescent imaging is performed.

[0133] Although the present application has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present application. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there are no structural conflicts. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An integrated photoelectric detection system, characterized in that: include: A first displacement platform, which is movably arranged and can be moved at least along a first direction; A light source module, integrated above the first displacement platform; A micro-area detection module, integrated above the first displacement platform and disposed adjacent to the light source module along the first direction; A wide-field imaging module, located at one side of the circumference of the first displacement platform; A sample platform, used for carrying a sample to be detected, and located on the other side of the first displacement platform away from the wide-field imaging module; In the imaging mode, the first displacement platform is displaced to a first position, and the wide-field imaging module, the light source module and the sample platform are aligned along a second direction; In the photoelectric detection mode, the first displacement platform is displaced to a second position, the micro-area detection module and the sample platform are aligned along the second direction, and the first direction intersects the second direction.

2. An integrated photoelectric detection system according to claim 1, characterized in that: The light source module further includes a first coaxial light source and a second coaxial light source, the size of the first coaxial light source is larger than the size of the second coaxial light source, the wide-field imaging module further includes a first imaging module and a second imaging module, the resolution of the first imaging module is smaller than the resolution of the second imaging module; In the low-resolution imaging mode, the first displacement platform is displaced to a first sub-position, and the first imaging module, the first coaxial light source and the sample platform are aligned along the second direction; In the high-resolution imaging mode, the first displacement platform is displaced to a second sub-position, and the second imaging module, the second coaxial light source and the sample platform are aligned along the second direction.

3. An integrated photoelectric detection system according to claim 2, characterized in that: The first coaxial light source and the second coaxial light source are arranged on both sides of the micro-area detection module along the first direction, and the first imaging module and the second imaging module are arranged adjacent to each other along the first direction.

4. An integrated photoelectric detection system according to claim 3, characterized in that: It also includes a second displacement platform, which is movably arranged and at least movably arranged along the second direction. The wide-field imaging module is integrated on the second displacement platform, and the first imaging module and the second imaging module are arranged adjacent to each other along the first direction on the second displacement platform.

5. The integrated photoelectric detection system according to claim 1, characterized in that: The sample platform includes a sample fixture and a sample displacement platform, wherein the sample fixture is used to clamp the sample to be detected, and the sample displacement platform is located on the side of the sample fixture away from the first displacement platform, and is used to control the displacement of the sample to be detected along the first direction and a third direction, wherein the third direction intersects with a plane formed by the first direction and the second direction.

6. The integrated photoelectric detection system according to claim 1, characterized in that: It also includes a filter module, the filter module includes a rotating mechanism and a non-filter module and a filter module arranged along the circumference of the rotating mechanism, and the filter module is arranged on a side of the wide-field imaging module close to the first displacement platform along the second direction; In the bright field imaging mode, the rotating mechanism rotates to a first rotating position, and the wide field imaging module, the non-filtering module, the light source module and the sample platform are aligned along the second direction; In the optoelectronic imaging mode, the rotating mechanism rotates to a second rotating position, and the wide-field imaging module, the filter module, the light source module and the sample platform are aligned along the second direction.

7. The integrated photoelectric detection system according to claim 1, characterized in that: It also includes an electric control module, the electric control module includes an electric control platform, and the sample platform also includes a sample fixture and electrode modules arranged at both ends of the sample fixture; In the photoluminescence imaging mode, the electrical control platform is disconnected from the electrode module, and the wide-field imaging module, the light source module and the sample platform are aligned along the second direction; In the electroluminescent imaging mode, the electrical control platform is electrically connected to the electrode module, and the wide-field imaging module, the light source module and the sample platform are aligned along the second direction.

8. An integrated photoelectric detection system according to claim 7, characterized in that: The electric control module also includes an industrial computer and an acquisition card. The industrial computer is electrically connected to the first displacement platform, the light source module, the micro-area detection module, the wide-field imaging module and the sample platform, and is used to realize automatic control of the integrated photoelectric detection system. The acquisition card is connected to the industrial computer, the micro-area detection module and the wide-field imaging module, and is used to transmit the data collected by the micro-area detection module and the wide-field imaging module to the industrial computer.

9. The integrated photoelectric detection system according to claim 1, characterized in that: The micro-area detection module includes a laser, a dichroic mirror, a spectrometer and an electrical signal acquisition card; In the spectrum analysis mode, the light source generated by the laser propagates along the first light path, passes through the dichroic mirror and irradiates the surface of the sample to be detected, and the fluorescence generated by the excitation of the surface of the sample to be detected enters the dichroic mirror and propagates along the second light path and is transmitted to the spectrometer; In the photocurrent scanning mode, the light source generated by the laser propagates along the first optical path, passes through the dichroic mirror and irradiates the surface of the sample to be detected, and the current changes generated on the surface of the sample to be detected are transmitted to the electrical signal acquisition card.

10. An integrated photoelectric detection system according to claim 9, characterized in that: The micro-area detection module also includes a piezoelectric adjustment frame and a rotating mirror frame; In the photocurrent scanning mode, the laser controls the intensity of the light source, the piezoelectric adjustment frame controls the focal length of the light source, and the rotating mirror frame controls the direction of the first optical path.

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