Process chamber and semiconductor processing apparatus, lamp dismounting tool and dismounting method

Abstract

Embodiments of the present application provide a process chamber, a semiconductor process equipment, a lamp dismounting tool and a dismounting method. The process chamber comprises a cavity, a lamp, a first support and a second support. The cavity comprises a first side plate and a second side plate which are arranged at intervals. The first side plate is provided with a first mounting hole, and the second side plate is provided with a second mounting hole which is opposite to the first mounting hole. The first support is detachably arranged in the first mounting hole, and the second support is detachably arranged in the second mounting hole. Two ends of the lamp are arranged in the first support and the second support respectively.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor process, in particular to a process chamber, a semiconductor process equipment, a lamp dismounting tool and a dismounting method. BACKGROUND

[0002] In the process of implementing semiconductor process, sometimes it is necessary to irradiate workpieces by lamp tubes. For example, in the process of ultraviolet curing, sometimes it is necessary to irradiate workpieces by ultraviolet lamp tubes. It should be noted that ultraviolet curing is a process in which, under ultraviolet light radiation, the photoinitiator in liquid ultraviolet curing material is stimulated to become a free radical or a cation, thereby causing the polymerization of a high molecular material containing active functional groups into a solid film. Ultraviolet light is generally generated by ultraviolet lamp tubes.

[0003] In the related art, the lamp tube is arranged in the process chamber, so that when the lamp tube needs to be replaced, the process chamber as a whole needs to be disassembled, and then after the replacement of the lamp tube is completed, the process chamber as a whole is installed back to the original position. In the process of replacing the lamp tube, the process chamber needs to be disassembled and assembled as a whole. In the process of disassembling and assembling the process chamber, the devices adjacent to the process chamber are easily damaged, and there is a problem that the process of disassembling and assembling the process chamber as a whole is complicated. SUMMARY

[0004] Embodiments of the present application provide a process chamber, a semiconductor process equipment, a lamp dismounting tool and a dismounting method to solve the problems in the background art.

[0005] In a first aspect, embodiments of the present application provide a process chamber.

[0006] The process chamber provided by the embodiments of the present application comprises a cavity, a lamp tube, a first support and a second support. The cavity comprises a first side plate and a second side plate arranged at intervals, the first side plate is provided with a first mounting hole, and the second side plate is provided with a second mounting hole opposite to the first mounting hole. The first support is detachably arranged in the first mounting hole, the second support is detachably arranged in the second mounting hole, and the two ends of the lamp tube are arranged in the first support and the second support respectively.

[0007] Optionally, the process chamber further comprises a first clamping device and a second clamping device. The first clamping device is arranged on the first side plate, and the second clamping device is arranged on the second side plate. The first clamping device is used for clamping the first support at the first mounting hole, and the second clamping device is used for clamping the second support at the second mounting hole.

[0008] Optionally, the first clamping device comprises a first body and a second body; the first body and the second body are capable of approaching each other to switch the first clamping device to a clamping state, wherein the first support is capable of being clamped between the first body and the second body which approach each other; the second clamping device comprises a third body and a fourth body; the third body and the fourth body are capable of approaching each other to switch the second clamping device to a clamping state, wherein the second support is capable of being clamped between the third body and the fourth body which approach each other.

[0009] Optionally, the first body is provided with a first sliding groove, the second body is provided with a second sliding groove, the first side plate is provided with a first sliding fitting and a second sliding fitting; the first sliding fitting is embedded in the first sliding groove, and the first body is capable of sliding relative to the first sliding fitting to approach or move away from the second body; the second sliding fitting is embedded in the second sliding groove, and the second body is capable of sliding relative to the second sliding fitting to approach or move away from the first body; the third body is provided with a third sliding groove, the fourth body is provided with a fourth sliding groove, the second side plate is provided with a third sliding fitting and a fourth sliding fitting, the third sliding fitting is embedded in the third sliding groove, and the third body is capable of sliding relative to the third sliding fitting to approach or move away from the fourth body, and the fourth sliding fitting is embedded in the fourth sliding groove, and the fourth body is capable of sliding relative to the fourth sliding fitting to approach or move away from the third body.

[0010] Optionally, the first sliding fitting comprises a first telescopic buckle and a first elastic member, the first sliding groove is provided with a first recess, the second sliding fitting comprises a second telescopic buckle and a second elastic member, and the second sliding groove is provided with a second recess; in the case that the first clamping device is switched to the clamping state, the first telescopic buckle abuts against the first recess under the action of the elastic force exerted by the first elastic member, and the second telescopic buckle abuts against the second recess under the action of the elastic force exerted by the second elastic member; the third sliding fitting comprises a third telescopic buckle and a third elastic member, the third sliding groove is provided with a third recess, the fourth sliding fitting comprises a fourth telescopic buckle and a fourth elastic member, and the fourth sliding groove is provided with a fourth recess; in the case that the second clamping device is switched to the clamping state, the third telescopic buckle abuts against the third recess under the action of the elastic force exerted by the third elastic member, and the fourth telescopic buckle abuts against the fourth recess under the action of the elastic force exerted by the fourth elastic member.

[0011] Optionally, the outer circumferential sidewall of the first support is provided with a first groove, and the first body and the second body are connected with the first groove when the first clamping device is switched to the clamped state; the outer circumferential sidewall of the second support is provided with a second groove, and the third body and the fourth body are connected with the second groove when the second clamping device is switched to the clamped state.

[0012] In a second aspect, the embodiments of the present application provide a lamp dismounting tool.

[0013] The lamp dismounting tool provided by the embodiments of the present application is used for dismounting the lamp in any one of the process chambers provided by the embodiments of the present application; the lamp dismounting tool is provided with a sliding rail, the first support is provided with a fifth sliding groove, the second support is provided with a sixth sliding groove, the first support can be arranged in the sliding rail through the fifth sliding groove, and the second support can be arranged in the sliding rail through the sixth sliding groove.

[0014] Optionally, the lamp dismounting tool is further provided with first and second resisting surfaces which are in the same direction; the first resisting surface is used for abutting against the first support arranged in the sliding rail, and the second resisting surface is used for abutting against the second support arranged in the sliding rail, so that the distance between the first support and the second support matches the installation distance of the lamp.

[0015] In a third aspect, the embodiments of the present application provide a lamp dismounting method.

[0016] The lamp dismounting method provided by the embodiments of the present application is used for dismounting the lamp based on any one of the lamp dismounting tools provided by the embodiments of the present application, and the lamp dismounting method comprises the following steps.

[0017] In the process of installing the lamp in the cavity, the first support is arranged in the sliding rail, the second support is arranged in the sliding rail, and the lamp is arranged between the first support and the second support which are arranged at intervals; the lamp dismounting tool provided with the lamp is arranged in the first mounting hole and the second mounting hole; the first support is detachably connected to the first mounting hole, and the second support is detachably connected to the second mounting hole; and the lamp dismounting tool is drawn out.

[0018] In the process of dismounting the lamp installed in the cavity, the lamp dismounting tool is inserted into the first support and the second support; the limiting connection between the first support and the cavity is released, and the limiting connection between the second support and the cavity is released; and the lamp dismounting tool is drawn out from the cavity together with the first support, the second support and the lamp.

[0019] In a fourth aspect, the embodiments of the present application provide a semiconductor process equipment.

[0020] The semiconductor process equipment provided by the embodiments of the present application comprises any one of the process chambers provided by the embodiments of the present application.

[0021] Optionally, the semiconductor process equipment further comprises a cover body, a connecting shaft and a connecting shaft driving mechanism; the number of the process chambers is two, the two process chambers are arranged side by side in the cover body, and the adjacent sides of the two process chambers are respectively rotationally connected with the connecting shaft; the connecting shaft driving mechanism is drivingly connected with the connecting shaft to drive the connecting shaft to move in a first direction; the side of one of the process chambers, which is away from the connecting shaft, is slidingly connected with the cover body in a second direction, and the side of the other of the process chambers, which is away from the connecting shaft, is slidingly connected with the cover body in a third direction; the included angle between the second direction and the first direction is a first preset angle, and the included angle between the third direction and the first direction is a second preset angle.

[0022] Optionally, the connecting shaft driving mechanism comprises a first rotating shaft, the first rotating shaft is rotationally connected with the cover body, the first rotating shaft is limited in the cover body along the direction of its own rotating shaft, and the first rotating shaft is threadedly connected with the connecting shaft in the first direction.

[0023] Optionally, the cover body comprises a third side plate and a fourth side plate arranged at intervals, the third side plate is parallel to the first side plate, the third side plate is provided with a first through hole, and the fourth side plate is provided with a second through hole opposite to the first through hole; the connecting shaft driving mechanism further comprises a second rotating shaft, two first gears and two second gears, the second rotating shaft is arranged through the first through hole and the second through hole; the number of the first rotating shafts is two, the two first rotating shafts are respectively threadedly connected with the two ends of the connecting shaft, the first gears are arranged one by one on the first rotating shafts, the two second gears are arranged at intervals on the second rotating shaft, and the first gears are respectively engaged with the second gears.

[0024] Optionally, the end of the connecting shaft, which faces the cover body, is provided with an elastic telescopic buckle, the cover body is provided with a seventh sliding groove extending in the first direction, the elastic telescopic buckle can slide relative to the seventh sliding groove, the seventh sliding groove is provided with a plurality of buckle openings at intervals in the first direction, and the elastic telescopic buckle can selectively elastically abut against any one of the plurality of buckle openings.

[0025] The above at least one technical scheme adopted by the embodiments of the present application can achieve the following beneficial effects:

[0026] In the embodiments of the present application, since the first support is detachably arranged in the first mounting hole and the second support is detachably arranged in the second mounting hole, when the lamp tube needs to be replaced, the first support, the second support and the lamp tube can be removed together by using the lamp tube dismounting tool as an auxiliary dismounting tool. When the lamp tube needs to be installed in the process chamber, the first support and the second support can be connected by using the lamp tube dismounting tool, and the two ends of the lamp tube are arranged in the first support and the second support respectively, so that the first support and the second support can be installed in the first mounting hole and the second mounting hole by moving the lamp tube dismounting tool, so that the lamp tube is fixed to the first side plate and the second side plate. In this way, during the replacement of the lamp tube, the process chamber does not need to be removed as a whole, and the operation convenience of replacing the lamp tube can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related art, the drawings needed to be used in the embodiments or the related art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0028] Figure 1 A schematic view of a process chamber provided by an embodiment of the present application;

[0029] Figure 2 A schematic view of a process chamber provided by an embodiment of the present application;

[0030] Figure 3 A schematic view of a process chamber provided by an embodiment of the present application; Figure 1 A partial schematic view of a process chamber shown in FIG. 1;

[0031] Figure 4 A partial schematic view of a process chamber shown in FIG. 1; Figure 1 A partial schematic view of a process chamber shown in FIG. 1;

[0032] Figure 5 A schematic view of a cavity provided by an embodiment of the present application;

[0033] Figure 6 A schematic view of a lamp tube dismounting tool, a first support, a second support and a lamp tube provided by an embodiment of the present application;

[0034] Figure 7 A schematic view of a lamp tube dismounting tool provided by an embodiment of the present application;

[0035] Figure 8 A schematic view of a first support provided by an embodiment of the present application;

[0036] Figure 9A schematic view of a second support provided for an embodiment of the present application;

[0037] Figure 10 A schematic view of a first clamping device and a first support provided for an embodiment of the present application;

[0038] Figure 11 A schematic view of a first sliding fitting provided for an embodiment of the present application;

[0039] Figure 12 A schematic view of a semiconductor process equipment provided for an embodiment of the present application;

[0040] Figure 13 A schematic view of a semiconductor process equipment provided for an embodiment of the present application;

[0041] Figure 14 A schematic view of a cover provided for an embodiment of the present application;

[0042] Figure 15 A schematic view of a connecting shaft provided for an embodiment of the present application;

[0043] Figure 16 A schematic view of a bottom plate and a first rotating shaft provided for an embodiment of the present application;

[0044] Figure 17 A schematic view of another semiconductor process equipment provided for an embodiment of the present application.

[0045] BRIEF DESCRIPTION OF THE DRAWINGS

[0046] 10 - semiconductor process equipment; 100 - process chamber; 110 - cavity; 111 - first side plate; 1111 - first mounting hole; 112 - second side plate; 120 - lamp tube; 131 - first support; 1311 - first recess; 1312 - fifth sliding groove; 1313 - first limiting hole; 132 - second support; 1321 - second recess; 1322 - sixth sliding groove; 1323 - second limiting hole; 140 - clamping device; 141 - first body; 1411 - first sliding groove; 1412 - first recess; 1413 - fifth recess; 142 - second body; 1421 - second sliding groove; 1422 - second recess; 1423 - sixth recess; 143 - first sliding fitting; 1431 - first telescopic buckle; 1432 - first elastic member; 144 - second sliding fitting; 150 - second clamping device;

[0047] 200 - lamp tube dismounting tool; 210 - sliding rail; 220 - first resisting surface; 230 - second resisting surface;

[0048] 300 - cover; 310 - third side plate; 311 - first through hole; 320 - fourth side plate; 321 - second through hole; 330 - bottom plate

[0049] 400 - connecting shaft; 510 - first rotating shaft; 520 - second rotating shaft; 530 - first gear; 540 - second gear; 550 - rotary driver; 600 - driving device; 610 - rotating disc; 700 - vacuum chamber; 800 - heat dissipation device. DETAILED DESCRIPTION

[0050] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described clearly and completely below with reference to the embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0051] In the description of the present application, it should be noted that unless explicitly defined and limited, the terms “mounting”, “connecting”, “connecting” should be understood broadly, for example, it can be fixedly connected, or detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0052] In addition, although the terms used in the present application are selected from the commonly known and used terms, some terms mentioned in the specification of the present application may be selected by the applicant according to his or her judgment, and the detailed meanings of which are described in the relevant part of the description herein.

[0053] In addition, the present application is required to be understood not only by the actual terms used, but also by the meaning implied by each term.

[0054] The technical solutions provided by the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0055] The embodiments of the present application provide a process chamber. Referring to Figures 1 to 11 The process chamber 100 provided by the embodiments of the present application includes a cavity 110, a lamp tube 120, a first support 131 and a second support 132. Exemplarily, the lamp tube 120 is a purple light lamp tube. Wherein, in the case that the lamp tube 120 is a purple light lamp tube, the process chamber 100 is a purple light microwave cavity.

[0056] The cavity 110 comprises a first side plate 111 and a second side plate 112 which are arranged in a spaced manner. The first side plate 111 is provided with a first mounting hole 1111, and the second side plate 112 is provided with a second mounting hole which is opposite to the first mounting hole 1111. The first support 131 is detachably arranged in the first mounting hole 1111, and the second support 132 is detachably arranged in the second mounting hole. The two ends of the lamp tube 120 are arranged in the first support 131 and the second support 132 respectively.

[0057] In this way, in the embodiment of the present application, since the first support 131 is detachably arranged in the first mounting hole 1111 and the second support 132 is detachably arranged in the second mounting hole, when the lamp tube 120 needs to be replaced, the first support 131, the second support 132 and the lamp tube 120 can be taken out together by using the lamp tube dismounting tool 200 as an auxiliary dismounting tool. When the lamp tube 120 needs to be installed in the process chamber 100, the first support 131 and the second support 132 can be connected by using the lamp tube dismounting tool 200, and the two ends of the lamp tube 120 are arranged in the first support 131 and the second support 132 respectively, so that the first support 131 and the second support 132 can be installed in the first mounting hole 1111 and the second mounting hole by moving the lamp tube dismounting tool 200, so that the lamp tube 120 is fixed to the first side plate 111 and the second side plate 112. In this way, during the replacement of the lamp tube 120, the process chamber 100 does not need to be dismounted as a whole, and the operation convenience of replacing the lamp tube 120 can be improved.

[0058] In some embodiments, the process chamber 100 further comprises a first clamping device 140 and a second clamping device 150. The first clamping device 140 is arranged on the first side plate 111, and the second clamping device 150 is arranged on the second side plate 112. The first clamping device 140 is used to clamp the first support 131 at the first mounting hole 1111. The second clamping device 150 is used to clamp the second support 132 at the second mounting hole. In this way, the first support 131 can be detachably arranged in the first mounting hole 1111 by clamping the first support 131 at the first mounting hole 1111 by the first clamping device 140. The second support 132 can be detachably arranged in the second mounting hole by clamping the second support 132 at the second mounting hole by the second clamping device 150. It should be noted that the first support 131 and the second support 132 can also be detachably arranged in the first mounting hole 1111 and the second mounting hole in other ways in the related art, which will not be described here.

[0059] Reference Figure 1 and Figure 10In some embodiments, the first clamping device 140 comprises a first body 141 and a second body 142. The first body 141 and the second body 142 can be moved towards each other to switch the first clamping device 140 to the clamping state. The first support 131 can be clamped between the first body 141 and the second body 142 when they are moved towards each other. In other words, the first body 141 is provided with a first sub-receiving area, the second body 142 is provided with a second sub-receiving area, the first sub-receiving area and the second sub-receiving area form a first receiving area when the first body 141 and the second body 142 are moved towards each other, and the outer contour of the first receiving area matches the outer contour of the first support 131, so that the first support 131 can be clamped in the first receiving area.

[0060] Similarly, the second clamping device 150 comprises a third body and a fourth body. The third body and the fourth body can be moved towards each other to switch the second clamping device 150 to the clamping state. The second support 132 can be clamped between the third body and the fourth body when they are moved towards each other. In other words, the third body is provided with a third sub-receiving area, the fourth body is provided with a fourth sub-receiving area, the third sub-receiving area and the fourth sub-receiving area form a second receiving area when the third body and the fourth body are moved towards each other, and the outer contour of the second receiving area matches the outer contour of the second support 132, so that the second support 132 can be clamped in the second receiving area.

[0061] Reference Figure 10 In some embodiments, the first body 141 is provided with a first sliding groove 1411, and the second body 142 is provided with a second sliding groove 1421. The first side plate 111 is provided with a first sliding fitting 143 and a second sliding fitting 144. The first sliding fitting 143 is embedded in the first sliding groove 1411, and the first body 141 can slide relative to the first sliding fitting 143 to move towards or away from the second body 142. The second sliding fitting 144 is embedded in the second sliding groove 1421, and the second body 142 can slide relative to the second sliding fitting 144 to move towards or away from the first body 141. In this way, the sliding direction of the first body 141 can be limited by embedding the first sliding fitting 143 in the first sliding groove 1411. The sliding direction of the second body 142 can be limited by embedding the second sliding fitting 144 in the second sliding groove 1421.

[0062] Similarly, the third body is provided with a third sliding groove, the fourth body is provided with a fourth sliding groove, the second side plate 112 is provided with a third sliding fitting and a fourth sliding fitting, the third sliding fitting is embedded in the third sliding groove, and the third body can slide relative to the third sliding fitting to move towards or away from the fourth body. The fourth sliding fitting is embedded in the fourth sliding groove, and the fourth body can slide relative to the fourth sliding fitting to move towards or away from the third body. In this way, the sliding direction of the third body can be limited by embedding the third sliding fitting in the third sliding groove. The sliding direction of the fourth body can be limited by embedding the fourth sliding fitting in the fourth sliding groove.

[0063] With reference to Figure 10 and Figure 11 In some embodiments, the first sliding fitting 143 comprises a first elastic buckle 1431 and a first elastic member 1432. The first sliding groove 1411 is provided with a first recess 1412, and the second sliding fitting 144 comprises a second elastic buckle and a second elastic member. The second sliding groove 1421 is provided with a second recess 1422. In the case where the first clamping device 140 is switched to the clamped state, the first elastic buckle 1431 is in abutment with the first recess 1412 under the action of the elastic force exerted by the first elastic member 1432, and the second elastic buckle is in abutment with the second recess 1422 under the action of the elastic force exerted by the second elastic member. In this way, the first clamping device 140 can be kept in the clamped state by the elastic abutment of the first elastic buckle 1431 with the first recess 1412 and the elastic abutment of the second elastic buckle with the second recess 1422.

[0064] Similarly, the third sliding fitting comprises a third elastic buckle and a third elastic member. The third sliding groove is provided with a third recess. The fourth sliding fitting comprises a fourth elastic buckle and a fourth elastic member. The fourth sliding groove is provided with a fourth recess. In the case where the second clamping device is switched to the clamped state, the third elastic buckle is in abutment with the third recess under the action of the elastic force exerted by the third elastic member, and the fourth elastic buckle is in abutment with the fourth recess under the action of the elastic force exerted by the fourth elastic member. In this way, the second clamping device can be kept in the clamped state by the elastic abutment of the third elastic buckle with the third recess and the elastic abutment of the fourth elastic buckle with the fourth recess.

[0065] With reference to Figure 10 and Figure 11 In some embodiments, the first sliding groove 1411 is provided with a fifth recess 1413, and the second sliding groove 1421 is provided with a sixth recess 1423. In the case where the first clamping device 140 is switched to the open state, the first elastic buckle 1431 is in abutment with the fifth recess 1413 under the action of the elastic force exerted by the first elastic member 1432, and the second elastic buckle is in abutment with the sixth recess 1423 under the action of the elastic force exerted by the second elastic member. In this way, the first clamping device 140 can be kept in the open state by the elastic abutment of the first elastic buckle 1431 with the fifth recess 1413 and the elastic abutment of the second elastic buckle with the sixth recess 1423.

[0066] Similarly, the third sliding groove is provided with a seventh recess. The fourth sliding groove is provided with an eighth recess. In the case that the second clamping device is switched to the open state, the third telescopic buckle is in elastic abutment with the seventh recess under the action of the elastic force exerted by the third elastic member, and the fourth telescopic buckle is in elastic abutment with the eighth recess under the action of the elastic force exerted by the fourth elastic member. In this way, the second clamping device can be kept in the open state by the third telescopic buckle and the fourth telescopic buckle in elastic abutment with the seventh recess and the eighth recess respectively.

[0067] It should be noted that the first body 141 can be provided with at least two first sliding grooves 1411 arranged at intervals, and the number of the first sliding fit members 143 can be equal to the number of the first sliding grooves 1411, and the first sliding fit members 143 are embedded in the first sliding grooves 1411 one by one. In this way, the stability of the first body 141 during sliding can be improved. Of course, if the sliding requirement of the first body 141 is not high, only one first sliding groove 1411 can be provided.

[0068] Similarly, the second body 142 can be provided with at least two second sliding grooves 1421 arranged at intervals, and the number of the second sliding fit members 144 can be equal to the number of the second sliding grooves 1421, and the second sliding fit members 144 are embedded in the second sliding grooves 1421 one by one. In this way, the stability of the second body 142 during sliding can be improved. Of course, if the sliding requirement of the second body 142 is not high, only one second sliding groove 1421 can be provided.

[0069] The third body can be provided with at least two third sliding grooves arranged at intervals, and the number of the third sliding fit members can be equal to the number of the third sliding grooves, and the third sliding fit members are embedded in the third sliding grooves one by one. In this way, the stability of the third body during sliding can be improved. Of course, if the sliding requirement of the third body is not high, only one third sliding groove can be provided.

[0070] The fourth body can be provided with at least two fourth sliding grooves arranged at intervals, and the number of the fourth sliding fit members can be equal to the number of the fourth sliding grooves, and the fourth sliding fit members are embedded in the fourth sliding grooves one by one. In this way, the stability of the fourth body during sliding can be improved. Of course, if the sliding requirement of the fourth body is not high, only one fourth sliding groove can be provided.

[0071] Reference Figure 8 In some embodiments, the outer peripheral sidewall of the first support 131 is provided with a first groove 1311. In the case that the first clamping device 140 is switched to the clamping state, the first body 141 and the second body 142 are both connected with the first groove 1311. In this way, the first support 131 can be limited in the thickness direction of the first support 131.

[0072] Reference Figure 9The outer circumferential wall of the second support 132 is provided with a second groove 1321. In the case that the second clamping device 150 is switched to the clamping state, the third body and the fourth body are both connected with the second groove 1321. In this way, the second support 132 can be limited in the thickness direction of the second support 132.

[0073] In addition, the first support 131 is provided with a first limiting hole 1313, the second support 132 is provided with a second limiting hole 1323, the two ends of the lamp tube 120 are respectively provided with a first protrusion and a second protrusion, the first protrusion can be inserted into the first limiting hole 1313, and the second protrusion can be inserted into the second limiting hole 1323. In this way, the lamp tube 120 can be supported on the first support 131 and the second support 132 by the way that the two ends of the lamp tube 120 are respectively inserted into the first support 131 and the second support 132.

[0074] The embodiment of the present application provides a lamp tube dismounting tool. Figures 6 to 9 The lamp tube dismounting tool 200 is used for dismounting the lamp tube 120 in any one of the process chambers 100 provided by the embodiment of the present application. The lamp tube dismounting tool 200 is provided with a slide rail 210, the first support 131 is provided with a fifth sliding groove 1312, and the second support 132 is provided with a sixth sliding groove 1322. The first support 131 can be inserted into the slide rail 210 through the fifth sliding groove 1312, and the second support 132 can be inserted into the slide rail 210 through the sixth sliding groove 1322.

[0075] In this way, in the case that the lamp tube 120 needs to be replaced, the lamp tube dismounting tool 200 can be inserted into the first support 131 and the second support 132, so that the lamp tube dismounting tool 200, the first support 131, the second support 132 and the lamp tube 120 are connected together. Therefore, after the limitation of the first support 131 and the second support 132 is removed, the lamp tube dismounting tool 200, the first support 131, the second support 132 and the lamp tube 120 can be taken out from the cavity 110 together. In the case that the lamp tube 120 needs to be installed in the process chamber 100, the first support 131 and the second support 132 can be connected by using the lamp tube dismounting tool 200, and the two ends of the lamp tube 120 are arranged in the first support 131 and the second support 132 respectively. Therefore, the first support 131 and the second support 132 can be installed in the first mounting hole 1111 and the second mounting hole 1112 by moving the lamp tube dismounting tool 200, so that the lamp tube 120 is fixed to the first side plate 111 and the second side plate 112.

[0076] The embodiment of the present application provides a lamp tube dismounting tool. Figure 7In some embodiments, the lamp dismounting tool 200 is also provided with the same first stop surface 220 and second stop surface 230. The first stop surface 220 is used to abut against the first seat 131 provided on the slide rail 210, and the second stop surface 230 is used to abut against the second seat 132 provided on the slide rail 210, so that the distance between the first seat 131 and the second seat 132 matches the installation distance of the lamp 120.

[0077] For example, the cross section of the slide rail 210 is a trapezoid with the top smaller than the bottom, and correspondingly, the fifth sliding groove 1312 of the first seat 131 is a trapezoid matching the cross section shape of the slide rail 210, and the sixth sliding groove 1322 of the second seat 132 is a trapezoid matching the cross section shape of the slide rail 210. In addition, the cross section of the slide rail 210 can also be a triangle, an ellipse, a circle, etc., which are not listed one by one here.

[0078] The embodiment of the present application provides a lamp dismounting method based on any one of the lamp dismounting tools 200 provided by the embodiment of the present application. The lamp dismounting method comprises:

[0079] In the process of installing the lamp 120 in the cavity 110, the first seat 131 is provided on the slide rail 210, the second seat 132 is provided on the slide rail 210, and the lamp 120 is arranged between the first seat 131 and the second seat 132. The lamp dismounting tool 200 provided with the lamp 120 is provided in the first mounting hole 1111 and the second mounting hole; the first seat 131 is detachably connected to the first mounting hole 1111, and the second seat 132 is detachably connected to the second mounting hole; and the lamp dismounting tool 200 is extracted.

[0080] In the process of dismounting the lamp 120 installed in the cavity 110, the lamp dismounting tool 200 is inserted into the first seat 131 and the second seat 132; the limiting connection between the first seat 131 and the cavity 110 is released, and the limiting connection between the second seat 132 and the cavity 110 is released; and the lamp dismounting tool 200 is extracted from the cavity 110 together with the first seat 131, the second seat 132 and the lamp 120.

[0081] In this way, the lamp dismounting tool 200 can be used to assist in the dismounting of the lamp 120, and the operation convenience of replacing the lamp 120 can be improved.

[0082] The embodiment of the present application provides a semiconductor process equipment, which refers to Figures 12 to 17 The embodiment of the present application provides a semiconductor process equipment 10 comprising any one of the process chambers 100 provided by the embodiment of the present application. It should be noted that in the case that the lamp 120 is a violet light lamp and the process chamber 100 is a violet light microwave cavity, the semiconductor process equipment 10 can be a violet light curing device.

[0083] In some embodiments, the semiconductor process equipment 10 further comprises a cover 300, a connecting shaft 400 and a connecting shaft driving mechanism.

[0084] Referring to Figure 12 In some embodiments, the number of the process chambers 100 is two. The two process chambers 100 are arranged side by side in the cover 300, and the adjacent sides of the two process chambers 100 are respectively rotationally connected with the connecting shaft 400. The connecting shaft driving mechanism is drivingly connected with the connecting shaft 400 to drive the connecting shaft 400 to move in a first direction. Exemplarily, the first direction can be a vertical direction.

[0085] The side of one of the process chambers 100, which is away from the connecting shaft 400, is slidingly connected with the cover 300 in a second direction. The side of the other process chamber 100, which is away from the connecting shaft 400, is slidingly connected with the cover 300 in a third direction. The included angle between the second direction and the first direction is a first preset angle, and the included angle between the third direction and the first direction is a second preset angle. Exemplarily, the second direction can be a horizontal direction, and in the case that the first direction is a vertical direction, the included angle between the second direction and the first direction is 90 degrees. The third direction can be a horizontal direction, and in the case that the first direction is a vertical direction, the included angle between the third direction and the first direction is 90 degrees.

[0086] Referring to Figure 12 In the case that the first direction is a vertical direction and the second direction and the third direction are both horizontal directions, in the case that the connecting shaft 400 is raised, the two process chambers 100 can be respectively rotated relative to the connecting shaft 400, and the sides of the two process chambers 100, which are away from the connecting shaft 400, can be horizontally moved towards the connecting shaft 400. In this way, the irradiation angle of the process chambers 100 can be adjusted by driving the connecting shaft 400 to be raised and lowered.

[0087] Referring to Figure 12 And Figure 13 In some embodiments, the connecting shaft driving mechanism comprises a first rotating shaft 510. The first rotating shaft 510 is rotationally connected with the cover 300, and the first rotating shaft 510 is limited in the cover 300 along its own rotating shaft direction. The first rotating shaft 510 is threadedly connected with the connecting shaft 400 in the first direction. In this way, the connecting shaft 400 can be moved in the first direction by driving the first rotating shaft 510 to be rotated.

[0088] Referring to Figure 13 And Figure 14In some embodiments, the cover 300 comprises a third side plate 310 and a fourth side plate 320 which are arranged in a spaced manner. The third side plate 310 is parallel to the first side plate 111, and the third side plate 310 is provided with a first through hole 311, and the fourth side plate 320 is provided with a second through hole 321 which is opposite to the first through hole 311. The connection shaft driving mechanism further comprises a second rotating shaft 520, two first gears 530 and two second gears 540. The second rotating shaft 520 is arranged through the first through hole 311 and the second through hole 321. The number of the first rotating shaft 510 is two, and the two first rotating shafts 510 are respectively threadedly connected to the two ends of the connection shaft 400. The first gears 530 are arranged in a one-to-one correspondence on the first rotating shaft 510, and the two second gears 540 are arranged in a spaced manner on the second rotating shaft 520. The first gears 530 are in a one-to-one correspondence with the second gears 540. In this way, the first rotating shaft 510 can be driven to rotate by driving the second rotating shaft 520 to rotate, and the connection shaft 400 can be moved in the first direction.

[0089] Exemplarily, the connection shaft driving mechanism further comprises a rotating handle. The rotating handle can be connected with the second rotating shaft 520, so that the second rotating shaft 520 can be driven to rotate by operating the rotating handle. Exemplarily, the connection shaft driving mechanism further comprises a rotary driver 550. For example, the rotary driver 550 is a rotary motor, a pneumatic motor or a hydraulic motor. The rotary driver 550 can be drivingly connected with the second rotating shaft 520, so that the second rotating shaft 520 can be driven to rotate by using the rotary driver 550.

[0090] In some embodiments, the end of the connection shaft 400 which faces the cover 300 is provided with an elastic telescopic buckle. The cover 300 is provided with a seventh sliding groove which extends in the first direction. The elastic telescopic buckle can slide relative to the seventh sliding groove. The seventh sliding groove is provided with a plurality of clamping openings in the first direction in a spaced manner. The elastic telescopic buckle can selectively elastically abut against any one of the plurality of clamping openings. In this way, the process chamber 100 can be maintained at a target angle by the elastic telescopic buckle elastically abutting against the clamping opening.

[0091] Reference Figure 16 The cover 300 further comprises a bottom plate 330. The first rotating shaft 510 is rotationally connected to the bottom plate 330. Reference Figure 17 The semiconductor process equipment 10 further comprises a driving device 600 and a turntable 610. The driving device 600 is drivingly connected with the turntable 610, and the driving device 600 is used to drive the turntable 610 to rotate. The cover 300 is connected with the turntable 610, so that the cover 300 can rotate with the turntable 610.

[0092] The semiconductor processing equipment 10 further comprises a vacuum chamber 700. An opening is provided below the cover 300, and light emitted by the lamp 120 of the process chamber 100 can pass through the opening to the vacuum chamber 700. In addition, the semiconductor processing equipment 10 further comprises a heat dissipation device 800. Exemplarily, the heat dissipation device 800 can deliver an air flow to the cover 300, so that the process chamber 100 in the cover 300 can be air-cooled and heat-dissipated.

[0093] It is to be noted that the relational terms herein such as first and second and the like are used solely to distinguish one entity or action from another, without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0094] Although the embodiments of the present application have been shown and described, it is to be understood that for the purpose of the present application, the embodiments change, modify, replace, and vary in many ways without departing from the principles and spirit of the embodiments of the present application, and the scope of the embodiments of the present application is defined by the appended claims and their equivalents.

Claims

1. A process chamber (100), characterized in that, include: Cavity (110), lamp tube (120), first support (131) and second support (132); The cavity (110) includes a first side plate (111) and a second side plate (112) spaced apart. The first side plate (111) is provided with a first mounting hole (1111), and the second side plate (112) is provided with a second mounting hole opposite to the first mounting hole (1111). The first support (131) is detachably disposed in the first mounting hole (1111), and the second support (132) is detachably disposed in the second mounting hole. The two ends of the lamp tube (120) are respectively disposed in the first support (131) and the second support (132).

2. The process chamber (100) according to claim 1, characterized in that, The process chamber (100) further includes: a first snap-fit ​​connector (140) and a second snap-fit ​​connector (150); The first snap-fit ​​connector (140) is disposed on the first side plate (111), and the second snap-fit ​​connector (150) is disposed on the second side plate (112). The first snap-fit ​​connector (140) is used to snap the first support (131) into the first mounting hole (1111), and the second snap-fit ​​connector (150) is used to snap the second support (132) into the second mounting hole.

3. The process chamber (100) according to claim 2, characterized in that, The first snap-fit ​​connector (140) includes a first body (141) and a second body (142); The first body (141) and the second body (142) can approach each other so that the first snap-fit ​​device (140) switches to a snap-fit ​​state, wherein the first support (131) can be sandwiched between the first body (141) and the second body (142) that are close to each other. The second snap-fit ​​device (150) includes a third body and a fourth body; the third body and the fourth body can be brought close to each other to switch the second snap-fit ​​device (150) to a snap-fit ​​state, wherein the second support (132) can be clamped between the close-to-each third body and the fourth body.

4. The process chamber (100) according to claim 3, characterized in that, The first body (141) is provided with a first sliding groove (1411), the second body (142) is provided with a second sliding groove (1421), and the first side plate (111) is provided with a first sliding engagement part (143) and a second sliding engagement part (144). The first sliding engagement member (143) is embedded in the first sliding groove (1411), and the first body (141) can slide relative to the first sliding engagement member (143) to move closer to or away from the second body (142); the second sliding engagement member (144) is embedded in the second sliding groove (1421), and the second body (142) can slide relative to the second sliding engagement member (144) to move closer to or away from the first body (141); The third body is provided with a third sliding groove, the fourth body is provided with a fourth sliding groove, the second side plate (112) is provided with a third sliding fitting and a fourth sliding fitting, the third sliding fitting is embedded in the third sliding groove, the third body can slide relative to the third sliding fitting to move closer to or away from the fourth body, the fourth sliding fitting is embedded in the fourth sliding groove, the fourth body can slide relative to the fourth sliding fitting to move closer to or away from the third body.

5. The process chamber (100) according to claim 4, characterized in that, The first sliding engagement member (143) includes a first telescopic buckle (1431) and a first elastic member (1432). The first slide groove (1411) is provided with a first recess (1412). The second sliding engagement member (144) includes a second telescopic buckle and a second elastic member. The second slide groove (1421) is provided with a second recess (1422). When the first latch (140) is switched to the latching state, the first telescopic buckle (1431) abuts against the first recess (1412) under the action of the elastic force applied by the first elastic member (1432), and the second telescopic buckle abuts against the second recess (1422) under the action of the elastic force applied by the second elastic member. The third sliding engagement component includes a third telescopic buckle and a third elastic element. The third sliding groove has a third recess. The fourth sliding engagement component includes a fourth telescopic buckle and a fourth elastic element. The fourth sliding groove has a fourth recess. When the second latch is switched to the latching state, the third telescopic buckle abuts against the third recess under the elastic force applied by the third elastic element, and the fourth telescopic buckle abuts against the fourth recess under the elastic force applied by the fourth elastic element.

6. The process chamber (100) according to claim 3, characterized in that, The outer peripheral sidewall of the first support (131) is provided with a first groove (1311). When the first snap-fit ​​device (140) is switched to the snap-fit ​​state, both the first body (141) and the second body (142) are connected to the first groove (1311). The outer peripheral sidewall of the second support (132) is provided with a second groove (1321). When the second snap-fit ​​device (150) is switched to the snap-fit ​​state, both the third body and the fourth body are connected to the second groove (1321).

7. A lamp tube disassembly and assembly tool (200) for disassembling and assembling lamp tubes (120) in the process chamber (100) according to any one of claims 1 to 6, characterized in that, The lamp tube disassembly and assembly tool (200) is provided with a slide rail (210), the first support (131) is provided with a fifth slide groove (1312), and the second support (132) is provided with a sixth slide groove (1322). The first support (131) can pass through the fifth slide groove (1312) into the slide rail (210), and the second support (132) can pass through the sixth slide groove (1322) into the slide rail (210).

8. The lamp tube disassembly and assembly tool (200) according to claim 7, characterized in that, The lamp tube removal and installation tool (200) is also provided with a first abutting surface (220) and a second abutting surface (230) facing the same direction; the first abutting surface (220) is used to abut against the first support (131) passing through the slide rail (210), and the second abutting surface (230) is used to abut against the second support (132) passing through the slide rail (210), so that the distance between the first support (131) and the second support (132) matches the installation distance of the lamp tube (120).

9. A method for disassembling and assembling a lamp tube (120) based on the lamp tube disassembly and assembly tool (200) according to claim 7 or 8, characterized in that, The method for disassembling and assembling the lamp tube includes: During the installation of the lamp tube (120) into the cavity (110), the first support (131) is inserted through the slide rail (210), the second support (132) is inserted through the slide rail (210), and the lamp tube (120) is placed on the spaced-apart first support (131) and second support (132); the lamp tube removal and installation tool (200) with the lamp tube (120) is inserted through the first mounting hole (1111) and the second mounting hole; the first support (131) is detachably connected to the first mounting hole (1111), and the second support (132) is detachably connected to the second mounting hole; the lamp tube removal and installation tool (200) is then removed. During the process of removing the lamp tube (120) installed in the cavity (110), the lamp tube removal tool (200) is inserted into the first support (131) and the second support (132); the limiting connection between the first support (131) and the cavity (110) is released, and the limiting connection between the second support (132) and the cavity (110) is released; the lamp tube removal tool (200) together with the first support (131), the second support (132) and the lamp tube (120) are pulled out of the cavity (110).

10. A semiconductor process apparatus, characterized in that, Includes the process chamber (100) as described in any one of claims 1 to 6.

11. The semiconductor process equipment according to claim 10, characterized in that, The semiconductor process equipment also includes a housing (300), a connecting shaft (400), and a connecting shaft drive mechanism; The number of process chambers (100) is two, and the two process chambers (100) are arranged side by side in the cover (300). The adjacent side parts of the two process chambers (100) are respectively rotatably connected to the connecting shaft (400). The connecting shaft driving mechanism is drivenly connected to the connecting shaft (400) to drive the connecting shaft (400) to move along the first direction. One of the process chambers (100) is slidably connected to the cover (300) along a second direction on the side opposite to the connecting shaft (400), and the other process chamber (100) is slidably connected to the cover (300) along a third direction on the side opposite to the connecting shaft (400). The angle between the second direction and the first direction is a first preset angle, and the angle between the third direction and the first direction is a second preset angle.

12. The semiconductor process equipment according to claim 11, characterized in that, The connecting shaft drive mechanism includes a first rotating shaft (510), which is rotatably connected to the cover (300). The first rotating shaft (510) is confined to the cover (300) along its own rotation axis direction. The first rotating shaft (510) and the connecting shaft (400) are threadedly connected along the first direction.

13. The semiconductor process equipment according to claim 12, characterized in that, The cover (300) includes a third side plate (310) and a fourth side plate (320) spaced apart. The third side plate (310) is parallel to the first side plate (111). The third side plate (310) is provided with a first through hole (311). The fourth side plate (320) is provided with a second through hole (321) opposite to the first through hole (311). The connecting shaft drive mechanism further includes a second rotating shaft (520), two first gears (530) and two second gears (540), with the second rotating shaft (520) passing through the first through hole (311) and the second through hole (321); There are two first rotating shafts (510), and the two first rotating shafts (510) are respectively threaded to both ends of the connecting shaft (400). The first gears (530) are correspondingly arranged on the first rotating shafts (510), and the two second gears (540) are spaced apart on the second rotating shafts (520). The first gears (530) mesh with the second gears (540) correspondingly.

14. The semiconductor process equipment according to claim 11, characterized in that, The end of the connecting shaft (400) facing the cover (300) is provided with an elastic telescopic buckle. The cover (300) is provided with a seventh sliding groove extending along the first direction. The elastic telescopic buckle can slide relative to the seventh sliding groove. The seventh sliding groove is provided with a plurality of latches at intervals along the first direction. The elastic telescopic buckle can selectively elastically abut against any one of the plurality of latches.

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