Atomization gas pressure control device

Abstract

The invention relates to the technical field of ion source atomization gas pressure control, in particular to an atomization gas pressure control device which comprises an electric pressure regulating valve, a single-chip microcomputer controller is fixedly connected to the back face of the electric pressure regulating valve, and mounting mechanisms are arranged on the two sides of the top of the electric pressure regulating valve. And a groove body is formed in the middle of the top of the electric pressure regulating valve. According to the filtering mechanism, impurity filtering and automatic cleaning can be achieved, and the atomized gas quality and the equipment operation efficiency are guaranteed; the mounting mechanism simplifies the assembly and disassembly process of parts and improves the maintenance convenience, and the two parts act synergistically to provide a comprehensive and reliable solution, precise pressure regulation and control, efficient filtering and cleaning and convenient installation and maintenance for the ion source equipment, so that the ion source equipment has important value in practical application, is expected to be widely applied to related fields, and has wide application prospects. The development and application of the ion source equipment technology are promoted, the equipment fault and maintenance cost are reduced, and the production efficiency and quality are improved.

Description

Technical Field

[0001] The present application relates to the technical field of ion source atomizing gas pressure control, and in particular to an atomizing gas pressure control device. Background Art

[0002] Ion source atomizing gas pressure control refers to the operation of accurately adjusting the gas pressure used to atomize samples in the ion source system. The ion source is a key part of instruments such as mass spectrometry. Its function is to convert samples into gaseous ions. Atomizing gas plays a key role in this process. By controlling the atomizing gas pressure, the atomization effect of the sample can be adjusted. For example, in an electrospray ion source, a liquid sample is ejected from a nozzle, and the atomizing gas flows around the nozzle. Appropriate atomizing gas pressure can make the sample form tiny droplets of uniform size, which are easier to be ionized. If the pressure is not appropriate, the droplets are too large or too small, which will affect the ionization efficiency, and then affect the accuracy and sensitivity of the detection; At present, the working principle of the pressure regulating valve is consistent with the demand for atomizing gas pressure control. The pressure regulating valve can adjust the flow and pressure of the gas according to the set pressure value. Its internal structure usually includes valves, valve seats, valve cores and regulating devices. When the atomizing gas pressure needs to be adjusted, the opening between the valve core and the valve seat is changed by rotating the knob of the regulating valve or receiving an external control signal. If the pressure needs to be increased, the valve opening is reduced to increase the resistance of the gas in the pipeline, thereby increasing the pressure; conversely, if the pressure needs to be reduced, the valve opening is increased to allow the gas to pass more smoothly, and the pressure drops accordingly. This adjustment method can accurately control the pressure of the atomizing gas, so that the atomizing gas enters the ion source at a suitable pressure, meets the requirements of sample atomization, and ensures the efficiency and stability of the ionization process. The existing atomizing gas pressure regulation mostly uses a pressure regulating valve in combination with a pressure sensor to flexibly control the atomizing gas pressure; The existing pressure regulating valves have certain defects during the application period. As the use time increases, the atomized gas may contain impurities, oil or other particles. These substances will be deposited inside the pressure regulating valve, especially in the valve core, valve seat and other key parts of the valve. For example, when the atomized gas is obtained from an ordinary gas cylinder or a gas generator, the gas may carry a small amount of rust particles or peelings from the inner wall of the pipe. These impurities accumulate in the pressure regulating valve, which will affect the normal opening and closing of the valve and cause inaccurate pressure regulation. If the valve core is stuck by impurities, the valve may not be completely closed or opened, causing the atomized gas pressure to fluctuate or fail to reach the set value. A pressure regulating valve disclosed in the Chinese patent with the announcement number "CN216692333U" cleverly uses a filter screen in its design to effectively filter solid particles in the water, thereby achieving a significant effect of cleaning impurities in the water source, and further enhances the filtering function by setting an activated carbon filter plate, which can not only filter various impurities in the water, but also play a role in absorbing odors in the water, which undoubtedly greatly improves the practicality of the device and makes it show better performance in treating water quality; However, in the actual application process, the above device also exposed some problems that cannot be ignored. The device adopts the method of adding a filter screen for filtering protection, which can effectively filter out impurities, but as the filtering process continues, the filtered impurities will gradually adhere to the outer surface of the filter screen. As the use time continues, the filter screen will inevitably be gradually blocked by these impurities. The direct consequence is that the air flow rate inside the pipeline is gradually reduced, thereby affecting the operating efficiency of the entire system. In order to maintain the normal operation of the device, it is obviously necessary to frequently disassemble and clean the filter screen, which undoubtedly makes the overall use process more cumbersome and inconvenient; In addition, when disassembling and assembling the filter, the device needs to remove the flange first before performing subsequent disassembly and assembly operations. This design is relatively cumbersome in actual applications, which increases the complexity and difficulty of the operation. Especially when the device is applied to ion source equipment, the problem is more prominent. On the one hand, since the filter is easily clogged, it needs to be frequently disassembled and assembled for maintenance to ensure the normal operation of the equipment; on the other hand, its cumbersome disassembly and assembly method requires a lot of time and energy for each maintenance, which brings great inconvenience to the operator. In summary, the device has certain defects in the overall use process, so it is urgently needed to improve its design to better meet the needs of actual applications and improve the operating efficiency and ease of use of the equipment. Summary of the invention

[0003] In order to improve the maintenance convenience and anti-blocking capability of the existing atomizing gas pressure control device, the present application provides an atomizing gas pressure control device.

[0004] The present application provides an atomizing gas pressure control device, which adopts the following technical solution: comprising an electric pressure regulating valve, a single-chip microcomputer controller is fixedly connected to the back of the electric pressure regulating valve, mounting mechanisms are provided on both sides of the top of the electric pressure regulating valve, a slot body is provided in the middle of the top of the electric pressure regulating valve, a pressure sensor is inserted into the slot body, the pressure sensor is installed inside the slot body through the mounting mechanism, and filtering mechanisms are installed at both ends of the electric pressure regulating valve through the mounting mechanism; The mounting mechanism includes a mounting groove, an elastic component, a linkage component and a transmission component. The mounting groove is opened on both sides of the top of the electric pressure regulating valve, the elastic component is fixedly installed at both ends of the mounting groove, the transmission component is fixedly installed on the inner side of the elastic component, and the linkage component is movably installed on both sides of the top of the electric pressure regulating valve. The linkage component and the filtering mechanism are clamped, and the linkage component and the transmission component are transmission-connected.

[0005] Optionally, the elastic component includes a mounting shell, which is fixedly installed on both sides of the mounting groove, and a torsion spring is fixedly installed inside the mounting shell. A circular plate is fixedly installed at the inner end of the torsion spring, and the inner side of the circular plate is fixedly connected to both sides of the transmission component.

[0006] Optionally, a support rod is fixedly mounted on the outer side of the circular plate, the outer end of the support rod is rotatably connected to the inner side of the mounting shell, and the support rod is arranged on the inner side of the torsion spring.

[0007] Optionally, the linkage assembly includes a slide groove, which is opened on both front and rear ends of the top of the electric pressure regulating valve, and a slider is slidably connected to the inner side of the slide groove, and the top of the slider is fixedly connected to a limiting frame, and the middle part of the outer end of the limiting frame is fixedly connected to the linkage assembly.

[0008] Optionally, the linkage assembly also includes a card plate, which is fixedly connected to the front and rear ends of both sides of the pressure sensor, and a card slot is provided at the lower end of the card plate. A card block is fixedly connected to the side of the limit frame close to the pressure sensor, and the end of the card block is inserted into the inside of the card slot. The side shape of the card block is L-shaped.

[0009] Optionally, the transmission assembly includes a fixed block, a limit groove and a gear, the gear is fixedly connected to the inner side of the circular plate, the fixed block is fixedly installed in the middle part of the outer side of the limit frame, the bottom of the fixed block is fixedly connected with a rack, the rack and the gear are meshingly connected, the inner side of the rack is fixedly connected with a limit block, the limit groove is opened at the upper ends of both sides of the filtering mechanism, and the end of the limit block is inserted into the inside of the limit groove.

[0010] Optionally, a covering shell is fixedly mounted on both sides of the upper end of the electric pressure regulating valve, and the covering shell covers the outer side of the mounting mechanism.

[0011] Optionally, the filtering mechanism includes a square groove, which is opened on both sides of the top of the electric pressure regulating valve, and the bottom of the square groove extends to both ends of the electric pressure regulating valve, a base plate is inserted into the inside of the square groove, a filter mesh plate is fixedly connected to the lower end of the base plate, a sealing cover is fixedly installed on the top of the base plate, the limiting groove is opened on the outside of the sealing cover, and a cleaning component is movably installed on the outside of the filter mesh plate.

[0012] Optionally, the cleaning assembly includes a rotating shaft, which is rotatably connected to the middle part of the filter screen plate, and a wind wheel is fixedly mounted on the outer surface of the outer end of the rotating shaft. A brush plate is fixedly connected to the outer surface of the rotating shaft near one end of the filter screen plate at equal intervals, and the inner side of the brush plate is fit-fittingly connected to the filter screen plate.

[0013] Optionally, a receiving frame is fixedly mounted on the bottom of the filter screen plate, a mounting flange is fixedly connected to the outer end of the electric pressure regulating valve, and countersunk mounting holes are provided at equal intervals on the outer side of the mounting flange.

[0014] In summary, this application includes the following beneficial technical effects: 1. The device is provided with a filtering mechanism, so that during use, it can be connected to the ion source gas delivery pipeline through the mounting flange and other components. The pressure sensor detects the gas pressure and transmits the data to the ion source device through the single-chip controller, so as to facilitate the control of the atomized gas pressure. The atomized gas circulates after being filtered by the filter screen at the bottom of the substrate. Its flow drives the wind wheel to drive the rotating shaft and the brush plate to rotate. The brush plate is attached to the filter screen for automatic cleaning, so that impurities fall into the receiving frame, avoiding clogging of the filter screen, reducing the frequency of disassembly and cleaning, improving the convenience of use, and ensuring the stable operation of the ion source equipment and the purity of the atomized gas; 2. The installation mechanism brings convenience to the maintenance and repair of the device. When removing the pressure sensor, adjust the limit frame to move outward, squeeze the slider to make the rack drive the gear to rotate, tighten the torsion spring, and remove the block from the slot. When installing, loosen the limit frame after inserting the pressure sensor, and reset the torsion spring to make the block and the slot engage and limit. Similarly, when disassembling the filter screen, adjust the limit frame to make the fixed block drive the limit block to separate or engage with the limit slot, which is convenient for cleaning and installation. The support rod supports the torsion spring and the round plate to improve the installation stability, making the entire disassembly and assembly process simple and efficient, ensuring the reliable operation of the device; 3. The overall design of the device has obvious advantages. The filtering mechanism realizes impurity filtering and automatic cleaning, ensuring the quality of atomized gas and the operating efficiency of the equipment. The installation mechanism simplifies the process of component disassembly and assembly, and improves the convenience of maintenance. The two work together to provide a comprehensive and reliable solution for ion source equipment. Precise pressure control, efficient filtering and cleaning, and convenient installation and maintenance make it of great value in practical applications. It is expected to be widely used in related fields, promote the development and application of ion source equipment technology, reduce equipment failures and maintenance costs, and improve production efficiency and quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure in the embodiment of the present application; Figure 2 It is a schematic diagram of the rear view structure in the embodiment of the present application; Figure 3 It is a schematic diagram of a top view structure in an embodiment of the present application; Figure 4 This is a schematic diagram of the structure of the pressure sensor in the disassembled state in the embodiment of the present application; Figure 5 This is a schematic diagram of the structure of the filter mechanism in the disassembled state in the embodiment of the present application; Figure 6 This is a schematic diagram of the structure of the filtering mechanism in the embodiment of the present application; Figure 7 This is a schematic diagram of the top view of the installation mechanism in the embodiment of the present application; Figure 8 It is a schematic diagram of the bottom view structure of the installation mechanism in the embodiment of the present application.

[0016] 1. Electric pressure regulating valve; 2. Single chip microcomputer controller; 3. Filter mechanism; 31. Square groove; 32. Base plate; 33. Filter screen; 34. Sealing cover; 35. Cleaning assembly; 351. Rotating shaft; 352. Wind wheel; 353. Brush plate; 354. Receiving frame; 4. Slot body; 5. Pressure sensor; 6. Mounting mechanism; 61. Mounting groove; 62. Elastic assembly; 621. Mounting shell; 622. Torsion spring; 623. Circular plate; 624. Support rod; 63. Linkage assembly; 631. Slide groove; 632. Slider; 633. Limiting frame; 634. Card plate; 635. Card groove; 636. Card block; 64. Transmission assembly; 641. Fixed block; 642. Limiting groove; 643. Gear; 644. Rack; 645. Limiting block; 7. Covering shell; 8. Mounting flange; 9. Countersunk mounting hole. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-8 This application is described in further detail.

[0018] The present application discloses an atomizing gas pressure control device. Figure 1-8 As shown, it includes an electric pressure regulating valve 1, a single-chip controller 2 is fixedly connected to the back of the electric pressure regulating valve 1, mounting mechanisms 6 are provided on both sides of the top of the electric pressure regulating valve 1, a slot body 4 is provided in the middle of the top of the electric pressure regulating valve 1, a pressure sensor 5 is inserted in the slot body 4, the pressure sensor 5 is installed inside the slot body 4 through the mounting mechanism 6, and filtering mechanisms 3 are installed at both ends of the electric pressure regulating valve 1 through the mounting mechanism 6;

[0019] The mounting mechanism 6 comprises a mounting groove 61, an elastic component 62, a linkage component 63 and a transmission component 64. The mounting groove 61 is provided on both sides of the top of the electric pressure regulating valve 1. The elastic component 62 is fixedly mounted at both ends of the mounting groove 61. The transmission component 64 is fixedly mounted on the inner side of the elastic component 62. The linkage component 63 is movably mounted on both sides of the top of the electric pressure regulating valve 1. The linkage component 63 is clamped with the filter mechanism 3. The linkage component 63 and the transmission component 64 are in transmission connection. The electric pressure regulating valve 1 is connected with the single chip controller 2, which can realize accurate pressure regulation control and facilitate data processing and operation. The setting of the mounting mechanism 6 has many functions. The mounting groove 61 provides a mounting space for each component. The elastic component 62 at both ends of the installation groove 61 can provide a certain elastic buffer and reset function. The transmission component 64 cooperates with the elastic component 62 to realize power transmission and motion drive of related components. The linkage component 63 is movably installed on both sides of the top and is clamped with the filter mechanism 3 and connected to the transmission component 64, making the installation and disassembly of the filter mechanism 3 more convenient, and facilitating the maintenance, replacement or cleaning of the filter mechanism 3. At the same time, this structural design also helps to improve the overall assembly efficiency and flexibility of the device. In actual use, the components can be quickly installed and adjusted as needed to ensure the stable operation of the device and the accuracy and reliability of the atomization gas pressure control.

[0020] Please refer to Figure 1-Figure 5 and Figure 7-Figure 8The elastic component 62 includes a mounting shell 621, which is fixedly mounted on both sides of the mounting groove 61. A torsion spring 622 is fixedly mounted inside the mounting shell 621. A circular plate 623 is fixedly mounted on the inner end of the torsion spring 622. The inner side of the circular plate 623 is fixedly connected to both sides of the transmission component 64. A support rod 624 is fixedly mounted on the outer side of the circular plate 623. The outer end of the support rod 624 is rotatably connected to the inner side of the mounting shell 621. The support rod 624 is arranged on the inner side of the torsion spring 622. The mounting shell 621 provides a stable mounting position for the torsion spring 622 and the circular plate 623 to ensure their fixation in the device. The setting of the torsion spring 622 can store and release elastic potential energy. When the device performs relevant operations, the torsion spring 622 can provide a certain restoring force or driving force through elastic deformation. The circular plate 623 is connected to the transmission component 64. In order to transmit the force of the torsion spring 622 to the transmission component 64, the power transmission and conversion are realized. The support rod 624 is located on the inner side of the torsion spring 622 and is connected to the inner side of the circular plate 623 and the mounting shell 621. On the one hand, it supports and stabilizes the circular plate 623, ensures the stability of the circular plate 623 during rotation, and prevents it from shaking or shifting, thereby ensuring that the force of the torsion spring 622 can be accurately and effectively transmitted to the transmission component 64; on the other hand, the rotational connection between the support rod 624 and the inner side of the mounting shell 621 enables the support rod 624 to flexibly rotate with the rotation of the circular plate 623 during the working process of the torsion spring 622, thereby reducing friction resistance, improving the working efficiency and service life of the entire elastic component 62, and thereby ensuring the stability and reliability of the entire device in operations related to elastic recovery and power transmission.

[0021] Please refer to Figure 1-Figure 5The linkage assembly 63 includes a slide groove 631, which is opened at both front and rear ends of the top of the electric pressure regulating valve 1. A slider 632 is slidably connected to the inner side of the slide groove 631. The top of the slider 632 is fixedly connected to a limit frame 633. The middle part of the outer end of the limit frame 633 is fixedly connected to the linkage assembly 63. The linkage assembly 63 also includes a card plate 634, which is fixedly connected to the front and rear ends of both sides of the pressure sensor 5. A card groove 635 is opened at the lower end of the card plate 634. A card block 636 is fixedly connected to the side of the limit frame 633 close to the pressure sensor 5. The end of the card block 636 is inserted into the inside of the card groove 635. The side shape of the card block 636 is L-shaped. The opening position of the slide groove 631 and the sliding connection method with the slider 632 provide a stable moving track and direction for the limit frame 633, so that the limit frame 6 33 can accurately adjust the position, the fixed connection between the slider 632 and the limit frame 633 ensures the consistency of the movement of the two, the fixed connection between the clamping plate 634 and the pressure sensor 5 and the setting of the clamping slot 635, together with the insertion of the L-shaped clamping block 636 on the limit frame 633, form a reliable connection structure, which can effectively fix the pressure sensor 5 to prevent it from displacement or loosening during operation, thereby ensuring the accuracy and stability of pressure detection. When the pressure sensor 5 needs to be disassembled and assembled, the limit frame 633 is driven to move by the sliding of the slider 632 in the slide groove 631, so that the separation or combination of the clamping block 636 and the clamping slot 635 is simple and quick, thereby improving the maintenance efficiency and operability of the device and reducing the maintenance cost and time. This design improves the performance and reliability of the atomizing gas pressure control device as a whole.

[0022] Please refer to Figure 7-Figure 8The transmission assembly 64 includes a fixed block 641, a limiting groove 642 and a gear 643. The gear 643 is fixedly connected to the inner side of the circular plate 623. The fixed block 641 is fixedly installed in the middle of the outer side of the limiting frame 633. A rack 644 is fixedly connected to the bottom of the fixed block 641. The rack 644 and the gear 643 are meshed and connected. The inner side of the rack 644 is fixedly connected to the limiting block 645. The limiting groove 642 is opened at the upper ends of both sides of the filtering mechanism 3. The end of the limiting block 645 is inserted into the inner side of the limiting groove 642. The upper ends of the electric pressure regulating valve 1 are fixedly installed with a covering shell 7 on both sides. The covering shell 7 covers the outer side of the mounting mechanism 6. The gear 643 is fixedly connected to the inner side of the circular plate 623 and can transmit the rotational motion of the circular plate 623. The fixed block 641 is fixed in the middle of the outer side of the limiting frame 633, and the rack 644 at its bottom is meshed with the gear 643, so that when the limiting frame When 633 moves, the rack 644 can drive the gear 643 to rotate to realize the transmission and conversion of motion. The limit block 645 on the inner side of the rack 644 cooperates with the limit groove 642 on the upper ends of both sides of the filter mechanism 3. When the limit block 645 is inserted into the limit groove 642, the filter mechanism 3 can be accurately positioned and fixed to ensure the stability of the filter mechanism 3 during operation. The covering shell 7 on both sides of the upper end of the electric pressure regulating valve 1 covers the outside of the installation mechanism 6 to protect the internal transmission component 64 and other structures to prevent external factors from interfering with and damaging them. At the same time, it also makes the overall structure of the device more compact and regular, which is beneficial to the overall operation and maintenance of the device, and improves the reliability and service life of the device. In addition, this design enables convenient and accurate operation to be achieved through the synergistic effect of the transmission component 64 and other components when installing and disassembling the filter mechanism 3.

[0023] Please refer to Figure 5-Figure 6The filter mechanism 3 includes a square groove 31, which is opened on both sides of the top of the electric pressure regulating valve 1, and the bottom of the square groove 31 extends to the two ends of the electric pressure regulating valve 1. A base plate 32 is inserted into the square groove 31, and a filter screen plate 33 is fixedly connected to the lower end of the base plate 32. A sealing cover 34 is fixedly installed on the top of the base plate 32. The limiting groove 642 is opened on the outside of the sealing cover 34. A cleaning component 35 is movably installed on the outside of the filter screen plate 33. The cleaning component 35 includes a rotating shaft 351, which is rotatably connected to the middle of the filter screen plate 33. A wind wheel 352 is fixedly installed on the outer surface of the outer end of the rotating shaft 351. A brush plate 353 is fixedly connected to the outer surface of the rotating shaft 351 near one end of the filter screen plate 33 at equal intervals. The inner side of the brush plate 353 is fitted and connected to the filter screen plate 33. A receiving frame 354 is fixedly installed on the bottom of the filter screen plate 33. The outer end of the electric pressure regulating valve 1 is fixedly connected to a mounting flange 8, and the outer side of the mounting flange 8 is provided with countersunk mounting holes 9 at equal intervals. The design of the square groove 31 provides space for the insertion of the substrate 32. The filter screen plate 33 at the lower end of the substrate 32 can filter the gas. The sealing cover 34 at the top of the substrate 32 cooperates with the square groove 31 to ensure the sealing of the structure. The limit groove 642 cooperates with the transmission component 64 to fix and position the filter mechanism 3. The rotating shaft 351 in the cleaning component 35 is rotatably connected to the middle part of the filter screen plate 33. The wind wheel 352 at the outer end can use the gas flow to drive the rotating shaft 351 to rotate, so that the brush plate 353 automatically cleans the filter screen plate 33 to avoid impurities accumulating and clogging the filter screen plate 33, thereby improving the filtering efficiency and service life. The receiving frame 354 is used to collect the cleaned impurities for subsequent processing. The mounting flange 8 and the countersunk mounting hole 9 at the outer end of the electric pressure regulating valve 1 are convenient for connection with other equipment, so that the entire filter mechanism 3 can be stably integrated into the system, and effective filtering and pressure control related operations of the atomized gas are realized, thereby ensuring the normal operation of the device and the gas treatment effect.

[0024] The implementation principle of an atomizing gas pressure control device in an embodiment of the present application is as follows: in the design of the device, by setting a filtering mechanism 3, during use, through the clever cooperation of the mounting flange 8, the countersunk mounting hole 9 and the bolts, the pressure regulating valve can be firmly connected to the ion source gas delivery pipeline, ensuring the close connection between the device and the pipeline and the stability of gas transmission. At this time, the pressure sensor 5 plays a key role. It detects the gas pressure in the pipeline in real time and accurately transmits these data to the ion source device through the single-chip controller 2. When the atomizing gas pressure needs to be controlled, the operator only needs to conveniently control the single-chip controller 2 to achieve accurate control of the electronic pressure regulating valve, thereby accurately regulating the atomizing gas pressure in the ion source device pipeline, providing an efficient and convenient way to adjust the atomizing gas pressure; During the gas transmission process, when the atomized gas passes through the filter screen plate 33 at the bottom of the base plate 32, the filter screen plate 33 will filter it and intercept impurities, so that the pure atomized gas can flow and circulate smoothly inside the pipeline. However, as the use time goes by, the impurities filtered out by the filter screen plate 33 will adhere to its surface. However, the innovation of this device is that when the atomized gas flows in the pipeline, it will generate power to drive the wind wheel 352 to rotate, and the wind wheel 352 drives the rotating shaft 351 to rotate together, thereby causing the brush plate 353 connected to the rotating shaft 351 to rotate around the rotating shaft 351. The brush plate 353 is tightly connected to the outer surface of the filter screen plate 33, so the brush plate 353 can continuously brush and clean the filter screen plate 33 during the rotation process, and the impurities brushed off will naturally fall into the receiving frame 354 at the bottom. This automatic cleaning design mechanism enables the device to effectively avoid the filter screen from being blocked due to the accumulation of impurities during use, greatly reduces the frequency of disassembly and cleaning of the filter screen, significantly improves the convenience of using the device, and provides a strong guarantee for the stable operation and efficient work of the ion source equipment; When the pressure sensor 5 needs to be disassembled and repaired, the device can be realized through simple operations. Specifically, the limit frame 633 is adjusted to move outward. At this time, the limit frame 633 will squeeze and push the slider 632 to move outward together. As the slider 632 moves outward, the limit frame 633 drives the rack 644 at the bottom of the fixed block 641 to move outward. The outward movement of the rack 644 drives the gear 643 to rotate, and then the circular plate 623 drives the torsion spring 622 to tighten, so that the torsion spring 622 is in a compressed state. Under this series of chain reactions, as the fixed block 641 moves outward, the block 636 on the limit frame 633 will be separated from the slot 635. When the block 636 and the slot 635 are separated from each other, the pressure sensor 5 can be easily removed. When installing the pressure sensor 5, the operation is also simple. First, adjust the limit frame 633 to separate it, and then insert the pressure sensor 5 into the groove body 4. In order to ensure the sealing effect, a sealing gasket can be set on the pressure sensor 5. When the pressure sensor 5 is inserted into the groove body 4, the sealing gasket can effectively seal it. At this time, loosen the limit frame 633, the torsion spring 622 will quickly reset, and push the gear 643 to rotate. The gear 643 drives the rack 644 to drive the fixed block 641 to move toward the limit groove 642, so that the clamping block 636 on the limit frame 633 and the clamping groove 635 are mutually clamped and limited, thereby completing the installation of the pressure sensor 5. Similarly, during the disassembly and assembly of the filter screen plate 33 and related components, when adjusting the limit frame 633, the fixed block 641 can drive the limit block 645 to disengage from the limit groove 642. When the limit block 645 and the limit groove 642 are separated from each other, the sealing plate and the base plate 32 at the bottom thereof can be smoothly pulled out from the inside of the square groove 31. At this time, the filter screen plate 33 and the receiving frame 354 can be conveniently cleaned. If installation is required, only the base plate 32 needs to be inserted into the inside of the square groove 31. The torsion spring 622 resets to drive the gear 643 to drive the rack 644 to push the fixed block 641 ...5 to drive the sealing plate 33 and the base plate 32 at the bottom thereof. The fixing block 641 drives the limiting block 645 to be inserted into the inner side of the limiting groove 642. The sealing cover 34 can be clamped and installed through the mutual limiting action of the limiting block 645 and the limiting groove 642, thereby completing the installation of the filter mechanism 3. During the entire use process, the setting of the support rod 624 plays an important supporting role. It can stably structure the torsion spring 622 and the circular plate 623, improve the installation stability of the device during the overall use, provide a solid foundation for the reliable operation of the device, and greatly facilitate the use and maintenance of the device. In general, the device achieves precise control of the ion source atomization gas pressure and convenient maintenance of the equipment through the cleverly designed filtering mechanism 3 and mounting mechanism 6. The filtering mechanism 3 can not only effectively filter impurities in the atomized gas to ensure the purity of the gas, but also greatly reduces the frequent disassembly and cleaning problems caused by filter blockage through innovative automatic cleaning design, thereby improving the continuous operation efficiency and ease of use of the equipment. The mounting mechanism 6 makes the disassembly and maintenance of key components such as the pressure sensor 5 and the filter plate 33 easy and quick through a simple and efficient mechanical structure design, while ensuring the stability and sealing of the installation. This overall design concept fully considers the various needs and possible problems of the ion source equipment in actual applications, and provides a comprehensive and reliable solution for the stable operation, efficient maintenance and convenient use of the ion source equipment. It has important practical application value and significance, and is expected to be widely used and promoted in related fields.

[0025] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An atomizing gas pressure control device, comprising an electric pressure regulating valve (1), characterized in that: The back of the electric pressure regulating valve (1) is fixedly connected to a single-chip controller (2); mounting mechanisms (6) are provided on both sides of the top of the electric pressure regulating valve (1); a slot (4) is provided in the middle of the top of the electric pressure regulating valve (1); a pressure sensor (5) is inserted into the slot (4); the pressure sensor (5) is installed inside the slot (4) via the mounting mechanism (6); and filtering mechanisms (3) are installed at both ends of the electric pressure regulating valve (1) via the mounting mechanism (6); The mounting mechanism (6) comprises a mounting groove (61), an elastic component (62), a linkage component (63) and a transmission component (64); the mounting groove (61) is provided at two sides of the top of the electric pressure regulating valve (1); the elastic component (62) is fixedly mounted at two ends of the mounting groove (61); the transmission component (64) is fixedly mounted on the inner side of the elastic component (62); the linkage component (63) is movably mounted at two sides of the top of the electric pressure regulating valve (1); the linkage component (63) and the filter mechanism (3) are snap-connected; and the linkage component (63) and the transmission component (64) are transmission-connected.

2. The atomizing gas pressure control device according to claim 1, characterized in that: The elastic component (62) comprises a mounting shell (621), the mounting shell (621) being fixedly mounted on two sides of the mounting groove (61), a torsion spring (622) being fixedly mounted inside the mounting shell (621), a circular plate (623) being fixedly mounted on the inner end of the torsion spring (622), and the inner side of the circular plate (623) being fixedly connected to two sides of the transmission component (64).

3. The atomizing gas pressure control device according to claim 2, characterized in that: A support rod (624) is fixedly mounted on the outer side of the circular plate (623); the outer end of the support rod (624) is rotatably connected to the inner side of the mounting shell (621); and the support rod (624) is arranged on the inner side of the torsion spring (622).

4. The atomizing gas pressure control device according to claim 3, characterized in that: The linkage assembly (63) comprises a slide groove (631), the slide groove (631) being provided at both front and rear ends of the top of the electric pressure regulating valve (1), a slider (632) being slidably connected inside the slide groove (631), the top of the slider (632) being fixedly connected to a limiting frame (633), and the middle part of the outer end of the limiting frame (633) being fixedly connected to the linkage assembly (63).

5. The atomizing gas pressure control device according to claim 4, characterized in that: The linkage assembly (63) further comprises a card plate (634), wherein the card plate (634) is fixedly connected to both front and rear ends of the pressure sensor (5), a card slot (635) is provided at the lower end of the card plate (634), a card block (636) is fixedly connected to a side of the limit frame (633) close to the pressure sensor (5), an end of the card block (636) is inserted into the inside of the card slot (635), and the side surface of the card block (636) is L-shaped.

6. The atomizing gas pressure control device according to claim 5, characterized in that: The transmission assembly (64) comprises a fixed block (641), a limiting groove (642) and a gear (643); the gear (643) is fixedly connected to the inner side of the circular plate (623); the fixed block (641) is fixedly installed at the middle part of the outer side of the limiting frame (633); a rack (644) is fixedly connected to the bottom of the fixed block (641); the rack (644) and the gear (643) are meshingly connected; the inner side of the rack (644) is fixedly connected to a limiting block (645); the limiting groove (642) is opened at the upper ends of both sides of the filtering mechanism (3); and the ends of the limiting block (645) are inserted into the inside of the limiting groove (642).

7. The atomizing gas pressure control device according to claim 6, characterized in that: A covering shell (7) is fixedly mounted on both sides of the upper end of the electric pressure regulating valve (1), and the covering shell (7) covers the outside of the mounting mechanism (6).

8. The atomizing gas pressure control device according to claim 6, characterized in that: The filtering mechanism (3) comprises a square groove (31), the square groove (31) being formed on both sides of the top of the electric pressure regulating valve (1), the bottom of the square groove (31) extending to both ends of the electric pressure regulating valve (1), a base plate (32) being inserted into the interior of the square groove (31), a filter screen plate (33) being fixedly connected to the lower end of the base plate (32), a sealing cover (34) being fixedly mounted on the top of the base plate (32), the limiting groove (642) being formed on the outer side of the sealing cover (34), and a cleaning assembly (35) being movably mounted on the outer side of the filter screen plate (33).

9. The atomizing gas pressure control device according to claim 8, characterized in that: The cleaning assembly (35) comprises a rotating shaft (351), the rotating shaft (351) being rotatably connected to the middle part of the filter screen plate (33), a wind wheel (352) being fixedly mounted on the outer surface of the outer end of the rotating shaft (351), a brush plate (353) being fixedly connected at equal intervals to the outer surface of one end of the rotating shaft (351) close to the filter screen plate (33), and the inner side of the brush plate (353) being in close contact with the filter screen plate (33).

10. The atomizing gas pressure control device according to claim 9, characterized in that: A receiving frame (354) is fixedly mounted on the bottom of the filter screen plate (33), a mounting flange (8) is fixedly connected to the outer end of the electric pressure regulating valve (1), and countersunk mounting holes (9) are provided at equal intervals on the outer side of the mounting flange (8).

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