Scanning device and use method thereof

Abstract

The invention relates to a scanning device and a using method thereof, the scanning device comprises a first reflector, a second reflector, a galvanometer, a field lens, a sleeve piece, a first adjusting piece and a second adjusting piece, laser can sequentially pass through the first reflector, the second reflector, the galvanometer and the field lens, the sleeve piece is used for being connected to the galvanometer, and the sleeve piece is provided with a penetrating channel; the penetrating channel is used for emitting laser transmitted by the galvanometer; the first adjusting piece is connected to the sleeve piece, the first adjusting piece is provided with a first through hole communicated with the penetrating channel, a cross-shaped partition plate is arranged on the hole wall of the through hole, and the angle of the first reflecting mirror is adjusted so that the cross-shaped partition plate can divide the laser passing through the first through hole into four uniform parts; the second adjusting piece can be connected to the sleeve piece, the second adjusting piece is provided with a second through hole communicated with the penetrating channel, and the second reflecting mirror is configured to adjust the angle after the cross-shaped partition plate divides the laser into four uniform parts, so that the incident light and the reflected light of the laser passing through the second through hole coincide.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic cell processing, and in particular to a scanning device and a method for using the same. Background Art

[0002] In the application of laser grooving of photovoltaic cells, a two-dimensional galvanometer scanning system is often used to process silicon wafers. Among them, the two-dimensional scanning galvanometer (Scan head, hereinafter referred to as "galvanometer") is composed of an XY optical scanning head, an electronic drive amplifier and an optical reflective lens. The signal provided by the computer controller drives the optical scanning head through the drive amplifier circuit, thereby controlling the deflection of the laser beam in the XY plane. The f-θ flat field scanning lens (objective lens, hereinafter referred to as "field lens") focuses the collimated laser beam on a point. When the direction of the incident laser beam changes, the field lens can still maintain a spot with a constant relative size and energy density, so that the laser beam can process points at different material positions.

[0003] The high-order optical aberrations of the field lens mainly include coma, field curvature, astigmatism, distortion, etc. The existing method usually involves repeatedly correcting the galvanometer mirror so that the light emitted by the galvanometer mirror can pass through the center of the field lens, thereby controlling the field curvature and distortion of the field lens. However, this method does not limit optical aberrations such as coma and astigmatism. Summary of the invention

[0004] Based on this, it is necessary to provide a scanning device and a method of using the same to address the problems of coma and astigmatism generated during the processing.

[0005] A scanning device The scanning device comprises:

[0006] A first reflecting mirror, a second reflecting mirror, a galvanometer mirror and a field mirror, and the laser can sequentially pass through the first reflecting mirror, the second reflecting mirror, the galvanometer mirror and the field mirror;

[0007] A sleeve member, which can be connected to the galvanometer, and the sleeve member has a penetration channel, and the penetration channel is used for emitting laser light transmitted by the galvanometer;

[0008] A first adjustment member connected to the sleeve member, the first adjustment member having a first through hole communicating with the through passage, a cross partition plate being arranged on the hole wall of the through hole, and adjusting the angle of the first reflector so that the cross partition plate divides the laser light passing through the first through hole into four equal parts;

[0009] The second adjustment member can be connected to the sleeve member, and the second adjustment member has a second through hole connected to the penetration channel. The second reflector is configured to adjust the angle after the cross dividing plate divides the laser into four uniform parts so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other.

[0010] In the scanning device, when it is necessary to adjust the laser collimation, the connection between the galvanometer and the field lens is first disassembled, and then the sleeve is connected to the galvanometer, while ensuring that the laser transmitted by the galvanometer can be emitted through the penetration channel, and then the first adjustment member is connected to the sleeve, and it is ensured that the first through hole of the first adjustment member is connected to the penetration channel, and by adjusting the first reflector, the laser passing through the sleeve is evenly divided by the cross partition plate, so that the laser emitted through the galvanometer can pass through the center of the field lens, thereby controlling the field curvature and distortion aberration of the subsequent field lens; then the first adjustment member is removed, and the second adjustment member is connected to the sleeve The second adjusting member is used to ensure that the second through hole of the second adjusting member is connected to the through channel, and the second reflector is adjusted to make the incident light and the reflected light of the laser passing through the second through hole coincide with each other. According to the principle of spatial geometry, "through a point outside the plane, a vertical line is drawn to the plane, and there is only one vertical line", that is, when the incident light and the reflected light of the laser passing through the second through hole coincide with each other, it can be determined that the laser passes through the center of the second adjusting member vertically, which ensures that when the galvanometer and the field lens are connected, the laser emitted through the galvanometer can pass through the center of the field lens vertically, thereby controlling the coma and astigmatism of the field lens. The scanning device of the present application uses the sleeve member, the first adjusting member and the second adjusting member to adjust the collimation of the laser emitted by the galvanometer, so that it can not only pass through the center of the field lens, but also pass through the center of the field lens vertically, thereby controlling the field curvature, distortion, coma and astigmatism.

[0011] In one of the embodiments, it also includes photosensitive paper, which is used to be installed on a processing platform where the laser is injected. The laser passing through the first through hole can be injected into the photosensitive paper and appear on the photosensitive paper.

[0012] In one embodiment, the penetration channel includes a first connecting hole and a second connecting hole that are connected to each other, the first adjusting member is connected to the hole wall of the first connecting hole or the hole wall of the second connecting hole, and the second adjusting member can be connected to the hole wall of the first connecting hole or the hole wall of the second connecting hole.

[0013] In one embodiment, the sleeve member includes a first ring, a second ring and a connecting plate connecting the first ring and the second ring, the first ring is used to be connected to the galvanometer, the first ring is arranged to form the first connecting hole, and the second ring is provided with the second connecting hole.

[0014] In one of the embodiments, a filling piece is disposed in the cavity formed by the second ring, the filling piece is provided with the second connecting hole, and the axial direction of the filling piece coincides with the axial direction of the first ring.

[0015] In one embodiment, the first adjustment member includes a first body and an annular member connected to each other, the first body is provided with a first through hole, the first through hole is connected with the annular member to form the first through hole, and a thread is provided on the outer peripheral surface of the first body to be threadedly connected to the hole wall of the through channel.

[0016] In one embodiment, the second adjustment member includes a second body and a cover plate connected to each other, the second body is provided with a second through hole, the cover plate is provided with a third through hole, the third through hole is connected to the second through hole to form the second through hole, and the outer peripheral surface of the second body is provided with a thread to be threadedly connected to the hole wall of the through channel.

[0017] The present application also provides a method for using the scanning device as described in any one of the above items, and the method for using the scanning device includes:

[0018] Disassemble the connection between the galvanometer and the field mirror, and connect the sleeve member to the galvanometer;

[0019] Connecting the first adjustment member to the sleeve member, turning on the laser, and adjusting the angle of the first reflector so that the laser passing through the sleeve member is evenly divided by the cross partition plate;

[0020] The first adjustment member is removed, and the second adjustment member is connected to the sleeve member, and the angle of the second reflector is adjusted so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other;

[0021] The sleeve member and the first adjusting member are removed, and the field lens is connected to the galvanometer, and then processed.

[0022] In one of the embodiments, before disassembling the connection between the galvanometer and the field lens, first determine whether the galvanometer and the processing platform are parallel. If they are parallel, proceed to the next step. If they are not parallel, adjust the relative position of the galvanometer and the processing platform until they are parallel before proceeding to the next step.

[0023] In one of the embodiments, if the galvanometer and the processing platform are not parallel, the clamping mechanism of the galvanometer is adjusted or the processing platform is adjusted to make the two relatively parallel.

[0024] In one embodiment, if it is impossible to determine whether the galvanometer and the processing platform are parallel, the following steps are performed to determine:

[0025] Install the first adjustment member in the first connecting hole of the sleeve member, and adjust the first reflector so that the laser passes through the center point of the first connecting hole;

[0026] Install the second adjustment member in the second connection hole of the sleeve member, and adjust the second reflector so that the laser passes through the center point of the second connection hole;

[0027] After repeated adjustments, the laser passes through the center of the first connection hole and the second connection hole at the same time;

[0028] It is determined whether the incident light and the reflected light of the laser passing through the second through hole coincide with each other. If so, it is determined that the galvanometer is parallel to the processing platform; if not, it is determined that the galvanometer is not parallel to the processing platform.

[0029] In one of the embodiments, before adjusting the second reflector, a third reflector is installed on the processing platform;

[0030] Then, the laser is turned on, the second reflector is adjusted, and the incident light and the reflected light of the laser passing through the second through hole are observed through the third reflector to see whether they coincide.

[0031] In one embodiment, if the initial state deviation is large, the laser reflection point may not be on the second adjustment member, and the reflection point is found by shaking the laser third reflection mirror.

[0032] In one of the embodiments, the galvanometer correction is performed before processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic diagram of the structure of the scanning device provided in this application.

[0034] Figure 2 This is a schematic diagram of the structure of the sleeve member provided in this application.

[0035] Figure 3 This is a schematic diagram of the first viewing angle structure of the first adjustment member provided in this application.

[0036] Figure 4 This is a schematic diagram of the second viewing angle structure of the first adjustment member provided in this application.

[0037] Figure 5 This is a schematic diagram of the structure of the laser distribution on the photosensitive paper provided in this application.

[0038] Figure 6 This is a schematic diagram of the first viewing angle structure of the second adjustment member provided in this application.

[0039] Figure 7 This is a schematic diagram of the second viewing angle structure of the second adjustment member provided in this application.

[0040] Figure 8 This is a structural schematic diagram of the relative positions of the second adjustment member and the third reflector provided in the present application.

[0041] In the figure:

[0042] 100, first reflector; 200, second reflector; 300, galvanometer; 400, processing platform;

[0043] 500, sleeve member; 510, first ring; 511, first connecting hole; 520, second ring; 521, filling member; 522, second connecting hole; 530, connecting plate;

[0044] 600, first adjustment member; 610, first body; 611, first through hole; 620, annular member; 630, cross partition plate;

[0045] 700, second adjustment member; 710, second body; 711, second through hole; 720, cover plate; 721, third through hole;

[0046] 800, photosensitive paper;

[0047] 900. The third reflector. DETAILED DESCRIPTION

[0048] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0049] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0050] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0051] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0052] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0053] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0054] In the application of laser slotting of photovoltaic cells, a two-dimensional galvanometer scanning system is often used to process silicon wafers. Among them, the two-dimensional scanning galvanometer 300 (Scan head, hereinafter referred to as "galvanometer 300") is composed of an XY optical scanning head, an electronic drive amplifier and an optical reflective lens. The signal provided by the computer controller drives the optical scanning head through the drive amplifier circuit, thereby controlling the deflection of the laser beam in the XY plane. The f-θ flat field scanning lens (objective lens, hereinafter referred to as "field lens") focuses the collimated laser beam on a point. When the direction of the incident laser beam changes, the field lens can still maintain a spot with a constant relative size and energy density, so that the laser beam can process points at different material positions. The field lens is combined with the galvanometer 300 that quickly and accurately changes the direction of the laser beam, so that high-speed and precise processing and treatment of materials can be achieved. The high-order optical aberrations of the field lens mainly include coma, field curvature, astigmatism, distortion, etc. Optical aberrations will reduce the focusing effect of the laser, thereby affecting the processing effect, and optical aberrations can only be limited, not eliminated.

[0055] Conventionally, the galvanometer 300 is repeatedly corrected to allow the laser to pass through the center of the field lens, thereby controlling the field curvature and distortion. The adjustment steps include:

[0056] 1. Reset the motors of each axis of the galvanometer 300 so that the X and Y axis lenses do not play a deflection role temporarily;

[0057] 2. Adjust the laser incident angle in front of the galvanometer 300 so that the laser passes through the optical center of the field mirror (axisymmetric structure);

[0058] 3. The focusing consistency of the field lens is ensured as much as possible by correcting the galvanometer 300 (changing the deflection degree of the galvanometer 300 at different deflection angles).

[0059] However, the above optical path adjustment method only ensures that the laser passes through the center of the field lens, but does not ensure that the laser passes through the center of the field lens vertically. Therefore, it only controls the field curvature and distortion aberration of the field lens, but does not limit the field curvature and distortion part of the aberration. In addition, the aberration is controlled by multiple galvanometer 300 correction methods, which requires repeated adjustment, takes a long time to debug, and is difficult to debug.

[0060] To this end, the present application provides a scanning device, such as Figures 1 to 8As shown, the scanning device includes a first reflector 100, a second reflector 200, a galvanometer 300, a field mirror, a sleeve 500, a first adjustment member 600 and a second adjustment member 700. The laser can pass through the first reflector 100, the second reflector 200, the galvanometer 300 and the field mirror in sequence. The sleeve 500 is connected to the galvanometer 300. The sleeve 500 has a through channel. The through channel is used for emitting the laser transmitted by the galvanometer 300. The first adjustment member 600 is connected to the sleeve 500. The first adjustment member 600 has a A first through hole connected to the through channel has a cross dividing plate 630 arranged on the hole wall, and the angle of the first reflector 100 is adjusted so that the cross dividing plate 630 divides the laser passing through the first through hole into four equal parts; the second adjustment member 700 can be connected to the sleeve member 500, and the second adjustment member 700 has a second through hole connected to the through channel, and the second reflector 200 is configured to adjust the angle after the cross dividing plate 630 divides the laser into four equal parts, so that the incident light and the reflected light of the laser passing through the second through hole coincide.

[0061] When the laser collimation needs to be adjusted in the above-mentioned scanning device, the connection between the galvanometer 300 and the field lens is first disassembled, and then the sleeve member 500 is connected to the galvanometer 300, and at the same time, it is ensured that the laser transmitted by the galvanometer 300 can be emitted through the penetration channel, and then the first adjustment member 600 is connected to the sleeve member 500, and it is ensured that the first through hole of the first adjustment member 600 is connected to the penetration channel, and by adjusting the first reflector 100, the laser passing through the sleeve member 500 is evenly divided by the cross partition plate 630, so that the laser emitted through the galvanometer 300 can pass through the center of the field lens, thereby controlling the field curvature and distortion aberration of the subsequent field lens; then the first adjustment member 600 is removed, and The second adjustment member 700 is connected to the sleeve member 500 to ensure that the second through hole of the second adjustment member 700 is connected to the through channel, and the second reflector 200 is adjusted to make the incident light and the reflected light of the laser passing through the second through hole coincide with each other. According to the principle of spatial geometry, "through a point outside the plane, a vertical line is drawn to the plane, and there is only one vertical line", that is, when the incident light and the reflected light of the laser passing through the second through hole coincide with each other, it can be determined that the laser passes through the center of the second adjustment member vertically, which ensures that when the galvanometer and the field lens are connected, the laser emitted through the galvanometer 300 can pass through the center of the field lens vertically, thereby controlling the coma and astigmatism of the field lens. The scanning device of the present application uses the sleeve member 500, the first adjustment member 600 and the second adjustment member 700 to adjust the collimation of the laser emitted by the galvanometer 300, so that it can not only pass through the center of the field lens, but also pass through the center of the field lens vertically, thereby controlling the field curvature, distortion, coma and astigmatism.

[0062] Furthermore, if Figure 2As shown, the penetration passage includes a first connection hole 511 and a second connection hole 522 that are connected, the first adjustment member 600 is connected to the hole wall of the first connection hole 511 or the hole wall of the second connection hole 522, and the second adjustment member 700 can be connected to the hole wall of the first connection hole 511 or the hole wall of the second connection hole 522. The penetration passage includes a first connection hole 511 and a second connection hole 522 that are connected, and the first adjustment member 600 can be connected to the hole wall of the first connection hole 511 or the hole wall of the second connection hole 522, thereby realizing the connection between the first adjustment member 600 and the sleeve member 500. The second adjustment member 700 can be connected to the hole wall of the first connection hole 511 or the hole wall of the second connection hole 522, thereby realizing the connection between the second adjustment member 700 and the sleeve.

[0063] It should be noted that the connection positions of the first adjusting member 600 and the second adjusting member 700 and the sleeve member 500 are selected according to actual operation, for example:

[0064] In some embodiments, the first adjustment member 600 is connected to the hole wall of the first connecting hole 511 . After the laser emitted by the galvanometer 300 is adjusted to pass through the center of the field lens, the first adjustment member 600 is removed and the second adjustment member 700 is connected to the hole wall of the first connecting hole 511 .

[0065] In some embodiments, the first adjustment member 600 is connected to the wall of the first connection hole 511 , and after the laser emitted by the galvanometer 300 is adjusted to pass through the center of the field lens, the second adjustment member 700 is connected to the wall of the second connection hole 522 .

[0066] In some embodiments, the first adjustment member 600 is connected to the wall of the second connection hole 522 . After the laser emitted by the galvanometer 300 is adjusted to pass through the center of the field lens, the first adjustment member 600 is removed and the second adjustment member 700 is connected to the wall of the second connection hole 522 .

[0067] In some embodiments, the first adjustment member 600 is connected to the wall of the second connection hole 522 . After the laser emitted by the galvanometer 300 is adjusted to pass through the center of the field lens, the first adjustment member 600 is removed and the second adjustment member 700 is connected to the wall of the second connection hole 522 .

[0068] Specifically, Figure 2As shown, the sleeve member 500 includes a first ring 510, a second ring 520, and a connecting plate 530 connecting the first ring 510 and the second ring 520. The first ring 510 is used to connect to the galvanometer 300. The first ring 510 is surrounded to form a first connecting hole 511, and the second ring 520 is provided with a second connecting hole 522. By providing the first ring 510, the first connecting hole 511 is formed to be surrounded, and the first adjustment member 600 and the second adjustment member 700 can be selectively connected to the first connecting hole 511 formed by the first ring 510. A thread is provided on the outer circumference of the first ring 510, and the first ring 510 is threadedly connected to the galvanometer 300, thereby realizing the connection between the sleeve member 500 and the galvanometer 300. By providing the connecting plate 530, the first ring 510 and the second ring 520 are connected, so that the sleeve member 500 presents a hollow structure, which not only reduces the weight of the sleeve member 500, but also facilitates the observation of the moving path of the laser emitted through the sleeve member 500.

[0069] Specifically, Figure 2 As shown, a filling piece 521 is disposed in the cavity formed by the second ring 520, and a second connecting hole 522 is disposed on the filling piece 521, and the axial direction of the filling piece 521 coincides with the axial direction of the first ring 510. By disposing the filling piece 521 in the cavity formed by the second ring 520 and opening the second connecting hole 522 on the filling piece 521, the first adjusting piece 600 and the second adjusting piece 700 can be selectively connected to the second connecting hole 522.

[0070] More specifically, if Figure 2 As shown, the first ring 510 and the second ring 520 are concentric, and the radius of the second ring 520 is greater than the radius of the first ring 510 .

[0071] Furthermore, if Figure 3 and Figure 4As shown, the first adjustment member 600 includes a first body 610 and an annular member 620 connected to each other. The first body 610 is provided with a first through hole 611, which is connected to the annular member 620 to form a first through hole. The outer peripheral surface of the first body 610 is provided with a thread to be threadedly connected to the hole wall of the through passage. The first body 610 is provided with an external thread to facilitate the connection between the first adjustment member 600 and the sleeve member 500. The first through hole 611 is provided on the first body 610, and the first through hole 611 is connected to the cavity of the annular member 620 to form a first through hole. A cross partition plate 630 is provided in the first through hole, and the laser energy emitted by the galvanometer 300 passes through the first connecting hole 511 of the sleeve member 500, the second connecting hole 522, the cavity of the annular member 620 and the first through hole 611 in sequence and then is emitted. Because a cross partition plate 630 is provided in the first through hole, the laser emitted through the first adjusting member 600 is divided into four areas by the cross partition plate 630, and the first reflecting mirror 100 is adjusted to make the areas of the four areas divided by the cross partition plate 630 equal. That is to say, the laser emitted by the sleeve member 500 passes through the center of the first adjusting member 600. When the galvanometer 300 and the field lens are connected, the laser at the current position will naturally pass through the center of the field lens.

[0072] Specifically, Figures 3 to 5 As shown, in order to facilitate observation of the four areas divided by the cross partition plate 630, the scanning device further includes a photosensitive paper 800, which is used to be mounted on the processing platform 400 where the laser is injected, and the laser passing through the first through hole can be emitted to the photosensitive paper 800 and appear on the photosensitive paper 800. The photosensitive paper 800 is mounted on the processing platform 400, and the laser passing through the first through hole can be emitted to the photosensitive paper 800 and appear on the photosensitive paper 800. By observing the display pattern on the photosensitive paper 800, it can be determined whether the laser passes through the center of the first adjustment member 600.

[0073] More specifically, if Figure 5 As described above, from left to right, it can be seen from the images displayed on the first three photosensitive papers 800 that the laser emitted by the galvanometer 300 did not pass through the center of the first through hole, and from the image displayed on the fourth photosensitive paper 800, it can be seen that the laser emitted by the galvanometer 300 passed through the center of the first through hole.

[0074] Furthermore, if Figure 6 and Figure 7As shown, the second adjustment member 700 includes a second body 710 and a cover plate 720 connected to each other, a second through hole 711 is provided on the second body 710, a third through hole 721 is provided on the cover plate 720, the third through hole 721 and the second through hole 711 are connected to form a second through hole, and a thread is provided on the outer peripheral surface of the second body 710 to be threadedly connected to the hole wall of the through passage. By providing the second through hole 711 on the second body 710, providing the third through hole 721 on the cover body, and the third through hole 721 and the second through hole 711 are connected to form a second through hole, the laser energy emitted by the galvanometer 300 can be emitted after passing through the first connection hole 511, the second connection hole 522, the third through hole 721 and the second through hole 711 of the sleeve member 500 in sequence. The external thread is provided on the second body 710 to facilitate the connection between the second adjustment member 700 and the sleeve member 500.

[0075] Specifically, Figure 6 and Figure 7 As shown, the diameter of the third through hole 721 is smaller than the diameter of the second through hole 711 .

[0076] Specifically, Figure 6 and Figure 8 As shown, in order to facilitate the judgment of whether the emitted laser and the reflected laser passing through the second adjustment member 700 overlap, the scanning device also includes a third reflector 900. The third reflector 900 is used to be installed on the processing platform 400. The laser emitted by the second adjustment member 700 can be reflected by the third reflector 900 and can be displayed on the outer wall of the second adjustment member 700. By adjusting the second reflector 200, the reflected laser of the second adjustment member 700 is shot into the second through hole, that is, the emitted laser and the reflected laser of the second adjustment member 700 overlap.

[0077] Specifically, the second adjusting member 700 and the third reflecting mirror 900 are arranged in parallel.

[0078] The present application also provides a method for using the scanning device as described above, the method for using the scanning device comprising:

[0079] Disassemble the connection between the galvanometer 300 and the field lens, and connect the sleeve 500 to the galvanometer 300;

[0080] Connect the first adjustment member 600 to the sleeve member 500, turn on the laser, and adjust the angle of the first reflector 100 so that the laser passing through the sleeve member 500 is evenly divided by the cross partition plate 630;

[0081] The first adjustment member 600 is removed, and the second adjustment member 700 is connected to the sleeve member 500, and the angle of the second reflector 200 is adjusted so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other;

[0082] The sleeve member 500 and the first adjustment member 600 are removed, and the field lens is connected to the galvanometer mirror 300, and then processed.

[0083] The method for using the above scanning device is to adjust the first reflector 100 so that the laser light passing through the sleeve member 500 is evenly divided by the cross partition plate 630, so that the laser light emitted through the galvanometer 300 can pass through the center of the field lens, thereby controlling the field curvature and distortion aberration of the field lens; then remove the first adjustment member 600, and connect the second adjustment member 700 to the sleeve member 500, and adjust the second reflector 200 so that the incident light and the reflected light of the laser light passing through the second through hole coincide, thereby ensuring that the laser light emitted through the galvanometer 300 can pass vertically through the center of the field lens, thereby controlling the coma and astigmatism aberrations of the field lens. The method for using the scanning device of the present application has a simple debugging method, intuitive results, and can greatly reduce mechanical tolerances and human errors, and not only limits the field curvature and distortion parts of the aberration, but also limits the coma and astigmatism.

[0084] Furthermore, before disassembling the connection between the galvanometer 300 and the field mirror, first determine whether the galvanometer 300 and the processing platform 400 are parallel. If they are parallel, proceed to the next step. If they are not parallel, adjust the relative position of the galvanometer 300 and the processing platform 400 until they are parallel before proceeding to the next step. The above-mentioned method of using the scanning device is used when the galvanometer 300 and the processing platform 400 are parallel. If the galvanometer 300 and the processing platform 400 are not parallel, it is necessary to first adjust the galvanometer 300 and the processing platform 400 to make them parallel.

[0085] Specifically, if the galvanometer 300 and the processing platform 400 are not parallel, the two are made relatively parallel by adjusting the clamping mechanism of the galvanometer 300 or adjusting the processing platform 400. By adjusting the clamping mechanism of the galvanometer 300, the relative position of the galvanometer 300 and the processing platform 400 is adjusted, or by adjusting the processing platform 400, the relative position of the galvanometer 300 and the processing platform 400 can also be adjusted.

[0086] In other embodiments, the clamping mechanism of the galvanometer 300 and the processing platform 400 may be adjusted synchronously, and the relative positions of the galvanometer 300 and the processing platform 400 may also be adjusted.

[0087] Specifically, if it is impossible to determine whether the galvanometer 300 and the processing platform 400 are parallel, the following steps are performed to determine:

[0088] A first adjusting member 600 is installed in the first connecting hole 511 of the sleeve member 500, and the first reflecting mirror 100 is adjusted so that the laser passes through the center point of the first connecting hole 511;

[0089] Install the second adjusting member 700 in the second connecting hole 522 of the sleeve member 500, and adjust the second reflecting mirror 200 so that the laser passes through the center point of the second connecting hole 522;

[0090] After repeated adjustments, the laser passes through the center of the first connection hole 511 and the second connection hole 522 at the same time;

[0091] It is determined whether the incident light and the reflected light of the laser passing through the second through hole coincide with each other. If so, it is determined that the galvanometer 300 is parallel to the processing platform 400; if not, it is determined that the galvanometer 300 is not parallel to the processing platform 400.

[0092] By using the sleeve part 500, the first adjustment part 600 and the second adjustment part 700, the above steps are used to determine whether the galvanometer 300 and the processing platform 400 are parallel. If they are parallel, subsequent laser alignment adjustment is performed. If they are not parallel, the clamping mechanism of the galvanometer 300 is adjusted or the processing platform 400 is adjusted to make the two relatively parallel.

[0093] Further, after the first adjustment member 600 is used, that is, after the light emitted by the galvanometer 300 passes through the center of the first adjustment member 600, before adjusting the second reflector 200, the third reflector 900 is installed on the processing platform 400; then the laser is turned on, the second reflector 200 is adjusted, and the incident light and the reflected light of the laser passing through the second through hole are observed through the third reflector 900 to see whether they coincide. By setting the third reflector 900, it is convenient to observe the emitted laser and the reflected laser passing through the second adjustment member 700.

[0094] Specifically, if the initial state deviation is large, the laser reflection point may not be on the second adjustment member 700, and the reflection point can be found by shaking the laser third reflector 900. If the reflection point cannot be found, the third reflector 900 can be shaken and the second reflector 200 can be adjusted to make the incident light and the reflected light of the laser passing through the second through hole coincide.

[0095] Furthermore, before processing, the galvanometer 300 is calibrated. Before processing, the galvanometer 300 can also be calibrated, which further increases the adjustment accuracy and improves the processing precision.

[0096] In summary, the method for using the scanning device of the present application includes the following steps:

[0097] First, determine whether the galvanometer 300 and the processing platform 400 are parallel. If not, adjust the clamping mechanism of the galvanometer 300 or adjust the processing platform 400 to make them relatively parallel. If they are parallel, proceed to the next step.

[0098] Disassemble the connection between the galvanometer 300 and the field lens, and connect the sleeve 500 to the galvanometer 300;

[0099] Connect the first adjusting member 600 to the sleeve member 500 so that the first through hole of the first adjusting member 600 and the through passage of the sleeve member 500 are in communication;

[0100] Turn on the laser, and adjust the first reflector 100 so that the laser passing through the sleeve 500 is evenly divided by the cross partition plate 630;

[0101] The first adjusting member 600 is removed, and the second adjusting member 700 is connected to the sleeve member 500, so that the second through hole of the second adjusting member 700 is connected to the through passage of the sleeve member 500, and the third reflecting mirror 900 is installed on the processing platform 400;

[0102] Turn on the laser, and adjust the second reflector 200 so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other;

[0103] Remove the sleeve member 500 and the first adjustment member 600, and connect the field lens to the galvanometer 300;

[0104] Perform galvanometer 300 correction;

[0105] For processing.

[0106] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0107] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A scanning device, characterized in that: The scanning device comprises: It comprises a first reflecting mirror (100), a second reflecting mirror (200), a galvanometer mirror (300) and a field mirror, and laser light can sequentially pass through the first reflecting mirror (100), the second reflecting mirror (200), the galvanometer mirror (300) and the field mirror; A sleeve member (500) capable of being connected to the galvanometer (300), the sleeve member (500) having a penetration channel, the penetration channel being used for emitting laser light transmitted by the galvanometer (300); A first adjustment member (600) is connected to the sleeve member (500), the first adjustment member (600) having a first through hole communicating with the through passage, a cross partition plate (630) being arranged on the hole wall of the through hole, and the angle of the first reflector (100) is adjusted so that the cross partition plate (630) divides the laser light passing through the first through hole into four equal parts; The second adjustment member (700) can be connected to the sleeve member (500), and the second adjustment member (700) has a second through hole connected to the penetration channel. The second reflector (200) is configured to adjust the angle after the cross dividing plate (630) divides the laser into four uniform parts, so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other.

2. The scanning device according to claim 1, characterized in that: It also includes photosensitive paper (800), which is used to be installed on a processing platform (400) for laser injection. The laser passing through the first through hole can be injected into the photosensitive paper (800) and appear on the photosensitive paper (800).

3. The scanning device according to claim 1, characterized in that: The penetration channel comprises a first connecting hole and a second connecting hole (522) which are connected to each other, the first adjusting member (600) is connected to the hole wall of the first connecting hole or the hole wall of the second connecting hole (522), and the second adjusting member (700) can be connected to the hole wall of the first connecting hole or the hole wall of the second connecting hole (522).

4. The scanning device according to claim 3, characterized in that: The sleeve member (500) comprises a first ring (510), a second ring (520) and a connecting plate (530) connecting the first ring (510) and the second ring (520), wherein the first ring (510) is used to be connected to the galvanometer (300), the first ring (510) is surrounded to form the first connecting hole, and the second ring (520) is provided with the second connecting hole (522).

5. The scanning device according to claim 4, characterized in that: A filling piece (521) is arranged in the cavity formed by the second ring (520), the filling piece (521) is provided with the second connecting hole (522), and the axial direction of the filling piece (521) coincides with the axial direction of the first ring (510).

6. The scanning device according to claim 1, characterized in that: The first adjustment member (600) comprises a first body (610) and an annular member (620) connected to each other, the first body (610) is provided with a first through hole (611), the first through hole (611) is connected with the annular member (620) to form the first through hole, and the outer peripheral surface of the first body (610) is provided with a thread to be threadedly connected to the hole wall of the through channel.

7. The scanning device according to claim 1, characterized in that: The second adjustment member (700) comprises a second body (710) and a cover plate (720) connected to each other, the second body (710) being provided with a second through hole (711), the cover plate (720) being provided with a third through hole (721), the third through hole (721) being connected to the second through hole (711) to form the second through hole, and a thread is provided on the outer peripheral surface of the second body (710) to be threadedly connected to the hole wall of the through channel.

8. A method for using the scanning device according to any one of claims 1 to 7, characterized in that: The method for using the scanning device includes: Dismantle the connection between the galvanometer (300) and the field lens, and connect the sleeve member (500) to the galvanometer (300); Connecting the first adjustment member (600) to the sleeve member (500), turning on the laser, and adjusting the angle of the first reflector (100) so that the laser light passing through the sleeve member (500) is evenly divided by the cross partition plate (630); The first adjustment member (600) is removed, and the second adjustment member (700) is connected to the sleeve member (500), and the angle of the second reflector (200) is adjusted so that the incident light and the reflected light of the laser passing through the second through hole coincide with each other; The sleeve member (500) and the first adjustment member (600) are removed, and the field lens is connected to the galvanometer (300), and then processed.

9. The method for using the scanning device according to claim 8, characterized in that: Before disassembling the connection between the galvanometer (300) and the field mirror, first determine whether the galvanometer (300) and the processing platform (400) are parallel. If they are parallel, proceed to the next step. If they are not parallel, adjust the relative position of the galvanometer (300) and the processing platform (400) until they are parallel before proceeding to the next step.

10. The method for using the scanning device according to claim 9, characterized in that: If the galvanometer (300) and the processing platform (400) are not parallel, the clamping mechanism of the galvanometer (300) is adjusted or the processing platform (400) is adjusted so that the two are relatively parallel.

11. The method for using the scanning device according to claim 9, characterized in that: If it is impossible to determine whether the galvanometer (300) and the processing platform (400) are parallel, the following steps are performed to determine whether the galvanometer (300) and the processing platform (400) are parallel. The first adjusting member (600) is installed in the first connecting hole of the sleeve member (500), and the first reflecting mirror (100) is adjusted so that the laser passes through the center point of the first connecting hole; The second adjustment member (700) is installed in the second connection hole (522) of the sleeve member (500), and the second reflector (200) is adjusted so that the laser passes through the center point of the second connection hole (522); After repeated adjustments, until the laser passes through the center of the first connection hole and the second connection hole (522) at the same time; It is determined whether the incident light and the reflected light of the laser passing through the second through hole overlap; if so, it is determined that the galvanometer (300) is parallel to the processing platform (400); if not, it is determined that the galvanometer (300) is not parallel to the processing platform (400).

12. The method for using the scanning device according to claim 8, characterized in that: Before adjusting the second reflector (200), installing a third reflector (900) on the processing platform (400); Then, the laser is turned on, the second reflector (200) is adjusted, and the third reflector (900) is used to observe whether the incident light and the reflected light of the laser passing through the second through hole coincide with each other.

13. The method for using the scanning device according to claim 12, characterized in that: If the initial state deviation is large, the laser reflection point may not be on the second adjustment member (700), and the reflection point is found by shaking the laser third reflection mirror (900).

14. The method for using the scanning device according to claim 8, characterized in that: Before processing, the galvanometer (300) is calibrated.

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