Method for eliminating double-sided polishing abnormal sound of quartz ring

Abstract

The invention provides a method for eliminating double-sided polishing abnormal sound of a quartz ring. The method comprises the following steps: S1, primary polishing: mounting a wandering star wheel and a quartz ring workpiece; discharging the polishing solution; the upper fixed disc descends and pressurizes gradually, meanwhile, equipment starts to rotate, if collision friction sound of the quartz ring workpiece occurs in the polishing process, subsequent measurement and installation adjustment can be conducted, and even parts are subjected to precision improvement machining and reinstallation to achieve the purpose of eliminating abnormal sound; s2, preparatory work before gap measurement is carried out, and equipment is stopped; installing a dial indicator; s3, a gap value is measured, and the positions of the same wandering star wheel in the four directions with the included angles being 90 degrees are adopted as four stations; the wandering star wheel is pushed to move back and forth on the four stations in the back-and-forth pushing direction, and the dial indicator is used for measuring the front-and-back gap values of the four stations. According to the device and the method, the measured pushing floating gap is within the range of 0.15 m to 0.25 m, m is the gear modulus, and the abnormal sound of double-sided polishing of large and thick quartz ring parts is eliminated.

Description

Technical Field

[0001] The invention relates to the technical field of precision machining, and in particular to a method for eliminating abnormal noise during double-sided polishing of a quartz ring. Background Art

[0002] Double-sided polishing is a processing technology that simultaneously performs precision polishing on the upper and lower planes of thin-film parts, which can achieve mirror processing. This process uses a planetary wheel carrier to load the workpiece, which meshes with the sun wheel and the outer gear ring, and realizes orbital and rotational motion under their rotation. The upper and lower planes are subjected to mechanical polishing and chemical corrosion under the pressure of the polyurethane polishing pads of the upper and lower polishing discs and the action of the polishing liquid, thereby achieving high-precision plane processing. In the double-sided polishing process of quartz ring parts used in the semiconductor field, since the diameter of the quartz ring is above 300mm and the thickness is in the range of 8~15mm with various specifications, due to the different tolerances of the sun gear, planetary gear and outer ring gear of each manufacturer's equipment and different installation accuracy, the final matching clearances are different, and there are the following technical defects: the actual floating clearance size is different during use, and abnormal noise occurs during the quartz ring polishing process. Ring-shaped and thick parts are prone to collision and friction type abnormal noises during processing. Due to different processes and different noise sizes, the frequency of occurrence is high, and it is difficult to distinguish whether it is a failure of the main equipment or an abnormality in the workpiece processing. In severe cases, the workpiece will be scrapped and cannot be processed further; the traditional method is to measure the accuracy of the sun gear, outer ring gear and the runout after installation individually, and the planetary gear is only inspected for components, and the actual clearance after installation cannot be understood.

[0003] Therefore, how to design a method to eliminate the abnormal noise during the double-sided processing of such large-sized annular parts and improve the processing accuracy and qualified rate to eliminate the abnormal noise of double-sided polishing of quartz rings has become an urgent problem to be solved. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a method for eliminating abnormal noise during double-sided polishing of a quartz ring, so as to solve at least one of the above technical problems.

[0005] The technical solution of the present invention is: a method for eliminating abnormal sound of double-sided polishing of a quartz ring, comprising the following steps:

[0006] S1. Polishing,

[0007] ①Install the planetary wheel and quartz ring workpiece,

[0008] The quartz ring workpiece is placed inside the planetary wheel, which is placed on the lower fixed plate and located between the sun wheel and the outer gear ring;

[0009] ② Release the polishing liquid,

[0010] Polishing liquid is released into the hole of the upper fixed plate;

[0011] ③ The upper and lower plates are pressurized and the equipment starts rotating.

[0012] The upper platen is lowered to a position where it contacts the quartz ring workpiece, and the pressure is controlled according to the process requirements, while the lower platen pressurizes the quartz ring workpiece;

[0013] The planetary wheel realizes revolution and rotation under the rotation of the sun wheel and the outer gear ring, and polishes the upper and lower surfaces of the quartz ring workpiece at the same time; the upper and lower surfaces of the quartz ring are polished at the same time to achieve the effect of uniform thickness and mirror surface; if the quartz ring workpiece collides and rubs during the polishing process, subsequent measurements and installation adjustments can be carried out, and even the parts can be processed to improve the precision and reinstalled to eliminate the abnormal sound;

[0014] S2. Preparation before measuring the gap,

[0015] ① Equipment stops,

[0016] The upper platen rises, the polishing liquid is turned off, and the lower platen stops rotating;

[0017] ②Installation of dial indicator,

[0018] Fix the dial indicator on the meter stand, which is fixed on the frame, and the dial indicator is located on the outer ring of the outer gear ring;

[0019] S3. Measure the gap value,

[0020] ① Use the same planetary wheel in four directions with an angle of 90° as four working positions;

[0021] ② Push the planetary wheel to move forward and backward along the forward and backward pushing direction at the four stations, and use a dial indicator to measure the clearance value at the four stations. The measured push clearance is within the range of 0.15m~0.25m, where m is the gear module;

[0022] ③ Assume that the thickness of the quartz ring workpiece is t, the height of the planetary wheel is h, and the height dimension control range of the planetary wheel is .

[0023] The present invention measures the clearances in four directions on the planetary wheel and the matching sun wheel and outer gear ring of the double-sided polishing machine. The inspection result accumulates the dimensional tolerances, processing accuracy and installation accuracy of the components of the sun wheel, outer gear ring and planetary wheel. The measured driving clearance is 0.15m~0.25m, which eliminates the problem of abnormal noise during double-sided polishing of larger and thicker parts such as quartz rings. The closer the thickness of the planetary wheel carrier is to the thickness of the workpiece, the better. The height h of the planetary wheel carrier is 0.7t~0.95t, which is conducive to the lubrication of the polishing liquid and improves the polishing processing accuracy and yield rate of large-sized annular parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the structure of the processing area of ​​the double-sided polishing machine of the present invention.

[0025] Figure 2 It is a schematic diagram of the running clearance measurement of the present invention.

[0026] Figure 3 It is a schematic diagram of the positions of the planetary wheel and the quartz ring workpiece of the present invention.

[0027] In the figure: 1. Polishing liquid; 2. Upper fixed plate; 3. Sun gear; 4. Quartz ring workpiece; 5. Lower fixed plate; 6. Planetary gear; 7. Outer gear ring; 8. Four workstations; 9. Forward and backward push direction; 10. Dial indicator. DETAILED DESCRIPTION

[0028] The present invention will be further described below in conjunction with the accompanying drawings.

[0029] See also Figure 1-3 The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0030] Embodiment 1: A method for eliminating abnormal sound of double-sided polishing of a quartz ring, referring to Figure 1 , Figure 2 , Figure 3 , including the following steps:

[0031] S1. Polishing,

[0032] ①Install the planetary wheel and quartz ring workpiece,

[0033] The quartz ring workpiece 4 is placed inside the planetary wheel 6, and the planetary wheel 6 is placed on the lower fixed plate 5 and is located between the sun gear 3 and the outer gear ring 7;

[0034] ② Release the polishing liquid,

[0035] Polishing liquid 1 is released from the hole of the upper fixed plate 2;

[0036] ③ The upper and lower plates are pressurized and the equipment starts rotating.

[0037] The upper platen 2 is lowered to a position where it contacts the quartz ring workpiece 4, and the pressure is controlled according to the process requirements, while the lower platen 5 pressurizes the quartz ring workpiece 4;

[0038] The planetary wheel 6 realizes revolution and rotation under the rotation of the sun wheel 3 and the outer gear ring 7, and polishes the upper and lower surfaces of the quartz ring workpiece 4 at the same time; the upper and lower surfaces of the quartz ring are polished at the same time to achieve the effect of uniform thickness and mirror surface; if the quartz ring workpiece 4 collides and rubs during the polishing process, subsequent measurements and installation adjustments can be carried out, and even the parts can be processed to improve the precision and reinstalled to eliminate the abnormal sound;

[0039] S2. Preparation before measuring the gap,

[0040] ① Equipment stops,

[0041] The upper plate 2 rises, the polishing liquid 1 is turned off, and the lower plate 5 stops rotating;

[0042] ②Installation of dial indicator,

[0043] Fix the dial gauge 10 on the gauge frame, which is fixed on the frame, and the dial gauge 10 is located on the outer ring of the outer gear ring 7;

[0044] S3. Measure the gap value,

[0045] ① Using the same planetary wheel 6 in four directions with an angle of 90° as four workstations 8;

[0046] ② Push the planetary wheel 6 to move forward and backward along the forward and backward pushing direction 9 on the four workstations 8, and use the dial gauge 10 to measure the clearance value of the four workstations 8. The measured push clearance is within the range of 0.15m~0.25m, where m is the gear module;

[0047] ③ Assume that the thickness of the quartz ring workpiece 4 is t, the height of the planetary wheel 6 is h, and the height dimension control range of the planetary wheel 6 is The present invention measures the clearances in four directions of the planetary wheel and the matching sun wheel and outer gear ring of the double-sided polishing machine. The inspection result accumulates the dimensional tolerances, processing accuracy and installation accuracy of the components of the sun wheel, outer gear ring and planetary wheel. The measured clearance is between 0.15m and 0.25m, eliminating the problem of abnormal noise in double-sided polishing of larger and thicker parts such as quartz rings. The closer the thickness of the planetary wheel carrier is to the thickness of the workpiece, the better. The height h of the planetary wheel carrier is between 0.7t and 0.95t, which is conducive to the lubrication of the polishing liquid and improves the polishing accuracy and yield rate of large-sized annular parts.

[0048] Embodiment 2: Based on Embodiment 1, in the process of measuring the gap value in step S3, the gap values ​​measured by the same planetary wheel 6 at four stations 8 are δ1, δ2, δ3 and δ4 respectively, and the gear module of the planetary wheel 6 is m; if the following conditions are met, , then no noise due to collision and friction will be generated during the polishing process. The present invention measures the clearance in four directions of the planetary wheel and the matching sun wheel and outer gear ring of the double-sided polishing machine. The inspection result accumulates the dimensional tolerance, processing accuracy and installation accuracy of the sun wheel, outer gear ring and planetary wheel. The measured driving clearance is 0.15m~0.25m, which eliminates the noise problem of double-sided polishing of large and thick quartz ring parts, and improves the polishing processing accuracy and yield rate of large-sized annular parts.

[0049] Embodiment 3: Based on Embodiment 2, when the gap value measured by the same planetary wheel 6 at the four stations 8 is not between 0.15m and 0.25m, installation adjustment or trimming of the dimensional tolerance or precision of the parts is required; the trimming of the dimensional tolerance or precision of the parts includes repeating steps S2 and S3. The present invention adopts the steps of polishing the parts, preparatory work before measuring the gap, and measuring the gap value when the gap value is not between 0.15m and 0.25m, and trimming of the dimensional tolerance or precision until the gap value measured by the same planetary wheel at the four stations is between 0.15m and 0.25m, thereby eliminating the problem of abnormal sound during double-sided polishing of larger and thicker quartz ring parts, and improving the polishing processing accuracy and yield rate of large-sized annular parts.

[0050] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A method for eliminating abnormal noise during double-sided polishing of a quartz ring, characterized in that: The following steps are involved: S1. Polishing, ①Install the planetary wheel and quartz ring workpiece, The quartz ring workpiece (4) is placed inside the planetary wheel (6), and the planetary wheel (6) is placed on the lower fixed plate (5) and is located between the sun wheel (3) and the outer gear ring (7); ② Release the polishing liquid, The polishing liquid (1) is released into the hole of the upper fixed plate (2); ③ The upper and lower plates are pressurized and the equipment starts rotating. The upper platen (2) is lowered to a position where it contacts the quartz ring workpiece (4), and the pressure is controlled according to process requirements, while the lower platen (5) applies pressure to the quartz ring workpiece (4); The planetary wheel (6) realizes revolution and rotation under the rotation of the sun wheel (3) and the outer gear ring (7), and polishes the upper and lower surfaces of the quartz ring workpiece (4) simultaneously; If the quartz ring workpiece (4) makes a collision or friction noise during the polishing process, you can make subsequent measurements and installation adjustments, or even improve the precision of the parts and reinstall them to eliminate the abnormal noise. S2. Preparation before measuring the gap, ① Equipment stops, The upper platen (2) rises, the polishing liquid (1) is turned off, and the lower platen (5) stops rotating; ②Installation of dial indicator, The dial indicator (10) is fixed on the meter frame, the meter frame is fixed on the frame, and the dial indicator (10) is located on the outer ring of the outer gear ring (7); S3. Measure the gap value, ① Using the same planetary wheel (6) to form four workstations (8) in four directions with an angle of 90°; ② Push the planetary wheel (6) to move forward and backward along the forward and backward pushing direction (9) on the four working positions (8), and use a dial indicator (10) to measure the clearance value of the four working positions (8) front and back. The measured pushing clearance is within the range of 0.15m~0.25m, where m is the gear module; ③ Assume that the thickness of the quartz ring workpiece (4) is t, the height of the planetary wheel (6) is h, and the height dimension control range of the planetary wheel (6) is .

2. A method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 1, characterized in that: In the process of measuring the gap value in step S3, the gap values ​​measured by using the same planetary wheel (6) at four workstations (8) are δ1, δ2, δ3 and δ4 respectively, and the gear module of the planetary wheel (6) is m; If the following conditions are met, , then no collision and friction noise will be produced during the polishing process.

3. A method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 2, characterized in that: When the gap value measured by using the same planetary wheel (6) at the four workstations (8) is not within the range of 0.15 m to 0.25 m, installation adjustment or trimming of the dimensional tolerance or precision of the parts is required.

4. A method for eliminating abnormal noise during double-sided polishing of a quartz ring according to claim 3, characterized in that: The trimming of the dimensional tolerance or precision of the component includes repeating steps S2 to S3.

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