Single crystal rapid directional cutting system based on Laue diffractometer

Abstract

The invention discloses a Laue diffractometer-based single crystal rapid directional cutting system, which is characterized by comprising a diffractometer, a wire cutting machine, a sample turning table, a delta angle automatic turning driving mechanism and a gamma / theta angle automatic turning driving mechanism, the diffractometer is used for obtaining a directional delta angle, a gamma angle and a theta angle of the sample; the sample turning table automatically realizes the correction of the delta angle of the single crystal sample through a delta angle automatic turning driving mechanism, and the sample turning table automatically realizes the correction of the gamma angle and the theta angle of the single crystal sample through a gamma / theta angle automatic turning driving mechanism; and the wire cutting machine is used for directionally cutting the oriented single crystal sample. According to the system, the delta angle, the gamma angle and the theta angle of the single crystal sample can be automatically corrected, manual rotation angle adjustment is not needed, the crystal orientation angle correction efficiency is improved, the angle correction precision is improved, and then the crystal orientation cutting quality can be improved.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor crystal cutting, and more particularly to a single crystal rapid directional cutting system based on a Laue diffractometer. Background Art

[0002] Because single crystals have anisotropic properties, the influence of crystal orientation needs to be considered in single crystal manufacturing, epitaxial growth, device production, and die dicing. In practical applications, single crystals with different orientations are required depending on the purpose of use, which requires us to perform directional cutting of crystals with different orientations.

[0003] However, most artificial crystals do not have exposed crystal faces like natural crystals. Only a few artificial crystals, such as crystals grown in solution, can naturally form visible exposed faces. Therefore, traditional orientation methods usually rely on violent means, such as smashing the crystal to find its cleavage plane. This method not only requires a lot of experience and skills, but also has great difficulty in operation. It is easy to cause irreversible damage to the crystal material, resulting in material waste and experimental failure. In addition, traditional methods are also difficult to meet the modern high-precision and high-efficiency scientific research and industrial needs in terms of accuracy and efficiency.

[0004] Of course, there are also automatic cutting devices that are used to perform directional cutting of crystals, such as CN113232176B-Seed crystal cutting device and method for casting single crystal high-temperature alloys with different crystal orientations. The device rotates the middle angle indexing disk of the top device to the corresponding angle for direction correction, and rotates the angle indexing disk of the bottom device to the corresponding angle for direction correction. It can easily and quickly cut single crystal sample seed crystals with different crystal orientations, improve the yield rate of seed crystal cutting, and the equipment is simple to operate, saving man-hours, and plays an important role in the industrial mass production of seed crystals. However, the correction of the crystal direction is achieved by manually rotating the indexing disk, and the manual rotation angle accuracy is not high (the error is about ±0.5 degrees). When a more precise value is required, it needs to be adjusted repeatedly, which is not only inefficient, but also reduces the quality of crystal directional cutting.

[0005] Therefore, providing a system that can efficiently and accurately perform directional cutting of artificial lenses is of great significance for improving material utilization and experimental success rate. Summary of the invention

[0006] In view of this, the present invention provides a single crystal rapid directional cutting system based on Laue diffractometer, which can efficiently and accurately perform directional cutting on artificial crystals, and is of great significance for improving material utilization and experimental success rate.

[0007] In order to achieve the above object, the present invention adopts the following technical solution:

[0008] A single crystal rapid directional cutting system based on Laue diffractometer, characterized in that it comprises: a diffractometer, a wire cutting machine, a sample rotation table, a delta angle automatic rotation driving mechanism, and a gamma / theta angle automatic rotation driving mechanism;

[0009] The X-ray beam of the diffractometer irradiates the single crystal sample located on the sample turning table to obtain the orientation delta angle, gamma angle and theta angle of the sample;

[0010] The sample rotation stage automatically realizes the correction of the delta angle of the single crystal sample through the delta angle automatic rotation drive mechanism, and the sample rotation stage automatically realizes the correction of the gamma angle and theta angle of the single crystal sample through the gamma / theta angle automatic rotation drive mechanism;

[0011] The wire cutting machine is used for directional cutting of single crystal samples after the orientation angle is corrected.

[0012] It can be seen from the above technical scheme that, compared with the prior art, the present invention discloses a single crystal rapid directional cutting system based on a Laue diffractometer, which measures the oriented delta angle, gamma angle and theta angle of the single crystal sample through the diffractometer, and then uses a delta angle automatic rotation drive mechanism to automatically correct the delta angle of the sample rotation table, and uses a gamma / theta angle automatic rotation drive mechanism to automatically correct the gamma angle and theta angle of the sample rotation table, without the need for manual angle adjustment, which not only improves the efficiency of crystal orientation angle correction, but also improves the angle correction accuracy, thereby greatly improving the crystal oriented cutting quality.

[0013] Furthermore, an orienting slide is fixed on the workbench of the diffractometer, a cutting slide is fixed on the workbench of the wire cutting machine, and the sample corner table can be mounted on the orienting slide or the cutting slide to ensure the consistency of the orienting direction and the cutting direction.

[0014] The beneficial effect of adopting the above technical solution is that the directional slide rail and the cutting slide rail can ensure the consistency of the sample orientation and cutting direction, avoiding the problem of inaccurate cutting caused by direction error.

[0015] Furthermore, the sample corner stage comprises:

[0016] A slider, the slider can be slidably mounted on the directional slide rail or the cutting slide rail, a first tightening screw is screwed on the slider, the first tightening screw is in tight contact with the directional slide rail or the cutting slide rail, and then the slider is fixed on the directional slide rail or the cutting slide rail, the slider can be mounted on the driving disk of the delta angle automatic rotation driving mechanism, and the slider is fixed on the driving disk by tightening the first tightening screw against the driving disk;

[0017] A delta angle adjuster, wherein a delta base of the delta angle adjuster is fixed on the top of the slider;

[0018] A gamma angle adjuster, wherein the bottom end of the gamma base of the gamma angle adjuster is fixed to the top end of the delta angle platform of the delta angle adjuster;

[0019] a theta angle adjuster, wherein the theta angle stage of the theta angle adjuster is arranged on the gamma angle stage of the gamma angle adjuster;

[0020] A sample adjustment table, which is fixed to the top of the theta corner table and is used to adjust the position of the sample relative to the X-beam so that the sample is within the irradiation range of the X-beam;

[0021] Wherein, a gamma angle adjustment knob is provided on the gamma base, a theta angle adjustment knob is provided on the gamma rotation platform, and a driving adjustment rod on the gamma / theta angle automatic rotation driving mechanism can respectively drive the gamma angle adjustment knob and the theta angle adjustment knob to rotate, thereby respectively realizing automatic rotation angle correction of the gamma rotation platform and the theta rotation platform;

[0022] The gamma / theta angle automatic rotation drive mechanism is provided with a limit plate, and the limit plate is detachably connected to the sample adjustment table, so that the drive disk drives the delta base to rotate relative to the delta rotation table to achieve automatic correction of the delta angle.

[0023] The beneficial effects of the above technical solution are as follows: when the sample's orientation angle delta is corrected, the slider is first fixed to the drive disk by the first tightening screw, and then the sample adjustment table is fixed to the limit plate. The drive disk of the delta angle automatic rotation drive mechanism rotates to drive the delta base to rotate, thereby realizing the automatic correction of the delta angle; when the sample's orientation angle gamma / theta is corrected, the gamma angle adjustment knob and the theta angle adjustment knob are driven to rotate by driving the adjustment screw, thereby realizing the automatic angle correction of the gamma angle table and the theta angle table. Therefore, the angle correction does not require manual adjustment of the knob, which is not only efficient, but also has high correction accuracy.

[0024] Furthermore, a second tightening screw is provided on the delta base of the delta angle adjuster for tightening contact with the delta angle table of the delta angle adjuster, and the locking and relative rotation of the delta base and the delta angle table are switched by tightening or loosening the second tightening screw.

[0025] The beneficial effects of adopting the above technical solution are: tightening the second tightening screw can lock the delta base and the delta angle table, so that the two are fixedly connected, so that when the gamma angle table and the theta angle table are corrected for offset, the delta angle table will not be accidentally driven to rotate, that is, the correction of the delta angle will not be affected; when the second tightening screw is loosened, the delta base and the delta angle table can be relatively rotated. Connection, which is convenient for correcting the delta angle.

[0026] Furthermore, the delta angle automatic rotation drive mechanism includes a first base, a first drive motor, and the drive disk. The first drive motor is fixed on the first base, and the drive disk is rotatably installed on the first base. The drive end of the first drive motor is transmission-connected to the drive disk for driving the drive disk to rotate.

[0027] Furthermore, the gamma / theta angle automatic rotation driving mechanism comprises:

[0028] A second base, wherein a lifting plate of the second base is driven to lift by a driving screw handle, and the limiting plate is fixed on the top surface of the lifting plate;

[0029] A second driving motor is fixed on the bottom end surface of the lifting plate, and the driving end of the second driving motor is fixed with the driving adjustment rod.

[0030] The beneficial effects of the above technical solution are: the correction adjustment of the delta angle can be automatically realized by the first drive motor, and the correction adjustment of the gamma / theta angle can be automatically realized by the second drive motor, without manual adjustment, which not only has a high degree of automation, but also improves the efficiency and accuracy of angle correction. In addition, because the gamma angle adjustment knob and the theta angle adjustment knob are at different heights, the height of the lifting plate can be adjusted by rotating the drive screw handle, and then the height of the second drive motor can be adjusted, so that the drive adjustment rod on the second drive motor can drive the gamma angle adjustment knob and the theta angle adjustment knob respectively.

[0031] Furthermore, the driving adjustment rod is an external hexagonal rod, and the gamma angle adjustment knob and the theta angle adjustment knob are both provided with a hexagonal socket for the external hexagonal rod to be plugged into.

[0032] The beneficial effect produced by adopting the above technical solution is: during adjustment, the outer hexagonal driving adjustment rod is inserted into the hexagonal socket of the gamma angle adjustment knob or the theta angle adjustment knob, and then the driving adjustment rod is driven to rotate by the second driving motor, thereby driving the gamma angle adjustment knob or theta angle adjustment knob to rotate, thereby realizing automatic offset of the gamma angle table or theta angle table, and then realizing automatic correction and adjustment of the sample gamma angle and theta angle.

[0033] Furthermore, the sample conditioning platform comprises:

[0034] A mounting plate, the bottom end of which is fixed to the top end of the theta corner table, and the mounting plate is detachably connected to the limiting plate;

[0035] A level adjustment platform, wherein a first base of the level adjustment platform is fixed to the mounting plate;

[0036] A height adjustment platform, wherein the second base of the height adjustment platform is fixed on the horizontal slide platform of the horizontal adjustment platform;

[0037] A sample placement table, wherein the sample placement table is fixed on the height slide of the height adjustment table;

[0038] Wherein, the first base is provided with a horizontal adjustment knob for driving the horizontal slide to move horizontally, and the second base is provided with a height adjustment knob for driving the height slide to move vertically.

[0039] The beneficial effect of the above technical solution is that when cutting samples of different sizes and heights, sometimes the X-rays cannot irradiate the samples. At this time, the user can rotate the horizontal adjustment knob and the height adjustment knob to translate the position of the sample in a large range without adjusting the orientation angle, so that it is within the irradiation range of the X-ray beam. The total maximum adjustment range of the horizontal and vertical directions is 14mm.

[0040] Furthermore, the limiting plate has a slot, and the mounting plate is engaged with the slot.

[0041] The beneficial effect of adopting the above technical solution is that when correcting the delta angle, it is only necessary to snap the mounting plate into the slot, and the slot limits the mounting plate, that is, the limiting plate ensures that the sample adjustment table is fixed and does not rotate, so that the driving disk drives the delta base to rotate relative to the delta angle table to achieve the correction of the delta angle. After the correction is completed, it is only necessary to remove the mounting plate from the slot. Therefore, the snap-in structure between the limiting plate and the mounting plate can realize the rapid fixation of the sample adjustment table.

[0042] Furthermore, a positioning groove is provided on the bottom end surface of the sliding block, and a positioning boss is provided on the top end surface of the driving disk, and the positioning boss is positioned and plugged into the positioning groove.

[0043] The beneficial effect of adopting the above technical solution is: it is easy to quickly position and install the sample corner table on the driving disk, which not only realizes the rapid combination of the two, but also ensures the stability between the sample corner table and the driving disk, avoiding relative rotation between the two during adjustment and affecting the correction of the orientation angle.

[0044] The main advantages of the present invention are as follows:

[0045] 1. The delta angle automatic rotation drive mechanism 4 and the gamma / theta angle automatic rotation drive mechanism 5 are used to automatically correct the delta angle, gamma angle and theta angle, and the rotation angle accuracy can reach 0.001 degrees. Therefore, the system has high orientation angle correction efficiency and high accuracy, which greatly improves the quality of crystal orientation cutting;

[0046] 2. The sample placement table 364 is used to fine-tune the sample horizontally and vertically, which can ensure that when measuring samples of different sizes and heights, the sample can still be located within the irradiation range of the X-ray;

[0047] 3. By setting the orientation slide 6 and cutting slide 7 with the orientation direction consistent with the cutting direction, the precise crystal orientation angle can be obtained during the Laue diffraction process and directly applied to the cutting process, avoiding the problem of inaccurate cutting caused by direction error. At the same time, the wire cutting machine can be perfectly combined with the Laue diffractometer to achieve high-precision directional cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0049] Figure 1 This is a schematic diagram of the diffractometer provided by the present invention irradiating a single crystal sample with X-rays.

[0050] Figure 2 It is a schematic diagram of the first-person perspective when the sample rotation stage, the delta angle automatic rotation drive mechanism, and the gamma / theta angle automatic rotation drive mechanism cooperate.

[0051] Figure 3 It is a schematic diagram of a second viewing angle when the sample rotation stage, the delta angle automatic rotation drive mechanism, and the gamma / theta angle automatic rotation drive mechanism cooperate.

[0052] Figure 4 Schematic diagram of the first-person perspective of the sample corner stage.

[0053] Figure 5 Schematic diagram of the second viewing angle of the sample corner stage.

[0054] Figure 6 Schematic diagram of the structure of the sample conditioning platform.

[0055] Figure 7 Schematic diagram of pre-cutting of single crystal samples in an online cutting machine. DETAILED DESCRIPTION

[0056] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] like Figure 1-Figure 7As shown, the embodiment of the present invention discloses a single crystal rapid directional cutting system based on Laue diffractometer, comprising: a diffractometer 1, a wire cutting machine 2, a sample rotation stage 3, a delta angle automatic rotation driving mechanism 4, and a gamma / theta angle automatic rotation driving mechanism 5;

[0058] The X-ray beam of the diffractometer 1 irradiates the single crystal sample 100 located on the sample turning table 3 to obtain the orientation delta angle, gamma angle and theta angle of the sample;

[0059] The sample rotation stage 3 automatically realizes the correction of the delta angle of the single crystal sample through the delta angle automatic rotation driving mechanism 4, and the sample rotation stage 3 automatically realizes the correction of the gamma angle and theta angle of the single crystal sample through the gamma / theta angle automatic rotation driving mechanism 5;

[0060] The wire cutting machine 2 is used to perform orientation cutting on the single crystal sample after the orientation angle is corrected.

[0061] An orientation slide 6 is fixed on the workbench of the diffractometer 1, a cutting slide 7 is fixed on the workbench of the wire cutting machine 2, and the sample corner table 3 can be mounted on the orientation slide 6 or the cutting slide 7 to ensure the consistency of the orientation direction and the cutting direction.

[0062] Sample corner table 3 includes:

[0063] The slider 31 can be slidably mounted on the directional slide rail 6 or the cutting slide rail 7. The slider 31 is screwed with a first tightening screw 32. The first tightening screw 32 is in tight contact with the directional slide rail 6 or the cutting slide rail 7 to fix the slider 31 on the directional slide rail 6 or the cutting slide rail 7. The slider 31 can be mounted on the driving disk 43 of the delta angle automatic rotation driving mechanism 4, and is tightened with the driving disk 43 by the first tightening screw 32 to fix the slider 31 on the driving disk 43.

[0064] A delta angle adjuster 33, wherein a delta base 331 of the delta angle adjuster 33 is fixed on the top of the slider 31;

[0065] A gamma angle adjuster 34, wherein the bottom end of a gamma base 341 of the gamma angle adjuster 34 is fixed to the top end of a delta angle platform 332 of the delta angle adjuster 33;

[0066] a theta angle adjuster 35, wherein a theta angle stage 351 of the theta angle adjuster 35 is disposed on a gamma angle stage 342 of the gamma angle adjuster 34;

[0067] The sample adjustment table 36 is fixed on the top of the theta corner table 351 and is used to adjust the position of the sample 100 relative to the X-beam so that the sample 100 is located within the irradiation range of the X-beam;

[0068] Among them, a gamma angle adjustment knob 343 is provided on the gamma base 341, a theta angle adjustment knob 352 is provided on the gamma angle stage 342, and a driving adjustment rod 56 on the gamma / theta angle automatic angle driving mechanism 5 can respectively drive the gamma angle adjustment knob 343 and the theta angle adjustment knob 352 to rotate, thereby respectively realizing automatic angle correction of the gamma angle stage 342 and the theta angle stage 351;

[0069] The gamma / theta angle automatic rotation driving mechanism 5 is provided with a limit plate 54, which is detachably connected to the sample adjustment table 36, so that the driving disk 43 drives the delta base 331 to rotate relative to the delta rotation table 332 to achieve automatic correction of the delta angle.

[0070] See also Figure 4 As shown by the rotation arrows of the three directional angles, the rotation direction of the delta angle is the horizontal left and right rotation of the delta base 331 relative to the delta rotation table 332, the rotation direction of the gamma angle is the vertical X-ray rotation of the gamma rotation table 342, and the rotation direction of the theta angle is the pitch angle rotation of the theta rotation table 351.

[0071] A second tightening screw 37 is provided on the delta base 331 of the delta angle adjuster 33 for tightening contact with the delta angle platform 332 of the delta angle adjuster 33. By tightening or loosening the second tightening screw 37, the locking and relative rotation of the delta base 331 and the delta angle platform 332 are switched.

[0072] The delta angle automatic turning driving mechanism 4 includes a first base 41, a first driving motor 42, and a driving disk 43. The first driving motor 42 is fixed on the first base 41, and the driving disk 43 is rotatably installed on the first base 41. The driving end of the first driving motor 42 is transmission-connected to the driving disk 43 for driving the driving disk 43 to rotate.

[0073] The gamma / theta angle automatic rotation driving mechanism 5 comprises:

[0074] A second base 51, a lifting plate 52 of the second base 51 is driven to rise and fall by a driving screw handle 53, and a limiting plate 54 is fixed on the top surface of the lifting plate 52;

[0075] The second driving motor 55 is fixed on the bottom end surface of the lifting plate 52 , and a driving adjustment rod 56 is fixed on the driving end of the second driving motor 55 .

[0076] The driving adjustment rod 56 is an external hexagonal rod, and both the gamma angle adjustment knob 343 and the theta angle adjustment knob 352 are provided with a hexagonal socket 301 for the external hexagonal rod to be plugged into.

[0077] The sample conditioning station 36 includes:

[0078] A mounting plate 361, the bottom end of the mounting plate 361 is fixed to the top end of the theta corner stage 351, and the mounting plate 361 is detachably connected to the limiting plate 54;

[0079] A horizontal adjustment platform 362, wherein a first base 3621 of the horizontal adjustment platform 362 is fixed on the mounting plate 361;

[0080] A height adjustment platform 363, wherein a second base 3631 of the height adjustment platform 363 is fixed on a horizontal slide 3622 of the horizontal adjustment platform 362;

[0081] A sample placement table 364, the sample placement table 364 is fixed on the height slide 3632 of the height adjustment table 363;

[0082] The first base 3621 is provided with a horizontal adjustment knob 3623 for driving the horizontal slide 3622 to move horizontally, and the second base 3631 is provided with a height adjustment knob 3633 for driving the height slide 3632 to move vertically.

[0083] The limiting plate 54 has a slot 541 , and the mounting plate 361 is engaged with the slot 541 .

[0084] A positioning groove is formed on the bottom surface of the slider 31 , and a positioning boss is formed on the top surface of the driving disk 43 . The positioning boss is inserted into the positioning groove for positioning.

[0085] Relevant description of some devices in the present invention:

[0086] The Laue diffractometer is a precision device used for single crystal orientation and crystal structure analysis. Its basic structure includes an X-ray source, a sample stage, a detector, and a data processing system. The X-ray source emits a polychromatic X-ray beam. When it passes through a single crystal sample on the sample stage, the atomic structure inside the crystal causes some of the X-rays to diffract. These diffracted X-rays are captured by the detector and form a diffraction pattern, which can quickly determine the orientation of the crystal, thereby guiding subsequent cutting operations.

[0087] The present invention uses a Laue diffractometer (model TRY-IPX-LC) produced by Japan's TRY SE company, which is a precision device designed specifically for determining the orientation of single crystal samples. The TRY-IPX-LC model Laue diffractometer has the characteristics of high precision and high stability, and can obtain clear diffraction patterns in a short time to ensure the accuracy of single crystal orientation. The X-ray source of the instrument has adjustable energy and intensity, the sample stage can be precisely adjusted in angle, and the detector has the characteristics of high sensitivity and high resolution. In addition, this model of Laue diffractometer is also equipped with an advanced data processing system that can quickly analyze and interpret diffraction patterns and provide detailed crystal structure and orientation information.

[0088] In order to solve the problem of single crystal precision cutting, the present invention introduces an advanced diamond wire cutting machine (Shenyang Science and Technology Industry STX-202AQ), which uses fine diamond cutting wires and runs at extremely high speeds to accurately cut hard materials while maintaining the structural integrity of the material. The use of diamond wires minimizes material loss and microcracks that may occur during the cutting process.

[0089] Wire cutting equipment mainly consists of a wire supply system, a tensioning device, a conveying system and an electronic control system. The cutting wire is tensioned between two guide wheels and moves at high speed driven by a motor. During the cutting process, a special cutting fluid is continuously injected between the cutting wire and the material being cut. This cutting fluid not only has a cooling effect, but also helps remove the debris generated during the cutting process and reduces the wear during the wire cutting process.

[0090] The delta angle adjuster 33 , the gamma angle adjuster 34 , and the theta angle adjuster 35 are all purchased existing products, and are assembled with the self-developed sample adjustment table 36 to form the sample rotation table 3 of the present invention.

[0091] The system works as follows:

[0092] 1. Use diffractometer to measure sample orientation angle:

[0093] The slider 31 on the sample corner stage 3 is fixed to the directional slide rail 6 by the first tightening screw 32, and the position of the sample is adjusted horizontally and vertically by rotating the horizontal adjustment knob 3623 and the height adjustment knob 3633 so that the sample can be located within the irradiation range of the X-beam, and then the diffractometer obtains the directional delta angle, gamma angle and theta angle of the single crystal sample;

[0094] 2. Automatic correction of orientation angle:

[0095] When the sample's orientation angle delta is corrected, the slider 31 is first fixed to the drive disk 43 by the first tightening screw 32, and then the mounting plate 361 is fixed in the slot 541 of the limit plate 54, and then the second tightening screw 37 is loosened, and the first drive motor 42 drives the drive disk 43 to rotate, thereby driving the delta base 331 to rotate, so as to realize the automatic correction of the delta angle; when the sample's orientation angle gamma is corrected, the mounting plate 361 is removed from the slot 541, and the height of the lifting plate 52 is adjusted by rotating the drive screw handle 53, so as to make the drive adjustment The section rod 56 can be inserted into the gamma angle adjustment knob 343, and then the second drive motor 55 drives the drive adjustment rod 56 to rotate, thereby rotating the gamma angle stage 342 to achieve the correction of the gamma angle; when the orientation angle theta angle of the sample is corrected, the drive screw handle 53 is rotated again to adjust the height of the lifting plate 52, so that the drive adjustment rod 56 can be inserted into the theta angle adjustment knob 352, and then the second drive motor 55 drives the drive adjustment rod 56 to rotate, thereby rotating the theta angle stage 351 to achieve the correction of the theta angle;

[0096] 3. Directional cutting:

[0097] The calibrated sample corner table is installed on the cutting slide rail 7 through the slider 31, and the wire cutting machine 2 is used to perform directional cutting on the sample.

[0098] After the above step 2, the calibrated sample corner stage can be put back into the diffractometer to verify the calibrated orientation angle. If there is no problem with the verification, proceed to step 3 cutting.

[0099] The present invention aims to solve the technical difficulties faced by single crystal directional cutting, and discloses a single crystal rapid directional cutting system based on Laue diffractometer. The conventional method is to find the cleavage plane by breaking the crystal and perform subsequent performance tests. Although this method is effective in some cases, it may cause damage to the crystal structure, which limits the application range of the product, and it is also difficult to know the direction of other specific crystal planes. The improved automated orientation technology can accurately locate the required cutting direction, even if this direction is not the natural cleavage plane of the crystal. In terms of orientation, by introducing an automated system, especially an automatic corner system, the traditional trial and error is avoided by increasing the speed of operation and reducing the error value, and the orientation efficiency is significantly improved. In terms of cutting, due to the introduction of high-precision diamond wire cutting equipment, the orientation and cutting equipment are highly accurately adapted, and the user can directly move the sample to the wire cutting equipment after orientation for accurate cutting. Not only does it avoid the uncertainty of determining the direction by finding the cleavage plane, but it also prevents repeated rework due to wrong cutting angles. In summary, the present invention successfully solves the technical difficulties faced by single crystal directional cutting, can accurately and efficiently orient and cut single crystals in any direction, and provides strong support for the research and application of single crystal materials.

[0100] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0101] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single crystal rapid directional cutting system based on Laue diffractometer, characterized in that: include: Diffractometer (1), wire cutting machine (2), sample rotation stage (3), delta angle automatic rotation drive mechanism (4), gamma / theta angle automatic rotation drive mechanism (5); The X-ray beam of the diffractometer (1) irradiates the single crystal sample (100) located on the sample rotation stage (3) to obtain the orientation delta angle, gamma angle and theta angle of the sample; The sample rotation stage (3) automatically realizes the correction of the delta angle of the single crystal sample through the delta angle automatic rotation drive mechanism (4), and the sample rotation stage (3) automatically realizes the correction of the gamma angle and theta angle of the single crystal sample through the gamma / theta angle automatic rotation drive mechanism (5); The wire cutting machine (2) is used for directional cutting of single crystal samples after the orientation angle is corrected.

2. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 1, characterized in that: An oriented slide rail (6) is fixed on the workbench of the diffractometer (1), a cutting slide rail (7) is fixed on the workbench of the wire cutting machine (2), and the sample corner table (3) can be mounted on the oriented slide rail (6) or the cutting slide rail (7) to ensure the consistency of the oriented direction and the cutting direction.

3. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 2, characterized in that: The sample corner stage (3) comprises: A slider (31), the slider (31) can be slidably mounted on the directional slide rail (6) or the cutting slide rail (7), a first tightening screw (32) is screwed on the slider (31), the first tightening screw (32) is in tight contact with the directional slide rail (6) or the cutting slide rail (7), and the slider (31) is fixed on the directional slide rail (6) or the cutting slide rail (7), the slider (31) can be mounted on the driving disk (43) of the delta angle automatic rotation angle driving mechanism (4), and the first tightening screw (32) is pressed against the driving disk (43) to fix the slider (31) on the driving disk (43); A delta angle adjuster (33), wherein a delta base (331) of the delta angle adjuster (33) is fixed on the top of the slider (31); A gamma angle adjuster (34), wherein the bottom end of a gamma base (341) of the gamma angle adjuster (34) is fixed to the top end of a delta angle platform (332) of the delta angle adjuster (33); A theta angle adjuster (35), wherein the theta angle platform (351) of the theta angle adjuster (35) is arranged on the gamma angle platform (342) of the gamma angle adjuster (34); A sample adjustment platform (36), the sample adjustment platform (36) being fixed on the top of the theta angle platform (351) and being used for adjusting the position of the sample (100) relative to the X-ray beam so that the sample (100) is located within the irradiation range of the X-ray beam; The gamma base (341) is provided with a gamma angle adjustment knob (343), the gamma rotation angle platform (342) is provided with a theta angle adjustment knob (352), and the driving adjustment rod (56) on the gamma / theta angle automatic rotation angle driving mechanism (5) can respectively drive the gamma angle adjustment knob (343) and the theta angle adjustment knob (352) to rotate, thereby respectively realizing automatic rotation angle correction of the gamma rotation angle platform (342) and the theta rotation angle platform (351); The gamma / theta angle automatic rotation drive mechanism (5) is provided with a limit plate (54), and the limit plate (54) is detachably connected to the sample adjustment platform (36), so that the drive disk (43) drives the delta base (331) to rotate relative to the delta rotation platform (332), thereby realizing automatic correction of the delta angle.

4. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 3, characterized in that: A second tightening screw (37) is provided on the delta base (331) of the delta angle adjuster (33) for tightening contact with the delta rotation angle platform (332) of the delta angle adjuster (33). By tightening or loosening the second tightening screw (37), the locking and relative rotation of the delta base (331) and the delta rotation angle platform (332) are switched.

5. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 3, characterized in that: The delta angle automatic rotation driving mechanism (4) comprises a first base (41), a first driving motor (42), and a driving disk (43); the first driving motor (42) is fixed on the first base (41); the driving disk (43) is rotatably mounted on the first base (41); a driving end of the first driving motor (42) is drivingly connected to the driving disk (43) for driving the driving disk (43) to rotate.

6. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 3, characterized in that: The gamma / theta angle automatic rotation driving mechanism (5) comprises: A second base (51), a lifting plate (52) of the second base (51) is driven to lift by a driving screw handle (53), and the limiting plate (54) is fixed on the top surface of the lifting plate (52); A second driving motor (55), wherein the second driving motor (55) is fixed on the bottom end surface of the lifting plate (52), and the driving adjustment rod (56) is fixed on the driving end of the second driving motor (55).

7. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 6, characterized in that: The driving adjustment rod (56) is an external hexagonal rod, and the gamma angle adjustment knob (343) and the theta angle adjustment knob (352) are both provided with a hexagonal socket (301) for the external hexagonal rod to be plugged into.

8. A single crystal rapid directional cutting system based on Laue diffractometer according to any one of claims 3 to 7, characterized in that: The sample conditioning station (36) comprises: A mounting plate (361), the bottom end of the mounting plate (361) being fixed to the top end of the theta corner platform (351), and the mounting plate (361) being detachably connected to the limiting plate (54); A horizontal adjustment platform (362), wherein a first base (3621) of the horizontal adjustment platform (362) is fixed on the mounting plate (361); A height adjustment platform (363), wherein a second base (3631) of the height adjustment platform (363) is fixed on a horizontal slide platform (3622) of the horizontal adjustment platform (362); A sample placement platform (364), wherein the sample placement platform (364) is fixed on a height slide (3632) of the height adjustment platform (363); Wherein, the first base (3621) is provided with a horizontal adjustment knob (3623) for driving the horizontal slide (3622) to move horizontally, and the second base (3631) is provided with a height adjustment knob (3633) for driving the height slide (3632) to move vertically.

9. The single crystal rapid directional cutting system based on Laue diffractometer according to claim 8, characterized in that: The limiting plate (54) has a slot (541), and the mounting plate (361) is snap-connected with the slot (541).

10. A single crystal rapid directional cutting system based on Laue diffractometer according to any one of claims 3 to 7 and 9, characterized in that: A positioning groove is provided on the bottom end surface of the sliding block (31), and a positioning boss is provided on the top end surface of the driving disk (43), and the positioning boss is inserted into the positioning groove for positioning.

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