Control method of vacuum conveying system, vacuum conveying system and storage medium

Abstract

The application provides a control method of a vacuum conveying system, the vacuum conveying system and a storage medium. The vacuum conveying system comprises an isolation valve, a main chamber, an exchange bin, an exchange bin vacuum pump set and a main chamber vacuum pump set, the exchange bin is connected with the main chamber through the isolation valve, and the control method of the vacuum conveying system comprises the following steps: reducing the air pressure of the main chamber by the main chamber vacuum pump set, so that the air pressure of the main chamber is less than a first air pressure threshold; reducing the air pressure of the exchange bin by the exchange bin vacuum pump set, so that the air pressure of the exchange bin is less than a second air pressure threshold; and controlling the isolation valve to be opened, so that a conveying device in the exchange bin conveys a sample to the main chamber. According to the method provided by the application, the air pressure of the main chamber is only slightly changed each time when the sample is conveyed, the time for vacuumizing the main chamber each time when the sample is conveyed can be reduced, the influence of gas as a temperature carrier on the equipment in the main chamber is also reduced through less gas exchange, and therefore the stability and conveying efficiency of the vacuum conveying can be improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of vacuum conveying, and particularly relates to a control method of a vacuum conveying system, the vacuum conveying system and a storage medium. BACKGROUND

[0002] Vacuum conveying is a technology for material handling and sample transmission in a vacuum environment, and is widely applied in the fields of semiconductor manufacturing, flat panel display manufacturing, aerospace, biomedicine and the like. At present, there are multiple ways for sample transmission in a vacuum environment, but the stability and conveying efficiency of vacuum conveying are poor. Therefore, how to improve the stability and conveying efficiency of vacuum conveying is a problem to be solved. SUMMARY

[0003] In view of the problems existing in the prior art, the present application provides a control method of a vacuum conveying system, the vacuum conveying system and a storage medium. The control method of the vacuum conveying system, the vacuum conveying system and the storage medium can improve the stability and conveying efficiency of vacuum conveying.

[0004] The present application provides the following solutions.

[0005] In a first aspect, the present application provides a control method of a vacuum conveying system. The vacuum conveying system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group and a main chamber vacuum pump group. The exchange chamber is connected with the main chamber through the isolation valve. The method comprises the following steps:

[0006] The air pressure of the main chamber is reduced by the main chamber vacuum pump group, so that the air pressure of the main chamber is less than a first air pressure threshold;

[0007] The air pressure of the exchange chamber is reduced by the exchange chamber vacuum pump group, so that the air pressure of the exchange chamber is less than a second air pressure threshold;

[0008] The isolation valve is controlled to be opened, so that a conveying device in the exchange chamber conveys a sample to the main chamber.

[0009] In some possible embodiments, the volume of the main chamber is greater than the volume of the exchange chamber, and the first air pressure threshold is less than the second air pressure threshold.

[0010] In some possible embodiments, the main chamber vacuum pump group comprises a main chamber connection pump, a main chamber fore pump, a main chamber fore valve and a main chamber vacuum gauge.

[0011] The first end of the main chamber connection pump is communicated with the main chamber. The main chamber fore pump is connected with the second end of the main chamber connection pump through the main chamber fore valve.

[0012] The main chamber vacuum gauge is communicated with the main chamber, and is used for measuring the air pressure in the main chamber.

[0013] In some possible embodiments, the pressure in the main chamber is reduced to be less than the first pressure threshold by the main chamber vacuum pump set, comprising:

[0014] opening the main chamber backing valve and starting the main chamber backing pump;

[0015] starting the main chamber connection pump when the main chamber vacuum gauge indicates that the pressure in the main chamber is less than or equal to the third pressure threshold until the pressure in the main chamber is less than the first pressure threshold.

[0016] In some possible embodiments, the main chamber vacuum pump set further comprises: a main chamber vent valve, a first end of the main chamber vent valve being connected to the main chamber, and a second end of the main chamber vent valve being connected to nitrogen;

[0017] Before starting the main chamber backing pump, the method further comprises:

[0018] closing the main chamber vent valve;

[0019] After the main chamber is used, the method further comprises:

[0020] controlling the main chamber vent valve to repeatedly open and close so that nitrogen enters the main chamber.

[0021] In some possible embodiments, the exchange chamber vacuum pump set comprises: an exchange chamber connection pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber backing valve, and an exchange chamber backing pump;

[0022] a first end of the exchange chamber connection pump being connected to the exchange chamber, and a second end of the exchange chamber connection pump being connected to the exchange chamber backing pump through the exchange chamber backing valve;

[0023] a first end of the exchange chamber vacuum gauge being connected to the exchange chamber, and the exchange chamber vacuum gauge being used to measure the pressure in the exchange chamber;

[0024] a first end of the bypass valve being connected to the first end of the exchange chamber vacuum gauge, and a second end of the bypass valve being connected to the second end of the exchange chamber connection pump.

[0025] In some possible embodiments, the pressure in the exchange chamber is reduced to be less than the second pressure threshold by the exchange chamber vacuum pump set, comprising:

[0026] opening the exchange chamber backing valve and the bypass valve and starting the exchange chamber backing pump;

[0027] starting the exchange chamber connection pump when the exchange chamber vacuum gauge indicates that the pressure in the exchange chamber is less than or equal to the fourth pressure threshold;

[0028] closing the bypass valve when the exchange chamber vacuum gauge indicates that the pressure in the exchange chamber is less than or equal to the fifth pressure threshold and the rotation speed of the exchange chamber connection pump is greater than the rotation speed threshold until the pressure in the exchange chamber is less than the second pressure threshold.

[0029] In some possible embodiments, the exchange chamber vacuum pump group further comprises an exchange chamber vent valve;

[0030] The first end of the exchange chamber vent valve is connected to the first end of the bypass valve, and the second end of the exchange chamber vent valve is communicated with nitrogen;

[0031] Before starting the exchange chamber backing pump, the method further comprises:

[0032] The main chamber vent valve is closed;

[0033] After the exchange chamber is used up, the method further comprises:

[0034] The exchange chamber vent valve is opened.

[0035] In some possible embodiments, the lower part of the main chamber is provided with an active damping device.

[0036] In a second aspect, the present application provides a vacuum transfer system, characterized in that the vacuum transfer system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump group and a main chamber vacuum pump group, the exchange chamber is connected to the main chamber through the isolation valve;

[0037] The main chamber vacuum pump group is used to reduce the air pressure of the main chamber, so that the air pressure of the main chamber is less than the first air pressure threshold;

[0038] The exchange chamber vacuum pump group is used to reduce the air pressure of the exchange chamber, so that the air pressure of the exchange chamber is less than the second air pressure threshold;

[0039] The isolation valve is used to make the transfer device in the exchange chamber transfer the sample to the main chamber when the isolation valve is opened.

[0040] In a third aspect, the present application provides a computer readable storage medium, which stores a program, when the program is executed by a multi-core processor, the multi-core processor executes the control method of the vacuum transfer system described above.

[0041] The control method of the vacuum transfer system provided by the embodiments of the present application reduces the air pressure of the main chamber through the main chamber vacuum pump group, reduces the air pressure of the exchange chamber through the exchange chamber vacuum pump group, and then opens the isolation valve to make the transfer device in the exchange chamber transfer the sample to the main chamber. In this way, the control method of the vacuum transfer system provided by the embodiments of the present application only changes the air pressure of the main chamber by a small amount each time the sample is transferred, which can reduce the time for vacuumizing the main chamber each time the sample is transferred, and through less gas exchange, the influence of gas as a temperature carrier on the equipment in the main chamber is also reduced, thereby improving the stability and transfer efficiency of the vacuum transfer.

[0042] Other advantages of the present application will be described in more detail in conjunction with the following description and drawings.

[0043] It should be understood that the above description is merely a summary of the technical solutions of the present application, so as to enable a clearer understanding of the technical means of the present application, and thus the content of the specification can be implemented. In order to make the above and other purposes, features and advantages of the present application more apparent and comprehensible, the following specific embodiments of the present application are described by way of example. BRIEF DESCRIPTION OF DRAWINGS

[0044] The advantages and benefits described herein, as well as other advantages and benefits, will be apparent to those of ordinary skill in the art upon reading the following detailed description of exemplary embodiments. The drawings are for purposes of illustrating exemplary embodiments and are not to be construed as limiting the present application. In the drawings:

[0045] Figure 1 A schematic diagram of a vacuum transfer system according to an embodiment of the present application;

[0046] Figure 2 A flowchart of a control method according to an embodiment of the present application;

[0047] Figure 3 A schematic diagram of another vacuum transfer system according to an embodiment of the present application;

[0048] Figure 4 A schematic diagram of a vacuum transfer system according to an embodiment of the present application;

[0049] In the drawings, the components represented by the same reference numerals represent the same or corresponding parts.

[0050] Isolation valve 100; main chamber 200; exchange chamber 300; exchange chamber vacuum pump set 400; exchange chamber connection pump 401; exchange chamber vacuum gauge 402; bypass valve 403; exchange chamber foreline valve 404; exchange chamber foreline pump 405; exchange chamber gas release valve 406; main chamber vacuum pump set 500; main chamber connection pump 501; main chamber foreline pump 502; main chamber foreline valve 503; main chamber vacuum gauge 504; main chamber gas release valve 505.

[0051] In the drawings, the same or corresponding reference numerals represent the same or corresponding parts. DETAILED DESCRIPTION

[0052] The exemplary embodiments of the present application will be described in detail with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms, and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided so that the present application can be more thoroughly understood, and the scope of the present application can be accurately conveyed to those skilled in the art.

[0053] In the description of the embodiments of the application, it should be understood that terms such as "including" or "having" are intended to indicate that there exist the disclosed features, numbers, steps, actions, components, parts or combinations thereof in the specification, and do not exclude the possibility that one or more other features, numbers, steps, actions, components, parts or combinations thereof exist.

[0054] Unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this article only describes the relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone.

[0055] The terms "first", "second" and the like are only used to distinguish the same or similar technical features, and cannot be understood as indicating or implying relative importance or quantity of the technical features. Therefore, the features defined by "first", "second" and the like can explicitly or implicitly include one or more such features. In the description of the embodiments of the application, unless otherwise specified, the meaning of the term "multiple" is two or more than two.

[0056] In addition, it should be further pointed out that the embodiments in the application and the features in the embodiments can be combined with each other without conflict. The application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0057] As shown in Figure 1 The vacuum conveying system provided by the embodiments of the application includes an isolation valve 100, a main chamber 200, an exchange bin 300, an exchange bin vacuum pump set 400 and a main chamber vacuum pump set 500. The exchange bin is connected with the main chamber through the isolation valve. The vacuum conveying system provided by the embodiments of the application can be applied to the medical field, and can also be applied to other technical fields, which are not limited herein by the embodiments of the application.

[0058] Referring to Figure 2 , the figure is a flow chart of a control method of a vacuum conveying system provided by the embodiments of the application.

[0059] As shown in Figure 2 The control method of the vacuum conveying system provided by the embodiments of the application includes:

[0060] S201: Reduce the air pressure of the main chamber by the main chamber vacuum pump set, so that the air pressure of the main chamber is less than the first air pressure threshold.

[0061] In actual application, the main chamber vacuum control unit in the embodiments of the application can reduce the air pressure of the main chamber by the main chamber vacuum pump set, so that the air pressure of the main chamber is less than the first air pressure threshold. As Figure 3As shown, the main chamber vacuum pump set 500 provided by the embodiment of the present application can include a main chamber connecting pump 501, a main chamber backing pump 502, a main chamber backing valve 503, and a main chamber vacuum gauge 504. The first end of the main chamber connecting pump 501 is connected to the main chamber 200, and the second end of the main chamber connecting pump 501 is connected to the main chamber backing pump 502 through the main chamber backing valve 503. The main chamber vacuum gauge 504 is connected to the main chamber 200, and is used to measure the air pressure in the main chamber 200.

[0062] In the process of performing step S201, the embodiment of the present application can first open the main chamber backing valve 503 and start the main chamber backing pump 502. At this time, the main chamber backing pump 502 will quickly pump the main chamber 200. When the main chamber vacuum gauge 504 indicates that the air pressure in the main chamber 200 is less than or equal to the third air pressure threshold, the main chamber connecting pump 501 is started. At this time, the main chamber backing pump 502 and the main chamber connecting pump 501 jointly pump the main chamber until the air pressure in the main chamber 200 is less than the first air pressure threshold. The first air pressure threshold is usually less than the third air pressure threshold. As an example, the third air pressure threshold can be between 150 pa and 100 pa, and the first air pressure threshold can be about 0.0004 pa.

[0063] In the embodiment of the present application, the main chamber vacuum pump set 500 can also include a main chamber vent valve 505. The first end of the main chamber vent valve 505 is connected to the main chamber 200, and the second end of the main chamber vent valve 505 is connected to nitrogen. The main chamber vent valve 505 is usually used to open the main chamber vent valve 505 to allow nitrogen to enter the main chamber 200 after the main chamber is used, so as to balance the air pressure in the main chamber 200. Before starting the main chamber backing pump 502, the embodiment of the present application can close the main chamber vent valve 505 to avoid affecting the vacuum pumping process of the main chamber 200.

[0064] S202: Reduce the air pressure of the exchange chamber through the exchange chamber vacuum pump set, so that the air pressure of the exchange chamber is less than the second air pressure threshold.

[0065] In actual application, the exchange chamber vacuum control unit in the embodiment of the present application can reduce the air pressure of the exchange chamber through the exchange chamber vacuum pump set, so that the air pressure of the exchange chamber is less than the second air pressure threshold. For example, Figure 3As shown, in the embodiment of the present application, the exchange chamber vacuum pump group 400 can include an exchange chamber connecting pump 401, an exchange chamber vacuum gauge 402, a bypass valve 403, an exchange chamber fore pump 404, and an exchange chamber fore pump 405. The first end of the exchange chamber connecting pump 401 is connected to the exchange chamber 300, and the second end of the exchange chamber connecting pump 401 is connected to the exchange chamber fore pump 405 through the exchange chamber fore pump 404. The first end of the exchange chamber vacuum gauge 402 is connected to the exchange chamber 300, and the exchange chamber vacuum gauge 402 is used to measure the air pressure in the exchange chamber 300. The first end of the bypass valve 403 is connected to the first end of the exchange chamber vacuum gauge 402, and the second end of the bypass valve 403 is connected to the second end of the exchange chamber connecting pump 401.

[0066] In the process of executing step S202, the exchange chamber fore pump 404 and the bypass valve 403 can be opened first, and the exchange chamber fore pump 405 can be started. At this time, the exchange chamber fore pump 405 will quickly pump the exchange chamber 300. When the exchange chamber vacuum gauge 402 indicates that the air pressure in the exchange chamber 300 is less than or equal to the fourth air pressure threshold, the exchange chamber connecting pump 401 is started. When the exchange chamber vacuum gauge 402 indicates that the air pressure in the exchange chamber 300 is less than or equal to the fifth air pressure threshold and the rotation speed of the exchange chamber connecting pump 401 is greater than the rotation speed threshold, the bypass valve 403 is closed until the air pressure in the exchange chamber is less than the second air pressure threshold. It should be noted that the second air pressure value is usually less than the fifth air pressure value, and the fifth air pressure value is usually less than the fourth air pressure value. As an example, the fifth air pressure value can be about 100 pa, and the second air pressure value can be about 0.0004 pa. The rotation speed threshold can be about 80 revolutions, and according to the volume of the exchange chamber and the model of the exchange chamber connecting pump, the rotation speed threshold can be other values, which are not limited in the embodiment of the present application.

[0067] In some possible embodiments, the exchange chamber vacuum pump group can further include an exchange chamber vent valve 406. The first end of the exchange chamber vent valve 406 is connected to the first end of the bypass valve 403, and the second end of the exchange chamber vent valve 406 is connected to nitrogen. The exchange chamber vent valve 406 is usually used to open the exchange chamber vent valve to make nitrogen enter the exchange chamber 300 after the exchange chamber is used, so as to balance the air pressure in the exchange chamber. In the embodiment of the present application, the main chamber vent valve 406 can be closed before the exchange chamber fore pump 405 is started, so as to avoid the influence of the exchange chamber vent valve 406 on the vacuum pumping process of the exchange chamber 300.

[0068] It should be noted that the bypass valve is arranged in the exchange chamber vacuum pump group corresponding to the exchange chamber, and when the exchange chamber front stage pump is just started, the bypass valve is in an open state, so that the exchange chamber front stage pump can be connected to the exchange chamber through two channels, so that the air pressure in the exchange chamber can be rapidly reduced. When the air pressure in the exchange chamber indicated by the exchange chamber vacuum gauge is less than or equal to the fifth air pressure threshold value and the rotation speed of the exchange chamber connecting pump is greater than the rotation speed threshold value, the bypass valve is closed to further reduce the air pressure in the exchange chamber. In this way, the time for vacuumizing the exchange chamber can be improved, and since the exchange chamber needs to be vacuumized every time the sample is transferred, the method provided in the embodiment of the present application can improve the transfer efficiency.

[0069] S203: Control the isolation valve to open, and make the transfer device in the exchange chamber transfer the sample to the main chamber.

[0070] It should be noted that the volume of the main chamber in the embodiment of the present application is generally greater than the volume of the exchange chamber, and the first air pressure threshold value corresponding to the main chamber is generally slightly less than the second air pressure threshold value corresponding to the exchange chamber. Therefore, the control method of the vacuum transfer system provided in the embodiment of the present application can only slightly change the air pressure of the main chamber every time the sample is transferred, which can reduce the time for vacuumizing the main chamber every time the sample is transferred. After the main chamber is used, the main chamber can be repeatedly cycled to open and close the vent valve, so that the nitrogen can slowly enter the main chamber. After the exchange chamber is used, the exchange chamber can be opened to make the nitrogen enter the exchange chamber. The active damping device arranged at the lower part of the main chamber can further reduce the vibration in the main chamber and improve the stability of the vacuum transfer.

[0071] The control method of the vacuum transfer system provided in the embodiment of the present application can reduce the air pressure of the main chamber through the main chamber vacuum pump group, and reduce the air pressure of the exchange chamber through the exchange chamber vacuum pump group, and then open the isolation valve to make the transfer device in the exchange chamber transfer the sample to the main chamber. In this way, the control method of the vacuum transfer system provided in the embodiment of the present application can reduce the time for vacuumizing the main chamber every time the sample is transferred, and through less gas exchange, the influence of the gas as a temperature carrier on the equipment in the main chamber is also reduced, so that the stability and transfer efficiency of the vacuum transfer can be improved.

[0072] In the description of the specification, the description made with reference to the terms "some possible embodiments", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application, and the above terms do not necessarily represent the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0073] With regard to the method flowchart of the embodiments of the present application, certain operations are described as different steps executed in a sequence. Such flowcharts are illustrative rather than limiting. Certain steps described herein can be grouped together and executed in a single operation, or certain steps can be split into multiple sub-steps, and certain steps can be executed in an order different from that shown herein. Each step shown in the flowchart can be implemented in any manner by any circuit structure and / or tangible mechanism (for example, by software running on a computer device, hardware (for example, processor or chip-implemented logic functions), etc., and / or any combination thereof) in any way.

[0074] The person skilled in the art can understand that in the method described in the above specific embodiments, the writing order of each step does not mean a strict execution order, and the specific execution order of each step should be determined by its function and possible inherent logic.

[0075] According to the control method of the vacuum conveying system provided in the above embodiments, the embodiments of the present application also provide a vacuum conveying system.

[0076] As shown in Figure 4 The vacuum conveying system provided by the embodiments of the present application includes an isolation valve 100, a main chamber 200, an exchange bin 300, an exchange bin vacuum pump group 400 and a main chamber vacuum pump group 500. The exchange bin 300 is connected to the main chamber 200 through the isolation valve 100. The main chamber vacuum pump group 500 is used to reduce the air pressure of the main chamber 200, so that the air pressure of the main chamber 200 is less than the first air pressure threshold. The exchange bin vacuum pump group 400 is used to reduce the air pressure of the exchange bin 300, so that the air pressure of the exchange bin 300 is less than the second air pressure threshold. The isolation valve 100 is used to make the conveying device in the exchange bin 300 convey the sample to the main chamber 200 when it is opened.

[0077] As a possible embodiment, the volume of the main chamber is greater than the volume of the exchange bin, and the first air pressure threshold is less than the second air pressure threshold.

[0078] In some possible embodiments, the main chamber vacuum pump group comprises: a main chamber connecting pump, a main chamber backing pump, a main chamber backing valve and a main chamber vacuum gauge; a first end of the main chamber connecting pump is communicated with the main chamber; the main chamber backing pump is connected to a second end of the main chamber connecting pump through the main chamber backing valve; and the main chamber vacuum gauge is communicated with the main chamber and is used to measure the air pressure in the main chamber.

[0079] In some possible embodiments, the main chamber vacuum pump group further comprises: a main chamber vent valve; a first end of the main chamber vent valve is communicated with the main chamber; and a second end of the main chamber vent valve is communicated with nitrogen.

[0080] In some possible embodiments, the exchange chamber vacuum pump group comprises: an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber backing valve and an exchange chamber backing pump; a first end of the exchange chamber connecting pump is communicated with the exchange chamber; the exchange chamber backing pump is connected to a second end of the exchange chamber connecting pump through the exchange chamber backing valve; a first end of the exchange chamber vacuum gauge is communicated with the exchange chamber, and the exchange chamber vacuum gauge is used to measure the air pressure in the exchange chamber; a first end of the bypass valve is connected to the first end of the exchange chamber vacuum gauge; and a second end of the bypass valve is connected to the second end of the exchange chamber connecting pump.

[0081] In some possible embodiments, the exchange chamber vacuum pump group further comprises: an exchange chamber vent valve; a first end of the exchange chamber vent valve is connected to the first end of the bypass valve; and a second end of the exchange chamber vent valve is communicated with nitrogen.

[0082] In some possible embodiments, the main chamber lower portion is provided with a main active damping device.

[0083] It should be noted that the vacuum conveying system in the embodiments of the present application can implement each process of the embodiments of the control method of the vacuum conveying system described above, and achieve the same effects and functions, which will not be described here.

[0084] According to some embodiments of the present application, a control device of a vacuum conveying system according to an embodiment of the present application is provided, which is used to execute Figure 2 The control method of the vacuum conveying system shown in the figure, the device comprises: at least one processor; and a memory connected in communication with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to execute the method described in the above embodiments.

[0085] According to some embodiments of the present application, a non-volatile computer storage medium of a control method of a vacuum conveying system is provided, and the computer executable instructions are stored on the non-volatile computer storage medium, and the computer executable instructions are set to execute the control method of the vacuum conveying system described in the above embodiments when executed by a processor.

[0086] Computer-readable media includes permanent and non-permanent, movable and non-movable media that can implement information storage by any method or technology. The information can be computer-readable instructions, data structures, program modules or other data. Examples of computer-readable storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory, read-only memory, electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile disc (DVD) or other optical storage, magnetic cassette, magnetic tape disk storage or other magnetic storage devices, or any other non-transmission medium that can be used to store information accessible by a computing device. In addition, although the operations of the methods of the present application are described in a particular order in the accompanying drawings, this does not require or imply that the operations must be performed in that particular order, or that all of the shown operations must be performed to achieve the desired result. In addition, certain steps can be omitted, combined into one step, and / or divided into multiple sub-steps.

[0087] Although the spirit and principles of the present application have been described above with reference to several specific embodiments, it should be understood that the present application is not limited to the disclosed specific embodiments, and the division of aspects does not mean that the features in these aspects cannot be combined. The present application is intended to cover various modifications and equivalent arrangements included in the spirit and scope of the appended claims.

Claims

1. A control method of a vacuum transfer system, characterized by, The vacuum conveying system comprises an isolation valve, a main chamber, an exchange chamber, an exchange chamber vacuum pump set and a main chamber vacuum pump set, the exchange chamber is connected with the main chamber through the isolation valve, the exchange chamber vacuum pump set comprises an exchange chamber connecting pump, an exchange chamber vacuum gauge, a bypass valve, an exchange chamber gas release valve, an exchange chamber front stage valve and an exchange chamber front stage pump, a first end of the exchange chamber connecting pump is communicated with the exchange chamber, the exchange chamber front stage pump is connected with a second end of the exchange chamber connecting pump through the exchange chamber front stage valve, a first end of the exchange chamber vacuum gauge is communicated with the exchange chamber, and the exchange chamber vacuum gauge is used for measuring the air pressure in the exchange chamber, a first end of the bypass valve is connected with the first end of the exchange chamber vacuum gauge, a second end of the bypass valve is connected with the second end of the exchange chamber connecting pump, a first end of the exchange chamber gas release valve is connected with the first end of the bypass valve, and a second end of the exchange chamber gas release valve is communicated with nitrogen, and the method comprises the following steps: The air pressure in the main chamber is reduced by the main chamber vacuum pump set, so that the air pressure in the main chamber is less than a first air pressure threshold value; The exchange chamber front stage valve and the bypass valve are opened, and the exchange chamber front stage pump is started; When the exchange chamber vacuum gauge indicates that the air pressure in the exchange chamber is less than or equal to a fourth air pressure threshold value, the exchange chamber connecting pump is started; When the exchange chamber vacuum gauge indicates that the air pressure in the exchange chamber is less than or equal to a fifth air pressure threshold value and the rotation speed of the exchange chamber connecting pump is greater than a rotation speed threshold value, the bypass valve is closed until the air pressure in the exchange chamber is less than a second air pressure threshold value; The isolation valve is controlled to be opened, so that the conveying device in the exchange chamber conveys the sample to the main chamber; Before the exchange chamber front stage pump is started, the method further comprises the following steps: The main chamber gas release valve is closed; After the exchange chamber is used up, the method further comprises the following step: The exchange chamber gas release valve is opened.

2. The method of claim 1, wherein, The volume of the main chamber is greater than the volume of the exchange chamber, and the first air pressure threshold value is less than the second air pressure threshold value.

3. The method of claim 1, wherein, The main chamber vacuum pump set comprises a main chamber connecting pump, a main chamber front stage pump, a main chamber front stage valve and a main chamber vacuum gauge; A first end of the main chamber connecting pump is communicated with the main chamber, and a second end of the main chamber connecting pump is connected with the main chamber front stage pump through the main chamber front stage valve; The main chamber vacuum gauge is communicated with the main chamber, and the main chamber vacuum gauge is used for measuring the air pressure in the main chamber.

4. The method of claim 3, wherein, The air pressure in the main chamber is reduced by the main chamber vacuum pump set, so that the air pressure in the main chamber is less than a first air pressure threshold value, which comprises the following steps: The main chamber front stage valve is opened, and the main chamber front stage pump is started; When the main chamber vacuum gauge indicates that the air pressure in the main chamber is less than or equal to a third air pressure threshold value, the main chamber connecting pump is started until the air pressure in the main chamber is less than the first air pressure threshold value.

5. The method of claim 4, wherein, The main chamber vacuum pump set further comprises a main chamber gas release valve, a first end of the main chamber gas release valve is communicated with the main chamber, and a second end of the main chamber gas release valve is communicated with nitrogen; Before the main chamber front stage pump is started, the method further comprises the following steps: The main chamber gas release valve is closed; After the main chamber is used, the method further comprises: Controlling the main chamber vent valve to repeatedly open and close, so that nitrogen enters the main chamber.

6. The method according to any one of claims 1 to 5, characterized in that, The lower part of the main chamber is provided with a main active damping device. 7.A computer readable storage medium, storing a program, when the program is executed by a multi-core processor, causing the multi-core processor to execute the method of any one of claims 1-5.

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