MEMS controller and MEMS device

Abstract

The embodiment of the invention provides an MEMS controller and an MEMS device, and the MEMS controller comprises at least one control unit, and the control unit comprises a first gap between adjacent anchoring structures; the cantilever beam structures correspond to the anchoring structures, the first end of each cantilever beam structure is located on the top face of the corresponding anchoring structure, and the second ends of the two adjacent cantilever beam structures of the same control unit face each other and are provided with a second gap. The packaging structure comprises a bottom plate, a side plate and a top plate which are connected in sequence, and the bottom plate is opposite to the top plate; wherein the bottom plate is located on the bottom face of the anchoring structure, a first flow channel opening penetrating through the bottom plate is formed in the bottom plate, and the first flow channel opening communicates with a first gap of the corresponding control unit; the top plate and the top face of the cantilever beam structure are spaced, and a second runner opening penetrating through the top plate is formed in the top plate. And one-way flow of fluid can be controlled.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of control devices, and in particular to a MEMS controller and a MEMS device. Background Art

[0002] MEMS (Micro-Electro-Mechanical System), also known as micro-electro-mechanical system or microsystem, refers to high-tech devices with a size of several millimeters or even smaller, and its internal structure is generally in the micrometer or even nanometer level. MEMS is an independent intelligent system developed based on microelectronics technology (semiconductor manufacturing technology), integrating technologies such as lithography, corrosion, thin film, LIGA, silicon micromachining, non-silicon micromachining and precision machining.

[0003] MEMS technology is widely used in various fields, including but not limited to: consumer electronics products, such as micro speakers, MEMS microphones, etc. These products are widely used in laptops, smart phones and other devices due to their small size, low power consumption and batch manufacturing advantages.

[0004] Currently, it is necessary to provide a MEMS controller to control the unidirectional movement of fluid. Summary of the invention

[0005] The embodiments of the present invention provide a MEMS controller and a MEMS device, which can at least control the unidirectional movement of a fluid.

[0006] According to some embodiments of the present invention, on one hand, an embodiment of the present invention provides a MEMS controller, comprising: at least one control unit, the control unit comprising: two anchoring structures, a first gap is provided between adjacent anchoring structures, the anchoring structures have relative bottom surfaces and top surfaces; a cantilever beam structure, the cantilever beam structure corresponds to the anchoring structure, the cantilever beam structure has relative first and second ends, and the first end of each cantilever beam structure is located on the top surface of the corresponding anchoring structure, and the second ends of two adjacent cantilever beam structures of the same control unit are opposite and have a second gap; A packaging structure, the packaging structure includes a bottom plate, a side plate and a top plate connected in sequence, the bottom plate is opposite to the top plate, and the side plate connects the bottom plate and the top plate; wherein the bottom plate is located on the bottom surface of the anchoring structure, and a first flow channel opening penetrating the bottom plate is provided on the bottom plate, the first flow channel opening corresponds to the control unit, and the first flow channel opening is communicated with the first gap of the corresponding control unit; the top plate is spaced apart from the top surface of the cantilever beam structure, and a second flow channel opening penetrating the top plate is provided on the top plate, and the second flow channel opening corresponds to the control unit.

[0007] In some embodiments, the cantilever beam structures within the same control unit have the same initial vibration phase and the same vibration frequency.

[0008] In some embodiments, a distance between a center of the second flow channel opening and the second end of the cantilever beam structure directly facing the second flow channel opening is 100 μm to 5000 μm.

[0009] In some embodiments, the height of the anchoring structure is 100 μm to 5000 μm.

[0010] In some embodiments, in the arrangement direction of the anchoring structure, the width of the first flow channel opening is greater than or equal to the width of the second gap.

[0011] In some embodiments, the width of the second flow channel opening in the arrangement direction of the anchoring structure is smaller than the width of the second gap, and the distance between the top plate and the cantilever beam structure is smaller than the distance between the bottom plate and the cantilever beam structure.

[0012] In some embodiments, the first flow channel opening is directly opposite to the second gap in the same control unit.

[0013] In some embodiments, the number of the control units is greater than or equal to 2, and each of the second flow channel openings is directly opposite to the cantilever beam structure on the same side of each of the control units along the arrangement direction of the anchoring structure.

[0014] In some embodiments, the number of the control units is greater than or equal to 2, and two adjacent second flow channel openings are directly opposite to the cantilever beam structure on different sides of the control unit along the arrangement direction of the anchoring structure.

[0015] According to some embodiments of the present invention, another aspect of the embodiments of the present invention further provides a MEMS device, including the MEMS controller as described above.

[0016] The technical solution provided by the embodiment of the present invention has at least the following advantages: when the MEMS device is used as a part of the heat sink, the second end of the cantilever beam structure vibrates to absorb the cooling fluid from one of the first flow channel opening or the second flow channel opening, and then passes through the gap between the cantilever beam structures and flows out through the other of the first flow channel opening or the second flow channel opening to complete the unidirectional flow control of the gas; when the MEMS device is used as a part of the speaker, the second end of the cantilever beam structure vibrates to generate a high-frequency signal; the sound channel surrounded by the packaging structure, the cantilever beam structure and the anchoring structure can realize the demodulation of the high-frequency signal, thereby converting the high-frequency signal into a low-frequency signal to output the frequency of audible sound to humans; the packaging structure serves as a protective shell of the control unit and surrounds a flow channel, thereby facilitating the output of the cooling fluid or the demodulation of the sound. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] One or more embodiments are exemplarily described by pictures in the corresponding drawings. These exemplified descriptions do not constitute a limitation on the embodiments. Unless otherwise specified, the pictures in the drawings do not constitute a scale limitation. In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the conventional technology, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A structural schematic diagram of a MEMS controller provided by the present invention;

[0019] Figure 2 A curve diagram showing the relationship between the height of an anchoring structure and the flow rate per unit chip volume provided by the present invention;

[0020] Figure 3 A curve diagram of the relationship between a first distance and a flow rate per unit chip volume provided by the present invention;

[0021] Figure 4 An arrangement of a control unit provided in an embodiment of the present disclosure;

[0022] Figure 5 Another arrangement of a control unit provided in an embodiment of the present disclosure;

[0023] Figure 6 Another arrangement of a control unit provided in an embodiment of the present disclosure;

[0024] Figure 7 It is a schematic diagram of the structure in which the first flow channel serves as a fluid outlet;

[0025] Figure 8 is a schematic diagram of the structure in which the second flow channel serves as a fluid outlet;

[0026] Fig. 9 It is the time domain diagram of the displacement of the second end of the cantilever beam structure;

[0027] Fig.10 is a time domain diagram of the flow rate of the fluid flowing out through the second flow channel opening;

[0028] Fig.11 It is a schematic diagram of the structure of the second flow channel opening as a sound outlet;

[0029] Fig.12 This is a schematic diagram of the structure in which the first flow channel serves as a sound outlet;

[0030] Fig.13generating a spectrogram of an ultrasonic signal for a cantilever beam structure;

[0031] Fig.14 It is the spectrum diagram of the sound pressure at the sound outlet;

[0032] Fig.15 Schematic diagram of the simulation structure of the sound-raising process. DETAILED DESCRIPTION

[0033] As can be seen from the background technology, it is currently necessary to provide a MEMS controller to control the unidirectional flow of fluid.

[0034] An embodiment of the present invention provides a MEMS controller and a MEMS device. When the MEMS device is used as a part of a heat sink, the second end of the cantilever beam structure vibrates to absorb a cooling fluid from one of the first flow channel opening or the second flow channel opening, and then passes through the gap between the cantilever beam structures and flows out through the other of the first flow channel opening or the second flow channel opening to complete the unidirectional flow control of the gas. When the MEMS device is used as a part of a speaker, the second end of the cantilever beam structure vibrates to generate a high-frequency signal. The sound channel surrounded by the packaging structure, the cantilever beam structure and the anchoring structure can realize the demodulation of the high-frequency signal, thereby converting the high-frequency signal into a low-frequency signal to output the frequency of human-audible sound. The packaging structure serves as a protective shell of the control unit and surrounds a flow channel to facilitate the output of the cooling fluid or the demodulation of the sound.

[0035] In the description of the embodiments of the present invention, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present invention, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0036] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0037] In the description of the embodiments of the present invention, the term "and / or" is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B may represent: A exists, A and B exist at the same time, and B exists. In addition, the character " / " in this document generally indicates that the associated objects before and after are in an "or" relationship.

[0038] In the description of the embodiments of the present invention, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0039] In the description of the embodiments of the present invention, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention.

[0040] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0041] In the accompanying drawings corresponding to the embodiments of the present invention, the thickness and area of ​​the layers are exaggerated for better understanding and ease of description. When describing a component (such as a layer, a film, a region or a lens body) on another component or on the surface of another component, the component may be "directly" located on the surface of the other component, or a third component may exist between the two components. On the contrary, when describing a component on the surface of another component or when another component is formed or provided on the surface of a component, it means that there is no third component between the two components. In addition, when describing a component as being "substantially" formed on another component, it means that the component is not formed on the entire surface (or front surface) of the other component, nor is it formed on a partial edge of the entire surface.

[0042] In the description of the embodiments of the present invention, when a component "includes" another component, unless otherwise specified, other components are not excluded, and other components may be further included. In addition, when a component such as a layer, film, region, or plate is referred to as "on / located on" another component, it can be "directly on" another component (i.e., located on the surface of another component without other components between the two), or another component may exist in between. In addition, when a component such as a layer, film, region, or plate is "directly located on" another component, or when a component such as a layer, film, region, or plate is located on the surface of another component, it means that no other components are located in between.

[0043] The terms used in the description of the various embodiments described herein are only used to describe specific embodiments and are not intended to be limiting. As used in the description of the various embodiments described and in the appended claims, "the components" are also intended to include plural forms unless the context clearly indicates otherwise. Among them, components include components such as layers, films, regions, or plates.

[0044] The following will describe the embodiments of the present invention in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that, in the embodiments of the present invention, many technical details are provided in order to enable the reader to better understand the present invention. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solution claimed in the present invention can be implemented.

[0045] refer to Figure 1 , Figure 1 A structural schematic diagram of a MEMS controller provided by the present invention.

[0046] In some embodiments, the MEMS controller may include: at least one control unit 100, the control unit 100 includes: two anchoring structures 110, a first gap 130 is provided between adjacent anchoring structures 110, and the anchoring structure 110 has relative bottom and top surfaces; a cantilever beam structure 120, the cantilever beam structure 120 corresponds to the anchoring structure 110, the cantilever beam structure 120 has relative first and second ends, and the first end of each cantilever beam structure 120 is located on the top surface of the corresponding anchoring structure 110, and the second ends of two adjacent cantilever beam structures 120 of the same control unit 100 are opposite and have a second gap 140.

[0047] The MEMS controller may also include: a packaging structure 101, the packaging structure 101 includes a bottom plate 111, a side plate 121 and a top plate 131 connected in sequence, the bottom plate 111 is opposite to the top plate 131, and the side plate 121 connects the bottom plate 111 and the top plate 131; wherein, the bottom plate 111 is located on the bottom surface of the anchoring structure 110, and the bottom plate 111 is provided with a first flow channel opening 141 penetrating the bottom plate 111, the first flow channel opening 141 corresponds to the control unit 100, and the first flow channel opening 141 is connected to the first gap 130 of the corresponding control unit 100; the top plate 131 is spaced apart from the top surface of the cantilever beam structure 120, and the top plate 131 is provided with a second flow channel opening 151 penetrating the top plate 131, and the second flow channel opening 151 corresponds to the control unit 100.

[0048] The MEMS device provided in the embodiment of the present invention, when the MEMS device is used as a part of a heat sink, the second end of the cantilever beam structure 120 vibrates to absorb the cooling fluid from one of the first flow channel opening 141 or the second flow channel opening 151, and then passes through the gap between the cantilever beam structures 120 and flows out through the other of the first flow channel opening 141 or the second flow channel opening 151 to complete the unidirectional flow control of the gas. When the MEMS device is used as a part of a speaker, the second end of the cantilever beam structure 120 vibrates to generate a high-frequency signal. The sound channel surrounded by the packaging structure 101, the cantilever beam structure 120 and the anchoring structure 110 can realize the demodulation of the high-frequency signal, thereby converting the high-frequency signal into a low-frequency signal to output the frequency of human-audible sound. The packaging structure 101 serves as a protective shell of the control unit 100 and surrounds a flow channel to facilitate the output of the cooling fluid or the demodulation of the sound.

[0049] The anchoring structure 110 can be used to support the cantilever beam structure 120. The top surface of the anchoring structure 110 is fixedly connected to the first end of the cantilever beam structure 120. A driving signal can be provided to the cantilever beam structure 120 through the anchoring structure 110. For example, when the MEMS controller is required to work, a driving signal can be provided to the cantilever beam structure 120 through the anchoring structure 110 to drive the cantilever beam structure 120 to vibrate.

[0050] The anchoring structure 110 may drive the cantilever beam structure 120 in a manner including: piezoelectric drive, electrostatic drive, thermoelectric drive or electromagnetic drive, etc. Taking piezoelectric drive as an example, the inverse piezoelectric effect of piezoelectric materials is used to convert electrical energy into mechanical energy to drive the cantilever beam structure 120 to vibrate.

[0051] In some embodiments, the anchor structure 110 may be a control layer of a SOI (Silicon-On-Insulator) chip. The anchor structure 110 may also be a control layer of other types of chips, and may cooperate with the cantilever beam structure 120 to drive the cantilever beam structure.

[0052] In some embodiments, during the operation of the MEMS controller, one of the two anchoring structures 110 can be selected to control the vibration of the corresponding cantilever beam structure 120, or both anchoring structures 110 can control the vibration of the cantilever beam structure 120. The working time or working state of the anchoring structure 110 can be selected according to different working requirements.

[0053] In some embodiments, the height of the anchoring structure 110 is 100 μm to 5000 μm, for example, 300 μm, 500 μm, 1000 μm, 1800 μm, 2500 μm, 3000 μm, 4000 μm or 4600 μm, etc. Figure 2 , Figure 2 A curve diagram of the relationship between the height of an anchoring structure and the flow rate per unit chip volume provided by the present invention is provided. For the anchoring structure 110, the height of the anchoring structure 110 is positively correlated with the net flow rate of the fluid driven by the MEMS controller. That is, the larger the height of the anchoring structure 110, the larger the net flow rate of the fluid that can pass through the MEMS controller. However, the larger the height of the anchoring structure 110, the larger the size of the entire MEMS controller. Moreover, the larger the height of the anchoring structure 110, the lower the net flow rate per unit chip volume, resulting in performance waste of the anchoring structure 110; the smaller the height of the anchoring structure 110, although the net flow rate of the fluid that can pass through the MEMS controller will decrease, the net flow rate per unit chip volume will increase, that is, the performance utilization rate of the anchoring structure 110 will increase. Similarly, as the height of the anchoring structure 110 decreases, the difficulty of forming the MEMS controller will increase. Therefore, the height of the anchoring structure 110 is set to 100μm~5000μm, while increasing the net flow rate per unit chip volume, the difficulty of forming the MEMS controller is taken into account.

[0054] It should be noted that the flow rate per unit chip volume here refers to: the total flow rate of the fluid output through the MEMS controller per unit time divided by the plane area of ​​the MEMS controller.

[0055] The vibration frequency of the cantilever beam structure 120 is greater than or equal to 20 KHz, such as 30 KHz, 50 KHz or 100 KHz, etc. The vibration frequency of the cantilever beam structure 120 is greater than or equal to 20 KHz, which can increase the flow rate of the fluid flowing in or out through the first flow channel opening 141.

[0056] In some embodiments, the cantilever beam structures 120 in the same control unit 100 have the same initial vibration phase and the same vibration frequency. Controlling the cantilever beam structures 120 in the same control unit 100 to have the same initial vibration phase and the same vibration frequency can avoid interference between the cantilever beam structures 120 in the same control unit 100. Taking the example of a MEMS controller requiring unidirectional gas flow, it can avoid the appearance of one cantilever beam structure 120 in the same control unit 100 controlling the gas to enter from the first flow channel opening 141 and exit from the second flow channel opening 151, and another cantilever beam structure 120 controlling the gas to enter from the second flow channel opening 151 and exit from the first flow channel opening 141, thereby avoiding mutual interference between the cantilever beam structures 120 in the same control unit 100 and improving the stability of fluid control. Moreover, by controlling the cantilever beam structures 120 in the same control unit 100 to have the same initial vibration phase and the same vibration frequency, it can also facilitate the control of the MEMS controller and reduce the control difficulty.

[0057] In some embodiments, the initial vibration phase of the cantilever beam structure 120 within the same control unit 100 may also be different, for example, a difference of 10° or 20°, etc. By controlling the different initial vibration phases of the cantilever beam structure 120 within the same control unit 100, the flow rate of the fluid can be controlled. For example, when the flow rate of the fluid needs to be adjusted, the initial vibration phase of the cantilever beam structure 120 within the same control unit 100 can be changed to change the flow rate of the fluid.

[0058] The packaging structure 101 can be used to protect the control unit 100, and can be used to lead out signals, or transmit control signals to the control unit 100, thereby completing signal transmission. The packaging structure 101 can also be used to construct a fluid flow channel, for example, to construct a gas flow channel to control the gas to enter the second flow channel opening 151 from the first flow channel opening 141 and exit from the second flow channel opening 151, or to control the gas to enter the first flow channel opening 141 and exit from the second flow channel opening 151.

[0059] In some embodiments, the package structure 101 may be a metal plate or a PCB, etc.

[0060] In some embodiments, the second flow channel opening 151 is opposite to a cantilever beam structure 120 of the corresponding control unit 100, and the second flow channel opening 151 and the first flow channel opening 141 are staggered with each other; in other embodiments, the second flow channel opening 151 and the cantilever beam structure 120 of the corresponding control unit 100 are staggered and opposite to the second gap 140, and the second flow channel opening 151 and the first flow channel opening 141 are opposite.

[0061] In some embodiments, the distance between the center of the second flow channel opening 151 and the second end of the cantilever beam structure 120 directly facing the second flow channel opening 151 is 100 μm to 5000 μm. The distance between the center of the second flow channel opening 151 and the second end of the cantilever beam structure 120 directly facing the second flow channel opening 151 is defined as the first distance L1, with reference to Figure 3 , Figure 3 A curve diagram of the relationship between a first distance and a flow rate per unit chip volume provided by the present invention, for a MEMS controller, the first distance L1 is positively correlated with the net flow rate of the fluid driven by the MEMS controller, that is, the longer the first distance L1, the greater the net flow rate of the fluid that can pass through the MEMS controller, however, the longer the first distance L1, the larger the size of the entire MEMS controller, and the longer the first distance L1, the lower the net flow rate per unit chip volume, resulting in performance waste of the cantilever beam structure 120; the shorter the first distance L1, although the net flow rate of the fluid that can pass through the MEMS controller will decrease, the net flow rate per unit chip volume will increase, that is, the performance utilization rate of the cantilever beam structure 120 will increase, similarly, as the first distance L1 decreases, the difficulty of forming the MEMS controller will increase, therefore, the first distance L1 is set to 100μm to 5000μm, while increasing the net flow rate per unit chip volume, the difficulty of forming the MEMS controller is taken into account.

[0062] It should be noted that the center of the second flow channel opening 151 mentioned here may refer to the geometric center of the second flow channel opening 151. If the second flow channel opening 151 is circular, then the center mentioned here is the circle. If the second flow channel opening 151 is a square, then the center mentioned here is the symmetry center of the square.

[0063] In some embodiments, in the arrangement direction of the anchoring structure 110, the width of the first flow channel opening 141 is greater than or equal to the width of the second gap 140. That is, in the same control unit 100, the width of the first flow channel opening 141 is greater than or equal to the spacing between the two cantilever beam structures 120, so that if the fluid enters from the second gap 140 and exits from the first flow channel opening 141, the loss of the fluid can be reduced. If the fluid enters from the first flow channel opening 141 and exits from the second gap 140, the reduction in the outlet size will increase the kinetic energy of the fluid, thereby increasing the flow rate of the fluid.

[0064] In some embodiments, the width of the second flow channel 151 in the arrangement direction of the anchoring structure 110 is smaller than the width of the second gap 140 , and the distance between the top plate 131 and the cantilever beam structure 120 is smaller than the distance between the bottom plate 111 and the cantilever beam structure 120 . The accommodating space directly related to the second flow channel opening 151 is the space enclosed by the packaging structure 101 and the cantilever beam structure 120, and the accommodating space directly related to the first flow channel opening 141 is the space enclosed by the packaging structure 101, the cantilever beam structure 120 and the anchoring structure 110. When the width of the second flow channel opening 151 is set to be small, the accommodating space directly related to the second flow channel opening 151 is set to be small, so that no matter the fluid enters from the second flow channel opening 151 and exits from the second gap 140, or the fluid enters from the second gap 140 and exits from the second flow channel opening 151, the fluid will have a higher flow speed when flowing out; and when the first flow channel opening 141 is set to be large, the accommodating space directly related to the first flow channel opening 141 is set to be large. When the first flow channel opening 141 is used as an outlet for the fluid, the coverage area when the fluid flows out can be increased. When the first flow channel opening 141 is used as an inlet for the fluid, the fluid flowing out after the gas passes through the second gap 140 and the second flow channel opening 151 can have a better flow rate.

[0065] In some embodiments, the first flow channel opening 141 is directly opposite to the second gap 140 in the same control unit 100. In this way, whether the fluid flows from the second gap 140 to the first flow channel opening 141 or the fluid flows from the first flow channel opening 141 to the second gap 140, the loss during the flow process will be reduced, and the noise during the fluid flow process can also be reduced, thereby improving the performance of the MEMS controller.

[0066] refer to Figure 4 , Figure 4 A control unit arrangement method provided for an embodiment of the present disclosure. In some embodiments, the number of control units 100 is greater than or equal to 2, and each second flow channel opening 151 is directly opposite to the cantilever beam structure 120 on the same side of each control unit 100 along the arrangement direction of the anchoring structure 110. In other words, the position of the second flow channel opening 151 corresponding to each control unit 100 is the same. For example, each second flow channel opening 151 is directly opposite to the cantilever beam structure 120 on the left side of the control unit 100. By controlling each second flow channel opening 151 to be directly opposite to the cantilever beam structure 120 on the same side of each control unit 100 along the arrangement direction of the anchoring structure 110, the process difficulty of forming the MEMS controller can be reduced.

[0067] refer to Figure 5 and Figure 6 , Figure 5 Another arrangement of control units provided in an embodiment of the present disclosure is as follows: Figure 6Another arrangement of a control unit is provided in accordance with an embodiment of the present disclosure.

[0068] In some embodiments, the number of control units 100 is greater than or equal to 2, and two adjacent second flow channel openings 151 are opposite to the cantilever beam structures 120 on different sides of the arrangement direction of the control units 100 along the anchoring structure 110. In other words, the positions of the second flow channel openings 151 corresponding to each control unit 100 are different. For example, one of the two adjacent second flow channel openings 151 is opposite to the cantilever beam structure 120 on the left side of the control unit 100, and the other is opposite to the cantilever beam structure 120 on the right side of the control unit 100. For a MEMS controller with multiple control units 100, setting two adjacent control units 100 to be opposite to the cantilever beam structures 120 on different sides of the arrangement direction of the control units 100 along the anchoring structure 110 can improve the control effect of the MEMS controller, for example, it can improve the reliability of MEMS control of unidirectional airflow, or improve the reliability of MEMS sound demodulation.

[0069] refer to Figure 5 In some embodiments, the number of control units 100 is greater than or equal to 2, and the second flow channel opening 151 of the control unit 100 in contact with the side plate 121 is directly opposite to the cantilever beam structure 120 away from the side plate 121. In this way, the inlet or outlet of the fluid can be set at the part close to the center of the MEMS controller, which can improve the stress resistance of the packaging structure 101 and improve the reliability of the MEMS controller.

[0070] refer to Figure 6 In some embodiments, the number of control units 100 is greater than or equal to 2, and the second flow channel opening 151 of the control unit 100 in contact with the side plate 121 is opposite to the cantilever beam structure 120 close to the side plate 121. In this way, the inlet or outlet of the fluid can be set at different positions of the MEMS controller. Taking the outflow of the fluid from the second flow channel opening 151 as an example, the second flow channel opening 151 is set to be opposite to the cantilever beam structure 120 close to the side plate 121, which can avoid dead corners in the outflow of fluid from the MEMS controller.

[0071] It should be noted that the above-mentioned dead corner refers to the part that cannot be covered after the fluid flows out.

[0072] In some embodiments, the cantilever beam structures 120 in different control units 100 have the same initial vibration phase and the same vibration frequency. In other embodiments, the cantilever beam structures 120 in different control units 100 may have different initial vibration phases, vibration frequencies and / or amplitudes, and the vibration conditions of the cantilever beam structures 120 in different control units 100 may be adjusted according to actual needs.

[0073] The following will be combined Figures 7 to 10The working process of the MEMS controller when it plays a role in heat dissipation is described in detail, among which: Figure 7 is a schematic diagram of the structure of the first flow channel as a fluid outlet, Figure 8 is a schematic diagram of the structure of the second flow channel as a fluid outlet, Fig. 9 is the time domain diagram of the displacement of the second end of the cantilever beam structure, Fig.10 It is a time domain diagram of the flow rate of the fluid flowing out through the second flow channel opening.

[0074] refer to Figure 7 , Fig. 9 and Fig.10 When the MEMS controller needs to dissipate heat, it controls the cantilever beam structure 120 to vibrate, and the cold fluid flows in from the second flow channel opening 151, passes through the second gap 140 and the first gap 130 in sequence, and flows out through the first flow channel opening 141. The first flow channel opening 141 can be directly opposite to the structure that needs heat dissipation, so that the cold fluid hits the surface of the structure that needs heat dissipation to complete the heat dissipation and cooling process.

[0075] In some embodiments, the vibration of a cantilever beam structure 120 in the same control unit 100 satisfies: ds = d 1 Sin(2πf 0 t), the vibration of the other cantilever beam structure 120 satisfies: ds = d 1 Sin(2πf 0 t+ △ φ), where d 1 represents the amplitude of the vibration of the cantilever beam structure 120, f 0 represents the operating frequency of the MEMS controller, and Δφ represents the initial phase difference of the vibration of the two cantilever beam structures 120 of the same control unit 100.

[0076] refer to Fig.10 , wherein, when Δφ is 0, the flow rate time domain diagram of the fluid flowing into the second flow channel opening 151 can be as follows: Fig.10 a. When Δφ is not 0, the flow rate time domain diagram of the fluid flowing into the second flow channel opening 151 can be as follows: Fig.10 b.

[0077] It should be noted that the above-mentioned limitation of Δφ to the flow time domain diagram of the fluid flowing in through the second flow channel opening 151 is only for the convenience of understanding. In other embodiments, when Δφ is not 0, the flow time domain diagram of the fluid flowing in through the second flow channel opening 151 may be as follows: Fig.10 a. When Δφ is 0, the flow rate time domain diagram of the fluid flowing into the second flow channel opening 151 can be as follows: Fig.10 b.

[0078] The present invention can control the unidirectional flow of the fluid through the MEMS controller, and the speed of the fluid flowing into the second flow channel opening 151 can be no less than 20 m / s.

[0079] refer to Figure 8 , Fig. 9 and Fig.10 When the MEMS controller needs to play a role in heat dissipation, the cantilever beam structure is controlled to vibrate, and the cold fluid flows in from the first flow channel, passes through the first gap and the second gap in sequence, and flows out through the second flow channel. The second flow channel can be directly opposite to the structure that needs heat dissipation, so that the cold fluid hits the surface of the structure that needs heat dissipation to complete the heat dissipation and cooling process.

[0080] In some embodiments, the vibration of a cantilever beam structure 120 in the same control unit 100 satisfies: ds = d 1 Sin(2πf 0 t), the vibration of the other cantilever beam structure 120 satisfies: ds = d 1 Sin(2πf 0 t+ △ φ), where d 1 represents the amplitude of the vibration of the cantilever beam structure 120, f 0 represents the operating frequency of the MEMS controller, and Δφ represents the initial phase difference of the vibration of the two cantilever beam structures 120 of the same control unit 100.

[0081] refer to Fig.10 , where Δφ is 0, the flow rate time domain diagram of the fluid flowing out of the second flow channel opening 151 can be as follows: Fig.10 c. When Δφ is not 0, the flow rate time domain diagram of the fluid flowing out of the second flow channel opening 151 can be as follows: Fig.10 d.

[0082] It should be noted that the above-mentioned limitation of Δφ to the flow time domain diagram of the fluid flowing out through the second flow channel opening 151 is only for the convenience of understanding. In other embodiments, when Δφ is not 0, the flow time domain diagram of the fluid flowing out of the second flow channel opening 151 may be as follows: Fig.10 c. When Δφ is 0, the flow rate time domain diagram of the fluid flowing out of the second flow channel opening 151 can be as follows: Fig.10 d.

[0083] The present invention can control the unidirectional flow of the fluid through the MEMS controller, and the amount of the fluid flowing out through the second flow channel opening 151 can be no less than 20 m / s.

[0084] The present invention is not limited to the fluid, and the fluid may be liquid, gas, or sound wave, etc.

[0085] The following will be combined with the following Figures 11 to 15The working process of the MEMS controller when it plays a role of sound transmission is described in detail, among which: Fig.11 This is a schematic diagram of the structure of the second flow channel as a sound outlet. Fig.12 This is a schematic diagram of the structure of the first flow channel as a sound outlet. Fig.13 Spectrum diagram of ultrasonic signal generated for cantilever beam structure, Fig.14 is the spectrum of the sound pressure at the sound outlet, Fig.15 Schematic diagram of the simulation structure of the sound-raising process.

[0086] When the sound-speaking capability is required, the driving signal generated by the anchoring structure 110 drives the cantilever beam structures 120 on both sides to move, and the displacement satisfies: ds = d 1 Sin(2πf 0 t)Sin(2πf a t), where d 1 represents the amplitude of the vibration of the cantilever beam structure 120, f 0 represents the ultrasonic frequency, fa represents the audible sound frequency, and ultrasound is generated after the cantilever beam structure 120 vibrates. The spectrum signal is as follows: Fig.13 , the ultrasonic sound pressure satisfies us=u 1 Sin(2πf 0 t)Sin(2πf a t), where u 1 is the amplitude of the sound pressure. The sound channel formed by the present invention can demodulate the sound, that is, amplitude modulation. The amplitude modulation satisfies: umod=u 2 Sin(2πf 0 t), where u 2 is the amplitude of the sound pressure. When the ultrasonic signal us is modulated by the channel amplitude, an output sound pressure uout is formed. The output sound pressure satisfies uout = usXumod = u 1 Sin(2πf 0 t)Sin(2πf a t)Xu 2 Sin(2πf 0 t), where X is the multiplication symbol, the audible sound frequency fa can be obtained, and the spectrum of the output sound pressure is as follows Fig.14 .

[0087] The MEMS provided by the present invention can realize the demodulation of sound when used for sound generation, thereby converting the ultrasonic frequency into the sound frequency audible to humans.

[0088] Another embodiment of the present invention further provides a MEMS device, which may include the MEMS controller in some or all of the above-mentioned embodiments. The MEMS device provided by another embodiment of the present disclosure will be described below. It should be noted that the same or corresponding parts of the above-mentioned embodiments can refer to the corresponding description of the above-mentioned embodiments and will not be repeated below.

[0089] The MEMS device provided by the present invention can be used for heat dissipation or sound generation.

[0090] It can be understood by those skilled in the art that the above-mentioned embodiments are specific embodiments of the present invention, and in practical applications, various changes can be made to them in form and detail without departing from the spirit and scope of the embodiments of the present invention. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the embodiments of the present invention, so the protection scope of the embodiments of the present invention shall be based on the scope defined in the claims.

Claims

1. A MEMS controller, characterized in that: include: At least one control unit, the control unit comprising: two anchoring structures, a first gap is formed between adjacent anchoring structures, and the anchoring structures have opposite bottom surfaces and top surfaces; a cantilever beam structure, the cantilever beam structure corresponds to the anchoring structure, the cantilever beam structure has opposite first and second ends, and the first end of each cantilever beam structure is located on the top surface of the corresponding anchoring structure, and the second ends of two adjacent cantilever beam structures of the same control unit are opposite to each other and have a second gap; A packaging structure, the packaging structure comprising a bottom plate, a side plate and a top plate connected in sequence, the bottom plate is directly opposite to the top plate, and the side plate connects the bottom plate and the top plate; Wherein, the bottom plate is located on the bottom surface of the anchoring structure, and a first flow channel opening penetrating the bottom plate is provided on the bottom plate, the first flow channel opening corresponds to the control unit, and the first flow channel opening is communicated with the first gap of the corresponding control unit; the top plate is spaced apart from the top surface of the cantilever beam structure, and a second flow channel opening penetrating the top plate is provided on the top plate, and the second flow channel opening corresponds to the control unit.

2. The MEMS controller according to claim 1, characterized in that: The cantilever beam structures in the same control unit have the same initial vibration phase and the same vibration frequency.

3. The MEMS controller according to claim 1, characterized in that: The distance between the center of the second flow channel opening and the second end of the cantilever beam structure directly facing the second flow channel opening is 100 μm to 5000 μm.

4. The MEMS controller according to claim 1, characterized in that: The height of the anchoring structure is 100 μm to 5000 μm.

5. The MEMS controller according to claim 1, characterized in that: In the arrangement direction of the anchoring structure, the width of the first flow channel opening is greater than or equal to the width of the second gap.

6. The MEMS controller according to claim 5, characterized in that: The width of the second flow channel opening in the arrangement direction of the anchoring structure is smaller than the width of the second gap, and the distance between the top plate and the cantilever beam structure is smaller than the distance between the bottom plate and the cantilever beam structure.

7. The MEMS controller according to claim 1, characterized in that: The first flow channel opening is directly opposite to the second gap in the same control unit.

8. The MEMS controller according to claim 1, characterized in that: The number of the control units is greater than or equal to 2, and each of the second flow channel openings is directly opposite to the cantilever beam structure on the same side of each of the control units along the arrangement direction of the anchoring structure.

9. The MEMS controller according to claim 1, characterized in that: The number of the control units is greater than or equal to 2, and two adjacent second flow channel openings are directly opposite to the cantilever beam structures on different sides of the control units along the arrangement direction of the anchoring structure.

10. A MEMS device, characterized in that: include: A MEMS controller as claimed in any one of claims 1 to 9.

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