Evaporation equipment

Abstract

The invention relates to evaporation equipment, which comprises a plurality of cooling branches, a plurality of heat exchange tubes, a plurality of heat exchange tubes and a plurality of heat exchange tubes, the liquid leakage detection unit comprises an open water pan, a water drainage pipeline led out of the water pan and a liquid leakage sensor arranged in the water pan or the water drainage pipeline; and all the branch valves are arranged above the opening of the water pan so as to collect leaked liquid in the water pan during leakage. According to the cooling system, by adding liquid leakage detection and water valve control modes, valve water leakage caused by the water hammer effect can be improved, liquid leakage control is achieved, losses caused by liquid leakage are reduced, and the effect that the liquid leakage risk is controllable is achieved.

Description

Technical Field

[0001] The invention relates to the technical field of cooling water supply and return pipelines, and in particular to evaporation equipment. Background Art

[0002] The vapor deposition machine is a high-end equipment that involves optical alignment and high-temperature control. Cooling water is required to accurately control the temperature of each component in the vapor deposition machine chamber to achieve the best process environment. There will be multiple water valves on the process chamber of the vapor deposition machine, and the temperature of each component inside the chamber is controlled by adjusting the cooling water. The water valve is opened frequently, and affected by the water hammer effect, there will be a risk of leakage at the water valve and the cavity water pipe joints. After the water valve leaks, the equipment will not be able to accurately control the temperature of the components in the chamber, which will affect the product evaporation effect. When the water valve leaks, water droplets may drip onto the equipment and cables, which will corrode the equipment over time.

[0003] On existing evaporation equipment, since the dry pump, molecular pump, heat source, optical alignment components, etc. that need to be cooled are in different positions, the corresponding cooling branches are separately connected to different cooling areas. There are many water valves on the equipment, and the water valves are arranged in relatively scattered positions, which makes it inconvenient to deal with water leakage. In order to detect water leakage, a leakage detection sensor needs to be installed on each water valve. Summary of the invention

[0004] In view of the technical problem that the cooling branches of the existing evaporation equipment cooling system are dispersed and inconvenient to handle, the present application provides an evaporation equipment.

[0005] The technical solution of the present invention is as follows: A vapor deposition device, comprising: A plurality of cooling branches, each of which is provided with a branch valve; A liquid leakage detection unit, the liquid leakage detection unit includes an open water receiving tray, a drainage pipeline led from the water receiving tray, and a liquid leakage sensor arranged in the water receiving tray or the drainage pipeline; All the branch valves are arranged above the opening of the water receiving pan so as to collect the leaked liquid in the water receiving pan in case of leakage.

[0006] Preferably, the bottom of the water receiving tray is tilted so that the leaked liquid in the water receiving tray converges to the lowest point; and the liquid leakage sensor is arranged at the lowest point.

[0007] Preferably, the bottom of the water receiving tray is tilted so that the leaked liquid in the water receiving tray converges to the lowest point; the drainage pipeline is led out from the lowest point of the bottom of the water receiving tray.

[0008] Preferably, the cooling branch includes a water supply branch and a water return branch; the water supply branch connects the water supply pipeline and the corresponding cooling device in the evaporation equipment; the water return branch connects the water return pipeline and the corresponding cooling device in the evaporation equipment.

[0009] Preferably, a water inlet main valve is installed on the water supply pipeline, and / or a water return main valve is installed on the water return pipeline.

[0010] Preferably, the branch valve comprises at least one of a branch water inlet valve and a branch water return valve, the branch water inlet valve is connected to the water supply branch, and the branch water return valve is connected to the water return branch.

[0011] Preferably, the branch valve comprises at least one of a branch water inlet valve and a branch water return valve, the branch water inlet valve is connected to the water supply branch, and the branch water return valve is connected to the water return branch.

[0012] Preferably, the branch valve includes a branch water inlet valve and a branch water return valve, the branch water inlet valve is connected to the water supply branch, and the branch water return valve is connected to the water return branch.

[0013] Preferably, the branch valve includes a branch water inlet valve and a branch water return valve, the branch water inlet valve is connected to the water supply branch, and the branch water return valve is connected to the water return branch.

[0014] The cooling system of the present application can improve valve leakage caused by the water hammer effect, control the leakage, reduce the losses caused by the leakage, and achieve the effect of controllable leakage risk by adding leakage detection and water valve control methods.

[0015] A drainage pipe is installed on the water tray to transport the leaked liquid to the factory drain outlet; the water pipe adopts higher-specification sealing measures at the equipment end, so that even if there is a leak, it will occur at the water valve instead of on the equipment, reducing the risk of leakage. It solves the risk of corrosion of the equipment by water dripping onto the equipment after a leak. It solves the detection method that requires the deployment of multiple leakage sensors and can reduce costs. After the water valve is centrally controlled, the leak can be immediately eliminated through the water tray; the damage caused by the water hammer effect can be concentrated on the water valve to avoid damage to the cavity, thereby avoiding greater impact. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic diagram of the present invention; Figure 2 It is a schematic diagram of the present invention.

[0017] In the figure: 1: evaporation equipment; 2: cooling system; 21: cooling branch; 211: water supply branch; 212: return branch; 218: branch return valve; 219: branch inlet valve; 31: water supply pipeline; 311: main inlet valve; 32: return pipeline; 321: main return valve; 41: water receiving tray; 42: leakage sensor; 43: drainage pipeline. DETAILED DESCRIPTION

[0018] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. In this specification, the size ratios in the drawings do not represent the actual size ratios, but are only used to reflect the relative position relationship and connection relationship between the components. Components with the same name or the same number represent similar or identical structures and are only for illustrative purposes.

[0019] Figure 1 The schematic diagram of the evaporation device of the present application. First, the evaporation device 1 is included. In order to realize the cooling of each device in the evaporation device 1, several groups of cooling branches 21 are also included. Any cooling branch 21 includes a water supply branch 211 and a return branch 212, wherein the water supply branch 211 is connected to the water supply pipeline 31 and the corresponding cooling device in the evaporation device 1, and the return branch 212 is connected to the return pipeline 32 and the corresponding cooling device in the evaporation device 1. The cooling water enters the cooling device from the water supply pipeline 31 through the water supply branch 211 to realize water cooling of the corresponding equipment in the evaporation device 1. The cooling water after water-cooling heat exchange enters the return pipeline 32 through the return branch 212 for actual centralized collection. Preferably, at least one of the water supply branch 211 and the return branch 212 in the cooling branch 21 is installed with a valve, such as installing a branch water inlet valve 219 on the water supply branch 211, or installing a branch water return valve 218 on the return branch 212. The branch water inlet valve 219 or the branch water return valve 218 is used to realize independent control of the water circuit of the cooling branch 21. Preferably, the valve is installed on both the water supply branch 211 and the water return branch 212, so that the water inlet and the water outlet can be controlled independently. This is beneficial for maintenance and equipment foolproofing. Furthermore, valves can be installed on the water supply pipeline 31 and the water return pipeline 32. The water inlet main valve 311 can be installed on the water supply pipeline 31, and / or the water return main valve 321 can be installed on the water return pipeline 32. The valves on the water supply pipeline 31 and the water return pipeline 32 are used to realize the control of the main water circuit.

[0020] In order to improve the control efficiency of the cooling branch 21 and realize convenient leakage detection and alarm of the cooling branch 21, the evaporation device of the present application also provides a leakage detection unit based on centralized setting. In this technical solution, firstly, all cooling branches 21 are arranged in one place, and secondly, the water supply branch 211 and the return branch 212 thereon are basically arranged in one place when they exist, so as to realize the purpose of centralized setting of the cooling branch 21 and the branch water inlet valve 219 and the branch return valve 218. In addition to being convenient for control, the centralized setting is also convenient for setting the overall leakage detection solution.

[0021] In order to realize leakage detection, the evaporation device 1 of the present application also includes a leakage detection unit. It includes an open water receiving tray 41, a drainage pipeline 43 led out from the bottom of the water receiving tray 41, and a leakage sensor 42 arranged at the bottom of the water receiving tray 41 or in the drainage pipeline 43. All 211 and the return branch 212, when present, are arranged above the opening of the water receiving tray 41. When any water supply branch 211 and the return branch 212 leak due to long-term work, the leaked liquid enters the water receiving tray 41 and enters the corresponding collection pipeline or the drainage outlet in the factory through the drainage pipeline 43. At the same time, the leakage sensor 42 is triggered to generate a leakage signal. It can promptly remind maintenance personnel to discover and repair the leakage problem to avoid the escalation of the situation. The bottom of the water receiving tray 41 is preferably inclined and has a lowest point. At this time, the collected leakage naturally converges to the lowest point. Therefore, the leakage sensor 42 and the drainage pipeline 43 are preferably arranged at the lowest point. The cooling system of the present application can improve valve leakage caused by the water hammer effect, control leakage, reduce losses caused by leakage, and achieve controllable leakage risk by adding leakage detection and water valve control methods. It installs various water valves together and is located outside the equipment, and transports PCW to the equipment end through an extended pipeline. A water receiving tray is installed under the water valve, and a leakage sensor is installed. A drainage pipe is installed on the water receiving tray to transport the leakage to the factory drain outlet; the water pipe adopts a higher specification sealing measure at the equipment end, so that even if the leakage occurs, it will occur at the water valve instead of on the equipment, reducing the risk caused by leakage. The technical solution of the present application solves the risk of water dripping onto the equipment after leakage, which will corrode the equipment. The technical solution of the present application solves the problem of the detection method that requires the arrangement of multiple leakage sensors, which can reduce costs. After the water valve is centrally controlled, the leakage can be eliminated even through the water receiving tray, and the damage caused by the water hammer effect can be concentrated on the water valve to avoid damage to the cavity, thereby causing greater impact.

[0022] The above content only describes the preferred implementation mode of the present invention, and does not limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solution of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.

Claims

1. A vapor deposition device, characterized in that: include: A plurality of cooling branches (21), each cooling branch (21) being provided with a branch valve; A liquid leakage detection unit, the liquid leakage detection unit comprising an open water receiving tray (41), a drainage pipeline (43) leading from the water receiving tray (41), and a liquid leakage sensor (42) arranged in the water receiving tray (41) or the drainage pipeline (43); All of the branch valves are arranged above the opening of the water receiving pan (41) so as to collect the leaked liquid in the water receiving pan (41) in case of leakage.

2. The evaporation device according to claim 1, characterized in that: The bottom of the water receiving tray (41) is arranged to be inclined so that the leaked liquid in the water receiving tray (41) converges to the lowest point; and the liquid leakage sensor (42) is arranged at the lowest point.

3. The evaporation device according to claim 1, characterized in that: The bottom of the water receiving pan (41) is arranged to be inclined so that the leaked liquid in the water receiving pan (41) converges to the lowest point; the drainage pipeline (43) is led out from the lowest point of the bottom of the water receiving pan (41).

4. The evaporation device according to claim 1, characterized in that: The cooling branch (21) comprises a water supply branch (211) and a water return branch (212); the water supply branch (211) is connected to the water supply pipeline (31) and the corresponding cooling device in the evaporation equipment (1); the water return branch (212) is connected to the water return pipeline (32) and the corresponding cooling device in the evaporation equipment (1).

5. The evaporation device according to claim 4, characterized in that: A water inlet main valve (311) is installed on the water supply pipeline (31), and / or a water return main valve (321) is installed on the water return pipeline (32).

6. The evaporation device according to claim 1, characterized in that: The branch valve comprises at least one of a branch water inlet valve (219) and a branch water return valve (218); the branch water inlet valve (219) is connected to the water supply branch (211); and the branch water return valve (218) is connected to the water return branch (212).

7. The evaporation device according to claim 1, characterized in that: The branch valve comprises at least one of a branch water inlet valve (219) and a branch water return valve (218); the branch water inlet valve (219) is connected to the water supply branch (211); and the branch water return valve (218) is connected to the water return branch (212).

8. The evaporation device according to claim 1, characterized in that: The branch valve comprises a branch water inlet valve (219) and a branch water return valve (218), wherein the branch water inlet valve (219) is connected to the water supply branch (211), and the branch water return valve (218) is connected to the water return branch (212).

9. The evaporation device according to claim 1, characterized in that: The branch valve comprises a branch water inlet valve (219) and a branch water return valve (218), wherein the branch water inlet valve (219) is connected to the water supply branch (211), and the branch water return valve (218) is connected to the water return branch (212).

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