Centering installation equipment

Abstract

The invention discloses centering installation equipment which is used for achieving centering installation of a first workpiece and a second workpiece, and the first workpiece is located in the second workpiece. Comprising a first centering piece, a second centering piece and a positioning piece, the first centering piece is arranged on the first workpiece and provided with a first centering hole located in the center, the second centering piece is located above the first centering piece and provided with a second centering hole located in the center, and the end of the second centering piece extends to the second workpiece; the positioning piece has a first state in which the positioning piece can be inserted into the first centering hole and the second centering hole and a second state in which the positioning piece can be only inserted into the second centering hole. When the first workpiece is the electrostatic chuck and the second workpiece is the base, the centering installation of the electrostatic chuck and the base is realized through the mutual cooperation of the first centering piece, the second centering piece and the positioning piece; the technical problem that the wafer cooling effect and the service life of the electrostatic chuck are affected due to the fact that the electrostatic chuck and the base cannot be installed in a centering mode is solved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, and in particular to a centering installation device. Background Art

[0002] In the semiconductor manufacturing process, thin film deposition is one of the core processes of wafer processing, which is mainly used to deposit the required material films on the surface of the wafer, such as insulating dielectric films and metal conductive films. Thin film deposition technology includes chemical vapor deposition (CVD) and physical vapor deposition (PVD), which can accurately and evenly coat thin films on wafers. Thin film deposition is not only used to form circuit structures, but also has important functions such as conductivity, insulation and blocking pollutants, which directly affects the performance of semiconductor devices.

[0003] During the thin film deposition process of semiconductor manufacturing, the wafer is supported by the lower electrode assembly and electrostatically adsorbed in the center position to ensure a high pass rate of wafer film formation during the process. The lower electrode assembly consists of five parts: an electrostatic chuck, a focusing ring, a support ring, an insulating disk, and a base, which can control the temperature and electric field distribution of the wafer. However, during the assembly of the lower electrode assembly, the electrostatic chuck and the base do not have an effective centering tooling, resulting in an uneven gap between the electrostatic chuck and the focusing ring due to thermal expansion during the process, and the electrostatic chuck circuit generates excessive leakage current or even arc breakdown, affecting the wafer cooling effect and the service life of the electrostatic chuck. Summary of the invention

[0004] An embodiment of the present invention provides a centering installation device, which solves the technical problem that during the assembly process of the lower electrode assembly, the electrostatic chuck and the base cannot be installed centeringly, which affects the cooling effect of the wafer and the service life of the electrostatic chuck.

[0005] In order to solve the above problems, according to one aspect of the present application, an embodiment of the present invention provides a centering installation device for realizing the centering installation of a first workpiece and a second workpiece, wherein the first workpiece is located inside the second workpiece; the centering installation device includes a first centering piece, a second centering piece and a positioning piece, wherein the first centering piece is arranged on the first workpiece and has a first centering hole located in the center, the second centering piece is located above the first centering piece and has a second centering hole located in the center, the end of the second centering piece extends to the second workpiece, and the positioning piece has a first state in which it can be inserted into the first centering hole and the second centering hole, and a second state in which it can only be inserted into the second centering hole.

[0006] In some embodiments, the first centering piece includes a first body, the first centering hole is opened at the central position of the first body, and the outer peripheral surface of the first body has a first extension edge extending radially outward, and the end of the first extension edge is clamped at the edge of the first workpiece.

[0007] In some embodiments, there are multiple first extension edges, and the multiple first extension edges are evenly distributed along the circumference of the first body; the end of the first extension edge has a clamping piece, and the first extension edge is clamped at the edge of the first workpiece through the clamping piece.

[0008] In some embodiments, each of the first extension edges is provided with a hole; the first centering member further includes a measuring device, and the measuring device is arranged at the hole position to sense the distance between the first extension edge and the upper surface of the first workpiece.

[0009] In some embodiments, the measuring device is a micrometer, which is arranged in one-to-one correspondence with the first extended edge, and the reading error of multiple micrometers is no more than 0.02 mm.

[0010] In some embodiments, the second centering piece includes a second body, the second centering hole is opened at the central position of the second body, and the outer peripheral surface of the second body has a second extension edge extending radially outward, and the second extension edge is fixed to the upper end surface of the second workpiece.

[0011] In some embodiments, there are multiple second extension edges, and the multiple second extension edges are evenly distributed along the circumference of the second body; the end of the second extension edge has a fixing hole, and a fixing column passes through the fixing hole to fix the second centering piece on the second workpiece.

[0012] In some embodiments, the centering installation device also includes a disassembly part, which includes a third body, the bottom of the third body has an extension column, the bottom of the extension column has a rubber top screw head, and the rubber top screw head can be inserted into the threaded hole on the end face of the second workpiece; wherein the thread height in the threaded hole is less than the thread height of the rubber top screw head.

[0013] In some embodiments, the upper surface of the third body has a handle.

[0014] In some embodiments, the first workpiece includes an insulating disk and an electrostatic suction cup, and the second workpiece is a base, the insulating disk is arranged in the base, the electrostatic suction cup is arranged on the insulating disk and the two are fixed by positioning pins; the base is arranged in the cavity and the two are sealed by a sealing ring; when the rubber screw head is inserted into the threaded hole on the end face of the base, it can separate the base from the cavity.

[0015] Compared with the prior art, the centering installation device of the present invention has at least the following beneficial effects:

[0016] The centering installation equipment provided by the present invention is used to realize the centering installation of a first workpiece and a second workpiece, wherein the first workpiece is located inside the second workpiece; the centering installation equipment comprises a first centering piece, a second centering piece and a positioning piece, wherein the first centering piece is arranged on the first workpiece and has a first centering hole located in the center, the second centering piece is located above the first centering piece and has a second centering hole located in the center, the end of the second centering piece extends to the second workpiece, and the positioning piece has a first state in which it can be inserted into the first centering hole and the second centering hole, and a second state in which it can only be inserted into the second centering hole.

[0017] During specific use, when the positioning piece is in the first state, it is inserted into the first centering hole and the second centering hole. Because the first centering hole is located at the central position of the first centering piece, and the second centering hole is located at the central position of the second centering piece, at the same time, the first centering piece is connected to the first workpiece, and the second centering piece is connected to the second workpiece, then it is proved that the first workpiece and the second workpiece are already concentric; on the contrary, when the positioning piece is in the second state, it can only be inserted into the second centering hole. At this time, the first centering hole and the second centering hole are not in a corresponding relationship up and down, and the first centering hole deviates from the second centering hole, then it is proved that there is a certain eccentricity between the first workpiece and the second workpiece, and the first workpiece needs to be adjusted at this time. In the process of adjusting the first workpiece, the first centering piece also moves accordingly, and then the first centering hole also moves, until the positioning piece can be smoothly inserted into the first centering hole and the second centering hole, then it is proved that the centering setting of the first workpiece and the second workpiece is achieved through adjustment. It can be seen that the present invention realizes the centering installation of the first workpiece and the second workpiece through the mutual cooperation of the first centering piece, the second centering piece and the positioning piece, thereby avoiding the differences caused by the assembly process and processing errors.

[0018] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0020] Figure 1is a cross-sectional view of a centering installation device provided by an embodiment of the present invention when it cooperates with a first workpiece and a second workpiece;

[0021] Figure 2 is a top view of a centering installation device provided by an embodiment of the present invention when it cooperates with a first workpiece and a second workpiece;

[0022] Figure 3 is a structural schematic diagram of a first centering member in a centering installation device provided by an embodiment of the present invention;

[0023] Figure 4 is a structural schematic diagram of a second centering member in a centering installation device provided by an embodiment of the present invention;

[0024] Figure 5 It is a structural schematic diagram of a disassembly component and a second workpiece in a centering installation device provided by an embodiment of the present invention;

[0025] Figure 6 It is a structural schematic diagram of a disassembly component in a centering installation device provided by an embodiment of the present invention;

[0026] Reference numerals:

[0027] 1. First workpiece; 11. Insulating disk; 12. Electrostatic suction cup; 2. Second workpiece; 3. First centering piece; 31. First centering hole; 32. First body; 33. First extension edge; 34. Snap-in piece; 35. Hole position; 341. Horizontal edge; 342. Vertical edge; 4. Second centering piece; 41. Second centering hole; 42. Second body; 43. Second extension edge; 44. Fixing hole; 45. Fixing column; 5. Positioning piece; 6. Disassembly piece; 61. Third body; 62. Extension column; 63. Rubber top screw head; 64. Handle. DETAILED DESCRIPTION

[0028] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention application are described in detail below in conjunction with the accompanying drawings and preferred embodiments. In the following description, different "one embodiment" or "embodiment" does not necessarily refer to the same embodiment. In addition, specific features, structures, or characteristics in one or more embodiments may be combined in any suitable form.

[0029] In the description of the present invention, it should be clarified that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, but are not necessarily used to describe a specific order or sequence; the terms "vertical", "lateral", "longitudinal", "front", "rear", "left", "right", "up", "down", "horizontal", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention, and do not mean that the referred device or element must have a specific direction or position, and therefore cannot be understood as a limitation on the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The wafer is usually supported and fixed by the lower electrode assembly during the semiconductor manufacturing process. The lower electrode assembly includes five parts: an electrostatic chuck, a focusing ring, a support ring, an insulating disk, and a base. The base is located in the outermost circle. The base is set in the reaction chamber. The base is a circular structure with a cavity. In the cavity, an insulating disk is set. Above the insulating disk is an electrostatic chuck, which is also set in the base. In addition, the focusing ring is set around the substrate and the electrostatic chuck to adjust the temperature and electric field distribution in the edge area of ​​the substrate.

[0032] During the assembly of the lower electrode assembly, the electrostatic chuck and the base do not have an effective centering tooling, resulting in an uneven gap between the electrostatic chuck and the focusing ring due to thermal expansion during the process, and the electrostatic chuck circuit generates excessive leakage current or even arc breakdown, affecting the wafer cooling effect and the service life of the electrostatic chuck. In view of this, this embodiment realizes the centering installation of the electrostatic chuck and the base through the cooperation of the first centering piece, the second centering piece and the positioning piece.

[0033] In addition, the lower electrode assembly is arranged in the cavity, and the base of the lower electrode assembly is tightly fitted with the cavity through a sealing ring. During the disassembly of the electrostatic chuck assembly, the sealing rubber ring between the base and the cavity is sticky, which makes it difficult to disassemble the electrostatic chuck assembly. In view of this, the present embodiment realizes the disassembly of the electrostatic chuck through a disassembly part.

[0034] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0035] This embodiment provides a centring installation device, such as Figure 1-Figure 6 As shown, it is used to realize the centering installation of a first workpiece 1 and a second workpiece 2, wherein the first workpiece 1 is located inside the second workpiece 2; the centering installation equipment includes a first centering piece 3, a second centering piece 4 and a positioning piece 5, wherein the first centering piece 3 is arranged on the first workpiece 1, and has a first centering hole 31 located in the center, the second centering piece 4 is located above the first centering piece 3, and has a second centering hole 41 located in the center, the end of the second centering piece 4 extends to the second workpiece 2, and the positioning piece 5 has a first state in which it can be inserted into the first centering hole 31 and the second centering hole 41, and a second state in which it can only be inserted into the second centering hole 41.

[0036] For a clearer explanation, it is assumed that the first workpiece 1 includes an insulating disk 11 and an electrostatic suction cup 12, the second workpiece 2 is a base, the insulating disk 11 is arranged in the base, the electrostatic suction cup 12 is arranged on the insulating disk 11, and the two are fixed by positioning pins; of course, the first workpiece 1 and the second workpiece 2 can also be other specific parts, as long as the first workpiece 1 is located in the second workpiece 2, and the two need to be concentrically matched, the centering installation equipment provided in this embodiment can achieve the centering installation of the two.

[0037] In addition, since the electrostatic suction cup 12 is disposed on the insulating disk 11 and the two are fixed by positioning pins, it is only necessary to realize the centering of the electrostatic suction cup 12 and the base to realize the centering installation of the electrostatic suction cup 12, the insulating disk 11 and the base. The centering installation equipment provided in this embodiment is used to realize the centering installation of the electrostatic suction cup 12 and the base. The first centering piece 3 is disposed on the electrostatic suction cup 12, and it has a first centering hole 31 located in the center, the second centering piece 4 is located above the first centering piece 3, and it has a second centering hole 41 located in the center, and the end of the second centering piece 4 extends to the base.

[0038] In addition, the positioning member 5 is a positioning pin.

[0039] Specifically, the electrostatic chuck 12 has a general circular outline, and the base is a circular structure with a cavity. The electrostatic chuck 12 is arranged in the circular cavity of the base. The base is usually made of ceramic or metal material with good thermal conductivity and hardness, and is used for heat dissipation and fixation.

[0040] In the specific use process, when the positioning piece 5 is in the first state, it is inserted into the first centering hole 31 and the second centering hole 41. Because the first centering hole 31 is located at the central position of the first centering piece 3, and the second centering hole 41 is located at the central position of the second centering piece 4, at the same time, the first centering piece 3 is connected to the electrostatic suction cup, and the second centering piece 4 is connected to the base, which proves that the electrostatic suction cup and the base are already concentric; on the contrary, when the positioning piece 5 is in the second state, it can only be inserted into the second centering hole 41. At this time, the first centering hole 31 and the second centering hole 41 are not in a corresponding relationship up and down, and the first centering hole 31 deviates from the second centering hole 41, which proves that there is a certain eccentricity between the electrostatic suction cup and the base. At this time, the electrostatic suction cup needs to be adjusted. In the process of adjusting the electrostatic suction cup, the first centering piece 3 also moves accordingly, and then the first centering hole 31 also moves, until the positioning piece 5 can be smoothly inserted into the first centering hole 31 and the second centering hole 41, which proves that the centering setting of the electrostatic suction cup and the base is achieved through adjustment.

[0041] It can be seen that this embodiment realizes the centering installation of the electrostatic chuck and the base through the mutual cooperation of the first centering piece 3, the second centering piece 4 and the positioning piece 5, avoids the differences caused by the assembly process and processing errors, and further solves the technical problem of affecting the cooling effect of the wafer and the service life of the electrostatic chuck due to the inability to align the electrostatic chuck and the base.

[0042] In a specific embodiment, Figure 3 As shown, the first centering piece 3 includes a first body 32, the first centering hole 31 is opened at the central position of the first body 32, and the outer peripheral surface of the first body 32 has a first extension edge 33 extending radially outward, and the end of the first extension edge 33 is clamped at the edge of the first workpiece 1. Specifically, the outer peripheral surface of the first body 32 has a first extension edge 33 radiating radially outward, and at the center position of the first body 32, there is a first centering hole 31. In the specific use process, the first extension edge 33 is clamped at the edge of the first workpiece 1, so that the first workpiece 1 and the first centering piece 3 are a whole, and the center of the first centering piece 3 is the center of the first workpiece 1, that is, the first centering hole 31 is the center position of the first workpiece 1. At the same time, the second centering hole 41 is the center position of the second workpiece 2. In this way, when the first centering hole 31 and the second centering hole 41 are aligned up and down, it proves that the first workpiece 1 and the second workpiece 2 are concentrically arranged. Otherwise, the first workpiece 1 needs to be adjusted until the first centering hole 31 and the second centering hole 41 on the first centering piece 3 connected to the first workpiece 1 have a corresponding positional relationship up and down.

[0043] In a specific embodiment, there are multiple first extension edges 33, and the multiple first extension edges 33 are evenly distributed along the circumference of the first body 32; the end of the first extension edge 33 has a clamping piece 34, and the first extension edge 33 is clamped at the edge of the first workpiece 1 through the clamping piece 34.

[0044] In one embodiment, three first extension edges 33 are provided, that is, the angle between adjacent first extension edges 33 is 120°, so that no matter in which direction the first workpiece 1 needs to move, the first centering piece 3 connected and fixed to the first workpiece 1 by the clamping piece 34 on the first extension edge 33 can also move synchronously therewith. In addition, the clamping piece 34 includes a horizontal edge 341 and a vertical edge 342. Of course, the horizontal edge 341 and the vertical edge 342 are integrally formed. For the convenience of description, the two are separated here. The horizontal edge 341 is arranged in a horizontal manner. When it extends to the edge of the first workpiece 1, it bends downward to form the vertical edge 342. At this time, the right angle formed by the horizontal edge 341 and the vertical edge 342 is just clamped at the edge of the first workpiece 1, thereby realizing the fixation of the first workpiece 1 and the first centering piece 3.

[0045] In a specific embodiment, each of the first extension edges 33 is provided with a hole position 35; the first centering member 3 further includes a measuring device, which is arranged at the hole position 35 and is used to sense the distance between the first extension edge 33 and the upper surface of the first workpiece 1. The first extension edge 33 is provided with a trapezoidal hole arranged radially, and the trapezoidal hole is the hole position 35 mentioned above, and the arrangement of the trapezoidal hole is mainly used to fix the measuring device. The measuring device is placed on the upper surface of the first workpiece 1, and its upper part can be stuck in the hole position 35.

[0046] In a specific embodiment, the measuring device is a micrometer, which is arranged in a one-to-one correspondence with the first extension edge 33, and the reading error of the multiple micrometers is no more than 0.02 mm. The micrometer is a precision length measuring tool, usually used to measure tiny lengths, diameters or depths. It consists of a fixed sleeve and a movable sleeve, and the position of the measuring axis is changed by rotating the movable sleeve to achieve precise measurement. The micrometer in this embodiment is used to measure the distance between the first extension edge 33 and the upper surface of the first workpiece 1. When three first extension edges 33 are provided, there are also three micrometers, each first extension edge 33 corresponds to a micrometer, and the error of the three micrometer readings is no more than 0.02 mm. In this way, the horizontality of the first workpiece 1 during installation can be ensured to avoid affecting the quality of thin film deposition after it is tilted.

[0047] In a specific embodiment, Figure 4As shown, the second centering piece 4 includes a second body 42, the second centering hole 41 is opened at the central position of the second body 42, and the outer peripheral surface of the second body 42 has a second extension edge 43 extending radially outward, and the second extension edge 43 is fixed to the upper end surface of the second workpiece 2. Specifically, the outer peripheral surface of the second body 42 has a second extension edge 43 radiating radially outward, and at the center position of the second body 42, there is a second centering hole 41. In the specific use process, the end of the second extension edge 43 is fixed to the end surface of the second workpiece 2 by screws, so that the second workpiece 2 and the second centering piece 4 are a whole, and the center of the second centering piece 4 is the center of the second workpiece 2, that is, the second centering hole 41 is the center position of the second workpiece 2. In this way, when the first centering hole 31 and the second centering hole 41 are aligned up and down, it proves that the first workpiece 1 and the second workpiece 2 are concentrically arranged, otherwise the first workpiece 1 needs to be adjusted.

[0048] In a specific embodiment, there are multiple second extension edges 43, and the multiple second extension edges 43 are evenly distributed along the circumference of the second body 42; the ends of the second extension edges 43 have fixing holes 44, and fixing columns 45 pass through the fixing holes 44 to fix the second centering piece 4 on the second workpiece 2. In one embodiment, there are four second extension edges 43, that is, the angle between adjacent second extension edges 43 is 90°, so that the second workpiece 2 and the second centering piece 4 are fixed together from four directions to prevent the second centering piece 4 from moving and causing it to not correspond to the center of the second workpiece 2.

[0049] In a specific embodiment, the centering installation device also includes a disassembly part 6, which includes a third body 61, and the bottom of the third body 61 has an extension column 62, and the bottom of the extension column 62 has a rubber top screw head 63, and the rubber top screw head 63 can be inserted into the threaded hole on the end face of the second workpiece 2; wherein the thread height in the threaded hole is less than the thread height of the rubber top screw head 63.

[0050] In addition, the first workpiece 1 includes an insulating disk 11 and an electrostatic suction cup 12, and the second workpiece 2 is a base. The insulating disk 11 is arranged in the base, and the electrostatic suction cup 12 is arranged on the insulating disk 11 and the two are fixed by positioning pins; the base is arranged in the cavity and the two are sealed by a sealing ring; when the rubber screw head 63 is inserted into the threaded hole on the end face of the base, it can separate the base from the cavity.

[0051] The lower electrode assembly is arranged in the cavity, and the base of the lower electrode assembly is tightly fitted with the cavity through a sealing ring. During the disassembly of the electrostatic suction cup assembly, the sealing rubber ring between the base and the cavity is sticky, which makes it difficult to disassemble the electrostatic suction cup assembly. The disassembly part 6 of this embodiment has an extension column 62 at the bottom, and a rubber top screw head 63 at the bottom of the extension column 62. The rubber top screw head 63 is inserted into the threaded hole on the end face of the second workpiece 2. Because the thread height in the threaded hole is less than the thread height of the rubber top screw head 63, when the thread hole and the rubber top screw head 63 are matched to complete the rotation of the thread, the rubber top screw head 63 continues to move downward, and the base can be separated from the cavity at this time. Ordinary top screws will cause debris to appear at the bottom of the cavity. The rubber top screw head 63 of this embodiment has a rubber head, which can ensure the rapid disassembly of the electrostatic suction cup while protecting the cavity.

[0052] In addition, in order to facilitate the operation of the disassembly member 6 , in a specific embodiment, the upper surface of the third body 61 has a handle 64 .

[0053] The centering installation equipment provided in this embodiment, when the first workpiece 1 includes an insulating disk 11 and an electrostatic suction cup 12, and the second workpiece 2 is a base, the specific assembly steps are: first, the electrostatic suction cup, the insulating disk and the base are connected together with screws, and the screws are not tightened; then, the first centering piece 3 and the second centering piece 4 are respectively installed on the electrostatic suction cup and the base; the positioning piece 5 is inserted into the first centering hole 31 and the second centering hole 41, and by constraining the dimensional tolerance of the tooling, the coaxiality of the tooling can reach 0.09mm; the micrometer is placed on the surface of the electrostatic suction cup, and the screws are tightened from the bottom of the tooling, while ensuring that the reading errors of the three micrometers are within 0.02mm.

[0054] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. A centring installation device, used for centring installation of a first workpiece and a second workpiece, wherein the first workpiece is located inside the second workpiece; characterized in that: The centering installation equipment includes a first centering piece, a second centering piece and a positioning piece. The first centering piece is arranged on the first workpiece and has a first centering hole located in the center. The second centering piece is located above the first centering piece and has a second centering hole located in the center. The end of the second centering piece extends to the second workpiece. The positioning piece has a first state in which it can be inserted into the first centering hole and the second centering hole, and a second state in which it can only be inserted into the second centering hole.

2. The centering installation device according to claim 1, characterized in that: The first centering piece includes a first body, the first centering hole is opened at the central position of the first body, and the outer peripheral surface of the first body has a first extension edge extending radially outward, and the end of the first extension edge is clamped at the edge of the first workpiece.

3. The centering installation device according to claim 2, characterized in that: There are a plurality of first extension edges, which are evenly distributed along the circumference of the first body; an end of the first extension edge has a clamping piece, and the first extension edge is clamped at the edge of the first workpiece through the clamping piece.

4. The centering installation device according to claim 3, characterized in that: Each of the first extension edges is provided with a hole; the first centering member further comprises a measuring device, which is arranged at the hole position and is used to sense the distance between the first extension edge and the upper surface of the first workpiece.

5. The centering installation device according to claim 4, characterized in that: The measuring device is a micrometer, which is arranged in one-to-one correspondence with the first extended edge, and the reading error of multiple micrometers is no more than 0.02mm.

6. The centering installation device according to claim 1, characterized in that: The second centering piece includes a second body, the second centering hole is opened at the central position of the second body, and the outer peripheral surface of the second body has a second extension edge extending radially outward, and the second extension edge is fixed to the upper end surface of the second workpiece.

7. The centering installation device according to claim 6, characterized in that: There are multiple second extension edges, and the multiple second extension edges are evenly distributed along the circumference of the second body; the end of the second extension edge has a fixing hole, and the fixing column passes through the fixing hole to fix the second centering piece on the second workpiece.

8. The centering installation device according to any one of claims 1 to 7, characterized in that: The centering installation device also includes a disassembly part, which includes a third body, and the bottom of the third body has an extension column, and the bottom of the extension column has a rubber top screw head, and the rubber top screw head can be inserted into the threaded hole on the end face of the second workpiece; wherein the thread height in the threaded hole is less than the thread height of the rubber top screw head.

9. The centering installation device according to claim 8, characterized in that: The upper surface of the third body is provided with a handle.

10. The centering installation device according to claim 8, characterized in that: The first workpiece includes an insulating disk and an electrostatic suction cup, and the second workpiece is a base. The insulating disk is arranged in the base, and the electrostatic suction cup is arranged on the insulating disk and the two are fixed by positioning pins; the base is arranged in the cavity and the two are sealed by a sealing ring; when the rubber screw head is inserted into the threaded hole on the end face of the base, it can separate the base from the cavity.

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