Control system for vacuum coating machine

Abstract

The invention relates to the technical field of vacuum coating, and particularly discloses a control system for a vacuum coating machine, which comprises a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module and a coating parameter control analysis module. Pressure intensity values of monitoring time points in all control time periods are accurately collected through a capacitive pressure sensor, the average value of the pressure intensity is calculated, the overall level of the vacuum pressure intensity in the time period can be visually reflected, and basic data are provided for judging whether the vacuum degree is in a proper range or not; an active monitoring and prevention mechanism is adopted for the vacuum coating machine, so that the continuity and the stability of coating production are guaranteed, a scientific basis is provided for preventive maintenance of the equipment, the service life of the equipment is prolonged, the probability of sudden failure of the equipment is reduced, the reliability, the high efficiency and the intelligent level of the whole vacuum coating production system are improved, and the production cost is reduced. And the competitiveness of enterprises in the field of coating processing is improved, the production cost is reduced, and the product quality is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a control system for a vacuum coating machine. Background Art

[0002] As an advanced process for preparing thin films on the surface of materials, vacuum coating technology plays an extremely critical role in many fields such as optics, electronics, and mechanical protection. In the field of optics, vacuum coating can be used to prepare anti-reflection films, reflective films, etc., which significantly improve the performance of optical components and are widely used in camera lenses, telescope lenses, and various optical instruments; in the electronics industry, it can provide functional films such as conductive, insulating, and protective films for electronic devices, and assist in the manufacturing and performance optimization of integrated circuits and display screens; in terms of mechanical protection, the prepared wear-resistant and corrosion-resistant films can extend the service life of mechanical parts and reduce equipment maintenance costs. With the rapid development of modern science and technology, the requirements for the quality and efficiency of vacuum coating are becoming increasingly stringent, prompting the continuous evolution and innovation of related technologies.

[0003] In terms of vacuum control, traditional vacuum coating machine control systems can only perform simple pressure monitoring and rough control. It is difficult to accurately grasp the dynamic changes of vacuum and cannot effectively deal with problems such as small leaks and fluctuations in vacuum pump performance, resulting in an unstable vacuum environment. As a result, quality defects such as impurities mixed into the film layer and uneven film thickness are likely to occur during the coating process, seriously affecting key indicators such as the product's optical performance, electrical performance, and adhesion, and reducing the product's yield and reliability. For gas flow control, there is a lack of accurate matching and analysis capabilities for a variety of inlet and outlet gas flow rates. In the reactive coating process, since the gas flow cannot be accurately controlled according to the stoichiometric ratio of the coating reaction, it is easy to cause the film composition to deviate from expectations, resulting in the film performance being unable to meet actual application requirements, limiting the application of the coating process in some high-end fields that have strict requirements on film composition. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a control system for a vacuum coating machine to solve the above-mentioned technical defects.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a control system for a vacuum coating machine, comprising: a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module, and a coating parameter control analysis module;

[0006] The vacuum stability state analysis module performs comprehensive calculation and analysis based on the pressure value and vacuum degree change rate at each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the vacuum stability state index of the vacuum coating machine corresponding to each control period during the operation;

[0007] The gas flow matching analysis module performs comprehensive calculation and analysis based on the intake and outlet flow rates of various intake gases at each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the flow matching state index of the vacuum coating machine corresponding to each control period;

[0008] The coating environment control analysis module performs comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period, and obtains the coating environment control coefficient of the vacuum coating machine corresponding to each control period;

[0009] The coating parameter control analysis module performs comprehensive calculation and analysis based on the temperature parameters and film thickness parameters of each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the comprehensive coating control coefficient of the vacuum coating machine corresponding to each control period.

[0010] Furthermore, it also includes: an early warning control module and a database;

[0011] An early warning control module performs corresponding early warning operations based on the basic environmental abnormality signals and coating state abnormality signals of the vacuum coating machine corresponding to each control period;

[0012] The database is used to store the coating control analysis parameters of the vacuum coating machine corresponding to each monitoring time point in each control period.

[0013] Furthermore, the method for comprehensively calculating and analyzing the pressure value and vacuum degree change rate at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows:

[0014] The pressure value of each monitoring time point in each control period of the vacuum coating machine is monitored and collected in real time by a capacitive pressure sensor, and the pressure value of each monitoring time point in each control period of the vacuum coating machine is obtained, which is recorded as YPij; wherein, i=1, 2, ..., n, i represents the number of each control period, n represents the total number of the numbers of each control period, j=1, 2, ..., m, j represents the number of each monitoring time point, and m represents the total number of the numbers of each monitoring time point;

[0015] By summing up the pressure values ​​of the vacuum coating machine at each monitoring time point in each control period and dividing it by m monitoring time points, the average pressure value of the vacuum coating machine corresponding to each control period is obtained, which is recorded as

[0016] By calculating the ratio of the pressure difference between two adjacent monitoring time points in each control period of the vacuum coating machine and the time interval between two adjacent monitoring time points, the vacuum degree change rate of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as ZBij. At the same time, the vacuum degree change rate of the vacuum coating machine corresponding to each control period is summed and divided by the m-1 vacuum degree change rate calculation times to obtain the average vacuum degree change rate of the vacuum coating machine corresponding to each control period, which is recorded as

[0017] Combining the above parameters, the vacuum pressure stability value YWi and the vacuum change stability value ZWi of the vacuum coating machine corresponding to each control period are calculated respectively.

[0018] Furthermore, the vacuum pressure stability value and vacuum change stability value of the vacuum coating machine corresponding to each control period are calculated and analyzed to obtain the vacuum stability state index of the vacuum coating machine corresponding to each control period. The specific calculation and analysis method is as follows:

[0019] According to the formula The vacuum stability state index SWi of the vacuum coating machine corresponding to each control period is calculated. YWc and ZWc are respectively represented by the threshold values ​​set corresponding to the vacuum pressure stability value and the vacuum change stability value of the vacuum coating machine corresponding to each control period. The specific threshold values ​​are manually set according to historical data.

[0020] If the value of the vacuum stability state index of the vacuum coating machine corresponding to a certain control period exceeds 0.5, it means that there is an abnormality in the vacuum system stability of the vacuum coating machine corresponding to the control period, and a vacuum stability abnormality signal is generated. At this time, an abnormal alarm is issued in the control system of the vacuum coating machine. Otherwise, it means that the vacuum system of the vacuum coating machine corresponding to the control period is stable.

[0021] Furthermore, the method for comprehensively calculating and analyzing the intake flow rate and the exhaust flow rate of various intake gases at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows:

[0022] Obtain the type of intake gas at each monitoring time point in each control period corresponding to the vacuum coating machine, recorded as h, and h = 1, 2, ..., g, g represents the total number of intake gas types;

[0023] The mass flow sensor is used to monitor and collect data of the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine in real time, and the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as JQijh and CQijh respectively;

[0024] According to the formula The flow matching state index CGi of the vacuum coating machine corresponding to each control period is calculated, and Rh is expressed as the reaction consumption ratio of the h-th intake gas in the coating reaction.

[0025] Furthermore, if the flow matching state index of the vacuum coating machine corresponding to a certain control period is less than 0.1, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is stable. Otherwise, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is unstable. When magnetron sputtering is used to prepare oxide thin films, defects in the film components may occur, generating abnormal gas environment signals.

[0026] Furthermore, the method of comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period is as follows:

[0027] According to the formula Calculate the coating environment control coefficient CHi of the vacuum coating machine corresponding to each control period. When the coating process is started, if the coating environment control coefficient of the vacuum coating machine corresponding to each control period is less than 0.2, it means that the basic environment of the vacuum coating machine corresponding to the control period meets the coating processing requirements. Otherwise, it means that the basic environment of the vacuum coating machine corresponding to the control period does not meet the coating processing requirements, and a basic environment abnormality signal is generated;

[0028] By real-time recording the coating environment control coefficient of the vacuum coating machine corresponding to each control period, when the coating environment control coefficient of the vacuum coating machine corresponding to each control period shows an upward trend, it means that the basic environment is deteriorating. Before the coating environment control coefficient of the vacuum coating machine corresponding to each control period reaches the threshold, the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period are analyzed.

[0029] Furthermore, the method for comprehensively calculating and analyzing the temperature parameters and film thickness parameters at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows:

[0030] The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by thermocouple sensors, and the temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as DTijk and JTijk, respectively, k = 1, 2, ..., f, k represents the number of each measurement point, and f represents the total number of the measurement point numbers;

[0031] The film thickness parameters of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by a number of film thickness sensors, and the coating thickness of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as DHijp, p=1, 2, ..., d, p represents the number of each film thickness sensor, and d represents the total number of each film thickness sensor number.

[0032] Furthermore, according to the formula Calculate the temperature uniformity index CTi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period;

[0033] According to the formula Calculate the film thickness uniformity index CDi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period;

[0034] According to the formula The film thickness growth rate index CSi of the vacuum coating machine corresponding to each control period is calculated, and DHijp0 is represented as the initial film thickness corresponding to the vacuum coating machine;

[0035] The comprehensive coating control coefficient CPi of the vacuum coating machine corresponding to each control period is obtained by multiplying the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index of the vacuum coating machine corresponding to each control period by the corresponding set weight coefficients, and then summing the weighted results of the three.

[0036] Furthermore, if the comprehensive coating control coefficient of the vacuum coating machine corresponding to a certain control period exceeds 0.3, it means that the coating thickness of the vacuum coating machine corresponding to the control period deviates, and an abnormal coating status signal is generated; at this time, the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index in the comprehensive coating control coefficient of the vacuum coating machine corresponding to each control period are analyzed. If the average temperature of the coating material exceeds the safety threshold, it indicates that the temperature uniformity is poor, and the temperature control device of the substrate is adjusted. If the average temperature of the coating material exceeds the safety threshold, it indicates that the operation mode of the coating substrate needs to be adjusted. If the film thickness growth rate index deviates from the set value, it indicates that parameters such as the evaporation source power and the gas flow rate need to be adjusted. Otherwise, it indicates that the coating thickness of the vacuum coating machine corresponding to the control period is stable.

[0037] Beneficial effects of the present invention:

[0038] 1. The capacitive pressure sensor accurately collects the pressure value at each monitoring time point in each control period and calculates the average pressure value, which can directly reflect the overall level of vacuum pressure in the period and provide basic data for judging whether the vacuum degree is in the appropriate range. The ratio of the pressure difference between adjacent monitoring time points and the time interval is calculated to obtain the vacuum degree change rate and the average value, which can accurately grasp the dynamic change trend of the vacuum degree and timely detect the abnormal fluctuation of the vacuum system. The vacuum pressure stability value and the vacuum change stability value are calculated according to a specific formula, and then the vacuum stability state index is calculated by combining the two. The threshold value can be set manually based on historical data, which enables the system to flexibly evaluate the vacuum stability according to different coating process requirements. It can not only monitor the vacuum state in real time during the coating process, effectively avoid coating quality problems caused by vacuum instability, such as uneven film layer, impurity mixing, etc., but also help to improve the repeatability and stability of the coating process, and provide reliable technical guarantee for large-scale, high-precision coating production. Preventive maintenance of the vacuum system can also be carried out according to the change trend of the vacuum stability state index, extend the service life of the equipment, and reduce the maintenance cost of the equipment.

[0039] 2. By setting a clear threshold of the vacuum stability index and making judgments based on its value, when the index exceeds 0.5, an abnormal signal is generated in time and an alarm is issued, so that the operator can quickly know that there is a problem with the stability of the vacuum system, so that measures can be taken immediately to troubleshoot the fault, such as checking the operating status of the vacuum pump and the integrity of the sealing components, etc., to avoid a serious decline in the coating quality or even coating failure due to continued vacuum instability, effectively reducing the defective rate and waste of raw materials; and the degree of proximity of the index to 0 and 1 can intuitively reflect the stability of the control system. On the one hand, it is convenient for operators to quickly evaluate the overall performance of the current vacuum system, and on the other hand, it provides a quantitative basis for long-term process optimization. The process parameters or equipment maintenance plan can be adjusted according to the index data of different time periods, which is helpful to improve the overall operating efficiency of the vacuum coating machine and the consistency of the coating quality, and ensure the reliability and controllability of the production process. At the same time, it also lays a good foundation for the intelligent management and remote monitoring of equipment, which is conducive to realizing an unmanned automated production environment, reducing labor costs and improving the accuracy and flexibility of production.

[0040] 3. By accurately obtaining the type of intake gas and the corresponding intake flow and outlet flow data at each monitoring time point in each control period, a detailed basis is provided for a comprehensive assessment of the gas flow matching status. The flow matching state index calculated based on this can intuitively and quantitatively reflect the matching degree of the gas flow. In different coating processes such as preparing titanium nitride film or preparing oxide film by magnetron sputtering coating, the reaction consumption ratio determined by the specific reaction formula is calculated to make the index more in line with the actual process requirements; when the flow matching state index is less than 0.1, it can be determined that the gas environment is stable, which helps to ensure that the coating process is carried out in a stable gas environment, effectively improve the quality uniformity and composition accuracy of the film, reduce film defects caused by gas flow mismatch, and improve product yield. When the index exceeds the range, a gas environment abnormality signal is generated in time, which allows operators to quickly detect problems, adjust the intake flow or check the gas supply system, vacuum pump and other related equipment in time, avoid a large number of defective products due to unstable gas environment, and ensure the continuity and stability of production. At the same time, it also provides key data support for process optimization and troubleshooting, which is conducive to reducing production costs, improving production efficiency and promoting vacuum coating technology to develop in a more accurate and efficient direction.

[0041] 4. By calculating the coating environment control coefficient by combining the vacuum stability state index and the flow matching state index, the basic environmental conditions of the vacuum coating machine can be comprehensively and accurately measured. When the coating process is started, 0.2 is used as the threshold to judge whether the basic environment meets the requirements. This can effectively avoid starting the coating in an unfavorable environment, reduce coating failures and material waste caused by poor initial environment, and ensure that the coating process is in a reliable state from the beginning. During the coating process, real-time recording and trend analysis of the coating environment control coefficient are extremely critical. Its upward trend can timely warn of the deterioration of the basic environment. Operators can intervene in advance based on the specific conditions of the vacuum stability state index and the flow matching state index. For example, check the vacuum pump or sealing components for vacuum fluctuation problems, adjust the mass flow controller or gas pipeline for abnormal gas flow matching, etc., so as to effectively prevent the problems of coating quality degradation and film defects caused by the deterioration of the basic environment, and improve the qualification rate and consistency of coating products. This active monitoring and prevention mechanism not only ensures the continuity and stability of coating production, but also provides a scientific basis for the preventive maintenance of equipment, extends the service life of equipment, reduces the probability of sudden equipment failure, and improves the reliability, efficiency and intelligence of the entire vacuum coating production system, which helps enterprises to improve their competitiveness in the field of coating processing, reduce production costs and improve product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The present invention will be further described below in conjunction with the accompanying drawings.

[0043] Figure 1The present invention is a block diagram of a control system for a vacuum coating machine according to an embodiment of the present invention. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work also fall within the scope of protection of the present invention.

[0045] As shown in the present invention and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0046] Although the present invention has made various references to certain modules in the system according to an embodiment of the present invention, any number of different modules can be used and run on a user terminal and / or server. The modules are only illustrative, and different aspects of the system and method can use different modules.

[0047] The present invention uses a flow chart to illustrate the operations performed by the system according to an embodiment of the present invention. It should be understood that the preceding or following operations are not necessarily performed precisely in order. On the contrary, various steps may be processed in reverse order or simultaneously as required. At the same time, other operations may also be added to these processes, or one or more operations may be removed from these processes.

[0048] Below, the exemplary embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments of the present invention, and it should be understood that the present invention is not limited to the exemplary embodiments described here.

[0049] Embodiment 1:

[0050] See also Figure 1 As shown, a control system for a vacuum coating machine includes: a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module, and a coating parameter control analysis module.

[0051] The vacuum stability state analysis module performs comprehensive calculation and analysis based on the pressure value and vacuum degree change rate at each monitoring time point in each control period during the working process of the vacuum coating machine, and obtains the vacuum stability state index of the vacuum coating machine corresponding to each control period during the working process. The specific calculation and analysis method is as follows:

[0052] The pressure value of each monitoring time point in each control period of the vacuum coating machine is monitored and collected in real time by a capacitive pressure sensor, and the pressure value of each monitoring time point in each control period of the vacuum coating machine is obtained, which is recorded as YPij; wherein, i=1, 2, ..., n, i represents the number of each control period, n represents the total number of the control period numbers, j=1, 2, ..., m, j represents the number of each monitoring time point, and m represents the total number of the monitoring time point numbers.

[0053] By summing up the pressure values ​​of the vacuum coating machine at each monitoring time point in each control period and dividing the sum by m monitoring time points, the average pressure value of the vacuum coating machine corresponding to each control period is obtained, which is recorded as YPi;

[0054] By calculating the ratio of the pressure difference between two adjacent monitoring time points in each control period of the vacuum coating machine and the time interval between two adjacent monitoring time points, the vacuum degree change rate of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as ZBij. At the same time, the vacuum degree change rate of the vacuum coating machine corresponding to each control period is summed and divided by the m-1 vacuum degree change rate calculation times to obtain the average vacuum degree change rate of the vacuum coating machine corresponding to each control period, which is recorded as

[0055] According to the formula Calculate the vacuum pressure stability value YWi of the vacuum coating machine corresponding to each control period;

[0056] According to the formula Calculate the vacuum change stability value ZWi of the vacuum coating machine corresponding to each control period;

[0057] The vacuum pressure stability value and vacuum change stability value of the vacuum coating machine corresponding to each control period are calculated and analyzed to obtain the vacuum stability state index of the vacuum coating machine corresponding to each control period. The specific calculation and analysis method is as follows:

[0058] According to the formula The vacuum stability state index SWi of the vacuum coating machine corresponding to each control period is calculated. YWc and ZWc respectively represent the threshold values ​​set accordingly for the vacuum pressure stability value and vacuum change stability value of the vacuum coating machine corresponding to each control period. The specific threshold values ​​are set manually according to historical data.

[0059] If the value of the vacuum stability state index of the vacuum coating machine corresponding to a certain control period exceeds 0.5, it means that there is an abnormality in the stability of the vacuum system of the vacuum coating machine corresponding to the control period, and a vacuum stability abnormality signal is generated. At this time, an abnormal alarm is issued in the control system of the vacuum coating machine. Otherwise, it means that the vacuum system of the vacuum coating machine corresponding to the control period is stable. It should be noted that the closer the vacuum stability state index of the vacuum coating machine corresponding to each control period is to 0, the more stable the control system of the vacuum coating machine is. On the contrary, the closer the vacuum stability state index of the vacuum coating machine corresponding to each control period is to 1, it means that there are unstable factors in the control system of the vacuum coating machine in most time periods.

[0060] In a specific embodiment, the present invention uses a capacitive pressure sensor to accurately collect the pressure value at each monitoring time point in each control period, and calculates the pressure average value, which can intuitively reflect the overall level of vacuum pressure in the period, provide basic data for judging whether the vacuum degree is in an appropriate range, calculate the ratio of the pressure difference between adjacent monitoring time points and the time interval to obtain the vacuum degree change rate and calculate its average value, which can accurately grasp the dynamic change trend of the vacuum degree and timely detect the abnormal fluctuation of the vacuum system. According to a specific formula, the vacuum pressure stability value and the vacuum change stability value are calculated respectively, and then the vacuum stability state index is calculated by combining the two, and the threshold value can be manually set according to historical data, which enables the system to flexibly evaluate the vacuum stability according to different coating process requirements, not only can the vacuum state be monitored in real time during the coating process, effectively avoiding coating quality problems caused by vacuum instability, such as uneven film layer, impurity mixing, etc., but also helps to improve the repeatability and stability of the coating process, and provides a reliable technical guarantee for large-scale, high-precision coating production, and can also perform preventive maintenance on the vacuum system according to the change trend of the vacuum stability state index, extend the service life of the equipment, and reduce the equipment maintenance cost.

[0061] In addition, by setting a clear threshold of the vacuum stability index and making judgments based on its value, an abnormal signal is generated and an alarm is sounded in time when the index exceeds 0.5, so that the operator can quickly know that there is a problem with the stability of the vacuum system, so that measures can be taken immediately to troubleshoot the fault, such as checking the operating status of the vacuum pump and the integrity of the sealing components, etc., to avoid a serious decline in the coating quality or even coating failure due to continued vacuum instability, effectively reducing the defective rate and waste of raw materials; and the degree of proximity of the index to 0 and 1 can intuitively reflect the stability of the control system. On the one hand, it is convenient for operators to quickly evaluate the overall performance of the current vacuum system, and on the other hand, it provides a quantitative basis for long-term process optimization. The process parameters or equipment maintenance plans can be adjusted according to the index data of different time periods, which helps to improve the overall operating efficiency of the vacuum coating machine and the consistency of the coating quality, and ensure the reliability and controllability of the production process. At the same time, it also lays a good foundation for the intelligent management and remote monitoring of equipment, which is conducive to realizing an unmanned automated production environment, reducing labor costs and improving the accuracy and flexibility of production.

[0062] The gas flow matching analysis module performs comprehensive calculation and analysis based on the intake and outlet flow rates of various intake gases at each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the flow matching state index of the vacuum coating machine corresponding to each control period. The specific calculation and analysis method is as follows:

[0063] Obtain the type of intake gas at each monitoring time point in each control period corresponding to the vacuum coating machine, recorded as h, and h = 1, 2, ..., g, g represents the total number of intake gas types;

[0064] The mass flow sensor is used to monitor and collect data of the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine in real time, and the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as JQijh and CQijh respectively;

[0065] According to the formula The flow matching state index CGi of the vacuum coating machine corresponding to each control period is calculated, and Rh is expressed as the reaction consumption ratio of the hth inlet gas in the coating reaction; specifically, when preparing titanium nitride film, if the inlet flow rates of nitrogen (N2) and titanium (Ti) source gas are JQ N2 and JQ Ti According to the reaction formula 2Ti+N2→2TiN, the nitrogen consumption ratio R N2 =1 / 2, the reaction consumption ratio of titanium source gas R Ti =1.

[0066] If the flow matching state index of the vacuum coating machine corresponding to a certain control period is less than 0.1, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is stable. Otherwise, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is unstable. When magnetron sputtering is used to prepare oxide thin films, defects in the film components may occur, generating abnormal gas environment signals.

[0067] In a specific embodiment, the present invention provides a detailed basis for comprehensively evaluating the gas flow matching status by accurately obtaining the intake gas type and the corresponding intake flow rate and outlet flow rate data at each monitoring time point in each control period. The flow matching state index calculated based on this can intuitively and quantitatively reflect the matching degree of the gas flow. In different coating processes such as preparing titanium nitride film or preparing oxide film by magnetron sputtering coating, the reaction consumption ratio determined by the specific reaction formula is calculated to make the index more in line with the actual process requirements; when the flow matching state index is less than 0.1, it can be determined that the gas environment is stable, which helps to ensure the coating process Carrying out the process in a stable gas environment can effectively improve the quality uniformity and composition accuracy of the film, reduce film defects caused by gas flow mismatch, and improve product yield. When the index exceeds the range, the gas environment abnormality signal is generated in time, which allows operators to quickly detect the problem and adjust the air intake flow or check the gas supply system, vacuum pump and other related equipment in time to avoid a large number of defective products due to unstable gas environment, thus ensuring the continuity and stability of production. At the same time, it also provides key data support for process optimization and troubleshooting, which is conducive to reducing production costs, improving production efficiency and promoting vacuum coating technology to develop in a more precise and efficient direction.

[0068] The coating environment control analysis module performs comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period, and obtains the coating environment control coefficient of the vacuum coating machine corresponding to each control period. The specific calculation and analysis method is as follows:

[0069] According to the formula Calculate the coating environment control coefficient CHi of the vacuum coating machine corresponding to each control period. When the coating process starts, if the coating environment control coefficient of the vacuum coating machine corresponding to each control period is less than 0.2, it means that the basic environment of the vacuum coating machine corresponding to the control period meets the coating processing requirements. Otherwise, it means that the basic environment of the vacuum coating machine corresponding to the control period does not meet the coating processing requirements, and a basic environment abnormality signal is generated. At this time, the vacuum coating machine issues a basic environment abnormality alarm and takes corresponding measures according to the specific circumstances of the vacuum stability coefficient and the gas flow matching coefficient.

[0070] In addition, by real-time recording the coating environment control coefficient of the vacuum coating machine corresponding to each control period, when the coating environment control coefficient of the vacuum coating machine corresponding to each control period shows an upward trend, it means that the basic environment is deteriorating. Before the coating environment control coefficient of the vacuum coating machine corresponding to each control period reaches the threshold, the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period are analyzed, so as to solve the abnormal problems of the basic environment of the vacuum coating machine corresponding to each control period in advance.

[0071] In a specific embodiment, the present invention calculates the coating environment control coefficient by comprehensively calculating the vacuum stability state index and the flow matching state index, which can comprehensively and accurately measure the basic environmental conditions of the vacuum coating machine. When the coating process is started, 0.2 is used as a threshold to judge whether the basic environment meets the requirements, which can effectively avoid starting the coating in a bad environment, reduce coating failures and material waste caused by poor initial environment, and ensure that the coating process is in a reliable state from the initial stage. During the coating process, real-time recording and trend analysis of the coating environment control coefficient is extremely critical. Its rising trend can timely warn of the deterioration of the basic environment. Operators can The system can intervene in advance according to the actual situation, such as checking the vacuum pump or sealing components for vacuum fluctuation problems, adjusting the mass flow controller or gas pipeline for abnormal gas flow matching, etc., so as to effectively prevent the problems of coating quality degradation and film defects caused by the deterioration of the basic environment, and improve the qualification rate and consistency of coating products. This proactive monitoring and prevention mechanism not only ensures the continuity and stability of coating production, but also provides a scientific basis for the preventive maintenance of equipment, prolongs the service life of equipment, reduces the probability of sudden equipment failure, and improves the reliability, efficiency and intelligence of the entire vacuum coating production system, which helps enterprises to improve their competitiveness in the field of coating processing, reduce production costs and improve product quality.

[0072] The coating parameter control analysis module performs comprehensive calculation and analysis based on the temperature parameters and film thickness parameters of each monitoring time point in each control period during the working process of the vacuum coating machine, and obtains the coating comprehensive control coefficient of the vacuum coating machine corresponding to each control period. The specific calculation and analysis method is as follows:

[0073] The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by thermocouple sensors, and the temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as DTijk and JTijk, respectively, k = 1, 2, ..., f, k represents the number of each measurement point, and f represents the total number of the measurement point numbers;

[0074] The film thickness parameters of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by a plurality of film thickness sensors, and the coating thickness of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as DHijp, p=1, 2, ..., d, p represents the number of each film thickness sensor, and d represents the total number of the film thickness sensor numbers;

[0075] According to the formula Calculate the temperature uniformity index CTi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period;

[0076] According to the formula Calculate the film thickness uniformity index CDi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period;

[0077] According to the formula The film thickness growth rate index CSi of the vacuum coating machine corresponding to each control period is calculated, and DHijp0 is represented as the initial film thickness corresponding to the vacuum coating machine;

[0078] The coating comprehensive control coefficient CPi of the vacuum coating machine corresponding to each control period is obtained by multiplying the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index of the vacuum coating machine corresponding to each control period by the corresponding set weight coefficients, and then summing the weighted results of the three.

[0079] If the comprehensive coating control coefficient of the vacuum coating machine corresponding to a certain control period exceeds 0.3, it means that the coating thickness of the vacuum coating machine corresponding to the control period deviates, and an abnormal coating status signal is generated; at this time, the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index in the comprehensive coating control coefficient of the vacuum coating machine corresponding to each control period are analyzed. If the average temperature of the coating material exceeds the safety threshold, it means that the temperature uniformity is poor, and the temperature control device of the substrate is adjusted. If the average temperature of the coating material exceeds the safety threshold, it means that the operation mode of the coating substrate needs to be adjusted. If the film thickness growth rate index deviates from the set value, it means that parameters such as the evaporation source power and the gas flow rate need to be adjusted. Otherwise, it means that the coating thickness of the vacuum coating machine corresponding to the control period is stable.

[0080] In a specific embodiment, the present invention uses thermocouple sensors and film thickness sensors to accurately collect the coating material temperature, substrate temperature and film thickness data at each monitoring time point in each control period, providing a rich and accurate information source for comprehensive control of the coating process. By calculating the temperature uniformity index, film thickness uniformity index and film thickness growth rate index in detail, it is possible to deeply analyze the balance of temperature distribution, the consistency of film thickness and the change pattern of film thickness over time during the coating process. Based on the calculated comprehensive control coefficient of the coating, 0.3 is used as the threshold to judge whether the coating thickness deviates, thereby realizing the quantitative evaluation and real-time monitoring of the coating quality. When the coefficient exceeds the standard, the sub-index is further analyzed to determine the root cause of the problem. For example, due to poor temperature uniformity (the average temperature of the coating material exceeds the threshold), the substrate temperature control device can be adjusted in a targeted manner; due to film thickness uniformity problems (abnormal average temperature of the coating material), the coating substrate operation mode can be optimized; due to deviations in the film thickness growth rate, the evaporation source power or gas flow rate and other parameters can be adjusted; through refined analysis and control mechanisms, film quality defects caused by abnormal temperature and film thickness during the coating process are effectively avoided, the qualified rate and stability of the coating products are significantly improved, and the continuity and efficiency of production are guaranteed. At the same time, it also provides data support and direction guidance for process optimization, which helps enterprises continuously improve the level of vacuum coating technology, reduce production costs and enhance market competitiveness.

[0081] The early warning control module performs corresponding early warning operations based on the basic environmental abnormal signals and coating state abnormal signals of the vacuum coating machine corresponding to each control period.

[0082] The database is used to store the coating control analysis parameters of the vacuum coating machine corresponding to each monitoring time point in each control period.

[0083] The above formulas are all dimensionless and numerical calculations. The formula is a formula that is obtained by collecting a large amount of data and performing software simulation to obtain the most recent real situation. The size of the coefficient is to quantify each parameter to obtain a specific value. Regarding the size of the coefficient, it is acceptable as long as it does not affect the proportional relationship between the parameter and the quantified value.

[0084] In addition, those skilled in the art will appreciate that various aspects of the present invention may be illustrated and described by a number of patentable categories or situations, including any new and useful process, machine, product or combination of substances, or any new and useful improvements thereto. Accordingly, various aspects of the present invention may be performed entirely by hardware, entirely by software (including firmware, resident software, microcode, etc.), or by a combination of hardware and software. The above hardware or software may all be referred to as "data blocks", "modules", "engines", "units", "components" or "systems". In addition, various aspects of the present invention may be represented as a computer product located in one or more computer-readable media, which includes computer-readable program code.

[0085] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the invention belongs. It should also be understood that terms such as those defined in common dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0086] The above is an explanation of the present invention and should not be considered as a limitation thereof. Although several exemplary embodiments of the present invention have been described, it will be readily appreciated by those skilled in the art that many modifications may be made to the exemplary embodiments without departing from the novel teachings and advantages of the present invention. Therefore, all such modifications are intended to be included within the scope of the present invention as defined in the claims. It should be understood that the above is an explanation of the present invention and should not be considered as being limited to the specific embodiments disclosed, and modifications to the disclosed embodiments and other embodiments are intended to be included within the scope of the appended claims. The present invention is defined by the claims and their equivalents.

Claims

1. A control system for a vacuum coating machine, characterized in that: It includes a vacuum stable state analysis module, a gas flow matching analysis module, a coating environment control analysis module, and a coating parameter control analysis module; its characteristics are: The vacuum stability state analysis module performs comprehensive calculation and analysis based on the pressure value and vacuum degree change rate at each monitoring time point in each control period during the working process of the vacuum coating machine, and obtains the vacuum stability state index of the vacuum coating machine corresponding to each control period during the working process; The gas flow matching analysis module performs comprehensive calculation and analysis based on the intake and outlet flow rates of various intake gases at each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the flow matching state index of the vacuum coating machine corresponding to each control period; The coating environment control analysis module performs comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period, and obtains the coating environment control coefficient of the vacuum coating machine corresponding to each control period; The coating parameter control analysis module performs comprehensive calculation and analysis based on the temperature parameters and film thickness parameters of each monitoring time point in each control period during the operation of the vacuum coating machine, and obtains the comprehensive coating control coefficient of the vacuum coating machine corresponding to each control period.

2. A control system for a vacuum coating machine according to claim 1, characterized in that: Also includes: Early warning control module and database; The early warning control module performs corresponding early warning operations based on the basic environmental abnormality signals and coating state abnormality signals of the vacuum coating machine corresponding to each control period; The database is used to store the coating control analysis parameters of the vacuum coating machine corresponding to each monitoring time point in each control period.

3. A control system for a vacuum coating machine according to claim 1, characterized in that: The method for comprehensive calculation and analysis of the pressure value and vacuum degree change rate at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows: The pressure value of each monitoring time point in each control period of the vacuum coating machine is monitored and collected in real time by a capacitive pressure sensor, and the pressure value of each monitoring time point in each control period of the vacuum coating machine is obtained, which is recorded as YPij; wherein, i=1, 2, ..., n, i represents the number of each control period, n represents the total number of the numbers of each control period, j=1, 2, ..., m, j represents the number of each monitoring time point, and m represents the total number of the numbers of each monitoring time point; By summing up the pressure values ​​of the vacuum coating machine at each monitoring time point in each control period and dividing the sum by m monitoring time points, the average pressure value of the vacuum coating machine corresponding to each control period is obtained, which is recorded as YPi; By calculating the ratio of the pressure difference between two adjacent monitoring time points in each control period of the vacuum coating machine and the time interval between two adjacent monitoring time points, the vacuum degree change rate of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as ZBij. At the same time, the vacuum degree change rate of the vacuum coating machine corresponding to each control period is summed and divided by the m-1 vacuum degree change rate calculation times to obtain the average vacuum degree change rate of the vacuum coating machine corresponding to each control period, which is recorded as The vacuum pressure stability value YWi and vacuum change stability value ZWi of the vacuum coating machine corresponding to each control period are calculated respectively.

4. A control system for a vacuum coating machine according to claim 3, characterized in that: The specific calculation and analysis method for obtaining the vacuum stability index of the vacuum coating machine corresponding to each control period is as follows: According to the formula The vacuum stable state index SWi of the vacuum coating machine corresponding to each control period is calculated, and YWc and ZWc are respectively represented by the threshold values ​​set corresponding to the vacuum pressure stable value and the vacuum change stable value of the vacuum coating machine corresponding to each control period; If the value of the vacuum stability state index of the vacuum coating machine corresponding to a certain control period exceeds 0.5, it means that there is an abnormality in the vacuum system stability of the vacuum coating machine corresponding to the control period, and a vacuum stability abnormality signal is generated. At this time, an abnormal alarm is issued in the control system of the vacuum coating machine. Otherwise, it means that the vacuum system of the vacuum coating machine corresponding to the control period is stable.

5. A control system for a vacuum coating machine according to claim 4, characterized in that: The method for comprehensive calculation and analysis of the intake and outlet flow rates of various intake gases at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows: Obtain the type of intake gas at each monitoring time point in each control period corresponding to the vacuum coating machine, recorded as h, and h = 1, 2, ..., g, g represents the total number of intake gas types; The mass flow sensor is used to monitor and collect data of the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine in real time, and the intake flow rate and the outlet flow rate of each type of intake gas at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as JQijh and CQijh respectively; According to the formula The flow matching state index CGi of the vacuum coating machine corresponding to each control period is calculated, and Rh is expressed as the reaction consumption ratio of the h-th intake gas in the coating reaction.

6. A control system for a vacuum coating machine according to claim 5, characterized in that: If the flow matching state index of the vacuum coating machine corresponding to a certain control period is less than 0.1, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is stable. Otherwise, it means that the gas environment in the coating chamber of the vacuum coating machine corresponding to the control period is unstable. When magnetron sputtering is used to prepare oxide thin films, defects in the film components may occur, generating abnormal gas environment signals.

7. A control system for a vacuum coating machine according to claim 6, characterized in that: The method of comprehensive calculation and analysis based on the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period is as follows: According to the formula Calculate the coating environment control coefficient CHi of the vacuum coating machine corresponding to each control period. When the coating process is started, if the coating environment control coefficient of the vacuum coating machine corresponding to each control period is less than 0.2, it means that the basic environment of the vacuum coating machine corresponding to the control period meets the coating processing requirements. Otherwise, it means that the basic environment of the vacuum coating machine corresponding to the control period does not meet the coating processing requirements, and a basic environment abnormality signal is generated; By real-time recording the coating environment control coefficient of the vacuum coating machine corresponding to each control period, when the coating environment control coefficient of the vacuum coating machine corresponding to each control period shows an upward trend, it means that the basic environment is deteriorating. Before the coating environment control coefficient of the vacuum coating machine corresponding to each control period reaches the threshold, the vacuum stability state index and flow matching state index of the vacuum coating machine corresponding to each control period are analyzed.

8. The control system for a vacuum coating machine according to claim 1, characterized in that: The method for comprehensive calculation and analysis of the temperature parameters and film thickness parameters at each monitoring time point in each control period during the operation of the vacuum coating machine is as follows: The temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are monitored and collected in real time by thermocouple sensors, and the temperature of the coating material and the substrate at each monitoring time point in each control period of the vacuum coating machine are obtained, which are recorded as DTijk and JTijk, respectively, k = 1, 2, ..., f, k represents the number of each measurement point, and f represents the total number of the measurement point numbers; The film thickness parameters of the vacuum coating machine at each monitoring time point in each control period are monitored and collected in real time by a number of film thickness sensors, and the coating thickness of the vacuum coating machine at each monitoring time point in each control period is obtained, which is recorded as DHijp, p=1, 2, ..., d, p represents the number of each film thickness sensor, and d represents the total number of each film thickness sensor number.

9. A control system for a vacuum coating machine according to claim 8, characterized in that: According to the formula Calculate the temperature uniformity index CTi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period; According to the formula Calculate the film thickness uniformity index CDi of the vacuum coating machine corresponding to each control period, It is expressed as the average temperature of the coating material of the vacuum coating machine corresponding to each control period; According to the formula The film thickness growth rate index CSi of the vacuum coating machine corresponding to each control period is calculated, and DHijp0 is represented as the initial film thickness corresponding to the vacuum coating machine; The comprehensive coating control coefficient CPi of the vacuum coating machine corresponding to each control period is obtained by multiplying the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index of the vacuum coating machine corresponding to each control period by the corresponding set weight coefficients, and then summing the weighted results of the three.

10. A control system for a vacuum coating machine according to claim 9, characterized in that: If the comprehensive coating control coefficient of the vacuum coating machine corresponding to a certain control period exceeds 0.3, it means that the coating thickness of the vacuum coating machine corresponding to the control period deviates, and an abnormal coating status signal is generated; at this time, the average temperature of the coating material, the average temperature of the coating material and the film thickness growth rate index in the comprehensive coating control coefficient of the vacuum coating machine corresponding to each control period are analyzed. If the average temperature of the coating material exceeds the safety threshold, it means that the temperature uniformity is poor, and the temperature control device of the substrate is adjusted. If the average temperature of the coating material exceeds the safety threshold, it means that the operation mode of the coating substrate needs to be adjusted. If the film thickness growth rate index deviates from the set value, it means that parameters such as the evaporation source power and the gas flow rate need to be adjusted. Otherwise, it means that the coating thickness of the vacuum coating machine corresponding to the control period is stable.

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