Capacitive pressure sensor

Abstract

The invention provides a capacitive pressure sensor, which comprises an electrode layer and at least one ion electron sensing layer, and a gap is arranged between the sensing area of the ion electron sensing layer and the adjacent electrode layer. According to the invention, the gap is arranged between the sensing area of the ion electron sensing layer in the sensor and the adjacent electrode layer, so that a corresponding space exists to enable the microfibers on the ion electron sensing layer and the electrode layer to move freely, and therefore, under the action of pressure, the microfibers on the ion electron sensing layer and the electrode layer can move freely. The change of the contact area between the ion electron sensing layer and the electrode layer is more obvious, so that the sensitivity and the linearity of the sensor can be improved.

Description

Technical Field

[0001] This disclosure relates to the field of sensors, and in particular to a capacitive pressure sensor that senses ion electrons. Background Technology

[0002] With the rapid development of artificial intelligence, the demand for flexible tactile sensors that enable robots to interact intelligently and safely with their surroundings on non-planar surfaces is growing. Iono-electronic capacitive sensors, which can be used for real-time force signal reading, are emerging due to their low power consumption, fast response, and ease of fabrication using flexible materials. Despite the numerous advantages of iono-electronic capacitive sensing technology, its high cost and the use of corrosive chemicals hinder its large-scale application as robotic skin.

[0003] Furthermore, like all capacitive sensors, ionoelectronic capacitive tactile sensors are susceptible to electromagnetic interference and proximity effects. Their reliability is significantly limited when the sensor interacts with metals, human fingers, or nearby DC / AC electric fields. To address this issue, electrical shielding is typically achieved by covering the sensor surface with a grounded conductive grid or shielding layer. However, such shielding layers introduce parasitic capacitance between the shielding electrode and the sensing electrode, and this capacitance changes with sensor deformation. This change in parasitic capacitance can reach or even exceed the change in intrinsic capacitance between the sensing electrodes, thus adversely affecting the sensor's sensitivity and linearity. Summary of the Invention

[0004] This disclosure provides a capacitive pressure sensor by overcoming the shortcomings of existing ion-electronic capacitive sensors, such as low sensitivity and linearity.

[0005] Some embodiments provide a capacitive pressure sensor, including an electrode layer and at least one ion-electron sensing layer, wherein a gap is provided between the sensing area of ​​the ion-electron sensing layer and the adjacent electrode layer.

[0006] Optionally, the electrode layer includes a top electrode layer and a bottom electrode layer, wherein only the inner surface of both the top electrode layer and the bottom electrode layer is conductive.

[0007] Optionally, the electrode layer further includes an intermediate electrode layer, wherein both sides of the intermediate electrode layer are conductive;

[0008] Both the top plate electrode layer and the bottom plate electrode layer are grounded, and the intermediate electrode layer is connected to an external power source.

[0009] Optionally, the intermediate electrode layer is directly connected to the power supply, or the intermediate electrode layer is connected to the power supply through circuit elements.

[0010] Optionally, the circuit elements include switches, field-effect transistors, or inductors; and / or, the power supply is a DC power supply or an AC power supply.

[0011] Optionally, the ion-electron sensing layer may be provided between any two adjacent electrode layers, or the ion-electron sensing layer may be provided between only some of the two adjacent electrode layers.

[0012] Optionally, the ion-electron sensing layer includes an ion-electron sensing sheet and an adhesive layer, wherein the ion-electron sensing sheet is clipped onto the corresponding adhesive layer, and the adhesive layer is adhered between two electrode layers adjacent to the ion-electron sensing layer.

[0013] Optionally, the adhesive layer includes an adhesive tape with a receiving hole adapted to the ion-electron sensor sheet, the ion-electron sensor sheet being held in the receiving hole.

[0014] Optionally, the electrode layer includes a first fiber substrate, which is used to achieve conductivity by printing conductive carbon paste; and / or,

[0015] The ion-electron sensing layer includes a second fiber substrate on which ion ink is printed.

[0016] Optionally, the first fiber substrate is any one of fabric, paper, polymer fiber, polymer film, and cellulose derivative; and / or,

[0017] The second fiber substrate is any one of fabric, paper, polymer fiber, polymer film, and cellulose derivative.

[0018] Optionally, the ionic ink includes water, polyvinyl alcohol, and ionic liquid;

[0019] The ionic liquid comprises cations and anions, wherein the cations comprise at least one of ammonium ions, phosphonium ions, imidazolium ions, and pyrrolomium ions, and the anions comprise at least one of halides, tetrafluoroborates, bis(trifluoromethanesulfonyl)imides, trifluoromethanesulfonates, and hexafluorophosphates.

[0020] Optionally, the gap is formed based on the natural stacking or compression between the sensing region of the ion-electron sensing layer and the adjacent electrode layer. Specifically, the gap is generated based on the fibrous structure of the sensing region of the ion-electron sensing layer and the fibrous structure of the electrode layer.

[0021] Optionally, the distance of the gap ranges from 1 to 50 micrometers.

[0022] Optionally, the number of electrode layers is an odd number and greater than or equal to 3, the outermost electrode layer is grounded, and adjacent electrode layers are sequentially configured to alternately connect to power and ground.

[0023] The positive effects of some embodiments are as follows: a capacitive pressure sensor is provided, which provides a gap between the sensing area of ​​the ion-electron sensing layer inside the sensor and the adjacent electrode layer, thereby creating space for the microfibers on the ion-electron sensing layer and the electrode layer to move freely. Therefore, under pressure, the contact area between the ion-electron sensing layer and the electrode layer changes more significantly, thereby improving the sensitivity and linearity of the sensor. Attached Figure Description

[0024] Figure 1 This is a partial cross-sectional schematic diagram of a capacitive pressure sensor provided in some embodiments of this disclosure.

[0025] Figure 2 This is a cross-sectional schematic diagram of a capacitive pressure sensor provided in some embodiments of this disclosure.

[0026] Figure 3 This is a planar schematic diagram of the unfolded layers of a capacitive pressure sensor provided in some embodiments of this disclosure.

[0027] Figure 4 This is a cross-sectional schematic diagram of another capacitive pressure sensor provided in some embodiments of this disclosure.

[0028] Figure 5 This is a planar schematic diagram of the unfolded layers of another capacitive pressure sensor provided in some embodiments of this disclosure.

[0029] Figure 6 This is a cross-sectional schematic diagram of a capacitive pressure sensor in the prior art.

[0030] Figure 7 This is a planar schematic diagram of the unfolded layers of a capacitive pressure sensor in the prior art.

[0031] Figure 8 This is a schematic diagram for testing the sensor shielding effect by gradually approaching and touching the top of the metal block with a finger.

[0032] Figure 9 This is a schematic diagram comparing the electromagnetic shielding effect of the present disclosure with that of the prior art capacitive pressure sensor.

[0033] Figure 10 This is a schematic diagram comparing the sensitivity and linearity of capacitive pressure sensors disclosed in this invention with those of the prior art.

[0034] Figure 11 This is a schematic diagram illustrating the effect of the capacitive pressure sensor disclosed herein on the movement of the sensing area and electrode layer of the ion-electron sensing layer after being subjected to force by setting a gap.

[0035] Figure 12This is a schematic diagram illustrating the effect of a traditional capacitive pressure sensor without a gap on the movement of the sensing area and electrode layer of the ion-electron sensing layer after being subjected to force.

[0036] Figure 13 This is a schematic diagram comparing the sensitivity of a capacitive pressure sensor with a gap and a conventional one without a gap, as shown in this disclosure. Detailed Implementation

[0037] The present disclosure is further illustrated below by way of embodiments, but the present disclosure is not limited to the scope of the embodiments described herein.

[0038] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this disclosure. The appearance of this phrase in various places throughout the document does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0039] It should be understood that the terms “device,” “system,” “unit,” and / or “module” used herein are one way to distinguish different components, elements, parts, sections, or assemblies at different levels. However, if other terms can achieve the same purpose, they may be replaced by other expressions.

[0040] As illustrated herein, unless the context clearly indicates otherwise, the words “a,” “an,” “an,” and / or “the” do not specifically refer to the singular and may also include the plural. Generally speaking, the terms “comprising” and “including” only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0041] The definitions used herein, such as the terms “having,” “may have,” “comprising,” or “may include,” indicate the presence of the corresponding function, operation, element, etc., and do not limit the presence of one or more other functions, operations, elements, etc. Furthermore, it should be understood that the terms “comprising” or “having” as used herein indicate the presence of the features, figures, steps, operations, elements, components, or combinations thereof described in the specification, without excluding the presence or addition of one or more other features, figures, steps, operations, elements, components, or combinations thereof.

[0042] Flowcharts are used in this document to illustrate the operations performed by the system according to the embodiments herein. It should be understood that the preceding or following operations are not necessarily performed in exact order. Instead, the steps can be processed in reverse order or simultaneously. Furthermore, other operations can be added to these processes, or one or more steps can be removed from them.

[0043] This disclosure provides a capacitive pressure sensor in some embodiments, which includes an electrode layer 11 and at least one ion-electron sensing layer 12, wherein a gap is provided between the sensing region a of the ion-electron sensing layer 12 and the adjacent electrode layer 11.

[0044] The capacitive pressure sensor disclosed herein is an ion-electronic capacitive pressure sensor. This disclosure specifically improves the arrangement between the sensing area of ​​the ion-electronic sensing layer and the adjacent electrode layer. The sensing area of ​​the ion-electronic sensing layer and the electrode layer are not seamlessly bonded together with adhesive, nor are the electrode layers directly printed on the surface of the ion-electronic sensing layer. Instead, a simple stacking method is used, with a gap set between the sensing area of ​​the ion-electronic sensing layer and the adjacent electrode layer, thereby reserving space for movement. This space allows the microfibers on the sensing area of ​​the ion-electronic sensing layer and the electrode layer to move freely. Therefore, under pressure, the contact area between the ion-electronic sensing layer and the electrode layer changes more significantly, thereby improving the sensitivity and linearity of the sensor.

[0045] In one alternative implementation, such as Figure 2-5 As shown, the electrode layer includes a top electrode layer 111 and a bottom electrode layer 112. Both the top and bottom electrode layers 111 and 112 are conductive only on their inner surfaces. Specifically, the terms "top" and "bottom" here primarily refer to the horizontal placement of the capacitive pressure sensor. If the capacitive pressure sensor is placed in other ways, the top and bottom electrode layers are the outermost layers on both sides of the capacitive pressure sensor, while the inner surfaces are those facing the ion-electron sensing layer. In this embodiment, by setting both the top and bottom electrode layers to be conductive only on their inner surfaces, while their corresponding outer surfaces are insulated, electromagnetic shielding can be formed through the top and bottom electrode layers.

[0046] In one alternative implementation, such as Figure 2-5 As shown, the electrode layer also includes an intermediate electrode layer 113, both sides of which are conductive; the top plate electrode layer 111 and the bottom plate electrode layer 112 are both grounded, and the intermediate electrode layer 113 is connected to an external power supply, thereby forming electromagnetic shielding through the top plate electrode layer and the bottom plate electrode layer.

[0047] In one optional embodiment, the intermediate electrode layer 113 is directly connected to the power supply, or the intermediate electrode layer 113 is connected to the power supply through a circuit element. Preferably, the circuit element can be a switch, a field-effect transistor, or an inductor, and the power supply is a DC power supply or an AC power supply.

[0048] In one alternative embodiment, the gap is formed based on the natural stacking or compression between the sensing region of the ion-electron sensing layer and the adjacent electrode layer. Specifically, the gap is generated based on the fibrous structure of the sensing region of the ion-electron sensing layer and the fibrous structure of the electrode layer.

[0049] In one alternative embodiment, the distance of the gap ranges from 1 to 50 micrometers.

[0050] In one optional embodiment, the number of electrode layers is an odd number and greater than or equal to 3. The outermost electrode layer is grounded, and adjacent electrode layers are sequentially set to alternately connect to power and ground. This arrangement ensures that both the top plate electrode layer and the bottom plate electrode layer are grounded, thereby achieving electromagnetic shielding for the entire capacitive pressure sensor. For two adjacent electrode layers, if the previous electrode layer is set to ground, the next electrode layer is set to connect to power; if the previous electrode layer is set to connect to power, the next electrode layer is set to ground.

[0051] In one alternative implementation, such as Figure 2-3 As shown, an ion-electron sensing layer is provided between any two adjacent electrode layers. Preferably, in this embodiment, the capacitive pressure sensor includes two ion-electron sensing layers 12. The capacitive pressure sensor is formed by sequentially stacking a top electrode layer 111, an ion-electron sensing layer 12, an intermediate electrode layer 113, another ion-electron sensing layer 12, and a bottom electrode layer 112. Therefore, an ion-electron sensing layer is provided between every two electrode layers (i.e., between the top electrode layer 111 and the intermediate electrode layer 113, and between the intermediate electrode layer 113 and the bottom electrode layer 112). This arrangement can greatly improve the sensitivity and linearity of the capacitive pressure sensor. Of course, those skilled in the art should understand that the specific number of ion-electron sensing layers is not limited to two layers; the specific number of layers can be set according to actual needs.

[0052] In one alternative implementation, such as Figure 4-5As shown, the ion-electron sensing layer is provided only between two adjacent electrode layers. Preferably, in this embodiment, the capacitive pressure sensor includes one ion-electron sensing layer 12. The capacitive pressure sensor is formed by sequentially stacking a top electrode layer 111, a transition layer 13, an intermediate electrode layer 113, an ion-electron sensing layer 12, and a bottom electrode layer 112. Therefore, no ion-electron sensing layer is provided between the top electrode layer 111 and the intermediate electrode layer 113, but only between the intermediate electrode layer 113 and the bottom electrode layer 112. Because this embodiment only includes one ion-electron sensing layer, the manufacturing process is simpler and the manufacturing cost is relatively lower. Of course, those skilled in the art should understand that the ion-electron sensing layer can also be provided between the top electrode layer and the intermediate electrode layer, in which case a transition layer is provided between the intermediate electrode layer and the bottom electrode layer.

[0053] In one alternative implementation, such as Figure 2-5 As shown, the ion-electron sensing layer 12 includes an ion-electron sensing sheet 121 and an adhesive layer 122. The ion-electron sensing sheet 121 is snapped onto the corresponding adhesive layer 122, and the adhesive layer 122 is adhered between two electrode layers adjacent to the ion-electron sensing layer.

[0054] In an optional embodiment, the adhesive layer 122 includes an adhesive tape having a receiving hole adapted to fit the ion-electron sensor 121, the ion-electron sensor 121 being snapped into the receiving hole.

[0055] In an optional implementation, in order to increase the area of ​​the sensing region, multiple receiving holes can be formed in the same adhesive layer, each receiving hole corresponding to a matching ion electron sensing sheet, and the areas of different receiving holes can be set to be the same or different according to actual needs.

[0056] In an optional embodiment, the transition layer can be a non-conductive material layer, such as a piece of paper. Similarly, the paper can be fixed by being inserted into the receiving hole of the corresponding adhesive layer 122.

[0057] This disclosure fixes the ion-electron sensing sheet with an adhesive layer and relies solely on the adhesive layer to adhere to the two electrode layers adjacent to the ion-electron sensing layer. This achieves stacking between the electrode layers and the ion-electron sensing layer and avoids seamless adhesion between the sensing area of ​​the ion-electron sensing layer (i.e., the area corresponding to the ion-electron sensing sheet) and the electrode layers, thus reserving movement space between the sensing area of ​​the ion-electron sensing layer and the electrode layers.

[0058] This disclosure achieves electromagnetic shielding by symmetrically arranging the top and bottom electrode layers. For comparison, see [link to relevant documentation]. Figure 6-7The diagram illustrates a capacitive pressure sensor in the prior art, which is formed by seamlessly bonding a top electrode layer 211, an ion-electron sensing layer 22, and a bottom electrode layer 212 sequentially using tape or adhesive. In this case, the top and bottom electrode layers are not directly grounded; instead, they are connected to the two poles of a power supply via their outer sides, and then the power supply is grounded. Specifically... Figure 6 As shown, this type of capacitive pressure sensor in the prior art does not have electromagnetic shielding, and therefore it is easily affected by external electromagnetic fields.

[0059] This disclosure provides comparative experiments and corresponding schematic diagrams showing the electromagnetic shielding effects of existing technologies and the capacitive pressure sensor of this disclosure, specifically as follows: Figure 8 As shown, the shielding effect is tested by placing a metal block on the capacitive pressure sensor and gradually approaching and gently touching the top of the metal block with a finger. Figure 9 As shown in the figure, the horizontal axis represents time (in seconds), and the vertical axis represents capacitance (in volts per liter). The figure illustrates the pressure change of the sensor from placing a metal block on it to touching the metal block with a finger, and then removing the metal block. The upper red curve represents the response curve of the capacitive pressure sensor disclosed in this invention, while the lower black curve represents the response curve of an unshielded capacitive pressure sensor in the prior art. The figure shows that, even with the same static interference caused by a finger touching the metal block, the capacitance value of the upper red curve remains relatively stable, and increases accordingly with the slight increase in pressure caused by the finger touching the metal block. However, the capacitance value of the lower black curve exhibits drastic fluctuations that are not positively correlated with the pressure. This demonstrates that the double-grounded shielded electrodes of the top and bottom electrode layers of the capacitive pressure sensor of this invention form a Faraday cage effect through a symmetrical structure, completely decoupling the sensing electrodes from the external electric field / static charge, thus achieving excellent electromagnetic shielding. Figure 10As shown in the figure, the horizontal axis represents pressure (Force, unit N), and the vertical axis represents capacitance change (ΔC, unit F). The figure illustrates the change in capacitance of the sensor with increasing pressure. The red curve at the top is the response curve of the capacitive pressure sensor of this disclosure, and the black curve at the bottom is the response curve of a prior art capacitive pressure sensor. It can be seen from the figure that as the pressure gradually increases, the capacitance change of the capacitive pressure sensor of this disclosure is more significant and linear compared to prior art capacitive pressure sensors. This demonstrates that the present disclosure utilizes two ion-electronic sensing layers between the sensing electrode and the shielding electrode to make the top or bottom capacitor a functional ion-electronic capacitive sensor, eliminating the negative impact of parasitic capacitance between the shielding electrode and the sensing electrode. Furthermore, this design of stacking two ion-electronic capacitive sensors improves the overall sensitivity and linearity of the sensor.

[0060] In an optional embodiment, the electrode layer includes a first fiber substrate, which is used to achieve conductivity by printing conductive carbon paste. Optionally, the first fiber substrate is any one of fabric, paper, polymer fiber, polymer film, and cellulose derivative.

[0061] In this disclosure, the first fiber substrate can be Xuan paper. Using Xuan paper can greatly reduce the manufacturing cost of the sensor. Carbon paste is screen-printed onto one side of the Xuan paper to form a conductive layer. The paper is then dried in an 80°C oven for at least 30 minutes. Finally, the finished carbon paper is cut into a preset shape using a laser cutter to obtain the top electrode layer and the bottom electrode layer. For the intermediate electrode layer, a carbon paste screen-printing process is also performed on the other side of the Xuan paper. The double-sided printed carbon paper is then cured again in an 80°C oven for at least 30 minutes. Finally, the finished carbon paper is processed into a preset shape using a laser cutter to obtain the corresponding intermediate electrode layer.

[0062] In one optional embodiment, the conductive carbon paste has a sheet resistance of 8-10Ω and a viscosity of approximately 3500mPa·s. Of course, the corresponding parameters can also be adjusted according to actual needs.

[0063] In one optional embodiment, the ion electron sensing layer includes a second fiber substrate on which ion ink is printed. Optionally, the second fiber substrate is any one of fabric, paper, polymer fiber, polymer film, or cellulose derivative.

[0064] In one optional embodiment, the ionic ink comprises water, polyvinyl alcohol, and an ionic liquid; the ionic liquid comprises cations and anions, and is a salt that is liquid under ambient pressure and temperature, typically composed of organic cations and organic / inorganic anions. The cations include at least one selected from ammonium ions, phosphonium ions, imidazolium ions, and pyrrolomium ions, and the anions include at least one selected from halides, tetrafluoroborates, bis(trifluoromethanesulfonyl)imides, trifluoromethanesulfonates, and hexafluorophosphates.

[0065] In this disclosure, the second fiber substrate can be Xuan paper. PVA particles are dissolved in deionized water and vigorously stirred at 80-90°C to prepare a 5% to 15% PVA aqueous solution. After the PVA is completely dissolved and the solution cools to room temperature, [EMIM] and [OTF] (added at 50%-150% of the PVA mass) are added to the PVA aqueous solution to form ionic ink. This ionic ink is printed onto Xuan paper using a screen printing process, and then dried in an 80°C oven for at least 5 minutes. The resulting ISP (ion electron sensing paper) is flattened with a heavy object and cut into the designed shape using a laser cutter to obtain the ion electron sensing sheet, and thus the ion electron sensing layer.

[0066] In one optional embodiment, the degree of alcoholysis of PVA (polyethanol) is 98-99%, the resistivity of deionized water is 5-10 MΩ·cm, and the purity of [EMIM][OTF] (1-ethyl-3-methylimidazolium trifluoromethanesulfonate) is 98%. Of course, the corresponding parameters can also be adjusted according to actual needs.

[0067] This disclosure provides space for movement between the sensing region of the ion-electron sensing layer and the adjacent electrode layer by creating a gap between them. Figure 11 As shown, the air space allows the microfibers on the sensing area (ISP) and electrode layer of the ion-electron sensing layer to move freely within the corresponding space when pressure is applied. Therefore, under pressure, the contact area between the ion-electron sensing layer and the electrode layer changes more significantly, thereby improving the sensor's sensitivity and linearity. In contrast, as... Figure 12As shown, if the sensing area (ISP) and the electrode layer of the ion-electron sensing layer are directly and seamlessly bonded together with adhesive, or if the electrode layer is directly printed on the surface of the ion-electron sensing layer, there will be almost no gap between the sensing area and the electrode layer. The microfiber distribution on the surface of the sensing area and the electrode layer will be relatively solidified. This will result in a decrease in the contact area between the ion-electron sensing layer and the electrode layer under external force, which will seriously affect the sensitivity of the sensor. Figure 13 This graph compares the sensitivity test results of a capacitive pressure sensor with a gap between the sensing area of ​​the ion-electron sensing layer and the adjacent electrode layer, as described in this disclosure, with those of a conventional capacitive pressure sensor without such a gap. The horizontal axis represents pressure (Force, in N), and the vertical axis represents the ratio of capacitance change (ΔC) to the initial capacitance (C0), ΔC / C0. The graph shows the change in capacitance with increasing pressure. The red curve represents the response curve of the capacitive pressure sensor of this disclosure, and the green curve represents the response curve of the conventional capacitive pressure sensor without a gap between the sensing area of ​​the ion-electron sensing layer and the adjacent electrode layer. As can be seen from the graph, the capacitance change of the capacitive pressure sensor of this disclosure increases more significantly with increasing pressure, demonstrating that this design method greatly improves the sensor's sensitivity. Furthermore, conventional capacitive pressure sensors not only have relatively poor sensitivity and linearity but also lack electromagnetic shielding. The capacitive pressure sensor of this disclosure, through the aforementioned design, achieves both high sensitivity and linearity while also providing electromagnetic shielding.

[0068] While specific embodiments of this disclosure have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of this disclosure is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of this disclosure, but all such changes and modifications fall within the scope of protection of this disclosure.

Claims

1. A capacitive pressure sensor, characterized in that, It includes an electrode layer and at least one ion-electron sensing layer, wherein the sensing area of ​​the ion-electron sensing layer is provided with a gap between it and the adjacent electrode layer.

2. The capacitive pressure sensor as described in claim 1, characterized in that, The electrode layer includes a top plate electrode layer and a bottom plate electrode layer, both of which are conductive only on their inner surfaces.

3. The capacitive pressure sensor as described in claim 2, characterized in that, The electrode layer further includes an intermediate electrode layer, both sides of which are conductive. Both the top plate electrode layer and the bottom plate electrode layer are grounded, and the intermediate electrode layer is connected to an external power source.

4. The capacitive pressure sensor as described in claim 3, characterized in that, The intermediate electrode layer is directly connected to the power supply, or the intermediate electrode layer is connected to the power supply through circuit elements.

5. The capacitive pressure sensor as described in claim 4, characterized in that, The circuit elements include switches, field-effect transistors, or inductors; and / or, the power supply is a DC power supply or an AC power supply.

6. The capacitive pressure sensor according to any one of claims 1-5, characterized in that, The ion-electron sensing layer is provided between any two adjacent electrode layers, or the ion-electron sensing layer is provided between only some of the two adjacent electrode layers.

7. The capacitive pressure sensor as described in claim 6, characterized in that, The ion-electron sensing layer includes an ion-electron sensing sheet and an adhesive layer. The ion-electron sensing sheet is snapped onto the corresponding adhesive layer, and the adhesive layer is adhered between two electrode layers adjacent to the ion-electron sensing layer.

8. The capacitive pressure sensor as described in claim 7, characterized in that, The adhesive layer includes an adhesive tape with a receiving hole adapted to the ion-electron sensor sheet, and the ion-electron sensor sheet is snapped into the receiving hole.

9. The capacitive pressure sensor as described in claim 1, characterized in that, The electrode layer includes a first fiber substrate, which is used to achieve conductivity by printing conductive carbon paste; and / or The ion-electron sensing layer includes a second fiber substrate on which ion ink is printed.

10. The capacitive pressure sensor as described in claim 9, characterized in that, The first fiber substrate is any one of fabric, paper, polymer fiber, polymer film, or cellulose derivative; and / or, The second fiber substrate is any one of fabric, paper, polymer fiber, polymer film, and cellulose derivative.

11. The capacitive pressure sensor as described in claim 9, characterized in that, The ionic ink comprises water, polyvinyl alcohol, and ionic liquid; The ionic liquid comprises cations and anions, wherein the cations comprise at least one of ammonium ions, phosphonium ions, imidazolium ions, and pyrrolomium ions, and the anions comprise at least one of halides, tetrafluoroborates, bis(trifluoromethanesulfonyl)imides, trifluoromethanesulfonates, and hexafluorophosphates.

12. The capacitive pressure sensor as described in claim 1, characterized in that, The gap is formed based on the natural stacking or compression between the sensing region of the ion electron sensing layer and the adjacent electrode layer.

13. The capacitive pressure sensor as described in claim 12, characterized in that, The distance of the gap ranges from 1 to 50 micrometers.

14. The capacitive pressure sensor as described in claim 1, characterized in that, The number of electrode layers is an odd number and greater than or equal to 3. The outermost electrode layer is grounded, and adjacent electrode layers are sequentially configured to alternately connect to power and ground.

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