A PECVD reaction device and an adjustment method

Abstract

The present invention relates to a PECVD reaction device and an adjustment method, comprising: a housing; a reaction tube, which is located inside the housing; a first connection assembly, the first connection assembly includes a fixing plate, a first adjusting member and a sealing mechanism, the end of the housing is connected to the fixing plate, the first adjusting member is connected between the sealing mechanism and the fixing plate, the sealing mechanism includes a first sealing member, the end of the reaction tube can abut against the first sealing member, the fixing plate is slidably connected with a movable block, the movable block is located between the fixing plate and the sealing mechanism, and the movable block can move along the radial direction of the reaction tube and abut against the reaction tube; a second connection assembly, both the housing and the reaction tube are located between the first connection assembly and the second connection assembly, the second connection assembly is connected to the end of the housing, and the second connection assembly also abuts against the reaction tube. A PECVD reaction device and an adjustment method of the present invention can improve the replacement efficiency of the reaction tube.

Description

Technical Field

[0001] The present invention relates to the technical field of reaction devices, and particularly to a PECVD reaction device and an adjustment method thereof. Background Art

[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) technology is a method for preparing semiconductor thin film materials and other material thin films by using glow discharge in a deposition chamber to ionize and then perform chemical reactions on a substrate. Plasma enhanced chemical vapor deposition is usually carried out in a reaction device. A quartz tube for participating in chemical reactions is usually provided in the reaction device. Currently, the quartz tube is usually fixedly connected to the flanges at both ends of the reaction device, so that the position of the quartz tube is fixed. However, after the reaction device works for a certain period of time, the quartz tube needs to be replaced. Since the disassembly and installation time of the quartz tube is relatively long, the replacement efficiency of the quartz tube is low. Summary of the Invention

[0003] Therefore, the technical problem to be solved by the present invention is to provide a PECVD reaction device and an adjustment method thereof, which can improve the replacement efficiency of the reaction tube.

[0004] To solve the above technical problem, the present invention provides a PECVD reaction device, including: a housing; a reaction tube, the reaction tube is located inside the housing; a first connection assembly, the first connection assembly includes a fixing plate, a first adjusting member and a sealing mechanism, an end of the housing is connected to the fixing plate, the first adjusting member is connected between the sealing mechanism and the fixing plate, the sealing mechanism includes a first sealing member, an end of the reaction tube can abut against the first sealing member, a movable block is slidably connected to the fixing plate, the movable block is located between the fixing plate and the sealing mechanism, and the movable block can move radially along the reaction tube and abut against the reaction tube; a second connection assembly, both the housing and the reaction tube are located between the first connection assembly and the second connection assembly, the second connection assembly is connected to an end of the housing, and the second connection assembly also abuts against the reaction tube.

[0005] In an embodiment of the present invention, a guiding block is provided on the fixing plate, a plurality of guiding blocks are provided along the circumferential direction of the reaction tube, the fixing plate is slidably connected to the movable block through the guiding blocks, a second adjusting member is connected to a side of the guiding block away from the reaction tube, and an end of the second adjusting member abuts against the movable block.

[0006] In an embodiment of the present invention, the fixing plate is further connected with a first connecting member, the first connecting member is connected with a sealing plate, and the sealing plate is sleeved on the sealing mechanism and covers the gap between the fixing plate and the sealing mechanism.

[0007] In an embodiment of the present invention, a support rod is further included. The sealing mechanism further includes a first support member, a clamping groove is provided on the first support member, the support rod is clamped with the clamping groove, the first support member is connected with a second connecting member, the second connecting member extends along the circumferential direction of the support rod and abuts against the support rod, and both ends of the second connecting member are connected with the first support member.

[0008] In an embodiment of the present invention, the sealing mechanism further includes a third connecting member, one end of the third connecting member is connected with the end of the support rod, the other end of the third connecting member is connected with the first support member, and the width of the third connecting member gradually decreases in the direction approaching the first support member.

[0009] In an embodiment of the present invention, a first electrode rod and a second electrode rod are further included. At least two support rods are provided, a plurality of insulating sleeves are sleeved on the support rods, the sealing mechanism further includes two first connectors, the first electrode rod and the second electrode rod are respectively connected with the two first connectors, and the first electrode rod and the second electrode rod respectively abut against the insulating sleeves on the two support rods.

[0010] In an embodiment of the present invention, a conductive ring is sleeved on the insulating sleeve, the conductive ring can slide relative to the insulating sleeve, and the first electrode rod and the second electrode rod are respectively connected with the two conductive rings.

[0011] In an embodiment of the present invention, the sealing mechanism further includes a first mounting ring, a second mounting ring and a third mounting ring which are sequentially connected. The third mounting ring is connected with the first adjusting member, an installation groove is provided on the second mounting ring, and the first sealing member is clamped with the installation groove.

[0012] In an embodiment of the present invention, the sealing mechanism further includes a second sealing member, a third sealing member and a fourth sealing member. One end of the first mounting ring away from the third mounting ring is clamped with the second sealing member, one end of the second mounting ring away from the third mounting ring is clamped with the third sealing member, the third sealing member also abuts against the first mounting ring, the fourth sealing member is clamped with the third mounting ring, and the fourth sealing member also abuts against the reaction tube.

[0013] In an embodiment of the present invention, cooling channels are provided in the first mounting ring, the second mounting ring, and the third mounting ring, and connecting pipes are connected to the first mounting ring, the second mounting ring, and the third mounting ring. The connecting pipes are used for the circulation of a cooling medium.

[0014] In an embodiment of the present invention, the first mounting ring is further connected with an air inlet member extending into the reaction tube. A plurality of air inlet holes are provided on the air inlet member, and an air inlet valve is connected to the side wall of the first mounting ring. The air inlet valve is communicated with the air inlet member.

[0015] In an embodiment of the present invention, a heating rod is further included. The heating rod is located between the first connecting assembly and the second connecting assembly. The sealing mechanism further includes a mounting plate. The mounting plate is connected with a second support member. The second support member extends towards the second connecting assembly. A receiving groove is provided in the second support member. One end of the heating rod extends into the receiving groove and is clamped with the receiving groove.

[0016] In an embodiment of the present invention, the second connecting assembly is connected with a plurality of filter plates. A plurality of through holes are provided on the filter plates. A spacer block is provided between adjacent filter plates. The spacer block is connected with a fastening member. The fastening member penetrates through the filter plates and the spacer block. At least one of the filter plates is connected with the second connecting assembly.

[0017] In an embodiment of the present invention, a heat insulation sleeve is further provided between the housing and the fixing plate. A connecting sleeve is sleeved on the heat insulation sleeve. One end of the connecting sleeve is connected with the fixing plate, and the other end of the connecting sleeve is connected with the housing.

[0018] The present invention also provides a method for adjusting a PECVD reaction device. The above-mentioned PECVD reaction device is used for adjustment, including the following steps: S1: Place the reaction tube in the housing so that the reaction tube abuts against the movable block, and the end of the reaction tube abuts against the second connecting assembly; S2: Move the movable block so that the end of the reaction tube corresponds to the sealing position of the sealing mechanism in the axial direction of the reaction tube; S3: Adjust the first adjusting member so that the sealing mechanism moves towards the reaction tube until the sealing mechanism seals the end of the reaction tube.

[0019] In an embodiment of the present invention, after moving the movable block in step S2, the end of the reaction tube corresponds to the first sealing member in the axial direction of the reaction tube. After adjusting the first adjusting member in step S3, the first sealing member abuts against the end of the reaction tube.

[0020] The above technical solutions of the present invention have the following advantages compared with the prior art:

[0021] A PECVD reaction device and an adjustment method according to the present invention, through the setting of a movable block, enable the position of the reaction tube to be adjusted radially, with higher matching accuracy between the end of the reaction tube and the first seal, thereby making the seal of the reaction space in the reaction tube better. Through the setting of the first adjusting member between the fixing plate and the sealing mechanism, the sealing mechanism can be adjusted axially, so that the acting force between the first seal and the end of the reaction tube is greater, the fitting degree is higher, and the sealing performance is better. And through the radial and axial adjustment of the reaction tube, the reaction tube does not need to be connected to the first connection component and the second connection component, thereby improving the replacement efficiency of the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to make the content of the present invention easier to be clearly understood, the following further details the present invention according to specific embodiments of the present invention in conjunction with the accompanying drawings.

[0023] Figure 1 is a structural schematic diagram of a PECVD reaction device of the present invention;

[0024] Figure 2 is Figure 1 a partial structural schematic diagram of;

[0025] Figure 3 is Figure 2 a partial structural schematic diagram of;

[0026] Figure 4 is a structural schematic diagram of the fixing plate;

[0027] Figure 5 is an assembly structural schematic diagram of the fixing plate and the sealing mechanism;

[0028] Figure 6 is an axial sectional view of the sealing mechanism;

[0029] Figure 7 is Figure 2 an internal structural schematic diagram of;

[0030] Figure 8 is Figure 7 a partial structural schematic diagram of;

[0031] Figure 9 is an assembly structural schematic diagram of the first electrode rod and the second electrode rod with the support rod;

[0032] Figure 10 is Figure 9 a partial enlarged view of part A in;

[0033] Figure 11 is an assembly structural schematic diagram of the second connection component and the filter plate;

[0034] Figure 12 It is a schematic structural diagram of a filter plate;

[0035] Figure 13 It is a schematic structural diagram of a second connection component.

[0036] Explanation of the reference numerals in the accompanying drawings of the specification: 1. Housing; 2. First connection component; 3. Second connection component; 4. Reaction tube; 5. Support rod; 6. Heating rod; 7. Temperature sensor; 8. Filter plate; 11. Connection sleeve; 12. Heat insulation sleeve; 21. Fixed plate; 22. Movable block; 23. First mounting ring; 24. Second mounting ring; 25. Third mounting ring; 26. First support member; 27. Second support member; 28. First connector; 29. Connecting pipe; 31. End cover; 32. Observation window; 33. Second connector; 34. Third connector; 35. Exhaust port; 36. Fourth connector; 51. First electrode rod; 52. Second electrode rod; 53. Insulating sleeve; 54. Conductive ring; 55. Third electrode rod; 56. Fourth electrode rod; 81. Sixth connecting member; 82. Spacer block; 211. Sealing plate; 212. Third adjusting member; 213. Fourth connecting member; 214. First connecting member; 215. Positioning column; 216. Fifth connecting member; 217. First adjusting member; 221. Guide block; 231. Air inlet member; 232. Air inlet valve; 233. Mounting plate; 234. Mounting seat; 235. Second sealing member; 241. First sealing member; 242. Third sealing member; 251. Fourth sealing member; 261. Second connecting member; 262. Third connecting member. Detailed implementation manners

[0037] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and be able to implement it, but the exemplified embodiments shall not be construed as limiting the present invention. Embodiment 1

[0038] Refer to Figures 1 to 5As shown in the figure, a PECVD reaction device of the present invention includes: a housing 1; a reaction tube 4, where the reaction tube 4 is located inside the housing 1; a first connection component 2, the first connection component 2 includes a fixing plate 21, a first adjusting member 217 and a sealing mechanism, one end of the housing 1 is connected to the fixing plate 21, the first adjusting member 217 is connected between the sealing mechanism and the fixing plate 21, the sealing mechanism includes a first sealing member 241, and the end of the reaction tube 4 can abut against the first sealing member 241. The fixing plate 21 is slidably connected with a movable block 22, the movable block 22 is located between the fixing plate 21 and the sealing mechanism, and the movable block 22 can move along the radial direction of the reaction tube 4 and abut against the reaction tube 4; a second connection component 3, both the housing 1 and the reaction tube 4 are located between the first connection component 2 and the second connection component 3, the second connection component 3 is connected to the end of the housing 1, and the second connection component 3 also abuts against the reaction tube 4.

[0039] In a PECVD reaction device of this embodiment, when installing the reaction tube 4, the reaction tube 4 abuts against the movable block 22, and the end of the reaction tube 4 abuts against the second connection component 3. Then, move the movable block 22 to make the end of the reaction tube 4 correspond to the first sealing member 241 in the axial direction of the reaction tube 4. Finally, adjust the first adjusting member 217 to make the sealing mechanism move towards the reaction tube 4 until the first sealing member 241 abuts against the end of the reaction tube 4, thereby completing the installation of the reaction tube 4. When disassembling the reaction tube 4, detach the sealing mechanism from the fixing plate 21, and the reaction tube 4 can be taken out from the housing 1. Through the setting of the movable block 22, the position of the reaction tube 4 can be adjusted radially, and the matching accuracy between the end of the reaction tube 4 and the first sealing member 241 is higher, thereby making the sealing of the reaction space inside the reaction tube 4 better. Through the setting of the first adjusting member 217 between the fixing plate 21 and the sealing mechanism, the position of the sealing mechanism can be adjusted axially, so that the acting force between the first sealing member 241 and the end of the reaction tube 4 is greater, the fitting degree is higher, and the sealing is better. Moreover, through the radial and axial adjustment of the reaction tube 4, the reaction tube 4 does not need to be connected to the first connection component 2 and the second connection component 3, thereby improving the replacement efficiency of the quartz tube.

[0040] Refer to Figure 1 As shown in the figure, the housing 1 is integrally circular tubular, and the housing 1 is used to protect the internal structure.

[0041] Refer to Figure 2 As shown in the figure, the reaction tube 4 is circular tubular and is located inside the housing 1, and the inside of the reaction tube 4 is a reaction space.

[0042] Refer to Figures 3 to 6As shown in the figure, the first connection component 2 includes a fixing plate 21, a first adjusting member 217, and a sealing mechanism. The sealing mechanism includes a first mounting ring 23, a second mounting ring 24, and a third mounting ring 25 that are connected in sequence. The first mounting ring 23, the second mounting ring 24, and the third mounting ring 25 are all circular rings with the same diameter. The third mounting ring 25 is located close to the fixing plate 21. The opening formed by the first mounting ring 23, the second mounting ring 24, and the third mounting ring 25 is for the graphite boat to enter or exit the reaction tube 4. The graphite boat is a carrier for placing the plates to be coated.

[0043] The sealing mechanism further includes a first seal 241, a second seal 235, a third seal 242, and a fourth seal 251. The first seal 241, the second seal 235, the third seal 242, and the fourth seal 251 can all be regarded as sealing rings. The second mounting ring 24 is provided with a boss protruding towards the center of the second mounting ring 24. The side of the boss facing the reaction tube 4 is provided with a mounting groove. The first seal 241 is snap-fitted with the mounting groove, so that the end of the reaction tube 4 can abut against the first seal 241, thereby improving the sealing performance of the reaction space. One end of the first mounting ring 23 away from the third mounting ring 25 is snap-fitted with the second seal 235. Specifically, the second seal 235 is located at the edge of the inner circle of the first mounting ring 23. During the operation of the PECVD reaction device, the first mounting ring 23 is connected to the door panel, and the door panel covers the opening position of the first mounting ring 23. The second seal 235 can abut against the door panel, thereby improving the sealing performance of the reaction space. One end of the second mounting ring 24 away from the third mounting ring 25 is snap-fitted with the third seal 242. The third seal 242 abuts against the first mounting ring 23. The third seal 242 can seal between the second mounting ring 24 and the first mounting ring 23. One end of the third mounting ring 25 close to the second mounting ring 24 is snap-fitted with the fourth seal 251, and the fourth seal 251 also abuts against the outer side wall of the reaction tube 4, so that the fourth seal 251 seals between the third mounting ring 25 and the second mounting ring 24, and the fourth seal 251 can also seal between the third mounting ring 25 and the reaction tube 4, thereby improving the overall sealing performance.

[0044] Preferably, the first mounting ring 23, the second mounting ring 24, and the third mounting ring 25 are all provided with cooling channels arranged in a ring along the edge, and two connecting pipes 29 are connected to the side walls of the first mounting ring 23, the second mounting ring 24, and the third mounting ring 25 respectively. The two connecting pipes 29 are respectively used for the entry and output of the cooling medium. The cooling medium can be regarded as coolant or cooling gas. The connecting pipe 29 is connected to an external cooling source. The cooling medium can enter the cooling channel from the connecting pipe 29, thereby cooling the first seal 241, the second seal 235, the third seal 242, and the fourth seal 251, and preventing the seals from being damaged due to high temperature during the operation of the PECVD reaction device.

[0045] The end of the housing 1 is connected to the fixed plate 21. Specifically, a heat insulation sleeve 12 is further provided between the housing 1 and the fixed plate 21. A connecting sleeve 11 is sleeved on the heat insulation sleeve 12. One end of the connecting sleeve 11 is connected to the fixed plate 21, and the other end of the connecting sleeve 11 is connected to the end of the housing 1. The reaction tube 4 passes through the heat insulation sleeve 12, and the heat insulation sleeve 12 has the function of heat preservation.

[0046] A movable block 22 is slidably connected to the fixed plate 21. The movable block 22 is located between the fixed plate 21 and the sealing mechanism. Specifically, the reaction tube 4 passes through the fixed plate 21. A guide block 221 is provided on one side of the fixed plate 21 close to the third mounting ring 25. A chute is provided on the guide block 221, and the chute is arranged along the radial direction of the reaction tube 4. A plurality of guide blocks 221 are arranged along the circumferential direction of the reaction tube 4. In this embodiment, two guide blocks 221 are connected to the fixed plate 21 in total. The two guide blocks 221 are located below the reaction tube 4, and the two guide blocks 221 are axially symmetrically arranged with a vertical symmetry axis along the radial direction of the reaction tube 4. The movable block 22 is slidably connected to the chute, and a second adjusting member is connected to the side of the guide block 221 away from the reaction tube 4. The second adjusting member can be regarded as a bolt. By rotating the bolt, the end of the bolt can abut against the movable block 22. The movable block 22 can move along the radial direction of the reaction tube 4 and abut against the outer side wall of the reaction tube 4. By moving the movable block 22, the radial position of the reaction tube 4 can be adjusted. By making the second adjusting member abut against the movable block 22, the position of the movable block 22 is fixed, and further the position of the reaction tube 4 is fixed.

[0047] The first adjusting member 217 is connected between the sealing mechanism and the fixed plate 21. Specifically, the first adjusting member 217 is connected to the third mounting ring 25, and a plurality of first adjusting members 217 are provided and arranged along the inner circle edge of the third mounting ring 25. The first adjusting member 217 can be regarded as a long bolt and a nut. At least two nuts are threadedly connected to the long bolt. The long bolt sequentially passes through the third mounting ring 25 and the first adjusting member 217. A groove for accommodating the bolt head is provided on the third mounting ring 25. The nuts are all located between the fixed plate 21 and the third mounting ring 25. The two nuts respectively abut against the fixed plate 21 and the third mounting ring 25, so that the position between the sealing mechanism and the fixed plate 21 is fixed. By adjusting the positions of the two nuts, the distance between the sealing mechanism and the fixed plate 21 can be adjusted.

[0048] The fixing plate 21 is also connected with a first connecting member 214. The first connecting member 214 is connected with a sealing plate 211. The sealing plate 211 is sleeved on the sealing mechanism, and the sealing plate 211 covers the gap between the fixing plate 21 and the sealing mechanism. Specifically, there are two first connecting members 214 on the fixing plate 21. The two ends of the sealing plate 211 are respectively connected with the two first connecting members 214. The two sealing plates 211 can form a ring, so that the sealing plate 211 can completely cover the gap between the fixing plate 21 and the sealing mechanism, improving the sealing performance. The sealing plate 211 is sleeved on the third mounting ring 25, and the width of the sealing plate 211 is greater than the maximum value of the gap between the fixing plate 21 and the sealing mechanism. Thus, when the sealing mechanism is in different positions, the sealing plate 211 can completely cover the gap between the fixing plate 21 and the sealing mechanism. There are also waist-shaped holes at the connection positions of the sealing plate 211 and the first connecting member 214, so that the position of the sealing plate 211 is adjustable, and the sealing plate 211 can be closely attached to the third mounting ring 25, improving the sealing performance.

[0049] Two positioning columns 215 are also vertically connected to the fixing plate 21. The positioning columns 215 are abutted against the sealing mechanism. The positioning columns 215 are used for positioning and guiding the sealing mechanism to prevent the sealing mechanism from moving or offsetting in position during the installation process with the fixing plate 21.

[0050] The fixing plate 21 is also connected with a fourth connecting member 213. The sealing mechanism also includes a third adjusting member 212. The third adjusting member 212 is fixed to the outside. The third connecting member 262 is connected with a bolt. The bolt is arranged in the horizontal direction, and the end of the bolt abuts against the fourth connecting member 213. By rotating the bolt, the position of the first connection assembly 2 can be adjusted in the horizontal direction. The fixing plate 21 is also connected with a fifth connecting member 216. The sealing mechanism also includes a fourth adjusting member. The fourth adjusting member is connected with a bolt arranged in the vertical direction. The bolt can adjust the position of the first connection assembly 2 in the vertical direction. The adjustment method is the same as that of the third adjusting member 212 and will not be elaborated here.

[0051] Refer to Figures 7 to 10As shown, the PECVD reaction device further includes a support rod 5 for supporting the graphite boat. The support rod 5 is located inside the reaction tube 4, and both ends of the support rod 5 are clamped to the first connection assembly 2 and the second connection assembly 3. The sealing mechanism further includes a first support member 26 and a second connecting member 261. The first support member 26 is provided with an arc-shaped slot, and the end of the support rod 5 is clamped to the slot. The first support member 26 is connected to the second connecting member 261. The second connecting member 261 is arc-shaped and extends along the circumference of the support rod 5 and abuts against the side wall of the support rod 5. Both ends of the second connecting member 261 are connected to the first support member 26. After locking the bolts at the connection position of the second connecting member 261 and the first support member 26, the support rod 5 is clamped between the second connecting member 261 and the first support member 26, so that the support rod 5 is stably fixed.

[0052] The sealing mechanism further includes a third connecting member 262. One end of the third connecting member 262 is connected to the end of the support rod 5, and the other end of the third connecting member 262 is connected to the first support member 26, so that the fixing of the support rod 5 is more stable. The width of the third connecting member 262 gradually decreases in the direction approaching the first support member 26, so as to reduce the volume of the connection position between the third connecting member 262 and the first support member 26 and avoid being unable to connect to the first support member 26 due to the excessive volume of the third connecting member 262.

[0053] The PECVD reaction device further includes a first electrode rod 51 and a second electrode rod 52 located inside the reaction tube 4. There are at least two support rods 5. A plurality of insulating sleeves 53 are sleeved on the support rods 5. The four corner positions of the graphite boat abut against the insulating sleeves 53. The sealing mechanism further includes two first connectors 28. The first connectors 28 penetrate through the first mounting ring 23. The first connectors 28 are used to connect to the controller. The first electrode rod 51 and the second electrode rod 52 are respectively connected to the two first connectors 28. The first electrode rod 51 and the second electrode rod 52 respectively abut against the insulating sleeves 53 on the two support rods 5, and the length of the second electrode rod 52 is greater than the length of the first electrode rod 51. Specifically, a conductive ring 54 is sleeved on the insulating sleeve 53. The conductive ring 54 can slide relative to the insulating sleeve 53. The first electrode rod 51 and the second electrode rod 52 are respectively connected to the two conductive rings 54. After the graphite boat abuts against the two conductive rings 54, the graphite boat can be electrified. The setting of the conductive ring 54 enables the electrode rods to still stably electrify the graphite boat after the positions of the support rods 5 and the electrode rods move. The setting of the first electrode rod 51 and the second electrode rod 52 enables the electrode rods to be arranged along the support rods 5 and does not block the path for the graphite boat to enter or exit the reaction tube 4.

[0054] The PECVD reaction device further includes a temperature sensor 7. The temperature sensor 7 is connected between the first connection component 2 and the second connection component 3. The temperature sensor 7 is connected to the controller and is located inside the reaction tube 4. The temperature sensor 7 is used to detect the temperature inside the reaction tube 4. The temperature sensor 7 is connected to the first mounting ring 23 through the mounting seat 234.

[0055] The PECVD reaction device further includes a heating rod 6. The heating rod 6 is used to heat the inside of the reaction tube 4. The heating rod 6 is located between the first connection component 2 and the second connection component 3 and is located inside the reaction tube 4. The sealing mechanism further includes a mounting plate 233. The mounting plate 233 is connected to the inner ring of the first mounting ring 23 and extends towards the center of the first mounting ring 23. The mounting plate 233 is vertically connected with a second support member 27. The second support member 27 extends towards the second connection component 3 and is provided with a receiving groove that cooperates with the heating rod 6. One end of the heating tube extends into the receiving groove and is snap-fitted with the receiving groove. The second support member 27 is further provided with a support plate that extends towards the second connection component 3. The support plate is arc-shaped and is arranged along the edge of the second support member 27. The support plate extends from the bottom side of the end of the second support member 27 and can support the heating rod 6, thereby making the fixing of the heating rod 6 more stable.

[0056] The inner ring of the first mounting ring 23 is further connected with an air inlet member 231 that extends into the reaction tube. The air inlet member 231 is provided with a plurality of air inlet holes. The outer side wall of the first mounting ring 23 is connected with an air inlet valve 232. The air inlet valve 232 is communicated with the air inlet member 231. Reaction gas can be introduced into the air inlet member 231 through the air inlet valve 232, and the reaction gas enters the reaction tube 4 through the air inlet member 231.

[0057] Refer to Figures 11 to 13 As shown, both the housing 1 and the reaction tube 4 are located between the first connection component 2 and the second connection component 3. The second connection component 3 is connected to the end of the housing 1 and also abuts against the reaction tube 4. The second connection component 3 can also adjust the radial and axial directions of the reaction tube 4, and the adjustment structure is the same as that of the fixing plate 21, the first adjusting member 217, and the sealing mechanism, which will not be elaborated here. The supporting structure of the second connection component 3 for the supporting rod 5 is the same as that of the first connection component 2, and the adjustment structure of the second connection component 3 in the horizontal and vertical directions is the same as that of the first connection component 2, which will not be elaborated here.

[0058] The second connection component 3 includes an end cap 31 which is located at one end of the second connection component 3 away from the first connection component 2. The second connection component 3 is connected with a plurality of filter plates 8 which are located inside the reaction tube 4. The filter plates 8 are used for filtering the waste gas generated during the operation of the PECVD reaction device. A plurality of through holes are provided on the filter plates 8, and spacers 82 are provided between adjacent filter plates 8, so that there is a gap between adjacent filter plates 8. The spacers 82 are connected with fasteners which can be regarded as bolts. The bolts sequentially penetrate and are threadedly connected to a plurality of spacers 82 and filter plates 8, so that the plurality of filter plates 8 are connected to each other. At least one filter plate 8 is connected with the second connection component 3. In this embodiment, the filter plate 8 close to the end cap 31 is connected to the inner ring of the second connection component 3 through a sixth connecting member 81, so that the position of the filter plate 8 is fixed.

[0059] The PECVD reaction device further includes a third electrode rod 55 and a fourth electrode rod 56 which are located inside the reaction tube 4 and have the same length. The third electrode rod 55 and the fourth electrode rod 56 penetrate through the filter plates 8. The end cap 31 is further connected with two second connectors 33. The second connectors 33 are connected with an external controller. The third electrode rod 55 and the fourth electrode rod 56 are respectively connected with the two second connectors 33. The third electrode rod 55 and the fourth electrode rod 56 are used for abutting against the end face of the graphite boat, so that the graphite boat is electrified. Through the arrangement of the first electrode rod 51, the second electrode rod 52, the third electrode rod 55 and the fourth electrode rod 56, the reaction tube 4 can supply power to two graphite boats simultaneously, thereby improving the reaction efficiency.

[0060] The end cap 31 is further connected with a third connector 34. One end of the third connector 34 is connected with the heating rod 6, and the other end of the third connector 34 is connected with the controller. The end cap 31 is further connected with a fourth connector 36. One end of the fourth connector 36 is connected with the temperature sensor 7, and the other end of the fourth connector 36 is connected with the controller. An observation window 32 is further provided on the end cap 31 for observing the inside of the filter plates 8 and the reaction tube 4. An exhaust port 35 is further provided on the end cap 31, and the exhaust port 35 is connected with an external waste gas treatment device.

[0061] During use, two graphite boats carrying the plates to be coated are placed on the insulating sleeve 53 through the first connection component 2, and the bottom of one of the graphite boats abuts against the conductive ring 54, and the other graphite boat abuts against the third electrode rod 55 and the fourth electrode rod 56. Then, the door plate is connected with the first mounting ring 23, so that the door plate covers the opening position of the first mounting ring 23. The reaction gas enters the reaction tube 4 through the air inlet member 231, and a chemical reaction starts inside the reaction tube 4 by controlling the connector through the controller. Embodiment Two

[0062] The present invention also provides an adjustment method for a PECVD reaction device. The PECVD reaction device in Embodiment 1 is used for adjustment, including the following steps: S1: Place the reaction tube 4 in the housing 1 so that the reaction tube 4 abuts against the movable block 22, and the end of the reaction tube 4 abuts against the second connection assembly 3; S2: Move the movable block 22, so that the reaction tube 4 moves radially, and the end of the reaction tube 4 and the sealing position of the sealing mechanism are axially aligned in the reaction tube 4. That is, after moving the movable block 22, the end of the reaction tube 4 and the first seal 241 are axially aligned in the reaction tube 4; S3: Adjust the first adjusting member 217 so that the sealing mechanism moves towards the reaction tube 4, that is, the sealing mechanism approaches the reaction tube 4 axially until the sealing mechanism seals the end of the reaction tube 4. That is, after adjusting the first adjusting member 217, the first seal 241 abuts against the end of the reaction tube 4.

[0063] For a PECVD reaction device and an adjustment method thereof according to the present invention, through the arrangement of the movable block 22, the position of the reaction tube 4 can be adjusted radially, and the matching accuracy between the end of the reaction tube 4 and the first seal 241 is higher, so that the sealing performance of the reaction space in the reaction tube 4 is better. Through the arrangement of the first adjusting member 217 between the fixing plate 21 and the sealing mechanism, the sealing mechanism can be adjusted axially, so that the acting force between the first seal 241 and the end of the reaction tube 4 is greater, the fitting degree is higher, and the sealing performance is better. Moreover, through the radial and axial adjustment of the reaction tube 4, the reaction tube 4 does not need to be connected to the first connection assembly 2 and the second connection assembly 3, thereby improving the replacement efficiency of the quartz tube.

[0064] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or variations derived therefrom are still within the protection scope of the present invention.

Claims

1. A PECVD reaction device, characterized in that: include: case; A reaction tube, wherein the reaction tube is located in the shell; a first connecting assembly, wherein the first connecting assembly comprises a fixed plate, a first adjusting member and a sealing mechanism, wherein the end of the shell is connected to the fixed plate, the first adjusting member is connected between the sealing mechanism and the fixed plate, the sealing mechanism comprises a first sealing member, the end of the reaction tube can be against the first sealing member, the fixed plate is slidably connected with a movable block, the movable block is located between the fixed plate and the sealing mechanism, and the movable block can move along the radial direction of the reaction tube and be against the reaction tube; the sealing mechanism also comprises a first mounting ring, a second mounting ring and a third mounting ring connected in sequence, the first adjusting member is connected to the third mounting ring, and the first adjusting member is provided with a plurality of the first adjusting members and is arranged along the inner ring edge of the third mounting ring, the first adjusting member is a long bolt and a nut, at least two of the nuts are threadedly connected to the long bolt, the long bolt passes through the third mounting ring and the first adjusting member in sequence, and the third mounting ring is provided with a groove for accommodating a screw head, The nuts are all located between the fixing plate and the third mounting ring, and the two nuts are respectively abutted against the fixing plate and the third mounting ring; the first sealing member is a sealing ring, the second mounting ring is provided with a boss protruding toward the center direction of the second mounting ring, the boss is provided with a mounting groove on a side facing the reaction tube, and the first sealing member is clamped with the mounting groove; a guide block is provided on a side of the fixing plate close to the third mounting ring, the guide block is provided with a slide groove, the slide groove is arranged along the radial direction of the reaction tube, and a plurality of guide blocks are arranged along the circumferential direction of the reaction tube, and two guide blocks are connected to the fixing plate in total, the two guide blocks are located below the reaction tube, and the two guide blocks are axially symmetrically arranged with a vertical symmetry axis along the radial direction of the reaction tube; the movable block is slidably connected to the slide groove, and a second adjusting member is connected to a side of the guide block away from the reaction tube, and the second adjusting member is a bolt, and the end of the bolt can be abutted against the movable block by rotating the bolt; The second connecting component, the shell and the reaction tube are both located between the first connecting component and the second connecting component, the second connecting component is connected to the end of the shell, and the second connecting component is also against the reaction tube.

2. The PECVD reaction device according to claim 1, characterized in that: The fixing plate is also connected to a first connecting member, the first connecting member is connected to a sealing plate, and the sealing plate is sleeved on the sealing mechanism and covers the gap between the fixing plate and the sealing mechanism.

3. The PECVD reaction device according to claim 1, characterized in that: It also includes a support rod, and the sealing mechanism also includes a first support member, the first support member is provided with a slot, the support rod is engaged with the slot, the first support member is connected to a second connecting member, the second connecting member extends along the circumference of the support rod and abuts against the support rod, and both ends of the second connecting member are connected to the first support member.

4. The PECVD reaction device according to claim 3, characterized in that: The sealing mechanism also includes a third connecting member, one end of which is connected to the end of the support rod, and the other end of which is connected to the first support member, and the width of the third connecting member gradually decreases towards the first support member.

5. The PECVD reaction device according to claim 3, characterized in that: It also includes a first electrode rod and a second electrode rod, at least two support rods are provided, and a plurality of insulating sleeves are provided on the support rods. The sealing mechanism also includes two first connectors, the first electrode rod and the second electrode rod are respectively connected to the two first connectors, and the first electrode rod and the second electrode rod are respectively against the insulating sleeves on the two support rods.

6. The PECVD reaction device according to claim 5, characterized in that: A conductive ring is sleeved on the insulating sleeve, and the conductive ring can slide relative to the insulating sleeve. The first electrode rod and the second electrode rod are respectively connected to the two conductive rings.

7. The PECVD reaction device according to claim 1, characterized in that: The sealing mechanism also includes a second seal, a third seal and a fourth seal. The end of the first mounting ring away from the third mounting ring is clamped with the second seal, the end of the second mounting ring away from the third mounting ring is clamped with the third seal, the third seal also abuts against the first mounting ring, the fourth seal is clamped with the third mounting ring, and the fourth seal also abuts against the reaction tube.

8. The PECVD reaction device according to claim 1, characterized in that: The first mounting ring, the second mounting ring and the third mounting ring are all provided with cooling channels, and the first mounting ring, the second mounting ring and the third mounting ring are all connected with connecting pipes, and the connecting pipes are used for the circulation of cooling medium.

9. The PECVD reaction device according to claim 1, characterized in that: The first mounting ring is also connected to an air inlet member extending into the reaction tube, the air inlet member is provided with a plurality of air inlet holes, the side wall of the first mounting ring is connected to an air inlet valve, and the air inlet valve is in communication with the air inlet member.

10. The PECVD reaction device according to claim 1, characterized in that: It also includes a heating rod, which is located between the first connecting component and the second connecting component. The sealing mechanism also includes a mounting plate, which is connected to a second support member, which extends toward the second connecting component. The second support member is provided with a receiving groove, and one end of the heating rod extends into the receiving groove and is clamped with the receiving groove.

11. The PECVD reaction device according to claim 1, characterized in that: The second connection assembly is connected to a plurality of filter plates, a plurality of through holes are provided on the filter plates, pads are provided between adjacent filter plates, fasteners are connected to the pads, and the fasteners penetrate the filter plates and the pads, and at least one filter plate is connected to the second connection assembly.

12. The PECVD reaction device according to claim 1, characterized in that: A heat insulating sleeve is further provided between the shell and the fixing plate, a connecting sleeve is sleeved on the heat insulating sleeve, one end of the connecting sleeve is connected to the fixing plate, and the other end of the connecting sleeve is connected to the shell.

13. A method for adjusting a PECVD reaction device, using the PECVD reaction device according to any one of claims 1 to 12 for adjustment, characterized in that: The following steps are involved: S1: placing a reaction tube in the housing so that the reaction tube abuts against the movable block, and an end of the reaction tube abuts against the second connecting assembly; S2: moving the movable block so that the end of the reaction tube corresponds to the sealing position of the sealing mechanism in the axial direction of the reaction tube; S3: adjusting the first adjusting member to move the sealing mechanism toward the reaction tube until the sealing mechanism seals the end of the reaction tube.

14. The method for adjusting the PECVD reaction device according to claim 13, characterized in that: After the movable block is moved in step S2, the end of the reaction tube corresponds to the axial position of the first sealing member in the reaction tube. After the first adjusting member is adjusted in step S3, the first sealing member abuts against the end of the reaction tube.

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