Furnace tube monitoring equipment

Abstract

The embodiment of the invention relates to furnace tube monitoring equipment, and the equipment comprises a plurality of track mechanisms which are connected to the inner wall of a furnace tube and are arranged at intervals; the seat body is connected with the track mechanism and is suitable for rotating on the track structure along the circumferential direction of the furnace tube; the camera device is connected with the seat body; and the switching mechanism is connected to the inner wall of the furnace tube and is used for switching the seat body from one rail mechanism to the other adjacent rail mechanism. By adopting the technical scheme, the wafers at different positions in the furnace tube can be monitored, so that the monitoring efficiency of the wafers in the furnace tube is improved.

Description

Technical Field

[0001] The disclosed embodiments relate to the field of semiconductor equipment, and in particular to a furnace tube monitoring device. Background Art

[0002] Semiconductor furnace equipment plays a key role in the manufacturing process of semiconductor devices. It is mainly used in key processes such as oxidation, chemical vapor deposition, and thermal annealing in the semiconductor chip processing process. The furnace tube controls the processing gas and processing temperature through gas supply, exhaust, and heating management to ensure high-quality manufacturing of semiconductor chips.

[0003] However, during the wafer processing of semiconductor furnace equipment, due to the lack of effective real-time dynamic monitoring methods, it is easy to cause abnormal conditions such as uneven thickness and fragments on the wafer, and the problem can only be solved through manual visual inspection.

[0004] How to improve the efficiency of wafer monitoring is an issue worth discussing. Summary of the invention

[0005] In view of this, an embodiment of the present disclosure provides a furnace tube monitoring device, which can monitor wafers at different positions in the furnace tube, thereby improving the monitoring efficiency of the wafers in the furnace tube.

[0006] In order to solve the above technical problems, the embodiment of the present disclosure provides a furnace pipe monitoring device. The furnace pipe monitoring device includes:

[0007] A track mechanism is connected to the inner wall of the furnace tube, wherein the track mechanism comprises a plurality of track mechanisms, and the plurality of track mechanisms are arranged at intervals;

[0008] A seat body connected to the track mechanism, wherein the track mechanism is used to drive the seat body to rotate along the circumference of the furnace tube;

[0009] A camera device connected to the seat;

[0010] The switching mechanism is connected to the inner wall of the furnace tube and is used for switching the seat body from one track mechanism to another adjacent track mechanism.

[0011] Optionally, the track mechanism comprises:

[0012] A fixed track connected to the inner wall of the furnace tube, wherein the fixed track is a circular ring structure;

[0013] A rotating track is embedded in the inner ring groove of the fixed track;

[0014] A rotating motor is connected to the ground of the fixed track, the driving end of the rotating motor extends into the fixed track, and the driving end of the rotating motor is connected to a rotating gear, the rotating gear is located in the fixed track and meshes with the tooth grooves starting from the outer ring of the rotating track, and the rotating motor is used to drive the rotating track to rotate on the fixed track.

[0015] Optionally, the fixed rail is embedded in a fixed groove opened on the inner wall of the furnace tube, and fixed blocks are arranged at intervals on the fixed rail, and the fixed blocks extend out of the upper and lower side surfaces of the fixed rail, and the fixed blocks are clamped in the fixed groove, and there is a gap between the upper and lower side surfaces of the fixed rail and the upper and lower side surfaces inside the fixed groove, and ceramic glue is arranged in the gap to connect the fixed rail and the fixed groove together.

[0016] Optionally, the switching mechanism includes:

[0017] A locking mechanism, disposed on the rotating track, for locking the seat body on the rotating track;

[0018] The lifting mechanism is arranged perpendicular to the rotating track and connected to the inner wall of the furnace tube, and is used for moving the seat body from one track mechanism to another adjacent track mechanism.

[0019] Optionally, the locking mechanism comprises:

[0020] A locking motor, a locking rod and a protective shell, wherein the protective shell is connected to the upper wall of the rotating track, the locking motor is arranged in the protective shell, the locking rod is connected to the telescopic end of the locking motor and extends to the outside through the protective shell, the base body is provided with a locking hole, the locking rod is used to pass through the locking hole, the rotating track is provided with a positioning groove, the base body is located in the positioning groove, and the locking motor is located on one side of the positioning groove.

[0021] Optionally, the locking rods include two, and the two locking rods are arranged in parallel.

[0022] Optionally, the number of the lifting mechanisms corresponds to the number of the track mechanisms, and each lifting mechanism is arranged above the corresponding track mechanism, and the lifting mechanism includes:

[0023] A lifting track is arranged perpendicular to the rotating track and connected to the inner wall of the furnace tube, and two ends of the lifting track are arranged close to the upper and lower fixed tracks;

[0024] A lifting drive device, arranged on the lifting track and used for moving on the lifting track;

[0025] A connecting mechanism is connected to the lifting drive device and is used for connecting the seat body to the uppermost position when the seat body is moved upward, and then the upper connecting mechanism is connected to the seat body and drives the seat body to move into the positioning groove, and cooperates with the locking mechanism to lock the seat body on the upper rotating track.

[0026] Optionally, the lifting drive device comprises:

[0027] A lifting shell, a lifting motor, and a lifting gear. The lifting motor is connected inside the lifting shell. The lifting shell is passed through the lifting track and is slidably connected thereto. The lifting gear is drive-connected to the lifting motor. The lifting gear is meshed with a tooth groove provided on the side wall of the lifting track. The lifting shell is connected to the connecting mechanism.

[0028] Optionally, the connecting mechanism comprises:

[0029] A connecting motor and a connecting plate, wherein the connecting plate is connected to the driving end of the connecting motor, the connecting plate is arranged perpendicular to the lifting track, a lifting cavity is arranged in the seat body, a plurality of lifting holes are arranged on the upper surface of the seat body, the lifting holes are connected to the lifting cavity, the connecting plate is used to enter the lifting holes and the lifting cavity under the drive of the lifting drive device, the connecting motor is used to drive the lifting plate to rotate, so that the lifting plate is clamped on the inner wall of the lifting cavity, so that the connecting motor and the seat body are fixed together;

[0030] Among them, the multiple lifting tracks are staggered, the multiple lifting holes are tangentially spaced along the rotating track, and the length of the driving end of the connecting motor located at the top is longer than the length of the connecting motor located at the bottom.

[0031] Optionally, the furnace tube monitoring device further includes:

[0032] A positioning sensor is arranged on the seat body and is used to determine whether the seat body moves into position in the positioning groove.

[0033] Compared with the prior art, the technical solution of the embodiment of the present disclosure has the following advantages:

[0034] In the disclosed embodiment, the camera device is connected to a base body, and the base body is connected to a track mechanism connected to the inner wall of the furnace tube. By setting the track mechanism to drive the base body to rotate circumferentially along the inner wall of the furnace tube, the camera device can be driven to rotate circumferentially along the inner wall of the furnace tube, thereby realizing scanning and monitoring of wafers at different angles in the furnace tube. By setting a switching mechanism connected to the inner wall of the furnace tube, the base body can be switched from one track mechanism to another adjacent track mechanism, thereby realizing comprehensive monitoring of a wider area in the furnace tube, thereby improving the monitoring efficiency of the wafers in the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings required for use in the embodiments of the present disclosure or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0036] Figure 1 A schematic structural diagram of a furnace tube monitoring device according to an embodiment of the present disclosure is shown;

[0037] Figure 2 A partial enlarged view of part A of a furnace tube monitoring device in an embodiment of the present disclosure is shown;

[0038] Figure 3 A partial enlarged view of part B in a furnace tube monitoring device in an embodiment of the present disclosure is shown;

[0039] Figure 4 A partial enlarged view of part C in a furnace tube monitoring device in an embodiment of the present disclosure is shown.

[0040] Reference numerals:

[0041] Fixed track 101, rotating track 102, rotating motor 103, fixed block 104;

[0042] base body 20;

[0043] Camera device 30;

[0044] Positioning slot 401, locking rod 402, protective housing 403;

[0045] Lifting rail 501 , lifting shell 502 , lifting motor 503 , lifting gear 504 , connecting motor 505 , connecting plate 506 , lifting hole 507 . DETAILED DESCRIPTION

[0046] According to the background technology, in the wafer processing of semiconductor furnace tube equipment, due to the lack of effective real-time dynamic monitoring means, it is easy to cause abnormal conditions such as uneven thickness and fragments of the wafer. The problem can only be solved by manual visual inspection, and the monitoring efficiency is low.

[0047] How to improve the monitoring efficiency of wafers is an issue worth discussing.

[0048] In order to solve the above technical problems, in an embodiment of the present disclosure, a camera device is connected to a base body, and the base body is connected to a track mechanism connected to the inner wall of the furnace tube. By setting the track mechanism to drive the base body to rotate circumferentially along the inner wall of the furnace tube, the camera device can be driven to rotate circumferentially along the inner wall of the furnace tube, thereby realizing scanning and monitoring of wafers at different angles in the furnace tube. By setting a switching mechanism connected to the inner wall of the furnace tube, the base body can be switched from one track mechanism to another adjacent track mechanism, thereby realizing comprehensive monitoring of a wider area in the furnace tube, thereby improving the monitoring efficiency of the wafers in the furnace tube.

[0049] In order to make the above-mentioned purposes, features and beneficial effects of the present disclosure more obvious and easy to understand, the specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0050] Reference Figures 1 to 4 ,in, Figure 1 A schematic structural diagram of a furnace tube monitoring device according to an embodiment of the present disclosure is shown; Figure 2 A partial enlarged view of part A of a furnace tube monitoring device in an embodiment of the present disclosure is shown; Figure 3 A partial enlarged view of part B in a furnace tube monitoring device in an embodiment of the present disclosure is shown; Figure 4 A partial enlarged view of part C in a furnace tube monitoring device in an embodiment of the present disclosure is shown.

[0051] Continue to refer to Figures 1 to 4 , furnace tube monitoring equipment, including:

[0052] The track mechanism is connected to the inner wall of the furnace tube, and the track mechanism includes a plurality of track mechanisms, which are arranged at intervals;

[0053] The seat body 20 is connected to the track mechanism, and the track mechanism is used to drive the seat body 20 to rotate along the circumference of the furnace tube;

[0054] The camera device 30 is connected to the base 20;

[0055] The switching mechanism is connected to the inner wall of the furnace tube and is used to switch the seat body 20 from one track mechanism to another adjacent track mechanism.

[0056] The track mechanism is connected to the inner wall of the furnace tube, and multiple track mechanisms are distributed at intervals. The seat body 20 is connected to the track mechanism, and the track mechanism is used to drive the seat body 20 to rotate along the circumference of the furnace tube. Specifically, when it is necessary to monitor the wafers in the furnace tube, the rotating motor 103 in the track mechanism starts to work, and its driving end drives the rotating gear to rotate. The rotating gear meshes with the tooth grooves of the outer ring of the rotating track 102, so that the rotating track 102 rotates on the fixed track 101. Since the seat body 20 is connected to the rotating track 102, the seat body 20 moves along the circumference of the furnace tube with the rotating track 102, thereby realizing scanning and monitoring of wafers at different angles in the furnace tube.

[0057] For example, during wafer processing, the rotating motor 103 is started at regular time intervals, and the base 20 slowly rotates along the track, and the camera device 30 then photographs and observes different areas of the wafer.

[0058] The camera device 30 is mounted on the base 20. As the base 20 moves, the camera is always aimed at the wafer in the furnace tube. The camera transmits the captured wafer image to an external monitoring system or control system in real time (via wired or wireless transmission). The operator can judge the growth status of the wafer by observing these images, such as the thickness change of the film growth, whether there is particle contamination on the surface, whether there are cracks and other abnormal conditions.

[0059] For example, during the oxidation process, the camera can clearly capture the color changes of the oxide layer on the surface of the wafer, and infer whether the degree of oxidation meets the process requirements based on the color changes.

[0060] The switching mechanism is connected to the inner wall of the furnace tube, and its main function is to switch the seat body 20 from one track mechanism to another adjacent track mechanism. When the movement range of the seat body 20 on the current track mechanism reaches its limit and it is necessary to monitor other areas in the furnace tube, the switching mechanism is activated. The lifting mechanism starts to work and lifts the seat body 20 vertically upward from the current track mechanism (specifically, the lifting drive device moves on the lifting track 501, driving the connecting mechanism connected to the seat body 20 to make the seat body 20 rise). When the seat body 20 rises to a suitable position, the connecting mechanism of the upper adjacent track mechanism is connected to the seat body 20, and the seat body 20 is moved into the positioning groove 401 of the track mechanism. Finally, the locking mechanism locks the seat body 20 on the new rotating track 102 again, completing the switching of the seat body 20 between different track mechanisms, thereby realizing comprehensive monitoring of a wider area in the furnace tube.

[0061] For example, when the furnace tube is long and the monitoring range covered by a track mechanism is limited, after the base body 20 reaches one end of the track, the switching mechanism is activated to transfer the base body 20 to the adjacent track to continue monitoring the wafers in the upper or lower part of the furnace tube.

[0062] The multiple spaced track mechanisms cooperate with the movable seat 20 and the camera to fully cover the space inside the furnace tube without any blind spots, and accurately grasp the growth status of each part of the wafer.

[0063] Continuous monitoring can detect abnormalities at the first sign of occurrence, such as tiny particles adhering to the wafer or uneven initial thickness, making it easy to quickly adjust the process and improve product yield. The seat 20 can switch and move between tracks, and combined with the camera's perspective, it can quickly determine the specific area of ​​the wafer where the abnormality is located, which is conducive to targeted problem solving. Automated monitoring reduces the frequency and duration of manual inspections, reducing labor costs; timely error correction avoids material waste and cuts production costs.

[0064] The connection parts between the track mechanism and the inner wall of the furnace tube are made of high-temperature resistant ceramics or special alloy materials, such as ceramic bolts, alloy brackets, etc., to ensure a stable connection and resistance to high-temperature deformation.

[0065] The rail mechanism itself is made of high-temperature resistant metal materials, such as nickel-based alloys, and is coated with a high-temperature resistant and anti-oxidation coating on the surface to reduce high-temperature oxidation corrosion and extend its service life.

[0066] In some embodiments, the track mechanism may include:

[0067] The fixed track 101 is connected to the inner wall of the furnace tube, and the fixed track 101 is a circular ring structure;

[0068] The rotating track 102 is embedded in the inner ring groove of the fixed track 101;

[0069] The rotating motor 103 is connected to the ground of the fixed track 101. The driving end of the rotating motor 103 extends into the fixed track 101, and the driving end of the rotating motor 103 is connected to the rotating gear. The rotating gear is located in the fixed track 101 and meshes with the tooth groove starting from the outer circle of the rotating track 102. The rotating motor 103 is used to drive the rotating track 102 to rotate on the fixed track 101.

[0070] The cooperation between the rotating motor 103, the rotating gear, the fixed track 101 and the rotating track 102 ensures that the rotating track 102 rotates smoothly, so that the seat body 20 moves accurately and reliably.

[0071] By controlling the rotating motor 103, the shooting direction of the camera can be adjusted as needed to adapt to different processes and changes in wafer monitoring focus.

[0072] The rotating motor 103 drives the rotating gear to rotate, and the rotating gear meshes with the rotating track 102, driving the rotating track 102 to rotate in the fixed track 101, and further driving the seat body 20 to rotate along the circumference of the furnace tube.

[0073] The rotating motor 103 is a high temperature resistant motor, and its winding is made of high temperature resistant insulating materials, such as polyimide film, etc., to ensure the normal operation of the motor at high temperature.

[0074] The rotating gear and the fixed rail 101 and the rotating rail 102 are made of high temperature resistant alloy steel, such as Cr-Mo alloy steel, to improve the strength and wear resistance in high temperature environment.

[0075] In some embodiments, the fixed rail 101 can be embedded in a fixed groove opened on the inner wall of the furnace tube, and fixed blocks 104 are arranged on the fixed rail 101 at intervals. The fixed blocks 104 extend from the upper and lower sides of the fixed rail 101, and the fixed blocks 104 are clamped in the fixed groove. There is a gap between the upper and lower sides of the fixed rail 101 and the upper and lower sides of the inner part of the fixed groove, and ceramic glue is arranged in the gap to connect the fixed rail 101 and the fixed groove together.

[0076] The fixed rail 101 is fixed in three ways: embedding, clamping, and ceramic adhesive, so that it can be stably installed on the inner wall of the furnace tube and can withstand the vibration and high temperature impact of equipment operation.

[0077] The space between the fixed rail 101 and the fixed groove is reserved and filled with ceramic glue, which not only strengthens the connection but also buffers thermal expansion and contraction to prevent the rail from deformation and damage.

[0078] The fixed rail 101 is embedded in the fixing groove, the fixing block 104 is clamped and fixed, and the ceramic glue fills the gap to achieve a tight connection, ensuring that the rail is stable in a high temperature environment.

[0079] The fixing block 104 is made of high temperature resistant ceramic material to avoid softening or deformation at high temperature, which would affect the fixing effect.

[0080] Ceramic adhesive is made of high temperature resistant, high strength and high thermal expansion coefficient products that match the rails and furnace tubes to prevent connection failure due to thermal expansion and contraction.

[0081] In some embodiments, the switching mechanism includes:

[0082] A locking mechanism, disposed on the rotating track 102, for locking the seat body 20 on the rotating track 102;

[0083] The lifting mechanism is arranged perpendicular to the rotating track 102 and connected to the inner wall of the furnace tube, and is used to move the seat body 20 from one track mechanism to another adjacent track mechanism.

[0084] The locking mechanism ensures that the seat body 20 is accurately positioned on the track, preventing displacement of the seat body 20 during monitoring that affects image quality and monitoring accuracy.

[0085] The lifting mechanism enables the safe and efficient transfer of the seat body 20 between different tracks, ensuring the continuity and comprehensiveness of monitoring.

[0086] The locking mechanism locks the seat body 20 on the rotating track 102, and the lifting mechanism moves the seat body 20 vertically to the adjacent track, and the two cooperate to complete the track switching of the seat body 20.

[0087] The protective housing 403 of the locking mechanism is made of high temperature resistant metal material, such as titanium alloy, and is internally heat-insulated to protect the locking motor and other components from high temperature.

[0088] The frame and transmission parts of the lifting mechanism are made of high temperature resistant materials, such as high temperature stainless steel, to ensure normal operation in high temperature environments.

[0089] The locking mechanism includes a locking motor, a locking rod 402 and a protective shell 403. The protective shell 403 is connected to the upper wall of the rotating track 102. The locking motor is arranged in the protective shell 403. The locking rod 402 is connected to the telescopic end of the locking motor and extends to the outside through the protective shell 403. A locking hole is provided on the base body 20. The locking rod 402 is used to be inserted into the locking hole. A positioning groove 401 is provided on the rotating track 102. The base body 20 is located in the positioning groove 401. The locking motor is located on one side of the positioning groove 401.

[0090] The locking motor drives the locking rod 402 to extend and retract, and cooperates with the locking hole of the seat body 20 to achieve a stable locking of the seat body 20 on the track to prevent accidental movement.

[0091] The positioning groove 401 and the locking mechanism work together to enable the seat body 20 to be accurately positioned at a specific position on the track after each movement, thereby ensuring monitoring repeatability and accuracy.

[0092] The locking motor drives the locking rod 402 to enter and exit the locking hole of the seat body 20 to lock or unlock the seat body 20; the seat body 20 is located in the positioning groove 401 and the locking position is controlled by the locking motor.

[0093] The locking rods 402 may include two, and the two locking rods 402 are arranged in parallel. The two parallel locking rods 402 act simultaneously, increasing the locking area and force uniformity, making the seat body 20 more firmly locked on the track and reducing the risk of shaking.

[0094] The two locking rods 402 are synchronously extended and retracted under the drive of the locking motor, and penetrate into the locking holes of the seat body 20 to fix the seat body 20 from different positions.

[0095] In some embodiments, the number of lifting mechanisms corresponds to the number of track mechanisms, and each lifting mechanism is arranged above the corresponding track mechanism. The lifting mechanism may include:

[0096] The lifting track 501 is arranged perpendicular to the rotating track 102 and connected to the inner wall of the furnace tube. The two ends of the lifting track 501 are arranged close to the upper and lower fixed tracks 101.

[0097] A lifting drive device, disposed on the lifting track 501, for moving on the lifting track 501;

[0098] The connecting mechanism is connected to the lifting drive device and is used to connect the seat body 20 to the uppermost position when the seat body 20 is moved upward, and then a connecting mechanism above is connected to the seat body 20, and drives the seat body 20 to move into the positioning groove 401, and cooperates with the locking mechanism to lock the seat body 20 on the previous rotating track 102.

[0099] The lifting rail 501 and the lifting drive device cooperate to provide a stable path and power for the seat body 20 to move vertically between the rails, ensuring that the switching process is fast and smooth.

[0100] The connection mechanism ensures that the seat body 20 is reliably connected with different components during the lifting and track switching process, thereby achieving accurate connection and positioning.

[0101] The lifting drive device moves on the lifting track 501, driving the connecting mechanism to lift the seat body 20; the plurality of lifting tracks 501 are staggered, and the seat body 20 is transferred between different tracks through the connecting mechanism.

[0102] The lifting drive device includes a lifting shell 502, a lifting motor 503, and a lifting gear 504. The lifting motor 503 is connected inside the lifting shell 502. The lifting shell 502 is passed through the lifting track 501 and is slidably connected thereto. The lifting gear 504 is drive-connected to the lifting motor 503. The lifting gear 504 is meshed with the tooth groove provided on the side wall of the lifting track 501. The lifting shell 502 is connected to the connecting mechanism.

[0103] The lifting motor 503 meshes with the teeth of the lifting track 501 through the lifting gear 504 to accurately control the moving speed and position of the lifting shell 502 and the connecting mechanism, thereby achieving accurate lifting and lowering of the seat body 20.

[0104] The lifting shell 502 is slidably connected to the lifting track 501 to ensure a smooth lifting process and reduce the risk of shaking and jamming.

[0105] The lifting motor 503 drives the lifting gear 504 to rotate, so that the lifting housing 502 slides on the lifting track 501, driving the connecting mechanism and the seat body 20 to rise and fall.

[0106] The connection mechanism includes a connection motor 505 and a connection plate 506. The connection plate 506 is connected to the driving end of the connection motor 505. The connection plate 506 is arranged perpendicular to the lifting track 501. A lifting cavity is arranged in the seat body 20. A plurality of lifting holes 507 are arranged on the upper surface of the seat body 20. The lifting holes 507 are connected to the lifting cavity. The connection plate 506 is used to enter the lifting holes 507 and the lifting cavity under the drive of the lifting drive device. The connection motor 505 is used to drive the lifting plate to rotate so that the lifting plate is clamped on the inner wall of the lifting cavity, so that the connection motor 505 and the seat body 20 are fixed together.

[0107] Among them, multiple lifting rails 501 are staggered, multiple lifting holes 507 are tangentially spaced along the rotating rail 102, and the length of the driving end of the upper connecting motor 505 is longer than the length of the lower connecting motor 505.

[0108] The design of the connecting motor 505 and the connecting plate 506 ensures a reliable connection between the base 20 and the lifting drive device. During the track switching and the movement of the base 20, the connecting plate 506 is used to tightly cooperate with the base 20 to prevent the base 20 from loosening or displacement, thereby ensuring the stability of the operation of the entire camera device. During the vertical lifting process, the base 20 can maintain an accurate position and posture, thereby providing a stable shooting platform for the camera, ensuring the acquisition of clear and accurate wafer monitoring images.

[0109] The plurality of lifting holes 507 arranged tangentially and spaced apart along the rotating track 102 and the staggered lifting track 501, combined with the connecting motors 505 of different lengths of the driving ends, give the camera device a high degree of flexibility. This design enables the base 20 to be accurately moved to any specified position in a complex track system, whether at different height levels of the furnace tube or at different angular positions in the circumferential direction, to achieve precise positioning.

[0110] When it is necessary to switch tracks or adjust the height of the seat 20, the connection mechanism is used to respond quickly and accurately. The connection motor 505 drives the connection plate 506 to quickly enter the lifting hole 507 of the seat 20 and enter the lifting cavity, and then a firm connection is achieved by rotating the clamping method. The whole process is efficient and smooth. This efficient operation mechanism greatly shortens the time for the seat 20 to transfer between tracks, reduces interference with the production process, improves production efficiency, and also reduces the risk of damage to the wafer due to unstable factors during the movement of the seat 20.

[0111] When the seat body 20 needs to be connected to the lifting drive device, the connecting motor 505 is started to drive the connecting plate 506 to move toward the seat body 20. The connecting plate 506 first enters the lifting hole 507 on the upper surface of the seat body 20. Since the lifting hole 507 is connected to the lifting cavity, the connecting plate 506 continues to go deeper until it completely enters the lifting cavity. At this time, the connecting motor 505 drives the connecting plate 506 to rotate a certain angle, so that the connecting plate 506 is clamped on the structure of the inner wall of the lifting cavity, thereby realizing the fixed connection between the connecting motor 505 and the seat body 20. This clamping method utilizes the interlocking principle of the mechanical structure, which is used to withstand large tensile and shear forces, and ensures the tight combination of the seat body 20 and the connecting mechanism during the lifting and moving process. After the connection, the locking motor drives the locking rod 402 to move out to achieve unlocking.

[0112] When switching between rails at different heights, the driving ends of the upper and lower connection motors 505 have different lengths due to the staggered arrangement of the multiple lifting rails 501. When the seat body 20 moves upward from the lower rail to the upper rail, the lower connection motor 505 first drives the seat body 20 to rise. When the seat body 20 reaches the vicinity of the upper rail, the longer driving end of the upper connection motor 505 is used to smoothly dock with the lifting hole 507 of the seat body 20 and complete the connection. Then the lower connection motor 505 is unlocked, and the upper connection motor 505 continues to lift the seat body 20 and move it into the positioning groove 401 of the upper rail. Conversely, when the seat body 20 moves downward from the upper rail, the process is similar. Through the coordinated work of the upper and lower connection motors 505, the accurate transfer of the seat body 20 between different rail positions is achieved.

[0113] Specifically, the connecting plate 506 of the upper connecting motor 505 is inserted into the lifting hole 507 provided at the bottom of the seat body 20, driving the seat body 20 to start descending, and at the same time, the upper locking mechanism is released, and the lower connecting motor 505 is ready to be connected.

[0114] The seat body 20 descends along the lifting track 501. When approaching the lower track, the connecting motor 505 corresponding to the lower track is started, driving its connecting plate 506 to move upwards, ready to dock with the lifting hole 507 below the seat body 20.

[0115] When the seat body 20 reaches the preset precise handover position, the operation of the upper connecting motor 505 and the lower connecting motor 505 is controlled to ensure that the lower connecting plate 506 is accurately inserted into the lifting hole 507 below the seat body 20. After the connecting plate 506 is fully inserted, the lower connecting motor 505 drives the connecting plate 506 to rotate a certain angle so that it is firmly clamped on the specific structure of the inner wall of the lifting cavity below the seat body 20, thereby realizing a reliable connection between the lower connecting component and the seat body 20. At the same time, the upper connecting motor 505 continues to reverse, so that the upper connecting plate 506 is completely separated from the lifting hole 507 below the seat body 20, and the connection relationship between the seat body 20 and the upper track is released. Subsequently, the locking mechanism of the lower track is quickly activated to firmly lock the seat body 20 in the positioning groove 401 of the lower track, ensuring that the position of the seat body 20 on the new track is stable and accurate.

[0116] In some embodiments, a positioning sensor is further included, which is disposed on the seat body 20 and is used to determine whether the seat body 20 moves into position in the positioning groove 401 .

[0117] The positioning sensor is set to provide accurate feedback for the position of the seat 20 in the track system. Whether it is the circumferential rotation positioning on the track mechanism or the vertical positioning after switching between different tracks, the positioning sensor can monitor the position information of the seat 20 relative to the positioning groove 401 in real time. This ensures that the seat 20 can reach the predetermined position accurately after each movement, ensures the consistency and accuracy of the camera shooting angle, and thus provides a reliable basis for the accurate monitoring of the wafer growth status. By timely detecting the position deviation of the seat 20, it is used to avoid monitoring blind spots or misjudgments caused by inaccurate position of the seat 20, thereby improving the reliability and stability of the entire monitoring system.

[0118] Accurate positioning information of the seat 20 is of great significance for the precise control of the production process. In the semiconductor chip manufacturing process, the precise control of process parameters is closely related to the position of the wafer in the furnace tube. The positioning sensor is used to feed back the position information of the seat 20 to the control system, and the control system can accurately adjust the process parameters such as heating temperature, gas flow rate, etc. according to this information to ensure that the wafer is in the best process environment at different growth stages. In addition, during equipment maintenance and troubleshooting, the position information of the seat 20 provided by the positioning sensor helps technicians quickly locate problems, improve equipment maintenance efficiency, and reduce equipment downtime, thereby improving production efficiency and product quality.

[0119] The positioning sensor uses a non-contact or contact detection method (depending on the specific sensor type) to determine the position of the seat 20 in the positioning groove 401. For example, if an optical sensor is used, it detects specific marks or reflection features on the surface of the seat 20 by emitting and receiving light. When the seat 20 reaches the predetermined position, the reflection or shielding of the light changes, and the sensor determines whether the position of the seat 20 is accurate. If a mechanical contact sensor is used, it interacts with the contact parts on the seat 20 or the positioning groove 401, such as a micro switch, and triggers a switch signal when the seat 20 moves into place, thereby determining the position of the seat 20. The sensor converts the detected position signal into an electrical signal and transmits it to the control system.

[0120] After receiving the position signal of the seat 20 from the positioning sensor, the control system compares and analyzes it with the preset standard position information. If there is a deviation between the position of the seat 20 and the preset position, the control system will issue a corresponding adjustment instruction, such as driving the track mechanism or the lifting mechanism to make fine adjustments to return the seat 20 to the correct position. At the same time, the control system can also perform logical control on the entire monitoring process according to the position information of the seat 20, such as starting or stopping the camera shooting at a specific position, switching the monitoring mode, etc., to realize intelligent monitoring and control of the operation of the semiconductor furnace tube equipment.

[0121] The core components of the positioning sensor are made of materials and technologies that can work stably in high temperature environments. For example, a high-temperature thermocouple is used as a temperature-sensitive element, which is used to accurately measure temperature changes at high temperatures and convert them into electrical signals, and has good high-temperature resistance and stability. Alternatively, an optical fiber sensor is used. The optical fiber itself has good high-temperature resistance and is used to transmit optical signals in a high-temperature environment. The position of the seat 20 is accurately detected through special optical fiber sensing technology. In addition, the housing and packaging materials of the sensor are also made of high-temperature resistant materials, such as high-temperature ceramics or special high-temperature plastics, to ensure the structural integrity and performance stability of the sensor as a whole in a high-temperature environment.

[0122] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0123] It is understood that the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0124] It is understood that in this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0125] It is to be understood that, in the present application, unless otherwise expressly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0126] It is understood that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0127] It is understandable that the term "and / or" in this article is only a description of the association relationship of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article indicates that the associated objects before and after are in an "or" relationship.

[0128] It is understandable that the above describes multiple embodiments provided by the embodiments of the present disclosure, and the various optional methods introduced in the embodiments can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible embodiments, which can all be considered as embodiments disclosed and disclosed by the present disclosure. Although the embodiments of the present disclosure are disclosed as above, the present disclosure is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, so the scope of protection of the present disclosure should be based on the scope defined by the claims.

Claims

1. A furnace tube monitoring device, characterized in that: include: A track mechanism is connected to the inner wall of the furnace tube, wherein the track mechanism comprises a plurality of track mechanisms, and the plurality of track mechanisms are arranged at intervals; A seat body connected to the track mechanism, wherein the track mechanism is used to drive the seat body to rotate along the circumference of the furnace tube; A camera device connected to the seat; The switching mechanism is connected to the inner wall of the furnace tube and is used for switching the seat body from one track mechanism to another adjacent track mechanism.

2. The furnace tube monitoring device according to claim 1, characterized in that: The track mechanism comprises: A fixed track connected to the inner wall of the furnace tube, wherein the fixed track is a circular ring structure; A rotating track is embedded in the inner ring groove of the fixed track; A rotating motor is connected to the ground of the fixed track, the driving end of the rotating motor extends into the fixed track, and the driving end of the rotating motor is connected to a rotating gear, the rotating gear is located in the fixed track and meshes with the tooth grooves starting from the outer ring of the rotating track, and the rotating motor is used to drive the rotating track to rotate on the fixed track.

3. The furnace tube monitoring device according to claim 2, characterized in that: The fixed rail is embedded in a fixed groove opened on the inner wall of the furnace tube, and fixed blocks are arranged at intervals on the fixed rail. The fixed blocks extend out of the upper and lower side surfaces of the fixed rail, and the fixed blocks are clamped in the fixed groove. There are intervals between the upper and lower side surfaces of the fixed rail and the upper and lower side surfaces inside the fixed groove, and ceramic glue is arranged in the interval to connect the fixed rail and the fixed groove together.

4. The furnace tube monitoring device according to claim 2, characterized in that: The switching mechanism comprises: A locking mechanism, disposed on the rotating track, for locking the seat body on the rotating track; The lifting mechanism is arranged perpendicular to the rotating track and connected to the inner wall of the furnace tube, and is used for moving the seat body from one track mechanism to another adjacent track mechanism.

5. The furnace tube monitoring device according to claim 4, characterized in that: The locking mechanism comprises: A locking motor, a locking rod and a protective shell, wherein the protective shell is connected to the upper wall of the rotating track, the locking motor is arranged in the protective shell, the locking rod is connected to the telescopic end of the locking motor and extends to the outside through the protective shell, the base body is provided with a locking hole, the locking rod is used to pass through the locking hole, the rotating track is provided with a positioning groove, the base body is located in the positioning groove, and the locking motor is located on one side of the positioning groove.

6. The furnace tube monitoring device according to claim 5, characterized in that: The locking rods include two, and the two locking rods are arranged in parallel.

7. The furnace tube monitoring device according to claim 5, characterized in that: The number of the lifting mechanisms corresponds to the number of the track mechanisms, and each lifting mechanism is arranged above the corresponding track mechanism. The lifting mechanism includes: A lifting track is arranged perpendicular to the rotating track and connected to the inner wall of the furnace tube, and two ends of the lifting track are arranged close to the upper and lower fixed tracks; A lifting drive device, arranged on the lifting track and used for moving on the lifting track; A connecting mechanism is connected to the lifting drive device and is used for connecting the seat body to the uppermost position when the seat body is moved upward, and then the upper connecting mechanism is connected to the seat body and drives the seat body to move into the positioning groove, and cooperates with the locking mechanism to lock the seat body on the upper rotating track.

8. The furnace tube monitoring device according to claim 7, characterized in that: The lifting drive device comprises: A lifting shell, a lifting motor, and a lifting gear. The lifting motor is connected inside the lifting shell. The lifting shell is passed through the lifting track and is slidably connected thereto. The lifting gear is drive-connected to the lifting motor. The lifting gear is meshed with a tooth groove provided on the side wall of the lifting track. The lifting shell is connected to the connecting mechanism.

9. The furnace tube monitoring device according to claim 7, characterized in that: The connecting mechanism comprises: A connecting motor and a connecting plate, wherein the connecting plate is connected to the driving end of the connecting motor, the connecting plate is arranged perpendicular to the lifting track, a lifting cavity is arranged in the seat body, a plurality of lifting holes are arranged on the upper surface of the seat body, the lifting holes are connected to the lifting cavity, the connecting plate is used to enter the lifting holes and the lifting cavity under the drive of the lifting drive device, the connecting motor is used to drive the lifting plate to rotate, so that the lifting plate is clamped on the inner wall of the lifting cavity, so that the connecting motor and the seat body are fixed together; Among them, the multiple lifting tracks are staggered, the multiple lifting holes are tangentially spaced along the rotating track, and the length of the driving end of the connecting motor located at the top is longer than the length of the connecting motor located at the bottom.

10. The furnace tube monitoring device according to claim 7, characterized in that: Also includes: A positioning sensor is arranged on the seat body and is used to determine whether the seat body moves into position in the positioning groove.

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