Heat treatment device

Abstract

The invention provides a heat treatment device capable of improving the detection accuracy of the temperature of a workpiece. A heat treatment apparatus according to an embodiment includes: a chamber in which a workpiece is housed and which is capable of maintaining a gas environment reduced to a pressure lower than atmospheric pressure; an exhaust unit that exhausts the inside of the chamber; the heater is arranged in the cavity; and a detection unit which is provided inside the chamber and detects the temperature of the workpiece. The detection unit has a linear shape and has: a first portion that approaches the surface of the workpiece and extends along the surface of the workpiece; and a second portion connected to the first portion and extending in a direction intersecting with the first portion, a temperature measurement point being provided on a front end side of the first portion.

Description

Technical Field

[0001] An embodiment of the present invention relates to a heat treatment apparatus. Background Art

[0002] There is a heat treatment apparatus that heats a workpiece to form a film or the like on the surface of the workpiece or to treat the surface of the workpiece.

[0003] For example, a heating treatment device is proposed, including: a chamber for accommodating a workpiece; a plurality of heaters arranged inside the chamber; a detection unit arranged at a position inside the chamber facing the workpiece and detecting the temperature of the workpiece; and a controller arranged outside the chamber and controlling the plurality of heaters based on detection values ​​detected by the detection unit.

[0004] If a detection unit for detecting the temperature of the workpiece is provided, the temperature of the workpiece can be controlled to be within a predetermined range.

[0005] However, it has been found that if only the detection unit is provided, the detection accuracy of the temperature of the workpiece decreases. If the detection accuracy of the temperature of the workpiece decreases, there is a possibility that the quality of the film formed on the surface of the workpiece or the processed portion may decrease.

[0006] Therefore, it is desired to develop a technology that can improve the detection accuracy of the temperature of a workpiece.

[0007] [Prior art literature]

[0008] [Patent Document]

[0009] [Patent Document 1] Japanese Patent Application Publication No. 2019-184229 Summary of the invention

[0010] [Problems to be solved by the invention]

[0011] An object of the present invention is to provide a heat treatment device capable of improving the detection accuracy of the temperature of a workpiece.

[0012] [Technical means to solve the problem]

[0013] The heat treatment device of the embodiment includes: a chamber that accommodates the workpiece and can maintain a gas environment that is decompressed to a pressure lower than the atmospheric pressure; an exhaust unit that exhausts the interior of the chamber; a heater that is disposed inside the chamber; and a detection unit that is disposed inside the chamber and detects the temperature of the workpiece. The detection unit is linear and has: a first portion that is close to the surface of the workpiece and extends along the surface of the workpiece; and a second portion that is connected to the first portion and extends in a direction that intersects the first portion, and a temperature measurement point is provided on the front end side of the first portion.

[0014] [Effects of the Invention]

[0015] According to the embodiment of the present invention, a heat treatment apparatus capable of improving the detection accuracy of the temperature of a workpiece is provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic front view for illustrating the heat treatment apparatus according to the present embodiment.

[0017] Figure 2 yes Figure 1 Schematic cross-sectional view of the heating treatment device taken along line AA.

[0018] Figure 3 It is a schematic three-dimensional diagram of the chamber and the cassette holder.

[0019] Figure 4 It is a schematic perspective view for illustrating a cassette.

[0020] Figure 5 This is a schematic side view for illustrating a detection unit provided inside the cassette.

[0021] Figure 6 Observed from the BB line Figure 5 Schematic diagram of the detection unit in .

[0022] Figure 7 This is a schematic side view for illustrating a detection unit according to another embodiment.

[0023] [Explanation of Symbols]

[0024] 1: Heating treatment device

[0025] 10: Chamber

[0026] 11, 14: Flange

[0027] 12: Sealing material

[0028] 13: Open and close doors

[0029] 15: Cover

[0030] 16: Exhaust port

[0031] 20: Exhaust

[0032] 21: First exhaust section

[0033] 21a, 22a: Exhaust pump

[0034] 21b, 22b: Pressure control unit

[0035] 22: Second exhaust section

[0036] 30: Heating unit

[0037] 31: First heating unit

[0038] 32: Second heating unit

[0039] 33, 33a: Heater

[0040] 34: Support

[0041] 35: Maintaining Department

[0042] 40: Inspection Department

[0043] 40a: Part I

[0044] 40b: Part 2

[0045] 41: Connector

[0046] 42: Fixer

[0047] 50: Box

[0048] 51: Box frame

[0049] 52: Upper heat sink

[0050] 53: Lower heat sink

[0051] 54, 55: Side heat sink

[0052] 56: Workpiece support

[0053] 56a, 560: Plate

[0054] 56a1: Plate body

[0055] 56a2: Extension

[0056] 57: Cassette support

[0057] 60: Cassette bracket

[0058] 61: Framework

[0059] 62: Receive component

[0060] 63: Reflector

[0061] 70: Controller

[0062] 100: Artifacts

[0063] L1, L2: distance

[0064] X, Y, Z: direction DETAILED DESCRIPTION

[0065] Hereinafter, the embodiments will be described with reference to the accompanying drawings. In addition, in each of the drawings, the same components are denoted by the same reference numerals and detailed descriptions thereof are appropriately omitted.

[0066] Hereinafter, as an example, a heat treatment device for heating a workpiece in a gas atmosphere decompressed to a pressure lower than the atmospheric pressure to form an organic film on the surface of the workpiece is described. However, the present invention is not limited thereto. For example, the present invention can also be applied to a heat treatment device for heating a workpiece to form an inorganic film on the surface of the workpiece or for treating the surface of the workpiece.

[0067] In addition, the workpiece before heating may include, for example, a substrate and a solution applied on the surface of the substrate, or may be only the substrate. Hereinafter, as an example, a case where the workpiece before heating includes a substrate and a solution applied on the surface of the substrate will be described.

[0068] The workpiece 100 before being heat-treated by the heat treatment device 1 of the present embodiment has a substrate and a solution applied to the surface of the substrate. The substrate is, for example, a glass substrate or a semiconductor wafer. However, the substrate is not limited to the illustrated substrate. The solution, for example, contains an organic material and a solvent. As long as the organic material can be dissolved by a solvent, there is no particular limitation. The solution, for example, can be a varnish containing polyamic acid. However, the solution is not limited to the illustrated solution. In addition, the solution can also be a solution in which the liquid is temporarily calcined and becomes a semi-hardened state (non-flowing state).

[0069] Figure 1 This is a schematic front view for illustrating the heat treatment apparatus 1 according to the present embodiment.

[0070] In addition, Figure 1 In order to avoid complexity, only one detection unit 40 and cassette 50 are depicted.

[0071] Figure 2 yes Figure 1 A schematic cross-sectional view of the heat treatment device 1 taken along line AA.

[0072] In addition, Figure 2 In order to avoid complexity, the drawing detection unit 40 and the cassette 50 are omitted.

[0073] Figure 3 It is a schematic three-dimensional view of the chamber 10 and the cassette holder 60 .

[0074] In addition, the X direction, Y direction, and Z direction in each figure represent three directions that are orthogonal to each other. For example, the X direction and the Y direction are directions parallel to the surface of the workpiece 100 (for example, the horizontal direction). For example, the Z direction is a direction perpendicular to the surface of the workpiece 100 (for example, the vertical direction).

[0075] like Figure 1and Figure 2 As shown, the heat treatment apparatus 1 is provided with, for example, a chamber 10 , an exhaust unit 20 , a heating unit 30 , a detection unit 40 , a cassette 50 , a cassette holder 60 , and a controller 70 .

[0076] like Figure 1 to Figure 3 As shown, the chamber 10 is box-shaped. The chamber 10 has an airtight structure capable of maintaining a gas environment that is decompressed to a pressure lower than the atmospheric pressure. The appearance shape of the chamber 10 is not particularly limited. The appearance shape of the chamber 10 can be, for example, a rectangular parallelepiped or a cylinder. The chamber 10 is formed of, for example, a metal such as stainless steel.

[0077] For example, openings are provided at both ends of the chamber 10 in the Y direction. A flange 11 is provided at one end of the chamber 10 in the Y direction. A sealing material 12 such as an O-ring is provided on the flange 11. An opening and closing door 13 is provided on the side of the chamber 10 where the flange 11 is provided. When the opening and closing door 13 is closed, the opening of the chamber 10 is sealed in an airtight manner by the sealing material 12. When the opening and closing door 13 is opened, the workpiece 100 can be moved into or out of the cassette 50 through the opening of the chamber 10. That is, the workpiece 100 is stored inside the chamber 10.

[0078] For example, a flange 14 is provided at the other end of the chamber 10 in the Y direction. A sealing material 12 is provided on the flange 14. A cover 15 is provided on the side of the chamber 10 where the flange 14 is provided. For example, the cover 15 is detachably provided on the flange 14 using a fastening member such as a screw. When the cover 15 is installed, the opening of the chamber 10 is closed in an airtight manner by the sealing material 12. If a detachable cover 15 is provided, maintenance of the heat treatment device 1 from the side where the flange 14 is provided becomes easy. In this case, when the cover 15 is opened for maintenance, the cassette 50 having a processing space for heating the workpiece 100 is moved into the interior of the chamber 10 through the opening of the chamber 10. Alternatively, the cassette 50 is moved out of the chamber 10 through the opening of the chamber 10.

[0079] In addition, a cooling device (not shown) may be provided on the outer wall of the chamber 10. The cooling device may be, for example, a water jacket. If the cooling device is provided, the temperature of the outer wall of the chamber 10 can be suppressed from being higher than a predetermined temperature.

[0080] The exhaust unit 20 exhausts the interior of the chamber 10 .

[0081] like Figure 1 As shown, the exhaust unit 20 includes a first exhaust unit 21 and a second exhaust unit 22. The first exhaust unit 21 and the second exhaust unit 22 are connected to the exhaust port 16 provided on the bottom surface of the chamber 10.

[0082] The first exhaust unit 21 includes an exhaust pump 21 a and a pressure control unit 21 b .

[0083] The exhaust pump 21a can be an exhaust pump that performs rough exhaust from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a larger exhaust volume than the exhaust pump 22a described later. The exhaust pump 21a can be, for example, a dry vacuum pump.

[0084] The pressure control unit 21b is provided between the exhaust port 16 and the exhaust pump 21a. The pressure control unit 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) for detecting the internal pressure of the chamber 10. The pressure control unit 21b can be, for example, an automatic pressure controller (APC).

[0085] The second exhaust unit 22 includes an exhaust pump 22 a and a pressure control unit 22 b .

[0086] The exhaust pump 22a performs exhaust to a lower predetermined pressure after the exhaust pump 21a performs rough exhaust. The exhaust pump 22a has an exhaust capacity capable of exhausting to a high vacuum molecular flow region, for example. For example, the exhaust pump 22a can be a turbomolecular pump (TMP) or the like.

[0087] The pressure control unit 22b is provided between the exhaust port 16 and the exhaust pump 22a. The pressure control unit 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) for detecting the internal pressure of the chamber 10. The pressure control unit 22b may be, for example, an APC.

[0088] If the pressure of the internal space of the chamber 10 is reduced, the heat released to the outside of the chamber 10 can be reduced. Therefore, the heating efficiency and the heat storage efficiency can be improved, so the power applied to the heater 33 described later can be reduced. If the power applied to the heater 33 can be reduced, the load of the heater 33 can be suppressed from increasing. Therefore, the life of the heater 33 can be extended.

[0089] The heating unit 30 includes, for example, a first heating unit 31 and a second heating unit 32 . The first heating unit 31 and the second heating unit 32 are provided inside the chamber 10 .

[0090] The first heating unit 31 is disposed above the cassette 50 .

[0091] The second heating unit 32 is disposed below the cassette 50 . The second heating unit 32 faces the first heating unit 31 .

[0092] As described later, the workpiece 100 is supported inside the cassette 50. Therefore, the first heating unit 31 heats the surface (upper surface) of the workpiece 100 supported inside the cassette 50. The second heating unit 32 heats the back surface (lower surface) of the workpiece 100 supported inside the cassette 50.

[0093] like Figure 1 As shown, when a plurality of cassettes 50 are arranged in a row along the Z direction (vertical direction) inside the chamber 10, the second heating unit 32 provided below the upper cassette 50 can be set as the first heating unit 31 provided above the lower cassette 50. That is, the first heating unit 31 or the second heating unit 32 provided between the cassettes 50 and the cassettes 50 can be used for both.

[0094] For convenience, when focusing on one cassette 50 , the upper side is set as the first heating unit 31 and the lower side is set as the second heating unit 32 when viewed from the cassette 50 . Heating units (heaters 33 ) may be provided on the upper and lower sides of all cassettes 50 .

[0095] In this case, the back side of the workpiece 100 supported in the upper cassette 50 is heated by the combined first heating unit 31 or the second heating unit 32. The surface of the workpiece 100 supported in the lower cassette 50 is heated by the combined first heating unit 31 or the second heating unit 32.

[0096] This can reduce the number of first heating units 31 or second heating units 32. This can reduce power consumption, manufacturing costs, and space saving.

[0097] The first heating unit 31 and the second heating unit 32 include, for example, a heater 33 , a support unit 34 , and a holding unit 35 .

[0098] At least one heater 33 is provided. For example, one supporting portion 34 is provided for one heater 33 or one supporting portion 34 is provided for a plurality of heaters 33. For example, one holding portion 35 is provided for one heater 33 or one supporting portion 34 is provided for a plurality of heaters 33.

[0099] Figure 1 and Figure 2The first heating section 31 and the second heating section 32 illustrated in the figure each have a plurality of heaters 33. The plurality of heaters 33 extend, for example, in the X direction and are arranged in the Y direction. In addition, the plurality of heaters 33 may also extend in the Y direction and be arranged in the X direction. That is, the plurality of heaters 33 are arranged in a direction intersecting the central axis of the heater 33. The plurality of heaters 33 may be arranged at equal intervals, or the intervals may be changed according to the in-plane distribution of the temperature of the workpiece 100, etc. In addition, the specifications, quantity, intervals, etc. of the heaters 33 provided in the second heating section 32 may be the same as or different from the specifications, quantity, intervals, etc. of the heaters 33 provided in the first heating section 31. The specifications, quantity, intervals, etc. of the heaters 33 may be appropriately changed according to the composition of the solution to be heated (the heating temperature of the solution), the size of the workpiece 100, etc. The specifications, quantity, intervals, etc. of the heaters 33 may be appropriately determined by performing simulations or experiments, etc.

[0100] The heater 33 may be a rod-shaped heater extending in one direction. The heater 33 is not particularly limited as long as it is a rod-shaped heater. The heater 33 may be, for example, a sheathed heater, a ceramic heater, a cartridge heater, etc. The heater 33 may also be, for example, a heater having a quartz cover.

[0101] In this specification, a heater covered with a quartz cover is also referred to as a "rod-shaped heater." The external shape of the "rod-shaped" is not limited, and it can be, for example, a cylindrical shape or a prism shape.

[0102] The heater 33 is not limited to the above as long as it can heat the workpiece 100 in a gas environment decompressed to a pressure lower than the atmospheric pressure. That is, the heater 33 may be a rod-shaped heater that utilizes heat energy released by radiation.

[0103] The detection part 40 is disposed inside the chamber 10 and detects the temperature of the workpiece 100. The detection part 40 may be, for example, a thermocouple. When the detection part 40 is a thermocouple, the detection part 40 may be, for example, a sheathed thermocouple. The sheathed thermocouple, for example, comprises: two types of bare thermocouple wires; a metal sheath (protective tube) which is cylindrical and is used to accommodate the two types of bare thermocouple wires; and an insulating material which is filled inside the sheath and insulates the two types of bare thermocouple wires from the sheath.

[0104] The type of thermocouple (bare thermocouple wire) can be appropriately selected according to the heating temperature of the workpiece 100. The thermocouple can be set to, for example, a K thermocouple or an N thermocouple (based on the provisions of Japanese Industrial Standards). In this case, if the detection unit 40 is a K thermocouple, the relationship between temperature and electromotive force is basically linear, so the temperature of the workpiece 100 can be detected with good accuracy. In addition, the thermocouple can be a grounded type in which a pair of bare thermocouple wires are electrically connected to a sheath, or a non-grounded type in which a pair of bare thermocouple wires are insulated from a sheath. If the thermocouple is a grounded type, the responsiveness can be improved. If the thermocouple is a non-grounded type, the noise resistance and durability can be improved. In this embodiment, an example is given of a case where a non-grounded thermocouple is used as the detection unit 40. In addition, for a non-grounded thermocouple, since the joint part (temperature measurement point) is not located at the sheath position, it is difficult to correctly grasp the position of the joint part. As described later, this embodiment is particularly effective when using such a non-grounded thermocouple.

[0105] like Figure 4 As shown, the detection portion 40 may be disposed inside the cartridge 50 .

[0106] like Figure 1 As shown, the output side of the detection unit 40 is electrically connected to the controller 70. In this case, the wiring portion led to the outside of the cassette 50 can be electrically connected to the wiring portion electrically connected to the controller 70 via the connector 41. If so, when the cassette 50 is moved out from the inside of the cassette holder 60, the wiring portion on the detection unit 40 side can be separated from the wiring portion on the controller 70 side through the connector 41. When the cassette 50 is moved into the inside of the cassette holder 60, the wiring portion on the detection unit 40 side can be electrically connected to the wiring portion on the controller 70 side through the connector 41. In addition, the wiring portion can be a wire material constituting a thermocouple, or a so-called compensation wire.

[0107] In addition, details regarding the arrangement, shape, and the like of the detection unit 40 provided inside the cassette 50 will be described later.

[0108] like Figure 1 As shown, the cassette 50 is detachably disposed on a pair of receiving members 62 of a cassette support 60 disposed inside the chamber 10. In this case, the cassette 50 is detachably disposed between the first heating unit 31 and the second heating unit 32.

[0109] In addition, the cassette 50 may be omitted. When the cassette 50 is omitted, the detection unit 40 and the workpiece support unit 56 described later are provided inside the chamber 10 (cassette holder 60).

[0110] However, if the workpiece 100 is heated, sometimes the solution or the like applied to the surface of the substrate may evaporate or sublime. Therefore, it is necessary to perform maintenance such as cleaning regularly or as needed. If a cassette 50 is provided, the cassette 50 is moved out of the chamber 10 (cassette support 60), so that the cassette 50 can be cleaned and maintained outside the chamber 10. Then, the cassette 50 after maintenance can be moved into the interior of the chamber 10 (cassette support 60). Therefore, if a cassette 50 is provided, the time and labor required for maintenance can be greatly reduced compared to the case where maintenance such as cleaning is directly performed inside the chamber 10 (cassette support 60).

[0111] Figure 4 It is a schematic perspective view for illustrating the cassette 50 .

[0112] The cassette 50 is disposed inside the chamber 10 , and the workpieces 100 are stored inside the cassette 50 .

[0113] like Figure 4 As shown, the cassette 50 is box-shaped and has a processing space inside for supporting the workpiece 100. The appearance of the cassette 50 is not particularly limited. The appearance of the cassette 50 can be, for example, a rectangular parallelepiped.

[0114] The cassette 50 includes, for example, a cassette frame 51 , an upper soaking plate 52 , a lower soaking plate 53 , side soaking plates 54 , side soaking plates 55 , a workpiece support 56 , a cassette support 57 , and a heater 33 a .

[0115] The cassette frame 51 divides the processing space for heating the workpiece 100. The cassette frame 51 is, for example, a skeleton structure using an elongated plate or steel. Alternatively, the cassette frame 51 may also be a frame formed by metal plate processing or the like. A soaking plate (upper soaking plate 52, lower soaking plate 53, side soaking plate 54, and side soaking plate 55) is provided on the outer surface of the cassette frame 51. The appearance shape of the cassette frame 51 is not particularly limited. The appearance shape of the cassette frame 51 is, for example, a rectangular parallelepiped.

[0116] The upper heat spreader 52 is plate-shaped and is disposed on the upper part of the cassette frame 51. The upper heat spreader 52 can be detachably disposed on the upper part of the cassette frame 51. At least one upper heat spreader 52 can be disposed. Figure 4 The cassette 50 shown in the example is provided with seven upper heat spreaders 52. The planar shape of the upper heat spreaders 52 can be set to a quadrilateral, for example. The number and planar shape of the upper heat spreaders 52 can be appropriately changed according to the size and shape of the upper portion of the cassette frame 51.

[0117] The lower heat spreader 53 is plate-shaped and is disposed at the lower part of the cassette frame 51. The lower heat spreader 53 is detachably disposed at the lower part of the cassette frame 51 in the same manner as the upper heat spreader 52. The lower heat spreader 53 faces the upper heat spreader 52. At least one lower heat spreader 53 may be provided. The number and plane shape of the lower heat spreader 53 may be the same as or different from the number and plane shape of the upper heat spreader 52, for example.

[0118] The side heat spreader 54 is plate-shaped. A pair of side heat spreaders 54 may be provided. One of the side heat spreaders 54 is provided, for example, at one of the sides of the cassette frame 51 facing each other.

[0119] The workpiece 100 is carried into the cassette 50 through the opening provided at the side of the cassette frame 51. Alternatively, the workpiece 100 is carried out from the cassette 50 through the opening provided at the side of the cassette frame 51. Therefore, the cassette frame 51 has a side opening on the opposite side to the side where the side soaking plate 54 is provided.

[0120] The opening of the cassette frame 51 is opened / closed by another side heat soaking plate 54. For example, the side heat soaking plate 54 may be provided at the opening and closing door 13 of the chamber 10, so that the opening of the cassette frame 51 is locked by the side heat soaking plate 54 when the opening and closing door 13 is closed. In addition, a side heat soaking plate 54 that can be opened and closed freely may be provided at the side of the cassette frame 51, so that the opening of the cassette frame 51 is locked by the side heat soaking plate 54 that can be opened and closed freely.

[0121] The side heat spreaders 55 are plate-shaped, and a pair of them are disposed inside the cassette frame 51. The pair of side heat spreaders 55 face each other and extend between the pair of side heat spreaders 54. One of the pair of side heat spreaders 55 is disposed near one side of the cassette frame 51. The other of the pair of side heat spreaders 55 is disposed near the other side of the cassette frame 51.

[0122] The space surrounded by the upper soaking plate 52, the lower soaking plate 53, the side soaking plate 54, and the side soaking plate 55 becomes a processing space for heating the workpiece 100. The processing space inside the cassette 50 is connected to the internal space of the chamber 10, for example, via the gap between the soaking plates (the gap between the beam of the cassette frame 51 and the soaking plates between the soaking plates). Therefore, if the pressure of the internal space of the chamber 10 is reduced, the pressure of the internal space of the cassette 50 is also reduced.

[0123] Here, as described above, the plurality of rod-shaped heaters 33 are arranged at predetermined intervals. When the heater 33 is rod-shaped, heat is radiated radially with the central axis of the heater 33 as the center. Therefore, the shorter the distance between the central axis of the heater 33 and the heated portion of the workpiece 100, the higher the temperature of the heated portion. That is, if the workpiece 100 is directly heated using the plurality of rod-shaped heaters 33, the temperature of the heated workpiece 100 will be biased.

[0124] If the temperature within the surface of the workpiece 100 varies, the quality of the formed organic film may be degraded. For example, bubbles may be generated in a portion where the temperature becomes high, or the composition of the organic film may change.

[0125] If the upper and lower heat spreaders 52 and 53 are provided, the heat radiated from the plurality of heaters 33 is incident on the upper and lower heat spreaders 52 and 53. The heat incident on the upper and lower heat spreaders 52 and 53 propagates in the surface direction inside the heat spreaders and is radiated toward the workpiece 100. Therefore, it is possible to suppress the occurrence of temperature deviation in the surface of the workpiece 100. As a result, the quality of the formed organic film can be improved.

[0126] The upper and lower heat spreaders 52, 53, 54 and 55 may be formed of metal such as aluminum, copper, or stainless steel.

[0127] A plurality of workpiece supports 56 are provided inside the cassette 50. The plurality of workpiece supports 56 support the back side of the workpiece 100 in a processing space for heating the workpiece 100. The plurality of workpiece supports 56 support the workpiece 100 so that the workpiece 100 faces the upper and lower soaking plates 52 and 53.

[0128] The workpiece support 56 may be a rod-shaped body. The workpiece support 56 is formed of, for example, stainless steel. The number, arrangement, and intervals of the workpiece support 56 may be appropriately changed according to the size and rigidity (flexure) of the workpiece 100 .

[0129] The cassette support portion 57 is provided on a side of the cassette frame 51 that intersects with the side where the side vapor chamber 54 is provided. A pair of cassette support portions 57 are provided. The cassette support portions 57 protrude outward from the side of the cassette frame 51 and extend in a direction orthogonal to the side where the side vapor chamber 54 is provided.

[0130] The cassette support portion 57 is provided on each of a pair of mutually facing side surfaces of the cassette 50. The cassette support portion 57 is supported by a receiving member 62 of a cassette holder 60 described later. That is, the cassette 50 is detachably provided inside the chamber 10 (cassette holder 60) by the cassette support portion 57 and the receiving member 62. If the cassette 50 is detachably provided inside the chamber 10, it is possible to facilitate maintenance of the cassette 50.

[0131] A pair of heaters 33a may be provided inside the cassette frame 51. The pair of heaters 33a may be provided in the space between the side heat soaking plates 55 and the side of the cassette frame 51, respectively. That is, the heaters 33a may be provided outside the area for supporting the workpiece 100. The pair of heaters 33a face each other and extend between the pair of side heat soaking plates 54. The heaters 33a may be provided in the same manner as the heaters 33 provided inside the chamber 10. However, the diameter or length of the heaters 33a may be appropriately changed according to the size of the cassette frame 51.

[0132] When the heater 33 a is provided inside the cassette 50 (cassette frame 51 ), at least one of the support portion 34 and the holding portion 35 that support the heater 33 a may be provided similarly to the heater 33 .

[0133] The heater 33a may be electrically connected to the controller 70 via a connector or the like. In this way, when the cassette 50 is carried out from the cassette holder 60, the wiring portion on the heater 33a side may be separated from the wiring portion on the controller 70 side via the connector. When the cassette 50 is carried into the cassette holder 60, the wiring portion on the heater 33a side may be electrically connected to the wiring portion on the controller 70 side via the connector.

[0134] In addition, the pair of heaters 33a may be omitted. However, the heat of the peripheral region of the workpiece 100 is more likely to escape to the outside than the heat of the central region of the workpiece 100. Therefore, if the pair of heaters 33a is provided, the peripheral region of the workpiece 100 can be heated, so that the difference between the temperature of the peripheral region of the workpiece 100 and the temperature of the central region of the workpiece 100 can be suppressed from becoming large. That is, the temperature deviation in the surface of the heated workpiece 100 can be suppressed.

[0135] In addition, a cooling unit for cooling the processed workpiece 100 may be provided in the cassette 50. The cooling unit may include, for example, a nozzle for supplying cooling gas to at least one of the front surface and the back surface of the workpiece 100.

[0136] like Figure 1 to Figure 3 As shown, the cassette holder 60 is installed inside the chamber 10. The cassette holder 60 holds the heater 33 and the cassette 50 at predetermined positions inside the chamber 10.

[0137] The cassette holder 60 has a frame 61 , a receiving member 62 and a reflection plate 63 .

[0138] The frame 61 is, for example, a skeleton structure formed by using elongated members. The appearance shape of the frame 61 is not particularly limited. The appearance shape of the frame 61 can be, for example, a rectangular parallelepiped or a cylinder.

[0139] At least one pair of receiving members 62 is provided inside the frame 61. The pair of receiving members 62 supports the cassette support portion 57 of the cassette 50 inside the chamber 10. In the Z direction, the pair of receiving members 62 is provided between the first heating portion 31 and the second heating portion 32. One cassette 50 is placed on the pair of receiving members 62. Therefore, a pair of receiving members 62 is provided for each cassette 50. For example, when fourteen cassettes 50 can be accommodated inside the frame 61, fourteen sets of a pair of receiving members 62 are provided inside the frame 61.

[0140] Each of the pair of receiving members 62 is provided on inner walls of the frame 61 facing each other in the X direction, for example. The pair of receiving members 62 extends in the Y direction. When a plurality of pairs of receiving members 62 are provided, the pair of receiving members 62 may be arranged side by side in the Z direction.

[0141] The reflector 63 reflects the heat incident from the heater 33 side to the cassette 50 side. If the reflector 63 is provided, the heat storage in the inner space (processing space) of the cassette 50 can be improved. The reflector 63 is plate-shaped and is provided on the outer surface of the frame 61. In addition, in order to avoid complexity, Figure 1 and Figure 2 The reflector 63 is not depicted. Figure 3 Only the reflection plate 63 mounted on the side surface of the frame 61 on which the receiving member 62 is mounted is depicted.

[0142] The controller 70 is provided outside the chamber 10. The controller 70 includes, for example, a computing unit such as a central processing unit (CPU) and a storage unit such as a memory. The controller 70 is, for example, a computer. The controller 70 controls the operation of each element provided in the heat treatment device 1 based on, for example, a control program stored in the storage unit.

[0143] For example, the controller 70 performs feedback control on the value of power applied to the heater 33 or 33 a or on / off of power application based on the detection value (temperature of the workpiece 100 ) detected by the detection unit 40 .

[0144] Here, as described above, the heat of the peripheral region of the workpiece 100 escapes to the outside more easily than the heat of the central region of the workpiece 100. Therefore, the region where the plurality of heaters 33 are provided may be divided into a plurality of regions, and the controller 70 controls the heater 33 for each of the plurality of regions.

[0145] For example, the controller 70 may separately control the heater 33 provided in the peripheral region of the workpiece 100 and the heater 33 provided in the central region of the workpiece 100. In this way, the temperature variation within the surface of the workpiece 100 can be further reduced.

[0146] Next, the arrangement, shape, etc. of the detection unit 40 provided inside the cassette 50 will be further described.

[0147] Figure 5 It is a schematic side view for illustrating the detection unit 40 provided inside the cassette 50 .

[0148] Figure 6 Observed from the BB line Figure 5 Schematic diagram of the detection unit 40 in FIG.

[0149] In addition, Figure 6 In order to avoid complexity, the lower heat sink 53 and the workpiece 100 are omitted.

[0150] like Figure 5 and Figure 6 As shown, for example, the detection unit 40 may be disposed on a plate 56a provided with a workpiece support 56. The plate 56a may be fixed to the cassette frame 51 using, for example, a fastening member such as a screw. The plate 56a may be formed using, for example, a metal such as stainless steel. The plate 56a includes, for example: a plate body 56a1, which is a portion extending in the direction (X direction) in which the heater 33 extends; and a plurality of extensions 56a2, which extend in a direction (Y direction) intersecting the direction in which the heater 33 extends. The plurality of extensions 56a2 are separated from each other. The workpiece support 56 or the detection unit 40 may be disposed on each of the plurality of extensions 56a2.

[0151] In addition, the plate 56a is provided for the following reasons. That is, the workpiece support portion 56 needs to be arranged in a matrix at intervals that can suppress the bending of the relatively thin workpiece 100. However, if the cassette frame 51 is to be formed according to the intervals, the number of beams of the cassette frame 51 will increase to more than the required number. Since the cassette frame 51 requires a certain degree of rigidity, the cross-sectional area of ​​the beam is relatively large, and the effect of shielding the heat from the heater 33 is large. Therefore, if there are many beams, the portion shielding the heat of the heater 33 becomes more, and there is a risk that the uniform heating of the workpiece 100 is hindered. Therefore, the number of beams of the cassette frame 51 is suppressed to the minimum required, and the setting portion of the workpiece support portion 56 is ensured by the plate 56a having a smaller cross-sectional area than the beams of the cassette frame 51.

[0152] In addition, Figure 6 In the example, two extensions 56a2 provided with the workpiece support 56 and one extension 56a2 provided with the detection unit 40 are shown, but the number or arrangement of the extensions 56a2 can be changed as appropriate. That is, a plurality of detection units 40 can be provided on one plate 56a. In addition, a plate provided with only the workpiece support 56 and a plate provided with the detection unit 40 can be provided separately. In addition, a plurality of detection units 40 can be provided in one cassette 50.

[0153] In addition, as described above, the cassette 50 may be omitted. When the cassette 50 is omitted, for example, the plate 56a may be attached to a horizontal rail or the like provided inside the chamber 10.

[0154] That is, the plate 56 a only needs to be provided inside the chamber 10 .

[0155] like Figure 5 As shown, the detection portion 40 is linear and has a shape with a curved front end. For example, the detection portion 40 is provided with: a first portion 40a extending along the surface of the workpiece 100; and a second portion 40b connected to the first portion 40a and extending in a direction (Z direction) intersecting the first portion 40a. In this case, the first portion 40a may be parallel to the surface of the workpiece 100 or may be inclined relative to the surface of the workpiece 100.

[0156] Here, the thermocouple is a member that connects two ends of two thermocouple bare wires and detects temperature using thermoelectromotive force generated by the temperature difference between the two ends. In this case, one of the joint portions of the two thermocouple bare wires is located near the front end of the sheath of the thermocouple.

[0157] Therefore, if the detection portion 40 has the first portion 40a extending along the surface of the workpiece 100, the radiant heat from the workpiece 100 is easily incident on the bonding portion of the thermocouple bare wire and a wide area in the vicinity thereof. In this case, for example, the amount of incident radiant heat can be greatly increased compared to the case where the first portion 40a of the detection portion 40 extends in a direction perpendicular to the surface of the workpiece 100. As a result, the detection accuracy of the temperature of the workpiece 100 can be improved.

[0158] In addition, it is difficult to correctly grasp the joint portion of the bare thermocouple wire, and there are individual differences in the position. In the above aspect, when the first portion 40a of the detection unit 40 is set to extend parallel to the surface of the workpiece 100, the temperature of the workpiece 100 can be correctly measured regardless of where the joint portion is located in the first portion 40a, compared with the case where it is set at an angle. In addition, in the heating treatment device 1, a plurality of cassettes 50 are set in the cassette holder 60, and a plurality of detection units 40 are set in these plurality of cassettes 50. As described above, there are individual differences in the position of the joint portion of the bare thermocouple wire in the detection unit 40, so in order to detect the temperature of the workpiece 100 under the same conditions in any of the plurality of detection units 40, it is ideal to set the first portion 40a to extend parallel to the surface of the workpiece 100.

[0159] Furthermore, if the workpiece 100 is heated, the workpiece 100 may bend. If the first portion 40a of the detection portion 40 extends in a direction perpendicular to the surface of the workpiece 100, when the workpiece 100 is bent and the front end of the first portion 40a of the detection portion 40 contacts the surface of the workpiece 100, there is a risk that the surface of the workpiece 100 may be damaged. In this case, if the first portion 40a of the detection portion 40 extends along the surface of the workpiece 100, even if the first portion 40a of the detection portion 40 contacts the surface of the workpiece 100, it is line contact rather than point contact, so that damage to the surface of the workpiece 100 can be suppressed. In addition, since the first portion 40a of the detection portion 40 extends along the surface of the workpiece 100, even if it contacts the surface of the workpiece 100, the front end of the first portion 40a is easily bent in the vertical direction due to contact with the workpiece 100, so that damage to the surface of the workpiece 100 can be suppressed.

[0160] In addition, if the plate 56a is present between the workpiece 100 and the heater 33, the radiant heat from the heater 33 is blocked by the plate 56a. Therefore, it is estimated that the temperature of the region of the workpiece 100 overlapping with the plate 56a is lower than the temperature of the region of the workpiece 100 not overlapping with the plate 56a when viewed from the Z direction. Therefore, if at least the front end side of the first portion 40a of the detection unit 40 overlaps with the plate 56a when viewed from the Z direction, there is a possibility that the correct temperature of the workpiece 100 cannot be detected.

[0161] Therefore, in the detection unit 40 of the present embodiment, as Figure 6 As shown, at least the front end side of the first portion 40a of the detection unit 40 does not overlap with the plate 56a when viewed from the Z direction. However, if the distance L1 (mm) from the front end of the first portion 40a of the detection unit 40 becomes too long, there is a risk that the rigidity of the first portion 40a becomes too small. Therefore, the distance L1 (mm) is preferably set to 100 mm or less, for example.

[0162] In addition, the radiant heat from the heater 33 is blocked by the beam of the cassette frame 51. Therefore, it is preferable that at least the front end side of the first portion 40a of the detection unit 40 does not overlap with the beam provided on the cassette frame 51 when viewed from the Z direction. In this way, the correct temperature of the workpiece 100 can be detected.

[0163] In addition, if Figure 6 As shown, when viewed from the Z direction, at least the front end side of the first portion 40a of the detection unit 40 may overlap with the heater 33 or may not overlap with the heater 33. Figure 5 As shown, a lower heat spreader 53 is provided between the heater 33 and the first portion 40a of the detection portion 40. As described above, the heat radiated from the heater 33 and incident on the lower heat spreader 53 is radiated toward the first portion 40a of the detection portion 40 and the workpiece 100 while propagating in the surface direction inside the lower heat spreader 53. Therefore, the positional relationship between the first portion 40a of the detection portion 40 and the heater 33 when viewed from the Z direction can be set arbitrarily. However, the temperature of the area of ​​the surface of the workpiece 100 that overlaps with the heater 33 when viewed from the Z direction varies less than the temperature of the area of ​​the surface of the workpiece 100 that does not overlap with the heater 33. Therefore, if at least the front end side of the first portion 40a overlaps with the heater 33 when viewed from the Z direction, the variation of the detection value can be suppressed.

[0164] In addition, if Figure 5 As shown, the detection part 40 can be mounted on the plate 56a via the fixture 42. The fixture 42 can have, for example, a hole that penetrates in the Z direction. Moreover, the fixture 42 can hold the second part 40b of the detection part 40 that is inserted into the hole and extends in the Z direction. In this way, the posture of the detection part 40 and the position of the first part 40a of the detection part 40 can be stabilized. Therefore, the detection accuracy of the temperature of the workpiece 100 can be further improved.

[0165] However, if Figure 5As shown, if the distance L2 (mm) between the end of the fixture 42 on the workpiece 100 side and the first part 40a of the detection part 40, that is, the size of the part of the second part 40b of the detection part 40 exposed from the fixture 42 becomes too short, the heat radiated from the fixture 42 is easily incident on the first part 40a of the detection part 40. Therefore, there is a risk that the correct temperature of the workpiece 100 cannot be detected. Therefore, the distance L2 (mm) is preferably set to less than 100 mm, for example. In addition, if the distance L2 is too long, the posture of the first part 40a becomes unstable and easily bends. Therefore, it is preferably set to "distance L1 (mm) ≧ distance L2 (mm)". If so, the detection accuracy of the temperature of the workpiece 100 can be further improved.

[0166] Figure 7 This is a schematic side view for illustrating a detection unit 40 according to another embodiment.

[0167] exist Figure 5 The first portion 40a of the detection unit 40 illustrated in FIG. 1 is provided on the back side of the workpiece 100. Figure 7 The first portion 40 a of the detection unit 40 illustrated in FIG. 4 is provided on the surface side of the workpiece 100 .

[0168] In this case, the detection unit 40 may be provided on the plate 560. The plate 560 may be provided in the same manner as the plate 56a. However, the workpiece support portion 56 is not provided on the plate 560. The plate 560 may be provided, for example, on a beam provided in the cassette frame 51 or on the upper soaking plate 52. In addition, the plate 560 may also be provided on a beam or a bracket provided outside the cassette 50. In the case where the plate 560 is provided outside the cassette 50, it is sufficient to provide a hole penetrating in the thickness direction in the upper soaking plate 52 and to provide the first portion 40a of the detection unit 40 inside the cassette 50 via the hole of the upper soaking plate 52.

[0169] In this way, the temperature of the surface of the workpiece 100 to be subjected to the heat treatment (the upper surface on which the solution is applied) can be detected, so that the quality of the film formed on the surface of the workpiece 100 or the treated portion can be easily improved.

[0170] In addition, the first portion 40a of the detection unit 40 may be provided on the front side and the back side of the workpiece 100. That is, the first portion 40a of the detection unit 40 may be provided on at least one of the front side and the back side of the workpiece 100.

[0171] Although the embodiments have been described above by way of example, the present invention is not limited to these descriptions.

[0172] Embodiments obtained by appropriately adding design changes to the above-described embodiments by those skilled in the art are also included in the scope of the present invention as long as they have the characteristics of the present invention.

[0173] For example, the shape, size, arrangement, etc. of each member included in the heat treatment apparatus 1 are not limited to the examples, and can be changed as appropriate.

[0174] In addition, the elements included in the above-described embodiments can be combined as much as possible, and embodiments obtained by combining these elements are also included in the scope of the present invention as long as they include the characteristics of the present invention.

Claims

1. A heating treatment device, comprising: A chamber that accommodates the workpiece and is capable of maintaining a gas environment that is decompressed to a pressure lower than atmospheric pressure; an exhaust unit for exhausting the interior of the chamber; a heater disposed inside the chamber; and A detection unit is disposed inside the chamber and detects the temperature of the workpiece. The detection portion is linear and has: a first portion close to the surface of the workpiece and extending along the surface of the workpiece; and a second part connected to the first part and extending in a direction intersecting the first part, wherein a temperature measuring point is arranged at a front end side of the first part.

2. The heating treatment device according to claim 1, further comprising: A plate is disposed inside the chamber and is provided with the detection unit, When viewed from a direction perpendicular to the surface of the workpiece, at least a front end side of the first portion does not overlap with the plate.

3. The heating treatment device according to claim 1 or 2, further comprising: A box is disposed inside the chamber and is used to receive the workpiece. The cassette box has a cassette box frame as a skeleton structure or a frame body and a heat spreader plate arranged on the outer surface of the cassette box frame. The first portion is disposed inside the cassette frame, When viewed from a direction perpendicular to the surface of the workpiece, at least a front end side of the first portion does not overlap with a beam provided on the cassette frame.

4. The heat treatment device according to claim 1 or 2, wherein: When viewed from a direction perpendicular to the surface of the workpiece, at least a front end side of the first portion overlaps with the heater.

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