Vacuum panel sheet conveying mechanism and sheet conveying method

Abstract

The application provides a vacuum panel conveying mechanism and a conveying method, and belongs to the technical field of semiconductor production. The vacuum panel conveying mechanism comprises a support part, a fork assembly arranged on the support part, a first connecting part arranged on the fork assembly, a translation driving assembly arranged on the support part and configured to drive the fork assembly to move in a first direction, and a second connecting part arranged on the translation driving assembly. The first connecting part and the second connecting part are configured to be connected in the first direction and to be slidably matched in a vertical direction. The vacuum panel conveying mechanism can improve the support strength by using the support part, so as to meet the application conditions of a large-size and heavy panel. The lifting and translation of the fork assembly are not interfered with each other by combining the first connecting part and the second connecting part, so that the shortcomings of the traditional structure can be effectively solved, and the conveying of the large-size and heavy panel can be met.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor production, and particularly relates to a vacuum panel wafer conveying mechanism and a wafer conveying method. BACKGROUND

[0002] In the semiconductor industry, the requirement for equipment automation is increasingly high. In order to meet the automatic wafer conveying, wafer feeding and wafer discharging, a vacuum manipulator is used in the related prior art for wafer conveying. However, the structure of the vacuum manipulator is mainly used for conveying small-size wafers, and is not suitable for conveying large-size wafers with large weight. SUMMARY

[0003] The application aims to at least solve one of the above technical problems in the prior art. To this end, in a first aspect, the application provides a vacuum panel wafer conveying mechanism, which can solve the problem of conveying large-size wafers with large weight.

[0004] In a second aspect, the application provides a wafer conveying method using the above-mentioned vacuum panel wafer conveying mechanism.

[0005] According to the vacuum panel wafer conveying mechanism of the first aspect of the application, the following is provided.

[0006] The support part is arranged to be lifted and lowered.

[0007] The fork assembly is arranged to be movable in the first direction on the upper end of the support part, and the fork assembly is provided with a first connecting part.

[0008] The translation driving assembly is connected to the fork assembly and is used to drive the fork assembly to move in the first direction, and the translation driving assembly is provided with a second connecting part.

[0009] The first connecting part and the second connecting part are configured to be connected in the first direction and to be slidingly fitted in the vertical direction, so that the fork assembly slides up and down relative to the translation driving assembly when the support part is adjusted to be lifted and lowered.

[0010] The vacuum panel wafer conveying mechanism according to the application has at least the following beneficial effects.

[0011] The vacuum panel wafer conveying mechanism in the application can be lifted and moved by adjusting the lifting of the support part, and can be adjusted to move in the first direction by adjusting the translation driving assembly. The wafer feeding and wafer discharging of the panel can be performed by lifting and moving.

[0012] The vacuum panel conveying mechanism in the application, the fork assembly is installed on the support part, the support part can be used to improve the support strength, so as to meet the application of large size and heavy weight panel, and the cooperation of the first connecting part and the second connecting part, the lifting and translation of the fork assembly do not interfere with each other, so as to effectively solve the shortage of the traditional structure, and meet the conveying needs of the panel with large size and heavy weight.

[0013] According to some embodiments of the application, at least one of the first connecting part and the second connecting part is provided with a clamping block extending in the vertical direction, and the other is provided with a roller rotating on both sides of the clamping block in the first direction, and the roller abuts against the clamping block.

[0014] According to some embodiments of the application, the clamping block is arranged on the second connecting part, and the first connecting part is provided with two mounting arms located on both sides of the clamping block and extending to both ends of the clamping block in the first direction, and the mounting arms are provided with the rollers on both sides of the clamping block relative to the first direction.

[0015] According to some embodiments of the application, the upper end of the support part is provided with a sliding rail in the first direction, and the fork assembly is slidingly installed on the sliding rail.

[0016] According to some embodiments of the application, the translation driving assembly comprises:

[0017] A translation driving screw, the axial direction of the translation driving screw is arranged in the first direction;

[0018] A translation guide part, the translation guide part is arranged in the first direction and distributed on both sides of the translation driving screw;

[0019] A translation driving part, the translation driving part is drivingly connected to the translation driving screw for driving the translation driving screw to rotate;

[0020] The second connecting part is arranged on the translation guide part and the translation driving screw, and is threadedly connected to the translation driving screw.

[0021] According to some embodiments of the application, the translation driving screw, the translation guide part, the second connecting part and the fork assembly are arranged in the vacuum chamber, and the translation driving part is arranged outside the vacuum chamber, and the translation driving part and the translation driving screw are connected by a magnetic fluid seal.

[0022] According to some embodiments of the application, the vacuum panel conveying mechanism further comprises a lifting driving assembly, and the lifting driving assembly comprises:

[0023] A lifting driving screw vertically arranged;

[0024] A lifting guide vertically arranged and distributed on at least two opposite sides of the supporting part;

[0025] A lifting driving part drivingly connected to the lifting driving screw for driving the lifting driving screw to rotate;

[0026] The supporting part is threaded on the lifting driving screw and the lifting guide.

[0027] According to some embodiments of the present application, the lifting driving screw, the lifting driving part and the supporting part are arranged in the vacuum chamber, the lifting driving part is arranged outside the vacuum chamber, and the lifting driving part and the lifting driving screw are connected by a magnetic fluid seal.

[0028] According to some embodiments of the present application, the shifting fork assembly comprises:

[0029] A first film taking finger extending in the first direction, and an end of the first film taking finger is provided with a first limiting block;

[0030] A second film taking finger arranged on at least one side of the first film taking finger, the second film taking finger extending in a second direction, the second direction being horizontally perpendicular to the first direction, and an end of the second film taking finger is provided with a second limiting block;

[0031] The first film taking finger and the second film taking finger together define a film taking area suitable for supporting a panel.

[0032] According to the vacuum panel film transferring method of the second aspect of the present application, the vacuum panel film transferring mechanism of any of the above embodiments is applied, and the method comprises the following steps:

[0033] The shifting fork assembly is installed in the film in-out chamber;

[0034] First, the supporting part is controlled to rise, the shifting fork assembly is lifted, and the shifting fork assembly is moved to a retracted state in the first direction by the translation driving assembly, then a panel is placed on the shifting fork assembly, and then the shifting fork assembly is moved to an extended state in the first direction by the translation driving assembly, so that the panel is moved from the film in-out chamber to above the substrate table of the process chamber, the supporting part is controlled to descend, the shifting fork assembly is lowered, the panel is placed on the substrate table and separated from the panel, and then the shifting fork assembly is moved to the retracted state in the first direction by the translation driving assembly and exits the process chamber;

[0035] After the process is completed, the shifting driving assembly moves the shifting fork assembly to the extended state along the first direction, and then the support part is controlled to rise, lifting the shifting fork assembly, so as to take the panel away from the substrate table. After that, the shifting driving assembly moves the shifting fork assembly to the retracted state along the first direction, and the taking out of the panel is completed.

[0036] According to the vacuum panel conveying method, at least the following beneficial effects are achieved:

[0037] The vacuum panel conveying method provided in the application sets the shifting fork assembly in the in-out chamber, and automatically conveys the panel to the process chamber by controlling the lifting and shifting of the shifting fork assembly. Since the shifting fork assembly is slidingly arranged on the support part, the support strength of the shifting fork assembly is effectively improved, so that the shortcomings of the traditional structure are effectively solved, and the conveying of the panel with large size and large weight is met.

[0038] Additional aspects and advantages of the application will be described in part below, some of which will become apparent from the following description, or will be learned by practicing the application. BRIEF DESCRIPTION OF DRAWINGS

[0039] The application will be further described below in combination with the drawings and embodiments, in which:

[0040] Figure 1 It is an application structure schematic view of the vacuum panel conveying mechanism in the application;

[0041] Figure 2 It is a structure sectional view of the shifting driving assembly in the application;

[0042] Figure 3 It is a structure sectional view of the lifting driving assembly in the application;

[0043] Figure 4 It is an overall structure schematic view of the vacuum panel conveying mechanism in the application;

[0044] Figure 5 It is a structure schematic view of the shifting driving assembly in the application;

[0045] Figure 6 It is an installation schematic view of the shifting fork assembly and the support part in the application;

[0046] Figure 7 It is a structure schematic view of the shifting fork assembly in the application;

[0047] Figure 8 It is a state schematic view of the vacuum panel conveying mechanism supporting the panel in the application. DETAILED DESCRIPTION

[0048] Embodiments of the present application are described below in detail with reference to the accompanying drawings, wherein the same or similar components or components having the same or similar functions are denoted by the same or similar reference numerals throughout the drawings. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application and cannot be understood as a limitation on the present application.

[0049] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, which is only for the purpose of describing the present application and simplifying the description, and does not indicate or imply that the device or component referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0050] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If it is described as first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of indicated technical features.

[0051] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0052] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0053] Referring to Figures 1 to 8 The embodiment of the present application proposes a vacuum panel sheet conveying mechanism, which comprises a support part 200, a fork assembly 100 and a translation driving assembly 300. Specifically, the support part 200 is arranged to be liftable. The fork assembly 100 is arranged at the upper end of the support part 200 and can be moved and adjusted in the first direction, so that based on the lifting of the support part 200, the lifting and translation in the first direction can be simultaneously performed. The translation driving assembly 300 is connected to the fork assembly 100 and is used to drive the fork assembly 100 to move in the first direction.

[0054] Further, the fork assembly 100 is provided with a first connecting portion 101, the translation driving assembly 300 is provided with a second connecting portion 301, the first connecting portion 101 and the second connecting portion 301 are configured as a structure of clamping along the first direction and sliding along the vertical direction, so that the fork assembly 100 slides up and down relative to the translation driving assembly 300 in the case of lifting adjustment of the support portion 200.

[0055] With the structure of the embodiment, the fork assembly 100 can be lifted and moved by lifting adjustment of the support portion 200, and can be moved along the first direction by adjustment of the translation driving assembly 300, and the panel can be fed and taken by lifting and moving.

[0056] In actual application, the mechanism of the embodiment can be arranged in an in-out piece chamber connected with a process chamber. Since the fork assembly 100 is installed on the support portion 200, the support strength can be improved by the support portion 200, so as to meet the application condition of large size and heavy weight of the panel, and the lifting and translation of the fork assembly 100 are not interfered with each other by the cooperation of the first connecting portion 101 and the second connecting portion 301, so the deficiency of the traditional structure can be effectively solved, and the feeding of the panel with large size and heavy weight can be met.

[0057] Referring to Figure 1 In some embodiments of the present application, at least one of the first connecting portion 101 and the second connecting portion 301 is provided with a clamping block 3011 extending along the vertical direction, and the other is provided with a roller 1011 rotating along the first direction on both sides of the clamping block 3011, and the roller 1011 abuts against the clamping block 3011.

[0058] In the embodiment, the clamping is performed by arranging the roller 1011 on both sides of the clamping block 3011 along the first direction, so that the first connecting portion 101 and the second connecting portion 301 can smoothly lift and move during lifting of the support portion 200, and the translation along the first direction and the lifting along the vertical direction are considered.

[0059] Referring to Figure 1In some embodiments of the present application, the clamping block 3011 is arranged on the second connecting portion 301. The first connecting portion 101 is provided with two mounting arms 1013, which are arranged on both sides of the clamping block 3011 and extend to both ends of the clamping block 3011 along the first direction. The mounting arm 1013 is provided with a roller 1011 on both sides of the clamping block 3011 relative to the first direction. In combination with the drawings, the first direction is defined as the front-back direction, and the left-right direction is horizontally perpendicular to the first direction. Along the front-back direction, the clamping block 3011 includes a front side wall and a rear side wall. The two mounting arms 1013 extend from the left and right sides of the clamping block 3011 to the front and rear sides of the clamping block 3011. Each clamping block 3011 is provided with a roller 1011 abutting against the front side wall and a roller 1011 abutting against the rear side wall.

[0060] With the structure of the present embodiment, the rollers 1011 are arranged by the two mounting arms 1013 to clamp the clamping block 3011, which can effectively improve the clamping strength between the first connecting portion 101 and the second connecting portion 301, and can meet the requirements of transferring panels with large size and heavy weight. Moreover, each mounting arm 1013 is provided with a roller 1011 abutting against the front side wall and a roller 1011 abutting against the rear side wall of the clamping block 3011, which can effectively avoid the generation of gaps in the process of long-term dragging the first connecting portion 101 to move, and is beneficial to improve the translation accuracy.

[0061] Referring to Figure 4 In some embodiments of the present application, the upper end of the support portion 200 is provided with a slide rail 201 along the first direction, and the fork assembly 100 is slidingly installed on the slide rail 201. Thus, the fork assembly 100 is supported by the slide rail 201.

[0062] Specifically, the left and right sides of the support portion 200 are respectively provided with a slide rail 201. The slide rail 201 extends along the first direction. The bottom of the first connecting portion 101 extends downward to be provided with two support legs 1012, and the bottoms of the two support legs 1012 are slidingly assembled on the slide rail 201. The support leg 1012 and the slide rail 201 are connected in an assembly relationship, so that they can only slide along the first direction and cannot swing, which can effectively ensure the stability of the fork assembly 100.

[0063] Referring to Figures 1 to 5In some embodiments of the present application, the translation driving assembly 300 comprises a translation driving screw 302, a translation guiding part 303 and a translation driving part 304. The translation driving screw 302 is arranged in the first direction along its axial direction and is capable of rotating around its own axial center. The translation guiding part 303 is arranged in the first direction and is distributed on both sides of the translation driving screw 302. The translation driving part 304 is drivingly connected to the translation driving screw 302 for driving the translation driving screw 302 to rotate. The second connecting part 301 is threaded through the translation guiding part 303 and the translation driving screw 302 and is screwed to the translation driving screw 302. With the structure of the present embodiment, the second connecting part 301 is supported and guided by the translation guiding part 303 and is moved in the first direction by the rotation of the translation driving screw 302, so that the stability of the translation can be effectively ensured.

[0064] The translation guiding part 303 in the present embodiment can be a guide rod, a guide rail or other structural forms.

[0065] Referring to Figure 1 and Figure 2 In some embodiments of the present application, the translation driving screw 302, the translation guiding part 303, the second connecting part 301 and the shift fork assembly 100 are arranged in the vacuum chamber, the translation driving part 304 is arranged outside the vacuum chamber, and the translation driving part 304 is connected to the translation driving screw 302 by a magnetic fluid seal.

[0066] With the structure of the present embodiment, the translation driving part 304 is arranged outside the vacuum chamber to drive the translation driving screw 302 to rotate, so that the shift fork assembly 100 can be located entirely in the vacuum chamber. During the feeding and discharging of the panel, the vacuum chamber can maintain a matching vacuum environment with the process chamber, without worrying about the influence of the external environment on the panel, and at the same time, it is beneficial to promote the improvement of production efficiency.

[0067] Referring to Figures 2 to 4 , Figure 6 In some embodiments of the present application, the vacuum panel conveying mechanism further comprises a lifting driving assembly 400, and the lifting driving assembly 400 comprises a lifting driving screw 401, a lifting guiding part 403 and a lifting driving part 402. The lifting driving screw 401 is vertically arranged and is capable of rotating around its own axial center. The lifting guiding part 403 is vertically arranged and is distributed on at least opposite sides of the support part 200. The lifting driving part 402 is drivingly connected to the lifting driving screw 401 for driving the lifting driving screw 401 to rotate. The support part 200 is threaded through the lifting driving screw 401 and the lifting guiding part 403 and is screwed to the lifting driving screw 401.

[0068] With the structural arrangement of the embodiment, the gravity of the support part 200 is borne by the lifting driving lead screw 401, and since the gravity is difficult to act on the lifting driving lead screw 401 in reverse through the thread, the lifting stability of the support part 200 is ensured, and the lifting adjustment precision is improved. When the support part 200 is in a circular structure, the lifting guide parts 403 are preferably uniformly arranged in the circumferential direction thereof; when the support part 200 is in a rectangular structure, the lifting guide parts 403 are preferably arranged at the four corners of the support part 200, so as to ensure the stability of the lifting guide.

[0069] Similar to the foregoing embodiments, in some embodiments of the present application, the lifting driving lead screw 401, the lifting driving part 402 and the support part 200 are arranged in the vacuum chamber, the lifting driving part 402 is arranged outside the vacuum chamber, and the lifting driving part 402 and the lifting driving lead screw 401 are connected through a magnetic fluid seal.

[0070] In the embodiment, the lifting driving part 402 is arranged outside the vacuum chamber to drive the lifting driving lead screw 401 to rotate, so that the support part 200 as a whole can be located in the vacuum chamber to support the fork assembly 100, which is beneficial to reduce the eccentric load torque of the fork assembly 100 when the panel is placed on the fork assembly 100, and is beneficial to improve the support strength and the transmission precision of the panel feeding and discharging.

[0071] Referring to Figures 6 to 8 In some embodiments of the present application, the fork assembly 100 comprises a first panel taking finger 102 and a second panel taking finger 103. The first panel taking finger 102 extends in a first direction, and both ends of the first panel taking finger 102 are provided with first limiting blocks 1021 in the first direction. The second panel taking finger 103 is arranged on at least one side of the first panel taking finger 102, and extends in a second direction which is horizontally perpendicular to the first direction. The end of the second panel taking finger 103 is provided with a second limiting block 1031 in the second direction. The first panel taking finger 102 and the second panel taking finger 103 are used to jointly support the panel, and the first limiting blocks 1021 and the second limiting blocks 1031 jointly define a panel taking area suitable for supporting the panel at the upper end of the first panel taking finger 102 and the second panel taking finger 103.

[0072] It can be understood that the distance between the two first limiting blocks 1021 matches the size of the panel in the first direction, so that the panel is limited in the first direction when the panel is placed on the first panel taking finger 102 and the second panel taking finger 103. The second limiting block 1031 limits the outer side of the panel in the second direction.

[0073] Referring to Figure 7In some embodiments of the present application, the plurality of first pick fingers 102 are arranged at intervals along the second direction, and at least one second pick finger 103 is arranged on each of the two outermost first pick fingers 102 along the second direction, and the second pick fingers 103 are located on the side away from each other of the two first pick fingers 102. With the structure of the present embodiment, the support stability of the panel can be improved, and at the same time, the substrate table of the process chamber can be matched with the gaps between the first pick fingers 102, so that the substrate table can lift the panel upward from the gaps to realize the separation of the panel and the fork assembly 100. Moreover, the two second pick fingers 103 on the two sides can limit the two sides of the panel along the second direction.

[0074] In some embodiments of the present application, the first pick finger 102 and the second pick finger 103 are arranged as an integrated structure, and are detachably connected with the first connecting part 101, so as to replace the pick finger structure of different shapes and sizes according to the panel transfer needs.

[0075] The driving part in the present application can adopt a motor or other structures, which will not be described in detail here.

[0076] The present application also proposes a vacuum panel transfer method, which applies the vacuum panel transfer mechanism of any of the above embodiments, and includes the following steps:

[0077] First, the support part 200, the fork assembly 100, the other structures of the lifting driving assembly 400 except the lifting driving part 402, and the other structures of the translation driving assembly 300 except the translation driving part 304 are installed to the in-out panel chamber;

[0078] First, the support part 200 is controlled to rise, the fork assembly 100 is lifted, and the fork assembly 100 is moved to the retracted state along the first direction by the translation driving assembly 300, then the panel is placed on the fork assembly 100, and then the fork assembly 100 is moved to the extended state along the first direction by the translation driving assembly 300, so that the panel is moved from the in-out panel chamber to above the substrate table of the process chamber, the support part 200 is controlled to descend, the fork assembly 100 is lowered, the panel is placed on the substrate table and separated from the panel, and then the fork assembly 100 is moved out of the process chamber to the retracted state along the first direction by the translation driving assembly 300;

[0079] After the process is completed, the fork assembly 100 is moved to the extended state along the first direction by the translation driving assembly 300, then the support part 200 is controlled to rise, the fork assembly 100 is lifted, the panel is taken away from the substrate table, and then the fork assembly 100 is moved to the retracted state along the first direction by the translation driving assembly 300, to complete the taking out of the panel.

[0080] The vacuum panel conveying method in the embodiment can realize automatic conveying of the panel to the process chamber by controlling the lifting and translation of the fork assembly 100. Since the fork assembly 100 is slidably arranged on the support portion 200, the support strength of the fork assembly 100 can be effectively improved, thereby effectively solving the deficiency of the conventional structure and meeting the conveying requirement of the panel with large size and large weight.

[0081] The above describes the embodiments of the application in detail in combination with the drawings, but the application is not limited to the above embodiments, and various changes can be made within the knowledge range of the ordinary skill in the art without departing from the purpose of the application. In addition, the embodiments of the application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A vacuum panel sheet transfer mechanism, characterized by, Comprise: Support part, the support part is arranged liftingly; Shifting fork assembly, the shifting fork assembly is movably arranged on the upper end of the support part along the first direction, the shifting fork assembly is provided with a first connecting part; Translation driving assembly, the translation driving assembly is connected to the shifting fork assembly, used for driving the shifting fork assembly to move along the first direction, the translation driving assembly is provided with a second connecting part; Wherein, the first connecting part and the second connecting part are configured as the structure of clamping along the first direction, sliding fit along the vertical direction, so that in the case of lifting adjustment of the support part, the shifting fork assembly slides up and down relative to the translation driving assembly; At least one of the first connecting part and the second connecting part is provided with a clamping block, the clamping block extends along the vertical direction, and the other is provided with a roller on both sides of the clamping block at least along the first direction, and the roller abuts against the clamping block; The vacuum panel transmission mechanism further comprises a lifting driving assembly, the lifting driving assembly comprises: Lifting driving screw rod, the lifting driving screw rod is vertically arranged; Lifting guide part, the lifting guide part is vertically arranged and is distributed on at least two opposite sides of the support part; Lifting driving part, the lifting driving part is drivingly connected to the lifting driving screw rod, used for driving the lifting driving screw rod to rotate; The support part is threaded on the lifting driving screw rod and the lifting guide part.

2. The vacuum panel transfer mechanism of claim 1, wherein, The clamping block is arranged on the second connecting part, the first connecting part is provided with two mounting arms, and the two mounting arms are located on both sides of the clamping block and extend to both ends of the clamping block along the first direction, and the mounting arms are provided with the rollers on both sides of the clamping block relative to the first direction.

3. The vacuum panel transfer mechanism of claim 1, wherein, The upper end of the support part is provided with a sliding rail along the first direction, and the shifting fork assembly is slidingly installed on the sliding rail.

4. The vacuum panel break mechanism of claim 1, wherein, The translation driving assembly comprises: Translation driving screw rod, the axial direction of the translation driving screw rod is arranged along the first direction; Translation guide part, the translation guide part is arranged along the first direction and is distributed on both sides of the translation driving screw rod; Translation driving part, the translation driving part is drivingly connected to the translation driving screw rod, used for driving the translation driving screw rod to rotate; The second connecting part is threaded on the translation guide part and the translation driving screw rod, and is threaded on the translation driving screw rod.

5. The vacuum panel transfer mechanism of claim 4, wherein, The translation driving screw rod, the translation guide part, the second connecting part and the shifting fork assembly are arranged in the vacuum chamber, the translation driving part is arranged outside the vacuum chamber, and the translation driving part and the translation driving screw rod are connected by magnetic fluid sealing.

6. The vacuum panel break mechanism of claim 1, wherein, The lifting driving screw rod, the lifting driving part and the support part are arranged in the vacuum chamber, the lifting driving part is arranged outside the vacuum chamber, and the lifting driving part and the lifting driving screw rod are connected by magnetic fluid sealing.

7. The vacuum panel break mechanism of claim 1, wherein, The shifting fork assembly comprises: First film taking finger, the first film taking finger extends along the first direction, and the end of the first film taking finger is provided with a first limiting block; A second sheet taking finger is arranged at least one side of the first sheet taking finger, the second sheet taking finger extends along a second direction, the second direction is horizontally perpendicular to the first direction, an end of the second sheet taking finger is arranged with a second limiting block; The first sheet taking finger and the second sheet taking finger together define a sheet taking area suitable for holding a panel.

8. A method of vacuum panel sheet transfer, characterized by, The vacuum panel sheet transferring mechanism of claim 1 comprises the following steps: Mounting the fork assembly in the sheet in-out chamber; Firstly, control the support part to rise, lift the fork assembly, and move the fork assembly to the retracted state along the first direction through the translation driving assembly, then place the panel on the fork assembly, and then move the fork assembly to the extended state along the first direction through the translation driving assembly, so that the panel is moved from the sheet in-out chamber to above the substrate table of the process chamber, control the support part to descend, so that the fork assembly is lowered, the panel is placed on the substrate table and separated from the panel, and then the fork assembly is moved out of the process chamber to the retracted state along the first direction through the translation driving assembly; After the process is completed, the fork assembly is moved to the extended state along the first direction through the translation driving assembly, then the support part is controlled to rise, the fork assembly is lifted, the panel is taken away from the substrate table, and then the fork assembly is moved to the retracted state along the first direction through the translation driving assembly, and the panel is taken out.

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