Control device for silicon oxide film production

Abstract

The invention discloses a control device for silicon oxide film production, and relates to the technical field of silicon oxide film production, the control device for silicon oxide film production comprises a control cabinet, supporting legs are fixedly installed at the bottom of the control cabinet, a power connector is fixedly installed on the outer wall of the control cabinet, a power line is inserted into the power connector, and the power line is connected with the control cabinet. According to the control device for silicon oxide film production, when the power line is pulled, the power line can be straightly pushed out of the power connector through sliding fit of the top disc and the top rod, and the power line can be directly pushed out of the power connector through sliding fit of the top disc and the top rod; therefore, the power line and the power connector can be disconnected when the power line is pulled, damage to the connecting position of the power line and the power connector caused by pulling force is avoided, meanwhile, the pulling force of the power line can be prevented from being transmitted to the control cabinet, and then the stability of the control cabinet can be kept.

Description

Technical Field

[0001] The invention relates to the technical field of silicon oxide film production, and in particular to a control device for silicon oxide film production. Background Art

[0002] Silicon oxide film is one of the essential materials in the semiconductor production process. It is also used as isolation layer, passivation layer, etc. in integrated circuits to protect the chip from the influence of the external environment and improve the reliability and stability of the chip.

[0003] At present, silicon oxide thin film production lines are equipped with control cabinets to centrally control production equipment. Before the control cabinet is put into use, it needs to be connected to the power supply to adjust the control program. The power cord of the control cabinet is often directly inserted into the power port of the control cabinet. The common control cabinet power cords on the market are usually plugged in and out directly. If there is a deviation in the unplugging angle, the power cord cannot be unplugged smoothly.

[0004] Common control cabinets on the market usually lack devices to protect power cords. After the power cord is connected to the control cabinet, it is often laid directly on the ground. If the power cord is accidentally pulled by the staff or the equipment during movement, the connection between the power cord and the connector will be subjected to a large tensile force, which will not only damage the power cord and the connector, but may even cause the control cabinet to move, which may easily affect the circuits and equipment inside the control. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a control device for producing silicon oxide thin films, which solves the problems raised in the above-mentioned background technology.

[0006] To achieve the above purpose, the present invention is implemented through the following technical solutions: A control device for silicon oxide film production, including a control cabinet, a support foot is fixedly installed on the bottom of the control cabinet, a power connector is fixedly installed on the outer wall of the control cabinet, a power cord is plugged into the inside of the power connector, a protective mechanism for protecting the power cord is provided on the control cabinet, a positioning mechanism is provided on the control cabinet, and a cleaning mechanism is provided on the control cabinet; wherein the protective mechanism includes a top plate, a top rod, a reset spring, a card block, a card slot, a connecting rod, a slider, a boss, a buffer rod, a torsion spring, an arc plate, a hinged rod, a plug rod, a limit block, a baffle and an auxiliary spring, the top plate is slidably connected to the outer wall of the power connector, a top rod is fixedly installed on one end of the top plate, a reset spring is fixedly installed on the other end of the top plate, and an end of the reset spring away from the top plate is fixedly installed on the outer wall of the control cabinet, the top plate can be pushed by the elasticity of the reset spring, so that the top plate slides and resets on the outer wall of the power connector, one end of the card block is slidably connected to the inner wall of the control cabinet, and the other end of the card block is provided with a The outer wall of the top plate is fitted on the inner wall of the slot, the outer wall of the block is hinged with a connecting rod, the end of the connecting rod away from the block is hinged with a slider, the slider is slidably connected to the inner wall of the control cabinet, and the slider pushes the connecting rod while sliding on the inner wall of the control cabinet, so that the connecting rod pushes the block, one end of the boss is fixedly installed on the outer wall of the control cabinet, the other end of the boss is hinged with a buffer rod, a torsion spring is arranged at the hinge of the buffer rod and the boss, and an arc plate is fixedly installed on one end of the buffer rod. When the source connector is pulled after docking, the power cord will squeeze the arc plate, and the other end of the buffer rod is hinged with a hinged rod, and the end of the hinged rod away from the buffer rod is hinged at the top of the slider, the inner wall of the top plate is slidably connected with a plug rod, and the plug rod passes through the top plate, one end of the plug rod is fixedly installed with a limit block, the other end of the plug rod is fixedly installed with a baffle, the outer wall of the plug rod is sleeved with an auxiliary spring, one end of the auxiliary spring is fixedly installed on the outer wall of the limit block, and the other end of the auxiliary spring is fixedly installed on the outer wall of the top plate.

[0007] According to the above technical scheme, the positioning mechanism includes a slide plate, a positioning rod, a suction cup, a limit plate, a positioning spring, a compression box, a hose, a piston plate, a piston rod, a bent rod, a through groove and a push rod. The slide plate is slidably connected to the outer wall of the supporting foot, the inner wall of the slide plate is slidably connected with the positioning rod, and the positioning rod passes through the slide plate, the side wall of the slide plate is fixedly installed with a bent rod, and the bent rod is provided with a through groove. The push rod fits against the inner wall of the through groove and moves, and squeezes the bent rod, so that the bent rod pushes the slide plate, the outer wall of the top plate is fixedly installed with a push rod, and the outer wall of the push rod fits against the inner wall of the through groove. When the top plate slides on the outer wall of the power connector, it drives the push rod to fit against the inner wall of the through groove and move.

[0008] According to the above technical solution, a suction cup is fixedly installed on the bottom of the positioning rod, a limiting plate is fixedly installed on the top of the positioning rod, a positioning spring is sleeved on the outer wall of the positioning rod, one end of the positioning spring is fixedly installed on the top of the slide plate, and the other end of the positioning spring is fixedly installed on the outer wall of the limiting plate. During the downward sliding process of the slide plate, the positioning spring and the limiting plate can drive the positioning rod to move downward synchronously.

[0009] According to the above technical solution, a compression box is fixedly installed on the inner wall of the skateboard, and the skateboard will drive the compression box to move downward synchronously when the outer wall of the supporting foot slides downward. A hose is fixedly installed on the outer wall of the compression box, and one end of the hose away from the compression box is fixedly installed on the outer wall of the suction cup. The interior of the compression box is connected with the interior of the suction cup through the hose. The inner wall of the compression box is slidably connected with a piston plate, and a piston rod is fixedly installed on the top of the piston plate. The end of the piston rod away from the piston plate passes through the compression box and is fixedly installed on the bottom of the control cabinet.

[0010] According to the above technical solution, the cleaning mechanism includes a sliding rod, a scraper, a convex plate, a rocker arm, a hollow rod, a connecting rod, a guide rod, a rotating drum, a spiral groove, a rubber rod, a rubber ball, a horizontal rod and a vertical rod. The sliding rod is slidably connected to the inner wall of the supporting foot, and the outer wall of the sliding rod is fixedly installed with a scraper. When the sliding rod slides, it will drive the scraper to move synchronously with the ground of the production workshop. One end of the convex plate is fixedly installed on the outer wall of the control cabinet, and the other end of the convex plate is hinged with a rocker arm.

[0011] According to the above technical solution, a hollow rod is fixedly installed on one end of the rocker arm, and a connecting rod is hinged on the other end of the rocker arm. The end of the connecting rod away from the rocker arm is hinged on the top of the sliding rod. The sliding rod can be driven to slide on the inner wall of the supporting foot by rotating the rocker arm in coordination with the connecting rod. A guide rod is fixedly installed on the side wall of the skateboard, and the end of the guide rod away from the skateboard is attached to the inner wall of the hollow rod. The slide board can be driven to rotate on the outer wall of the convex plate by sliding the guide rod and the hollow rod.

[0012] According to the above technical solution, the rotating drum is rotatably connected to the outer wall of the positioning rod, a spiral groove is opened on the rotating drum, a rubber rod is fixedly installed on the outer wall of the rotating drum, a rubber ball is fixedly installed on the end of the rubber rod away from the rotating drum, the outer wall of the rubber ball is attached to the outer wall of the suction cup, and the rotating drum can rotate and cooperate with the rubber rod to drive the rubber ball to repeatedly hit the suction cup.

[0013] According to the above technical solution, a cross bar is fixedly installed on the side wall of the sliding rod, and a vertical bar is fixedly installed on the outer wall of the cross bar. The outer wall of the vertical bar is in contact with the inner wall of the spiral groove. When the cross bar moves, it will drive the vertical bar to move in contact with the inner wall of the spiral groove. At the same time, the vertical bar will squeeze the spiral groove, thereby causing the rotating drum to rotate on the outer wall of the positioning rod.

[0014] The present invention provides a control device for producing silicon oxide thin films. It has the following beneficial effects:

[0015] 1. The control device for silicon oxide film production can push the power cord straight out of the power connector by sliding the top plate in cooperation with the top rod when the power cord is pulled, so that the power cord and the power connector can be disconnected while the power cord is pulled, thereby avoiding damage to the connection between the power cord and the power connector caused by the pulling force, and also avoiding the pulling force of the power cord from being transmitted to the control cabinet, thereby maintaining the stability of the control cabinet, and driving the baffle to separate from the outer wall of the power connector by sliding the top plate, and driving the baffle to cover the power connector in cooperation with the auxiliary spring, the limit block and the plug rod, and protecting the power connector by the baffle to avoid impurities from invading the interior of the power connector.

[0016] 2. The control device for silicon oxide film production can drive the suction cup to be adsorbed on the floor of the production workshop by sliding the slide board downward in conjunction with the positioning spring, limit plate and positioning rod. The suction cup, positioning rod and slide board can improve the stability of the control cabinet and prevent the power cord from being pulled and causing a large displacement of the control cabinet. The slide board slides downward in conjunction with the piston rod, piston plate, compression box and hose to evacuate the interior of the suction cup, thereby further improving the adsorption effect of the suction cup and further improving the stability of the suction cup.

[0017] 3. The control device for silicon oxide film production can drive the scraper to move on the ground of the production workshop through the sliding of the sliding rod. At this time, the scraper can be used to clean the ground under the suction cup to prevent impurities from remaining on the ground and affecting the adsorption effect of the suction cup. The sliding of the sliding rod cooperates with the horizontal rod, vertical rod, spiral groove, rotating drum, and rubber rod to drive the rubber ball to repeatedly hit the suction cup. The impurities inside the suction cup can be shaken off by the rubber ball hitting the suction cup to prevent impurities from remaining inside the suction cup and causing the adsorption effect of the suction cup to decrease. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the front side of the present invention;

[0019] Figure 2 It is a schematic diagram of the overall structure of the back side of the present invention;

[0020] Figure 3 It is a bottom view structural schematic diagram of the control cabinet of the present invention;

[0021] Figure 4 It is a schematic diagram of the overall structure of the slide plate and the top plate of the present invention;

[0022] Figure 5 It is a schematic diagram of a partial cross-sectional structure of a skateboard of the present invention;

[0023] Figure 6It is a schematic diagram of the exploded structure of the power connector and the power cord of the present invention;

[0024] Figure 7 It is a schematic diagram of the overall structure of the cleaning mechanism of the present invention;

[0025] Figure 8 For the present invention Figure 2 A is an enlarged structural diagram of FIG.

[0026] In the figure: 1. control cabinet; 2. support foot; 3. power connector; 4. power cord; 5. protection mechanism; 51. top plate; 52. top rod; 53. reset spring; 54. clamping block; 55. clamping slot; 56. connecting rod; 57. slider; 58. boss; 59. buffer rod; 510. torsion spring; 511. arc plate; 512. hinged rod; 513. plug rod; 514. limit block; 515. baffle; 516. auxiliary spring; 6. positioning mechanism; 61. slide plate; 62. positioning rod; 63, suction cup; 64, limit plate; 65, positioning spring; 66, compression box; 67, hose; 68, piston plate; 69, piston rod; 610, bent rod; 611, through groove; 612, push rod; 7, cleaning mechanism; 71, slide rod; 72, scraper; 73, convex plate; 74, rocker rod; 75, hollow rod; 76, connecting rod; 77, guide rod; 78, rotating drum; 79, spiral groove; 710, rubber rod; 711, rubber ball; 712, cross bar; 713, vertical rod. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] See also Figure 1-Figure 8An embodiment of the present invention is: a control device for producing silicon oxide thin films, comprising a control cabinet 1, a support foot 2 is fixedly installed at the bottom of the control cabinet 1, a power connector 3 is fixedly installed on the outer wall of the control cabinet 1, a power cord 4 is plugged into the inside of the power connector 3, and a protective mechanism 5 for protecting the power cord 4 is arranged on the control cabinet 1, wherein the protective mechanism 5 comprises a top plate 51, a top rod 52, a reset spring 53, a block 54, a slot 55, a connecting rod 56, a slider 57, a boss 58, a buffer rod 59, a torsion spring 510, an arc plate 511, a hinge rod 512, a plug rod 513, a limit block 514, a baffle 515 and an auxiliary spring 516, a top plate 51 is slidably connected to the outer wall of the power connector 3, one end of the return spring 53 away from the top plate 51 is fixedly installed on the outer wall of the control cabinet 1, one end of the block 54 is slidably connected to the inner wall of the control cabinet 1, and the other end of the block 54 is provided with a slot 55, the outer wall of the top plate 51 is fitted to the inner wall of the slot 55, and the block 54 will gradually move the top plate 51 out of the slot 55 during the upward sliding process. When the top plate 51 is completely moved out of the slot 55, the block 54 will release the limit on the top plate 51, the outer wall of the block 54 is hinged with a connecting rod 56, and the end of the connecting rod 56 away from the block 54 is hinged with a slider 57, the slider 57 is slidably connected to the inner wall of the control cabinet 1, and the slider 57 slides At the same time, it will push the connecting rod 56, so that the connecting rod 56 pushes the block 54, so that the block 54 slides on the inner wall of the control cabinet 1. One end of the boss 58 is fixedly installed on the outer wall of the control cabinet 1. The other end of the boss 58 is hinged with a buffer rod 59. A torsion spring 510 is provided at the hinge between the buffer rod 59 and the boss 58. An arc plate 511 is fixedly installed on one end of the buffer rod 59. When the power cord 4 is pulled after docking with the power connector 3, the power cord 4 will squeeze the arc plate 511, so that the arc plate 511 pushes the buffer rod 59, so that the buffer rod 59 rotates on the top of the boss 58 and compresses the torsion spring 510. The other end of the buffer rod 59 is hinged with a hinge rod 512. The end of the hinged rod 512 away from the buffer rod 59 is hinged at the top of the slider 57. When the buffer rod 59 rotates, it will push the hinged rod 512, so that the hinged rod 512 pushes the slider 57. At this time, the slider 57 will slide on the inner wall of the control cabinet 1. The inner wall of the top plate 51 is slidably connected with the plug rod 513, and the plug rod 513 penetrates the top plate 51. The outer wall of the plug rod 513 is sleeved with an auxiliary spring 516. One end of the auxiliary spring 516 is fixedly installed on the outer wall of the limit block 514, and the other end of the auxiliary spring 516 is fixedly installed on the outer wall of the top plate 51. The limit block 514 can be pulled by the elasticity of the auxiliary spring 516, so that the limit block 514 pushes the plug rod 513.

[0029] The top plate 51 is slidably connected to the outer wall of the power connector 3, and a top rod 52 is fixedly installed at one end of the top plate 51, and a return spring 53 is fixedly installed at the other end of the top plate 51. The top plate 51 is pushed by the return spring 53, and the power cord 4 can be pushed straight out of the power connector 3 in cooperation with the top rod 52, so that the power cord 4 can be separated from the power connector 3 when the power cord 4 is pulled, thereby avoiding the pulling force from damaging the connection between the power cord 4 and the power connector 3, and at the same time avoiding the pulling force of the power cord 4 from being transmitted to the control cabinet 1, thereby maintaining the stability of the control cabinet 1.

[0030] A limit block 514 is fixedly installed at one end of the plug rod 513, and a baffle 515 is fixedly installed at the other end of the plug rod 513. The baffle 515 can be pushed out of the top plate 51 through the plug rod 513 so that the baffle 515 covers the power connector 3. The baffle 515 can protect the power connector 3 to prevent impurities from invading the interior of the power connector 3.

[0031] When the present embodiment is working: when the power cord 4 is pulled after being docked with the power connector 3, the power cord 4 will squeeze the arc plate 511, so that the arc plate 511 pushes the buffer rod 59, so that the buffer rod 59 rotates on the top of the boss 58 and compresses the torsion spring 510, at this time the buffer rod 59 will push the hinge rod 512, so that the hinge rod 512 pushes the slider 57, at this time the slider 57 will slide on the inner wall of the control cabinet 1 and gradually approach the power connector 3, at the same time the slider 57 will push the connecting rod 56, so that the connecting rod 56 pushes the block 54, so that the block 54 slides upward on the inner wall of the control cabinet 1, and in the process of the block 54 sliding upward, the top plate 51 will gradually move out of the slot 55, and when the top plate 51 is completely moved out of the slot 55, the block 54 will release the limit on the top plate 51, and at this time the elasticity of the reset spring 53 can push the top plate 51 so that the top plate 51 is on the power connector 3 slides and drives the push rod 52 to push the power cord 4. At this time, the push rod 52 can be used to push the power cord 4 plugged in the power connector 3 straight outward, so that the power cord 4 can be separated from the power connector 3 when the power cord 4 is pulled, avoiding the pulling force from damaging the connection between the power cord 4 and the power connector 3, and at the same time avoiding the pulling force of the power cord 4 from being transmitted to the control cabinet 1, so as to maintain the stability of the control cabinet 1. When the top plate 51 slides on the outer wall of the power connector 3, it will drive the baffle 515 to move in contact with the outer wall of the power connector 3. When the baffle 515 is separated from the outer wall of the power connector 3 during the movement, the elasticity of the auxiliary spring 516 can pull the limit block 514, so that the limit block 514 pushes the plug rod 513. At this time, the baffle 515 can be pushed out of the top plate 51 through the plug rod 513, so that the baffle 515 covers the power connector 3.

[0032] See also Figure 1-Figure 7On the basis of the above embodiment, another embodiment of the present invention further includes a positioning mechanism 6 and a cleaning mechanism 7. The positioning mechanism 6 includes a slide plate 61, a positioning rod 62, a suction cup 63, a limiting plate 64, a positioning spring 65, a compression box 66, a hose 67, a piston plate 68, a piston rod 69, a bent rod 610, a through groove 611 and a push rod 612. The slide plate 61 is slidably connected to the outer wall of the supporting foot 2. The inner wall of the slide plate 61 is slidably connected with the positioning rod 62, and the positioning rod 62 passes through the slide plate 61. The side wall of the slide plate 61 is fixedly installed with a bent rod 610, and a through groove 611 is provided on the bent rod 610. The outer wall of the top plate 51 is fixedly installed with a push rod 612, and the outer wall of the push rod 612 is attached to the inner wall of the through groove 611. The top of the positioning rod 62 is fixedly installed with a limiting plate 64, and the outer wall of the positioning rod 62 is sleeved with a positioning spring 65, and one end of the positioning spring 65 is fixedly installed on the top of the slide plate 61. The other end of the positioning spring 65 is fixedly installed on the outer wall of the limit plate 64. During the downward sliding process of the slide plate 61, the positioning spring 65 and the limit plate 64 can drive the positioning rod 62 to move downward synchronously. A compression box 66 is fixedly installed on the inner wall of the slide plate 61, and a hose 67 is fixedly installed on the outer wall of the compression box 66. The end of the hose 67 away from the compression box 66 is fixedly installed on the outer wall of the suction cup 63. The interior of the compression box 66 is connected with the interior of the suction cup 63 through the hose 67. The air inside the compression box 66 can be introduced into the interior of the suction cup 63 through the hose 67, thereby releasing the vacuum state of the suction cup 63. The air inside the suction cup 63 is introduced into the interior of the compression box 66 through the hose 67, so that the interior of the suction cup 63 can be evacuated. The end of the piston rod 69 away from the piston plate 68 passes through the compression box 66 and is fixedly installed at the bottom of the control cabinet 1, and the piston rod 69 is slidably connected to the penetration point of the compression box 66.

[0033] A suction cup 63 is fixedly installed at the bottom of the positioning rod 62. The positioning rod 62 can be moved downward to drive the suction cup 63 to be adsorbed on the floor of the production workshop. The suction cup 63 is used in conjunction with the positioning rod 62 and the slide plate 61 to improve the stability of the control cabinet 1 and prevent the power cord 4 from being pulled and causing a large displacement of the control cabinet 1.

[0034] The inner wall of the compression box 66 is slidably connected with a piston plate 68, and a piston rod 69 is fixedly installed on the top of the piston plate 68. As the compression box 66 moves downward, the piston plate 68 at the bottom of the piston rod 69 will suck the air inside the suction cup 63 into the interior of the compression box 66 through the hose 67, so that the interior of the suction cup 63 can be evacuated, thereby further improving the adsorption effect of the suction cup 63 and then improving the stability of the suction cup 63.

[0035] The cleaning mechanism 7 includes a slide bar 71, a scraper 72, a convex plate 73, a swing rod 74, a hollow rod 75, a connecting rod 76, a guide rod 77, a rotating drum 78, a spiral groove 79, a rubber rod 710, a rubber ball 711, a cross bar 712 and a vertical rod 713. One end of the convex plate 73 is fixedly mounted on the outer wall of the control cabinet 1, and the other end of the convex plate 73 is hinged with a swing rod 74, one end of the swing rod 74 is fixedly mounted with a hollow rod 75, and the other end of the swing rod 74 is hinged with a connecting rod 76. The end of the connecting rod 76 away from the swing rod 74 is hinged to the top of the slide bar 71. When the swing rod 74 rotates, it will pull the connecting rod 76, so that the connecting rod 76 pulls the slide bar 71. The side wall of the slide plate 61 is fixedly mounted with a guide rod 77, and the end of the guide rod 77 away from the slide plate 61 is attached to the hollow rod 7 5, the slide plate 61 will drive the guide rod 77 to fit the inner wall of the hollow rod 75 and move downward when the outer wall of the supporting foot 2 slides downward, the rotating cylinder 78 is rotatably connected to the outer wall of the positioning rod 62, and a spiral groove 79 is provided on the rotating cylinder 78. The outer wall of the rubber ball 711 fits the outer wall of the suction cup 63, and a cross bar 712 is fixedly installed on the side wall of the sliding rod 71. A vertical rod 713 is fixedly installed on the outer wall of the cross bar 712. The outer wall of the vertical rod 713 fits the inner wall of the spiral groove 79. When the sliding rod 71 slides, it will drive the cross bar 712 to move synchronously. When the cross bar 712 moves, it will drive the vertical rod 713 to fit the inner wall of the spiral groove 79 and move. At the same time, the vertical rod 713 will squeeze the spiral groove 79, thereby causing the rotating cylinder 78 to rotate on the outer wall of the positioning rod 62.

[0036] The sliding rod 71 is slidably connected to the inner wall of the supporting foot 2, and a scraper 72 is fixedly installed on the outer wall of the sliding rod 71. When the sliding rod 71 slides, it will drive the scraper 72 to move synchronously with the ground of the production workshop. The scraper 72 can be used to clean the ground under the suction cup 63 to prevent impurities remaining on the ground from affecting the adsorption effect of the suction cup 63.

[0037] A rubber rod 710 is fixedly installed on the outer wall of the rotating cylinder 78, and a rubber ball 711 is fixedly installed on the end of the rubber rod 710 away from the rotating cylinder 78. When the rotating cylinder 78 rotates, the rubber rod 710 can drive the rubber ball 711 to repeatedly hit the suction cup 63. The rubber ball 711 hitting the suction cup 63 can shake off the impurities inside the suction cup 63, so as to prevent the impurities from remaining inside the suction cup 63 and affecting the adsorption effect of the suction cup 63.

[0038] When the present embodiment is working, the top plate 51 slides on the outer wall of the power connector 3 and drives the top plate 51 to squeeze the power line 4, which drives the push rod 612 to move in close contact with the inner wall of the through groove 611. At the same time, the push rod 612 squeezes the bent rod 610, so that the bent rod 610 pushes the slide plate 61 downward, so that the slide plate 61 slides downward outside the support foot 2. During the downward sliding of the slide plate 61, the positioning spring 65 and the limit plate 64 can drive the positioning rod 62 to move downward synchronously. The downward movement of the positioning rod 62 can drive the suction cup 63 to be adsorbed on the floor of the production workshop. At this time, the suction cup 63 is used in conjunction with the positioning rod 62 and the slide plate 61 to improve the stability of the control cabinet 1, and to prevent the power cord 4 from being pulled and causing a large displacement of the control cabinet 1. The slide plate 61 will drive the compression box 66 to move downward synchronously during the downward sliding of the outer wall of the supporting foot 2. At this time, since the piston rod 69 is fixedly installed at the bottom of the control cabinet 1, as the compression box 66 moves downward, the piston plate 68 at the bottom of the piston rod 69 will suck the air inside the suction cup 63 into the interior of the compression box 66 through the hose 67, thereby vacuuming the interior of the suction cup 63.

[0039] When the slide plate 61 slides downward on the outer wall of the supporting foot 2, it will drive the guide rod 77 to fit the inner wall of the hollow rod 75 and move downward. At the same time, the guide rod 77 will push the hollow rod 75 downward, so that the hollow rod 75 drives the swing rod 74 to rotate on the outer wall of the convex plate 73. When the swing rod 74 rotates, it will pull the connecting rod 76, so that the connecting rod 76 pulls the sliding rod 71, so that the sliding rod 71 slides on the inner wall of the supporting foot 2. When the sliding rod 71 slides, it will drive the scraper 72 to fit the ground of the production workshop and move synchronously. At this time, the scraper 72 can be used to clean the ground below the suction cup 63. The cleaning is performed to prevent impurities remaining on the ground from affecting the adsorption effect of the suction cup 63. At the same time, the sliding rod 71 will drive the horizontal rod 712 to move synchronously while sliding. When the horizontal rod 712 moves, it will drive the vertical rod 713 to move in contact with the inner wall of the spiral groove 79. At the same time, the vertical rod 713 will squeeze the spiral groove 79, thereby causing the rotating drum 78 to rotate on the outer wall of the positioning rod 62. When the rotating drum 78 rotates, the rubber rod 710 can drive the rubber ball 711 to repeatedly knock on the suction cup 63, and the impurities inside the suction cup 63 can be shaken off by the rubber ball 711 knocking on the suction cup 63.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A control device for producing silicon oxide thin films, comprising a control cabinet (1), a support leg (2) fixedly mounted on the bottom of the control cabinet (1), a power connector (3) fixedly mounted on the outer wall of the control cabinet (1), a power cord (4) plugged into the inside of the power connector (3), characterized in that: The control cabinet (1) is provided with a protection mechanism (5) for protecting the power line (4), the control cabinet (1) is provided with a positioning mechanism (6), and the control cabinet (1) is provided with a cleaning mechanism (7); The protection mechanism (5) comprises a top plate (51), a top rod (52), a return spring (53), a block (54), a slot (55), a connecting rod (56), a slider (57), a boss (58), a buffer rod (59), a torsion spring (510), an arc plate (511), a hinge rod (512), an insertion rod (513), a limit block (514), a baffle (515) and an auxiliary spring (516); the top plate (51) is slidably connected to the outer wall of the power connector (3); one end of the top plate (51) is fixedly mounted with the top rod (52). ), a return spring (53) is fixedly mounted on the other end of the top plate (51), and an end of the return spring (53) away from the top plate (51) is fixedly mounted on the outer wall of the control cabinet (1), one end of the clamping block (54) is slidably connected to the inner wall of the control cabinet (1), and a clamping groove (55) is formed on the other end of the clamping block (54), and the outer wall of the top plate (51) is attached to the inner wall of the clamping groove (55), and a connecting rod (56) is hingedly connected to the outer wall of the clamping block (54), and a slider (57) is hingedly connected to the end of the connecting rod (56) away from the clamping block (54). ), the slider (57) is slidably connected to the inner wall of the control cabinet (1), one end of the boss (58) is fixedly mounted on the outer wall of the control cabinet (1), the other end of the boss (58) is hingedly connected to a buffer rod (59), a torsion spring (510) is provided at the hinge between the buffer rod (59) and the boss (58), one end of the buffer rod (59) is fixedly mounted with an arc plate (511), the other end of the buffer rod (59) is hingedly connected to a hinge rod (512), and the end of the hinge rod (512) away from the buffer rod (59) is hingedly connected to the slider (57). ), the inner wall of the top plate (51) is slidably connected with an insertion rod (513), and the insertion rod (513) passes through the top plate (51), one end of the insertion rod (513) is fixedly installed with a limit block (514), the other end of the insertion rod (513) is fixedly installed with a baffle (515), the outer wall of the insertion rod (513) is sleeved with an auxiliary spring (516), one end of the auxiliary spring (516) is fixedly installed on the outer wall of the limit block (514), and the other end of the auxiliary spring (516) is fixedly installed on the outer wall of the top plate (51).

2. A control device for producing silicon oxide thin films according to claim 1, characterized in that: The positioning mechanism (6) comprises a slide plate (61), a positioning rod (62), a suction cup (63), a limit plate (64), a positioning spring (65), a compression box (66), a hose (67), a piston plate (68), a piston rod (69), a bent rod (610), a through groove (611) and a push rod (612); the slide plate (61) is slidably connected to the outer wall of the supporting foot (2); the inner wall of the slide plate (61) is slidably connected to the positioning rod (62), and the positioning rod (62) passes through the slide plate (61); the side wall of the slide plate (61) is fixedly mounted with a bent rod (610), and the bent rod (610) is provided with a through groove (611); the outer wall of the top plate (51) is fixedly mounted with a push rod (612), and the outer wall of the push rod (612) is fitted to the inner wall of the through groove (611).

3. A control device for producing silicon oxide thin films according to claim 2, characterized in that: A suction cup (63) is fixedly mounted on the bottom of the positioning rod (62), a limiting plate (64) is fixedly mounted on the top of the positioning rod (62), a positioning spring (65) is sleeved on the outer wall of the positioning rod (62), one end of the positioning spring (65) is fixedly mounted on the top of the slide plate (61), and the other end of the positioning spring (65) is fixedly mounted on the outer wall of the limiting plate (64).

4. A control device for producing silicon oxide thin films according to claim 3, characterized in that: A compression box (66) is fixedly mounted on the inner wall of the slide plate (61), a hose (67) is fixedly mounted on the outer wall of the compression box (66), one end of the hose (67) away from the compression box (66) is fixedly mounted on the outer wall of the suction cup (63), the interior of the compression box (66) is connected to the interior of the suction cup (63) through the hose (67), a piston plate (68) is slidably connected to the inner wall of the compression box (66), a piston rod (69) is fixedly mounted on the top of the piston plate (68), and one end of the piston rod (69) away from the piston plate (68) passes through the compression box (66) and is fixedly mounted on the bottom of the control cabinet (1).

5. A control device for producing silicon oxide thin films according to claim 4, characterized in that: The cleaning mechanism (7) comprises a sliding rod (71), a scraper (72), a convex plate (73), a swing rod (74), a hollow rod (75), a connecting rod (76), a guide rod (77), a rotating drum (78), a spiral groove (79), a rubber rod (710), a rubber ball (711), a cross rod (712) and a vertical rod (713); the sliding rod (71) is slidably connected to the inner wall of the supporting foot (2); the outer wall of the sliding rod (71) is fixedly mounted with the scraper (72); one end of the convex plate (73) is fixedly mounted on the outer wall of the control cabinet (1); and the other end of the convex plate (73) is hingedly connected with the swing rod (74).

6. A control device for producing silicon oxide thin films according to claim 5, characterized in that: A hollow rod (75) is fixedly mounted on one end of the swing rod (74), a connecting rod (76) is hingedly mounted on the other end of the swing rod (74), an end of the connecting rod (76) away from the swing rod (74) is hingedly mounted on the top of the slide rod (71), a guide rod (77) is fixedly mounted on the side wall of the slide plate (61), and an end of the guide rod (77) away from the slide plate (61) is fitted on the inner wall of the hollow rod (75).

7. A control device for producing silicon oxide thin films according to claim 6, characterized in that: The rotating cylinder (78) is rotatably connected to the outer wall of the positioning rod (62), and a spiral groove (79) is provided on the rotating cylinder (78). A rubber rod (710) is fixedly installed on the outer wall of the rotating cylinder (78), and a rubber ball (711) is fixedly installed on one end of the rubber rod (710) away from the rotating cylinder (78), and the outer wall of the rubber ball (711) is in contact with the outer wall of the suction cup (63).

8. A control device for producing silicon oxide thin films according to claim 7, characterized in that: A cross bar (712) is fixedly mounted on the side wall of the slide bar (71), a vertical bar (713) is fixedly mounted on the outer wall of the cross bar (712), and the outer wall of the vertical bar (713) is fitted on the inner wall of the spiral groove (79).

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