Image sensor having nanophotonic lens array and electronic device including the same

Abstract

There is provided an image sensor including: a sensor substrate including a first pixel group and a second pixel group; a nano photon lens array including a first region facing the first pixel group and a second region facing the second pixel group; and a color filter layer including a first color filter facing the first pixel group and the first region and transmitting light of the first wavelength band, and a second color filter facing the second pixel group and the second region and transmitting light of the second wavelength band. The first region may include a plurality of nanostructures two-dimensionally arranged at a first arrangement period to converge incident light, the second region may include a plurality of nanostructures two-dimensionally arranged at a second arrangement period to converge incident light, and the second arrangement period may be smaller than the first arrangement period.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is based on and claims the benefit of priority from Korean Patent Application No. 10-2023-0127295 filed on September 22, 2023, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] One or more embodiments relate to an image sensor including a nanophotonic lens array and an electronic device including the image sensor. Background Art

[0004] The image sensor includes a microlens array arranged on a color filter array to converge incident light on independent photosensitive units. The microlens array includes a plurality of microlenses arranged in two dimensions. The plurality of microlenses in the microlens array may have, for example, a convex lens shape for converging light in a refracting manner. Since it is difficult to manufacture refractive microlenses of different shapes depending on the position on the microlens array, the plurality of microlenses in the microlens array have the same shape over the entire area of ​​the microlens array. Therefore, it is difficult to resolve the characteristic differences between different color channels and the changes in sensor characteristics depending on the position of the microlens array on the image sensor. Summary of the invention

[0005] An image sensor having improved contrast of an autofocus signal based on a nanophotonic lens array in the image sensor, and an electronic device including the image sensor are provided.

[0006] Provided are an image sensor having reduced brightness difference between color channels based on a nanophotonic lens array in the image sensor, and an electronic device including the image sensor.

[0007] Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the embodiments presented in the disclosure.

[0008] According to one aspect of the present disclosure, an image sensor is provided, comprising: a sensor substrate, comprising a first pixel group and a second pixel group, the first pixel group comprising a plurality of first pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction, and the second pixel group comprising a plurality of second pixels arranged two-dimensionally along the first direction and the second direction; a nanophotonic lens array, comprising a first region and a second region, the first region facing the first pixel group in a third direction perpendicular to the first direction and the second direction, and the second region facing the second pixel group in the third direction; and a color filter layer, disposed between the sensor substrate and the nanophotonic lens array, the color filter layer comprising a first color filter and a second color filter, the first color filter facing the first pixel group and the first region in the third direction and being configured to transmit light of a first wavelength band, the second color filter facing the second pixel group and the second region in the third direction and being configured to transmit light of a second wavelength band different from the first wavelength band, wherein the first region comprises a plurality of first nanostructures arranged two-dimensionally in a first period, wherein the second region comprises a plurality of nanostructures arranged two-dimensionally in a second period, and wherein the second period is smaller than the first period.

[0009] Each of the first region and the second region may include a first lens, a second lens, a third lens, and a fourth lens arranged in a 2×2 array, each of the first lens, the second lens, the third lens, and the fourth lens in the first region may include a plurality of first nanostructures arranged two-dimensionally with a first period, and each of the first lens, the second lens, the third lens, and the fourth lens in the second region may include a plurality of second nanostructures arranged two-dimensionally with a second period.

[0010] In the first region, a first gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the second lens may be greater than the first period, and a second gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the fourth lens may be greater than the first period.

[0011] The first gap may be different from the second gap.

[0012] In the first region, a third gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the third lens may be equal to the first period, and a fourth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the fourth lens may be equal to the first period.

[0013] In the first region, a third gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the third lens may be different from the first period, and a fourth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the fourth lens may be different from the first period.

[0014] In the second region, a fifth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the second lens may be smaller than the second period, and a sixth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the fourth lens may be smaller than the second period.

[0015] The fifth gap may be different from the sixth gap.

[0016] In the second region, a seventh gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the third lens may be smaller than the second period, and an eighth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the fourth lens may be smaller than the second period.

[0017] The seventh gap may be different from the eighth gap.

[0018] Each of the first pixel group and the second pixel group may include a first subgroup, a second subgroup, a third subgroup and a fourth subgroup arranged in a 2×2 array, and each of the first subgroup, the second subgroup, the third subgroup and the fourth subgroup in each of the first pixel group and the second pixel group may include a plurality of independent pixels arranged in a 2×2 array.

[0019] The first lens, the second lens, the third lens, and the fourth lens in the first region may be arranged to respectively face the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup of the first pixel group in the third direction, and the first lens, the second lens, the third lens, and the fourth lens in the second region may be arranged to respectively face the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup of the second pixel group in the third direction.

[0020] The sensor substrate may include a third pixel group and a fourth pixel group, the third pixel group includes a plurality of third pixels arranged two-dimensionally along a first direction and a second direction, the fourth pixel group includes a plurality of fourth pixels arranged two-dimensionally along the first direction and the second direction, the nanophotonic lens array may include a third region and a fourth region, the third region faces the third pixel group in the third direction, and the fourth region faces the fourth pixel group in the third direction, the color filter layer may include a third color filter and a fourth color filter, the third color filter faces the third pixel group and the third region in the third direction and is configured to transmit light of a third band different from the first band and the second band, the fourth color filter faces the fourth pixel group and the fourth region in the third direction and is configured to transmit light of the first band, the third region may include a plurality of nanostructures arranged two-dimensionally in a third period, the fourth region may include a plurality of nanostructures arranged two-dimensionally in a fourth period, and the second period is smaller than the third period and the fourth period.

[0021] The first period, the third period, and the fourth period may be equal to each other.

[0022] The first period and the fourth period may be smaller than the third period.

[0023] Each of the third region and the fourth region may include a first lens, a second lens, a third lens, and a fourth lens arranged in a 2×2 array, each of the first lens, the second lens, the third lens, and the fourth lens in the third region may include a plurality of nanostructures arranged two-dimensionally with a third period, and each of the first lens, the second lens, the third lens, and the fourth lens in the fourth region may include a plurality of nanostructures arranged two-dimensionally with a fourth period.

[0024] In the third region, a ninth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the second lens may be equal to the third period, a tenth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the fourth lens may be equal to the third period, an eleventh gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the third lens may be equal to the third period, and a twelfth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the fourth lens may be equal to the third period.

[0025] In the fourth region, a thirteenth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the second lens may be equal to the fourth period, a fourteenth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the fourth lens may be equal to the fourth period, a fifteenth gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens among the plurality of nanostructures in the third lens may be greater than the fourth period, and a sixteenth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens among the plurality of nanostructures in the fourth lens may be greater than the fourth period.

[0026] Multiple first pixels can be grouped and arranged in a 2×2 array, multiple second pixels can be grouped and arranged in a 2×2 array, the first area can include a first lens facing all multiple first pixels in the first pixel group, and the second area can include a second lens facing all multiple second pixels in the second pixel group.

[0027] According to another aspect of the present disclosure, an electronic device is provided, comprising: a lens assembly configured to form an optical image of an object; an image sensor configured to convert the optical image formed by the lens assembly into an electrical signal; and a processor configured to process the signal generated by the image sensor, wherein the image sensor may include: a sensor substrate including a first pixel group and a second pixel group, each of the first pixel group and the second pixel group including a plurality of pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction; a nanophotonic lens array including a first region and a second region, the first region facing the first region in a third direction perpendicular to the first direction and the second direction; A pixel group, the second area faces the second pixel group in a third direction; and a color filter layer, which is arranged between the sensor substrate and the nanophotonic lens array, the color filter layer includes a first color filter and a second color filter, the first color filter faces the first pixel group and the first area in the third direction and is configured to transmit light of a first band, the second color filter faces the second pixel group and the second area in the third direction and is configured to transmit light of a second band different from the first band, wherein the first area may include a plurality of first nanostructures arranged two-dimensionally with a first period, wherein the second area may include a plurality of nanostructures arranged two-dimensionally with a second period, and wherein the second period is smaller than the first period.

[0028] According to another aspect of the present disclosure, an image sensor is provided, comprising: a sensor substrate, comprising a first pixel group and a second pixel group, the first pixel group comprising a plurality of first pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction, and the second pixel group comprising a plurality of second pixels arranged two-dimensionally along the first direction and the second direction; a nanophotonic lens array, comprising a first region and a second region, the first region overlapping with the first pixel group in a third direction perpendicular to the first direction and the second direction, and the second region overlapping with the second pixel group in the third direction; and a color filter layer disposed between the sensor substrate and the nanophotonic lens array, the color filter layer comprising a first color filter overlapping with the first pixel group in the third direction, and a second color filter overlapping with the second pixel group in the third direction, wherein the first region may include a plurality of first nanostructures and the second region may include a plurality of second nanostructures, wherein the plurality of first nanostructures are arranged along the first direction to have a first period, and wherein the plurality of second nanostructures are arranged along the first direction to have a second period different from the first period. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other aspects, features and advantages of some embodiments of the present disclosure will become more apparent from the following description in conjunction with the accompanying drawings, in which:

[0030] Figure 1 is a schematic block diagram of an image sensor according to an embodiment;

[0031] Figure 2A and Figure 2B is a cross-sectional view schematically showing a structure of a pixel array in an image sensor according to an embodiment;

[0032] Figure 3 is a plan view schematically showing an example structure of a unit pixel array in a sensor substrate according to an embodiment;

[0033] Figure 4 is a plan view schematically showing an example structure of a unit filter array in a color filter layer according to an embodiment;

[0034] Figure 5 is a plan view schematically showing an example structure of a unit pattern in a nanophotonic lens array according to an embodiment;

[0035] Fig. 6A is a plan view showing the structure of a unit pattern in a nanophotonic lens array according to a comparative example, and Figure 6B is a diagram showing an example of phase distribution of transmitted light after passing through a nanophotonic lens array according to a comparative example;

[0036] Figure 7 is a diagram showing a simulation result of an example of intensity distribution of light incident on a plurality of pixels on a sensor substrate when a nanophotonic lens array according to a comparative example is used;

[0037] Fig. 8A is a plan view showing a first example structure of a unit pattern in a nanophotonic lens array according to an embodiment, and Figure 8B is a diagram showing an example of phase distribution of transmitted light after passing through a nanophotonic lens array having a first example structure;

[0038] Fig. 9 is a diagram showing simulation results of an example of intensity distribution of light incident on a plurality of pixels on a sensor substrate when a nanophotonic lens array having a first example structure is used;

[0039] Fig. 10A is a plan view showing a second example structure of a unit pattern in a nanophotonic lens array according to an embodiment, and Fig. 10Bis a diagram showing an example of phase distribution of transmitted light after passing through a nanophotonic lens array having a second example structure;

[0040] Fig.11 is a diagram showing simulation results of an example of intensity distribution of light incident on a plurality of pixels on a sensor substrate when a nanophotonic lens array having a second example structure is used;

[0041] Fig.12 is a table showing examples of brightness differences and contrast ratios between channels in a comparative example, a first example structure, and a second example structure;

[0042] Fig.13 is a plan view schematically showing an example structure of a unit pattern in a nanophotonic lens array according to another embodiment;

[0043] Fig.14A is a diagram showing a cross-sectional shape of a nanostructure at a central portion of a nanophotonic lens array, and Fig. 14B is a diagram showing a phase distribution of transmitted light at a central portion of a nanophotonic lens array;

[0044] Fig.15A is a diagram showing a cross-sectional shape of a nanostructure at a peripheral portion of a nanophotonic lens array, and Fig. 15B is a diagram showing a phase distribution of transmitted light at a peripheral portion of a nanophotonic lens array;

[0045] Fig.16A is a cross-sectional view schematically showing an example structure of a central portion of a nanophotonic lens array according to another embodiment;

[0046] Fig. 16B is a cross-sectional view schematically showing an example structure of a peripheral portion of a nanophotonic lens array according to another embodiment;

[0047] Fig. 16C is a cross-sectional view schematically showing an example structure of a peripheral portion of a nanophotonic lens array according to another embodiment;

[0048] Fig.17 is a plan view schematically showing an example structure of a unit pixel array in a sensor substrate according to another embodiment;

[0049] Fig.18 is a plan view schematically showing an example structure of a unit pattern in a nanophotonic lens array according to another embodiment;

[0050] Fig.19 is a block diagram of an electronic device including an image sensor according to an embodiment;

[0051] Fig. 20 yes Fig.19 Block diagram of the camera module;

[0052] Fig.21 is a block diagram of an electronic device including a multi-camera module; and

[0053] Fig. 22 yes Fig.21 Detailed block diagram of a multi-camera module in an electronic device. DETAILED DESCRIPTION

[0054] With reference now to an embodiment in detail, examples of embodiments are shown in the accompanying drawings, wherein similar elements are represented by similar reference numerals in all the accompanying drawings. In this regard, the embodiments presented may have different forms and should not be construed as being limited to the description set forth herein. Therefore, the embodiments are described below only by reference to the accompanying drawings to explain various aspects. As used herein, the term "and / or" includes any and all combinations of one or more of the related listed items. Statements such as "at least one of..." modify the entire list of elements when following the list of elements, rather than modifying the individual elements in the list.

[0055] Hereinafter, an image sensor including a nanophotonic lens array and an electronic device including the image sensor will be described in detail with reference to the accompanying drawings. The embodiments of the present disclosure are capable of various modifications and may be embodied in many different forms. In the accompanying drawings, like reference numerals represent like components, and the sizes of the components in the accompanying drawings may be exaggerated for ease of description.

[0056] When a layer, film, region, or panel is referred to as being “on” another element, it can be directly on / below / left / right of the other layer or substrate, or intervening layers may also be present.

[0057] It should be understood that although the terms "first" and "second" etc. may be used herein to describe various components, these components should not be limited by these terms. These components are only used to distinguish one component from other components. These terms do not limit the materials or structures of the components to be different from each other.

[0058] Expressions in the singular include plural expressions unless clearly different meanings are given in the context. It should also be understood that, in the case where a part is said to "include" another component, the part may not exclude the other components but may further include the other components unless otherwise indicated in the context.

[0059] Furthermore, terms such as “unit”, “module” and the like provided herein indicate a unit that performs a function or an operation and may be implemented by hardware, software, or a combination of hardware and software.

[0060] The use of the term "above" and similar referential terms may correspond to both the singular and the plural.

[0061] In addition, the operations of all methods described herein can be performed in any suitable order, unless otherwise noted herein or the context clearly indicates otherwise. In addition, the use of all exemplary terms (such as, etc.) is only used to describe the technical ideas in detail, and the scope of rights is not limited by these terms, unless the context is limited by the claims.

[0062] Figure 1 is a block diagram of an image sensor according to an example embodiment. Figure 1 , the image sensor 1000 may include a pixel array 1100, a timing controller (T / C) 1010, a row decoder 1020, and an output circuit 1030. The image sensor 1000 may be a charge coupled device (CCD) image sensor or a complementary metal oxide semiconductor (CMOS) image sensor.

[0063] The pixel array 1100 includes pixels arranged in two dimensions in a plurality of rows and columns. The row decoder 1020 selects one of the rows in the pixel array 1100 based on the row address signal output from the timing controller 1010. For example, the row decoder 1020 may select one of the rows in the pixel array 1100 in response to the row address signal output from the timing controller 1010. The output circuit 1030 outputs a photosensitive signal from a plurality of pixels arranged in the selected row in units of rows. For example, the output circuit 1030 may include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 may include: a plurality of ADCs respectively arranged in the columns between the column decoder and the pixel array 1100 or an ADC arranged at the input or output end of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented in one chip or in a separate chip. Here, the chip may refer to a semiconductor chip or an integrated circuit (IC) chip. However, the present disclosure is not limited thereto. A processor for processing an image signal output from the output circuit 1030 may be implemented in one chip together with the timing controller 1010, the row decoder 1020, and the output circuit 1030. However, the present disclosure is not limited thereto, and thus, the processor may be provided in a separate chip.

[0064] Figure 2A and Figure 2B is a cross-sectional view schematically showing a structure of a pixel array 1100 in an image sensor 1000 according to an embodiment. Figure 2A A cross-sectional view of the pixel array 1100 taken along a first direction (X direction) at a first position is shown, and Figure 2B1 shows a cross-sectional view of the pixel array 1100 taken along the first direction (X direction) at a second position different from the first position in a second direction (Y direction) perpendicular to the first direction. Figure 2A and Figure 2B , the pixel array 1100 may include a sensor substrate 110, a color filter layer 120 disposed on the sensor substrate 110, a planarization layer 130 disposed on the color filter layer 120, and a nanophotonic lens array 140 disposed on the planarization layer 130. The color filter layer 120 may be disposed between the sensor substrate 110 and the nanophotonic lens array 140 in a third direction (i.e., Z direction) perpendicular to the first direction and the second direction, and the planarization layer 130 may be disposed between the color filter layer 120 and the nanophotonic lens array 140 in the third direction.

[0065] Figure 3 1 is a plan view schematically showing an example structure of a unit pixel array in a sensor substrate 110 according to an embodiment. Figure 3 , a unit pixel array of the sensor substrate 110 may include a first pixel group 111, a second pixel group 112, a third pixel group 113, and a fourth pixel group 114. The first to fourth pixel groups 111, 112, 113, and 114 may be two-dimensionally arranged in a 2×2 array along the first direction and the second direction. However, the present disclosure is not limited thereto. For example, although Figure 3 Only one pixel unit array is shown, but a plurality of first pixel groups 111 and a plurality of second pixel groups 112 may be alternately arranged along a first direction, and a plurality of third pixel groups 113 and a plurality of fourth pixel groups 114 may be alternately arranged along the first direction in a cross section at different positions in a second direction perpendicular to the first direction. In addition, a plurality of first pixel groups 111 and a plurality of fourth pixel groups 114 may be arranged along a first diagonal direction, and a plurality of second pixel groups 112 and a plurality of third pixel groups 113 may be arranged along a second diagonal direction intersecting the first diagonal direction.

[0066] Each of the first to fourth pixel groups 111, 112, 113, and 114 may include subgroups grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. For example, the first pixel group 111 may include a first subgroup 111A, a second subgroup 111B, a third subgroup 111C, and a fourth subgroup 111D grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. The first subgroup 111A may contact the second subgroup 111B in the first direction, and may contact the third subgroup 111C in the second direction. The second subgroup 111B may contact the fourth subgroup 111D in the second direction, and the third subgroup 111C may contact the fourth subgroup 111D in the first direction. In addition, the second pixel group 112 may include a first subgroup 112A, a second subgroup 112B, a third subgroup 112C and a fourth subgroup 112D grouped along the first direction and the second direction and arranged in a two-dimensional array in a 2×2 array, the third pixel group 113 may include a first subgroup 113A, a second subgroup 113B, a third subgroup 113C and a fourth subgroup 113D grouped along the first direction and the second direction and arranged in a two-dimensional array in a 2×2 array, and the fourth pixel group 114 may include a first subgroup 114A, a second subgroup 114B, a third subgroup 114C and a fourth subgroup 114D grouped along the first direction and the second direction and arranged in a two-dimensional array in a 2×2 array.

[0067] In addition, each of the plurality of sub-groups 111A, 111B, 111C, 111D, 112A, 112B, 112C, 112D, 113A, 113B, 113C, 113D, 114A, 114B, 114C, and 114D may include a plurality of independent pixels grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. For example, each of the plurality of sub-groups 111A, 111B, 111C, 111D, 112A, 112B, 112C, 112D, 113A, 113B, 113C, 113D, 114A, 114B, 114C, and 114D may include a first pixel Px1, a second pixel Px2, a third pixel Px3, and a fourth pixel Px4 grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. The first pixel Px1 may be adjacent to the second pixel Px2 in the first direction, and may be adjacent to the third pixel Px3 in the second direction. The second pixel Px2 may be adjacent to the fourth pixel Px4 in the second direction, and the third pixel Px3 may be adjacent to the fourth pixel Px4 in the first direction. For example, the first pixel Px1 may contact the second pixel Px2 in the first direction, and may contact the third pixel Px3 in the second direction, the second pixel Px2 may contact the fourth pixel Px4 in the second direction, and the third pixel Px3 may contact the fourth pixel Px4 in the first direction. Each of the first to fourth pixels Px1, Px2, Px3, and Px4 may independently sense incident light. Therefore, each of the plurality of subgroups 111A, 111B, 111C, 111D, 112A, 112B, 112C, 112D, 113A, 113B, 113C, 113D, 114A, 114B, 114C, and 114D may include four pixels grouped along the first direction and the second direction and two-dimensionally arranged in a 2×2 array. In addition, each of the first to fourth pixel groups 111, 112, 113, and 114 may include sixteen pixels grouped along the first direction and the second direction and arranged in a 4×4 array.

[0068] Figure 4 1 is a plan view schematically showing an example structure of a unit filter array in the color filter layer 120 according to an embodiment. Figure 4, the color filter layer 120 may include a plurality of color filters disposed between the sensor substrate 110 and the nanophotonic lens array 140. The plurality of color filters may be configured to transmit light of a specific wavelength band and absorb light of other wavelength bands. For example, a unit filter array of the color filter layer 120 may include a first color filter 121 that transmits light of a first wavelength band and absorbs light of other wavelength bands, a second color filter 122 that transmits light of a second wavelength band different from the first wavelength band and absorbs light of other wavelength bands, a third color filter 123 that transmits light of a third wavelength band different from the first wavelength band and the second wavelength band and absorbs light of other wavelength bands, and a fourth color filter 124 that transmits light of the first wavelength band and absorbs light of other wavelength bands. For example, the first color filter 121 may be configured to transmit light of the first band and absorb light of other bands different from the first band, the second color filter 122 may be configured to transmit light of the second band different from the first band and absorb light of other bands different from the second band, the third color filter 123 may be configured to transmit light of the third band different from the first band and the second band and absorb light of other bands different from the third band, and the fourth color filter 124 may be configured to transmit light of the first band and absorb light of other bands different from the first band. The first to fourth color filters 121, 122, 123 and 124 may be grouped along the first direction and the second direction and arranged in a two-dimensional 2×2 array. For example, the first color filter 121 may be adjacent to the second color filter 122 in the first direction, and may be adjacent to the third color filter 123 in the second direction. The second color filter 122 may be adjacent to the fourth color filter 124 in the second direction, and the third color filter 123 may be adjacent to the fourth color filter 124 in the first direction. For example, the first color filter 121 may contact the second color filter 122 in the first direction and may contact the third color filter 123 in the second direction. The second color filter 122 may contact the fourth color filter 124 in the second direction and the third color filter 123 may contact the fourth color filter 124 in the first direction.

[0069] Figure 4 An example of a unit filter array corresponding to one unit Bayer pattern is shown. According to an embodiment, a plurality of first color filters 121 and a plurality of second color filters 122 may be alternately arranged along a first direction, and a plurality of third color filters 123 and a plurality of fourth color filters 124 may be alternately arranged along the first direction on a cross section at different positions in a second direction perpendicular to the first direction. In addition, a plurality of first color filters 121 and a plurality of fourth color filters 124 may be arranged along a first diagonal direction, and a plurality of second color filters 122 and a plurality of third color filters 123 may be arranged along a second diagonal direction intersecting the first diagonal direction.

[0070] Reference Figure 2A and Figure 2B, the first color filter 121 may be arranged to face the first pixel group 111 in the third direction (Z direction), the second color filter 122 may be arranged to face the second pixel group 112 in the third direction, the third color filter 123 may be arranged to face the third pixel group 113 in the third direction, and the fourth color filter 124 may be arranged to face the fourth pixel group 114 in the third direction. Therefore, a plurality of pixels in the first pixel group 111 may sense light of the first wavelength band that has passed through the first color filter 121. A plurality of pixels in the second pixel group 112 may sense light of the second wavelength band that has passed through the second color filter 122, a plurality of pixels in the third pixel group 113 may sense light of the third wavelength band that has passed through the third color filter 123, and a plurality of pixels in the fourth pixel group 114 may sense light of the first wavelength band that has passed through the fourth color filter 124.

[0071] For example, the first color filter 121 and the fourth color filter 124 may be green color filters that transmit green light, the second color filter 122 may be a blue color filter that transmits blue light, and the third color filter 123 may be a red color filter that transmits red light. In this case, the first pixel group 111 and the fourth pixel group 114 may be a green pixel group configured to sense green light, the second pixel group 112 may be a blue pixel group configured to sense blue light, and the third pixel group 113 may be a red pixel group configured to sense red light. In another example, the first color filter 121 and the fourth color filter 124 may be yellow color filters that transmit yellow-based light, the second color filter 121 may be a blue color filter, and the third color filter 123 may be a red color filter. In another example, the first color filter 121 and the fourth color filter 124 may be yellow color filters, the second color filter 122 may be a cyan color filter, and the third color filter 123 may be a magenta color filter.

[0072] exist Figure 4 In FIG. 1 , the dotted line may represent the isolation layer between the first to fourth pixels Px1, Px2, Px3, and Px4. Figure 4As shown, the first to fourth color filters 121, 122, 123, and 124 may be disposed facing all pixels in the first to fourth pixel groups 111, 112, 113, and 114. For example, the first to fourth color filters 121, 122, 123, and 124 may be disposed in a third direction corresponding to the first to fourth pixel groups 111, 112, 113, and 114, respectively. For example, in the third direction, the first color filter 121 overlaps all pixels in the first pixel group 111, the second color filter 122 overlaps all pixels in the second pixel group 112, the third color filter 123 overlaps all pixels in the third pixel group 113, and the fourth color filter 124 overlaps all pixels in the fourth pixel group 114. For example, the first color filter 121 covers all pixels in the first pixel group 111, the second color filter 122 covers all pixels in the second pixel group 112, the third color filter 123 covers all pixels in the third pixel group 113, and the fourth color filter 124 covers all pixels in the fourth pixel group 114.

[0073] The first to fourth color filters 121, 122, 123 and 124 in the color filter layer 120 may be formed of, for example, an organic polymer material. For example, the first to fourth color filters 121, 122, 123 and 124 may include a colorant, an adhesive resin, a polymer photoresist, etc. The first color filter 121 and the fourth color filter 124 may be organic color filters including a green organic dye or a green organic pigment as a colorant, the second color filter 122 may be an organic color filter including a blue organic dye or a blue organic pigment as a colorant, and the third color filter 123 may be an organic color filter including a red organic dye or a red organic pigment as a colorant. According to an embodiment, the color filter layer 120 may also include a black matrix arranged at the boundary between the first to fourth color filters 121, 122, 123 and 124. The black matrix may include, for example, carbon black.

[0074] Return to reference Figure 2A and Figure 2B , the planarization layer 130 disposed between the color filter layer 120 and the nanophotonic lens array 140 can provide a flat surface for forming the nanophotonic lens array 140 on the planarization layer 130. The planarization layer 130 may include an organic polymer material suitable for stacking on the color filter layer 120 formed of an organic material, and a flat surface may be easily formed. The organic polymer material forming the planarization layer 130 may be transparent to visible light. For example, the planarization layer 130 may include at least one organic polymer material from epoxy resin, polyimide, polycarbonate, polyacrylate, and polymethyl methacrylate (PMMA). The planarization layer 130 may be formed on the color filter layer 120 by, for example, a spin coating method, and may have a flat upper surface by heat treatment.

[0075] The nanophotonic lens array 140 may be disposed on the planarization layer 130 . Figure 2A and Figure 2B It is shown that the nanophotonic lens array 140 is directly disposed on the planarization layer 130, but the present invention is not limited thereto. Thus, according to another embodiment, one or more other layers may be formed between the nanophotonic lens array 140 and the planarization layer 130. For example, a protective layer may be disposed on the planarization layer 130, and the nanophotonic lens array 140 may be disposed on the protective layer. The protective layer may be configured to prevent damage to the planarization layer 130 that may occur in the process of forming the nanophotonic lens array 140. That is, the protective layer may prevent damage to the organic polymer material of the planarization layer 130 that may occur in the process of forming the nanophotonic lens array 140. Furthermore, in order to protect the planarization layer 130 while forming the nanophotonic lens array 140, an etching stop layer may also be disposed between the planarization layer 130 and the nanophotonic lens array 140.

[0076] Figure 5 1 is a plan view schematically showing an example structure of a unit pattern in the nanophotonic lens array 140 according to an embodiment. Figure 5 , a unit pattern of the nanophotonic lens array 140 may include a first region 141, a second region 142, a third region 143, and a fourth region 144. The first region 141, the second region 142, the third region 143, and the fourth region 144 may be grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. For example, the first region 141 may be adjacent to the second region 142 in the first direction, and may be adjacent to the third region 143 in the second direction. The second region 142 may be adjacent to the fourth region 144 in the second direction, and the third region 143 may be adjacent to the fourth region 144 in the first direction. For example, the first region 141 may contact the second region 142 in the first direction, and may contact the third region 143 in the second direction. The second region 142 may contact the fourth region 144 in the second direction, and the third region 143 may contact the fourth region 144 in the first direction.

[0077] although Figure 5 Only one unit pattern is shown as an example, but the plurality of first regions 141 and the plurality of second regions 142 may be alternately arranged along the first direction, and the plurality of third regions 143 and the plurality of fourth regions 144 may be alternately arranged along the first direction on a cross section at different positions in the second direction. In addition, the plurality of first regions 141 and the plurality of fourth regions 144 may be arranged along a first diagonal direction, and the plurality of second regions 141 and the plurality of third regions 143 may be arranged along a second diagonal direction intersecting the first diagonal direction.

[0078] Reference Figure 2A and Figure 2B , the first region 141 may be disposed to face the first pixel group 111 and the first color filter 121 in the third direction. The second region 142 may be disposed to face the second pixel group 112 and the second color filter 122 in the third direction. The third region 143 may be disposed to face the third pixel group 113 and the third color filter 123 in the third direction. The fourth region 144 may be disposed to face the fourth pixel group 114 and the fourth color filter 124 in the third direction.

[0079] Each of the first region 141, the second region 142, the third region 143, and the fourth region 144 may include a plurality of lenses grouped along the first direction and the second direction and arranged two-dimensionally in a 2×2 array. For example, the first region 141 may include a first lens 141L1, a second lens 141L2, a third lens 141L3, and a fourth lens 141L4 arranged two-dimensionally. The first lens 141L1 may be adjacent to the second lens 142L2 in the first direction and adjacent to the third lens 143L3 in the second direction, the second lens 142L2 may be adjacent to the fourth lens 144L4 in the second direction, and the third lens 143L3 may be adjacent to the fourth lens 144L4 in the first direction. For example, the first lens 141L1 may contact the second lens 142L2 in the first direction and contact the third lens 143L3 in the second direction, the second lens 142L2 may contact the fourth lens 144L4 in the second direction, and the third lens 143L3 may contact the fourth lens 144L4 in the first direction. In addition, the second region 142 may include a first lens 142L1, a second lens 142L2, a third lens 142L3, and a fourth lens 142L4 arranged in two dimensions. The third region 143 may include a first lens 143L1, a second lens 143L2, a third lens 143L3, and a fourth lens 143L4 arranged in two dimensions. In addition, the fourth region 144 may include a first lens 144L1, a second lens 144L2, a third lens 144L3, and a fourth lens 144L4 arranged in two dimensions.

[0080] The first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 in the first region 141 may respectively face the first subgroup 111A, the second subgroup 111B, the third subgroup 111C, and the fourth subgroup 111D of the first pixel group 111. For example, the first lens 141L1 of the first region 141 may face all pixels in the first subgroup 111A of the first pixel group 111 in the third direction, the second lens 141L2 of the first region 141 may face all pixels in the second subgroup 111B of the first pixel group 111 in the third direction, the third lens 141L3 of the first region 141 may face all pixels in the third subgroup 111C of the first pixel group 111 in the third direction, and the fourth lens 141L4 of the first region 141 may face all pixels in the fourth subgroup 111D of the first pixel group 111 in the third direction. For example, Figure 5 The dotted lines shown in show the isolation layers between pixels.

[0081] The first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 of the second region 142 may be respectively arranged to face the first subgroup 112A, the second subgroup 112B, the third subgroup 112C, and the fourth subgroup 112D of the second pixel group 112. Therefore, the first lens 142L1 of the second region 142 may face all pixels of the first subgroup 112A of the second pixel group 112 in the third direction, the second lens 142L2 of the second region 142 may face all pixels of the second subgroup 112B of the second pixel group 112 in the third direction, the third lens 142L3 of the second region 142 may face all pixels of the third subgroup 112C of the second pixel group 112 in the third direction, and the fourth lens 142L4 of the second region 142 may face all pixels of the fourth subgroup 112D of the second pixel group 112 in the third direction.

[0082] The first lens 143L1, the second lens 143L2, the third lens 143L3, and the fourth lens 143L4 of the third region 143 may be respectively arranged to face the first subgroup 113A, the second subgroup 113B, the third subgroup 113C, and the fourth subgroup 113D of the third pixel group 113. Therefore, the first lens 143L1 of the third region 143 may face all pixels of the first subgroup 113A of the third pixel group 113 in the third direction, the second lens 143L2 of the third region 143 may face all pixels of the second subgroup 113B of the third pixel group 113 in the third direction, the third lens 143L3 of the third region 143 may face all pixels of the third subgroup 113C of the third pixel group 113 in the third direction, and the fourth lens 143L4 of the third region 143 may face all pixels of the fourth subgroup 113D of the third pixel group 113 in the third direction.

[0083] The first lens 144L1, the second lens 144L2, the third lens 144L3, and the fourth lens 144L4 of the fourth region 144 may be respectively arranged to face the first subgroup 114A, the second subgroup 114B, the third subgroup 114C, and the fourth subgroup 114D of the fourth pixel group 114. Therefore, the first lens 144L1 of the fourth region 144 may face all pixels of the first subgroup 114A of the fourth pixel group 114 in the third direction, the second lens 144L2 of the fourth region 144 may face all pixels of the second subgroup 114B of the fourth pixel group 114 in the third direction, the third lens 144L3 of the fourth region 144 may face all pixels of the third subgroup 114C of the fourth pixel group 114 in the third direction, and the fourth lens 144L4 of the fourth region 144 may face all pixels of the fourth subgroup 114D of the fourth pixel group 114 in the third direction.

[0084] The plurality of lenses of the nanophotonic lens array 140 may converge incident light on corresponding subgroups. For example, each of the first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 of the first region 141 may converge incident light on corresponding subgroups among the first subgroup 111A, the second subgroup 111B, the third subgroup 111C, and the fourth subgroup 111D of the first pixel group 111. For example, among the light converged by the first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 of the first region 141, green light may pass only through the first color filter 121, and may reach the first subgroup 111A, the second subgroup 111B, the third subgroup 111C, and the fourth subgroup 111D of the first pixel group 111, respectively.

[0085] Each of the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 of the second region 142 may focus incident light on a corresponding subgroup among the first subgroup 112A, the second subgroup 112B, the third subgroup 112C, and the fourth subgroup 112D of the second pixel group 112. For example, among the light focused by the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 of the second region 142, blue light may pass only through the second color filter 122, and may reach the first subgroup 112A, the second subgroup 112B, the third subgroup 112C, and the fourth subgroup 112D of the second pixel group 112, respectively.

[0086] Each of the first lens 143L1, the second lens 143L2, the third lens 143L3, and the fourth lens 143L4 of the third region 143 may converge incident light on a corresponding subgroup among the first subgroup 113A, the second subgroup 113B, the third subgroup 113C, and the fourth subgroup 113D of the third pixel group 113. Specifically, among the light converged by the first lens 143L1, the second lens 143L2, the third lens 143L3, and the fourth lens 143L4 of the third region 143, red light may pass only through the third color filter 123 and may reach the first subgroup 113A, the second subgroup 113B, the third subgroup 113C, and the fourth subgroup 113D of the third pixel group 113, respectively.

[0087] Each of the first lens 144L1, the second lens 144L2, the third lens 144L3, and the fourth lens 144L4 of the fourth region 144 may converge incident light on a corresponding subgroup among the first subgroup 114A, the second subgroup 114B, the third subgroup 114C, and the fourth subgroup 114D of the fourth pixel group 114. Specifically, among the light converged by the first lens 144L1, the second lens 144L2, the third lens 144L3, and the fourth lens 144L4 of the fourth region 144, green light may pass only through the fourth color filter 124 and may reach the first subgroup 114A, the second subgroup 114B, the third subgroup 114C, and the fourth subgroup 114D of the fourth pixel group 114, respectively.

[0088] Each of the multiple lenses in the nanophotonic lens array 140 may have a nano-pattern structure configured to converge incident light. For example, each of the multiple lenses in the nanophotonic lens array 140 may include multiple nanostructures NPs periodically arranged in two dimensions along a first direction and a second direction to change the phase of the incident light. According to an embodiment, one or more of the shapes, sizes (width, height), arrangement periods, arrangement types, etc. of the multiple nanostructure NPs may be determined so that the light just after passing through each of the multiple lenses may have a certain phase distribution. The focal length of the light after passing through each of the multiple lenses may be determined based on the phase distribution. The term "arrangement period" may refer to the period between two adjacent nanostructure NPs, and therefore, the term "period" may be used instead of "arrangement period".

[0089] The nanostructure NP may be a nanocolumn, and the cross-sectional width or diameter of the nanostructure NP may have a sub-wavelength size. Sub-wavelength refers to a wavelength that is smaller than the wavelength band of light focused by the nanophotonic lens array 140. In the example case where the incident light is visible light, the cross-sectional diameter of the nanostructure NP may be smaller than, for example, 400 nm, 300 nm, or 200 nm. The height of the nanostructure NP may be about 300 nm to about 1500 nm, which is larger than the cross-sectional diameter of the nanostructure.

[0090] The nanostructure NP may include a material having a relatively higher refractive index than the peripheral material and a relatively lower absorptivity in the visible light band than the peripheral material. Here, the peripheral material may refer to the periphery of the nanostructure NP or the material surrounding the nanostructure NP. For example, the nanostructure NP may include c-Si, p-Si, a-Si and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO 2 、SiN 3 、ZnS、ZnSe、Si 3 N 4 The periphery of the nanostructure NP may be filled with a dielectric material DL, which has a relatively lower refractive index than the nanostructure NP and a relatively lower absorptivity in the visible light band than the peripheral material. For example, the periphery of the nanostructure NP may be filled with siloxane-based spin-on glass (SOG), SiO 2 、Si 3 N 4 、Al 2 O 3 , air, etc.

[0091] The refractive index of the high refractive index nanostructure NP relative to light of about 630nm wavelength can be about 2.0 or greater, and the refractive index of the low refractive index dielectric material DL relative to light of about 630nm wavelength can be about 1.0 to about 2.0 or less. In addition, the difference between the refractive index of the nanostructure NP and the refractive index of the dielectric material DL can be about 0.5 or greater. The nanostructure NP having a refractive index difference with the refractive index of the peripheral material can change the phase of the light passing through the nanostructure NP. The phase change of the light passing through the nanostructure NP is caused by the phase delay caused by the sub-wavelength shape size of the nanostructure NP, wherein the degree of phase delay can be determined based on the shape, size and / or arrangement period of the nanostructure NP.

[0092] The multiple lenses of the nanophotonic lens array 140 may respectively have nano-pattern structures with similar arrangement types of multiple nanostructures NP. For example, the multiple lenses may have the same number of nanostructures NP. Figure 5 An example is shown in which a plurality of nanostructures NP are arranged two-dimensionally in a 4×4 array along the first direction and the second direction in each of the plurality of lenses, but the invention is not limited thereto. For example, nanostructures NP arranged in a 3×3 array or a 5×5 array or a larger array may be arranged two-dimensionally in each of the plurality of lenses.

[0093] In addition, Figure 5 In the embodiment, the rectangular grating indicated by the thin solid line shown in each of the plurality of lenses is for easy understanding of the arrangement of the nanostructure NP, rather than being an actual element of the nanophotonic lens array 140. The arrangement of the nanostructure NP may be based on Figure 5 The rectangular grating shown is designed. Figure 5 An example of a rectangular grating formed in a 4×4 matrix along the first and second directions is shown, but the shape of the grating arranged with nanostructures NP is not limited thereto and various options can be made. For example, the grating arranged with nanostructures NP can be formed as a tetragonal lattice or a radial lattice in a diagonal direction.

[0094] Figure 5It is also shown that the nanostructure NP at the same position in the multiple lenses of the nanophotonic lens array 140 has the same size (width or diameter), but one or more embodiments are not limited thereto. For example, the width and diameter of the nanostructure NP arranged in the first lens 141L1, the second lens 141L2, the third lens 141L3 and the fourth lens 141L4 in the first lens region 141 are determined in consideration of the focal length of green light, and the width and diameter of the nanostructure NP arranged in the first lens 144L1, the second lens 144L2, the third lens 144L3 and the fourth lens 144L4 in the fourth lens region 144. In addition, the width and diameter of the nanostructure NP arranged in the first lens 142L1, the second lens 142L2, the third lens 142L3 and the fourth lens 142L4 in the second lens region 142 are determined in consideration of the focal length of blue light. In addition, the width and diameter of the nanostructure NP arranged in the first lens 143L1 , the second lens 143L2 , the third lens 143L3 , and the fourth lens 143L4 of the third lens region 143 may be determined in consideration of the focal length of red light.

[0095] According to an embodiment, in order to make each of the multiple lenses in the nanophotonic lens array 140 converge the incident light, the nanostructure NP can be configured so that the transmitted light just after passing through each of the multiple lenses can have a convex phase distribution. To this end, among the multiple nanostructure NPs, the nanostructure NP arranged at the central area in each of the multiple lenses can have the largest width or diameter, and the width or diameter of the nanostructure NP can decrease as it moves away from the center of each of the multiple lenses. In the example case where the nanostructure NP is arranged in a 4×4 array in each of the multiple lenses, the widths or diameters of the four nanostructure NPs at the center portion can be equal to each other, and the widths or diameters of the remaining twelve nanostructure NPs arranged along the edge can be smaller than the widths or diameters of the four nanostructure NPs at the center portion.

[0096] However, the nanostructure NP arranged in an area with a relatively small phase delay does not have to have a relatively small diameter. In the example case where the phase delay in a certain area is 3π, the phase delay is optically the same as the π remaining after removing 2π. Therefore, in the case where the diameter of the nanostructure NP is too small and difficult to manufacture, the width or diameter of the nanostructure NP can be selected to achieve a delay phase of 2π. For example, in the case where the width or diameter of the nanostructure NP for achieving a phase delay of 0.5π is too small, the width or diameter of the nanostructure NP can be selected to achieve a phase delay of 2.5π.

[0097] In addition, since each of the multiple lenses in the nanophotonic lens array 140 focuses the incident light on the multiple pixels in the corresponding subgroup, an automatic focusing signal can be obtained according to the difference between the output signals of adjacent pixels in one subgroup. For example, an automatic focusing signal in the first direction can be generated according to the difference between the output signal from the first pixel Px1 and the output signal from the second pixel Px2, the difference between the output signal from the third pixel Px3 and the output signal from the fourth pixel Px4, or the difference between the sum of the output signals from the first pixel Px1 and the third pixel Px3 and the sum of the output signals from the second pixel Px2 and the fourth pixel Px4. In addition, an automatic focusing signal in the second direction can be generated according to the difference between the output signal from the first pixel Px1 and the output signal from the third pixel Px3, the difference between the output signal from the second pixel Px2 and the output signal from the fourth pixel Px4, or the difference between the sum of the output signals from the first pixel Px1 and the second pixel Px2 and the sum of the output signals from the third pixel Px3 and the fourth pixel Px4.

[0098] A general image signal can be obtained in a variety of ways according to an image processing algorithm. According to an embodiment, the output from each pixel in the first pixel group 111 can be regarded as an independent green image signal, the output from each pixel in the second pixel group 112 can be regarded as an independent blue image signal, the output from each pixel in the third pixel group 113 can be regarded as an independent red image signal, and the output from each pixel in the fourth pixel group 114 can be regarded as an independent green image signal. In this case, 16 independent image signals can be obtained from one pixel group.

[0099] According to another embodiment, the sum of the outputs from the pixels arranged in one subgroup may be considered as one image signal. For example, the outputs from the pixels in the first subgroup 111A of the first pixel group 111 may be summed to generate one green image signal, the outputs from the pixels in the second subgroup 111B may be summed to generate one green image signal, the outputs from the pixels in the third subgroup 111C may be summed to generate one green image signal, and the outputs from the pixels in the fourth subgroup 111D may be summed to generate one green image signal. Likewise, outputs from pixels in each of first subgroup 112A, second subgroup 112B, third subgroup 112C, and fourth subgroup 112D of second pixel group 112 may be summed to generate a blue image signal, outputs from pixels in each of first subgroup 113A, second subgroup 113B, third subgroup 113C, and fourth subgroup 113D of third pixel group 113 may be summed to generate a red image signal, and outputs from pixels in each of first subgroup 114A, second subgroup 114B, third subgroup 114C, and fourth subgroup 114D of fourth pixel group 114 may be summed to generate a green image signal. In this case, four independent image signals may be obtained from one pixel group.

[0100] According to another embodiment, the sum of the outputs from the pixels arranged in one pixel group may be regarded as one image signal. For example, the outputs from all the pixels in the first pixel group 111 may be summed to generate one green image signal, the outputs from all the pixels in the second pixel group 112 may be summed to generate one blue image signal, the outputs from all the pixels in the third pixel group 113 may be summed to generate one red image signal, and the outputs from all the pixels in the fourth pixel group 114 may be summed to generate one green image signal. In this case, one independent image signal may be obtained from one pixel group.

[0101] In the example case where the arrangement of the nanostructure NP is the same in all lenses of the nanophotonic lens array 140, the contrast ratio of the autofocus signal with respect to the blue light may be reduced because the wavelength of the blue light is shorter than the wavelength of the red light and the wavelength of the green light. According to an embodiment, in order to improve the contrast ratio of the autofocus signal with respect to the blue light having the shortest wavelength, the arrangement period of the plurality of nanostructure NPs in the lenses arranged in the second region 142 corresponding to the second color filter 122 as the blue color filter among the lenses in the nanophotonic lens array 140 may be set to be smaller than the arrangement period of the plurality of nanostructure NPs in the other lenses.

[0102] Reference Figure 5, for example, in each of the first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 of the first region 141, a plurality of nanostructures NP may be periodically arranged with a 1x arrangement period P1x along the first direction and a 1y arrangement period P1y along the second direction. In the example case where the plurality of nanostructures NP are arranged in a square grating, the 1x arrangement period P1x and the 1y arrangement period P1y may be equal to each other. However, in the example case where the plurality of nanostructures NP are arranged in a rectangular grating, the 1x arrangement period P1x and the 1y arrangement period P1y may be different from each other. In each of the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 of the second region 142, a plurality of nanostructures NP may be periodically arranged with a 2x arrangement period P2x along the first direction and a 2y arrangement period P2y along the second direction. In each of the first lens 143L1, the second lens 143L2, the third lens 143L3, and the fourth lens 143L4 of the third region 143, the plurality of nanostructures NP may be periodically arranged with a 3x arrangement period P3x along the first direction and a 3y arrangement period P3y along the second direction. In each of the first lens 144L1, the second lens 144L2, the third lens 144L3, and the fourth lens 144L4 of the fourth region 144, the plurality of nanostructures NP may be periodically arranged with a 4x arrangement period P4x along the first direction and a 4y arrangement period P4y along the second direction. According to the arrangement type of the plurality of nanostructures NP, the 2x arrangement period P2x and the 2y arrangement period P2y may be the same or different from each other, the 3x arrangement period P3x and the 3y arrangement period P3y may be the same or different from each other, and the 4x arrangement period P4x and the 4y arrangement period P4y may be the same or different from each other. Here, 1x may be referred to as a first x arrangement period, and 1y may be referred to as a first y arrangement period, 2x may be referred to as a second x arrangement period, and 2y may be referred to as a second y arrangement period, 3x may be referred to as a third x arrangement period, and 3y may be referred to as a third y arrangement period, 4x may be referred to as a fourth x arrangement period, and 4y may be referred to as a fourth y arrangement period.

[0103] According to an embodiment, the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x in the first direction are equal to each other, and the 2x arrangement period P2x may be smaller than the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x (i.e., P2x<P1x=P3x=P4x). Here, the period between the nanostructures may be defined as the distance between the centers in the cross section of the nanostructures. For example, the 2x arrangement period P2x may be about 0.8 times or more and about 0.95 times or less than the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x. For example, (0.8*P1x)≤P2x≤(0.95*P1x). Likewise, the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y in the second direction may be equal to each other, and the 2y arrangement period P2y may be smaller than the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y (i.e., P2y<P1y=P3y=P4y). For example, the 2y arrangement period P2y may be greater than or equal to about 0.8 times and less than or equal to about 0.95 times the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y. For example, (0.8*P1y)≤P2y≤(0.95*P1y).

[0104] According to another embodiment, since the wavelength of green light is shorter than that of red light, in order to increase the contrast of the autofocus signal with respect to green light, in the first region 141 and the fourth region 144 corresponding to the first color filter 121 and the fourth color filter 124, which are green color filters, the 1x, 1y, 4x, and 4y arrangement periods P1x, P1y, P4x, and P4y of the plurality of nanostructures NP in the lens can be set to be smaller than the 3x and 3y arrangement periods P3x and P3y of the plurality of nanostructures NP in the lens arranged in the third region 143 corresponding to the third color filter 123, which is a red color filter (i.e., P2x < P1x = P4x < P3x, P2y < P1y = P4y < P3y). In other words, the 3x and 3y arrangement periods P3x and P3y of the plurality of nanostructures NP in the third region 143 corresponding to the light of the third band (i.e., red light) are the largest, the 1x, 1y, 4x, and 4y arrangement periods P1x, P1y, P4x, and P4y of the plurality of nanostructures NP in the first region 141 and the fourth region 144 corresponding to the light of the first band, which is shorter than the third band (i.e., green light), are smaller than the 3x and 3y arrangement periods P3x and P3y, and the 2x and 2y arrangement periods P2x and P2y of the plurality of nanostructures NP in the second region 142 corresponding to the light of the second band, which is shorter than the first band (i.e., blue light), can be the smallest. For example, the 1x arrangement period P1x and the 4x arrangement period P4x can be respectively more than about 0.9 times and less than 1 time the 3x arrangement period P3x, and the 1y arrangement period P1y and the 4y arrangement period P4y can be respectively more than about 0.9 times and less than 1 time the 3y arrangement period P3y.

[0105] According to an embodiment, even in an example case where light of uniform intensity is incident on the entire area of the image sensor, the total intensity of the incident light incident on each of the first pixel group 111, the second pixel group 112, the third pixel group 113, and the fourth pixel group 114 can be different from each other. In addition, in each of the first pixel group 111, the second pixel group 112, and the fourth pixel group 114, the intensity distribution of the incident light incident on the plurality of pixels may not be uniform. According to an embodiment, in order to make the total amount of the incident light incident on the first pixel group 111, the second pixel group 112, the third pixel group 113, and the fourth pixel group 114 relatively uniform, and in order to make the intensity distribution of the incident light incident on the pixels arranged in the first pixel group 111, the second pixel group 112, and the fourth pixel group 114 relatively uniform, the positions of the lenses in the first region 141, the second region 142, and the fourth region 144 can be adjusted.

[0106] For example, in the first region 141, the first lens 141L1 and the second lens 141L2 may be arranged to be away from each other in the first direction, and the third lens 141L3 and the fourth lens 141L4 may be arranged to be away from each other in the first direction. In this case, the gap G1x1 in the first direction between the nanostructures arranged on the edge adjacent to the second lens 141L2 in the first direction among the plurality of nanostructures in the first lens 141L1 and the nanostructures arranged on the edge adjacent to the first lens 141L1 in the first direction among the plurality of nanostructures in the second lens 141L2 may be greater than the 1x arrangement period P1x. Here, the gap between the nanostructures may be defined as the distance between the centers in the cross section of the nanostructures. In addition, the third lens 141L3 may be aligned while matching with the first lens 141L1 in the second direction, and the fourth lens 141L4 may be aligned while matching with the second lens 141L2 in the second direction. Therefore, a gap G1x2 in the first direction between a nanostructure arranged on an edge adjacent to the fourth lens 141L4 in the first direction among a plurality of nanostructures in the third lens 141L3 and a nanostructure arranged on an edge adjacent to the third lens 141L3 in the first direction among a plurality of nanostructures in the fourth lens 141L4 may be greater than the 1x arrangement period P1x. The gap G1x1 and the gap G1x2 may be equal to each other, for example, may be 1 or more and 1.4 or less than the 1x arrangement period P1x, or less.

[0107] In the first region 141, the distance between the first lens 141L1 and the third lens 141L3 in the second direction and the distance between the second lens 141L2 and the fourth lens 141L4 in the second direction may not be adjusted. In this case, the gap G1y1 in the second direction between the nanostructures arranged on the edge adjacent to the third lens 141L3 in the second direction among the plurality of nanostructures in the first lens 141L1 and the nanostructures arranged on the edge adjacent to the first lens 141L1 in the second direction among the plurality of nanostructures in the third lens 141L3 may be equal to the 1y arrangement period P1y. Therefore, all the nanostructures in the first lens 141L1 and the third lens 141L3 may be arranged at constant intervals along the second direction. Likewise, a gap G1y2 in the second direction between a nanostructure arranged on an edge adjacent to the fourth lens 141L4 in the second direction among a plurality of nanostructures in the second lens 141L2 and a nanostructure arranged on an edge adjacent to the second lens 141L2 in the second direction among a plurality of nanostructures in the fourth lens 141L4 may be equal to a 1y arrangement period P1y. Therefore, all nanostructures in the second lens 141L2 and the fourth lens 141L4 may be arranged at a constant interval along the second direction. In addition, the first lens 141L1 may be aligned while matching with the second lens 141L2 in the first direction, and the third lens 141L3 may be aligned while matching with the fourth lens 141L4 in the first direction.

[0108] In the second region 142, the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 may be aligned adjacent to the center of the second region 142. In other words, the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 may be disposed adjacent to each other.

[0109] In this case, a gap G2x1 in the first direction between a nanostructure arranged on an edge adjacent to the second lens 142L2 among a plurality of nanostructures in the first lens 142L1 and a nanostructure arranged on an edge adjacent to the first lens 142L1 among a plurality of nanostructures in the second lens 142L2 may be smaller than the 2x arrangement period P2x. In addition, the third lens 142L3 may be aligned while matching with the first lens 142L1 in the second direction, and the fourth lens 142L4 may be aligned while matching with the second lens 142L2 in the second direction. Therefore, a gap G2x2 in the first direction between a nanostructure arranged on an edge adjacent to the fourth lens 142L4 among a plurality of nanostructures in the third lens 142L3 and a nanostructure arranged on an edge adjacent to the third lens 142L3 among a plurality of nanostructures of the fourth lens 142L4 may be smaller than the 2x arrangement period P2x. The gap G2x1 and the gap G2x2 may be equal to each other, for example, may be approximately 0.6 times or more and less than 1 times, or greater than, the 2x arrangement period P2x.

[0110] In addition, a gap G2y1 in the second direction between a nanostructure arranged on an edge adjacent to the third lens 142L3 among the plurality of nanostructures in the first lens 142L1 and a nanostructure arranged on an edge adjacent to the first lens 142L1 among the plurality of nanostructures in the third lens 142L3 may be smaller than the 2y arrangement period P2y. The second lens 142L2 may be aligned while matching with the first lens 142L1 in the first direction, and the fourth lens 142L4 may be aligned while matching with the third lens 142L3 in the first direction. Therefore, a gap G2y2 in the second direction between a nanostructure arranged on an edge adjacent to the fourth lens 142L4 among the plurality of nanostructures in the second lens 142L2 and a nanostructure arranged on an edge adjacent to the second lens 142L2 among the plurality of nanostructures in the fourth lens 142L4 may be smaller than the 2y arrangement period P2y. The gap G2y1 and the gap G2y2 may be equal to each other, for example, may be approximately 0.6 times or more and less than 1 times, or greater than, the 2y arrangement period P2y.

[0111] In the third region 143, the positions of the first lens 143L1, the second lens 143L2, the third lens 143L3, and the fourth lens 143L4 may not be adjusted. In this case, all nanostructures in the first lens 143L1 and the second lens 143L2 are arranged at constant intervals along the first direction, all nanostructures in the third lens 143L3 and the fourth lens 143L4 are arranged at constant intervals along the first direction, all nanostructures in the first lens 143L1 and the third lens 143L3 are arranged at constant intervals along the second direction, and all nanostructures in the second lens 143L2 and the fourth lens 143L4 are arranged at constant intervals along the second direction. In addition, the first lens 143L1 may be arranged to match the third lens 143L3 in the second direction, the second lens 143L2 may be arranged to match the fourth lens 143L4 in the second direction, the first lens 143L1 may be arranged to match the second lens 143L2 in the first direction, and the third lens 143L3 may be arranged to match the fourth lens 143L4 in the first direction.

[0112] In other words, a gap G3x1 in the first direction between a nanostructure arranged at an edge adjacent to the second lens 143L2 in the first direction among the plurality of nanostructures in the first lens 143L1 and a nanostructure arranged at an edge adjacent to the first lens 143L1 in the first direction among the plurality of nanostructures in the second lens 143L2 may be equal to the 3x arrangement period P3x, and a gap G3x2 in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens 143L4 in the first direction among the nanostructures in the third lens 143L3 and a nanostructure arranged at an edge adjacent to the third lens 143L3 in the first direction among the plurality of nanostructures in the fourth lens 143L4 may be equal to the 3x arrangement period P3x. In addition, a gap G3y1 in the second direction between a nanostructure arranged at an edge adjacent to the third lens 143L3 in the second direction among the multiple nanostructures in the first lens 143L1 and a nanostructure arranged at an edge adjacent to the first lens 143L1 in the second direction among the multiple nanostructures in the third lens 143L3 may be equal to the 3y arrangement period P3y, and a gap G3y2 in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens 143L4 in the second direction among the nanostructures in the second lens 143L2 and a nanostructure arranged at an edge adjacent to the second lens 143L2 in the second direction among the multiple nanostructures in the fourth lens 143L4 may be equal to the 3y arrangement period P3y.

[0113] In the fourth region 144, the first lens 144L1 and the third lens 144L3 may be arranged away from each other in the second direction, and the second lens 144L2 and the fourth lens 144L4 may be arranged away from each other in the second direction. In this case, a gap G4y1 in the second direction between a nanostructure arranged at an edge adjacent to the third lens 144L3 in the second direction among a plurality of nanostructures in the first lens 144L1 and a nanostructure arranged at an edge adjacent to the first lens 144L1 in the second direction among a plurality of nanostructures in the third lens 144L3 may be greater than the 4y arrangement period P4y. The second lens 144L2 may be aligned while matching with the first lens 144L1 in the first direction, and the fourth lens 144L4 may be aligned while matching with the third lens 144L3 in the first direction. Therefore, a gap G4y2 in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens 144L4 in the second direction among a plurality of nanostructures in the second lens 144L2 and a nanostructure arranged at an edge adjacent to the second lens 144L2 in the second direction among a plurality of nanostructures in the fourth lens 144L4 may be greater than the 4y arrangement period P4y. The gap G4y1 and the gap G4y2 may be equal to each other, for example, may be greater than 1 times and less than about 1.4 times the 4y arrangement period P4y, or less.

[0114] In the fourth region 144, the distance between the first lens 144L1 and the second lens 144L2 in the first direction and the distance between the third lens 144L3 and the fourth lens 144L4 in the first direction may not be adjusted. In this case, a gap G4x1 in the first direction between a nanostructure arranged at an edge adjacent to the second lens 144L2 in the first direction among a plurality of nanostructures in the first lens 144L1 and a nanostructure arranged at an edge adjacent to the first lens 144L1 in the first direction among a plurality of nanostructures in the second lens 144L2 may be equal to the 4x arrangement period P4x. Therefore, all the nanostructures in the first lens 144L1 and the second lens 144L2 may be arranged at a constant interval along the first direction. Likewise, a gap G4x2 in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens 144L4 in the first direction among a plurality of nanostructures in the third lens 144L3 and a nanostructure arranged at an edge adjacent to the third lens 144L3 in the first direction among a plurality of nanostructures in the fourth lens 144L4 may be equal to a 4x arrangement period P4x. Therefore, all nanostructures in the third lens 144L3 and the fourth lens 144L4 may be arranged at a constant interval along the first direction. In addition, the first lens 141L1 may be aligned while matching with the third lens 144L3 in the second direction, and the second lens 144L2 may be aligned while matching with the fourth lens 144L4 in the second direction.

[0115] Therefore, the arrangement of the nanostructures in the fourth region 144 is rotated by 90 degrees relative to the arrangement of the nanostructures in the first region 141. This is based on the arrangement structures in the second region 142 and the third region 143 around the first region 141 and the fourth region 144. For example, the second region 142 corresponding to the blue pixel group is arranged around the first direction of the first region 141, and the third region 143 corresponding to the red pixel group is arranged around the second direction of the first region 141, but the third region 143 corresponding to the red pixel group is arranged around the first direction of the fourth region 144, and the second region 142 corresponding to the blue pixel group is arranged around the second direction of the fourth region 144.

[0116] Fig. 6A is a plan view showing the structure of one unit pattern in a nanophotonic lens array according to a comparative example, and Figure 6B is a diagram showing an example of phase distribution of transmitted light after passing through a nanophotonic lens array according to a comparative example. Fig. 6A, in the nanophotonic lens array 40 according to the comparative example, the nanostructures are arranged at a constant period over the entire area of ​​the nanophotonic lens array 40, and the nanostructures are arranged at constant intervals along the first direction and the second direction. In other words, the arrangement periods of the nanostructures in the first region 41, the second region 42, the third region 43, and the fourth region 44 of the nanophotonic lens array 40 are equal to each other, and all the lenses in the first region 41, the second region 42, the third region 43, and the fourth region 44 are arranged in the first direction and the second direction to match each other.

[0117] Figure 6B Shown by along Fig. 6A The phase distribution of the transmitted light on the cross section obtained by cutting the central part of the first region 41 and the second region 42 along the line AA'. For example, Figure 6B 4 shows the phase distribution of green light in the light transmitted through the first region 41 and the phase distribution of blue light in the light transmitted through the second region 42. Figure 6B As shown, the phase distribution of green light passing through the first region 41 and the phase distribution of blue light passing through the second region 42 may have a convex lens shape. In addition, in the example case where the widths or diameters of the nanostructures NP arranged at corresponding positions in the first region 41 and the second region 42 are equal to each other, the phase distribution of blue light having a wavelength shorter than the wavelength of green light may be more convex than the phase distribution of green light having a wavelength longer than the wavelength of blue light. In order to make the phase distribution of green light and the phase distribution of blue light have the same convex shape, the width or diameter of the nanostructure NP in the second region 42 may be selected to be different from the width or diameter of the corresponding nanostructure NP in the first region 41.

[0118] Figure 7 is a diagram showing simulation results of an example of intensity distribution of light incident on a plurality of pixels on the sensor substrate 110 in the case of using the nanophotonic lens array 40 according to the comparative example. Figure 7 The intensity distribution shown represents the intensity of light incident on each pixel in the sensor substrate 110 after passing through the color filter layer 120 when light with uniform intensity is incident on the nanophotonic lens array 40. Figure 7 , light may be incident with relatively uniform intensity in the first pixel group 111, the third pixel group 113, and the fourth pixel group 114. However, in the second pixel group 112, the intensity of the incident light is not uniform.

[0119] Fig. 8A is a plan view showing the structure of one unit pattern in the nanophotonic lens array according to the first example (Example 1), and Figure 8Bis a diagram showing the phase distribution of the transmitted light after passing through the nanophotonic lens array according to the first example 1. In the first example, in the first region 141, the third region 143, and the fourth region 144, the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x of the nanostructures are equal to each other, and the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y are equal to each other, and in the second region 142, the 2x arrangement period P2x of the nanostructures is set to be smaller than the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x, and the 2y arrangement period P2y is set to be smaller than the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y. In the first example, the positions of the lenses in the first to fourth regions 141, 142, 143, and 144 are not adjusted.

[0120] Figure 8B Shown along Fig. 8A Phase distribution of the transmitted light on the cross section of the center of the first region 141 and the second region 142 intercepted by the line BB'. For example, Figure 8B The phase distribution of green light in the light transmitted through the first region 141 and the phase distribution of blue light in the light transmitted through the second region 142 are shown. Figure 8B , since the 2x arrangement period P2x and the 2y arrangement period P2y are reduced more, in the comparative example, the phase distribution of the blue light after passing through the second region 142 may be more convex than the phase distribution of the blue light after passing through the second region 42. In addition, there may be a gap between two adjacent phase distributions of the blue light.

[0121] Fig. 9 1 is a diagram showing a simulation result of an example of the intensity distribution of light incident on a plurality of pixels on the sensor substrate 110 in the case of using the nanophotonic lens array according to the first example. In the example case where the phase distribution of blue light is more convex as in the first example, the contrast of the autofocus signal with respect to the blue light can be improved. However, as Fig. 9 As shown, uniformity of light incident on each pixel in the first pixel group 111, the second pixel group 112, and the fourth pixel group 114 may be reduced.

[0122] Fig. 10A is a plan view showing the structure of one unit pattern in a nanophotonic lens array according to a second example (Example 2), and Fig. 10B is a diagram showing an example of the phase distribution of the transmitted light after passing through the nanophotonic lens array of the second example. In the second example, as described above with reference to Figure 5 The positions of the lenses in the first to fourth regions 141 , 142 , 143 , and 144 of the first example are further adjusted.

[0123] Fig. 10B Shown along Fig. 10A Phase distribution of the transmitted light on the cross section of the center of the first region 141 and the second region 142 intercepted by the line CC'. For example, Fig. 10B The phase distribution of green light in the light transmitted through the first region 141 and the phase distribution of blue light in the light transmitted through the second region 142 are shown. Fig. 10B , the phase distribution of the blue light after passing through the second region 142 may be the same as the phase distribution of the blue light after passing through the second region 142 in the first example. Moreover, two adjacent phase distributions of the blue light may be connected without a gap.

[0124] Fig.11 is a diagram showing a simulation result of an example of the intensity distribution of light incident on a plurality of pixels on the sensor substrate 110 in the case of using the nanophotonic lens array according to the second example. Fig.11 In the example case of using the nanophotonic lens array according to the second example, light having a relatively uniform intensity may be incident on pixels in the first to fourth pixel groups 111 , 112 , 113 , and 114 .

[0125] Fig.12 is a table showing examples of contrast and brightness differences between channels in the comparative example, the first embodiment, and the second embodiment. Fig.12 In the comparative example, the contrast of the autofocus signal with respect to red light is about 2.41, the contrast of the autofocus signal with respect to green light is about 2.61, and the contrast of the autofocus signal with respect to blue light is about 2.16. Therefore, the contrast of the autofocus signal with respect to blue light is less than the contrast with respect to red light and green light. The average contrast of the autofocus signal is about 2.39. In addition, the average brightness difference between the red channel, the green channel, and the blue channel is about 25.6%.

[0126] In the first example (Example 1), the contrast of the autofocus signal can be increased more than that of the comparative example. For example, the contrast of the autofocus signal relative to red light is about 2.44, the contrast of the autofocus signal relative to green light is about 2.75, and the contrast of the autofocus signal relative to blue light is about 2.36. Therefore, the contrast of the autofocus signal relative to blue light increases the most. The average contrast of the autofocus signal is about 2.51. In contrast, the brightness difference between the channels may be degraded compared to the comparative example. For example, the average brightness difference between the red channel, the green channel, and the blue channel is about 47.34%.

[0127] In the second example (Example 2), the contrast of the autofocus signal can be almost similar to that of the first example. For example, the contrast of the autofocus signal relative to red light is the same as that of the first example, the contrast of the autofocus signal relative to green light is about 2.76, which is slightly improved compared with the first example, and the contrast of the autofocus signal relative to blue light is the same as that of the first example. The average contrast of the autofocus signal is about 2.52. Moreover, the brightness difference between the channels can be greatly improved compared with the first example, and can also be improved compared with the comparative example. For example, the average brightness difference between the red channel, the green channel, and the blue channel is about 11.58%.

[0128] Fig.13 1 is a plan view schematically showing an example structure of a unit pattern in a nanophotonic lens array 140 according to another embodiment. Figure 5 After adjusting the 1x arrangement period P1x, 1y arrangement period P1y, 2x arrangement period P2x, 2y arrangement period P2y, 3x arrangement period P3x, 3y arrangement period P3y, 4x arrangement period P4x and 4y arrangement period P4y of the nanostructures in the first to fourth regions 141, 142, 143 and 144, and the positions of the lenses in the first, second and fourth regions 141, 142 and 144, the difference between the brightness of the channels can be further adjusted. For example, the positions of the first lens 141L1, the second lens 141L2, the third lens 141L3 and the fourth lens 141L4 arranged in the first area 141, the positions of the first lens 142L1, the second lens 142L2, the third lens 142L3 and the fourth lens 142L4 arranged in the second area 142, the positions of the first lens 143L1, the second lens 143L2, the third lens 143L3 and the fourth lens 143L4 arranged in the third area 143, or the positions of the first lens 144L1, the second lens 144L2, the third lens 144L3 and the fourth lens 144L4 arranged in the fourth area 144 may be fine-tuned in the first direction or the second direction.

[0129] In this case, the gap G1x1 may be different from the gap G1x2 in the first region 141. In addition, the gap G1y1 and the gap G1y2 may also be different from the 1y arrangement period P1y. In addition, the gap G1y1 may also be different from the gap G1y2. Therefore, the first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 may be aligned so that the first lens 141L1, the second lens 141L2, the third lens 141L3, and the fourth lens 141L4 do not match each other in the first direction or the second direction. Even in this case, Figure 5For example, the gap G1x1 and the gap G1x2 may be greater than the 1x arrangement period P1x.

[0130] Likewise, in the second region 142, the gap G2x1 may be different from the gap G2x2, and the gap G2y1 may be different from the gap G2y2. Therefore, the first lens 142L1, the second lens 142L2, the third lens 142L3, and the fourth lens 142L4 may be arranged so as not to match each other in the first direction or the second direction. Even in this case, the gap G2x1 and the gap G2x2 may be smaller than the 2x arrangement period P2x, and the gap G2y1 and the gap G2y2 may be smaller than the 2y arrangement period P2y.

[0131] In addition, in the third region 143, at least one of the gap G3x1 and the gap G3x2 may not be equal to the 3x arrangement period P3x, and at least one of the gap G3y1 and the gap G3y2 may not be equal to the 3y arrangement period P3y. In this case, at least one of the gap G3x1 and the gap G3x2 may be greater than or less than the 3x arrangement period P3x, and at least one of the gap G3y1 and the gap G3y2 may be greater than or less than the 3y arrangement period P3y.

[0132] In addition, in the fourth region 144, the gap G4y1 may be different from the gap G4y2. The gap G4x1 may be different from the gap G4x2, and the gap G4x1 and the gap G4x2 may be different from the 4x arrangement period P4x. Therefore, the first lens 144L1, the second lens 144L2, the third lens 144L3, and the fourth lens 144L4 may be arranged so as not to match each other in the first direction or the second direction. Even in this case, Figure 5 For example, the gap G4x1 and the gap G4x2 may be greater than the 4y arrangement period P4y.

[0133] Fig.14A is a diagram showing a cross-sectional shape of a nanostructure at a central portion of the nanophotonic lens array 140, and Fig. 14B is a diagram showing the phase distribution of the transmitted light at the central portion of the nanophotonic lens array 140. Fig.14A, in the central portion of the nanophotonic lens array 140, each lens may have an effective refractive index distribution based on the center symmetry of each lens. Here, the effective refractive index may correspond to the ratio between the refractive index of the nanostructure in each lens and the refractive index of the peripheral material surrounding the nanostructure. The effective refractive index may be determined by the width or diameter of the nanostructure in the lens. Therefore, in each lens arranged on the central portion of the nanophotonic lens array 140, the nanostructure may have a width or diameter distribution based on the center symmetry of each lens. For example, the width or diameter of the nanostructure may be determined so that the effective refractive index is highest at the center of each lens and decreases as it moves away from the center of the lens.

[0134] Reference Fig. 14B , the phase distribution of the transmitted light after passing through each lens on the central portion of the nanophotonic lens array 140 may have a symmetrical convex lens shape. For example, at the center of each lens, the phase of the transmitted light may be the highest and may decrease in a concentric circle manner toward the peripheral portion.

[0135] Fig.15A is a diagram showing an example of a cross-sectional shape of a nanostructure of a peripheral portion of the nanophotonic lens array 140, and Fig. 15B is a diagram showing the phase distribution of the transmitted light in the peripheral portion of the nanophotonic lens array 140. Fig.15A , the incident light may be incident on the nanophotonic lens array 140 in an oblique manner at the peripheral portion of the nanophotonic lens array 140. Therefore, the lenses arranged on the peripheral portion of the nanophotonic lens array 140 may be configured to change the traveling direction of light incident at an oblique angle to a direction close to the vertical direction. Therefore, the distribution of the width and diameter of the nanostructures in the lenses arranged in the peripheral portion of the nanophotonic lens array 140 may be different from the nanostructures in the lenses arranged on the central portion of the nanophotonic lens array 140. For example, the nanostructures in the lenses arranged in the peripheral portion of the nanophotonic lens array 140 may be arranged to be asymmetrically distributed. In other words, considering the chief ray angle (CRA), the width or diameter of the nanostructures in each lens may be asymmetrically distributed. Specifically, the region with the highest effective refractive index in each lens may be shifted toward the central portion of the nanophotonic lens array 140.

[0136] Reference Fig. 15B, the phase peak of the transmitted light after passing through each lens arranged on the peripheral portion of the nanophotonic lens array 140 may be from the center of each lens toward the central portion of the nanophotonic lens array 140. Moreover, the phase distribution of the transmitted light may have an asymmetric shape based on the phase peak. In other words, the phase distributions based on both sides of the phase peak may be different from each other. For example, based on the phase peak, the inclination or amount of change of the phase distribution on the area near the central portion of the nanophotonic lens array 140 may be greater than the inclination or amount of change of the phase distribution on the area away from the central portion of the nanophotonic lens array 140. For example, the inclination or inclination angle θ1 of the first line segment S1 connecting the phase of the transmitted light at the first edge of each lens and the phase peak may be less than the inclination or inclination angle θ2 of the second line segment S2 connecting the phase of the transmitted light at the second edge and the phase peak.

[0137] As described above, even in the exemplary case where the width or diameter of the nanostructure is asymmetrically designed in consideration of the CRA of the incident light on the peripheral portion of the nanophotonic lens array 140, the above-mentioned reference numerals may be similarly applied. Figures 5 to 13 In other words, in the entire area of ​​the nanophotonic lens array 140, the 1x arrangement period P1x, 1y arrangement period P1y, 2x arrangement period P2x, 2y arrangement period P2y, 3x arrangement period P3x, 3y arrangement period P3y, 4x arrangement period P4x and 4y arrangement period P4y of the nanostructures in the first to fourth areas 141, 142, 143 and 144 can be kept constant. In addition, in the entire area of ​​the nanophotonic lens array 140, the gaps G1x1, G1x2, G1y1, G1y2, G2x1, G2x2, G2y1, G2y2, G3x1, G3x2, G3y1, G3y2, G4x1, G4x2, G4y1 and G4y2 can be kept constant.

[0138] Fig.16A is a cross-sectional view schematically showing an example structure of a central portion of a nanophotonic lens array 140 according to another embodiment. Fig.16A, the nanophotonic lens array 140 may have a multilayer structure of two or more layers. For example, the nanophotonic lens array 140 may include a first nanophotonic lens array 140a disposed on the planarization layer 130 and a second nanophotonic lens array 140b disposed on the first nanophotonic lens array 140a. The first nanophotonic lens array 140a may include a plurality of first nanostructures NPa, and the second nanophotonic lens array 140b may include a plurality of second nanostructures NPb on the plurality of first nanostructures NPa. On the central portion of the nanophotonic lens array 140, the width or diameter of the plurality of first nanostructures NPa and the width or diameter of the plurality of second nanostructures NPb may be symmetrical based on the center of each lens. For example, the width or diameter of each second nanostructure NPb may be equal to the width or diameter of the corresponding first nanostructure NPa disposed thereunder.

[0139] The above reference Figure 5 or Fig.13 The arrangement period or nanostructure in the described lens and the position of the lens can be applied to the first nanophotonic lens array 140a and the second nanophotonic lens array 140b in the same or similar manner. For example, the above description of the 1x arrangement period P1x, 1y arrangement period P1y, 2x arrangement period P2x, 2y arrangement period P2y, 3x arrangement period P3x, 3y arrangement period P3y, 4x arrangement period P4x, 4y arrangement period P4y of the nanostructures in the first to fourth regions 141, 142, 143 and 144 can be applied to the first nanophotonic lens array 140a and the second nanophotonic lens array 140b in the same manner. In addition, the above description about the gaps G1x1, G1x2, G1y1, G1y2, G2x1, G2x2, G2y1, G2y2, G3x1, G3x2, G3y1, G3y2, G4x1, G4x2, G4y1 and G4y2 can be applied to the first nanophotonic lens array 140a and the second nanophotonic lens array 140b in the same manner.

[0140] Fig. 16B is a cross-sectional view schematically showing an example structure of a peripheral portion of a nanophotonic lens array 140 according to another embodiment. Fig. 16B , considering the CRA of incident light on the peripheral portion of the nanophotonic lens array 140 , the widths or diameters of the plurality of first nanostructures NPa and the widths or diameters of the plurality of second nanostructures NPb may be asymmetrically designed.

[0141] Fig. 16C 1 is a cross-sectional view schematically showing an example structure of a peripheral portion of a nanophotonic lens array 140 according to another embodiment. Fig. 16C, each of the second nanostructures NPb may be shifted toward the central portion of the nanophotonic lens array 140 relative to the corresponding first nanostructure NPa disposed thereunder.

[0142] According to the embodiment, even if Fig. 16B and Fig. 16C In the example case of considering the CRA of incident light on the peripheral portion of the nanophotonic lens array 140, the above reference Figure 5 or Fig.13 The arrangement period of the nanostructures in the described lenses and the positions of the lenses can be applied to the first nanophotonic lens array 140a and the second nanophotonic lens array 140b in the same manner. Therefore, in the entire area of ​​the nanophotonic lens array 140, the above description of the 1x arrangement period P1x, 1y arrangement period P1y, 2x arrangement period P2x, 2y arrangement period P2y, 3x arrangement period P3x, 3y arrangement period P3y, 4x arrangement period P4x and 4y arrangement period P4y of the nanostructures in the first to fourth areas 141, 142, 143 and 144 can be applied to the first nanophotonic lens array 140a and the second nanophotonic lens array 140b in the same manner. In addition, in the entire area of ​​the nanophotonic lens array 140, the above description of the gaps G1x1, G1x2, G1y1, G1y2, G2x1, G2x2, G2y1, G2y2, G3x1, G3x2, G3y1, G3y2, G4x1, G4x2, G4y1 and G4y2 can be applied identically to the first nanophotonic lens array 1400a and the second nanophotonic lens array 1400b.

[0143] Fig.17 1 is a plan view schematically showing an example structure of a unit pixel array in a sensor substrate according to another embodiment. Fig.17 , the sensor substrate 210 may include a first pixel group 211, a second pixel group 212, a third pixel group 213, and a fourth pixel group 214 arranged in a 2×2 array. In addition, each of the first pixel group 211, the second pixel group 212, the third pixel group 213, and the fourth pixel group 214 may include a plurality of independent pixels grouped and arranged in a 2×2 array, for example, first to fourth pixels Px1, Px2, Px3, and Px4. Therefore, each of the first pixel group 211, the second pixel group 212, the third pixel group 213, and the fourth pixel group 214 may include four pixels. Fig.17 The first to fourth pixel groups 211 , 212 , 213 , and 214 of the illustrated sensor substrate 210 do not include separate subgroups, e.g. Figure 3 The first to fourth subgroups 111, 112, 113 and 114 of the sensor substrate 110 are shown. Fig.17Only one unit pixel array is shown, but multiple first pixel groups 211 and multiple second pixel groups 212 can be arranged alternately along the first direction, and multiple third pixel groups 213 and multiple fourth pixel groups 214 can be arranged alternately along the first direction in cross sections at different positions in a second direction perpendicular to the first direction.

[0144] Fig.18 is a plan view schematically showing an example structure of a unit pattern in a nanophotonic lens array according to another embodiment. Fig.18 , the nanophotonic lens array 240 may include a first region 241, a second region 242, a third region 243, and a fourth region 244 arranged in a 2×2 array. The first region 241 may be arranged to face the first pixel group 211 in the third direction, the second region 242 may be arranged to face the second pixel group 212 in the third direction, the third region 243 may be arranged to face the third pixel group 213 in the third direction, and the fourth region 244 may be arranged to face the fourth pixel group 214 in the third direction. Therefore, the first region 241 may face all four pixels in the first pixel group 211 in the third direction, the second region 242 may face all four pixels in the second pixel group 212 in the third direction, the third region 243 may face all four pixels in the third pixel group 213 in the third direction, and the fourth region 244 may face all four pixels in the fourth pixel group 214 in the third direction.

[0145] The first region 241, the second region 242, the third region 243, and the fourth region 244 may each include only one lens facing all four pixels in each of the first pixel group 211, the second pixel group 212, the third pixel group 213, and the fourth pixel group 214 corresponding thereto. In other words, each of the first region 241, the second region 242, the third region 243, and the fourth region 244 may function as one lens.

[0146] In addition, each of the first region 241, the second region 242, the third region 243, and the fourth region 244 may include a plurality of nanostructures periodically arranged in a two-dimensional array to converge incident light. In the first region 241, the plurality of nanostructures may be periodically arranged with a 1x arrangement period P1x along the first direction and a 1y arrangement period P1y along the second direction, in the second region 242, the plurality of nanostructures may be periodically arranged with a 2x arrangement period P2x along the first direction and a 2y arrangement period P2y along the second direction, in the third region 243, the plurality of nanostructures may be periodically arranged with a 3x arrangement period P3x along the first direction and a 3y arrangement period P3y along the second direction, and in the fourth region 244, the plurality of nanostructures may be periodically arranged with a 4x arrangement period P4x along the first direction and a 4y arrangement period P4y along the second direction. According to an embodiment, the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x are equal to each other, and the 2x arrangement period P2x may be smaller than the 1x arrangement period P1x, the 3x arrangement period P3x, and the 4x arrangement period P4x. In addition, the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y may be equal to each other, and the 2y arrangement period P2y may be smaller than the 1y arrangement period P1y, the 3y arrangement period P3y, and the 4y arrangement period P4y. According to the arrangement type of the plurality of nanostructures NP, the 1x arrangement period P1x and the 1y arrangement period P1y may be equal to or different from each other, the 2x arrangement period P2x and the 2y arrangement period P2y may be equal to or different from each other, the 3x arrangement period P3x and the 3y arrangement period P3y may be equal to or different from each other, and the 4x arrangement period P4x and the 4y arrangement period P4y may be equal to or different from each other.

[0147] Figure 2A and Figure 2B The sensor substrate 110 and the nanophotonic lens array 140 shown can be respectively Fig.17 The sensor substrate 210 and Fig.18 In this case, the first color filter 121 may face the first pixel group 211 and the first region 241 in the third direction, the second color filter 122 may face the second pixel group 212 and the second region 242 in the third direction, the third color filter 123 may face the third pixel group 213 and the third region 243 in the third direction, and the fourth color filter 124 may face the fourth pixel group 214 and the fourth region 244 in the third direction.

[0148] The image sensor 1000 according to the embodiment can have improved light utilization efficiency and reduced resolution degradation. In addition, the image sensor 1000 according to the embodiment can provide a further improved autofocus signal and can maintain relatively uniform sensitivity in multiple pixels. The image sensor 1000 according to the embodiment can form a camera module together with a module lens of various functions and can be used in various electronic devices.

[0149] Fig.19 1 is a block diagram showing an example of an electronic device ED01 including an image sensor 1000. Fig.19 In the network environment ED00, the electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (short-range wireless communication network, etc.), or can communicate with another electronic device ED04 and / or a server ED08 via a second network ED99 (long-range wireless communication network, etc.). The electronic device ED01 can communicate with the electronic device ED04 via the server ED08. The electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, a sound output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a tactile module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a user identification module ED96 and / or an antenna module ED97. In the electronic device ED01, some elements (display device ED60, etc.) may be omitted, or another element may be added. Some elements may be configured as an integrated circuit. For example, the sensor module ED76 (fingerprint sensor, iris sensor, illumination sensor, etc.) can be embedded and implemented in the display device ED60 (display, etc.).

[0150] The processor ED20 can control one or more elements (hardware, software elements, etc.) of the electronic device ED01 connected to the processor ED20 by executing software (program ED40, etc.), and can perform various data processing or operations. As part of the data processing or operation, the processor ED20 can load commands and / or data received from another element (sensor module ED76, communication module ED90, etc.) into the volatile memory ED32, can process the commands and / or data stored in the volatile memory ED32, and can store the resulting data in the non-volatile memory ED34. The processor ED20 may include a main processor ED21 (central processing unit, application processor, etc.) and an auxiliary processor ED23 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of the main processor ED21 or operate together with the main processor ED21. The auxiliary processor ED23 can use less power than the main processor ED21 and can perform designated functions.

[0151] The auxiliary processor ED23 can control functions and / or states related to some elements (display device ED60, sensor module ED76, communication module ED90, etc.) in the electronic device ED01 on behalf of the main processor ED21 when the main processor ED21 is in an inactive state (sleep state), or together with the main processor ED21 when the main processor ED21 is in an active state (application execution state). The auxiliary processor ED23 (image signal processor, communication processor, etc.) can be implemented as a part of another element (camera module ED80, communication module ED90, etc.) that is functionally related to it.

[0152] The memory ED30 can store various data required by the elements (processor ED20, sensor module ED76, etc.) of the electronic device ED01. The data may include, for example, input data and / or output data about software (program ED40, etc.) and commands related thereto. The memory ED30 may include a volatile memory ED32 and / or a non-volatile memory ED34. The non-volatile memory ED34 may include an internal memory ED36 and an external memory ED38.

[0153] The program ED40 may be stored as software in the memory ED30 , and may include an operating system ED42 , middleware ED44 , and / or application programs ED46 .

[0154] The input device ED50 may receive commands and / or data to be used in elements (processor ED20, etc.) of the electronic device ED01 from outside (user, etc.) of the electronic device ED01. The input device ED50 may include a microphone, a mouse, a keyboard, and / or a digital pen (stylus).

[0155] The sound output device ED55 can output sound signals to the outside of the electronic device ED01. The sound output device ED55 can include a speaker and / or an earpiece. The speaker can be used for general purposes such as multimedia playback or record playback, and the earpiece can be used to receive calls. The earpiece can be coupled as part of the speaker or can be implemented as an independent device.

[0156] The display device ED60 can provide visual information to the outside of the electronic device ED01. The display device ED60 may include a display, a holographic device or a projector, and a control circuit for controlling the corresponding device. The display device ED60 may include a touch circuit configured to sense a touch and / or a sensor circuit (pressure sensor, etc.) configured to measure the strength of the force generated by the touch.

[0157] The audio module ED70 can convert sound into an electrical signal and vice versa. The audio module ED70 can obtain sound through the input device ED50, or can output sound via the sound output device ED55 and / or a speaker and / or earphone of another electronic device (electronic device ED02, etc.) directly or wirelessly connected to the electronic device ED01.

[0158] The sensor module ED76 can sense the operating state (power, temperature, etc.) or external environment state (user state, etc.) of the electronic device ED01, and can generate an electrical signal and / or data value corresponding to the sensed state. The sensor module ED76 can include a gesture sensor, a gyroscope sensor, a pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an infrared (IR) sensor, a vivo sensor, a temperature sensor, a humidity sensor, and / or an illumination sensor.

[0159] Interface ED77 may support one or more specified protocols that may be used so that electronic device ED01 is directly or wirelessly connected to another electronic device (electronic device ED02, etc.). Interface ED77 may include a high-definition multimedia interface (HDMI), a universal serial bus (USB) interface, an SD card interface, and / or an audio interface.

[0160] The connection terminal ED78 may include a connector through which the electronic device ED01 may be physically connected to another electronic device (electronic device ED02, etc.) The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0161] The haptic module ED79 may convert the electrical signal into mechanical stimulation (vibration, motion, etc.) or electrical stimulation that the user may sense through tactile or kinesthetic sense. The haptic module ED79 may include a motor, a piezoelectric device, and / or an electrical stimulation device.

[0162] The camera module ED80 can capture still images and videos. The camera module ED80 may include: a lens assembly including one or more lenses, Figure 1 The camera module ED80 may include an image sensor 1000, an image signal processor, and / or a flash. The lens assembly included in the camera module ED80 may collect light emitted from an object as a target to be captured.

[0163] The power management module ED88 may manage power supplied to the electronic device ED01. The power management module ED88 may be implemented as a part of a power management integrated circuit (PMIC).

[0164] The battery ED89 can supply power to the components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0165] The communication module ED90 can support the establishment of a direct (wired) communication channel and / or a wireless communication channel between the electronic device ED01 and another electronic device (electronic device ED02, electronic device ED04 or server ED08, etc.), and perform communication through the established communication channel. The communication module ED90 can operate independently of the processor ED20 (application processor, etc.), and can include one or more communication processors that support direct communication and / or wireless communication. The communication module ED90 can include a wireless communication module ED92 (cellular communication module, short-range wireless communication module, global navigation satellite system (GNSS) communication module, etc.) and / or a wired communication module ED94 (local area network (LAN) communication module, power line communication module, etc.). In the communication module, the corresponding communication module can communicate with another electronic device via a first network ED09 (short-range communication network such as Bluetooth, WiFi Direct or Infrared Data Association (IrDA)) or a second network ED99 (long-range communication network, such as a cellular network, the Internet or a computer network (LAN, WAN, etc.)). The various communication modules mentioned above may be integrated into one component (single chip, etc.), or may be implemented as multiple components (multiple chips) separated from each other. The wireless communication module ED92 may identify and authenticate the electronic device ED01 in a communication network (e.g., first network ED98 and / or second network ED99) by using user information (e.g., International Mobile Subscriber Identity (IMSI) etc.) stored in the user identification module ED96.

[0166] The antenna module ED97 can send signals and / or power to the outside (another electronic device, etc.) or receive signals and / or power from it. The antenna may include a radiator as a conductive pattern formed on a substrate (PCB, etc.). The antenna module ED97 may include one or more antennas. In the example case where the antenna module ED97 includes multiple antennas, the communication module ED90 may select an antenna suitable for the communication type used in a communication network such as the first network ED98 and / or the second network ED99 from the multiple antennas. Signals and / or power can be transmitted between the communication module ED90 and another electronic device via the selected antenna. Another component other than the antenna (RFIC, etc.) may be included as part of the antenna module ED97.

[0167] Some of the elements may be connected to each other via a communication method among peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industry processor interface (MIPI), etc.) and may exchange signals (commands, data, etc.).

[0168] Commands or data can be sent or received between the electronic device ED01 and the external electronic device ED04 via the server ED08 connected to the second network ED99. The other electronic devices ED02 and ED04 can be devices of the same or different types as the electronic device ED01. All or some operations performed in the electronic device ED01 can be performed in one or more devices among the other electronic devices ED02, ED04 and ED08. In the example case where the electronic device ED01 must perform a specific function or service, the electronic device ED01 can request one or more other electronic devices to perform part or all of the function or service instead of performing the function or service by itself. The one or more electronic devices that receive the request perform additional functions or services related to the request, and can transmit the results of the execution to the electronic device ED01. To this end, cloud computing, distributed computing, or client-server computing technology, for example, can be used.

[0169] Fig. 20 It shows that the Fig.19 FIG. 1 is a block diagram of an example of a camera module ED80 in an electronic device ED01. Fig. 20, the camera module ED80 may include a lens assembly 1110, a flash 1120, an image sensor 1000, an image stabilizer 1140, a memory 1150 (buffer memory, etc.) and / or an image signal processor 1160. The lens assembly 1110 may collect light emitted from an object to be captured. The camera module ED80 may include a plurality of lens assemblies 1110, and in this case, the camera module ED80 may include a dual camera module, a 360-degree camera, or a spherical camera. Some of the plurality of lens assemblies 1110 may have the same lens characteristics (viewing angle, focal length, autofocus, F number, optical zoom, etc.) or different lens characteristics. The lens assembly 1110 may include a wide-angle lens or a telephoto lens.

[0170] The flash 1120 may emit light for enhancing light emitted or reflected from an object. The flash 1120 may emit visible light or infrared light. The flash 1120 may include one or more light emitting diodes (red-green-blue (RGB)) LEDs, white light LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or xenon lamps. The image sensor 1000 may be the above-referenced Figure 1 The described image sensor converts light emitted or reflected from an object and transmitted through the lens assembly 1110 into an electric signal to obtain an image corresponding to the object.

[0171] The image stabilizer 1140 moves one or more lenses included in the lens assembly 1110 or the image sensor 1000 in a specific direction, or controls the operating characteristics of the image sensor 1000 (adjusts the readout timing, etc.) to compensate for the negative effects of the movement based on the movement of the camera module ED80 or the electronic device ED01 including the camera module ED80. The image stabilizer 1140 may sense the movement of the camera module ED80 or the electronic device ED01 by using a gyro sensor or an acceleration sensor provided inside or outside the camera module ED80. The image stabilizer 1140 may be implemented as an optical type.

[0172] The memory 1150 may store some or all of the data of the image obtained by the image sensor 1000 for the next image processing operation. In the example case where a plurality of images are obtained at high speed, the obtained raw data (Bayer pattern data, high-resolution data, etc.) is stored in the memory 1150, and only the low-resolution image is displayed. Then, the raw data of the selected image (user selection, etc.) may be transmitted to the image signal processor 1160. The memory 1150 may be integrated with the memory ED30 of the electronic device ED01, or may include an additional memory that operates independently.

[0173] The image signal processor 1160 may perform image processing on an image obtained by the image sensor 1000 or image data stored in the memory 1150. Image processing may include depth map generation, three-dimensional modeling, panorama generation, feature extraction, image combination and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blur, sharpening, softening, etc.). The image signal processor 1160 may perform control (exposure time control, readout timing control, etc.) on the elements (image sensor 1000, etc.) included in the camera module ED80. In addition, the image signal processor 1160 may generate a full-color image by executing the above demosaicing algorithm. In the example case of performing a demosaicing algorithm to generate a full-color image, the image signal processor 1160 may reconstruct most of the spatial resolution information by using an image signal of a green channel or a yellow channel having a high spatial sampling rate.

[0174] The image processed by the image signal processor 1160 may be stored again in the memory 1150 for additional processing, or may be provided to an external element of the camera module ED80 (e.g., the memory ED30, the display device ED60, the electronic device ED02, the electronic device ED04, the server ED08, etc.). The image signal processor 1160 may be integrated with the processor ED20, or may be configured as an additional processor that operates independently of the processor ED20. In the example case where the image signal processor 1160 is configured as an additional processor separate from the processor ED20, the image processed by the image signal processor 1160 undergoes additional image processing by the processor ED20 and may then be displayed on the display device ED60.

[0175] In addition, the image signal processor 1160 can independently receive two output signals from adjacent photosensitive units in each pixel or sub-pixel of the image sensor 1000, and can generate an autofocus signal according to the difference between the two output signals. The image signal processor 1160 can control the lens assembly 1110 so that the focus of the lens assembly 1110 can be accurately formed on the surface of the image sensor 1000 based on the autofocus signal.

[0176] The electronic device ED01 may also include one or more camera modules with different properties or functions. The camera module may include Fig. 20The elements of the camera module ED80 are similar to the elements of the camera module ED80, and the image sensor included in the camera module can be implemented as a charge coupled device (CCD) sensor and / or a complementary metal oxide semiconductor (CMOS) sensor, and can include one or more sensors selected from image sensors with different properties (such as an RGB sensor, a black and white (BW) sensor, an IR sensor, or a UV sensor). In this case, one of the multiple camera modules ED80 may include a wide-angle camera, and another camera module ED80 may be a telephoto camera. Similarly, one of the multiple camera modules ED80 may include a front camera, and another camera module ED80 may include a rear camera.

[0177] Fig.21 is a block diagram of an electronic device 1200 including a multi-camera module, Fig. 22 yes Fig.21 Detailed block diagram of a camera module in an electronic device shown.

[0178] Reference Fig.21 , the electronic device 1200 may include a camera module group 1300 , an application processor 1400 , a power management integrated circuit (PMIC) 1500 , an external memory 1600 , and an image generator 1700 .

[0179] The camera module group 1300 may include a plurality of camera modules 1300a, 1300b, and 1300c. Although the drawings show an example of arranging three camera modules 1300a, 1300b, and 1300c, one or more embodiments are not limited thereto. In some embodiments, the camera module group 1300 may be modified to include only two camera modules. In addition, in some embodiments, the camera module group 1300 may be modified to include n (n is a natural number of 4 or greater) camera modules.

[0180] In the following, reference is made to Fig. 22 A detailed configuration of one camera module 1300 b is described in detail, but the description provided below may also be applied to other camera modules 1300 a and 1300 c according to the embodiments.

[0181] Reference Fig. 22 , the camera module 1300 b may include a prism 1305 , an optical path folding element (OPFE) 1310 , an actuator 1330 , an image sensing device 1340 , and a memory 1350 .

[0182] The prism 1305 may include a reflective surface 1307 having a light reflective material and may deform a path of light L incident from the outside.

[0183] In some embodiments, the prism 1305 can change the path of the light L incident along the first direction (X direction) to a second direction (Y direction) perpendicular to the first direction (X direction). In addition, the prism 1305 can rotate the reflective surface 1307 having the light reflective material around the central axis 1106 along the direction A, or rotate around the central axis 1306 along the direction B, so that the path of the light L incident along the first direction (X direction) can be changed to a second direction (Y direction) perpendicular to the first direction (X direction). Here, the OPFE 1310 can also move in a third direction (Z direction) perpendicular to the first direction (X direction) and the second direction (Y direction).

[0184] In some embodiments, as shown in the figure, the maximum rotation angle of the prism 1305 in the A direction is 15° or less in the positive A direction and is greater than 15° in the negative A direction, but the embodiment is not limited thereto.

[0185] In some embodiments, the prism 1305 can be moved by about 20° in the positive B direction or the negative B direction, or by an angle between 10° and 20° or between 15° and 20°. Here, the moving angle is the same in the positive B direction or the negative B direction, or can be similar within a range of about 1°.

[0186] In some embodiments, the prism 1305 may move the reflective surface 1307 of the light reflective material in a third direction (eg, a Z direction) parallel to the direction in which the central axis 1306 extends.

[0187] OPFE 1310 may include, for example, optical lenses formed in m groups (here, m is a natural number). Here, the m lenses move in the second direction (Y direction) and can change the optical zoom ratio of camera module 1300b. In the example case where the basic optical zoom ratio of camera module 1300b is Z and the m optical lenses included in OPFE 1310 move, the optical zoom ratio of camera module 1300b can be changed to 3Z, 5Z or 10Z or more.

[0188] The actuator 1330 may move the OPFE 1310 or the optical lens (hereinafter, referred to as the optical lens) to a specific position. For example, the actuator 1330 may adjust the position of the optical lens so that the image sensor 1342 may be located at the focal length of the optical lens for accurate sensing operation.

[0189] The image sensing device 1340 may include an image sensor 1342, a control logic 1344, and a memory 1346. The image sensor 1342 may sense an image of a sensing target using light L provided through an optical lens. The control logic 1344 may control the overall operation of the camera module 1300b. For example, the control logic 1344 may control the operation of the camera module 1300b according to a control signal provided through the control signal line CSLb.

[0190] For example, the image sensor 1342 may include the color separation lens array or nanophotonic lens array described above. The image sensor 1342 may receive more signals separated according to wavelength in each pixel by using a color separation lens array based on a nanostructure. Due to the above effect, the light intensity required to generate a high-resolution, high-quality image under low illumination can be ensured.

[0191] The memory 1346 may store information necessary for the operation of the camera module 1300b, such as calibration data 1347. The calibration data 1347 may include information necessary for generating image data by using the light L provided from the outside through the camera module 1300b. The calibration data 1347 may include, for example, the above-mentioned information about the degree of rotation, information about the focal length, information about the optical axis, etc. In the exemplary case where the camera module 1300b is implemented in the form of a multi-state camera in which the focal length changes according to the position of the optical lens, the calibration data 1347 may include information related to the focal length value and autofocus of the optical lens according to each position (or state).

[0192] The storage unit 1350 may store image data sensed by the image sensor 1342. The storage unit 1350 may be provided outside the image sensing device 1340, and may be stacked with a sensor chip included in the image sensing device 1340. In some embodiments, the storage unit 1350 may be implemented as an electrically erasable programmable read-only memory (EEPROM), but one or more embodiments are not limited thereto.

[0193] Reference Fig.21 and Fig. 22 In some embodiments, each of the plurality of camera modules 1300a, 1300b, and 1300c may include an actuator 1330. Therefore, each of the plurality of camera modules 1300a, 1300b, and 1300c may include calibration data 1347 that is the same as or different from one another depending on the operation of the actuator 1330 included therein.

[0194] In some embodiments, one (e.g., 1300b) of the plurality of camera modules 1300a, 1300b, and 1300c may be a folded lens type camera module including the above-described prism 1305 and OPFE 1310, and the other camera modules (e.g., 1300a and 1300c) may be vertical type camera modules not including the prism 1305 and OPFE 1310. However, the present disclosure is not limited thereto.

[0195] In some embodiments, one (eg, 1300c) of the plurality of camera modules 1300a, 1300b, and 1300c may be a vertical type depth camera that extracts depth information by using infrared rays (IR).

[0196] In some embodiments, at least two camera modules (e.g., 1300a and 1300b) among the plurality of camera modules 1300a, 1300b, and 1300c may have different fields of view. In this case, for example, optical lenses of at least two camera modules (e.g., 1300a and 1300b) among the plurality of camera modules 1300a, 1300b, and 1300c may be different from each other, but one or more embodiments are not limited thereto.

[0197] In addition, in some embodiments, the plurality of camera modules 1300a, 1300b, and 1300c may have different fields of view from each other. In this case, the optical lenses respectively included in the plurality of camera modules 1300a, 1300b, and 1300c may be different from each other, but the inventive concept is not limited thereto.

[0198] In some embodiments, the plurality of camera modules 1300a, 1300b, and 1300c may be physically isolated from each other. That is, the sensing area of ​​one image sensor 1342 may not be divided and used by the plurality of camera modules 1300a, 1300b, and 1300c, but the plurality of camera modules 1300a, 1300b, and 1300c may each have an independent image sensor 1342 disposed therein.

[0199] Return to reference Fig.21 , the application processor 1400 may include an image processing device 1410, a memory controller 1420, and an internal memory 1430. The application processor 1400 may be implemented separately from the plurality of camera modules 1300a, 1300b, and 1300c. For example, the application processor 1400 and the plurality of camera modules 1300a, 1300b, and 1300c may be separately implemented as separate semiconductor chips.

[0200] The image processing device 1410 may include a plurality of image processors 1411 , 1412 , and 1413 and a camera module controller 1414 .

[0201] Image data generated by each of the camera modules 1300a, 1300b, and 1300c may be provided to the image processing device 1410 via separate image signal lines. For example, image data transmission may be performed using a camera serial interface (CSI) based on a mobile industry processor interface (MIPI), but is not limited thereto.

[0202] The image data transmitted to the image processing device 1410 may be stored in the external memory 1600 before being transmitted to the image processors 1411 and 1412. The image data stored in the external memory 1600 may be provided to the image processor 1411 and / or the image processor 1412. The image processor 1411 may correct the image data to generate a video. The image processor 1412 may correct the image data to generate a still image. For example, the image processors 1411 and 1412 may perform pre-processing operations such as color calibration, gamma calibration, etc. on the image data.

[0203] The image processor 1411 may include sub-processors. In the example case where the number of sub-processors is equal to the number of camera modules 1300a, 1300b, and 1300c, each sub-processor may process image data provided from one camera module. In the example case where the number of sub-processors is less than the number of camera modules 1300a, 1300b, and 1300c, at least one of the sub-processors may process image data provided from a plurality of camera modules by using timing sharing processing. Image data processed by the image processor 1411 and / or the image processor 1412 may be stored in the external memory 1600 before being transmitted to the image processor 1413. The image data stored in the external memory 1600 may be transmitted to the image processor 1412. The image processor 1412 may perform post-processing operations on the image data, such as noise calibration, sharpening calibration, and the like.

[0204] The image data processed in the image processor 1413 may be provided to the image generator 1700. The image generator 1700 may generate a final image by using the image data provided from the image processor 1413 according to the image generation information or the mode signal.

[0205] Specifically, the image generator 1700 may generate a final image by merging at least part of the image data generated by the camera modules 1300a, 1300b, and 1300c having different fields of view according to the image generation information or the mode signal. In addition, the image generator 1700 may generate an output image by selecting one of the image data generated by the camera modules 1300a, 1300b, and 1300c having different fields of view according to the image generation information or the mode signal.

[0206] In some embodiments, the image generation information may include a scaling signal or a scaling factor. Furthermore, in some embodiments, the mode signal may be a signal based on a mode selected by a user, for example.

[0207] In the example case where the image generation information is a zoom signal (zoom factor) and the camera modules 1300a, 1300b, and 1300c have different fields of view (angles of view) from each other, the image generator 1700 may perform different operations according to the type of the zoom signal. In the example case where the zoom signal is a first signal, the image data output from the camera module 1300a is merged with the image data output from the camera module 1300c, and then, an output image may be generated by using the merged image signal and the image data output from the camera module 1300b and not used in the merge. In the example case where the zoom signal is a second signal different from the first signal, the image generator 1700 may not perform image data merging, and then, an output image may be generated by selecting one piece of image data output from the camera modules 1300a, 1300b, and 1300c, respectively. However, one or more embodiments are not limited thereto, and the method of processing image data may be modified as needed.

[0208] The camera module controller 1414 may provide a control signal to each of the camera modules 1300a, 1300b, and 1300c. The control signal generated by the camera module controller 1414 may be provided to the corresponding camera modules 1300a, 1300b, and 1300c via control signal lines CSLa, CSLb, and CSLc separated from each other.

[0209] In some embodiments, the control signal provided from the camera module controller 1414 to the plurality of camera modules 1300a, 1300b, and 1300c may include mode information according to the mode signal. The plurality of camera modules 1300a, 1300b, and 1300c may operate in a first operation mode and a second operation mode related to the sensing speed based on the mode information.

[0210] In the first operation mode, the plurality of camera modules 1300a, 1300b, and 1300c may generate image signals at a first speed (e.g., generate image signals at a first frame rate), encode the image signals at a second speed faster than the first speed (e.g., encode image signals at a second frame rate greater than the first frame rate), and transmit the encoded image signals to the application processor 1400. Here, the second speed may be 30 times faster than the first speed or less.

[0211] The application processor 1400 may store the received image signal (i.e., the encoded image signal) in the internal memory 1430 provided in the application processor 1400 or in the external memory 1600 outside the application processor 1400, and thereafter, read the encoded signal from the internal memory 1430 or the external memory 1600 and decode it, and may display image data generated based on the decoded image signal. For example, the image processors 1411 and 1412 in the image processing device 1410 may perform decoding, and may perform image processing on the decoded image signal.

[0212] In the second operation mode, the plurality of camera modules 1300a, 1300b, and 1300c generate image signals at a third speed slower than the first speed (e.g., generate image signals at a third frame rate lower than the first frame rate), and may transmit the image signals to the application processor 1400. The image signals provided to the application processor 1400 may be uncoded signals. The application processor 1400 may perform image processing on the received image signals or store the image signals in the internal memory 1430 or the external memory 1600.

[0213] The PMIC 1500 may provide power, such as a power supply voltage, to each of the plurality of camera modules 1300a, 1300b, and 1300c. For example, under the control of the application processor 1400, the PMIC 1500 may supply a first power to the camera module 1300a via a power signal line PSLa, supply a second power to the camera module 1300b via a power signal line PSLb, and supply a third power to the camera module 1300c via a power signal line PSLc.

[0214] The PMIC 1500 may generate power corresponding to each of the plurality of camera modules 1300a, 1300b, and 1300c, and may adjust the power level based on a power control signal PCON from the application processor 1400. The power control signal PCON may include a power adjustment signal for each operating mode of the plurality of camera modules 1300a, 1300b, and 1300c. For example, the operating mode may include a low power mode, and the power control signal PCON may include information about the camera module operating in the low power mode and set the power level. The levels of power provided to the plurality of camera modules 1300a, 1300b, and 1300c may be the same or different from each other. In addition, the power level may be changed dynamically.

[0215] In the image sensor according to the embodiment, the arrangement period and arrangement position of the nanostructures in the nanophotonic lens array can be selected differently according to the color channel. For example, by selecting the arrangement period of the nanostructures in the nanophotonic lens array differently according to the color channel, the contrast of the autofocus signal can be improved. In addition, the positions of the nanostructures in the nanophotonic lens array can be aligned differently according to the color channel, and the difference between the brightness of the color channels can be reduced.

[0216] It should be understood that the embodiments described herein should be considered in a descriptive sense only and not for restrictive purposes. The description of features or aspects in each embodiment should generally be considered as applicable to other similar features or aspects in other embodiments. Although one or more example embodiments have been described with reference to the accompanying drawings, it should be understood by those skilled in the art that various changes in form and details may be made without departing from the spirit and scope defined by the appended claims.

Claims

1. An image sensor, comprising: A sensor substrate comprising a first pixel group and a second pixel group, the first pixel group comprising a plurality of first pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction, and the second pixel group comprising a plurality of second pixels arranged two-dimensionally along the first direction and the second direction; A nanophotonic lens array, comprising a first region and a second region, wherein the first region faces the first pixel group in a third direction perpendicular to the first direction and the second direction, and the second region faces the second pixel group in the third direction; as well as a color filter layer, disposed between the sensor substrate and the nanophotonic lens array, the color filter layer comprising a first color filter and a second color filter, the first color filter facing the first pixel group and the first region in the third direction and configured to transmit light of a first wavelength band, the second color filter facing the second pixel group and the second region in the third direction and configured to transmit light of a second wavelength band different from the first wavelength band, wherein the first region includes a plurality of nanostructures arranged two-dimensionally in a first period, wherein the second region includes a plurality of nanostructures arranged two-dimensionally in a second period, and The second period is smaller than the first period.

2. The image sensor according to claim 1, wherein: Each of the first region and the second region includes a first lens, a second lens, a third lens, and a fourth lens arranged in a 2×2 array, Each of the first lens, the second lens, the third lens, and the fourth lens in the first region includes a plurality of first nanostructures two-dimensionally arranged in the first period, and Each of the first lens, the second lens, the third lens, and the fourth lens in the second region includes a plurality of second nanostructures two-dimensionally arranged in the second period.

3. The image sensor according to claim 2, wherein: In the first region, A first gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens in the first direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the first direction among the plurality of nanostructures in the second lens is greater than the first period, and A second gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens in the first direction among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens in the first direction among the plurality of nanostructures in the fourth lens is greater than the first period.

4. The image sensor according to claim 3, wherein: The first gap is different from the second gap.

5. The image sensor according to claim 3, wherein: In the first region, A third gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the second direction among the plurality of nanostructures in the third lens is equal to the first period, and A fourth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens in the second direction among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens in the second direction among the plurality of nanostructures in the fourth lens is equal to the first period.

6. The image sensor according to claim 3, wherein: In the first region, A third gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens in the second direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the second direction among the plurality of nanostructures in the third lens is different from the first period, and A fourth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens in the second direction among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens in the second direction among the plurality of nanostructures in the fourth lens is different from the first period.

7. The image sensor according to claim 2, wherein: In the second region, A fifth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens in the first direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the first direction among the plurality of nanostructures in the second lens is smaller than the second period, and A sixth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens in the first direction among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens in the first direction among the plurality of nanostructures in the fourth lens is smaller than the second period.

8. The image sensor according to claim 7, wherein: The fifth gap is different from the sixth gap.

9. The image sensor according to claim 7, wherein: In the second region, A seventh gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens in the second direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the second direction among the plurality of nanostructures in the third lens is smaller than the second period, and An eighth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens in the second direction among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens in the second direction among the plurality of nanostructures in the fourth lens is smaller than the second period.

10. The image sensor according to claim 9, wherein: The seventh gap is different from the eighth gap.

11. The image sensor according to claim 2, wherein: Each of the first pixel group and the second pixel group includes a first subgroup, a second subgroup, a third subgroup, and a fourth subgroup arranged in a 2×2 array, and Each of the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup in each of the first pixel group and the second pixel group includes a plurality of independent pixels arranged in a 2×2 array.

12. The image sensor according to claim 11, wherein: The first lens, the second lens, the third lens, and the fourth lens in the first region are arranged to face the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup of the first pixel group, respectively, in the third direction. The first lens, the second lens, the third lens, and the fourth lens in the second region are arranged to face the first subgroup, the second subgroup, the third subgroup, and the fourth subgroup of the second pixel group, respectively, in the third direction. The sensor substrate further includes a third pixel group and a fourth pixel group, the third pixel group includes a plurality of third pixels arranged two-dimensionally along the first direction and the second direction, and the fourth pixel group includes a plurality of fourth pixels arranged two-dimensionally along the first direction and the second direction, The nanophotonic lens array further includes a third region and a fourth region, wherein the third region faces the third pixel group in the third direction, and the fourth region faces the fourth pixel group in the third direction. The color filter layer further includes a third color filter and a fourth color filter, the third color filter facing the third pixel group and the third region in the third direction and configured to transmit light of a third wavelength band different from the first wavelength band and the second wavelength band, the fourth color filter facing the fourth pixel group and the fourth region in the third direction and configured to transmit light of the first wavelength band, The third region includes a plurality of nanostructures arranged two-dimensionally in a third period, The fourth region includes a plurality of nanostructures arranged two-dimensionally in a fourth period, and The second period is smaller than the third period and the fourth period.

13. The image sensor according to claim 12, wherein: The first period, the third period, and the fourth period are equal to each other.

14. The image sensor according to claim 12, wherein: The first period and the fourth period are shorter than the third period.

15. The image sensor according to claim 12, wherein: Each of the third region and the fourth region includes a first lens, a second lens, a third lens, and a fourth lens arranged in a 2×2 array, Each of the first lens, the second lens, the third lens, and the fourth lens in the third region includes a plurality of nanostructures two-dimensionally arranged in the third period, and Each of the first lens, the second lens, the third lens, and the fourth lens in the fourth region includes a plurality of nanostructures two-dimensionally arranged in the fourth period.

16. The image sensor according to claim 15, wherein: In the third region, A ninth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens in the first direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the first direction among the plurality of nanostructures in the second lens is equal to the third period, A tenth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens in the first direction among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens in the first direction among the plurality of nanostructures in the fourth lens is equal to the third period, An eleventh gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the second direction among the plurality of nanostructures in the third lens is equal to the third period, and A twelfth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens in the second direction among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens in the second direction among the plurality of nanostructures in the fourth lens is equal to the third period.

17. The image sensor according to claim 15, wherein: In the fourth region, A thirteenth gap in the first direction between a nanostructure arranged at an edge adjacent to the second lens in the first direction among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the first direction among the plurality of nanostructures in the second lens is equal to the fourth period, A fourteenth gap in the first direction between a nanostructure arranged at an edge adjacent to the fourth lens in the first direction among the plurality of nanostructures in the third lens and a nanostructure arranged at an edge adjacent to the third lens in the first direction among the plurality of nanostructures in the fourth lens is equal to the fourth period, A fifteenth gap in the second direction between a nanostructure arranged at an edge adjacent to the third lens among the plurality of nanostructures in the first lens and a nanostructure arranged at an edge adjacent to the first lens in the second direction among the plurality of nanostructures in the third lens is greater than the fourth period, and A sixteenth gap in the second direction between a nanostructure arranged at an edge adjacent to the fourth lens in the second direction among the plurality of nanostructures in the second lens and a nanostructure arranged at an edge adjacent to the second lens in the second direction among the plurality of nanostructures in the fourth lens is greater than the fourth period.

18. The image sensor according to claim 1, wherein: The plurality of first pixels are grouped and arranged in a 2×2 array, The plurality of second pixels are grouped and arranged in a 2×2 array, The first region includes a first lens facing all of the plurality of first pixels in the first pixel group, and The second region includes a second lens facing all of the plurality of second pixels in the second pixel group.

19. An electronic device comprising: a lens assembly configured to form an optical image of a subject; an image sensor configured to convert an optical image formed by the lens assembly into an electrical signal; as well as a processor configured to process signals generated by the image sensor, Wherein, the image sensor comprises: A sensor substrate including a first pixel group and a second pixel group, each of the first pixel group and the second pixel group including a plurality of pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction; A nanophotonic lens array, comprising a first region and a second region, wherein the first region faces the first pixel group in a third direction perpendicular to the first direction and the second direction, and the second region faces the second pixel group in the third direction; and a color filter layer, disposed between the sensor substrate and the nanophotonic lens array, the color filter layer comprising a first color filter and a second color filter, the first color filter facing the first pixel group and the first region in the third direction and configured to transmit light of a first wavelength band, the second color filter facing the second pixel group and the second region in the third direction and configured to transmit light of a second wavelength band different from the first wavelength band, wherein the first region includes a plurality of nanostructures arranged two-dimensionally in a first period, wherein the second region includes a plurality of nanostructures arranged two-dimensionally in a second period, and The second period is smaller than the first period.

20. An image sensor, comprising: A sensor substrate comprising a first pixel group and a second pixel group, the first pixel group comprising a plurality of first pixels arranged two-dimensionally along a first direction and a second direction perpendicular to the first direction, and the second pixel group comprising a plurality of second pixels arranged two-dimensionally along the first direction and the second direction; A nanophotonic lens array, comprising a first region and a second region, wherein the first region overlaps with the first pixel group in a third direction perpendicular to the first direction and the second direction, and the second region overlaps with the second pixel group in the third direction; as well as a color filter layer disposed between the sensor substrate and the nanophotonic lens array, the color filter layer comprising a first color filter overlapping the first pixel group in the third direction, and a second color filter overlapping the second pixel group in the third direction, wherein the first region includes a plurality of first nanostructures and the second region includes a plurality of second nanostructures, wherein the plurality of first nanostructures are arranged along the first direction to have a first period, and The plurality of second nanostructures are arranged along the first direction to have a second period different from the first period.

Images