A chamber door hinge apparatus for a large vacuum chamber

Abstract

The application discloses a cavity door hinge device for a large vacuum chamber, which comprises a first rotating shaft for correcting left-right direction deviation and up-down direction deviation of the vacuum chamber cavity door, bearing support seat groups and vacuum chamber fixed support groups arranged in sequence from inside to outside on both ends of the first rotating shaft, and vacuum chamber adjusting bolt groups arranged on the vacuum chamber fixed support groups; a second transmission shaft group for correcting front-rear direction deviation of the vacuum chamber cavity door, a vacuum chamber door fixed support group for supporting the second transmission shaft group and being fixed with the vacuum chamber cavity door, and vacuum chamber door adjusting bolt groups arranged on the vacuum chamber door fixed support group; compared with a traditional single-shaft rotating hinge, the double-shaft rotating hinge can realize multi-position adjustment of the vacuum chamber door; and the axial eccentricity problem of multiple hinge groups of the large vacuum chamber door in the installation and use wear process is solved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of high-vacuum chamber hinge, and particularly relates to a cavity door hinge device for a large vacuum chamber. BACKGROUND

[0002] For a large vacuum chamber with a side-opening door, such as a semiconductor vacuum chamber and a coating machine vacuum chamber, the workpiece needs to be transported and installed through the side-opening door, and the side-opening door is frequently reciprocated for multiple times. A hinge device is usually used as a connecting device between the side-opening door and the vacuum chamber to enable the door to rotate relative to the vacuum chamber, thereby opening or closing an opening of the vacuum chamber.

[0003] The existing common hinge is a single-axis door hinge device with two or more groups of the same but independent installation. The following disadvantages exist in the use of this technology:

[0004] 1) When the door plate is large in size and heavy in weight, the shafts of the multiple hinge groups are unevenly stressed, the shaft sleeves are unevenly worn after multiple opening and closing, and the shafts are then offset. When the shafts are offset, the door plate cannot be normally closed, which affects the sealing performance of the vacuum chamber and the static and dynamic vacuum degrees;

[0005] 2) The existing hinge device is directly fixed on the cavity door of the vacuum chamber, and can only be kept at the current position and cannot be further adjusted, so that when the air-tight structure arranged on the door plate leaks due to the inclination of the cavity door, the required vacuum degree cannot be achieved;

[0006] 3) The existing technology adopts two or more groups of hinge devices installed on the upper and lower parts of the cavity door along the longitudinal direction, and the multiple hinge groups are multiple independent rotating shafts. It is difficult to make the shafts and the shafts concentric.

[0007] In summary, when the side-opening door type door plate of the existing technology fails, it is not easy to maintain and the maintenance cost is high. SUMMARY

[0008] The present application proposes a cavity door hinge device for a large vacuum chamber to solve the problem that the vacuum chamber door flange and the vacuum chamber flange are misaligned due to the wear of the hinge during the long-term use of the vacuum chamber cavity door, thereby causing poor vacuum sealing.

[0009] The utility model provides a cavity door hinge device for large vacuum chamber, which comprises: a first rotating shaft (1) for correcting left-right and up-down deviation of the vacuum chamber door, a bearing support seat group (2) and a vacuum chamber fixed support group (3) arranged in order from inside to outside on both ends of the first rotating shaft (1), and a vacuum chamber adjusting bolt group (4) arranged on the vacuum chamber fixed support group (3); the vacuum chamber fixed support group (3) is used for fixing the vacuum chamber cavity on both ends of the first rotating shaft (1); a second transmission shaft group (5) for correcting front-back deviation of the vacuum chamber door, which is parallel to the first rotating shaft (1); a vacuum chamber door fixed support group (6) for supporting the second transmission shaft group (5) and fixing the vacuum chamber door, and a vacuum chamber door adjusting bolt group (7) arranged on the vacuum chamber door fixed support group (6); an intermediate hinge shaft connecting piece (8) arranged between the first rotating shaft (1) and the second transmission shaft group (5).

[0010] Further, the vacuum chamber fixed support group (3) comprises: a first vacuum chamber fixed support (3-1) arranged on the upper end of the first rotating shaft (1) and a second vacuum chamber fixed support (3-2) arranged on the lower end of the first rotating shaft; the vacuum chamber adjusting bolt group (4) comprises: a first vacuum chamber adjusting bolt group (4-1) arranged on the first vacuum chamber fixed support (3-1) and a second vacuum chamber adjusting bolt group (4-2) arranged on the second vacuum chamber fixed support (3-2); the first vacuum chamber adjusting bolt group (4-1) is arranged on the two sides of the outer side of the first vacuum chamber fixed support (3-1) in the oblique upward direction; and the second vacuum chamber adjusting bolt group (4-2) is arranged on the two sides of the outer side of the second vacuum chamber fixed support (3-2) in the oblique downward direction.

[0011] Further, the first vacuum chamber adjusting bolt group (4-1) is arranged on the two sides of the outer side of the first vacuum chamber fixed support (3-1) in the oblique upward direction, specifically: the first vacuum chamber adjusting bolt group (4-1) is divided into an upper adjusting bolt group (4-1-1) and a side adjusting bolt group (4-1-2), the upper adjusting bolt group (4-1-1) is arranged on the upper side of the outer side of the first vacuum chamber fixed support (3-1) in the oblique upward direction, and the side adjusting bolt group (4-1-2) is arranged on the side of the outer side of the first vacuum chamber fixed support (3-1) in the oblique upward direction; pressure screws and tension screws are arranged on the upper adjusting bolt group (4-1-1) and the side adjusting bolt group (4-1-2) respectively, the pressure screws are used for pressing the door downward, and the tension screws are used for pulling the door upward.

[0012] Further, the second vacuum chamber adjusting bolt group (4-2) is arranged on the two side edges of the second vacuum chamber fixed support (3-2) in the obliquely downward right angle, specifically, the second vacuum chamber adjusting bolt group (4-2) is divided into a lower adjusting bolt group (4-2-1) and a side adjusting bolt group (4-2-2), the lower adjusting bolt group (4-2-1) is arranged on the lower edge line of the second vacuum chamber fixed support in the obliquely downward right angle, and the side adjusting bolt group is arranged on the side edge line of the second vacuum chamber fixed support (3-2) in the obliquely downward right angle; the lower adjusting bolt group (4-2-1) and the side adjusting bolt group (4-2-2) are respectively provided with a pressure screw and a tension screw, the pressure screw is used for pressing the cavity door upward, and the tension screw is used for pulling the door downward.

[0013] Further, the vacuum chamber door fixed support group (6) is: the first vacuum chamber door fixed support (6-1) arranged on the first vacuum chamber fixed support (3-1) and the second vacuum chamber door fixed support (6-2) arranged on the second vacuum chamber fixed support; the vacuum chamber door adjusting bolt group (7) is: the first vacuum chamber door adjusting bolt (7-1) arranged on the first vacuum chamber door fixed support (6-1) and the second vacuum chamber door adjusting bolt (7-2) arranged on the second vacuum chamber door fixed support (6-2).

[0014] Further, the first vacuum chamber door adjusting bolt (7-1) is arranged in the axial direction of the upper second transmission shaft group (5-1), and the second vacuum chamber door adjusting bolt (7-2) is arranged in the axial direction of the lower second transmission shaft group (5-2).

[0015] Further, the first vacuum chamber door adjusting bolt (7-1) and the second vacuum chamber door adjusting bolt (7-2) are provided with a pressure screw and a tension screw, when the cavity door is inclined forward, the cavity door is pushed backward through the pressure screw, and when the cavity door is inclined backward, the cavity door is pulled forward through the tension screw.

[0016] Advantages and effects of the application

[0017] 1. The cavity door hinge device for a large vacuum chamber of the application adopts a double-shaft rotary hinge, compared with a traditional single-shaft rotary hinge, can realize multi-position adjustment of the vacuum chamber door, and improves the sealing performance of the vacuum chamber; by increasing the position adjusting bolt 4 of the vacuum chamber fixed support group 3, the up-down and left-right positions of the bearing support 2 of the first rotary shaft 1 can be adjusted, and the problem of axial misalignment of multiple groups of hinges of the large vacuum chamber door caused in the installation and wear process is solved.

[0018] 2, The lower bearing support 2-2 of the first rotating shaft of the application adopts the combination of wear-resistant sliding bearing and thrust ball bearing, which improves the smoothness of rotation and reduces the wear of sliding bearing, simplifies the maintenance of hinge device of large vacuum chamber, and prolongs the service life. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The application effect appearance diagram of the vacuum cavity door hinge device;

[0020] Figure 2a The main classification diagram of each part of the vacuum cavity door hinge device of the application;

[0021] Figure 2b The detailed classification diagram of each part of the vacuum cavity door hinge device of the application;

[0022] Figure 2c The sectional view of each part of the vacuum cavity door hinge device of the application;

[0023] Figure 2d The exploded view of each part of the vacuum cavity door hinge device of the application;

[0024] Figure 3 The front view of the vacuum cavity door tilting in left and right directions;

[0025] Figure 4 The side view of the vacuum cavity door tilting in front and back directions;

[0026] Figure 5 The local enlarged view of the vacuum chamber cavity door hinge device of the application;

[0027] Figure 6 The schematic diagram of the combination of wear-resistant sliding bearing and thrust ball bearing adopted by the lower bearing support of the first rotating shaft of the application.

[0028] In the figure: 1: first transmission shaft; 2: bearing support seat; 2-1: upper bearing support seat; 2-1-1: upper sliding bearing; 2-2: lower bearing support seat; 2-2-1: lower sliding bearing; 2-2-2: thrust bearing; 3: vacuum chamber fixed support group; 3-1: first vacuum chamber fixed support; 3-2: second vacuum chamber fixed support; 4: vacuum chamber adjusting bolt group; 4-1: first vacuum chamber adjusting bolt group; 4-1-1: first upper adjusting bolt group; 4-1-2: first side adjusting bolt group; 4-2: second vacuum chamber adjusting bolt group; 4-2-2: second side adjusting bolt group; 4-2-1: second lower adjusting bolt group; 5: second transmission shaft group; 5-1: upper second transmission shaft group; 5-2: lower second transmission shaft group; 6: vacuum chamber door fixed support group; 6-1: first vacuum chamber door fixed support; 6-2: second vacuum chamber door fixed support; 7: vacuum chamber door adjusting bolt group; 7-1: first vacuum chamber door adjusting bolt; 7-2: second vacuum chamber door adjusting bolt; 8: intermediate hinge shaft connecting piece; 8-1: upper intermediate hinge shaft connecting piece; 8-2: lower intermediate hinge shaft connecting piece. DETAILED DESCRIPTION

[0029] Design principle of the present application

[0030] 1, Design difficulty of the present application: one of the difficulties is that the volume and weight of the cavity door of the vacuum chamber are unusual, the weight of the cavity door is as heavy as several hundred kilograms to one ton, and the super heavy door body easily causes the door shaft of the cavity door to be eccentric due to wear; the second difficulty is that the sealing effect of the vacuum chamber is required to be very high, and the reason for the leakage of vacuum is often that the sealing between the cavity door and the cavity is not tight enough, and the reason for the insufficient sealing is that the door shaft of the cavity door is worn and causes the cavity door to tilt in the left-right, up-down and front-back directions.

[0031] 2、The innovation of the present application: one of the innovation points: use one transmission shaft (first transmission shaft 1) instead of multiple transmission shafts arranged along the door shaft in the prior art, specifically, set upper bearing support seat 2-1 and lower bearing support seat 2-2 at both ends of first transmission shaft 1, thereby ensuring the coaxiality of upper bearing support seat 2-1 and lower bearing support seat 2-2; the second innovation point: use double-shaft door hinge instead of single-shaft door hinge, and first transmission shaft 1 and second transmission shaft group 2 are connected through intermediate hinge shaft connecting piece 8, which ensures that first transmission shaft 1 and second transmission shaft group 2 are independent of each other and support each other: when adjusting the up-down position and left-right position of the cavity door through first vacuum chamber adjusting bolt group 4-1 and second vacuum chamber adjusting bolt group 4-2, the pushing force or pulling force of first vacuum chamber adjusting bolt group 4-1 and second vacuum chamber adjusting bolt group 4-2 is transmitted to the cavity door through intermediate hinge shaft connecting piece 8, so as to correct the up-down or left-right position tilt of the cavity door, which is mutual support; when adjusting the front-back position of the cavity door through upper second transmission shaft group 5-1 and lower second transmission shaft group 5-2, first transmission shaft 1 ensures that upper bearing support seat 2-1 and lower bearing support seat 2-2 at both ends of the shaft will not affect the coaxiality due to the adjustment of the front-back position of the cavity door, which is independent of each other. The third innovation point: use dynamic position adjustment instead of fixed position adjustment; the dynamic position adjustment is the position adjustment under the condition that the door shaft is worn due to the excessive weight of the door body in long-term use, and multiple position adjustment is realized due to the adoption of double-shaft transmission; the multiple position adjustment refers to the adjustment of six dimensions of up, down, left, right, front and back, compared with the prior art, the dynamic position adjustment of the cavity door of the present application enables the vacuum seal to be long-lasting.

[0032] 3、Double transmission shaft design principle: ①fix vacuum chamber fixed support group 3 and vacuum chamber cavity body; ②connect upper bearing support seat 2-1 and lower bearing support seat 2-2 with vacuum chamber fixed support group 3 respectively; ③connect upper bearing support seat 2-1 and lower bearing support seat 2-2 at both ends of first transmission shaft 1 respectively; ④install vacuum chamber door fixed support group 6 on vacuum chamber fixed support group 3; ⑤install second transmission shaft group 5 on vacuum chamber door fixed support group 6; ⑥connect first transmission shaft 1 and second transmission shaft group 5 with intermediate hinge shaft connecting piece 8 respectively; ⑦install vacuum chamber door adjusting bolt group 7 on second transmission shaft group 5; ⑧link cavity door with vacuum chamber door fixed support group 6.

[0033] Based on the above invention principle, the present application designs a cavity door hinge device for large vacuum chamber, as shown in Figures 1-6As shown, the cavity door hinge device comprises: a first rotating shaft 1 for correcting left-right and up-down deviations of the vacuum chamber door; a bearing support seat group 2 and a vacuum chamber fixed support group 3 arranged in sequence from inside to outside on both ends of the first rotating shaft 1; and a vacuum chamber adjusting bolt group 4 arranged on the vacuum chamber fixed support group 3; the vacuum chamber fixed support group 3 is used for fixing the vacuum chamber cavity on both ends of the first rotating shaft 1; a second transmission shaft group 5 for correcting front-back deviations of the vacuum chamber door, which is parallel to the first rotating shaft 1; a vacuum chamber door fixed support group 6 for supporting the second transmission shaft group 5 and fixing the vacuum chamber door; and a vacuum chamber door adjusting bolt group 7 arranged on the vacuum chamber door fixed support group 6; and an intermediate hinge shaft connecting piece 8 arranged between the first rotating shaft 1 and the second transmission shaft group 5.

[0034] As shown in Figure 2a , 2b , the vacuum chamber fixed support group 3 comprises: a first vacuum chamber fixed support 3-1 arranged on the upper end of the first rotating shaft 1 and a second vacuum chamber fixed support 3-2 arranged on the lower end of the first rotating shaft 1; the vacuum chamber adjusting bolt group 4 comprises: a first vacuum chamber adjusting bolt group 4-1 arranged on the first vacuum chamber fixed support 3-1 and a second vacuum chamber adjusting bolt group 4-2 arranged on the second vacuum chamber fixed support 3-2; the first vacuum chamber adjusting bolt group 4-1 is arranged on two sides of a right angle in the oblique upward direction outside the first vacuum chamber fixed support 3-1; and the second vacuum chamber adjusting bolt group 4-2 is arranged on two sides of a right angle in the oblique downward direction outside the second vacuum chamber fixed support 3-2.

[0035] As shown in Figure 2a , 2b , 2c, 2d, the first vacuum chamber adjusting bolt group 4-1 is arranged on two sides of a right angle in the oblique upward direction outside the first vacuum chamber fixed support 3-1, specifically: the first vacuum chamber adjusting bolt group 4-1 is divided into an upper adjusting bolt group 4-1-1 and a side adjusting bolt group 4-1-2, the upper adjusting bolt group 4-1-1 is arranged on the upper side of a right angle in the oblique upward direction outside the first vacuum chamber fixed support 3-1, and the side adjusting bolt group 4-1-2 is arranged on the side of a right angle in the oblique upward direction outside the first vacuum chamber fixed support 3-1; a pressure screw and a tension screw are respectively arranged on the upper adjusting bolt group 4-1-1 and the side adjusting bolt group 4-1-2, the pressure screw is used to press the door downward, and the tension screw is used to pull the door upward.

[0036] As shown in Figure 2a , 2bThe second vacuum chamber adjusting bolt group 4-2 is arranged on two side edges of the second vacuum chamber fixed support 3-2, and specifically, the second vacuum chamber adjusting bolt group 4-2 is divided into a lower adjusting bolt group 4-2-1 and a side adjusting bolt group 4-2-2, the lower adjusting bolt group 4-2-1 is arranged on a lower edge line of the second vacuum chamber fixed support 3-2, and the side adjusting bolt group 4-2-2 is arranged on a side edge line of the second vacuum chamber fixed support 3-2; the lower adjusting bolt group 4-2-1 and the side adjusting bolt group 4-2-2 are respectively provided with a pressure screw and a tension screw, the pressure screw is used for pressing the cavity door upward, and the tension screw is used for pulling the door downward.

[0037] As shown in Figure 2a , 2b The vacuum chamber door adjusting bolt group 7 is a first vacuum chamber door adjusting bolt 7-1 arranged on the first vacuum chamber door fixed support 6-1 and a second vacuum chamber door adjusting bolt 7-2 arranged on the second vacuum chamber door fixed support 6-2.

[0038] As shown in Figure 2a , 2b The first vacuum chamber door adjusting bolt 7-1 is arranged in the axial direction of the upper second transmission shaft group 5-1, and the second vacuum chamber door adjusting bolt 7-2 is arranged in the axial direction of the lower second transmission shaft group 5-2.

[0039] As shown in Figure 2a , 2b The first vacuum chamber door adjusting bolt 7-1 and the second vacuum chamber door adjusting bolt 7-2 are respectively provided with a pressure screw and a tension screw, when the cavity door is inclined forward, the cavity door is pushed backward through the pressure screw, and when the cavity door is inclined backward, the cavity door is pulled forward through the tension screw.

[0040] Embodiment one

[0041] First, the vacuum chamber fixed support group 3 is fixedly connected with the vacuum chamber cavity, the vacuum chamber door fixed support group 6 is connected with the vacuum chamber door, and then the first rotating shaft 1, the second rotating shaft group 5 and the corresponding bearings and bolts are sequentially assembled.

[0042] The first vacuum chamber fixing support 3-1 is provided with a first upper adjusting bolt group 4-1-1 and a first side adjusting bolt group 4-1-2 on two sides respectively; and the second vacuum chamber fixing support 3-2 is provided with a second side adjusting bolt group 4-2-2 and a second lower adjusting bolt group 4-2-1 on two sides respectively;

[0043] The first upper adjusting bolt group 4-1-1 and the second lower adjusting bolt group 4-2-1 are used to adjust the height of the first vacuum chamber fixing support 3-1 and the second vacuum chamber fixing support 3-2 of the first rotating shaft 1;

[0044] The first side adjusting bolt group 4-1-2 and the second side adjusting bolt group 4-2-2 are used to adjust the left and right of the first vacuum chamber fixing support 3-1 and the second vacuum chamber fixing support 3-2 of the first rotating shaft 1;

[0045] The first vacuum chamber door adjusting bolt 7-1 and the second vacuum chamber door adjusting bolt 7-2 are used to adjust the front and back of the vacuum chamber cavity door;

[0046] The vacuum chamber flange and the vacuum chamber door flange are aligned and tightly matched, and the problem of poor vacuum sealing caused by the dislocation of the vacuum chamber door flange and the vacuum chamber flange due to the wear of the hinge during the long-term use of the vacuum chamber cavity door is solved.

[0047] It should be emphasized that the above specific embodiments are only an explanation of the present application, and are not a limitation of the present application, and those skilled in the art can make modifications to the above embodiments without creative contribution after reading the present specification, but as long as it is within the scope of the claims of the present application, it is protected by the patent law.

Claims

1. A cavity door hinge device for a large vacuum chamber, comprising: a first rotating shaft (1) for correcting left-right and up-down deviations of the vacuum chamber door, a bearing support seat group (2) and a vacuum chamber fixed support group (3) arranged in order from inside to outside on both ends of the first rotating shaft (1), and a vacuum chamber adjusting bolt group (4) arranged on the vacuum chamber fixed support group (3); the vacuum chamber fixed support group (3) is used to fix the vacuum chamber cavity on both ends of the first rotating shaft (1); a second transmission shaft group (5) for correcting front-back deviations of the vacuum chamber door, the second transmission shaft group (5) is parallel to the first rotating shaft (1); a vacuum chamber door fixed support group (6) for supporting the second transmission shaft group (5) and fixed with the vacuum chamber door, and a vacuum chamber door adjusting bolt group (7) arranged on the vacuum chamber door fixed support group (6); an intermediate hinge shaft connecting piece (8) arranged between the first rotating shaft (1) and the second transmission shaft group shaft (5). The vacuum chamber fixed support group (3) is: a first vacuum chamber fixed support (3-1) arranged on the upper end of the first rotating shaft (1) and a second vacuum chamber fixed support (3-2) arranged on the lower end of the first rotating shaft; the vacuum chamber adjusting bolt group (4) is: a first vacuum chamber adjusting bolt group (4-1) arranged on the first vacuum chamber fixed support (3-1), a second vacuum chamber adjusting bolt group (4-2) arranged on the second vacuum chamber fixed support (3-2); the first vacuum chamber adjusting bolt group (4-1) is arranged on one of the two sides of the right angle on the outer side of the first vacuum chamber fixed support (3-1) in the oblique upward direction; the second vacuum chamber adjusting bolt group (4-2) is arranged on one of the two sides of the right angle on the outer side of the second vacuum chamber fixed support (3-2) in the oblique downward direction.

2. A hatch hinge assembly for a large vacuum chamber as defined in claim 1, wherein: The first vacuum chamber adjusting bolt group (4-1) is arranged on the two sides of the right angle in the oblique upward direction on the outer side of the first vacuum chamber fixed support (3-1), specifically: the first vacuum chamber adjusting bolt group (4-1) is divided into a first upper adjusting bolt group (4-1-1) and a first side adjusting bolt group (4-1-2), the upper adjusting bolt group (4-1-1) is arranged on the upper side of the right angle in the oblique upward direction on the outer side of the first vacuum chamber fixed support (3-1), and the side adjusting bolt group (4-1-2) is arranged on the side of the right angle in the oblique upward direction on the outer side of the first vacuum chamber fixed support (3-1); a compression screw and a tension screw are respectively arranged on the upper adjusting bolt group (4-1-1) and the side adjusting bolt group (4-1-2), the compression screw is used to press the door downward, and the tension screw is used to pull the door upward.

3. A chamber door hinge apparatus for a large vacuum chamber as defined in claim 2, wherein: ​ 4. A chamber door hinge apparatus for a large vacuum chamber as defined in claim 2, wherein: The second vacuum chamber adjusting bolt group (4-2) is arranged on two side edges of the second vacuum chamber fixed support (3-2) in a diagonal downward direction at right angles, specifically, the second vacuum chamber adjusting bolt group (4-2) is divided into a lower adjusting bolt group (4-2-1) and a side adjusting bolt group (4-2-2), the lower adjusting bolt group (4-2-1) is arranged on a lower edge line of the second vacuum chamber fixed support (3-2) in a diagonal downward direction at right angles, and the side adjusting bolt group is arranged on a side edge line of the second vacuum chamber fixed support (3-2) in a diagonal downward direction at right angles; the lower adjusting bolt group (4-2-1) and the side adjusting bolt group (4-2-2) are respectively provided with a pressure screw and a tension screw, the pressure screw is used for pressing the cavity door upward, and the tension screw is used for pulling the door downward.

5. A chamber door hinge apparatus for large vacuum chambers as defined in claim 2, wherein: The vacuum chamber door fixed support group (6) is a first vacuum chamber door fixed support (6-1) arranged on the first vacuum chamber fixed support (3-1) and a second vacuum chamber door fixed support (6-2) arranged on the second vacuum chamber fixed support; the vacuum chamber door adjusting bolt group (7) is a first vacuum chamber door adjusting bolt (7-1) arranged on the first vacuum chamber door fixed support (6-1) and a second vacuum chamber door adjusting bolt (7-2) arranged on the second vacuum chamber door fixed support (6-2).

6. A hatch hinge assembly for a large vacuum chamber as defined in claim 5, wherein: The first vacuum chamber door adjusting bolt (7-1) is arranged in an axial direction of the upper second transmission shaft group (5-1), and the second vacuum chamber door adjusting bolt (7-2) is arranged in an axial direction of the lower second transmission shaft group (5-2).

7. A chamber door hinge apparatus for a large vacuum chamber as defined in claim 5, wherein: The first vacuum chamber door adjusting bolt (7-1) and the second vacuum chamber door adjusting bolt (7-2) are respectively provided with a pressure screw and a tension screw, when the cavity door is inclined forward, the cavity door is pushed backward through the pressure screw, and when the cavity door is inclined backward, the cavity door is pulled forward through the tension screw.

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