High-precision air floatation transfer mechanism and control method thereof

Abstract

The invention discloses a high-precision air floatation transferring mechanism and a control method thereof. The high-precision air floatation transferring mechanism comprises a supporting table top, a first transferring module, a second transferring module, a bearing module and a control module. The first transferring module is arranged on the supporting table top. The second transfer module is connected with the movable part of the first transfer module; the bearing module comprises a rotating module, a first supporting plate, a material carrying plate, a first air floating module and a second air floating module, a first receding hole is formed in the first supporting plate, the first air floating module is located in the first receding hole, the rotating module is arranged on the first supporting plate, and the material carrying plate is connected with the first air floating module and a movable part of the rotating module at the same time; the first air flotation module is used for generating an air film between the first air flotation module and the supporting table top, and the second air flotation module is arranged on the lower surface of the supporting table top and used for generating an air film between the first supporting plate and the supporting table top; the control module is used for controlling the working states of the first air floatation module and the second air floatation module respectively. The bearing structure can bear larger pressure.

Description

Technical Field

[0001] The present application relates to the field of mechanical transportation technology, and in particular to a high-precision air floating transfer mechanism and a control method thereof. Background Art

[0002] At a time when high-tech industries such as electronic manufacturing and semiconductor packaging are booming, high-precision transfer of tiny parts has become a key link in determining product quality and production efficiency. As electronic products become increasingly powerful and compact, the size of chips and various precision electronic components continues to shrink, and the corresponding pin spacing and line accuracy requirements are almost stringent, and the accuracy standards of transfer platforms have been raised to micrometers or even nanometers.

[0003] The air-floating transfer technology uses a thin gas film to lift the transfer platform, greatly reducing the friction resistance during movement and providing a feasible path for high-precision transfer. Therefore, it has attracted wide attention and application in the industry. However, the existing conventional air-floating transfer mechanism has a difficult problem: once it has to bear a large pressure, the air-floating layer is very easy to collapse and cannot maintain a stable working state.

[0004] In the semiconductor packaging process, chip bonding is an extremely important step. When wire bonding is performed, a certain bonding force must be applied to firmly connect the metal wire to the chip pin and the substrate pad. This bonding force can sometimes reach thousands of Newtons. In existing ordinary air-floating transfer platforms, the air-floating layer mainly relies on the continuous introduction of high-pressure gas to form an air cushion to support the upper structure. Its original design focused on reducing friction to assist high-precision transfer, but did not fully consider the problem of high pressure bearing. Once a large bonding force is encountered, the fragile air-floating layer is instantly overloaded, the air cushion collapses rapidly, and the originally suspended load-bearing platform loses balance and falls into an unstable state, thereby affecting the overall product production efficiency. Summary of the invention

[0005] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a high-precision air floating transfer mechanism and a control method thereof, which can bear greater pressure.

[0006] In a first aspect, the present application provides a high-precision air floating transfer mechanism, comprising: Support table top; A first transfer module, wherein a fixed portion of the first transfer module is disposed on the support table; a second transfer module, wherein a fixed portion of the second transfer module is connected to a movable portion of the first transfer module; A bearing module, the bearing module is located on the support table, comprising a rotating module, a first supporting plate, a material carrying plate, a first air flotation module and a second air flotation module, the first supporting plate is provided with a first avoidance hole, the first air flotation module is located in the first avoidance hole, the fixed part of the rotating module is arranged on the first supporting plate, the lower surface of the material carrying plate is connected to the movable parts of the first air flotation module and the rotating module at the same time, the first air flotation module is used to generate an air film between itself and the support table, and the second air flotation module is arranged on the lower surface of the support table, and is used to generate an air film between the first supporting plate and the support table; A control module, wherein the control module is connected to the first air flotation module and the second air flotation module respectively, and is used to control the working states of the first air flotation module and the second air flotation module respectively.

[0007] According to the high-precision air-floating transfer mechanism of the first embodiment of the present application, there are at least the following beneficial effects: when the equipment is started, the control module synchronously sends a start-up instruction to the second air-floating module and the first air-floating module to regulate the working status of the two. After receiving the instruction, the second air-floating module quickly and evenly sprays the high-pressure gas to the corresponding area of ​​the first support plate, efficiently forming a layer of air film with suitable thickness and strong stability. At the same time, the first air-floating module starts to operate in the first avoidance hole in the first support plate, stably outputs high-pressure airflow downward, quickly builds another layer of air film, and cooperates with the second air-floating module to make the bearing module completely suspended above the support table, and the influence of friction is almost eliminated by the air cushion. In this ideal suspension state, the first transfer module and the second transfer module accurately drive the bearing module to move linearly in the X and Y directions smoothly and smoothly according to the preset program and process requirements; in the meantime, the rotating module accurately adjusts the angle of the carrier plate according to the instruction to ensure that the complex and changeable processing and transfer orientation requirements are met. When the bearing module is moved to the predetermined working position and is about to face key processes such as patch bonding that require a large bonding force, the control module responds quickly according to the preset logic, accurately controls the first air flotation module to stop supplying air, and turns off the air flotation function. The supporting force it bears is immediately withdrawn, and the first support plate in the bearing module and the carrier plate fall steadily on the support table under the action of gravity. The support table can be made of high-rigidity, high-load-bearing marble material with excellent compressive resistance, providing a stable and reliable bearing foundation for the large bonding force to be applied later. At the same time, the second air flotation module can flexibly adjust its working state according to the subsequent specific process requirements. If the subsequent process requires small-scale fine-tuning of the carrier plate to achieve higher-precision alignment, the second air flotation module maintains the air film support to help the carrier plate to be light and flexible. Adjustment. During the transfer operation, the dual air flotation modules work in perfect harmony to support the load-bearing module, and rely on the air cushion to isolate friction interference to ensure high-precision transfer. When faced with a scenario where a large bonding force is applied, the first air flotation module abuts against the support table to transmit the pressure vertically to the support table. Through reasonable switching of the air flotation modules, it can effectively buffer and absorb large pressure shocks, isolate the damage to the fragile structure of the air flotation, and maintain the transfer accuracy throughout the entire process, ensuring stable and efficient operation of the equipment, meeting the needs of complex production processes, and thus improving production efficiency.

[0008] According to some embodiments of the first aspect of the present application, the supporting module also includes a second support plate, the second support plate is provided with a second avoidance hole at the position of the first avoidance hole, the first air flotation module is located in the first avoidance hole and the second avoidance hole, and the loading plate is connected to the movable part of the rotating module through the second support plate.

[0009] According to some embodiments of the first aspect of the present application, the second support plate is provided with flexible connection blocks at intervals at the edge of the second avoidance hole, one end of the flexible connection block is connected to the upper surface of the second support plate, and the other end is connected to the lower surface of the loading plate.

[0010] According to some embodiments of the first aspect of the present application, the rotation module includes a U-shaped groove circular arc motor, a first slide rail and a first slider, the curvature of the U-shaped groove circular arc motor and the first slide rail corresponds to the first avoidance hole, the fixed part of the U-shaped groove circular arc motor and the first slide rail are respectively arranged concentrically with the first avoidance hole on the first support plate, the movable part of the U-shaped groove circular arc motor is connected to the lower surface of the second support plate, and the lower surface of the second support plate is also connected to the first slide rail through the first slider.

[0011] According to some embodiments of the first aspect of the present application, the rotation module further includes a sensing sheet and an in-position sensor, the sensing sheet being arranged on the lower surface of the second support plate, and the in-position sensor being arranged on the upper surface of the first support plate and located on the moving path of the sensing sheet.

[0012] According to some embodiments of the first aspect of the present application, supporting vertical surfaces are provided on both sides of the supporting table top, two first transferring modules are provided, the fixed parts of the two first transferring modules are respectively arranged on opposite sides of the supporting vertical surfaces, and the movable parts of the two first transferring modules move synchronously, and the two ends of the fixed part of the second transferring module are respectively arranged on the movable parts of the two first transferring modules.

[0013] According to some embodiments of the first aspect of the present application, the first transfer module includes a first U-groove linear motor, a first mounting block, a second slide rail and a second slider, the first U-groove linear motor is arranged on the supporting vertical surface, one side of the first mounting block is connected to the driving end of the first U-groove linear motor, the second slide rail is arranged on the supporting table surface and is parallel to the first U-groove linear motor, the lower surface of the first mounting block is connected to the second slide rail through the second slider, and the other side of the first mounting block is connected to the fixed part of the second transfer module.

[0014] According to some embodiments of the first aspect of the present application, the second transfer module includes a support block, a second U-groove linear motor, a second mounting block, a third slide rail and a third slider, the two ends of the support block are respectively connected to the two first mounting blocks, the second U-groove linear motor is arranged on the side wall of the support block, the driving end of the second U-groove linear motor is connected to the second mounting block, the third slide rail is arranged on the upper surface of the support block and is parallel to the second U-groove linear motor, the second mounting block is connected to the third slide rail through the third slider, and the second mounting block is connected to the upper surface of the first support plate.

[0015] According to some embodiments of the first aspect of the present application, it further includes a support frame, on which a plurality of seismic isolation airbags are provided, and the support table is arranged on the support frame through the seismic isolation airbags.

[0016] In a second aspect, the present application further provides a control method for a high-precision air floating transfer mechanism, which is applied to the high-precision air floating transfer mechanism described in any embodiment of the first aspect, and the control method comprises: In response to a first control instruction, the first air flotation module and the second air flotation module are turned on to form an air film between the first air flotation module, the first support plate and the support table; According to the first control instruction, control the first transfer module, the second transfer module and the rotation module to change the position of the carrier plate; In response to the second control instruction, the second air flotation module is continuously opened and the first air flotation module is closed, so that the first air flotation module contacts the support table and an air film is formed between the first support plate and the support table.

[0017] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 A schematic diagram of the structure of a high-precision air-floating transfer mechanism provided in one embodiment of the present application; Figure 2 A schematic diagram of the structure of a load-bearing module provided in one embodiment of the present application; Figure 3 An exploded schematic diagram of a load-bearing module provided in one embodiment of the present application; Figure 4 A schematic diagram of the structure of a first transfer module provided in one embodiment of the present application; Figure 5 A schematic diagram of the structure of a second transfer module provided in one embodiment of the present application; Figure 6 A flow chart of a control method for a high-precision air floating transfer mechanism provided in one embodiment of the present application.

[0019] The figures are as follows: Support table 100; support vertical surface 110; first transfer module 200; first U-groove linear motor 210; first mounting block 220; second slide rail 230; second slider 240; second transfer module 300; support block 310; second U-groove linear motor 320; second mounting block 330; third slide rail 340; third slider 350; bearing module 400; U-groove arc motor 411; first slide rail 412; first slider 413; induction sheet 414; in-position sensor 415; first support plate 420; first avoidance hole 421; loading plate 430; first air flotation module 440; second air flotation module 450; second support plate 460; second avoidance hole 461; flexible connection block 462; support frame 500; seismic isolation airbag 510. DETAILED DESCRIPTION

[0020] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0021] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0022] In the description of this application, if there is a description of first or second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0023] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0024] At a time when high-tech industries such as electronic manufacturing and semiconductor packaging are booming, high-precision transfer of tiny parts has become a key link in determining product quality and production efficiency. As electronic products become increasingly powerful and compact, the size of chips and various precision electronic components continues to shrink, and the corresponding pin spacing and line accuracy requirements are almost stringent, and the accuracy standards of transfer platforms have been raised to micrometers or even nanometers.

[0025] The air-floating transfer technology uses a thin gas film to lift the transfer platform, greatly reducing the friction resistance during movement and providing a feasible path for high-precision transfer. Therefore, it has attracted wide attention and application in the industry. However, the existing conventional air-floating transfer mechanism has a difficult problem: once it has to bear a large pressure, the air-floating layer is very easy to collapse and cannot maintain a stable working state.

[0026] In the semiconductor packaging process, chip bonding is an extremely important step. When wire bonding is performed, a certain bonding force must be applied to firmly connect the metal wire to the chip pin and the substrate pad. This bonding force can sometimes reach thousands of Newtons. In existing ordinary air-floating transfer platforms, the air-floating layer mainly relies on the continuous introduction of high-pressure gas to form an air cushion to support the upper structure. Its original design focused on reducing friction to assist high-precision transfer, but did not fully consider the problem of high pressure bearing. Once a large bonding force is encountered, the fragile air-floating layer is instantly overloaded, the air cushion collapses rapidly, and the originally suspended load-bearing platform loses balance and falls into an unstable state, thereby affecting the overall product production efficiency.

[0027] Based on this, the present application provides a high-precision air floating transfer mechanism and a control method thereof to solve the above-mentioned technical problems. The technical solutions of the present application are described in detail one by one below.

[0028] First, refer to Figures 1 to 3The present application provides a high-precision air-floating transfer mechanism, comprising: a support table 100, a first transfer module 200, a second transfer module 300, a bearing module 400 and a control module, wherein the fixed portion of the first transfer module 200 is arranged on the support table 100; the fixed portion of the second transfer module 300 is connected to the movable portion of the first transfer module 200; the bearing module 400 is located on the support table 100, and comprises a rotating module, a first support plate 420, a loading plate 430, a first air-floating module 440 and a second air-floating module 450, wherein the first support plate 420 is provided with a first avoidance hole 421, and the first air-floating module 440 is provided with a first avoidance hole 421. 0 is located in the first avoidance hole 421, the fixed part of the rotating module is arranged on the first supporting plate 420, the lower surface of the loading plate 430 is connected with the first air flotation module 440 and the movable part of the rotating module at the same time, the first air flotation module 440 is used to generate an air film between itself and the supporting table 100, and the second air flotation module 450 is arranged on the lower surface of the supporting table 100, and is used to generate an air film between the first supporting plate 420 and the supporting table 100; the control module is respectively connected with the first air flotation module 440 and the second air flotation module 450, and is used to control the working states of the first air flotation module 440 and the second air flotation module 450 respectively.

[0029] When the equipment is started, the control module synchronously sends a start-up command to the second air flotation module 450 and the first air flotation module 440 to regulate the working status of the two. After receiving the command, the second air flotation module 450 quickly and evenly sprays the high-pressure gas to the corresponding area of ​​the first support plate 420, efficiently forming a layer of air film with suitable thickness and strong stability. At the same time, the first air flotation module 440 starts to operate in the first avoidance hole 421 in the first support plate 420, stably outputs high-pressure airflow downward, and quickly builds another layer of air film, and cooperates with the second air flotation module 450 to make the bearing module 400 completely suspended on the support table 100, and the friction effect is almost eliminated by the air cushion. In this ideal suspension state, the first transfer module 200 and the second transfer module 300 accurately drive the bearing module 400 to move linearly in the X and Y directions steadily and smoothly according to the preset procedures and process requirements; during this period, the rotation module accurately adjusts the angle of the carrier plate 430 according to the command to ensure that the complex and changeable processing and transfer orientation requirements are met. When the bearing module 400 is moved to the predetermined working position and is about to face key processes such as patch bonding that require a large bonding force, the control module responds quickly according to the preset logic, accurately controls the first air flotation module 440 to stop supplying air, turns off the air flotation function, and immediately withdraws the supporting force it bears. The first support plate 420 in the bearing module 400 and the carrier plate 430 are subjected to gravity and fall steadily on the support table 100. The support table 100 can be made of marble material with high rigidity and high load-bearing capacity, which has excellent compressive resistance and provides a stable and reliable bearing foundation for the large bonding force to be applied later. At the same time, the second air flotation module 450 can flexibly adjust the working state according to the subsequent specific process requirements. If the subsequent process still needs to make small-scale fine adjustments to the carrier plate 430 to achieve higher precision alignment, the second air flotation module 450 maintains the air film support to help the carrier plate 430 to adjust lightly and flexibly. During the transfer operation, the dual air flotation modules work in perfect harmony to support the load-bearing module 400, and rely on the air cushion to isolate friction interference to ensure high-precision transfer. When faced with a scenario where a large bonding force is applied, the first air flotation module 440 abuts against the support table 100, and transmits the pressure vertically to the support table 100, effectively buffering and absorbing large pressure shocks, isolating the damage to the fragile structure of the air flotation, and stably maintaining the transfer accuracy throughout the entire process, ensuring stable and efficient operation of the equipment, meeting the needs of complex production processes, and thus improving production efficiency.

[0030] Reference Figure 2 and Figure 3It can be understood that the bearing module 400 also includes a second support plate 460, and the second support plate 460 is provided with a second avoidance hole 461 at the position of the first avoidance hole 421, and the first air flotation module 440 is located in the first avoidance hole 421 and the second avoidance hole 461, and the carrier plate 430 is connected to the movable part of the rotating module through the second support plate 460. The addition of the second support plate 460 provides an additional support structure for the entire bearing module 400. When performing high-precision transfer operations or bearing certain external interferences, the second support plate 460 can share the force transmitted by the carrier plate 430, which plays a role of strengthening and stabilizing, so that the bearing module 400 can carry the material more stably and ensure the normal operation of the equipment under complex working conditions. At the same time, when the rotating module drives the carrier plate 430 to adjust the angle, the force can be transmitted more smoothly through the second support plate 460, reducing the shaking or offset caused by the unreasonable connection structure, so that when fine-tuning the angle of the material, the rotation angle can be more accurately controlled to meet the requirements of high-precision processing.

[0031] Reference Figure 3 It is understandable that the second support plate 460 is provided with flexible connection blocks 462 at intervals at the edge of the second avoidance hole 461, one end of the flexible connection block 462 is connected to the upper surface of the second support plate 460, and the other end is connected to the lower surface of the carrier plate 430. During the operation of the equipment, the carrier plate 430 may be impacted due to sudden start and stop, acceleration and deceleration or external vibration. The flexible connection blocks 462 play a similar role as shock absorption. They can absorb these impact energies and prevent the impact force from being directly transmitted to the second support plate 460 and other key components. In addition, since some dimensional errors are inevitably generated during the manufacturing and assembly process, or slight deformation occurs due to material fatigue and other reasons after the equipment is used for a long time, the flexible connection blocks 462 can adapt to these situations well. These flexible connection blocks 462 can compensate for the position difference between the carrier plate 430 and the second support plate 460 to a certain extent, so that the carrier plate 430 can still maintain a relatively stable working state when it is not completely flat.

[0032] Continue to refer to Figure 3It can be understood that the rotation module includes a U-shaped slot circular arc motor 411, a first slide rail 412 and a first slider 413, the curvature of the U-shaped slot circular arc motor 411 and the first slide rail 412 corresponds to the first avoidance hole 421, the fixed part of the U-shaped slot circular arc motor 411 and the first slide rail 412 are respectively arranged on the first support plate 420 concentrically with the first avoidance hole 421, the movable part of the U-shaped slot circular arc motor 411 is connected to the lower surface of the second support plate 460, and the lower surface of the second support plate 460 is also connected to the first slide rail 412 through the first slider 413. When the fixed part of the U-shaped slot circular arc motor 411, the first slide rail 412 and the first avoidance hole 421 are concentrically arranged on the first support plate 420, a fixed rotation center is defined, which enables the carrier plate 430 to always rotate stably around this center under the drive of the rotation module. If the rotating module is not concentrically arranged, the carrier plate 430 will be eccentric when rotating. The eccentric rotation will cause the material on the carrier plate 430 to be subjected to uneven centrifugal force, which may cause the component to deviate, shake or even fall.

[0033] Continue to refer to Figure 3 It can be understood that the rotation module also includes an induction sheet 414 and an in-place sensor 415, wherein the induction sheet 414 is arranged on the lower surface of the second support plate 460, and the in-place sensor 415 is arranged on the upper surface of the first support plate 420 and is located on the moving path of the induction sheet 414. During the process of the rotation module driving the carrier plate 430 to rotate, when the induction sheet 414 rotates with the carrier plate 430 to a position corresponding to the in-place sensor 415, the in-place sensor 415 will generate a signal change. In this way, it can be accurately determined whether the carrier plate 430 has rotated to a preset angle position. At the same time, the control system can adjust the drive of the U-groove arc motor 411 in real time according to the feedback signal of the in-place sensor 415, promptly correct the angle deviation during the rotation process, and improve the safety and stability of the equipment operation.

[0034] Reference Figure 1 and Figure 4 It can be understood that the supporting surface 110 is provided on both sides of the supporting table 100, and two first transfer modules 200 are provided. The fixed parts of the two first transfer modules 200 are respectively arranged on the opposite sides of the supporting surface 110, and the movable parts of the two first transfer modules 200 move synchronously, and the two ends of the fixed part of the second transfer module 300 are respectively arranged on the movable parts of the two first transfer modules 200. By supporting the second transfer module 300 and the bearing module 400 by the bilaterally symmetrical first transfer modules 200, the deformation of the supporting structure caused by uneven force can be reduced, and the load can be better balanced. The movable parts of the two first transfer modules 200 move synchronously, and can synchronously drive the second transfer module 300 to move smoothly, thereby improving the stability of operation.

[0035] Continue to refer to Figure 1 and Figure 4 It can be understood that the first transfer module 200 includes a first U-shaped slot linear motor 210, a first mounting block 220, a second slide rail 230 and a second slider 240. The first U-shaped slot linear motor 210 is arranged on the support vertical surface 110. One side of the first mounting block 220 is connected to the driving end of the first U-shaped slot linear motor 210. The second slide rail 230 is arranged on the support table 100 and is parallel to the first U-shaped slot linear motor 210. The lower surface of the first mounting block 220 is connected to the second slide rail 230 through the second slider 240. The other side of the first mounting block 220 is connected to the fixed part of the second transfer module 300. When the first U-shaped slot linear motor 210 drives the first mounting block 220 to move, the second slide rail 230 and the second slider 240 play a precise guiding role, reducing the vibration and shaking that may be caused by uneven power transmission or loose components, and ensuring the stability of the movement process.

[0036] Reference Figure 1 and Figure 5 It can be understood that the second transfer module 300 includes a support block 310, a second U-shaped slot linear motor 320, a second mounting block 330, a third slide rail 340 and a third slider 350. The two ends of the support block 310 are respectively connected to the two first mounting blocks 220. The second U-shaped slot linear motor 320 is arranged on the side wall of the support block 310. The driving end of the second U-shaped slot linear motor 320 is connected to the second mounting block 330. The third slide rail 340 is arranged on the upper surface of the support block 310 and is parallel to the second U-shaped slot linear motor 320. The second mounting block 330 is connected to the third slide rail 340 through the third slider 350. The second mounting block 330 is connected to the upper surface of the first support plate 420. When the second U-shaped slot linear motor 320 drives the second mounting block 330 to move, the cooperation of the third slide rail 340 and the third slider 350 plays a precise guiding role, reduces the vibration and shaking that may be caused by uneven power transmission or loose components, and ensures the stability of the movement process.

[0037] It should be noted that the first U-slot linear motor 210 and the second U-slot linear motor 320 do not have an iron core inside, and there is no cogging effect and electromagnetic attraction. The mover will not be disturbed by these factors during movement, so it can achieve higher positioning accuracy, and can reach micron or even sub-micron level positioning accuracy, meeting the application requirements with extremely high positioning accuracy requirements. At the same time, there is no mechanical contact between the mover and stator of the U-slot linear motor, and there is no friction loss problem in traditional mechanical transmission. Therefore, the mechanical efficiency is high and the energy loss is small, which can effectively reduce the energy consumption and operating costs of the equipment, and also reduce the wear and failure caused by friction, and extend the service life of the equipment.

[0038] Reference Figure 1 It can be understood that the high-precision air-floating transfer mechanism provided by the present application also includes a support frame 500, on which a number of seismic isolation airbags 510 are provided, and the support table 100 is arranged on the support frame 500 through the seismic isolation airbags 510. In an actual working environment, the equipment may be disturbed by vibrations generated by surrounding equipment, ground traffic or other factors. The seismic isolation airbags 510 can effectively isolate these external vibrations, and at the same time, the seismic isolation airbags 510 can buffer the impact force generated when pressing the loading plate 430, so that the support table 100 and the bearing module 400, transfer module and other components thereon are protected from vibration.

[0039] Second, refer to Figure 6 The present application also provides a control method for a high-precision air-floating transfer mechanism, which is applied to the high-precision air-floating transfer mechanism of any embodiment of the first aspect, and includes but is not limited to the following steps: Step S610: in response to the first control instruction, start the first air flotation module and the second air flotation module to form an air film between the first air flotation module, the first support plate and the support table; Step S620: According to the first control instruction, the first transfer module, the second transfer module and the rotating module are controlled to change the position of the carrier plate; Step S630: In response to the second control instruction, the second air flotation module is continuously turned on and the first air flotation module is turned off, so that the first air flotation module contacts the support table and an air film is formed between the first support plate and the support table.

[0040] In step S610 to step S630, in response to the first control instruction, the first air flotation module 440 and the second air flotation module 450 are turned on at the same time, and an air film is formed between the first air flotation module 440, the first support plate 420 and the support table 100. This dual air flotation module cooperative working mode can make the bearing module 400 stably suspended on the support table 100, effectively reducing the friction. In this nearly frictionless state, the first transfer module 200, the second transfer module 300 and the rotating module are uniformly controlled to achieve comprehensive adjustment of the carrier plate 430 in plane and angle. When the second control instruction is received, the control method can orderly convert the working state. The second air flotation module 450 is continuously turned on and the first air flotation module 440 is closed, so that the first air flotation module 440 is in contact with the support table 100, and the air film is still maintained between the first support plate 420 and the support table 100. This switching method can effectively transfer the greater pressure (such as the bonding force during bonding) that may be applied to the carrier plate 430 to the support table 100 while ensuring the stability of the carrier module 400. The entire switching process is smooth and orderly, avoiding equipment shaking or precision loss caused by sudden changes in the working mode, and providing a stable foundation for subsequent pressure-bearing operations. By turning on the dual air flotation modules and multi-module linkage control, high-precision transfer operations are achieved; in the pressure-bearing stage, through reasonable switching of air flotation modules, it is ensured that the equipment can stably withstand pressure, effectively buffer and absorb large pressure shocks, isolate pressure damage to the fragile structure of the air flotation, and stably maintain transfer accuracy throughout the process, ensuring stable and efficient operation of the equipment, meeting the needs of complex production processes, thereby improving production efficiency.

[0041] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present application.

Claims

1. A high-precision air floating transfer mechanism, characterized in that: include: Support table top; A first transfer module, wherein a fixed portion of the first transfer module is disposed on the support table; a second transfer module, wherein a fixed portion of the second transfer module is connected to a movable portion of the first transfer module; A bearing module, the bearing module is located on the support table, comprising a rotating module, a first supporting plate, a material carrying plate, a first air flotation module and a second air flotation module, the first supporting plate is provided with a first avoidance hole, the first air flotation module is located in the first avoidance hole, the fixed part of the rotating module is arranged on the first supporting plate, the lower surface of the material carrying plate is connected to the movable parts of the first air flotation module and the rotating module at the same time, the first air flotation module is used to generate an air film between itself and the support table, and the second air flotation module is arranged on the lower surface of the support table, and is used to generate an air film between the first supporting plate and the support table; A control module, wherein the control module is connected to the first air flotation module and the second air flotation module respectively, and is used to control the working states of the first air flotation module and the second air flotation module respectively.

2. The high-precision air floating transfer mechanism according to claim 1, characterized in that: The bearing module also includes a second support plate, which is provided with a second avoidance hole at the position of the first avoidance hole. The first air flotation module is located in the first avoidance hole and the second avoidance hole. The loading plate is connected to the movable part of the rotating module through the second support plate.

3. The high-precision air floating transfer mechanism according to claim 2, characterized in that: The second support plate is provided with flexible connection blocks at intervals at the edge of the second avoidance hole, one end of the flexible connection block is connected to the upper surface of the second support plate, and the other end is connected to the lower surface of the material loading plate.

4. The high-precision air floating transfer mechanism according to claim 2, characterized in that: The rotation module includes a U-shaped groove circular arc motor, a first slide rail and a first slider. The curvature of the U-shaped groove circular arc motor and the first slide rail corresponds to the first avoidance hole. The fixed part of the U-shaped groove circular arc motor and the first slide rail are respectively arranged concentrically with the first avoidance hole on the first support plate. The movable part of the U-shaped groove circular arc motor is connected to the lower surface of the second support plate, and the lower surface of the second support plate is also connected to the first slide rail through the first slider.

5. The high-precision air floating transfer mechanism according to claim 4, characterized in that: The rotating module further includes a sensing sheet and an in-position sensor. The sensing sheet is disposed on the lower surface of the second supporting plate, and the in-position sensor is disposed on the upper surface of the first supporting plate and is located on a moving path of the sensing sheet.

6. The high-precision air floating transfer mechanism according to claim 1, characterized in that: Support vertical surfaces are provided on both sides of the support table, and two first transfer modules are provided. The fixed parts of the two first transfer modules are respectively arranged on opposite sides of the support vertical surfaces, and the movable parts of the two first transfer modules move synchronously, and the two ends of the fixed part of the second transfer module are respectively arranged on the movable parts of the two first transfer modules.

7. The high-precision air floating transfer mechanism according to claim 6, characterized in that: The first transfer module includes a first U-groove linear motor, a first mounting block, a second slide rail and a second slider. The first U-groove linear motor is arranged on the supporting vertical surface. One side of the first mounting block is connected to the driving end of the first U-groove linear motor. The second slide rail is arranged on the supporting table and is parallel to the first U-groove linear motor. The lower surface of the first mounting block is connected to the second slide rail through the second slider. The other side of the first mounting block is connected to the fixed part of the second transfer module.

8. The high-precision air floating transfer mechanism according to claim 7, characterized in that: The second transfer module includes a support block, a second U-groove linear motor, a second mounting block, a third slide rail and a third slider, the two ends of the support block are respectively connected to the two first mounting blocks, the second U-groove linear motor is arranged on the side wall of the support block, the driving end of the second U-groove linear motor is connected to the second mounting block, the third slide rail is arranged on the upper surface of the support block and is parallel to the second U-groove linear motor, the second mounting block is connected to the third slide rail through the third slider, and the second mounting block is connected to the upper surface of the first support plate.

9. The high-precision air floating transfer mechanism according to claim 1, characterized in that: It also includes a support frame, on which a plurality of seismic isolation air bags are arranged, and the support table is arranged on the support frame through the seismic isolation air bags.

10. A control method for a high-precision air floating transfer mechanism, characterized in that: Applicable to the high-precision air floating transfer mechanism according to any one of claims 1 to 9, the control method comprises: In response to a first control instruction, the first air flotation module and the second air flotation module are turned on to form an air film between the first air flotation module, the first support plate and the support table; According to the first control instruction, control the first transfer module, the second transfer module and the rotation module to change the position of the carrier plate; In response to the second control instruction, the second air flotation module is continuously opened and the first air flotation module is closed, so that the first air flotation module contacts the support table and an air film is formed between the first support plate and the support table.

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