Universal joint installation tool and installation method

Abstract

The universal joint mounting tool comprises a bearing seat and a positioning cover, the bearing seat is used for bearing the lower portion of the middle of a carrier, a positioning ring table matched with a lower ring cavity in a clamped mode is arranged on the bearing seat, and a lower positioning hole used for positioning the lower end of a universal joint is formed in the middle of the bearing seat; the positioning cover is provided with an upper positioning hole for the upper end of the universal joint to penetrate through so as to position the universal joint, and a matching ring table clamped and matched with the upper ring groove. According to the universal joint mounting tool provided by the invention, the positioning ring table on the bearing seat is clamped and matched with the lower ring cavity of the carrier, so that the coaxiality of the bearing seat and the carrier is ensured, then the lower end of the universal joint is positioned by using the lower positioning hole of the bearing seat, and finally, the upper end of the universal joint is positioned by using the upper positioning hole of the positioning cover; after the coaxiality of the universal joint and the carrier is guaranteed, the annular pressing plate is fixed to the carrier and the universal joint through the connecting piece, the installation precision between the carrier and the universal joint is guaranteed, and the polishing quality of wafers in the polishing process is guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of universal joint installation, and more specifically, relates to a universal joint installation tool and an installation method. Background Art

[0002] As the diameter of semiconductor wafers increases, the chemical mechanical polishing process (CMP) has put forward higher requirements for the high flatness, uniformity and consistency of the wafer surface. In order to meet the above requirements, CMP technology continues to advance and develop, including the use of more advanced polishing head design, more sophisticated pressure control system and more efficient polishing materials.

[0003] As an important structure of the polishing head, the universal joint has the following main functions: stabilizing the wafer, applying pressure, and driving rotation. The installation accuracy of the polishing head directly affects the polishing removal efficiency and removal quality of the wafer. Therefore, it is particularly important to ensure the assembly accuracy of the polishing head. At present, in the process of assembling the polishing head, a gasket is often set between the outer peripheral wall of the universal joint and the inner peripheral wall of the carrier to adjust the axis of the universal joint. The centering of the universal joint is difficult to be accurately controlled, thus affecting the surface removal rate of the wafer. Summary of the invention

[0004] The object of the present invention is to provide a universal joint installation tool and installation method, which can improve the installation accuracy and installation efficiency of the universal joint, thereby ensuring the assembly effect of the polishing head, and facilitating the polishing removal efficiency and removal quality of the wafer.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: to provide a universal joint installation tool for positioning the universal joint on a carrier, a ring pressure plate is provided above the universal joint and the carrier, the ring pressure plate is connected to the carrier through a connecting piece, the bottom of the carrier is provided with a lower ring cavity opening downward, the top is provided with a central cavity opening upward and an upper ring groove located on the outer periphery of the central cavity, the universal joint installation tool includes a supporting seat and a positioning cover, the supporting seat is used to support the lower middle part of the carrier, the supporting seat is provided with a positioning ring platform that is snap-fitted with the lower ring cavity, the middle part of the supporting seat is provided with a lower positioning hole for positioning the lower end of the universal joint, the positioning cover is provided with an upper positioning hole for the upper end of the universal joint to pass through to position the universal joint, and a matching ring platform that is snap-fitted with the upper ring groove.

[0006] In a possible implementation, a weight-reducing cavity with an opening facing upward is provided on the supporting seat, the weight-reducing cavity extends in a circumferential direction, and the positioning ring is located at the outer periphery of the weight-reducing cavity.

[0007] In a possible implementation, a plurality of through holes are provided on the bottom wall of the weight-reducing cavity, and the through holes are arranged at intervals along the circumference of the weight-reducing cavity. The positioning ring is located at the outer periphery of the weight-reducing cavity and is arranged close to the outer ring of the supporting seat.

[0008] In a possible implementation, a downwardly protruding middle ring platform is further provided below the positioning cover. The middle ring platform is located at the outer periphery of the upper positioning hole and is used to be clamped to the inner periphery of the ring pressure plate.

[0009] In some embodiments, a downwardly protruding outer ring platform is provided below the positioning cover, and an accommodating cavity for accommodating the positioning ring platform is formed between the outer ring platform and the middle ring platform.

[0010] In a possible implementation, an operating hole located at the outer periphery of the upper positioning hole is provided on the top wall of the positioning cover, and the operating hole is used to install the connecting member on the ring pressure plate.

[0011] In some embodiments, a plurality of operation holes are provided, and the plurality of operation holes are spaced apart along the circumference of the positioning cover.

[0012] In some embodiments, the operation hole is a fan-shaped hole, four operation holes are provided, and the fan-shaped angle of each operation hole is a right angle.

[0013] Compared with the prior art, the solution shown in the embodiment of the present application utilizes the positioning ring stage on the supporting seat to engage with the lower ring cavity of the carrier to ensure the coaxiality of the supporting seat and the carrier, and then utilizes the lower positioning hole of the supporting seat to position the lower end of the universal joint, and finally uses the upper positioning hole of the positioning cover to position the upper end of the universal joint. After ensuring the coaxiality of the universal joint and the carrier, the ring pressure plate is fixed to the carrier and the universal joint with the help of a connecting piece, thereby ensuring the installation accuracy between the carrier and the universal joint, ensuring the polishing quality of the edge of the wafer during the polishing process, and ensuring the processing quality of the wafer.

[0014] The present invention also provides a universal joint installation method for installing the universal joint on a carrier using a universal joint installation tool, comprising the following steps: S100: Install the carrier onto the supporting seat so that the positioning ring stage is engaged with the lower ring cavity; S200: Install the universal joint on the carrier so that the lower end of the universal joint is positioned and matched with the lower positioning hole; S300: Install the ring pressure plate above the universal joint and the carrier, connect the ring pressure plate and the carrier with the connecting parts, remove the supporting seat and the positioning cover, and complete the installation of the universal joint and the carrier.

[0015] In a possible implementation, after step S200, the method further includes: Install the positioning cover on the universal joint, make the universal joint fit in the upper positioning hole, support the upper end of the universal joint, and remove the positioning cover; Step S300 also includes installing a ring pressure plate above the universal joint and the carrier so that the middle ring stage of the positioning cover is clamped on the inner periphery of the ring pressure plate.

[0016] The above-mentioned universal joint installation method can conveniently and quickly install the universal joint in the center relative to the carrier, ensuring the coaxiality between the two. This method reduces the installation difficulty, saves time, improves the installation accuracy of the universal joint, helps to extend the service life of the polishing head, and ensures the polishing quality of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0018] Figure 1 A schematic diagram of the exploded structure of a universal joint installation tool provided in an embodiment of the present invention; Figure 2 For the embodiment of the present invention Figure 1 A structural diagram of the universal joint installation tooling in use; Figure 3 For the embodiment of the present invention Figure 2 Schematic diagram of the local enlarged structure in; Figure 4 A schematic diagram of the exploded structure of the universal joint, the carrier and the ring pressure plate provided in an embodiment of the present invention; Figure 5 A schematic diagram of the exploded structure of the universal joint, carrier, elastic pad and ring pressure plate provided in an embodiment of the present invention.

[0019] Among them, the reference numerals in the figure are: 1. Support seat; 11. Positioning ring platform; 12. Lower positioning hole; 13. Weight reduction cavity; 14. Through hole; 2. Positioning cover; 21. Upper positioning hole; 22. Matching ring platform; 23. Middle ring platform; 24. Operating hole; 25. Outer ring platform; 3. Universal joint; 4. Carrier; 41. Lower ring cavity; 42. Center cavity; 43. Upper ring groove; 5. Ring pressure plate; 51. Connector; 52. Elastic pad. DETAILED DESCRIPTION

[0020] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0021] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on another element or indirectly on another element. It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "back", "top", "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. The terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "several" is two or more, unless otherwise clearly and specifically defined.

[0022] Please also read Figures 1 to 3 , the universal joint installation tool provided by the present invention is now described. The universal joint installation tool is used to position the universal joint 3 on the carrier 4. A ring pressure plate 5 is provided above the universal joint 3 and the carrier 4. The ring pressure plate 5 is connected to the carrier 4 through a connecting piece 51. The bottom of the carrier 4 is provided with a lower ring cavity 41 opening downward, the top is provided with a central cavity 42 opening upward, and an upper ring groove 43 located on the periphery of the central cavity 42. The universal joint installation tool includes a support seat 1 and a positioning cover 2. The support seat 1 is used to support the lower middle part of the carrier 4. The support seat 1 is provided with a positioning ring stage 11 that is snap-fitted with the lower ring cavity 41. The middle part of the support seat 1 is provided with a lower positioning hole 12 for positioning the lower end of the universal joint 3. The positioning cover 2 is provided with an upper positioning hole 21 for the upper end of the universal joint 3 to penetrate to position the universal joint 3, and a matching ring stage 22 that is snap-fitted with the upper ring groove 43.

[0023] Compared with the prior art, the universal joint installation tool provided in the present embodiment utilizes the positioning ring stage 11 on the supporting seat 1 to engage with the lower ring cavity 41 of the carrier 4 to ensure the coaxiality of the supporting seat 1 and the carrier 4, and then utilizes the lower positioning hole 12 of the supporting seat 1 to position the lower end of the universal joint 3, and finally uses the upper positioning hole 21 of the positioning cover 2 to position the upper end of the universal joint 3. After ensuring the coaxiality of the universal joint 3 and the carrier 4, the ring pressure plate 5 is fixed to the carrier 4 and the universal joint 3 with the help of the connecting piece 51, thereby ensuring the installation accuracy between the carrier 4 and the universal joint 3, ensuring the polishing quality of the edge position of the wafer during the polishing process, and ensuring the processing quality of the wafer.

[0024] When clarification is required, see Figure 4When the universal joint 3 is mounted on the carrier 4, the coaxiality requirement between the two needs to be ensured. Since there is a gap between the outer peripheral wall of the universal joint 3 and the inner peripheral wall of the cavity of the carrier 4 for mounting the universal joint 3, it is difficult to effectively limit the coaxiality between the universal joint 3 and the carrier 4. After the relative positions of the two are locked by the ring pressure plate 5 and the connecting piece 51, the two do not meet the coaxiality requirement, resulting in greater friction between the universal joint 3 and the flange, which seriously affects the service life of components such as the sealing ring, and also affects the polishing quality of the wafer.

[0025] In this embodiment, the coaxiality between the carrier 4 and the support seat 1 is ensured by the snap fit of the positioning ring stage 11 and the lower ring cavity 41, and the coaxiality is transferred to the universal joint 3 by the snap fit of the lower positioning hole 12 and the lower end of the universal joint 3, so that the lower end of the universal joint 3 and the carrier 4 meet the coaxiality requirements. Then, by installing the positioning cover 2, the upper end of the universal joint 3 is roughly positioned by means of the upper positioning hole 21, so that the upper end of the universal joint 3 and the carrier 4 meet the preliminary coaxiality requirements. Then, the positioning cover 2 is removed, and the ring pressure plate 5 is installed above the universal joint 3 and the carrier 4. At the same time, the coaxiality requirements of the universal joint 3 and the carrier 4 are ensured by the cooperation of the upper positioning hole 21 and the upper end of the universal joint 3, so that the support seat 1, the carrier 4, the universal joint 3 and the positioning cover 2 all meet the coaxiality requirements. Finally, the relative positions of the ring pressure plate 5, the carrier 4 and the universal joint 3 are locked by means of the connecting piece 51. Afterwards, the positioning cover 2 and the supporting seat 1 are removed to complete the coaxial installation of the carrier 4 and the universal joint 3 .

[0026] Specifically, the positioning ring stage 11 is arranged near the inner ring position of the lower ring cavity 41, the positioning ring stage 11 extends into the lower ring cavity 41, and the inner circumferential wall of the positioning ring stage 11 contacts the inner circumferential wall of the lower ring cavity 41, so that a snap-fitting effect is formed between the positioning ring stage 11 and the lower ring cavity 41, so that the two have good coaxiality.

[0027] The above method realizes the effective transmission of coaxiality among multiple components. The carrier 4 is respectively connected with the positioning cover 2 and the supporting seat 1 so that the non-contacting positioning cover 2 and the supporting seat 1 meet the coaxiality requirement. Afterwards, the upper and lower ends of the universal joint 3 are coaxially positioned with the help of the upper positioning hole 21 and the lower positioning hole 12. Finally, the supporting seat 1, the carrier 4, the universal joint 3 and the positioning cover 2 all meet the coaxiality requirement, ensuring the centered installation of the universal joint 3, improving the installation accuracy of the polishing head, and thus ensuring the subsequent polishing quality of the wafer.

[0028] In one possible implementation, see Figures 1 to 3The support seat 1 is provided with a weight-reducing cavity 13 with an opening facing upward, and the weight-reducing cavity 13 extends in the circumferential direction, and the positioning ring stage 11 is located at the periphery of the weight-reducing cavity 13. The weight-reducing cavity 13 provided on the support seat 1 can effectively reduce the weight of the component, while reducing the material consumption, thereby reducing the construction cost. The weight-reducing cavity 13 is provided with an opening facing upward, and the positioning ring stage 11 is located at the periphery of the weight-reducing cavity 13, which can be effectively engaged with the lower ring cavity 41 of the carrier 4 to ensure the coaxiality of the carrier 4 and the support seat 1. The inner ring side wall and the outer ring side wall of the weight-reducing cavity 13 can be effectively supported under the carrier 4, so that there is a gap between the bottom surface of the support seat 1 at other bottom surfaces of the carrier 4, ensuring that the positioning ring stage 11 can be effectively engaged with the lower ring cavity 41 to meet the coaxiality requirements.

[0029] In one possible implementation, see Figures 1 to 3 , a plurality of through holes 14 are provided on the bottom wall of the weight-reducing cavity 13, and the through holes 14 are arranged at intervals along the circumference of the weight-reducing cavity 13, and the positioning ring 11 is located at the outer periphery of the weight-reducing cavity 13 and is arranged close to the outer ring of the support seat 1. The provision of the through holes 14 further reduces the structural weight and manufacturing cost of the support seat 1. There are a plurality of through holes 14, and they are arranged at intervals along the circumference of the support seat 1, so as to achieve uniform weight reduction at different circumferential positions of the support seat 1, avoid affecting the supporting effect of the carrier 4 and the upper components, and ensure good structural positioning performance.

[0030] More importantly, after the carrier 4 and the universal joint 3 are positioned and connected, a tool can be easily used to extend into the through hole 14 to push the bottom wall of the carrier 4, thereby allowing the supporting seat 1 to be smoothly detached from the bottom of the carrier 4, facilitating the disassembly of subsequent structures, helping to reduce operational difficulty and improve operational efficiency.

[0031] In one possible implementation, see Figures 1 to 3 A downwardly protruding middle ring platform 23 is further provided below the positioning cover 2 . The middle ring platform 23 is located at the outer periphery of the upper positioning hole 21 . The middle ring platform 23 is used to be clamped to the inner periphery of the ring pressure plate 5 .

[0032] In this embodiment, by setting a middle ring platform 23 under the positioning seat, the middle ring platform 23 can be further used to coaxially position the ring pressure plate 5 to ensure the accuracy of the installation position of the ring pressure plate 5, facilitate subsequent effective correspondence with the carrier 4, and thereby improve the connection efficiency of the connecting piece 51.

[0033] Specifically, the annular pressure plate 5 is provided with a plurality of through holes distributed circumferentially at intervals for the connecting members 51 to pass through, and the carrier 4 is provided with a plurality of threaded holes corresponding one to one with the through holes. The connecting members 51 can be components such as screws and studs, so as to reliably connect the annular pressure plate 5 to the carrier 4.

[0034] For further information, see Figure 2 , Figure 3 and Figure 5An elastic pad 52 is also provided between the ring pressure plate 5 and the universal joint 3. When the ring pressure plate 5 is connected to the carrier 4 by using the connecting piece 51, the elastic pad 52 is squeezed downward and can effectively press against the top of the universal joint 3, which helps to increase the friction between the universal joint 3 and the carrier 4, ensure the effective limitation of the relative position between the universal joint 3 and the carrier 4, and avoid the position dislocation of the universal joint 3 affecting the coaxiality requirement between the carrier 4.

[0035] For some examples, see Figures 1 to 3 An outer ring platform 25 protruding downward is provided below the positioning cover 2 , and an accommodating cavity for accommodating the positioning ring platform 11 is formed between the outer ring platform 25 and the middle ring platform 23 .

[0036] In this embodiment, when the tooling is not in use, in order to facilitate storage, the space between the outer ring stage 25 and the middle ring stage 23 is used to form a receiving cavity, and the positioning ring stage 11 of the supporting seat 1 can be easily extended into the receiving cavity, so that the outer peripheral wall of the positioning ring stage 11 contacts the inner peripheral wall of the receiving cavity to form a snap fit, so that the positioning cover 2 and the supporting seat 1 are combined into a whole, which is convenient for the storage of the tooling and avoids damage to the components.

[0037] When it is necessary to use tooling to position the carrier 4 and the universal joint 3, the outer ring stage 25 can be easily extended into the central cavity 42 of the carrier 4. At this time, a gap is provided between the outer peripheral wall of the outer ring stage 25 and the inner peripheral wall of the central cavity 42, thereby avoiding position interference between the carrier 4 and the positioning cover 2.

[0038] In one possible implementation, see Figures 1 to 3 An operating hole 24 located at the outer periphery of the upper positioning hole 21 is provided on the top wall of the positioning cover 2 , and the operating hole 24 is used to install the connecting piece 51 on the ring pressure plate 5 .

[0039] In this embodiment, the operating hole 24 on the positioning cover 2 can effectively reduce the overall structural weight of the positioning cover 2, while reducing the material consumption to reduce processing costs. More importantly, the setting of the operating hole 24 facilitates the installation of the connector 51. When the ring pressure plate 5 and the positioning cover 2 are both installed above the carrier 4, the relative positions of the carrier 4, the ring pressure plate 5 and the universal joint 3 can be fully limited, and the connector 51 can be installed at this time. The setting of the operating hole 24 provides sufficient installation space for the installation of the connector 51.

[0040] For some examples, see Figures 1 to 3 There are a plurality of operation holes 24, which are arranged at intervals along the circumference of the positioning cover 2. The plurality of operation holes 24 can facilitate the installation of the connectors 51 at different circumferential positions of the ring pressure plate 5.

[0041] Specifically, the number of the connectors 51 can be four, six or eight, etc., so as to ensure the reliability of the connection between the ring pressure plate 5 and the carrier 4. The operation hole 24 is a fan-shaped hole, and there are four operation holes 24. The fan-shaped angle of each operation hole 24 is a right angle. The above hole type setting not only has a good weight reduction effect, but also has a large operation space, which is convenient for installing the connectors 51 at different positions.

[0042] Based on the same inventive concept, the embodiment of the present application also provides a method for installing a universal joint on a carrier using a universal joint installation tool, comprising the following steps: S100: Install the carrier 4 onto the supporting seat 1 so that the positioning ring stage 11 is engaged with the lower ring cavity 41; S200: Install the universal joint 3 onto the carrier 4 so that the lower end of the universal joint 3 is positioned and matched with the lower positioning hole 12, install the positioning cover 2 onto the universal joint 3 so that the universal joint 3 is positioned and matched with the upper positioning hole 21, support the upper end of the universal joint 3, and remove the positioning cover 2; S300: Install the ring pressure plate 5 above the universal joint 3 and the carrier 4, so that the middle ring platform 23 of the positioning cover 2 is clamped on the inner circumference of the ring pressure plate 5, use the connecting piece 51 to connect the ring pressure plate 5 and the carrier 4, remove the supporting seat 1 and the positioning cover 2, and complete the installation of the universal joint 3 and the carrier 4.

[0043] In the above operation, on the basis of ensuring the coaxiality of the carrier 4 and the supporting seat 1 by the snap-fitting of the positioning ring stage 11 and the lower ring cavity 41, the coaxiality is transferred to the universal joint 3 by the snap-fitting of the lower positioning hole 12 and the lower end of the universal joint 3, so that the lower end of the universal joint 3 and the carrier 4 meet the coaxiality requirement, and then the positioning cover 2 is installed, and the upper end of the universal joint 3 is roughly positioned with the help of the upper positioning hole 21, so that the upper end of the universal joint 3 and the carrier 4 meet the preliminary coaxiality requirement, and then the positioning cover 2 is removed, and the coaxiality requirement of the ring pressure plate 5 and the positioning cover 2 is ensured by the snap-fitting of the outer ring stage 25 and the center cavity 42, and the coaxiality requirement of the universal joint 3 and the carrier 4 is ensured by the cooperation of the upper positioning hole 21 and the upper end of the universal joint 3, and finally the supporting seat 1, the carrier 4, the universal joint 3 and the positioning cover 2 all meet the coaxiality requirement.

[0044] Finally, the relative positions of the ring pressure plate 5, the carrier 4 and the universal joint 3 are locked by means of the connecting piece 51. After that, the positioning cover 2 and the supporting seat 1 are removed to complete the coaxial installation of the carrier 4 and the universal joint 3. The above method realizes the effective transmission of coaxiality between multiple components, ensures the coaxiality requirements of various parts of the universal joint 3 and the carrier 4, ensures the centered installation of the universal joint 3, improves the installation accuracy of the polishing head, and thus ensures the subsequent polishing quality of the wafer.

[0045] The above-mentioned universal joint installation method can conveniently and quickly install the universal joint 3 in the center relative to the carrier 4, ensuring the coaxiality between the two. This method reduces the installation difficulty, saves time, improves the installation accuracy of the universal joint 3, helps to extend the service life of the polishing head, and ensures the polishing quality of the wafer.

[0046] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A universal joint installation tool, used for positioning a universal joint (3) on a carrier (4), wherein a ring pressure plate (5) is provided above the universal joint (3) and the carrier (4), and the ring pressure plate (5) is connected to the carrier (4) through a connecting piece (51), and the bottom of the carrier (4) is provided with a lower ring cavity (41) opening downward, the top is provided with a central cavity (42) opening upward, and an upper ring groove (43) located on the periphery of the central cavity (42), characterized in that: The universal joint installation tool comprises a supporting seat (1) and a positioning cover (2), wherein the supporting seat (1) is used to be supported at the lower middle part of the carrier (4), the supporting seat (1) is provided with a positioning ring platform (11) which is snap-fitted with the lower ring cavity (41), the middle part of the supporting seat (1) is provided with a lower positioning hole (12) for positioning the lower end of the universal joint (3), the positioning cover (2) is provided with an upper positioning hole (21) for the upper end of the universal joint (3) to pass through so as to position the universal joint (3), and a matching ring platform (22) which is snap-fitted with the upper ring groove (43).

2. The universal joint installation tool as claimed in claim 1, characterized in that: The support seat (1) is provided with a weight-reducing cavity (13) opening upward, the weight-reducing cavity (13) extends in the circumferential direction, and the positioning ring platform (11) is located on the outer periphery of the weight-reducing cavity (13).

3. The universal joint installation tool as claimed in claim 2, characterized in that: A plurality of through holes (14) are provided on the bottom wall of the weight-reducing cavity (13), and the through holes (14) are arranged at intervals along the circumference of the weight-reducing cavity (13). The positioning ring platform (11) is located on the outer periphery of the weight-reducing cavity (13) and is arranged close to the outer ring of the supporting seat (1).

4. The universal joint installation tool as claimed in claim 1, characterized in that: A downwardly protruding middle ring platform (23) is also provided below the positioning cover (2). The middle ring platform (23) is located at the outer periphery of the upper positioning hole (21). The middle ring platform (23) is used to be clamped to the inner periphery of the ring pressure plate (5).

5. The universal joint installation tool as claimed in claim 4, characterized in that: An outer ring platform (25) protruding downward is provided below the positioning cover (2), and an accommodating cavity for accommodating the positioning ring platform (11) is formed between the outer ring platform (25) and the middle ring platform (23).

6. The universal joint installation tool according to any one of claims 1 to 5, characterized in that: An operating hole (24) located on the outer periphery of the upper positioning hole (21) is provided on the top wall of the positioning cover (2), and the operating hole (24) is used to install the connecting member (51) on the ring pressure plate (5).

7. The universal joint installation tool as claimed in claim 6, characterized in that: A plurality of operating holes (24) are provided, and the plurality of operating holes (24) are arranged at intervals along the circumference of the positioning cover (2).

8. The universal joint installation tool as claimed in claim 7, characterized in that: The operating hole (24) is a fan-shaped hole. Four operating holes (24) are provided, and the fan-shaped angle of each operating hole (24) is a right angle.

9. A method for installing a universal joint on a carrier by using the universal joint installation tool according to any one of claims 1 to 8, characterized in that: The following steps are involved: S100: installing the carrier (4) onto the supporting seat (1) so that the positioning ring platform (11) is engaged with the lower ring cavity (41); S200: installing the universal joint (3) onto the carrier (4) so ​​that the lower end of the universal joint (3) is positioned and matched with the lower positioning hole (12); S300: Install the annular pressure plate (5) above the universal joint (3) and the carrier (4), use the connecting piece (51) to connect the annular pressure plate (5) and the carrier (4), remove the supporting seat (1) and the positioning cover (2), and complete the installation of the universal joint (3) and the carrier (4).

10. The universal joint installation method according to claim 9, characterized in that: After step S200, the method further includes: Install the positioning cover (2) onto the universal joint (3) so that the universal joint (3) is positioned and matched with the upper positioning hole (21), support the upper end of the universal joint (3), and remove the positioning cover (2); Step S300 also includes installing the annular pressure plate (5) above the universal joint (3) and the carrier (4) so ​​that the middle ring platform (23) of the positioning cover (2) is clamped on the inner periphery of the annular pressure plate (5).

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