Quartz crucible inner wall processing device

Abstract

The present application proposes a quartz crucible inner wall processing device, comprising: a conveying mechanism and a processing mechanism, wherein the processing mechanism is arranged on the conveying mechanism; the processing mechanism comprises two power components, a substrate, a tube body, an air bag, a grinding component, a rotation drive component and an injection and exhaust component, wherein the two power components are symmetrically arranged below the conveying mechanism; the substrate is connected to the two power components; the tube body passes through the substrate, and the tube body is rotatably connected to the substrate; the air bag is arranged around the outside of the tube body, and an air outlet is opened on the tube body, and the air outlet is connected to the air bag. The quartz crucible inner wall processing device of the embodiment of the present application limits the size of the air bag by using quartz crucibles of different specifications, so that the grinding component can fit with the bottom wall, side wall and the connection of the quartz crucible, without the need for workers to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment, which simplifies the processing steps of the quartz crucible and improves the processing efficiency of the quartz crucible.

Description

Technical Field

[0001] The present application relates to the technical field of quartz crucible processing, and in particular to a quartz crucible inner wall processing device. Background Art

[0002] Quartz crucibles are important tools for growing various materials (such as silicon, gallium arsenide, etc.) at high temperatures, especially in the field of semiconductors and optical components, such as for the manufacture of solar cells, laser crystals, light-emitting diodes, etc. Processing the inner wall of the quartz crucible is mainly used to improve the quality and doping uniformity of the quartz crystal, as well as to ensure that the semiconductor material remains clean and free of impurities during the growth process.

[0003] In the related art, the inner wall processing of large-diameter (e.g., 28-inch to 40-inch) quartz crucibles is generally performed by mechanical water grinding. Since the bottom wall and the side wall of the quartz crucible are connected in an arc structure and the specifications of the quartz crucibles are not uniform, workers need to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment during the processing. The above operation steps are relatively cumbersome, which reduces the processing efficiency of the quartz crucible. Summary of the invention

[0004] The present application aims to solve one of the technical problems in the above-mentioned technology at least to some extent.

[0005] To this end, one purpose of the present application is to propose a quartz crucible inner wall processing device, which limits the size of the air bag by using quartz crucibles of different specifications, so that the grinding assembly can fit with the bottom wall, side wall and the connection of the quartz crucible, without the need for workers to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment, thereby simplifying the processing steps of the quartz crucible and improving the processing efficiency of the quartz crucible.

[0006] To achieve the above-mentioned purpose, the first embodiment of the present application proposes a quartz crucible inner wall processing device, comprising: a conveying mechanism and a processing mechanism, wherein the processing mechanism is arranged on the conveying mechanism; the processing mechanism comprises two power components, a substrate, a tube body, an air bag, a grinding component, a rotation drive component and an exhaust gas injection component, wherein the two power components are symmetrically arranged below the conveying mechanism; the substrate is connected to the two power components; the tube body passes through the substrate, and the tube body is rotatably connected to the substrate; the air bag is arranged around the outside of the tube body, and an air outlet is opened on the tube body, and the air outlet is connected to the air bag; the grinding component is coated on the outside of the air bag, one end of the grinding component is connected to the tube body, and the other end of the grinding component is slidably connected to the tube body; the rotation drive component and the exhaust gas injection component are respectively arranged below the substrate, and the rotation drive component and the exhaust gas injection component are respectively connected to the tube body.

[0007] In addition, the quartz crucible inner wall processing device proposed in the above embodiment of the present application may also have the following additional technical features:

[0008] In one embodiment of the present application, the grinding assembly includes a cover plate, a plurality of grinding belts, a base and a plurality of connecting rods, wherein the cover plate is connected to one end of the tube body; one end of the plurality of grinding belts is pivotally connected to the cover plate, and the plurality of grinding belts are wrapped around the outside of the airbag; the base is sleeved on the outside of the tube body, and the base is slidably connected to the tube body; one end of the plurality of connecting rods is pivotally connected to the base, and the plurality of connecting rods are pivotally connected to the corresponding grinding belts.

[0009] In one embodiment of the present application, it also includes a dust collecting mechanism, which includes a second pump body, a first connecting tube, a box body, a cover body, a plurality of second connecting tubes and a plurality of dust collecting tube components, wherein the second pump body is arranged below the substrate; the box body is arranged on the substrate, the tube body passes through the box body, and the first connecting tube is arranged between the second pump body and the box body; the cover body is rotatably connected to the box body, the tube body passes through the cover body and is connected to the cover body; one end of a plurality of second connecting tubes passes through the cover body, and a plurality of second connecting tubes are fixed on the base; a plurality of dust collecting tube components are respectively connected to the corresponding connecting rods, and a plurality of second connecting tubes are respectively connected to the corresponding dust collecting tube components.

[0010] In one embodiment of the present application, the dust collecting tube component includes a first dust collecting tube and a counterweight block, wherein the first dust collecting tube is pivotally connected to the connecting rod, and a plurality of through holes are provided on the outer wall of the first dust collecting tube; and the counterweight block is arranged at one end of the first dust collecting tube close to the base.

[0011] In one embodiment of the present application, the rotation drive assembly includes a first drive motor, a worm, a support plate and a worm wheel, wherein the first drive motor and the support plate are respectively mounted on the base plate; one end of the worm is connected to the output shaft of the first drive motor, and the other end of the worm is rotatably connected to the support plate; the worm wheel is arranged on the outside of the tube body, and the worm wheel is meshingly connected to the worm.

[0012] In one embodiment of the present application, the injection and exhaust assembly includes a rotating connector, a first pump body, an air pipe and a bracket, wherein the rotating connector is installed at the other end of the tube body, the rotating connector is fixed on the bracket, and the bracket is connected to the substrate; the first pump body is arranged on the substrate, and the air pipe is arranged between the first pump body and the rotating connector.

[0013] In one embodiment of the present application, a guide rail is provided between the base and the tube body.

[0014] In one embodiment of the present application, fixing pins are respectively provided between the grinding belt and the cover plate and the connecting rod.

[0015] In one embodiment of the present application, the power assembly includes a plate body, two guide rods, a second drive motor and a screw rod, wherein the plate body is connected to the conveying mechanism; the two guide rods are symmetrically arranged on the plate body, and the base plate is slidingly connected to the guide rods; the second drive motor is arranged on the plate body, one end of the screw rod is connected to the output shaft of the second drive motor, and the base plate is threadedly connected to the screw rod.

[0016] In one embodiment of the present application, a grinding block is provided on the cover plate.

[0017] Compared with the prior art, the present application has the following beneficial effects: the quartz crucible inner wall processing device of the embodiment of the present application injects air into the air bag through the injection and exhaust assembly, the air bag pushes the grinding assembly to deform, the grinding assembly fits with the inner wall of the quartz crucible, and then the rotating drive assembly is used to drive the tube body and the grinding assembly to rotate, so as to grind the inner wall of the quartz crucible. Quartz crucibles of different specifications can limit the size of the air bag, so that the grinding assembly can fit with the bottom wall, side wall and the connection of the quartz crucible, and there is no need for workers to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment, which simplifies the processing steps of the quartz crucible and improves the processing efficiency of the quartz crucible.

[0018] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of a quartz crucible inner wall processing device according to one embodiment of the present application;

[0021] Figure 2 It is a schematic diagram of the three-dimensional structure of a processing mechanism of a quartz crucible inner wall processing device according to one embodiment of the present application;

[0022] Figure 3 It is a schematic diagram of the three-dimensional structure of the dust collecting mechanism of the quartz crucible inner wall processing device according to one embodiment of the present application;

[0023] Figure 4 It is a schematic diagram of the connection structure of the rotation drive assembly and the injection and exhaust assembly of the quartz crucible inner wall processing device according to one embodiment of the present application;

[0024] Figure 5 for Figure 3 A schematic diagram of the structure of the middle A area;

[0025] Figure 6 This is a schematic diagram of the structure of a power assembly of a quartz crucible inner wall processing device according to one embodiment of the present application;

[0026] Figure 7 The figure is a schematic diagram of the operation of a quartz crucible inner wall processing device according to one embodiment of the present application.

[0027] Reference numerals: 1, conveying mechanism; 2, processing mechanism; 21, power assembly; 211, plate; 212, guide rod; 213, second drive motor; 214, screw; 22, base plate; 23, tube; 230, air outlet; 24, air bag; 25, grinding assembly; 251, cover plate; 252, grinding belt; 253, connecting rod; 254, base; 26, rotation drive assembly; 261, first drive motor; 262, worm; 263 , support plate; 264, worm gear; 27, injection and exhaust assembly; 271, rotating connector; 272, first pump body; 273, air pipe; 274, bracket; 3, dust collecting mechanism; 31, second pump body; 32, first connecting pipe; 33, box body; 34, cover body; 35, second connecting pipe; 36, dust collecting pipe component; 361, first dust collecting pipe; 362, counterweight block; 363, through hole; 41, guide rail; 51, fixing pin; 61, grinding block. DETAILED DESCRIPTION

[0028] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0029] The quartz crucible inner wall processing device according to an embodiment of the present application will be described below with reference to the accompanying drawings.

[0030] like Figure 1-Figure 7 As shown, the quartz crucible inner wall processing device according to the embodiment of the present application may include: a conveying mechanism 1 and a processing mechanism 2.

[0031] The processing mechanism 2 is arranged on the conveying mechanism 1, and the conveying mechanism 1 is used to drive the quartz crucible to be processed to move.

[0032] It should be noted that the conveying mechanism 1 described in this embodiment is an automatic conveying device, and its specific structure has been disclosed in the prior art, so it will not be described in detail here.

[0033] The processing mechanism 2 includes two power components 21 , a base plate 22 , a tube body 23 , an air bag 24 , a grinding component 25 , a rotation driving component 26 and an injection and exhaust component 27 .

[0034] Among them, two power components 21 are symmetrically arranged below the conveying mechanism 1 , and the power components 21 are used to drive the substrate 22 and the components above it to move up and down, so that the grinding component 25 enters and leaves the interior of the quartz crucible to be processed.

[0035] The base plate 22 is connected to the two power components 21 . The tube body 23 passes through the base plate 22 . The tube body 23 is rotatably connected to the base plate 22 . The tube body 23 is used to connect and support the airbag 24 and the grinding component 25 .

[0036] The airbag 24 is disposed around the outer side of the tube body 23 . The tube body 23 is provided with an air outlet 230 , which is communicated with the airbag 24 .

[0037] The grinding assembly 25 is covered on the outside of the airbag 24 , one end of the grinding assembly 25 is connected to the tube body 23 , and the other end of the grinding assembly 25 is slidably connected to the tube body 23 .

[0038] The rotary drive assembly 26 and the injection and exhaust assembly 27 are respectively arranged below the base plate 22 . The rotary drive assembly 26 and the injection and exhaust assembly 27 are respectively connected to the tube body 23 . The rotary drive assembly 26 is used to drive the tube body 23 and the grinding assembly 25 to rotate.

[0039] Specifically, relevant technicians use this device to process the inner wall of a large-diameter (for example: 28 inches-40 inches) quartz crucible. In the initial state, the processing mechanism 2 is located below the conveying mechanism 1, the grinding assembly 25 is fitted with the airbag 24, the airbag 24 shrinks and fits on the outside of the tube body 23, the base 254 is close to the substrate 22, and the substrate 22 is located at the bottom of the power assembly 21.

[0040] First, under the action of the conveying mechanism 1, the quartz crucible to be processed moves at a constant speed on the conveying mechanism 1. When the quartz crucible moves to a preset position (this working condition can be obtained by a position sensor), that is, directly above the processing mechanism 2, the conveying mechanism 1 stops running.

[0041] Next, the processing mechanism 2 starts to operate, the power assembly 21 drives the substrate 22 to move toward the quartz crucible, and the tube body 23, the air bag 24 and the grinding assembly 25 pass through the two rollers of the conveying mechanism 1 until one end of the grinding assembly 25 contacts the bottom wall of the quartz crucible (this working condition can be obtained by the pressure sensor).

[0042] The gas injection and exhaust assembly 27 starts to operate, and the gas injection and exhaust assembly 27 injects gas into the interior of the tube body 23. The gas enters the interior of the airbag 24 through the gas outlet 230. The airbag 24 pushes the grinding assembly 25 to deform, and the other end of the grinding assembly 25 moves along the tube body 23 until the grinding assembly 25 hits the inner wall of the quartz crucible. Gas is continued to be injected into the airbag 24, so that a constant force is maintained between the grinding assembly 25 and the inner wall of the quartz crucible (this working condition can be obtained by monitoring the air pressure in the airbag 24 to ensure that the air pressure in the airbag 24 reaches a preset fixed MPa during the grinding process).

[0043] It is understandable that by ensuring that the air pressure in the airbag 24 reaches a preset fixed MPa during the grinding process, the natural wear of the grinding component 25 during use can be compensated, thereby ensuring the grinding effect of the device.

[0044] Afterwards, the rotation drive assembly 26 starts to operate, the rotation drive assembly 26 drives the tube body 23 to rotate, and the tube body 23 drives the air bag 24 and the grinding assembly 25 to rotate, so as to grind the bottom wall, the connection between the bottom wall and the side wall, and part of the side wall of the quartz crucible.

[0045] After a preset time, the power assembly 21 is started again, the power assembly 21 pushes the substrate 22 to reset, the substrate 22 drives the tube body 23 and the air bag 24 to move downward, and the grinding assembly 25 moves downward along the side wall of the quartz crucible to grind the remaining part of the side wall of the quartz crucible.

[0046] It can be understood that quartz crucibles of different specifications can limit the size of the airbag 24, so that the grinding assembly 25 can fit with the bottom wall, side wall and the connection of the quartz crucible, without the need for workers to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment, which simplifies the processing steps of the quartz crucible and improves the processing efficiency of the quartz crucible.

[0047] It should be noted that, in the process of the airbag 24 moving downward, the airbag 24 breaks away from the restriction of the bottom wall of the quartz crucible, the volume of the airbag 24 expands, and the pressure inside the airbag 24 decreases, causing the force between the grinding assembly 25 and the quartz crucible to change. At this time, the gas injection and exhaust assembly 27 replenishes gas into the airbag 24, thereby increasing the air pressure inside the airbag 24, so that the force between the grinding assembly 25 and the quartz crucible remains constant.

[0048] When the grinding assembly 25 moves to the edge of the quartz crucible, the inner wall processing step of the quartz crucible is completed, and the gas injection and exhaust assembly 27 releases the gas in the air bag 24. Under the action of gravity, the other end of the grinding assembly 25 slides along the outer wall of the tube body 23, so that the grinding assembly 25 is reset, and the power assembly 21 drives the substrate 22 to reset, and the processing mechanism 2 returns to the bottom of the conveying mechanism 1, and the conveying mechanism 1 then operates normally, thereby completing the processing of the inner wall of a quartz crucible.

[0049] It is understandable that when the device is not used to process the inner wall of the quartz crucible, when the processing mechanism 2 is located at the initial position, that is, the processing mechanism 2 is located below the conveying mechanism 1, the conveying mechanism 1 can be used as a general conveying device.

[0050] In one embodiment of the present application, Figure 2 As shown, the grinding assembly 25 includes a cover plate 251 , a plurality of grinding belts 252 , a base 254 and a plurality of connecting rods 253 .

[0051] Among them, the cover plate 251 is connected to one end of the tube body 23, one end of multiple grinding belts 252 is pivotally connected to the cover plate 251, multiple grinding belts 252 are wrapped around the outside of the airbag 24, the base 254 is sleeved on the outside of the tube body 23, the base 254 is slidingly connected to the tube body 23, one end of multiple connecting rods 253 is pivotally connected to the base 254, and multiple connecting rods 253 are pivotally connected to the corresponding grinding belts 252.

[0052] Specifically, after the airbag 24 is filled with gas, it pushes the polishing belt 252 to contact the inner wall of the quartz crucible, the polishing belt 252 drives the connecting rod 253 to move, and the connecting rod 253 pulls the base 254 to move along the tube body 23.

[0053] In one embodiment of the present application, Figure 3 As shown, it also includes a dust collecting mechanism 3, which includes a second pump body 31, a first connecting pipe 32, a box body 33, a cover body 34, a plurality of second connecting pipes 35 and a plurality of dust collecting pipe components 36.

[0054] Among them, the second pump body 31 is arranged below the substrate 22, the box body 33 is arranged on the substrate 22, the tube body 23 passes through the box body 33, the first connecting tube 32 is arranged between the second pump body 31 and the box body 33, the cover body 34 is rotatably connected to the box body 33, the tube body 23 passes through the cover body 34 and is connected to the cover body 34, one end of a plurality of second connecting tubes 35 passes through the cover body 34, a plurality of second connecting tubes 35 are fixed on the base 254, a plurality of dust collecting pipe components 36 are respectively connected to the corresponding connecting rods 253, and a plurality of second connecting tubes 35 are respectively connected to the corresponding dust collecting pipe components 36.

[0055] It should be noted that the cover 34 and the box body 33 described in this embodiment are sealed by a seal (not shown in the figure). At the same time, the cover 34 and the box body 33 are rotatable, and the material of the second connecting pipe 35 can be a flexible pipe.

[0056] Specifically, during the grinding process of the quartz crucible, powdery residue is generated between the inner wall of the quartz crucible and the grinding assembly 25. Under the action of the second pump body 31, a negative pressure is formed inside the first connecting tube 32, the box body 33, the second connecting tube 35 and the dust collecting pipe component 36. The external air carries the powdery residue into the dust collecting pipe component 36, thereby collecting the powdery residue generated by the grinding to avoid pollution to the working environment.

[0057] In one embodiment of the present application, Figure 3 As shown, the dust collecting pipe component 36 includes a first dust collecting pipe 361 and a counterweight block 362, wherein:

[0058] The first dust collecting pipe 361 is pivotally connected to the connecting rod 253, and a plurality of through holes 363 are formed on the outer wall of the first dust collecting pipe 361;

[0059] The counterweight 362 is disposed at one end of the first dust collecting pipe 361 close to the base 254 .

[0060] It should be noted that the connection position between the first dust collecting tube 361 and the connecting rod 253 described in this embodiment is close to the counterweight block 362. Based on the lever principle, during use, the first dust collecting tube 361 is roughly horizontal, thereby facilitating dust collection during the grinding process.

[0061] When the base 254 moves downward, the angle between the connecting rod 253 and the tube body 23 changes. Under the gravity of the counterweight block 362, the first dust collecting pipe 361 can overlap with the connecting rod 253 autonomously, thereby facilitating the processing mechanism 2 to pass between the two rollers of the conveying mechanism 1.

[0062] As a possible situation, in order to avoid overheating between the quartz crucible and the grinding assembly 25 during the grinding process, and also to achieve the purpose of dust reduction and dust collection, a water injection pipe can be extended from the tube body 23, the water injection pipe passes through one end of the grinding assembly 25, and is rotatably connected to the grinding assembly 25. During the rotation of the grinding assembly 25, the water injection pipe sprinkles water on the surface of the airbag 24. During the rotation of the airbag 24, the airbag 24 can sprinkle water on the inner wall of the quartz crucible, which can not only take away the heat generated during grinding, but also achieve the purpose of dust reduction and dust collection.

[0063] In one embodiment of the present application, Figure 4 As shown, the rotary drive assembly 26 includes a first drive motor 261 , a worm 262 , a support plate 263 and a worm wheel 264 .

[0064] Among them, the first drive motor 261 and the support plate 263 are respectively installed on the base plate 22, one end of the worm 262 is connected to the output shaft of the first drive motor 261, and the other end of the worm 262 is rotatably connected to the support plate 263, and the worm wheel 264 is arranged on the outside of the tube body 23, and the worm wheel 264 is meshingly connected with the worm 262.

[0065] In one embodiment of the present application, Figure 4 As shown, the air injection and exhaust assembly 27 includes a rotating connection 271 , a first pump body 272 , an air pipe 273 and a bracket 274 .

[0066] Among them, the rotating connector 271 is installed at the other end of the tube body 23, the rotating connector 271 is fixed on the bracket 274, the bracket 274 is connected to the base plate 22, the first pump body 272 is arranged on the base plate 22, and the air pipe 273 is arranged between the first pump body 272 and the rotating connector 271.

[0067] Specifically, when the rotary drive assembly 26 is running, the first drive motor 261 drives the worm 262 to rotate, and the worm 262 is meshed and connected with the worm wheel 264, thereby driving the tube body 23 to rotate. During the operation of the injection and exhaust assembly 27, the first pump body 272 runs, thereby supplying air to the interior of the tube body 23 and the airbag 24 through the air pipe 273. After the processing mechanism 2 completes the grinding step, the electromagnetic air relief valve (not shown in the figure) installed on the air pipe 273 can open autonomously.

[0068] In one embodiment of the present application, Figure 3 As shown, a guide rail 41 is provided between the base 254 and the tube body 23 .

[0069] It is understandable that the provision of the guide rail 41 can increase the contact between the base 254 and the tube body 23 , thereby ensuring the reliability of the tube body 23 driving the grinding assembly 25 to rotate.

[0070] In one embodiment of the present application, Figure 5 As shown, fixing pins 51 are respectively provided between the grinding belt 252 and the cover plate 251 and the connecting rod 253 .

[0071] It is understandable that the fixing pin 51 is provided to facilitate replacement of the grinding belt 252 after it has been used for a long time.

[0072] In one embodiment of the present application, Figure 1 and Figure 6 As shown, the power assembly 21 includes a plate body 211 , two guide rods 212 , a second drive motor 213 and a screw rod 214 .

[0073] Among them, the plate body 211 is connected to the conveying mechanism 1; two guide rods 212 are symmetrically arranged on the plate body 211, the base plate 22 is slidingly connected to the guide rods 212, the second drive motor 213 is arranged on the plate body 211, one end of the screw 214 is connected to the output shaft of the second drive motor 213, and the base plate 22 is threadedly connected to the screw 214.

[0074] Specifically, during the operation of the power assembly 21, the second drive motor 213 drives the screw 214 to rotate. The screw 214 is threadedly connected to the base plate 22. Under the guidance of the guide rod 212, the guide rod 212 and the base plate 22 are slidably connected, and the base plate 22 moves up and down.

[0075] In one embodiment of the present application, Figure 5 As shown, a grinding block 61 is disposed on the cover plate 251 .

[0076] It can be understood that the grinding block 61 can grind the bottom wall of the quartz crucible covered by the cover plate 251 , further simplifying the steps in the processing of the quartz crucible.

[0077] In summary, the quartz crucible inner wall processing device of the embodiment of the present application injects air into the air bag through the injection and exhaust assembly, the air bag pushes the grinding assembly to deform, the grinding assembly fits with the inner wall of the quartz crucible, and then the rotary drive assembly is used to drive the tube body and the grinding assembly to rotate, so as to grind the inner wall of the quartz crucible. Quartz crucibles of different specifications can limit the size of the air bag, so that the grinding assembly can fit with the bottom wall, side wall and the connection of the quartz crucible, and there is no need for workers to replace the grinding tool and adjust the grinding radius of the mechanical water grinding equipment, which simplifies the processing steps of the quartz crucible and improves the processing efficiency of the quartz crucible.

[0078] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0079] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0080] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and deform the above embodiments within the scope of the present application.

Claims

1. A quartz crucible inner wall processing device, characterized in that: include: Conveying mechanism and processing mechanism, among which, The processing mechanism is arranged on the conveying mechanism; The processing mechanism includes two power components, a base plate, a tube body, an air bag, a grinding component, a rotation drive component and an injection and exhaust component, wherein: The two power assemblies are symmetrically arranged below the conveying mechanism; The base plate is connected to the two power components; The tube body penetrates through the base plate, and the tube body is rotatably connected to the base plate; The airbag is arranged around the outside of the tube body, and an air outlet is opened on the tube body, and the air outlet is communicated with the airbag; The grinding component is covered on the outside of the airbag, one end of the grinding component is connected to the tube body, and the other end of the grinding component is slidably connected to the tube body; The rotation driving assembly and the injection and exhaust assembly are respectively arranged below the substrate, and the rotation driving assembly and the injection and exhaust assembly are respectively connected to the tube body.

2. The quartz crucible inner wall processing device according to claim 1, characterized in that: The grinding assembly includes a cover plate, a plurality of grinding belts, a base and a plurality of connecting rods, wherein: The cover plate is connected to one end of the tube body; One end of the plurality of grinding belts is pivotally connected to the cover plate, and the plurality of grinding belts are wrapped around the outside of the airbag; The base is sleeved on the outside of the tube body, and the base is slidably connected to the tube body; One end of a plurality of the connecting rods is pivotally connected to the base, and a plurality of the connecting rods are pivotally connected to the corresponding grinding belts.

3. The quartz crucible inner wall processing device according to claim 2, characterized in that: It also includes a dust collecting mechanism, which includes a second pump body, a first connecting pipe, a box body, a cover body, a plurality of second connecting pipes and a plurality of dust collecting pipe components, wherein: The second pump body is arranged below the base plate; The box body is arranged on the base plate, the tube body passes through the box body, and the first connecting tube is arranged between the second pump body and the box body; The cover body is rotatably connected to the box body, and the tube body penetrates through the cover body and is connected to the cover body; One end of a plurality of the second communicating tubes passes through the cover body, and the plurality of the second communicating tubes are fixed on the base; The plurality of dust collecting pipe components are respectively connected to the corresponding connecting rods, and the plurality of the second connecting pipes are respectively connected to the corresponding dust collecting pipe components.

4. The quartz crucible inner wall processing device according to claim 3, characterized in that: The dust collecting pipe component includes a first dust collecting pipe and a counterweight, wherein: The first dust collecting pipe is pivotally connected to the connecting rod, and a plurality of through holes are formed on the outer wall of the first dust collecting pipe; The counterweight block is arranged at one end of the first dust collecting pipe close to the base.

5. The quartz crucible inner wall processing device according to claim 1, characterized in that: The rotary drive assembly includes a first drive motor, a worm, a support plate and a worm wheel, wherein: The first driving motor and the supporting plate are respectively mounted on the base plate; One end of the worm is connected to the output shaft of the first driving motor, and the other end of the worm is rotatably connected to the support plate; The worm wheel is arranged on the outside of the tube body, and the worm wheel is meshingly connected with the worm.

6. The quartz crucible inner wall processing device according to claim 1, characterized in that: The injection and exhaust assembly comprises a rotating connector, a first pump body, an air pipe and a bracket, wherein: The rotating connector is installed at the other end of the tube body, the rotating connector is fixed on the bracket, and the bracket is connected to the base plate; The first pump body is arranged on the base plate, and the air pipe is arranged between the first pump body and the rotating connecting member.

7. The quartz crucible inner wall processing device according to claim 2, characterized in that: A guide rail is arranged between the base and the tube body.

8. The quartz crucible inner wall processing device according to claim 2, characterized in that: Fixing pins are respectively arranged between the grinding belt, the cover plate and the connecting rod.

9. The quartz crucible inner wall processing device according to claim 1, characterized in that: The power assembly includes a plate body, two guide rods, a second drive motor and a screw, wherein: The plate body is connected to the conveying mechanism; The two guide rods are symmetrically arranged on the plate body, and the base plate is slidably connected to the guide rods; The second driving motor is arranged on the plate body, one end of the screw rod is connected to the output shaft of the second driving motor, and the base plate is threadedly connected to the screw rod.

10. The quartz crucible inner wall processing device according to claim 2, characterized in that: The cover plate is provided with a grinding block.

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