A manual lifting device for wafer carrier transport vehicles

Abstract

The application relates to the technical field of semiconductor processing, in particular to a manual lifting device for a wafer box transport vehicle, which comprises a vertical plate, an eccentric shaft is manually rotatably arranged at the middle position above the vertical plate; the eccentric shaft is of an eccentric structure, a lifting column is linearly and liftably arranged on the vertical plate; a roller support is arranged on one side above the lifting column, and an adjusting support is arranged on the other side; a limiting support is arranged above the adjusting support on the side close to the eccentric shaft; a rotating support is arranged below the limiting support; spring supports are arranged on the rotating support and the adjusting support respectively, and a tensile spring is connected to the spring supports; under the action of the tensile spring, the surface of a cam follower is always attached to the eccentric shaft. The manual lifting device for the wafer box transport vehicle has a simple structure, can amplify the torque through a rotating disc and the eccentric shaft, can convert the rotating action into lifting action, and can slow down the lifting and lowering actions and is not prone to jolting.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and more specifically to a manual lifting device for a wafer cassette transport vehicle. Background Technology

[0002] In the semiconductor manufacturing industry, wafer production is a complex and delicate process that requires multiple processing steps between different workstations. To ensure the safety and stability of wafers during transport, they are typically placed in wafer cassettes and transported using wafer cassette transport vehicles. As a key piece of equipment in wafer cassette transport, the performance and stability of the wafer cassette transport vehicle directly impact wafer production efficiency and quality.

[0003] During the transfer of wafer cassettes, the wafer cassette transport vehicle needs to dock with the wafer loader to remove the wafer cassettes from the loader and transfer them. This process requires the wafer cassette transport vehicle to operate at both the front and rear workstations to complete the wafer cassette loading and unloading operations. To achieve this function, the wafer cassette transport vehicle needs to have two extreme positions: upper and lower. When a wafer cassette needs to be retrieved, the wafer cassette transport vehicle needs to switch from the lower limit position to the upper limit position to remove the wafer cassette from the wafer loader; conversely, when the wafer cassette transport vehicle removes a wafer cassette for transfer, it needs to switch from the upper limit position to the lower limit position to facilitate subsequent transfer operations.

[0004] However, in existing wafer cassette transport vehicle designs, the transition between the upper and lower limit positions often presents some problems. On the one hand, the transition action may be too violent, causing the wafer cassette to be subjected to collisions or bumps, thereby affecting the quality and stability of the wafers; on the other hand, the complexity of the transition action may also increase the manufacturing cost and maintenance difficulty of the wafer cassette transport vehicle.

[0005] Therefore, in order to solve the above problems, the present invention proposes a manual lifting device for a wafer cassette transport vehicle. Summary of the Invention

[0006] To address the aforementioned problems, this invention provides a manual lifting device for a wafer cassette transport vehicle. This manual lifting device for wafer cassette transport vehicles has a simple structure. It amplifies the torque through a turntable and an eccentric shaft, converting rotational motion into lifting motion. The lifting and lowering processes are gentle and do not easily cause bumps.

[0007] The technical solution of the present invention is as follows:

[0008] A manual lifting device for a wafer cassette transport vehicle includes a vertical plate. An eccentric shaft is manually rotatably mounted at the center of the upper part of the vertical plate. The eccentric shaft has an eccentric structure, with one side being a flat surface and the other a curved surface with a groove. A lifting column is linearly and vertically mounted on the vertical plate. The lifting column has a long rectangular structure with an L-shaped bend at the top. A roller bracket is provided on one side of the upper part of the lifting column, and an adjusting bracket is provided on the other side. The connection between the roller bracket and the lifting column is an elongated hole. A groove is machined at the roller bracket mounting position on one side of the lifting column to restrict the roller bracket. The roller is connected to the roller bracket by equal-height screws and a self-locking nut. The adjusting bracket has a square frame structure with an elongated hole on the side connecting to the lifting column. A limiting bracket is provided above the adjusting bracket near the eccentric shaft, and a... A circular groove is provided, and a rubber block is placed inside the groove. The front end of the rubber block is made of rubber, and the rear end has a metal external thread structure. A rotating bracket is provided below the limiting bracket. A through hole is machined at the corresponding position of the adjusting bracket, and a self-lubricating bearing is placed in the through hole. A threaded hole is machined at the rear end of the rotating bracket, and the rotating bracket is connected to the self-lubricating bearing by three equal-height screws. Spring supports are provided on the rotating bracket and the adjusting bracket respectively, and tension springs are used to connect to the spring supports. Under the action of the tension spring, the surface of the cam follower is always in contact with the eccentric shaft. A buffer block is provided at the bottom of the adjusting bracket. The top of the buffer block has an external thread structure, and the bottom has a conical structure. A base plate is provided at the bottom of the upright plate, and a buffer is provided on the base plate. The position of the buffer corresponds to the position of the buffer block at the bottom of the adjusting bracket.

[0009] A round hole is machined in the middle of the upper part of the upright plate. A bearing with a seat is installed in the round hole. A rotating shaft is installed in the bearing with a seat. An eccentric shaft is connected to the front end of the rotating shaft. A turntable is fixedly connected to the rear end of the rotating shaft.

[0010] The center of the turntable is a thin plate, and the outer ring of the thin plate is a round tube with an arc-shaped handle on the round tube.

[0011] The bottom of the eccentric shaft is connected to the rotating shaft by three screws.

[0012] A linear guide rail is installed in front of the upright plate. The slider of the linear guide rail is fixedly connected to the upright plate, and the guide rail of the linear guide rail is fixedly connected to the bottom of the lifting column.

[0013] The rollers are made of nylon.

[0014] A leveling screw is installed on the adjustment bracket located below the rotating bracket to limit the rotation angle of the rotating bracket.

[0015] The beneficial effects of this invention are as follows:

[0016] 1. The present invention discloses a manual lifting device for a wafer cassette transport vehicle. This manual lifting device for a wafer cassette transport vehicle, through the design of an eccentric shaft and a turntable, can convert the manual rotation action into the linear lifting action of the lifting column; it not only realizes the smooth transition between the upper and lower limit positions of the wafer cassette transport vehicle, but also ensures the gentleness of the lifting action, effectively avoiding collisions and bumps of the wafer cassette during the transfer process, thereby ensuring the stability of the wafer cassette and the wafers inside.

[0017] 2. The present invention discloses a manual lifting device for a wafer cassette transport vehicle. The manual lifting device for the wafer cassette transport vehicle has a relatively simple structure and is mainly composed of components such as a vertical plate, an eccentric shaft, a lifting column, a roller bracket, and an adjustment bracket. The connection method between these components is clear, and automatic adjustment and buffering functions are realized through structures such as spring supports and tension springs, making the operation process simpler and more reliable.

[0018] 3. The present invention discloses a manual lifting device for a wafer cassette transport vehicle. This manual lifting device for a wafer cassette transport vehicle can realize the rapid and stable lifting of wafer cassettes, thus significantly improving the efficiency of wafer transfer. At the same time, its compact structure and small space occupation make it easy to deploy and use in limited spaces such as wafer processing workshops.

[0019] 4. The present invention discloses a manual lifting device for a wafer cassette transport vehicle. This manual lifting device can adapt to wafer cassettes of different sizes and weights by adjusting the position and parameters of components such as the eccentric shaft and roller bracket. In addition, its manual operation mode also enables the device to work normally in environments where the power supply is unstable or cannot be connected to a power source.

[0020] 5. The present invention discloses a manual lifting device for a wafer cassette transport vehicle. Compared with an automatic lifting device, the manual lifting device for a wafer cassette transport vehicle has lower manufacturing and operating costs. At the same time, due to its relatively simple structure, it is more convenient and faster to maintain and repair. Attached Figure Description

[0021] The solutions and advantages of this application will become clear to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention.

[0022] In the attached diagram:

[0023] Figure 1 This is a three-dimensional exploded view of a manual lifting device for a wafer cassette transport vehicle according to an embodiment of the present invention. Figure 1 ;

[0024] Figure 2 This is a three-dimensional exploded view of a manual lifting device for a wafer cassette transport vehicle according to an embodiment of the present invention. Figure 2 ;

[0025] Figure 3 This is a schematic diagram of the structure of a manual lifting device for a wafer cassette transport vehicle in the raised position, according to an embodiment of the present invention.

[0026] Figure 4 This is a schematic diagram of the structure of a manual lifting device for a wafer cassette transport vehicle in the descending position, according to an embodiment of the present invention.

[0027] Figure 5 This is a three-dimensional structural schematic diagram of the bias shaft of a manual lifting device for a wafer cassette transport vehicle according to an embodiment of the present invention.

[0028] The components represented by the various reference numerals in the diagram are:

[0029] This invention comprises: 1. a vertical plate; 2. a bearing with a seat; 3. a rotating shaft; 4. a turntable; 5. an end cover; 6. a top cover plate; 7. a lifting column; 8. an adjusting bracket; 9. a limiting support; 10. a rubber pressure block; 11. a leveling screw one; 12. a spring support; 13. an eccentric shaft; 14. a linear guide rail; 15. a self-locking nut; 16. a roller; 17. a roller bracket; 18. a leveling screw two; 19. a cam follower; 20. a rotating bracket; 21. a self-lubricating bearing; 22. a leveling screw three; 23. a tension spring; 24. a buffer pressure block; 25. a buffer; and 26. a base plate. Detailed Implementation

[0030] like Figure 1 and Figure 2 As shown, the manual lifting device for the wafer box transport vehicle includes a vertical plate 1. A circular hole is machined in the middle of the upper part of the vertical plate 1. A bearing 2 with a seat is installed in the circular hole, and a rotating shaft 3 is installed inside it. The front end of the rotating shaft 3 is connected to an eccentric shaft 13, and the rear end is provided with a turntable 4 and an end cover 5. The middle part of the turntable 4 is a thin plate, the outer ring is a circular tube, and the handle is arc-shaped to increase the length of the gripping position.

[0031] like Figure 5 As shown, the eccentric shaft 13 has an eccentric structure, with one side being a flat surface and the other side being a curved surface with a groove. The bottom is connected to the rotating shaft 3 by three screws.

[0032] A linear guide rail 14 is provided in front of the upright plate 1. The slider of the linear guide rail 14 is connected to the upright plate 1, and the guide rail is connected to the lower part of the lifting column 7. The lifting column 7 is a long rectangular structure with an L-shaped bend at the top and a positioning pin hole and a threaded hole on the front surface.

[0033] A roller bracket 17 is installed on one side above the lifting column, and an adjustment bracket 8 is installed on the other side.

[0034] The connection between the roller bracket 17 and the lifting column 7 is a long hole. A groove is machined at the installation position of the roller bracket 17 on one side of the lifting column 7 to limit the offset of the roller bracket 17. The roller 16 is connected to the roller bracket by the equal height screw 18 and the self-locking nut 15. The roller 16 is made of nylon.

[0035] The adjusting bracket 8 has a square frame structure and an elongated hole on the side connected to the lifting column 7. A limiting bracket 9 is set above the side of the adjusting bracket 8 near the eccentric shaft 13. A circular groove is machined on one side of the limiting bracket 9, and a rubber pressure block 10 is set in the groove. The front end of the rubber pressure block 10 is made of rubber, and the tail end is a metal external thread structure.

[0036] A rotating bracket 20 is installed below the limiting bracket 9. A through hole is machined at the corresponding position of the adjusting bracket 8, and a self-lubricating bearing 22 is installed in the through hole. A threaded hole is machined at the tail of the rotating bracket 20, and the rotating bracket 20 is connected by a level screw 22 passing through the self-lubricating bearing 22. Spring supports 12 are installed on the rotating bracket 20 and the adjusting bracket 8 respectively, and tension springs 23 are connected to the spring supports 12. Under the action of the tension spring 23, the surface of the cam follower 19 is always in contact with the eccentric shaft 13. A level screw 11 is installed on the adjusting bracket 8 below the rotating bracket 20 to limit the rotation angle of the rotating bracket 20. A buffer block 24 is installed at the bottom of the adjusting bracket 8. The top of the buffer block 24 has an external thread structure, and the bottom has a conical structure. A base plate 26 is installed at the bottom of the upright plate, and a buffer 25 is installed on the base plate 26. The position of the buffer 25 corresponds to the position of the buffer block 24 installed at the bottom of the adjusting bracket 8.

[0037] like Figure 3 and Figure 4 As shown, when the turntable 4 rotates counterclockwise, the top of the eccentric shaft 13 contacts the cam follower 19 installed at the front end of the rotating bracket 20, and the top of the rotating bracket 20 contacts the rubber pressure block 10. The rubber pressure block 10 gradually deforms, and when the deformation reaches its maximum, it pushes the adjusting frame 8 and the lifting column 7 to move upward along the linear guide rail 14. When the turntable rotates counterclockwise, the curved side of the eccentric shaft contacts the cam follower installed at the front end of the rotating bracket, and the top of the rotating bracket contacts the rubber pressure block. The rubber pressure block gradually deforms, and when the deformation reaches its maximum, it pushes the adjusting frame and the lifting column to move upward along the linear guide rail. When the turntable rotates clockwise, the flat side of the eccentric shaft presses down on the rollers installed on the roller bracket, causing the lifting column to move downward along the linear guide rail. The buffer block installed at the bottom of the adjusting frame presses down on the piston rod above the buffer, providing support force and causing the lifting column to descend slowly.

[0038] The manual lifting device for wafer box transport vehicles has a simple structure. It amplifies the torque through a turntable and eccentric shaft, converting the rotational motion into a lifting motion. The lifting and lowering process is gentle and does not easily cause bumps.

Claims

1. A manual lifting device for a FOUP transport vehicle, characterized by, The utility model provides a kind of vertical plate (1), eccentric shaft (13) is manually rotatablely installed in the middle position above vertical plate (1);The eccentric shaft (13) is eccentric structure, one side is plane, the other side is curved surface with recess, lifting column (7) is linearly liftablely installed on vertical plate (1);Lifting column (7) is long rectangular structure, top is L type bending;Lifting column (7) one side above is provided with gyro wheel support (17), the other side is provided with adjustment support (8);Gyro wheel support (17) and lifting column (7) connecting part are long hole, recess is processed in the gyro wheel support (17) installation position on the side of lifting column (7), limit gyro wheel support (17), gyro wheel (16) and gyro wheel support (17) are connected together by equal-height screw two (18) and self-locking nut (15);The adjustment support (8) is square frame structure, and the connecting side with lifting column (7) is long hole;Limiting support (9) is provided on the side of adjustment support (8) close to eccentric shaft (13) upper side, circular recess is processed in the side of limiting support (9), rubber pressing block (10) is arranged in the recess, the front end of the rubber pressing block (10) is rubber material, and tail is metal external thread structure;Rotary support (20) is arranged in the position below limiting support (9), through hole is processed in the corresponding position of adjustment support (8), self-lubricating bearing (22) is arranged in the through hole, screw hole is processed in the tail of rotary support (20), and equal-height screw three (22) is connected rotary support (20) by passing through self-lubricating bearing (22);Spring strut (12) is arranged on rotary support (20) and adjustment support (8) respectively, and stretching spring (23) is connected on spring strut (12);Under the action of stretching spring (23), cam follower (19) surface is always attached eccentric shaft (13);Buffer pressing block (24) is arranged in the bottom of adjustment support (8), and the top of the buffer pressing block (24) is external thread structure, and the bottom is conical structure;Bottom plate (26) is arranged in the bottom of vertical plate (1), buffer (25) is arranged on bottom plate (26), and the position of buffer (25) corresponds with the position of buffer pressing block (24) arranged in the bottom of adjustment support (8) When the rotating disc (4) rotates anticlockwise, the top of the eccentric shaft (13) contacts the cam follower (19) installed at the front end of the rotating support (20), the top of the rotating support (20) contacts the rubber pressing block (10), the rubber pressing block (10) is gradually deformed, when the deformation reaches the maximum, the adjusting frame (8) and the lifting column (7) are pushed to move upward along the linear guide rail (14); when the rotating disc rotates anticlockwise, the curved surface side of the eccentric shaft (13) contacts the cam follower (19) installed at the front end of the rotating support (20), the top of the rotating support (20) contacts the rubber pressing block (10), the rubber pressing block (10) is gradually deformed; when the deformation reaches the maximum, the adjusting frame (8) and the lifting column (7) are pushed to move upward along the linear guide rail (14); when the rotating disc (4) rotates clockwise, the flat side of the eccentric shaft (13) presses the roller (16) arranged on the roller support (17), the lifting column (7) moves downward along the linear guide rail (14), the buffer pressing block (24) arranged at the bottom of the adjusting frame presses the piston rod above the buffer (25), providing support force, so that the lifting column (7) slowly descends.

2. The manual lifting device for a FOUP transport vehicle according to claim 1, wherein The upper middle position of the vertical plate (1) is processed with a round hole, a bearing with seat (2) is arranged in the round hole, a rotating shaft (3) is arranged in the bearing with seat (2), the front end of the rotating shaft (3) is connected with the eccentric shaft (13), and the rear end of the rotating shaft (3) is fixedly connected with the rotating disc (4).

3. The manual lifting device for a FOUP transport vehicle according to claim 2, wherein The middle position of the rotating disc (4) is a thin plate, the outer circle of the thin plate is a circular tube, and an arc-shaped handle is arranged on the circular tube.

4. The manual lifting device for a FOUP transport vehicle according to claim 2, wherein The bottom of the eccentric shaft (13) is connected with the rotating shaft (3) through three screws.

5. The manual lifting device for a FOUP transport vehicle according to claim 1, wherein The front of the vertical plate (1) is provided with a linear guide rail (14), the sliding block of the linear guide rail (14) is fixedly connected with the vertical plate (1), and the guide rail of the linear guide rail (14) is fixedly connected with the lower portion of the lifting column (7).

6. The manual lifting device for a FOUP transport vehicle according to claim 1, wherein The roller (16) is made of nylon material.

7. The manual lifting device for a FOUP transport vehicle according to claim 1, wherein The equal-height screw (11) is arranged on the adjusting support (8) below the rotating support (20), and the rotating angle of the rotating support (20) is limited.

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